JP4773829B2 - Product transport system - Google Patents

Description

  The present invention relates to a product conveyance system that manages product conveyance in a product manufacturing factory, and more particularly, to a product conveyance system that manages product conveyance of semiconductor products.

  Up until now, product manufacturing plants that handle semiconductor products, etc., have mainly used PUSH type (planned production) production that controls the product input so that production equipment is always in process. However, in recent years, small quantities and various types have progressed, and it has become important to produce only the necessary amount when necessary, and the production has changed to PULL type (custom order production). In this PULL type production, how quickly a product is conveyed to the next process is important for improving production efficiency.

  However, in the conventional conveyance method, in product conveyance, wasteful time is generated between the completion of product processing by the processing apparatus and the start of product conveyance, which hinders improvement in production efficiency. Therefore, it is important to eliminate the wasted time in the product conveyance in order to improve the production efficiency in the PULL type production, and it is also important to shorten the production delivery time.

Hereinafter, various forms of such a conventional product transfer system for semiconductor products will be described with reference to the drawings.
[Conventional example 1]

  First, the configuration of the product transfer system for semiconductor products in this example will be described. FIG. 7 is a schematic configuration diagram schematically showing the configuration of the product transfer system for the semiconductor product.

  As shown in FIG. 7, the product transport system includes a plurality of processing devices 210 that continuously perform a series of processing on semiconductor products, a stocker 220 that temporarily stores semiconductor products, and these processing devices. An automatic transport vehicle 230 that transports semiconductor products between 210 and the stocker 220 is configured.

  In such a configuration, the processing apparatus 210 continuously performs a series of processing on the semiconductor product. The stocker 220 temporarily stores the processed semiconductor product. The semiconductor product is transported between the processing device 210 and the stocker 220 by an automatic transport vehicle 230.

  Next, the operation of the product transfer system for the semiconductor product will be described. FIG. 8 is a timing diagram of the product transfer system for the semiconductor product.

As shown in FIGS. 7 and 8, the processing apparatus 210 includes a first stage 211 and a second stage 212 for installing a semiconductor product (hereinafter simply referred to as a product A). When the processing of the product A installed on the first stage 211 is completed, the processing apparatus 210 transmits a product processing completion signal S67 to the host computer 250. Receiving this, the host computer 250 transmits a movement command signal S80 to the automatic conveyance vehicle 230 so as to move to the position of the processing apparatus 210. Receiving this, the automated guided vehicle 230 moves to the position of the processing device 210 and transmits a movement completion signal S81. Receiving this, the host computer 250 transmits a product reception start signal S82 for instructing the automatic conveyance vehicle 230 to start receiving the product A. Receiving this, the automated guided vehicle 230 receives the product A from the processing apparatus 210 and transmits a product reception completion signal S83 to the host computer 250. Receiving this, the host computer 250 transmits a movement command signal S80 to the automatic transport vehicle 230 so as to transport the product A to the stocker 220. Receiving this, the automatic transport vehicle 230 transports the product A to the position of the stocker 220 and transmits a movement completion signal S81 to the host computer 250. The host computer 250 that has received this confirms in advance that the load request signal S71 has been transmitted from the stocker 220, and then transmits a product delivery start signal S84 to the automatic transport vehicle 230. Receiving this, the automated guided vehicle 230 delivers the product A to the stocker 220, and then sends a product delivery completion signal S85 to the host computer 250.
[Conventional example 2]

As a product conveyance system different from the above [Conventional Example 1], there is a printed board automatic supply device described in, for example, Japanese Patent Laid-Open No. 61-56858. In the automatic supply device, each processing device delivers an unprocessed printed board from the stocker to the exchange by a processing completion notice signal that informs the state that the printed board processing completion time is approaching. The exchange that has received the unprocessed printed board moves to the delivery position of the machining apparatus that has been notified of the completion of machining, and passes the machined printed board from the machining apparatus to the exchange in response to the machining completion signal from the machining apparatus. Transfer the processed printed board from the exchange to the processing equipment. When the delivery is completed, the machining operation of the machining device is started, and at the same time, the exchange returns to the position of the stocker with the machining completion printed board (see Patent Document 1).
[Conventional Example 3]

Further, as a product transfer system different from [Conventional Example 1] and [Conventional Example 2], there is a transfer control device described in, for example, Japanese Patent Laid-Open No. 63-256339. In the conveyance control device, a plurality of stations arranged on the conveyance path and a conveyance control device that conveys the product are described. The “station” in this publication corresponds to the stocker 220 shown in FIG. 7 in the above [Conventional Example 1]. Similarly, the “self-propelled transport vehicle” corresponds to the automatic transport vehicle 230, and “transport” The “control device” corresponds to the host computer 250. The transport control device outputs a movement command and a product transfer command to the self-propelled transport vehicle, receives communication information from each station, receives a product input / output information, a time measuring unit that obtains current time information, Storage means for storing the time when a product is input to the station for each station, arithmetic means for obtaining the difference between the current time and the product input time, and the difference between the calculation effect of the arithmetic means and the standard test end time of the station is minimized. It comprises station determining means for determining a certain time difference minimum station, and preliminary movement means for moving the self-propelled transport vehicle to the position of the time difference minimum station before the end of the test (see Patent Document 2).
JP-A 61-56858 JP-A 63-256339

  However, the technologies of [Conventional Example 1] to [Conventional Example 3] have room for improvement in the following points.

  First, in the technique of [Conventional Example 1], since the automatic transport vehicle 230 starts moving after the processing of the product A is completed by the processing device 210, the product A is processed even though the processing is completed. A useless waiting time until the automatic conveyance vehicle 230 arrives on the first stage 211 of the processing apparatus 210 occurs.

  In the technique of [Conventional Example 2], when a plurality of stages are provided as in the processing apparatus of [Conventional Example 1], it is not always necessary to replace an unprocessed product and a processed product at the same time. If the unprocessed product is installed on an empty stage, the processing apparatus can continuously process the product installed on the stage. Therefore, there is a case where the technique is unnecessary by taking such a measure on the apparatus side. However, in the technique, an unprocessed product is installed in advance before the processing apparatus based on the processing completion notice signal, and is replaced with the unprocessed product in accordance with the completion of product processing. That is, the technology is a technology of a transport device for improving the device operation rate (the operation rate of the exchange), and moves the processed product without waiting time as in the product transport system according to the present invention. It is not a technology for.

  In the technique of [Conventional Example 3], the input time data for outputting the preliminary movement command is set when the product is loaded into the station and reset when the product is unloaded. A preliminary movement command is output by registering the product processing time as data in advance. However, when the processing apparatus has a plurality of stages as in the processing apparatus of [Conventional Example 1], the time required to complete the processing of the set product varies depending on the operating status of the processing apparatus. For example, when a product is already set in the processing device, if another product has already been processed by that device, the time from setting to the product unloading, and when the device has been in a waiting state until the product is set The time from setting the product to shipping the product is different. For this reason, an error in the time registered as data becomes large, causing a problem in conveyance.

