JP4272525B2 - レオメータ用圧力検出装置 - Google Patents
レオメータ用圧力検出装置 Download PDFInfo
- Publication number
- JP4272525B2 JP4272525B2 JP2003540610A JP2003540610A JP4272525B2 JP 4272525 B2 JP4272525 B2 JP 4272525B2 JP 2003540610 A JP2003540610 A JP 2003540610A JP 2003540610 A JP2003540610 A JP 2003540610A JP 4272525 B2 JP4272525 B2 JP 4272525B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
- G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
- G01M13/02—Gearings; Transmission mechanisms
- G01M13/022—Power-transmitting couplings or clutches
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
- G01N11/02—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by measuring flow of the material
- G01N11/04—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by measuring flow of the material through a restricted passage, e.g. tube, aperture
- G01N11/08—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by measuring flow of the material through a restricted passage, e.g. tube, aperture by measuring pressure required to produce a known flow
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Fluid Mechanics (AREA)
- Measuring Fluid Pressure (AREA)
Description
Claims (17)
- 圧力センサの位置においてプレートの平滑測定面に加わる圧力を測定するように、間隔を置いて配置されている複数の圧力センサをその内部に有するプレートであって、
液体が作用し得る平滑測定面を有するプレートと、該測定面の下方の該プレート内に設けられた複数の別個の空洞と、該複数の別個の空洞の各々の上に延在する該プレートの測定面の変形可能部分であって、そこに加わる圧力に呼応して空洞内に弾性的に撓み得る変形可能部分と、該複数の別個の各空洞内の単一センサであって、各々が該空洞上に延在する測定面の変形可能部分と連携して変形可能部分の変形の検出が可能で、且つ検出した単一の変形を示す出力の提供が可能な単一センサとを有し、変形可能部分の変形がその部分に加えられた圧力の指標となるプレート。 - 測定面が基板に固定されたウェハにより形成されている、請求項1に記載の複数の圧力センサを有するプレート。
- 空洞がウェハ内に設けられたウェルにより形成されており、また、このウェルによってウェル上に延在するウェハの薄状部と測定面の変形可能部分とが形成されている、請求項2に記載の複数の圧力センサを有するプレート。
- 空洞が基板内に設けられたウェルにより形成されており、基板内のウェル上に延在するウェハの部分が測定面の変形可能部分を形成している、請求項2に記載の複数の圧力センサを有するプレート。
- 更に、ウェハと基板との間にスペーサを有し、空洞がスペーサ内に延在する開口部により形成されており、スペーサ内の開口部上に延在するウェハの部分が測定面の変形可能部分を形成している、請求項2に記載の複数の圧力センサを有するプレート。
- 測定面の変形可能部分が各空洞の一側面を形成し、基板がそれに対向する側面を形成しており、センサが、各空洞内において測定面の変形可能部分に設けられたコンデンサプレートと該空洞の対向側面の基板に設けられたコンデンサプレートとから形成された容量型センサである、請求項2に記載の複数の圧力センサを有するプレート。
- コンデンサプレートが、空洞の対向する側面に蒸着された導電層により形成されている、請求項6に記載の複数の圧力センサを有するプレート。
- 更に、各コンデンサプレートからセンサ回路接続用接触パッドへ延在する導電性リード線を有する、請求項7に記載の複数の圧力センサを有するプレート。
- 測定面の変形可能部分が各空洞の一側面を形成し、基板がそれに対向する側面を形成しており、センサが、各空洞内で測定面の変形可能部分に設けられた反射鏡と、該空洞の対向側面の基板に設けられた部分的に透明な層と、光の一部が部分的透明層を通過して反射鏡へ向かい、また、光の一部が部分的透明層から反射され、これによって反射鏡に向かって通過した光の少なくとも一部が反射されて部分的透明層を通過し、部分的透明層から反射した光と相互作用して干渉パターンを形成するように、光を部分的透明層へ指向させる光源と、干渉パターン内の一定の位置において光の強度を検出するセンサとから形成される光学センサであり、検出された光の強度が変形可能部分の変形の指標となる、請求項2に記載の複数の圧力センサを有するプレート。
- 更に、測定面上に保護層を有する、請求項1に記載の複数の圧力センサを有するプレート。
- 更に、各空洞から大気につながる空気流路を有する、請求項1に記載の複数の圧力センサを有するプレート。
- 更にその内部に、検出物体の測定面からの距離を測定するための近接センサを有する、請求項1に記載の複数の圧力センサを有するプレート。
- 近接センサが容量型センサである、請求項12に記載の複数の圧力センサを有するプレート。
