JP4789856B2 - Manufacturing method of diaphragm for condenser microphone unit - Google Patents

Manufacturing method of diaphragm for condenser microphone unit Download PDF

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JP4789856B2
JP4789856B2 JP2007129091A JP2007129091A JP4789856B2 JP 4789856 B2 JP4789856 B2 JP 4789856B2 JP 2007129091 A JP2007129091 A JP 2007129091A JP 2007129091 A JP2007129091 A JP 2007129091A JP 4789856 B2 JP4789856 B2 JP 4789856B2
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mold
diaphragm material
diaphragm
negative pressure
imparting member
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JP2008288673A (en
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裕 秋野
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Audio Technica KK
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Description

本発明は、コンデンサマイクロホンユニットに用いられる振動板の製造方法に関し、さらに詳しく言えば、振動板素材を加熱して微細な凹凸を付与する際、振動板素材に皺が生じないようにする技術に関するものである。
The present invention relates to the production how the vibration plate used in a condenser microphone unit and, more particularly, in conferring fine irregularities by heating the diaphragm material, so as not to cause wrinkles in the diaphragm material It is about technology.

特に、小口径のコンデンサマイクロホンユニットにおいては、低域の収音特性を良好とするため、微細な凹凸が付与された振動板が用いられる(例えば、特許文献1参照)。   In particular, in a condenser microphone unit having a small diameter, a diaphragm provided with fine irregularities is used in order to improve sound collection characteristics in a low range (see, for example, Patent Document 1).

振動板素材には、熱可塑性樹脂フィルム(例えば、厚さ2μm程度のポリフェニレンサルファイド;PPS)の片面に金の薄膜を蒸着した金蒸着膜が用いられる。特許文献2には、振動板素材に微細な凹凸を付与する振動板の製造方法が開示されている。   As the diaphragm material, a gold vapor deposition film in which a gold thin film is vapor-deposited on one side of a thermoplastic resin film (for example, polyphenylene sulfide having a thickness of about 2 μm; PPS) is used. Patent Document 2 discloses a method for manufacturing a diaphragm that imparts fine irregularities to a diaphragm material.

この製造方法によると、表面に例えばメッシュ度#300程度の網体からなる微細な凹凸付与部材を有する金属製の成形型と、成形型を加熱する加熱手段および成形型を冷却する冷却手段と、成形型面上の凹凸付与部材に対して上方から加圧空気を吹き付ける加圧手段とが用いられ、次のようにして振動板素材に微細な凹凸が付与される。   According to this manufacturing method, for example, a metal mold having a fine unevenness forming member made of a net having a mesh degree of about # 300 on the surface, a heating means for heating the mold, and a cooling means for cooling the mold, A pressurizing unit that blows pressurized air from above on the unevenness imparting member on the mold surface is used, and fine unevenness is imparted to the diaphragm material as follows.

振動板素材を凹凸付与部材上に載置し加熱手段にて成形型を所定温度にまで加熱して振動板素材を軟化させたのち、加圧手段により加圧空気を吹き付けて振動板素材を凹凸付与部材に押し付けて振動板素材に微細な凹凸を付与し、その後、加熱手段による加熱を停止し、冷却手段により成形型および振動板素材を冷却する。   After placing the diaphragm material on the unevenness imparting member and heating the mold to a predetermined temperature with the heating means to soften the diaphragm material, the compressed air is blown by the pressure means to make the diaphragm material uneven The pressing member is pressed to give fine irregularities to the diaphragm material, and then the heating by the heating means is stopped, and the mold and the diaphragm material are cooled by the cooling means.

これによれば、凹凸付与部材が通気性を有する網体であり、加圧空気を吹き付けて振動板素材を凹凸付与部材に押し付ける際、振動板素材と成形型との間に存在する空気が横方向に逃げるため、振動板素材を凹凸付与部材に密着させることができる。   According to this, the unevenness imparting member is a breathable net, and when the diaphragm material is pressed against the unevenness imparting member by blowing pressurized air, the air existing between the diaphragm material and the molding die is lateral. In order to escape in the direction, the diaphragm material can be brought into close contact with the unevenness imparting member.

しかしながら、凹凸付与部材を含めて成形型を加熱手段により昇温して行くと、振動板素材は熱容量がきわめて小さいため、成形型と凹凸付与部材からの輻射熱を受けて温度が瞬時に上昇してしまう。   However, when the mold including the unevenness-imparting member is heated by the heating means, the diaphragm material has a very small heat capacity, so the temperature rises instantaneously due to the radiant heat from the mold and the unevenness-imparting member. End up.