  According to the present invention, at least one processing device that performs processing on a product, an intra-compartment transport device that receives a product from the processing device and transports the product to a predetermined transport destination, and a host computer that controls the processing device and the transport device The processing device sends a product unloading advance notice signal that notifies the host computer of the estimated unloading time of the product unloaded from the host computer, and receives the product unloading notice signal. The host computer sends a movement command signal instructing in advance to move to the processing device that sent the product carry-out notice signal to the intra-compartment transfer device in accordance with the scheduled product carry-out time. The product transport, wherein the intra-compartment transport device that has received the product moves to the processing device that has transmitted the product transport notice signal in accordance with the scheduled product transport time Stem is provided.

  According to the present invention, the intra-compartment transfer device can be moved to the processing device that transmitted the product carry-out notice signal in accordance with the scheduled product carry-out time, so that the processed product can be moved quickly. it can. As a result, useless time for product conveyance is eliminated, production efficiency in PULL type production can be improved, and production delivery time can be shortened.

  Further, according to the present invention, at least one processing device that performs processing on the product, an in-compartment notification device that informs in advance the scheduled delivery time of the product unloaded from the processing device, the processing device, and the inside of the compartment A product transport system comprising a host computer for controlling the notification device, wherein the processing device transmits a product unloading advance notice signal for notifying the scheduled unloading time of the product unloaded from the processing device to the host computer in advance. The in-compartment notification device that has received the notification command signal, the host computer that has received the product carry-out notice signal transmits to the in-compartment notification device a notification command signal instructing in advance to notify the planned product delivery time However, the product conveyance system characterized by notifying the scheduled product carry-out time in advance is provided.

  According to this invention, since the in-compartment notification device can notify in advance the estimated time for carrying out the product, the worker who has received the notification can quickly move the processed product. As a result, useless time for product conveyance is eliminated, production efficiency in PULL type production can be improved, and production delivery time can be shortened.

  According to the present invention, it is possible to quickly move a product after processing according to a scheduled time for carrying out the product. As a result, useless time for product conveyance is eliminated, production efficiency in PULL type production can be improved, and production delivery time can be shortened.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same reference numerals are given to the same components, and the description will be omitted as appropriate.

[First Embodiment]
The configuration of the product conveyance system according to the present embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 is a schematic configuration diagram schematically showing the configuration of the product transport system according to the present embodiment. FIG. 2 is a plan view schematically showing the configuration of the product transport system according to the embodiment of the present invention.

  As shown in FIG.1 and FIG.2, the said product conveyance system is comprised by several block BL1-BL4 for every processing process of a semiconductor product (henceforth a product). Each of these blocks BL1 to BL4 includes a plurality of processing devices 110 that perform a series of processing on the product, and an automatic transport vehicle 130 that receives the product from the processing device 110 and transports the product to a predetermined transport destination (stocker 120 described later). And the stocker 120 that receives the processed product from the automatic transport vehicle 130 and temporarily stores it, and receives the processed product from the stocker 120 and transports it to a predetermined transport destination (stocker of another block in the next process). And a host computer 150 that controls the processing device 110, the automatic conveyance vehicle 130, the stocker 120, and the automatic conveyance vehicle 131. In addition, the processing apparatus 110, the automatic conveyance vehicles 130 and 131, the stocker 120, and the host computer 150 are each provided with the transmission / reception means not shown which transmits / receives the various signals mentioned later.

  The processing apparatus 110 is provided with a first stage 111 and a second stage 112 for temporarily storing products before and after the processing, and a processing chamber 113 for processing the products. The automatic transport vehicle 130 receives the processed product placed on the first stage 111 or the second stage 112. As described above, since the processing apparatus 110 includes a plurality of stages, the processing apparatus 110 can sequentially and continuously perform a series of processing on the product. Note that the number of stages may be one as long as it has a configuration in which a series of processing processes can be sequentially and continuously performed on a product, for example, by having a large area.

  Next, the operation of the product conveyance system according to the present embodiment will be described with reference to FIGS. FIG. 3 is a timing chart of the product transport system according to the present embodiment.

  As shown in FIG. 1, if either the first stage 111 or the second stage 112 is in an empty state, the processing apparatus 110 transmits a load request signal S11 to the host computer 150, and before processing. Request equipment supply.

  The host computer 150 that has received the load request signal S11 transmits the product movement / storage signal S24 to the stocker 120 and stores it in the stocker 120 when the stocker 120 stores the product before processing. Instruct to unload the product before processing.

  The stocker 120 that has received the product movement / storage signal S24 transmits to the host computer 150 the scheduled time for unloading the product stored in the storage device 120 before processing by the product removal notice signal S25.

  The host computer 150 that has received the product carry-out announcement signal S25 transmits a movement command signal S30 to the automatic conveyance vehicle 130, and the automatic conveyance vehicle 130 moves to the position of the stocker 120 in accordance with the scheduled carry-out time of the product carry-out announcement signal S25. To instruct. Note that “according to the scheduled carry-out time” means “to be in time for the planned carry-out time”, and the time for the automatic guided vehicle 130 to actually move to the position of the stocker 120 coincides with the planned carry-out time. It is preferable.

  For this purpose, the host computer 150 determines whether or not the automatic guided vehicle 130 can move to the position of the stocker 120 that has transmitted the product carry-out notice signal S25 before the planned carry-out time. And adjusting means (not shown) for adjusting the timing of transmitting the movement command signal S30 to the automatic guided vehicle 130 based on the determination. Then, when the determination unit determines that the automatic conveyance vehicle 130 can move before the scheduled carry-out time, the adjustment unit sets the time for the automatic conveyance vehicle 130 to actually move to the position of the stocker 120. Is adjusted so as to delay the timing of transmitting the movement command signal S30 so as to coincide with the scheduled carry-out time.

  Here, more specifically, the determination means stores the speed of the automatic transport vehicle 130 in advance in a storage unit (not shown), and the detection means (not shown) detects the position of the automatic transport vehicle 130 and The calculation means calculates the distance from the position to the position of the stocker 120 that transmitted the product carry-out notice signal S25, and further calculates the travel time from the calculated distance and the speed of the automatic transport vehicle 130 stored in advance. By calculating, it is determined whether or not the automatic guided vehicle 130 can move to the position of the stocker 120 that has transmitted the product carry-out notice signal S25 before the planned carry-out time.

  The scheduled carry-out time is set by a setting unit (not shown) of the host computer 150. For example, when “5 minutes before the scheduled carry-out time” is set, the automatic guided vehicle 130 is connected to the stocker 120. The time to move to the position may be before the scheduled carry-out time. On the other hand, when the host computer 150 receives the product carry-out notice signals S15 and S25 without leaving a sufficient time interval from any one of the processing apparatus 110 and the stocker 120, the host computer 150 uses a determination means (not shown) to The advance of the scheduled carry-out time is determined, and the movement command signal S30 is sequentially transmitted to the automatic conveyance vehicle 130 from the earliest time. In such a case, the automatic conveyance vehicle 130 moves to the position of the stocker 120. The time may be later than the scheduled export time.

  Receiving the movement command signal S30, the automatic guided vehicle 130 starts moving, and when moving to the position of the stocker 120 is completed, a movement completion signal S31 is transmitted to the host computer 150 to notify the completion of movement.