- 各変形可能部分の長さがプレートの長さの1/4未満である、請求項1に記載の複数の圧力センサを有するプレート。
- 複数のセンサの測定感度がそれぞれ異なっている、請求項1に記載の複数の圧力センサを有するプレート。
- 少なくとも1つの温度センサを更に有し、該少なくとも1つの温度センサは該プレートの該測定面の温度を測定する、請求項1に記載の複数の圧力センサを有するプレート。
- 複数の温度センサを更に有し、該複数の温度センサは該温度センサの位置において該プレートの該測定面の温度を測定する、請求項1に記載の複数の圧力センサを有するプレート。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US33537501P | 2001-10-31 | 2001-10-31 | |
PCT/US2002/035290 WO2003038388A1 (en) | 2001-10-31 | 2002-10-31 | Pressure sensing device for rheometers |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008159808A Division JP4778024B2 (ja) | 2001-10-31 | 2008-06-18 | スリット式レオメータ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005539200A JP2005539200A (ja) | 2005-12-22 |
JP4272525B2 true JP4272525B2 (ja) | 2009-06-03 |
Family
ID=23311513
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003540610A Expired - Lifetime JP4272525B2 (ja) | 2001-10-31 | 2002-10-31 | レオメータ用圧力検出装置 |
JP2008159808A Expired - Lifetime JP4778024B2 (ja) | 2001-10-31 | 2008-06-18 | スリット式レオメータ |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
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JP2008159808A Expired - Lifetime JP4778024B2 (ja) | 2001-10-31 | 2008-06-18 | スリット式レオメータ |
Country Status (6)
Country | Link |
---|---|
US (2) | US6892583B2 (ja) |
EP (1) | EP1451546B1 (ja) |
JP (2) | JP4272525B2 (ja) |
KR (1) | KR100955984B1 (ja) |
CN (1) | CN100385218C (ja) |
WO (1) | WO2003038388A1 (ja) |
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2002
- 2002-10-31 JP JP2003540610A patent/JP4272525B2/ja not_active Expired - Lifetime
- 2002-10-31 EP EP02802527.8A patent/EP1451546B1/en not_active Expired - Lifetime
- 2002-10-31 KR KR1020047006615A patent/KR100955984B1/ko active IP Right Grant
- 2002-10-31 WO PCT/US2002/035290 patent/WO2003038388A1/en active Application Filing
- 2002-10-31 CN CNB02826519XA patent/CN100385218C/zh not_active Expired - Lifetime
- 2002-10-31 US US10/286,602 patent/US6892583B2/en not_active Expired - Lifetime
-
2005
- 2005-05-17 US US11/132,093 patent/US20050210964A1/en not_active Abandoned
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Also Published As
Publication number | Publication date |
---|---|
EP1451546A4 (en) | 2007-05-23 |
US6892583B2 (en) | 2005-05-17 |
JP4778024B2 (ja) | 2011-09-21 |
CN100385218C (zh) | 2008-04-30 |
WO2003038388A1 (en) | 2003-05-08 |
US20030079547A1 (en) | 2003-05-01 |
EP1451546B1 (en) | 2018-02-28 |
EP1451546A1 (en) | 2004-09-01 |
KR100955984B1 (ko) | 2010-05-04 |
JP2008286802A (ja) | 2008-11-27 |
US20050210964A1 (en) | 2005-09-29 |
CN1610823A (zh) | 2005-04-27 |
KR20040066801A (ko) | 2004-07-27 |
JP2005539200A (ja) | 2005-12-22 |
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