通常、振動板素材には一軸延伸フィルムが用いられ、縦方向,横方向の熱膨張係数が異なることから、上記した輻射熱によって振動板素材に一方向に偏った皺が発生することがある。   Normally, a uniaxially stretched film is used as the diaphragm material, and the thermal expansion coefficients in the longitudinal direction and the transverse direction are different. Therefore, wrinkles that are biased in one direction may occur in the diaphragm material due to the radiant heat described above.

また、加圧する直前に振動板素材を凹凸付与部材上に配置したとしても、上記したように、振動板素材は熱容量がきわめて小さいため、やはり瞬時に皺が発生してしまうことになる。   Even if the diaphragm material is disposed on the unevenness imparting member immediately before pressurization, as described above, the diaphragm material has an extremely small heat capacity, so that wrinkles are instantly generated.

特開平2−202800号公報JP-A-2-202800 特開平2−237300号公報JP-A-2-237300

したがって、本発明の課題は、低域の収音特性を良好とするため、振動板素材を加熱して微細な凹凸を付与する際、振動板素材に皺が生じないようにすることにある。   Accordingly, an object of the present invention is to prevent wrinkles from being generated in the diaphragm material when the diaphragm material is heated to give fine irregularities in order to improve the low-frequency sound collection characteristics.

上記課題を解決するため、請求項1に記載の発明は、表面に網体からなる凹凸付与部材を有する金属製の成形型と、上記成形型を加熱する加熱手段および上記成形型を冷却する冷却手段と、上記成形型面上の上記凹凸付与部材に対して上方から加圧空気を吹き付ける加圧手段とを備え、熱可塑性樹脂製で縦方向,横方向の熱膨張係数が異なる薄膜の一軸延伸フィルムからなる振動板素材を上記凹凸付与部材上に載置して上記加熱手段にて上記成形型を所定温度にまで加熱する第1工程、上記加圧手段により加圧空気を吹き付けて上記振動板素材を上記凹凸付与部材に押し付け上記振動板素材に微細な凹凸を付与する第2工程、上記加熱手段による加熱を停止して上記冷却手段により上記成形型を冷却する第3工程を経てコンデンサマイクロホンユニット用の振動板を製造する方法において、上記成形型の表面に、負圧源に接続され負圧吸着作用を発揮する負圧吸着孔を開口し、少なくとも上記第1工程で上記振動板素材を上記冷却手段によりあらかじめ冷却されている上記凹凸付与部材上に載置してから、上記加熱手段にて上記成形型を所定温度にまで加熱するまでの間、上記負圧吸着孔に負圧吸着作用を発揮させて上記振動板素材を上記凹凸付与部材上に吸着固定することにより、上記振動板素材に熱による皺が発生しないようにしたことを特徴としている。
In order to solve the above-mentioned problems, the invention according to claim 1 is a metal mold having an unevenness imparting member made of a net on the surface, a heating means for heating the mold, and cooling for cooling the mold. Uniaxial stretching of a thin film made of a thermoplastic resin and having different thermal expansion coefficients in the longitudinal and lateral directions , and a pressurizing means for blowing pressurized air from above to the unevenness imparting member on the mold surface A vibration plate material made of a film is placed on the unevenness imparting member, and a first step of heating the mold to a predetermined temperature by the heating means. The second step of pressing the plate material against the unevenness imparting member to give fine irregularities to the diaphragm material, the third step of stopping the heating by the heating means and cooling the mold by the cooling means, the capacitor micro In the method of manufacturing a diaphragm for a single unit, a negative pressure adsorption hole that is connected to a negative pressure source and exhibits a negative pressure adsorption action is opened on the surface of the mold, and at least in the first step, the diaphragm material the after placed on the pre-cooled by being the uneven application member on by the cooling means, the between at heating means to the heating the mold to a predetermined temperature, a negative pressure suction to the negative pressure suction hole It is characterized in that wrinkles due to heat are not generated in the diaphragm material by exerting an action to adsorb and fix the diaphragm material on the unevenness imparting member.