  When the stocker 120 completes preparation for carrying out the stored product before processing, the stocker 120 sends a product carry-out permission signal S27 to the host computer 150 to notify the completion of carry-out preparation.

  Receiving the product carry-out permission signal S27, the host computer 150 transmits a product reception start signal S32 to the automatic transport vehicle 130 to instruct to start receiving the product before processing.

  Receiving the product reception start signal S32, the automated guided vehicle 130 receives the product before processing from the stocker 120 and transmits a product reception completion signal S33 to the host computer 150 to notify the completion of reception of the product before processing. .

  The host computer 150 that has received the product reception completion signal S33 transmits a movement command signal S30 to the automatic conveyance vehicle 130 to instruct the automatic conveyance vehicle 130 to move to the position of the processing apparatus 110.

  When the automated guided vehicle 130 receives the movement command signal S30 and starts moving and moves to the position of the processing apparatus 110, it transmits a movement completion signal S31 to the host computer 150 to notify the completion of movement.

  Receiving the movement completion signal S31, the host computer 150 transmits a product delivery start signal S34 to the automated guided vehicle 130 to instruct delivery of the product before processing.

  Receiving the product delivery start signal S34, the automated guided vehicle 130 installs the product before processing on the vacant side of the first stage 111 or the second stage 112 of the processing apparatus 110, and sends the product delivery completion signal S35 to the host computer. 150 to notify the completion of delivery of the product before processing.

  When the product before the processing is installed on the first stage 111 or the second stage 112, the processing apparatus 110 sends a product installation completion signal S13 to the host computer 150 to notify the completion of the product installation before the processing. To do.

  The host computer 150 that has received the product installation completion signal S13 transmits a product processing start signal S14 to the processing device 110, and the processing device 110 uses the moving means (not shown) to convert the product before processing to the first stage 111 or It moves from the second stage 112 to the processing chamber 113 and starts the processing.

  As shown in FIGS. 1 and 3, the processing device 110 transmits a product carry-out notice signal S15 to the host computer 150 before the product processing is completed, and the processed product to be unloaded from itself is sent. Preliminary notice of the scheduled time for product removal.

  The timing for sending the product carry-out notice signal S15 can be variously set according to the specifications of the processing apparatus 110.

  For example, assuming that the processing apparatus 110 processes products one by one, and one lot of products installed on the first stage 111 or the second stage 112 of the processing apparatus 110 is composed of ten pieces, It is assumed that the apparatus 110 transmits a product carry-out notice signal S15 when starting the processing for the last tenth product.

  In this case, the estimated time for carrying out the product is the time required for the processing apparatus 110 to process the product in the processing chamber 113 and the first stage 111 or the second stage from the processing chamber 113 by moving means (not shown). It is determined based on the time required to move to 112. More specifically, in the processing apparatus 110, a processing time per product and a moving time for moving the product from the processing chamber 113 to the vacant side of the first stage 111 or the second stage 112 are stored in advance. Storage means, detection means for detecting a start time for starting the machining process for the tenth product, and calculation means for calculating a scheduled product delivery time. In the detected “starting time of processing for the tenth product”, “processing time per product” stored in the storage means in advance, “from the processing chamber 113 to the first stage 111 or the second stage. By adding the “traveling time for moving to a vacant stage 112”, the scheduled time for carrying out the product is determined.

  Further, for example, when the processing apparatus 110 performs processing under a vacuum state, when the processed product is moved from the processing chamber 113 to the first stage 111 or the second stage 112, the processing chamber Since it takes a long time to adjust the pressure in 113, the processing apparatus 110 transmits a product carry-out notice signal S15 when the pressure adjustment is completed.

  At this time, the estimated product unloading time is based on the time required for the processing apparatus 110 to move the processed product from the processing chamber 113 to the first stage 111 or the second stage 112 by a moving means (not shown). decide. More specifically, the processing apparatus 110 includes a storage unit in which a moving time for moving the product from the processing chamber 113 to the vacant side of the first stage 111 or the second stage 112 is stored, and a pressure in the processing chamber 113. It has a detecting means for detecting a completion time when the adjustment is completed, and a calculating means for calculating a scheduled product delivery time. This calculating means detects that “the pressure adjustment in the processing chamber 113 has been completed is detected. By adding “time for moving the product from the processing chamber 113 to the vacant side of the first stage 111 or the second stage 112” previously stored in the storage means, the scheduled time for product delivery is determined. To do.

  Again, it returns to description of an effect | action of the product conveyance system which concerns on this Embodiment. The host computer 150 that has received the product carry-out notice signal S15 transmits a movement command signal S30 to the automatic conveyance vehicle 130 in advance, and the automatic carry vehicle 130 notifies the product carry-out notice in accordance with the scheduled carry-out time of the product carry-out notice signal S15. It is instructed to move to the position of the processing apparatus 110 that has transmitted the signal S15. As described above, “according to the scheduled carry-out time” means “to be in time for the planned carry-out time”, and the time for the automatic guided vehicle 130 to actually move to the position of the processing device 110 is It is preferable to coincide with the scheduled time.

  Therefore, the host computer 150 determines whether or not the automatic guided vehicle 130 can move to the position of the processing apparatus 110 that has transmitted the product carry-out notice signal S15 before the planned carry-out time. Means and adjustment means (not shown) for adjusting the timing of transmitting the movement command signal S30 to the automatic guided vehicle 130 based on the determination. When the determination unit determines that the automatic conveyance vehicle 130 can move before the scheduled carry-out time, the adjustment unit moves the automatic conveyance vehicle 130 to the position of the processing apparatus 110 actually. Adjustment is made to delay the timing of transmitting the movement command signal S30 so that the time coincides with the scheduled carry-out time.

  Here, more specifically, the determination means stores the speed of the automatic transport vehicle 130 in advance in a storage unit (not shown), and the detection means (not shown) detects the position of the automatic transport vehicle 130 and The calculating means calculates the distance from the position to the position of the processing apparatus 110 that has transmitted the product carry-out notice signal S15, and further calculates the travel time from the calculated distance and the speed of the automatic transport vehicle 130 stored in advance. Is calculated to determine whether or not the automatic guided vehicle 130 can move to the position of the processing apparatus 110 that transmitted the product carry-out notice signal S15 before the scheduled carry-out time.

  Note that the scheduled carry-out time is set by a setting unit (not shown) of the host computer 150. For example, when “5 minutes before the scheduled carry-out time” is set, the automatic transport vehicle 130 is set to the processing device 110. The time to move to the position may be before the scheduled carry-out time. On the other hand, when the host computer 150 receives the product carry-out notice signals S15 and S25 without leaving a sufficient time interval from any one of the processing apparatus 110 and the stocker 120, the host computer 150 uses a determination means (not shown) to The advance of the scheduled carry-out time is determined, and the movement command signal S30 is sequentially transmitted to the automatic conveyance vehicle 130 from the earliest time. In such a case, the automatic conveyance vehicle 130 moves to the position of the processing device 110. The time to do may be later than the scheduled carry-out time.

