JP4781609B2 - ファンユニット - Google Patents
ファンユニット Download PDFInfo
- Publication number
- JP4781609B2 JP4781609B2 JP2002567751A JP2002567751A JP4781609B2 JP 4781609 B2 JP4781609 B2 JP 4781609B2 JP 2002567751 A JP2002567751 A JP 2002567751A JP 2002567751 A JP2002567751 A JP 2002567751A JP 4781609 B2 JP4781609 B2 JP 4781609B2
- Authority
- JP
- Japan
- Prior art keywords
- air flow
- fan
- fan unit
- guide
- baffle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000463 material Substances 0.000 claims description 3
- 230000007704 transition Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- 239000012774 insulation material Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Images
Landscapes
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/SG2001/000027 WO2002068879A1 (en) | 2001-02-26 | 2001-02-26 | Fan unit |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004522125A JP2004522125A (ja) | 2004-07-22 |
| JP2004522125A5 JP2004522125A5 (enExample) | 2005-09-22 |
| JP4781609B2 true JP4781609B2 (ja) | 2011-09-28 |
Family
ID=29398797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002567751A Expired - Fee Related JP4781609B2 (ja) | 2001-02-26 | 2001-02-26 | ファンユニット |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP1364169B1 (enExample) |
| JP (1) | JP4781609B2 (enExample) |
| DE (1) | DE60105321T2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6078269B2 (ja) * | 2012-08-30 | 2017-02-08 | 東プレ株式会社 | 送風ユニット |
| KR102250511B1 (ko) * | 2020-10-08 | 2021-05-11 | 삼성엔지니어링 주식회사 | 低 정압 팬필터유닛 및 이를 포함하는 클린룸 설비 |
| TWI771851B (zh) * | 2020-12-29 | 2022-07-21 | 惠亞工程股份有限公司 | 過濾設備 |
| CN119802024B (zh) * | 2024-12-26 | 2025-09-09 | 常州威图流体科技有限公司 | 多级引流风扇 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4560395A (en) * | 1984-04-17 | 1985-12-24 | Environmental Air Control, Inc. | Compact blower and filter assemblies for use in clean air environments |
| JPS61114036A (ja) * | 1984-10-23 | 1986-05-31 | ゲプハルト フェンチラトーレン ゲーエムベーハー ウント コンパニー | 屋根用通風装置 |
| JPS61147392A (ja) * | 1984-12-20 | 1986-07-05 | 富士通株式会社 | 紙幣鑑別センサのクリ−ニング装置 |
| JPH0319133U (enExample) * | 1989-07-05 | 1991-02-25 | ||
| JPH0994419A (ja) * | 1995-09-29 | 1997-04-08 | Takasago Thermal Eng Co Ltd | ファンフィルタユニット |
| JP2000508419A (ja) * | 1997-09-03 | 2000-07-04 | リー、ゾン・タン | フアンフイルータユニットからのノイズを最小にするための方法並びに装置 |
| WO2001023764A1 (en) * | 1999-09-30 | 2001-04-05 | Kyodo-Allied Industries Ltd | Apparatus for minimising noise in a fan unit |
-
2001
- 2001-02-26 DE DE60105321T patent/DE60105321T2/de not_active Expired - Lifetime
- 2001-02-26 EP EP01914318A patent/EP1364169B1/en not_active Expired - Lifetime
- 2001-02-26 JP JP2002567751A patent/JP4781609B2/ja not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4560395A (en) * | 1984-04-17 | 1985-12-24 | Environmental Air Control, Inc. | Compact blower and filter assemblies for use in clean air environments |
| JPS61114036A (ja) * | 1984-10-23 | 1986-05-31 | ゲプハルト フェンチラトーレン ゲーエムベーハー ウント コンパニー | 屋根用通風装置 |
| JPS61147392A (ja) * | 1984-12-20 | 1986-07-05 | 富士通株式会社 | 紙幣鑑別センサのクリ−ニング装置 |
| JPH0319133U (enExample) * | 1989-07-05 | 1991-02-25 | ||
| JPH0994419A (ja) * | 1995-09-29 | 1997-04-08 | Takasago Thermal Eng Co Ltd | ファンフィルタユニット |
| JP2000508419A (ja) * | 1997-09-03 | 2000-07-04 | リー、ゾン・タン | フアンフイルータユニットからのノイズを最小にするための方法並びに装置 |
| WO2001023764A1 (en) * | 1999-09-30 | 2001-04-05 | Kyodo-Allied Industries Ltd | Apparatus for minimising noise in a fan unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004522125A (ja) | 2004-07-22 |
| EP1364169B1 (en) | 2004-09-01 |
| DE60105321T2 (de) | 2005-09-29 |
| EP1364169A1 (en) | 2003-11-26 |
| DE60105321D1 (de) | 2004-10-07 |
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