請求項1の発明において、請求項2に記載されているように、上記第1工程に引き続き上記第2工程の凹凸付与時にかけて、上記負圧吸着孔に負圧吸着作用を発揮させて上記振動板素材を上記凹凸付与部材上に吸着固定することが好ましい。   In the first aspect of the present invention, as described in the second aspect, the negative pressure adsorption hole is caused to exert a negative pressure adsorption action in the second step subsequent to the first step when the unevenness is imparted in the second step, and the vibration. It is preferable to adsorb and fix the plate material on the unevenness imparting member.

本発明によれば、表面に網体からなる凹凸付与部材を有する成形型に、一端が負圧源に接続され、他端が成形型の表面に開口して負圧吸着作用を発揮する負圧吸着孔を設け、振動板素材を凹凸付与部材上に載置してから成形型を所定温度にまで加熱するまでの間、負圧吸着孔に負圧吸着作用を発揮させて振動板素材を凹凸付与部材上に吸着固定するようにしたことにより、振動板素材に熱による皺を発生させることなく、振動板素材に微細な凹凸を付与することができる。   According to the present invention, a negative pressure that exerts a negative pressure adsorbing action with one end connected to a negative pressure source and the other end opened to the surface of the molding die, having a concavo-convex imparting member made of a net on the surface. Between the time when the diaphragm material is placed on the unevenness imparting member after the suction hole is provided and the mold is heated to a predetermined temperature, the negative pressure adsorption hole exerts a negative pressure adsorption action to make the diaphragm material uneven. By adsorbing and fixing on the imparting member, fine irregularities can be imparted to the diaphragm material without causing wrinkles due to heat in the diaphragm material.

次に、図1により本発明の実施形態を説明するが、本発明はこれに限定されるものではない。図1は、本発明に係る振動板製造装置の一例を示す模式的な正面図である。   Next, an embodiment of the present invention will be described with reference to FIG. 1, but the present invention is not limited to this. FIG. 1 is a schematic front view showing an example of a diaphragm manufacturing apparatus according to the present invention.

図1に示すように、この振動板製造装置10は、装置の基本的な枠組みとして、下部基台11と、下部基台11の左右に立設された側枠12,12と、側枠12,12の上端間に下部基台11と平行に架設された上部基台13とを備えている。   As shown in FIG. 1, the diaphragm manufacturing apparatus 10 includes a lower base 11, side frames 12 and 12 erected on the left and right of the lower base 11, and a side frame 12 as a basic framework of the apparatus. , 12 is provided with an upper base 13 installed in parallel with the lower base 11.

下部基台11上には、内部に図示しない冷却水パイプが張り巡らされた冷却手段21が配置されている。この冷却手段21上に、スプリング22を介して支持台23が昇降可能に設けられている。支持台23は、その四隅がスプリング22にて支持されている。   On the lower base 11, a cooling means 21 in which a cooling water pipe (not shown) is stretched is disposed. A support base 23 is provided on the cooling means 21 via a spring 22 so as to be movable up and down. The support table 23 is supported at its four corners by springs 22.

支持台23の中央部分には開口部が設けられており、この開口部内に成形型24が支持されている。成形型24は金属製で、例えば電気ヒータからなる加熱手段25を備えている。成形型24は下降した際、加熱手段25の電源が切られ、成形型24の底面が冷却手段21に接触する。   An opening is provided in the central portion of the support base 23, and the mold 24 is supported in the opening. The mold 24 is made of metal and includes a heating means 25 made of, for example, an electric heater. When the mold 24 is lowered, the heating means 25 is turned off, and the bottom surface of the mold 24 contacts the cooling means 21.

成形型24の表面(上面)には、振動板素材50に微細な凹凸を付与する凹凸付与部材26が配置されている。   On the surface (upper surface) of the mold 24, an unevenness imparting member 26 that imparts fine unevenness to the diaphragm material 50 is disposed.

凹凸付与部材26は、成形型24の面となじむ十分な柔軟性を備えたナイロンなどの合成樹脂もしくは金属製で、例えば#300台程度の細かいメッシュが形成された網材、ニッケル,チタン,銅,黄銅,モネルメタル,ステンレス鋼などの金属繊維焼結体もしくは織布などが用いられてよい。   The unevenness imparting member 26 is made of a synthetic resin such as nylon or metal having sufficient flexibility to be compatible with the surface of the mold 24, for example, a net material on which fine meshes of about # 300 are formed, nickel, titanium, copper Metal fiber sintered bodies such as brass, monel metal, and stainless steel, or woven fabrics may be used.