  When the automatic guided vehicle 130 that has received the movement command signal S30 starts moving and moves to the position of the processing apparatus 110 that has transmitted the product carry-out advance notice signal S15 in accordance with the scheduled carry-out time, the movement completion signal S31 is sent to the host computer. 150 to notify the completion of movement.

  The processing apparatus 110 is in a state in which the processed product is completed and the processed product can be carried out (the processed product is transferred from the processing chamber 113 to the first stage 111 or the second by a moving means (not shown). In the state of being moved to the stage 112), a product carry-out permission signal S17 is transmitted to the host computer 150 to notify the carry-out permission.

  Receiving the product carry-out permission signal S17, the host computer 150 transmits a product reception start signal S32 to the automatic transport vehicle 130, and instructs to start receiving the processed product.

  The automatic transport vehicle 130 that has received the product reception start signal S32 receives the processed product installed on the vacant side of the first stage 111 or the second stage 112 of the processing apparatus 110 and receives the product in the host computer 150. A completion signal S33 is transmitted to notify the completion of receiving the processed product.

  Receiving the product receipt completion signal S33, the host computer 150 transmits a movement command signal S30 to the automated guided vehicle 130 to instruct to move to the position of the stocker 120.

  The automatic guided vehicle 130 that has received the movement command signal S30 starts moving, and when moving to the position of the stocker 120, transmits a movement completion signal S31 to the host computer 150 to notify the completion of movement.

  The host computer 150 that has received the movement completion signal S31 confirms that the load request signal S21 for notifying the state in which the processed product can be accepted is sent from the stocker 120 in advance, and then the automatic transport vehicle 130. A product delivery start signal S34 is transmitted to the machine to instruct delivery of the processed product.

  Upon receiving the product delivery start signal S34, the automated guided vehicle 130 delivers the processed product to the stocker 120, and sends a product delivery completion signal S35 to the host computer 150 to notify the completion of delivery of the processed product. .

  As shown in FIGS. 1 and 2, the stocker 120 sends a product installation completion signal S23 to the host computer 150 when the processed product is installed at a predetermined storage position, and the processed product is installed. Notify completion.

  The host computer 150 that has received the product installation completion signal S23 transmits a product movement / storage signal S24 to the stocker 120 in order to transport the processed product to another block that is the next processing step. Instruct to carry out the processed product that is temporarily stored.

  The stocker 120 that has received the product movement / storage signal S24 moves the processed product from its storage position to its unloading position by a moving means (not shown), but before the completion of the movement, the stocker 120 outputs a product unloading notice signal S25. The information is transmitted to the host computer 150, and the product unloading scheduled time of the processed product unloaded from itself is notified in advance.

  The timing for sending the product carry-out notice signal S25 can be variously set according to the specifications of the stocker 120.

  The host computer 150 that has received the product carry-out notice signal S25 transmits a movement command signal S30 to the automatic conveyance vehicle 131 in advance, and the automatic conveyance vehicle 131 responsible for conveyance of the processed product between the respective blocks BL1 to BL4. A command is issued to move to the position of the stocker 120 that transmitted the product carry-out notice signal S25 in accordance with the scheduled carry-out time of the product carry-out notice signal S25. As described above, “according to the scheduled carry-out time” means “to be in time for the planned carry-out time” as described above, and the time for the automatic guided vehicle 131 to actually move to the position of the stocker 120. Is preferably equal to the scheduled carry-out time.

  For this purpose, the host computer 150 determines whether or not the automatic guided vehicle 131 can move to the position of the stocker 120 that has transmitted the product carry-out notice signal S25 before the scheduled carry-out time. And adjusting means (not shown) for adjusting the timing for transmitting the movement command signal S30 to the automatic guided vehicle 131 based on the determination. When the determination unit determines that the automatic conveyance vehicle 131 can move before the scheduled carry-out time, the adjustment unit determines the time for the automatic conveyance vehicle 131 to actually move to the position of the stocker 120. Is adjusted so as to delay the timing of transmitting the movement command signal S30 so as to coincide with the scheduled carry-out time.

  Here, more specifically, the determination means stores the speed of the automatic transport vehicle 131 in advance in a storage unit (not shown), and the detection means (not shown) detects the position of the automatic transport vehicle 131 and calculates (not shown). The means calculates the distance from the position to the position of the stocker 120 that transmitted the product carry-out notice signal S25, and further calculates the travel time from the calculated distance and the speed of the automatic transport vehicle 131 stored in advance. Thus, it is determined whether or not the automatic guided vehicle 131 can move to the position of the stocker 120 that has transmitted the product carry-out notice signal S25 before the planned carry-out time.

  The scheduled carry-out time is set by a setting unit (not shown) of the host computer 150. For example, when “5 minutes before the scheduled carry-out time” is set, the automatic transport vehicle 131 is set in the stocker 120. The time to move to the position may be before the scheduled carry-out time. On the other hand, when the automatic guided vehicle 131 receives the product carry-out notice signal S25 from any one of the host computers 150 of the blocks BL1 to BL4 without leaving a sufficient time interval, the automatic guided vehicle 131 uses a determination unit (not shown). In this case, the time to move the automatic transport vehicle 130 to the position of the stocker 120 is determined by determining the time before and after the scheduled carry-out time and moving to the stocker 120 of the corresponding block sequentially from the earliest time. May be later than the scheduled export time.

  When the automatic guided vehicle 131 that has received the movement command signal S30 starts moving and moves to the position of the stocker 120 that has transmitted the product carry-out notice signal S25 in accordance with the scheduled carry-out time, the movement completion signal S31 is sent to the host computer 150. Send to notify the completion of movement.

  When the stocker 120 is in a state in which the processed product can be carried out (a state in which the processed product is moved from the storage position to the carry-out position by a moving means (not shown)), the product carry-out permission signal S27. Is sent to the host computer 150 to permit the removal of the processed product.

  Receiving the product carry-out permission signal S27, the host computer 150 transmits a product reception start signal S32 to the automatic conveyance vehicle 131, and instructs to receive the processed product.

  The automatic guided vehicle 131 that has received the product reception start signal S32 receives the processed product from the stocker 120, transmits a product reception completion signal S33 to the host computer 150, and notifies the completion of the reception of the processed product. .

  Receiving the product reception completion signal S33, the host computer 150 transmits a movement command signal S30 to the automatic conveyance vehicle 131 to instruct to move to the position of the block stocker that will be the next processing step.

  The automatic guided vehicle 131 that has received the movement command signal S30 starts moving and moves to the position of the stocker 120 of the block that is the next processing step, and then transmits a movement completion signal S31 to the host computer 150 to move. Notify completion.

  Receiving the movement completion signal S31, the host computer 150 transmits a product delivery start signal S34 to the automated guided vehicle 131 to instruct delivery of the processed product.

  Receiving the product delivery start signal S34, the automated guided vehicle 131 delivers the processed product to the stocker 120, and sends a product delivery completion signal S35 to the host computer 150 to notify the completion of delivery of the processed product. .

  Next, effects of the product transport system according to the present embodiment will be described.

