JP4742533B2 - Bi層状化合物ナノプレート及びその配列体並びにその製造方法とそれを用いた装置 - Google Patents

Bi層状化合物ナノプレート及びその配列体並びにその製造方法とそれを用いた装置 Download PDF

Info

Publication number
JP4742533B2
JP4742533B2 JP2004230529A JP2004230529A JP4742533B2 JP 4742533 B2 JP4742533 B2 JP 4742533B2 JP 2004230529 A JP2004230529 A JP 2004230529A JP 2004230529 A JP2004230529 A JP 2004230529A JP 4742533 B2 JP4742533 B2 JP 4742533B2
Authority
JP
Japan
Prior art keywords
single crystal
crystal substrate
nanoplate
array
layered compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004230529A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006045021A5 (enExample
JP2006045021A (ja
Inventor
秀臣 鯉沼
祐司 松本
竜太 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
National Institute of Japan Science and Technology Agency
Original Assignee
Japan Science and Technology Agency
National Institute of Japan Science and Technology Agency
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Science and Technology Agency, National Institute of Japan Science and Technology Agency filed Critical Japan Science and Technology Agency
Priority to JP2004230529A priority Critical patent/JP4742533B2/ja
Priority to PCT/JP2005/014047 priority patent/WO2006013826A1/ja
Priority to US11/659,428 priority patent/US7911927B2/en
Publication of JP2006045021A publication Critical patent/JP2006045021A/ja
Publication of JP2006045021A5 publication Critical patent/JP2006045021A5/ja
Application granted granted Critical
Publication of JP4742533B2 publication Critical patent/JP4742533B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • C30B29/605Products containing multiple oriented crystallites, e.g. columnar crystallites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/002Mixed oxides other than spinels, e.g. perovskite
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/16Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of arsenic, antimony, bismuth, vanadium, niobium, tantalum, polonium, chromium, molybdenum, tungsten, manganese, technetium or rhenium
    • B01J23/18Arsenic, antimony or bismuth
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/02Impregnation, coating or precipitation
    • B01J37/024Multiple impregnation or coating
    • B01J37/0244Coatings comprising several layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/088Oxides of the type ABO3 with A representing alkali, alkaline earth metal or Pb and B representing a refractory or rare earth metal
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02Epitaxial-layer growth
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/16Oxides
    • C30B29/22Complex oxides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2523/00Constitutive chemical elements of heterogeneous catalysts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00Catalysts, in general, characterised by their form or physical properties
    • B01J35/30Catalysts, in general, characterised by their form or physical properties characterised by their physical properties
    • B01J35/39Photocatalytic properties
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nanotechnology (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Mathematical Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Toxicology (AREA)
  • Composite Materials (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Semiconductor Memories (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Catalysts (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Physical Vapour Deposition (AREA)
JP2004230529A 2004-08-06 2004-08-06 Bi層状化合物ナノプレート及びその配列体並びにその製造方法とそれを用いた装置 Expired - Fee Related JP4742533B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004230529A JP4742533B2 (ja) 2004-08-06 2004-08-06 Bi層状化合物ナノプレート及びその配列体並びにその製造方法とそれを用いた装置
PCT/JP2005/014047 WO2006013826A1 (ja) 2004-08-06 2005-08-01 Bi層状化合物ナノプレート及びその配列体並びにそれらの製造方法とそれを用いた装置
US11/659,428 US7911927B2 (en) 2004-08-06 2005-08-01 Layered Bi compound nanoplate array of such nanoplates, their making methods and devices using them

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004230529A JP4742533B2 (ja) 2004-08-06 2004-08-06 Bi層状化合物ナノプレート及びその配列体並びにその製造方法とそれを用いた装置

Publications (3)

Publication Number Publication Date
JP2006045021A JP2006045021A (ja) 2006-02-16
JP2006045021A5 JP2006045021A5 (enExample) 2007-07-19
JP4742533B2 true JP4742533B2 (ja) 2011-08-10

Family

ID=35787111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004230529A Expired - Fee Related JP4742533B2 (ja) 2004-08-06 2004-08-06 Bi層状化合物ナノプレート及びその配列体並びにその製造方法とそれを用いた装置

Country Status (3)