振動板素材50には、熱可塑性樹脂フィルム(例えば、厚さ2μm程度のポリフェニレンサルファイド;PPS)の片面に金の薄膜を蒸着した金蒸着膜が用いられるが、加熱手段25による成形型24の加熱時に皺が発生しないようにするため、成形型24には振動板素材50を一時的に固定する固定手段が設けられている。   As the diaphragm material 50, a gold vapor deposition film in which a gold thin film is vapor-deposited on one surface of a thermoplastic resin film (for example, polyphenylene sulfide having a thickness of about 2 μm; PPS) is used. In order to prevent wrinkles from occurring at times, the mold 24 is provided with fixing means for temporarily fixing the diaphragm material 50.

本発明において、振動板素材50の固定手段は、成形型24に形成された負圧吸着孔27よりなる。負圧吸着孔27は、好ましくは成形型24の全体にわたって均等間隔で配置され、その一端は成形型24の表面に開口され、他端は負圧源である真空ポンプP1に接続されている。   In the present invention, the fixing means for the diaphragm material 50 is constituted by a negative pressure suction hole 27 formed in the mold 24. The negative pressure suction holes 27 are preferably arranged at equal intervals throughout the mold 24, one end thereof is opened on the surface of the mold 24, and the other end is connected to a vacuum pump P 1 which is a negative pressure source.

負圧吸着孔27の負圧吸着動作は、真空ポンプP1のオンオフもしくは負圧吸着孔27と真空ポンプP1との接続パイプ中に介装されている図示しない電磁弁のオンオフにより制御される。真空ポンプP1のオンオフもしくは上記電磁弁のオンオフは、図示しない制御部からの指示信号に基づいて行われる。   The negative pressure suction operation of the negative pressure suction hole 27 is controlled by turning on / off the vacuum pump P1 or turning on / off a solenoid valve (not shown) interposed in a connection pipe between the negative pressure suction hole 27 and the vacuum pump P1. The vacuum pump P1 is turned on / off or the electromagnetic valve is turned on / off based on an instruction signal from a control unit (not shown).

上部基台13上のほぼ中央には、エアーシリンダ30が搭載されている。エアーシリンダ30のシリンダロッド31は、上部基台13を貫通して下方(下部基台11側)に延ばされており、その下端には、加圧手段としての加圧ポット40が取り付けられている。   An air cylinder 30 is mounted almost at the center on the upper base 13. The cylinder rod 31 of the air cylinder 30 penetrates the upper base 13 and extends downward (lower base 11 side), and a pressurizing pot 40 as a pressurizing means is attached to the lower end thereof. Yes.

加圧ポット40は、下面が開放された加圧室41を有し、その開放端側には、気密用のOリング43が設けられている。加圧ポット40は、加圧ポンプP2に接続される加圧空気供給口42を備えている。加圧ポンプP2からの加圧空気の供給タイミングも上記制御部にて制御される。   The pressurizing pot 40 has a pressurizing chamber 41 whose bottom surface is open, and an airtight O-ring 43 is provided on the open end side. The pressurizing pot 40 includes a pressurized air supply port 42 connected to the pressurizing pump P2. The supply timing of pressurized air from the pressure pump P2 is also controlled by the control unit.

振動板を製造するには、冷却手段21にて冷却済みの成形型24の表面に置かれている凹凸付与部材26上に振動板素材50を配置したのち、真空ポンプP1をオンとして、負圧吸着孔27にて振動板素材50を凹凸付与部材26上に負圧吸着する(このとき、加圧ポンプP2はオフ状態)。   In order to manufacture the diaphragm, the diaphragm material 50 is disposed on the unevenness imparting member 26 placed on the surface of the mold 24 that has been cooled by the cooling means 21, and then the vacuum pump P1 is turned on and the negative pressure is applied. The diaphragm material 50 is adsorbed by negative pressure on the unevenness imparting member 26 through the adsorption holes 27 (at this time, the pressure pump P2 is in an off state).

次に、加熱手段25をオンとして成形型24の加熱を開始し、所定温度に達した時点で加熱手段25をオフとする。この加熱工程中、振動板素材50は負圧吸着孔27の負圧吸着作用にて固定されているため、加熱による皺が発生することはない。   Next, the heating means 25 is turned on and heating of the mold 24 is started. When the temperature reaches a predetermined temperature, the heating means 25 is turned off. During this heating process, the diaphragm material 50 is fixed by the negative pressure adsorption action of the negative pressure adsorption hole 27, so that no wrinkles are generated by heating.

その後、エアーシリンダ30にて加圧ポット40を下降させて、加圧ポット40のOリング43と凹凸付与部材26との間で振動板素材50を挟んで固定する。   Thereafter, the pressure pot 40 is lowered by the air cylinder 30, and the diaphragm material 50 is sandwiched and fixed between the O-ring 43 of the pressure pot 40 and the unevenness imparting member 26.

そして、加圧ポンプP2をオンとして、加圧室41から振動板素材50に向けて加圧空気を吹き出し振動板素材50を凹凸付与部材26に押し付ける。成形型24からの熱と加圧ポット40より供給される加圧空気とにより、振動板素材50に凹凸付与部材26の微細な凹凸が確実に付与される。   Then, the pressure pump P <b> 2 is turned on, the pressurized air is blown out from the pressure chamber 41 toward the diaphragm material 50, and the diaphragm material 50 is pressed against the unevenness imparting member 26. Due to the heat from the mold 24 and the pressurized air supplied from the pressure pot 40, the fine unevenness of the unevenness imparting member 26 is reliably imparted to the diaphragm material 50.

その後、成形型24を冷却手段21に接触させて、成形型24を冷却するとともに、負圧吸着孔27の負圧吸着を解除し、また、加圧ポンプP2をオフとしたうえで、エアシリンダ30を上昇させて、振動板素材50を凹凸付与部材26から剥離する。   Thereafter, the mold 24 is brought into contact with the cooling means 21 to cool the mold 24, release the negative pressure adsorption of the negative pressure suction hole 27, and turn off the pressure pump P2, and then turn the air cylinder 30 is raised, and the diaphragm material 50 is peeled off from the unevenness imparting member 26.

このようにして、本発明によれば、振動板素材50に熱に起因する皺を発生させることなく、凹凸付与部材26により振動板素材50に微細な凹凸を付与することができる。   Thus, according to the present invention, fine unevenness can be imparted to the diaphragm material 50 by the unevenness imparting member 26 without causing wrinkles due to heat in the diaphragm material 50.

なお、上記実施形態では、成形型24を冷却する工程まで振動板素材50を負圧吸着するようにしているが、加圧ポット40を下降させて、加圧ポット40のOリング43と凹凸付与部材26との間で振動板素材50を挟んで固定した時点で、振動板素材50に対する負圧吸着を解除してもよい。   In the above embodiment, the diaphragm material 50 is adsorbed under negative pressure until the step of cooling the molding die 24. However, the pressurizing pot 40 is lowered to provide unevenness with the O-ring 43 of the pressurizing pot 40. The negative pressure adsorption on the diaphragm material 50 may be released when the diaphragm material 50 is fixed between the member 26 and the member 26.

また、振動板素材50と凹凸付与部材26との間に存在する空気は、凹凸付与部材26が網体で通気性を有することから、凹凸付与部材26の側方に自然に排出されるが、本発明によれば、振動板素材50と凹凸付与部材26との間に存在する空気は、負圧吸着孔27より真空ポンプP1に強制的に吸引されるため、振動板素材50と成形型24との間に空気だまりができることはまずもってない。   Further, the air existing between the diaphragm material 50 and the unevenness imparting member 26 is naturally discharged to the side of the unevenness imparting member 26 because the unevenness imparting member 26 is a net body and has air permeability. According to the present invention, the air existing between the diaphragm material 50 and the unevenness imparting member 26 is forcibly sucked into the vacuum pump P1 from the negative pressure suction hole 27. It is unlikely that there will be air accumulation between them.

本発明に係る振動板製造装置の一例を示す模式的な正面図。The typical front view which shows an example of the diaphragm manufacturing apparatus which concerns on this invention.

符号の説明Explanation of symbols

10 振動板製造装置
11 下部基台
12 側枠
13 上部基台
21 冷却手段
22 スプリング
23 支持台
24 成形型
25 加熱手段
26 凹凸付与部材
27 負圧吸着孔
30 エアシリンダ
40 加圧ポット
50 振動板素材
P1 真空ポンプ
P2 加圧ポンプ
DESCRIPTION OF SYMBOLS 10 Diaphragm manufacturing apparatus 11 Lower base 12 Side frame 13 Upper base 21 Cooling means 22 Spring 23 Support base 24 Mold 25 Heating means 26 Concavity and convexity imparting member 27 Negative pressure adsorption hole 30 Air cylinder 40 Pressure pot 50 Vibration plate material P1 Vacuum pump P2 Pressure pump

Claims (2)

表面に網体からなる凹凸付与部材を有する金属製の成形型と、上記成形型を加熱する加熱手段および上記成形型を冷却する冷却手段と、上記成形型面上の上記凹凸付与部材に対して上方から加圧空気を吹き付ける加圧手段とを備え、
熱可塑性樹脂製で縦方向,横方向の熱膨張係数が異なる薄膜の一軸延伸フィルムからなる振動板素材を上記凹凸付与部材上に載置して上記加熱手段にて上記成形型を所定温度にまで加熱する第1工程、上記加圧手段により加圧空気を吹き付けて上記振動板素材を上記凹凸付与部材に押し付け上記振動板素材に微細な凹凸を付与する第2工程、上記加熱手段による加熱を停止して上記冷却手段により上記成形型を冷却する第3工程を経てコンデンサマイクロホンユニット用の振動板を製造する方法において、
上記成形型の表面に、負圧源に接続され負圧吸着作用を発揮する負圧吸着孔を開口し、少なくとも上記第1工程で上記振動板素材を上記冷却手段によりあらかじめ冷却されている上記凹凸付与部材上に載置してから、上記加熱手段にて上記成形型を所定温度にまで加熱するまでの間、上記負圧吸着孔に負圧吸着作用を発揮させて上記振動板素材を上記凹凸付与部材上に吸着固定することにより、上記振動板素材に熱による皺が発生しないようにしたことを特徴とするコンデンサマイクロホンユニット用振動板の製造方法。
A metal mold having an unevenness-imparting member made of a net on the surface, a heating means for heating the mold, a cooling means for cooling the mold, and the unevenness-imparting member on the surface of the mold Pressure means for blowing pressurized air from above,
A diaphragm material made of a thin film uniaxially stretched film made of a thermoplastic resin and having different thermal expansion coefficients in the vertical and horizontal directions is placed on the unevenness imparting member, and the mold is brought to a predetermined temperature by the heating means. A first step of heating up to a second step of spraying pressurized air by the pressurizing means to press the diaphragm material against the irregularity imparting member and imparting fine irregularities to the diaphragm material, heating by the heating means In a method for producing a diaphragm for a condenser microphone unit through a third step of stopping and cooling the mold by the cooling means,
Opening a negative pressure adsorption hole that is connected to a negative pressure source and exerts a negative pressure adsorption action on the surface of the mold, and the unevenness that has been cooled in advance by the cooling means at least in the first step. After placing on the imparting member, the negative pressure adsorption hole exerts a negative pressure adsorption action until the mold is heated to a predetermined temperature by the heating means, and the diaphragm material is made uneven. A method of manufacturing a diaphragm for a condenser microphone unit, wherein the diaphragm material is prevented from being wrinkled by heat by adsorbing and fixing on an application member.
上記第1工程に引き続き上記第2工程の凹凸付与時にかけて、上記負圧吸着孔に負圧吸着作用を発揮させて上記振動板素材を上記凹凸付与部材上に吸着固定することを特徴とする請求項1に記載のコンデンサマイクロホンユニット用振動板の製造方法。   The diaphragm material is adsorbed and fixed on the irregularity-imparting member by causing the negative-pressure adsorption hole to exert a negative-pressure adsorption action during the irregularity imparting in the second step following the first step. Item 2. A method for manufacturing a diaphragm for a condenser microphone unit according to Item 1.
JP2007129091A 2007-05-15 2007-05-15 Manufacturing method of diaphragm for condenser microphone unit Expired - Fee Related JP4789856B2 (en)

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JP5358305B2 (en) * 2009-06-15 2013-12-04 株式会社オーディオテクニカ Manufacturing method of diaphragm assembly for condenser microphone and supporting base applied to the same
KR101124495B1 (en) * 2009-09-14 2012-03-21 (주)후세메닉스 Apparatus for Laminating and Flatting Printed Circuit Board in One Process and Controlling Method for the Same
JP5365716B2 (en) * 2012-03-22 2013-12-11 東洋製罐株式会社 Method for molding thermoplastic resin product and molding apparatus therefor
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CN103826829B (en) * 2011-07-11 2015-12-23 Scivax股份有限公司 There is the fluid imprinting apparatus of the setting tool for pressurization part
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