  As described above, in the product conveyance system according to the present embodiment, the processing apparatus 110 and the stocker 120 transmit the product carry-out notice signals S15 and S25 including the scheduled product carry-out time to the host computer 150 in advance. Thus, the host computer 150 can move the automatic transport vehicles 130 and 131 to the positions of the processing device 110 and the stocker 120 that transmitted the product carry-out notice signals S15 and S25 in accordance with the scheduled product carry-out time. The useless waiting time in the processing apparatus 110 and the stocker 120 can be eliminated, and the processed product can be moved quickly. As a result, useless time for product conveyance is eliminated, production efficiency in PULL type production can be improved, and production delivery time can be shortened.

  As described above, if the host computer 150 receives the product carry-out notice signals S15 and S25 without any sufficient time interval from any one of the processing apparatus 110 and the stocker 120, the host computer 150 makes a determination (not shown). By means, it is assumed that the scheduled time for carrying out is determined ahead of time, and instructions for moving to the automatic guided vehicle 130 are sequentially given from the one with the earlier time. If it does in this way, in the product conveyance of the automatic conveyance vehicle 130, the useless waiting time of the product after processing can be suppressed to the minimum. Further, when the automatic guided vehicle 131 receives the transmission of the product carry-out notice signal S25 without any sufficient time interval from any of the host computers 150 of the respective blocks BL1 to BL4, the automatic carry vehicle 131 precedes the scheduled carry-out time. Are determined by a determination unit (not shown), and are moved to the stocker 120 of the corresponding block in order from the earliest time. If it does in this way, in the product conveyance of the automatic conveyance vehicle 131, the useless waiting time of the product after a process can be suppressed to the minimum.

[Second Embodiment]
The configuration of the product transport system according to the present embodiment will be described. The product transport system has the same basic configuration as that of the product transport system according to the above [first embodiment], but is applied when an operator is responsible for transporting a product instead of an automatic transport vehicle. Is. Specifically, the host computer transmits a notification command signal for instructing the notification device in advance to notify the estimated time of product removal, instead of the movement command signal transmitted in advance to the automated guided vehicle. The informing device that has received the instruction gives a movement instruction by informing the worker of the scheduled time for carrying out the product.

  Hereinafter, the configuration of the product conveyance system according to the present embodiment will be described with reference to FIGS. 4 and 5. FIG. 4 is a schematic configuration diagram schematically showing the configuration of the product transport system according to the present embodiment. FIG. 5 is a plan view schematically showing the configuration of the product transport system according to the embodiment of the present invention.

  As shown in FIG.4 and FIG.5, the said product conveyance system is comprised by several block BL1-BL4 for every manufacturing process of a semiconductor product. Each of these blocks BL1 to BL4 includes a plurality of processing devices 110 that perform a series of processing processes on a semiconductor product (hereinafter simply referred to as a product), and a plan to carry out the processed products carried out from the processing device 110. A notification device 160 that notifies the worker of the time in advance, a stocker 120 that receives and temporarily stores the processed product via the worker, and a product after the processing is scheduled to be carried out from the stocker 120. A notification device 161 that notifies the worker of the time in advance, and a processing device 110, a notification device 160, a stocker 120, and a host computer 150 that controls the notification device 161 are provided. The worker receives a notification from the notification device 160, receives a product from the processing device 110 and transports it to the stocker 120, and receives a notification from the notification device 161, and the processed product from the stocker 120. And the person who plays the role of transporting to the stocker of another block that will be the next processing step. The processing device 110, the notification devices 160 and 161, the stocker 120, and the host computer 150 are each provided with transmission / reception means (not shown) that transmits and receives various signals, which will be described later.

  Specifically, the notification devices 160 and 161 are portable terminals provided with a display unit, and display the scheduled product delivery time of each processing device 110 and the expected product delivery time of each stocker 120, respectively. To move. The worker always carries one of these notification devices 160 and 161 according to the role.

  Next, the operation of the product transport system according to the present embodiment will be described with reference to FIGS. FIG. 5 is a plan view of the product transport system according to the present embodiment.

  As shown in FIG. 4, if one of the first stage 111 and the second stage 112 is empty, the processing apparatus 110 transmits a load request signal S11 to the host computer 150, and before processing. Request equipment supply.

  The host computer 150 that has received the load request signal S11 transmits the product movement / storage signal S24 to the stocker 120 and stores it in the stocker 120 when the stocker 120 stores the product before processing. Instruct the product to be removed.

  The stocker 120 that has received the product movement / storage signal S24 transmits to the host computer 150 the scheduled time for carrying out the stored unprocessed product before the product removal notice signal S25.

  The host computer 150 that has received the product carry-out notice signal S25 transmits a notice command signal S46 to the notification device 160 so that the worker moves to the position of the stocker 120 in accordance with the scheduled carry-out time of the product carry-out notice signal S25. Instruct. Note that “according to the scheduled carry-out time” means “to be in time for the planned carry-out time”, and the time for the worker to actually move to the position of the stocker 120 may coincide with the planned carry-out time. preferable.

  For this purpose, the host computer 150 includes a determination unit (not shown) that determines whether or not the worker can move to the position of the stocker 120 that has transmitted the product carry-out notice signal S25 before the planned carry-out time. Adjustment means (not shown) that adjusts the timing of transmitting the notification command signal S46 to the automatic guided vehicle 130 based on the determination. When the determination unit determines that the worker can move before the scheduled carry-out time, the time for the adjustment unit to actually move to the position of the stocker 120 is the estimated carry-out time. Is adjusted to delay the timing of transmitting the notification command signal S46 to the notification device 160 so as to coincide with.

  Here, more specifically, the determination means stores the speed of the worker in advance in a storage unit (not shown), the detection means (not shown) detects the position of the worker, and the calculation means (not shown) By calculating the distance from the position to the position of the stocker 120 that transmitted the product carry-out notice signal S25, and further calculating the movement time from the calculated distance and the speed of the worker stored in advance, It is determined whether or not the person can move to the position of the stocker 120 that has transmitted the product carry-out notice signal S25 before the scheduled carry-out time.

  The scheduled carry-out time is set by a setting unit (not shown) of the host computer 150. For example, when “5 minutes before the scheduled carry-out time” is set, the operator moves to the position of the stocker 120. The moving time may be before the scheduled carry-out time. On the other hand, when the host computer 150 receives the product carry-out notice signals S15 and S25 without leaving a sufficient time interval from any one of the processing apparatus 110 and the stocker 120, the host computer 150 uses a determination means (not shown) to Judging the time before the scheduled carry-out time, the notification command signal S46 is transmitted to the notification device 160 in order from the earliest time. In such a case, the time for the operator to move to the position of the stocker 120 is It may be later than the scheduled export time.

  Upon receiving the notification command signal S46, the notification device 160 notifies the worker of the scheduled carry-out time of the stocker 120. At this time, the scheduled carry-out time is displayed on the display unit (not shown) of the notification device 160.

  When the worker who has seen the display starts moving and moves to the position of the stocker 120, the notification device 160 transmits a movement completion signal S41 to the host computer 150 to notify the completion of movement.

