JP4778024B2 - スリット式レオメータ - Google Patents
スリット式レオメータ Download PDFInfo
- Publication number
- JP4778024B2 JP4778024B2 JP2008159808A JP2008159808A JP4778024B2 JP 4778024 B2 JP4778024 B2 JP 4778024B2 JP 2008159808 A JP2008159808 A JP 2008159808A JP 2008159808 A JP2008159808 A JP 2008159808A JP 4778024 B2 JP4778024 B2 JP 4778024B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- rheometer
- recesses
- wafer
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
- G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
- G01M13/02—Gearings; Transmission mechanisms
- G01M13/022—Power-transmitting couplings or clutches
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
- G01N11/02—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by measuring flow of the material
- G01N11/04—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by measuring flow of the material through a restricted passage, e.g. tube, aperture
- G01N11/08—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by measuring flow of the material through a restricted passage, e.g. tube, aperture by measuring pressure required to produce a known flow
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Fluid Mechanics (AREA)
- Measuring Fluid Pressure (AREA)
Description
Claims (8)
- スリット式レオメータであって、
圧力センサ膜と圧力センサ基板との接合により形成されたモノリシック集積型圧力センサを有するレオメータプレートと、ここで、レオメータプレートは、圧力センサ膜と圧力センサ基板の一方又は両方に形成された複数の空洞と、各空洞上に延在する圧力センサ膜の部分であって、その部分に加わる圧力によって各空洞内へ撓み、その撓み量が各空洞上の膜に加わる圧力の測定値を提供する圧力センサ膜の部分と、各空洞内に形成された圧力センサであって、平滑面を有するレオメータプレートを提供する共に、レオメータプレート内に複数の個別の圧力センサを提供する圧力センサとを有するものであり、
それぞれが異なる寸法を有し、直列に連結一体化された複数の凹部を備えた流路プレートとを含み、ここで、前記流路プレートと前記レオメータプレートは組合されるように適合され、それによって、複数の凹部は流路プレート内に液体流路を形成し、前記液体流路は、流入口及び流出口を有すると共に、液体流路を形成する複数の凹部の各々に位置する少なくとも2個の個別の圧力センサを有し、又、前記凹部は、その内部で十分に発達した流れが確保される程に十分長く、それによって、液体を流すための手段を用いて液体の流れを発生させた際に、液体流路を形成する凹部の各々を通る液体の十分に発達した流れの圧力低下を測定できる、スリット式レオメータ。 - 液体流路を形成する複数の凹部は、2個の凹部である請求項1に記載のスリット式レオメータ。
- 液体流路を形成する複数の凹部は、3個の凹部である請求項1に記載のスリット式レオメータ。
- 液体流路を形成する複数の凹部の各々は幅と深さとを有し、又、それら凹部の各々は異なる深さを有する請求項1に記載のスリット式レオメータ。
- 液体流路を形成する複数の凹部の各々の幅は、凹部の深さの少なくとも10倍よりも大きい請求項4に記載のスリット式レオメータ。
- 液体流路を形成する複数の凹部の各々は幅と深さとを有し、又、それら凹部の各々は異なる幅を有する請求項1に記載のスリット式レオメータ。
- 液体流路を形成する複数の凹部の各々の深さは、凹部の幅の少なくとも10倍よりも大きい請求項6に記載のスリット式レオメータ。
- 圧力センサは、容量型圧力センサである請求項1に記載のスリット式レオメータ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US33537501P | 2001-10-31 | 2001-10-31 | |
US60/335,375 | 2001-10-31 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003540610A Division JP4272525B2 (ja) | 2001-10-31 | 2002-10-31 | レオメータ用圧力検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008286802A JP2008286802A (ja) | 2008-11-27 |
JP4778024B2 true JP4778024B2 (ja) | 2011-09-21 |
Family
ID=23311513
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003540610A Expired - Lifetime JP4272525B2 (ja) | 2001-10-31 | 2002-10-31 | レオメータ用圧力検出装置 |
JP2008159808A Expired - Lifetime JP4778024B2 (ja) | 2001-10-31 | 2008-06-18 | スリット式レオメータ |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003540610A Expired - Lifetime JP4272525B2 (ja) | 2001-10-31 | 2002-10-31 | レオメータ用圧力検出装置 |
Country Status (6)
Country | Link |
---|---|
US (2) | US6892583B2 (ja) |
EP (1) | EP1451546B1 (ja) |
JP (2) | JP4272525B2 (ja) |
KR (1) | KR100955984B1 (ja) |
CN (1) | CN100385218C (ja) |
WO (1) | WO2003038388A1 (ja) |
Families Citing this family (41)
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US7104141B2 (en) * | 2003-09-04 | 2006-09-12 | Baker Hughes Incorporated | Optical sensor with co-located pressure and temperature sensors |
EP2417906B1 (en) * | 2003-10-10 | 2015-04-15 | Given Imaging (Los Angeles) LLC | Method of configuring a pressure sensing catheter, and catheter sheath |
DE10350554A1 (de) * | 2003-10-29 | 2005-06-02 | Thermo Electron (Karlsruhe) Gmbh | Rheometer |
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US7272976B2 (en) * | 2004-03-30 | 2007-09-25 | Asml Holdings N.V. | Pressure sensor |
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US7179668B2 (en) * | 2005-04-25 | 2007-02-20 | Delphi Technologies, Inc. | Technique for manufacturing silicon structures |
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CN102564898A (zh) * | 2010-12-30 | 2012-07-11 | 国家纳米技术与工程研究院 | 用于测量微米体积样品粘度和弹性的微流变计及制作方法 |
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CN103454018B (zh) * | 2012-05-31 | 2015-09-09 | 上海丽恒光微电子科技有限公司 | 压力传感器、振荡器、超声波传感器及测量方法 |
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-
2002
- 2002-10-31 JP JP2003540610A patent/JP4272525B2/ja not_active Expired - Lifetime
- 2002-10-31 WO PCT/US2002/035290 patent/WO2003038388A1/en active Application Filing
- 2002-10-31 US US10/286,602 patent/US6892583B2/en not_active Expired - Lifetime
- 2002-10-31 EP EP02802527.8A patent/EP1451546B1/en not_active Expired - Lifetime
- 2002-10-31 KR KR1020047006615A patent/KR100955984B1/ko active IP Right Grant
- 2002-10-31 CN CNB02826519XA patent/CN100385218C/zh not_active Expired - Lifetime
-
2005
- 2005-05-17 US US11/132,093 patent/US20050210964A1/en not_active Abandoned
-
2008
- 2008-06-18 JP JP2008159808A patent/JP4778024B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR100955984B1 (ko) | 2010-05-04 |
US20030079547A1 (en) | 2003-05-01 |
EP1451546A1 (en) | 2004-09-01 |
US6892583B2 (en) | 2005-05-17 |
US20050210964A1 (en) | 2005-09-29 |
KR20040066801A (ko) | 2004-07-27 |
WO2003038388A1 (en) | 2003-05-08 |
EP1451546B1 (en) | 2018-02-28 |
CN100385218C (zh) | 2008-04-30 |
JP4272525B2 (ja) | 2009-06-03 |
CN1610823A (zh) | 2005-04-27 |
JP2008286802A (ja) | 2008-11-27 |
JP2005539200A (ja) | 2005-12-22 |
EP1451546A4 (en) | 2007-05-23 |
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