JP4759315B2 - 超電導性を有するホウ素ドープダイヤモンド薄膜 - Google Patents
超電導性を有するホウ素ドープダイヤモンド薄膜 Download PDFInfo
- Publication number
- JP4759315B2 JP4759315B2 JP2005148794A JP2005148794A JP4759315B2 JP 4759315 B2 JP4759315 B2 JP 4759315B2 JP 2005148794 A JP2005148794 A JP 2005148794A JP 2005148794 A JP2005148794 A JP 2005148794A JP 4759315 B2 JP4759315 B2 JP 4759315B2
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- JP
- Japan
- Prior art keywords
- boron
- thin film
- superconductivity
- doped diamond
- chemical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/278—Diamond only doping or introduction of a secondary phase in the diamond
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/274—Diamond only using microwave discharges
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/80—Constructional details
- H10N60/85—Superconducting active materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Inorganic Chemistry (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Description
E. A. Ekimov et al. "Superconductivity in diamond", Nature, vol.428, pp.542, 2004年4月1日
Claims (3)
- 化学気相成長法により形成された超電導性を有するホウ素ドープダイヤモンド薄膜。
- 化学気相成長法による成膜が、少なくとも炭素化合物およびホウ素化合物よりなり、水素を含む混合ガスを用いて行われたものである請求項1記載のホウ素ドープダイヤモンド薄膜。
- 化学気相成長法が、マイクロ波プラズマ化学気相成長(MPCVD)法である請求項1記載のホウ素ドープダイヤモンド薄膜。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US57294804P | 2004-05-21 | 2004-05-21 | |
US60/572,948 | 2004-05-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006009147A JP2006009147A (ja) | 2006-01-12 |
JP4759315B2 true JP4759315B2 (ja) | 2011-08-31 |
Family
ID=34941419
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005148794A Expired - Fee Related JP4759315B2 (ja) | 2004-05-21 | 2005-05-20 | 超電導性を有するホウ素ドープダイヤモンド薄膜 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7976893B2 (ja) |
EP (1) | EP1598443B1 (ja) |
JP (1) | JP4759315B2 (ja) |
DE (1) | DE602005010144D1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5496585B2 (ja) * | 2009-09-04 | 2014-05-21 | 独立行政法人物質・材料研究機構 | ジョセフソン素子 |
KR101034761B1 (ko) * | 2009-11-20 | 2011-05-18 | 우석대학교 산학협력단 | 자화손실의 측정을 이용한 초전도 선재의 임계 전류 밀도의 추정방법 |
BE1019439A3 (fr) * | 2010-07-30 | 2012-07-03 | Diarotech | Procede pour synthetiser par depot chimique en phase vapeur une matiere solide, en particulier du diamant, ainsi qu'un dispositif pour l'application du procede. |
EP2453038A1 (en) * | 2010-11-16 | 2012-05-16 | The Swatch Group Research and Development Ltd. | Method for coating micromechanical parts with dual diamond coating |
CN102127751B (zh) * | 2011-01-11 | 2012-12-26 | 大连理工大学 | 一种柱状阵列结构硼掺杂金刚石微纳米材料及其制备方法 |
JP6241943B2 (ja) * | 2014-03-14 | 2017-12-06 | 学校法人東京理科大学 | ボロンドープダイヤモンドナノ粒子の製造方法 |
JP6489594B2 (ja) * | 2015-08-28 | 2019-03-27 | 国立研究開発法人物質・材料研究機構 | ダイヤモンドアンビルセル |
CN106115685B (zh) * | 2016-06-24 | 2018-04-10 | 大连理工大学 | 一种纳米金刚石表面硼化的方法 |
CN107389217A (zh) * | 2017-06-20 | 2017-11-24 | 西安交通大学 | 一种基于超高电阻温度系数非晶态碳膜的温度传感器芯片 |
CN111593316B (zh) * | 2020-05-11 | 2022-06-21 | 南京岱蒙特科技有限公司 | 一种高比表面积超亲水的梯度硼掺杂金刚石电极及其制备方法和应用 |
CN111485223B (zh) * | 2020-05-11 | 2022-05-24 | 南京岱蒙特科技有限公司 | 一种超高比表面积硼掺杂金刚石电极及其制备方法和应用 |
CN112899644A (zh) * | 2021-01-21 | 2021-06-04 | 山东欣远新材料科技有限公司 | 一种金刚石膜氧化硼掺杂方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2730144B2 (ja) * | 1989-03-07 | 1998-03-25 | 住友電気工業株式会社 | 単結晶ダイヤモンド層形成法 |
GB9111474D0 (en) | 1991-05-29 | 1991-07-17 | De Beers Ind Diamond | Boron doped diamond |
JPH061695A (ja) * | 1992-06-25 | 1994-01-11 | Idemitsu Petrochem Co Ltd | ダイヤモンドの合成方法 |
US5698328A (en) * | 1994-04-06 | 1997-12-16 | The Regents Of The University Of California | Diamond thin film electron emitter |
AU2239995A (en) * | 1994-04-06 | 1995-10-30 | Regents Of The University Of California, The | Process to produce diamond films |
JP3041844B2 (ja) * | 1995-08-11 | 2000-05-15 | 住友電気工業株式会社 | 成膜又はエッチング装置 |
KR100253115B1 (ko) * | 1997-03-05 | 2000-05-01 | 윤덕용 | N-형 반도체 다이아몬드의 제조방법 |
US6858080B2 (en) * | 1998-05-15 | 2005-02-22 | Apollo Diamond, Inc. | Tunable CVD diamond structures |
US6274837B1 (en) * | 1999-06-16 | 2001-08-14 | Saint-Gobain Industrial Ceramics, Inc. | Method and apparatus for in-situ solid state doping of CVD diamonds and diamonds so made |
JP3971090B2 (ja) * | 2000-04-05 | 2007-09-05 | 株式会社神戸製鋼所 | 針状表面を有するダイヤモンドの製造方法及び繊毛状表面を有する炭素系材料の製造方法 |
JP2003321296A (ja) * | 2002-04-25 | 2003-11-11 | Shin Etsu Chem Co Ltd | ダイヤモンド膜及びその製造方法 |
US7312562B2 (en) * | 2004-02-04 | 2007-12-25 | Chevron U.S.A. Inc. | Heterodiamondoid-containing field emission devices |
-
2005
- 2005-05-20 US US11/133,269 patent/US7976893B2/en not_active Expired - Fee Related
- 2005-05-20 JP JP2005148794A patent/JP4759315B2/ja not_active Expired - Fee Related
- 2005-05-23 EP EP05253160A patent/EP1598443B1/en not_active Expired - Fee Related
- 2005-05-23 DE DE602005010144T patent/DE602005010144D1/de active Active
Also Published As
Publication number | Publication date |
---|---|
EP1598443A2 (en) | 2005-11-23 |
US7976893B2 (en) | 2011-07-12 |
JP2006009147A (ja) | 2006-01-12 |
EP1598443A3 (en) | 2006-02-01 |
US20060035788A1 (en) | 2006-02-16 |
DE602005010144D1 (de) | 2008-11-20 |
EP1598443B1 (en) | 2008-10-08 |
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