Country Link
US (1) US7911927B2 (enExample)
JP (1) JP4742533B2 (enExample)
WO (1) WO2006013826A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100393625C (zh) * 2006-03-06 2008-06-11 湖北大学 一种钕掺杂钛酸铋纳米线阵列铁电存储材料及其合成方法
CN102216203B (zh) * 2008-09-22 2014-08-13 韩国科学技术院 单晶金属纳米盘的制备方法
US9627490B1 (en) * 2015-12-18 2017-04-18 Wisconsin Alumni Research Foundation Epitaxial growth of high quality vanadium dioxide films with template engineering
CN106087059A (zh) * 2016-06-30 2016-11-09 武汉工程大学 一种铋层状结构K0.5Bi4.5Ti4O15晶体的制备工艺
US10216013B2 (en) * 2017-03-07 2019-02-26 Wisconsin Alumni Research Foundation Vanadium dioxide-based optical and radiofrequency switches
KR102363288B1 (ko) 2017-03-10 2022-02-14 삼성전자주식회사 유전체, 그 제조 방법, 이를 포함하는 유전체 소자 및 전자 소자
KR102392041B1 (ko) 2017-03-10 2022-04-27 삼성전자주식회사 유전체, 그 제조 방법, 이를 포함하는 유전체 소자 및 전자 소자
KR102325821B1 (ko) 2017-03-31 2021-11-11 삼성전자주식회사 2차원 페로브스카이트 소재, 이를 포함하는 유전체 및 적층형 커패시터
US11335781B2 (en) 2017-05-10 2022-05-17 Wisconsin Alumni Research Foundation Vanadium dioxide heterostructures having an isostructural metal-insulator transition
CN108706632B (zh) * 2018-06-25 2020-01-14 浙江大学 一种钛酸铋纳米片的制备方法
CN109734441A (zh) * 2018-12-17 2019-05-10 中国科学院上海硅酸盐研究所 一种窄禁带铋层状共生结构铁电材料及其制备方法
CN110592539A (zh) * 2019-09-17 2019-12-20 常州大学 一种镍酸镧定位替代的钛酸铋合金薄膜及其制备方法
CN115968414A (zh) * 2020-08-17 2023-04-14 新加坡国立大学 高度定向的单晶低维纳米结构、制造方法及器件
JPWO2023058703A1 (enExample) * 2021-10-08 2023-04-13
CN115354397B (zh) * 2022-07-11 2023-08-25 西北工业大学 一种大面积二维单晶及制备方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3594061B2 (ja) * 1996-07-24 2004-11-24 ソニー株式会社 層状結晶構造酸化物およびその製造方法
JP3888400B2 (ja) * 1997-05-26 2007-02-28 ソニー株式会社 誘電体薄膜の製造方法
US6123819A (en) * 1997-11-12 2000-09-26 Protiveris, Inc. Nanoelectrode arrays
JP3735686B2 (ja) * 2001-10-30 2006-01-18 独立行政法人理化学研究所 金属酸化物強誘電体粒子結晶の製造方法
JP3983091B2 (ja) * 2002-04-24 2007-09-26 Necエレクトロニクス株式会社 酸化物誘電体膜の気相成長方法
US7147834B2 (en) * 2003-08-11 2006-12-12 The Research Foundation Of State University Of New York Hydrothermal synthesis of perovskite nanotubes
JP2005272129A (ja) 2004-03-26 2005-10-06 Konica Minolta Medical & Graphic Inc シート状材料排出機構及び画像記録装置

Also Published As

Publication number Publication date
US7911927B2 (en) 2011-03-22
WO2006013826A1 (ja) 2006-02-09
JP2006045021A (ja) 2006-02-16
US20090213636A1 (en) 2009-08-27

Similar Documents

Publication Publication Date Title
JP4742533B2 (ja) Bi層状化合物ナノプレート及びその配列体並びにその製造方法とそれを用いた装置
Gruverman et al. Nanoscale ferroelectrics: processing, characterization and future trends
Han et al. Nanostructured ferroelectrics: fabrication and structure–property relations
Kim et al. Ferroelectricity in highly ordered arrays of ultra-thin-walled Pb (Zr, Ti) O3 nanotubes composed of nanometer-sized perovskite crystallites
Uršič et al. Investigations of ferroelectric polycrystalline bulks and thick films using piezoresponse force microscopy
US8866367B2 (en) Thermally oxidized seed layers for the production of {001} textured electrodes and PZT devices and method of making
US9761785B2 (en) Stylo-epitaxial piezoelectric and ferroelectric devices and method of manufacturing
Kim et al. Ultrahigh density array of epitaxial ferroelectric nanoislands on conducting substrates
US20130093290A1 (en) Stylo-Epitaxial Piezoelectric and Ferroelectric Devices and Method of Manufacturing
US7741633B2 (en) Ferroelectric oxide artificial lattice, method for fabricating the same and ferroelectric storage medium for ultrahigh density data storage device
Wang et al. High performance LaNiO3-buffered,(001)-oriented PZT piezoelectric films integrated on (111) Si
JPWO2015072095A1 (ja) 赤外線検出素子、及び赤外線検出装置、圧電体素子
Wang et al. High‐quality ternary relaxor ferroelectric thin films on Si substrates by pulsed laser deposition method
Zhu Recent patents on perovskite ferroelectric nanostructures
Ferri et al. Nanoscale investigations of electrical properties in relaxor Pb (Mg1/3Nb2/3) O3-PbTiO3 thin films deposited on platinum and LaNiO3 electrodes by means of local piezoelectric response
Rivas et al. Iridium oxide top electrodes for piezo-and pyroelectric performance enhancements in lead zirconate titanate thin-film devices
JP5564701B2 (ja) 常温磁性強誘電性超格子およびその製造方法
Ferri et al. Ion‐Beam Etching on Nanostructured La 2 Ti 2 O 7 Piezoelectric Thin Films
Vergeer Structure and functional properties of epitaxial PBZRxTI1-xO3 films
JP2005118936A (ja) 強誘電体微細構造体及びその製造方法、並びに記録再生方式
Lee et al. Growth and characterization of epitaxial ferroelectric lanthanum-substituted bismuth titanate nanostructures with three different orientations
JP5934015B2 (ja) 積層構造体の製造方法
Jiang et al. Growth of the ternary Pb (Mn, Nb) O3–Pb (Zr, Ti) O3 thin film with high piezoelectric coefficient on Si by RF sputtering
Belov et al. Formation of piezo-and pyroelectric matrices with the use of nanoprofiled silica
Guo et al. A single-phase ferroelectric perovskite nitride integrated on silicon

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070601

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070601

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20101019

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101217

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110419

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110425

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140520

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees