JP4784168B2 - 圧電振動片および圧電デバイス - Google Patents
圧電振動片および圧電デバイス Download PDFInfo
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- JP4784168B2 JP4784168B2 JP2005183332A JP2005183332A JP4784168B2 JP 4784168 B2 JP4784168 B2 JP 4784168B2 JP 2005183332 A JP2005183332 A JP 2005183332A JP 2005183332 A JP2005183332 A JP 2005183332A JP 4784168 B2 JP4784168 B2 JP 4784168B2
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- 230000008859 change Effects 0.000 claims description 29
- 239000000463 material Substances 0.000 claims description 20
- 238000005530 etching Methods 0.000 description 25
- 238000005452 bending Methods 0.000 description 22
- 239000000758 substrate Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 15
- 239000000853 adhesive Substances 0.000 description 14
- 230000001070 adhesive effect Effects 0.000 description 14
- 230000005684 electric field Effects 0.000 description 11
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 10
- 239000013078 crystal Substances 0.000 description 10
- 230000005284 excitation Effects 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 239000010453 quartz Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 230000010355 oscillation Effects 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- 235000014676 Phragmites communis Nutrition 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000009467 reduction Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000000605 extraction Methods 0.000 description 5
- 238000001039 wet etching Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 238000005304 joining Methods 0.000 description 4
- 101000760620 Homo sapiens Cell adhesion molecule 1 Proteins 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 244000273256 Phragmites communis Species 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 101000911772 Homo sapiens Hsc70-interacting protein Proteins 0.000 description 1
- 101001139126 Homo sapiens Krueppel-like factor 6 Proteins 0.000 description 1
- 101000710013 Homo sapiens Reversion-inducing cysteine-rich protein with Kazal motifs Proteins 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- BYDQGSVXQDOSJJ-UHFFFAOYSA-N [Ge].[Au] Chemical compound [Ge].[Au] BYDQGSVXQDOSJJ-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 108090000237 interleukin-24 Proteins 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005183332A JP4784168B2 (ja) | 2005-06-23 | 2005-06-23 | 圧電振動片および圧電デバイス |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005183332A JP4784168B2 (ja) | 2005-06-23 | 2005-06-23 | 圧電振動片および圧電デバイス |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010103162A Division JP2010246126A (ja) | 2010-04-28 | 2010-04-28 | 圧電振動片および圧電デバイス |
| JP2011000425A Division JP5045822B2 (ja) | 2011-01-05 | 2011-01-05 | 圧電振動片および圧電デバイス |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007006091A JP2007006091A (ja) | 2007-01-11 |
| JP2007006091A5 JP2007006091A5 (enrdf_load_stackoverflow) | 2008-07-24 |
| JP4784168B2 true JP4784168B2 (ja) | 2011-10-05 |
Family
ID=37691270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005183332A Expired - Fee Related JP4784168B2 (ja) | 2005-06-23 | 2005-06-23 | 圧電振動片および圧電デバイス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4784168B2 (enrdf_load_stackoverflow) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4993080B2 (ja) * | 2007-01-22 | 2012-08-08 | セイコーエプソン株式会社 | 音叉型圧電振動片 |
| JP4553157B2 (ja) | 2007-11-20 | 2010-09-29 | エプソントヨコム株式会社 | 音叉型圧電振動片及び音叉型圧電振動子 |
| JP5353486B2 (ja) * | 2009-06-30 | 2013-11-27 | セイコーエプソン株式会社 | 振動片および振動子 |
| JP2011199330A (ja) * | 2010-03-17 | 2011-10-06 | Seiko Epson Corp | 振動片、振動子、発振器 |
| JP5057122B2 (ja) * | 2010-06-25 | 2012-10-24 | セイコーエプソン株式会社 | 圧電振動片および圧電振動子 |
| JP6281254B2 (ja) | 2013-11-16 | 2018-02-21 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
| JP7677849B2 (ja) * | 2021-08-02 | 2025-05-15 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子および発振器 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3811226B2 (ja) * | 1996-07-26 | 2006-08-16 | トヨタ自動車株式会社 | 水晶振動子及びその製造方法 |
| JP2003133897A (ja) * | 2001-08-14 | 2003-05-09 | Seiko Epson Corp | 圧電デバイスと圧電デバイスを利用した携帯電話装置及び圧電デバイスを利用した電子機器 |
| JP3646258B2 (ja) * | 2001-10-31 | 2005-05-11 | 有限会社ピエデック技術研究所 | 水晶ユニットとその製造方法 |
| JP2004208237A (ja) * | 2002-12-26 | 2004-07-22 | Seiko Epson Corp | 圧電デバイスと圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
| JP3873902B2 (ja) * | 2003-02-21 | 2007-01-31 | セイコーエプソン株式会社 | 圧電デバイスとその製造方法ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
| JP3978783B2 (ja) * | 2003-03-25 | 2007-09-19 | セイコーエプソン株式会社 | 圧電デバイスと圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
| JP4019990B2 (ja) * | 2003-03-26 | 2007-12-12 | セイコーエプソン株式会社 | 圧電振動片と圧電デバイスの製造方法 |
| JP4049017B2 (ja) * | 2003-05-16 | 2008-02-20 | セイコーエプソン株式会社 | 圧電振動子 |
| JP4356366B2 (ja) * | 2003-06-10 | 2009-11-04 | セイコーエプソン株式会社 | 圧電振動片、圧電振動片の製造方法および圧電振動子、圧電振動子を搭載した電子機器 |
| JP2005094724A (ja) * | 2003-09-17 | 2005-04-07 | Herutsu Kk | 音叉型水晶振動子 |
| JP4033100B2 (ja) * | 2003-09-29 | 2008-01-16 | セイコーエプソン株式会社 | 圧電デバイスと圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
| JP4211578B2 (ja) * | 2003-11-13 | 2009-01-21 | セイコーエプソン株式会社 | 圧電振動片とその製造方法、ならびに圧電デバイスおよび圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
-
2005
- 2005-06-23 JP JP2005183332A patent/JP4784168B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007006091A (ja) | 2007-01-11 |
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