  When the stocker 120 completes preparation for carrying out the stored product before processing, the stocker 120 sends a product carry-out permission signal S27 to the host computer 150 to notify the completion of carry-out preparation.

  Receiving the product carry-out permission signal S27, the host computer 150 transmits a product reception start signal S42 to the notification device 160. At this time, a display unit (not shown) of the notification device 160 displays an instruction to start receiving a product before processing.

  The worker who sees the display receives the product from the stocker 120 and transmits a product reception completion signal S43 to the host computer 150 by the notification device 160 to notify the completion of the reception of the product before the processing.

  The host computer 150 that has received the product reception completion signal S43 transmits a movement command signal S40 to the notification device 160 to instruct the worker to move to the position of the processing device 110.

  The notification device 160 that has received the movement command signal S40 instructs the processing device 110 that is the transport destination to the worker. At this time, information specifying the processing device 110 that conveys the product before processing is displayed on a display unit (not shown) of the notification device 160.

  When the worker who has seen the display starts moving and moves to the position of the processing apparatus 110, the notification apparatus 160 transmits a movement completion signal S41 to the host computer 150 to notify the completion of movement.

  Receiving the movement completion signal S41, the host computer 150 transmits a product delivery start signal S44 to the notification device 160 to instruct delivery of the product before processing.

  Receiving the product delivery start signal S44, the notification device 160 instructs the worker to deliver the product before processing. At this time, a display unit (not shown) of the notification device 160 displays an instruction to deliver the product before processing.

  The worker who sees the display installs the product before processing on the vacant side of the first stage 111 or the second stage 112 of the processing apparatus 110, and sends a product delivery completion signal S45 to the host computer 150 by the notification device 160. To notify the completion of delivery of the product before processing.

  When the product before processing is installed in the vacant side of the first stage 111 or the second stage 112, the processing apparatus 110 transmits a product installation completion signal S13 to the host computer 150, and the product before processing is processed. Notify completion of installation.

  The host computer 150 that has received the product installation completion signal S13 transmits a product processing start signal S14 to the processing apparatus 110, and the processing apparatus 110 transfers the product to the first stage 111 or the second stage 112 by a moving means (not shown). To the processing chamber 113 to start processing.

  As shown in FIGS. 4 and 6, the processing device 110 transmits a product carry-out notice signal S15 to the host computer 150 before the product processing is completed, and the processed product to be unloaded from itself is sent. Preliminary notice of the scheduled time for product removal

  Note that the timing for sending the product carry-out notice signal S15 is, specifically, in the specifications of the processing apparatus 110 as described in the paragraphs [0045] to [0048], as in the above [first embodiment]. Various settings can be made accordingly.

  The host computer 150 that has received the product carry-out notice signal S15 transmits a notice command signal S46 to the notification device 160 in advance, and the operator sends the product carry-out notice signal S15 in accordance with the scheduled carry-out time of the product carry-out notice signal S15. An instruction is given to move to the position of the processing apparatus 110 that has been transmitted. As described above, “according to the scheduled carry-out time” means “to be in time for the planned carry-out time”, and the time for the operator to actually move to the position of the stocker 120 is the estimated carry-out time. It is preferable to agree.

  For this purpose, the host computer 150 includes a determination unit (not shown) that determines whether or not the worker can move to the position of the processing apparatus 110 that has transmitted the product carry-out notice signal S15 before the planned carry-out time. And adjusting means (not shown) for adjusting the timing of transmitting the notification command signal S46 to the worker based on the determination. Then, when the determination means determines that the worker can move before the scheduled carry-out time, the adjustment means plans to carry out the time during which the worker actually moves to the position of the processing apparatus 110. Adjustment is made to delay the timing of transmitting the notification command signal S46 to the notification device 160 so as to coincide with the time.

  Here, more specifically, the determination means stores the speed of the worker in advance in a storage unit (not shown), the detection means (not shown) detects the position of the worker, and the calculation means (not shown) By calculating the distance from the position to the position of the stocker 120 that transmitted the product carry-out notice signal S15, and further calculating the moving time from the calculated distance and the speed of the worker stored in advance, It is determined whether or not the person can move to the position of the stocker 120 that has transmitted the product carry-out notice signal S15 before the scheduled carry-out time.

  Note that the scheduled carry-out time is set by a setting unit (not shown) of the host computer 150. For example, when “5 minutes before the scheduled carry-out time” is set, the operator moves the position of the processing device 110. The time to move to may be before the scheduled carry-out time. On the other hand, when the host computer 150 receives the product carry-out notice signals S15 and S25 without leaving a sufficient time interval from any one of the processing apparatus 110 and the stocker 120, the host computer 150 uses a determination means (not shown) to The advance of the scheduled carry-out time is determined, and the notification command signal S46 is transmitted to the notification device 160 sequentially from the earliest time. In such a case, the time for the operator to move to the position of the processing device 110 is , It may be later than the scheduled export time.

  The notification device 160 that has received the notification command signal S46 notifies the worker of the scheduled unloading time of the processing device 110 that has transmitted the product discharge notification signal S15. At this time, the scheduled carry-out time is displayed on the display unit (not shown) of the notification device 160.

  When the worker who sees the display starts moving and moves to the position of the processing apparatus 110 that transmitted the product carry-out notice signal S15 in accordance with the scheduled carry-out time, the notification device 160 sends a movement completion signal S41 to the host computer. 150 to notify the completion of movement.

  The processing apparatus 110 is in a state in which the processed product is completed and the processed product can be carried out (the processed product is transferred from the processing chamber 113 to the first stage 111 or the second by a moving means (not shown). In the state of being moved to the stage 112), a product carry-out permission signal S17 is transmitted to the host computer 150 to notify the carry-out permission.

  Receiving the product carry-out permission signal S17, the host computer 150 transmits a product reception start signal S42 to the notification device 160, and instructs to start receiving the processed product.

  The notification device 160 that has received the product reception start signal S42 instructs the worker to start receiving the processed product. At this time, a display unit (not shown) of the notification device 160 displays an instruction to start receiving the processed product.

  The worker who sees the display receives the processed product installed in the vacant one of the first stage 111 or the second stage 112 of the processing apparatus 110 and completes the product reception to the host computer 150 by the notification device 160. A signal S43 is transmitted to notify the completion of receiving the processed product.

  Receiving the product reception completion signal S43, the host computer 150 transmits a movement command signal S40 to the notification device 160 to instruct to move to the position of the stocker 120.

  The notification device 160 that has received the movement command signal S40 instructs the worker to move to the position of the stocker 120. At this time, a display unit (not shown) of the notification device 160 displays an instruction to move the stocker 120 to the position.

  When the worker who has seen the display starts moving and moves to the position of the stocker 120, the notification device 160 transmits a movement completion signal S41 to the host computer 150 to notify the completion of movement.

  The host computer 150 that has received the movement completion signal S41 confirms that the load request signal S21 for notifying the state in which the processed product can be accepted is sent from the stocker 120 to the notification device 160 in advance. A product delivery start signal S44 is transmitted to instruct delivery of the processed product.

  The notification device 160 that has received the product delivery start signal S44 instructs the worker to deliver the product after processing. At this time, a display unit (not shown) of the notification device 160 displays an instruction to deliver the processed product.

  The worker who sees the display delivers the processed product to the stocker 120 and transmits a product delivery completion signal S45 to the host computer 150 by the notification device 160 to notify the completion of delivery of the product after the processing.

  As shown in FIGS. 4 and 5, the stocker 120 sends a product installation completion signal S23 to the host computer 150 when the processed product is installed at a predetermined storage position, and the processed product is installed. Notify completion.

  The host computer 150 that has received the product installation completion signal S23 transmits a product movement / storage signal S24 to the stocker 120 in order to transport the processed product to another block that is the next processing step. Instruct to carry out the processed product that is temporarily stored.

  The stocker 120 that has received the product movement / storage signal S24 moves the processed product from its storage position to its unloading position by a moving means (not shown), but before the completion of the movement, the stocker 120 outputs a product unloading notice signal S25. The information is transmitted to the host computer 150, and the product unloading scheduled time of the processed product unloaded from itself is notified in advance.

  Note that the timing for sending the product carry-out notice signal S25 can be variously set according to the specifications of the stocker 120, as in the first embodiment.

  The host computer 150 that has received the product carry-out notice signal S25 transmits a notice command signal S46 to the notification device 161 in advance, so that an operator who is responsible for carrying the processed product between the blocks BL1 to BL4 has a product carry-out notice. It is instructed to move to the position of the stocker 120 that transmitted the product carry-out notice signal S25 in accordance with the scheduled carry-out time of the signal S25. As described above, “according to the scheduled carry-out time” means “to be in time for the planned carry-out time”, and the time for the automatic guided vehicle 131 to actually move to the position of the stocker 120 is the planned carry-out time. It is preferable to coincide with time.

  For this purpose, the host computer 150 includes a determination unit (not shown) that determines whether or not the worker can move to the position of the stocker 120 that has transmitted the product carry-out notice signal S25 before the planned carry-out time. And an adjusting unit (not shown) that adjusts the timing of transmitting the notification command signal S46 to the notification device 161 based on the determination. When the determination unit determines that the worker can move before the scheduled carry-out time, the time for the adjustment unit to actually move to the position of the stocker 120 is the estimated carry-out time. Is adjusted to delay the timing of transmitting the notification command signal S46 to the notification device 161 so as to coincide with.

  Here, more specifically, the determination means stores the speed of the worker in advance in a storage unit (not shown), the detection means (not shown) detects the position of the worker, and the calculation means (not shown) By calculating the distance from the position to the position of the stocker 120 that transmitted the product carry-out notice signal S25, and further calculating the movement time from the calculated distance and the speed of the worker stored in advance, It is determined whether or not the person can move to the position of the stocker 120 that has transmitted the product carry-out notice signal S25 before the scheduled carry-out time.

  The scheduled carry-out time is set by a setting unit (not shown) of the host computer 150. For example, when “5 minutes before the scheduled carry-out time” is set, the operator moves to the position of the stocker 120. The moving time may be before the scheduled carry-out time. On the other hand, when the worker (or the notification device 161) receives transmission of the product carry-out notice signal S25 without any sufficient time interval from any one of the host computers 150 of the blocks BL1 to BL4. In this case, the operator moves to the stocker 120 of the corresponding block sequentially from the earliest time. In such a case, the time for the operator to move to the position of the stocker 120 is , It may be later than the scheduled export time.

  Upon receiving the notification command signal S46, the notification device 161 notifies the worker of the scheduled carry-out time of the stocker 120 that has transmitted the product carry-out notice signal S25. At this time, the scheduled carry-out time is displayed on the display unit (not shown) of the notification device 160.

  When the worker who sees the display starts moving and moves to the position of the stocker 120 that has transmitted the product carry-out notice signal S25 in accordance with the scheduled carry-out time, the notification device 161 sends a movement completion signal S41 to the host computer 150. To notify the completion of movement.

  When the stocker 120 is in a state in which the processed product can be carried out (a state in which the processed product is moved from the storage position to the carry-out position by a moving means (not shown)), the product carry-out permission signal S27. Is sent to the host computer 150 to permit the removal of the processed product.

  Receiving the product carry-out permission signal S27, the host computer 150 transmits a product reception start signal S42 to the notification device 161, and instructs to receive the processed product.

  Upon receiving the product reception start signal S42, the notification device 161 instructs the worker to receive the processed product. At this time, a display unit (not shown) of the notification device 160 displays an instruction to receive the processed product.

  The worker who sees the display receives the processed product from the stocker 120, transmits a product reception completion signal S43 to the host computer 150 by the notification device 160, and notifies the completion of receiving the processed product.

  The host computer 150 that has received the product reception completion signal S43 transmits a movement command signal S40 to the notification device 161 and instructs to move to the position of the stocker of the block that will be the next processing step.

  The notification device 161 that has received the movement command signal S40 instructs the worker to move to the position of the stocker of the block that will be the next processing step. At this time, information specifying a block stocker to be the next processing step is displayed on a display unit (not shown) of the notification device 160.

  The worker who sees the display starts moving and moves to the position of the stocker 120 of the block that will be the next processing step, and sends a movement completion signal S41 to the host computer 150 by the notification device 161 to move. Notify completion.

  Receiving the movement completion signal S41, the host computer 150 transmits a product delivery start signal S44 to the notification device 161 to instruct delivery of the processed product.

  Receiving the product delivery start signal S44, the notification device 161 instructs the worker to deliver the product after the processing. At this time, a display unit (not shown) of the notification device 160 displays an instruction to deliver the processed product.

  The worker who sees the display delivers the processed product to the stocker 120 and sends a product delivery completion signal S45 to the host computer 150 by the notification device 161 to notify the completion of delivery of the processed product.

  Next, effects of the product transport system according to the present embodiment will be described.

  As described above, in the product conveyance system according to the present embodiment, the processing apparatus 110 and the stocker 120 transmit the product carry-out notice signals S15 and S25 including the scheduled product carry-out time to the host computer 150 in advance. Thus, the host computer 150 moves the worker to the positions of the processing device 110 and the stocker 120 that transmitted the product delivery notice signals S15 and S25 according to the scheduled product delivery time via the notification devices 160 and 161. Therefore, useless waiting time in the processing apparatus 110 and the stocker 120 can be eliminated, and the processed product can be moved quickly. As a result, useless time for product conveyance is eliminated, production efficiency in PULL type production can be improved, and production delivery time can be shortened.

  As described above, if the host computer 150 receives the product carry-out notice signals S15 and S25 without any sufficient time interval from any one of the processing apparatus 110 and the stocker 120, the host computer 150 makes a determination (not shown). By means, it is assumed that the notification device 160 is instructed to move in order from the earliest scheduled carry-out time. If it does in this way, in an operator's product conveyance, the useless waiting time of the product after processing can be suppressed to the minimum. In addition, when the worker receives the product carry-out notice signal S25 without any sufficient time interval from any of the host computers 150 in each of the blocks BL1 to BL4, the worker determines the future of the planned carry-out time. Then, it is assumed that the block moves to the stocker 120 of the corresponding block in order from the earliest time. If it does in this way, in product conveyance, the useless waiting time of the product after processing can be suppressed to the minimum.

  As mentioned above, although embodiment of this invention was described with reference to drawings, these are the illustrations of this invention, Various structures other than the above are also employable.

  For example, the notification devices 160 and 161 are not limited to mobile terminals, and may be bulletin boards or signal towers, for example. In such a case, “movement command signal”, “movement completion signal”, “product reception start signal”, “product reception completion signal”, “product delivery signal”, and “product delivery completion signal” with the host computer 150. However, for example, an instruction from a processing device or a stocker for conveying a product can be given by display on the “bulletin board” or “signal tower”. Further, whether or not the product can be received and whether or not the delivery of the product can be started can be determined by the operator confirming the state of the processing apparatus or the stocker. In addition, since the host computer 150 does not necessarily have to recognize the completion of the movement of the worker, the completion of the product reception, and the completion of the delivery of the product, there is no problem.

It is a schematic structure figure of a product conveyance system concerning a 1st embodiment of the present invention. It is a top view showing typically the composition of the product conveyance system concerning a 1st embodiment of the present invention. It is a timing diagram of the product conveyance system which concerns on the 1st Embodiment of this invention. It is a schematic block diagram of the product conveyance system which concerns on the 2nd Embodiment of this invention. It is a top view showing typically the composition of the product conveyance system concerning a 2nd embodiment of the present invention. It is a timing diagram of the product conveyance system which concerns on the 2nd Embodiment of this invention. It is the schematic block diagram which represented typically the structure of the product conveyance system of the conventional semiconductor product. It is a timing diagram of the product conveyance system of the conventional semiconductor product.

Explanation of symbols

110 Processing device 111 First stage 112 Second stage 113 Processing chamber 120 Stocker 130 Automatic transport vehicle 131 Automatic transport vehicle 150 Host computer 160 Notification device 161 Notification device 210 Processing device 211 First stage 212 Second stage 220 Stocker 230 Automatic transport vehicle 250 Host computer BL1 Block BL2 Block BL3 Block BL4 Block S11 Load request signal S13 Product installation completion signal S14 Product processing start signal S15 Product removal notice signal S17 Product removal permission signal S21 Load request signal S23 Product installation completion signal S24 Product movement / storage signal S25 Product removal notice signal S27 Product removal permission signal S30 Movement command signal S31 Movement completion signal S32 Product reception start signal S33 Product reception completion signal S34 Product delivery start signal S 5 Product delivery completion signal S40 Movement command signal S41 Movement completion signal S42 Product receipt start signal S43 Product receipt completion signal S44 Product delivery start signal S45 Product delivery completion signal S46 Notification command signal S67 Product processing completion signal S71 Load request signal S80 Movement command signal S81 Movement completion signal S82 Product receipt start signal S83 Product receipt completion signal S84 Product delivery start signal S85 Product delivery completion signal

Claims (8)

At least one processing device for processing the product;
An intra-compartment transport device that receives the product from the processing device and transports it to a predetermined transport destination;
A product transport system comprising: a processing computer and a host computer for controlling the transport device;
The processing device transmits a product unloading notice signal for notifying the host computer in advance of the scheduled unloading time of the product unloaded from itself.
The host computer that has received the product carry-out notice signal instructs the intra-compartment transfer device in advance to move to the processing apparatus that has sent the product carry-out notice signal in accordance with the scheduled product carry-out time. Send movement command signal,
The product transport system, wherein the intra-compartment transport device that has received the movement command signal moves to the processing device that has transmitted the product transport notice signal in accordance with the scheduled product transport time. The processing apparatus is provided with at least one stage for temporarily storing the processed product and a processing chamber for processing the product,
The intra-compartment transfer device receives the processed product placed on the stage,
The estimated time for carrying out the product is determined based on the time required for the processing device to process the product in the processing chamber and the time required to move the product from the processing chamber to the stage. The product conveyance system according to claim 1, wherein: The processing apparatus is provided with at least one stage for temporarily storing the processed product and a processing chamber for processing the product,
The intra-compartment transfer device receives the processed product placed on the stage,
The product transportation system according to claim 1, wherein the scheduled product carry-out time is determined based on a time required for the processing apparatus to move the product from the processing chamber to the stage. A stocker for receiving and temporarily storing the processed product from the intra-compartment transfer device;
Further comprising an out-of-compartment transport device that receives the processed product from the stocker and transports it to a predetermined transport destination;
The host computer further controls the stocker and the extra-compartment transfer device,
The stocker transmits to the host computer a product unloading notice signal for notifying in advance the estimated unloading time of the processed product unloaded from itself.
The host computer that has received the product carry-out notice signal transmits a movement command signal instructing in advance to move to the stocker in accordance with the planned product carry-out time to the extra-compartment transfer device,
The product conveyance system according to any one of claims 1 to 3, wherein the extra-compartment conveyance device that has received the movement command signal moves to the stocker in accordance with the scheduled time for carrying out the product. At least one processing device for processing the product;
An in-compartment notification device that notifies in advance of the planned unloading time of the product unloaded from the processing device,
A product transport system comprising: a host computer that controls the processing device and the in-zone notification device;
The processing device transmits a product unloading notice signal for notifying the host computer in advance of the scheduled unloading time of the product unloaded from itself.
The host computer that has received the product carry-out notice signal transmits a notification command signal instructing in advance to inform the in-zone notification device of the product carry-out scheduled time,
The product conveyance system, wherein the intra-compartment notification device that has received the notification command signal notifies the product delivery scheduled time in advance. The processing apparatus is provided with at least one stage for temporarily storing the processed product and a processing chamber for processing the product,
While the processed product placed on the stage is unloaded,
The estimated time for carrying out the product is determined based on the time required for the processing device to process the product in the processing chamber and the time required to move the product from the processing chamber to the stage. And
6. The product transport system according to claim 5, wherein the processing device transmits the product carry-out notice signal when the processing device starts processing the product in the processing chamber. The processing apparatus is provided with at least one stage for temporarily storing the processed product and a processing chamber for processing the product,
While the processed product placed on the stage is unloaded,
The planned product carry-out time is determined based on the time required for the processing apparatus to move the product from the processing chamber to the stage,
6. The product transport system according to claim 5, wherein the processing device transmits the product carry-out notice signal when the processing device finishes processing the product in the processing chamber. A stocker for receiving and temporarily storing the product after the processing carried out from the processing device;
Further comprising an out-of-compartment notification device that notifies in advance the scheduled time that the processed product is carried out from the stocker,
The host computer further controls the stocker and the outside notification device,
The stocker transmits to the host computer a product unloading notice signal for notifying in advance the estimated unloading time of the processed product unloaded from itself.
The host computer that has received the product carry-out notice signal transmits a notification command signal for instructing the out-of-compartment notification device in advance to inform the product carry-out scheduled time,
The product conveyance system according to any one of claims 5 to 7, wherein the out-of-compartment notification device that has received the notification command signal notifies the product delivery scheduled time in advance.

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