JP4736389B2 - Polyimide film with improved slipperiness and substrate using the same - Google Patents

Polyimide film with improved slipperiness and substrate using the same Download PDF

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JP4736389B2
JP4736389B2 JP2004291281A JP2004291281A JP4736389B2 JP 4736389 B2 JP4736389 B2 JP 4736389B2 JP 2004291281 A JP2004291281 A JP 2004291281A JP 2004291281 A JP2004291281 A JP 2004291281A JP 4736389 B2 JP4736389 B2 JP 4736389B2
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polyimide
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polyimide film
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JP2005126707A (en
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雅文 橋本
敏之 西野
俊彦 阿武
裕章 山口
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Ube Corp
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本発明は、フィルム表面に微細な突起を有しフィルム表面の滑り性がよく、熱融着性を有する長尺で巻取りロ−ルに巻き取りが容易である易滑性ポリイミドフィルムおよびそれを用いた銅張り積層基板、特にフレキシブルプリント基板やTABなどのファインパタ−ン形成用の素材フィルムとして好適な易滑性ポリイミドフィルムおよびそれを用いた銅張り積層基板に関する。   The present invention relates to an easy-sliding polyimide film having fine protrusions on the film surface, good slipperiness on the film surface, and a long and heat-fusible property that can be easily wound on a winding roll. The present invention relates to a copper-clad laminate used, and particularly to an easy-sliding polyimide film suitable as a material film for forming a fine pattern such as a flexible printed board and TAB, and a copper-clad laminate using the same.

ポリイミドフィルムは、耐熱性、耐薬品性、機械的強度、電気特性などに優れていることから積層板、フレキシブルプリント基板等に使用されてきた。しかし、ポリイミドフィルムは接着性に問題がある。この接着性を改善する方法としては、アルカリ処理、コロナ処理、サンドブラスト、低温プラズマ処理などの表面処理を施す方法などが行われている。しかし、これらの方法は接着性の改善には効果はあるが、接着剤としてポリイミド以外の接着剤、例えばエポキシ樹脂系接着剤を必要とし、フレキシブル基板全体としての耐熱性が低下する。   Polyimide films have been used for laminates, flexible printed boards, and the like because of their excellent heat resistance, chemical resistance, mechanical strength, electrical properties, and the like. However, the polyimide film has a problem in adhesion. As a method for improving the adhesiveness, a surface treatment such as alkali treatment, corona treatment, sand blasting, and low-temperature plasma treatment is performed. However, although these methods are effective in improving the adhesiveness, an adhesive other than polyimide, for example, an epoxy resin adhesive is required as an adhesive, and the heat resistance of the entire flexible substrate is lowered.

このため、ポリイミドフィルムとして、熱可塑性単層ポリイミドフィルムあるいは熱可塑性ポリイミドの薄層を耐熱性ポリイミド層の両面に積層した熱可塑性の薄層を有する多層ポリイミドフィルムなどの熱可塑性ポリイミド層を有するポリイミドフィルム(以下、単に熱可塑性ポリイミドフィルムと略記することもある。)が提案された。
しかし、これらの熱可塑性ポリイミドフィルムは表面が平滑である場合には、巻取りロ−ルに巻取るフィルム製造時や、銅箔とラミネ−トする際にロ−ル等との摩擦が大きく、皺が入ったり、ロ−ルに巻き付いたりしたりというトラブルが生じることがあり、巻取りに制限を受け、それ故熱可塑性ポリイミドフィルムの表面滑性を改善する必要があった。
For this reason, as a polyimide film, a polyimide film having a thermoplastic polyimide layer such as a thermoplastic single layer polyimide film or a multilayer polyimide film having a thermoplastic thin layer in which a thin layer of thermoplastic polyimide is laminated on both sides of a heat resistant polyimide layer (Hereafter, it may be abbreviated simply as a thermoplastic polyimide film).
However, when the surface of these thermoplastic polyimide films is smooth, the friction with the roll or the like is large when the film is wound on the winding roll or when laminating with the copper foil, Troubles such as wrinkles and wrapping around the roll may occur, limiting the winding, and therefore it was necessary to improve the surface lubricity of the thermoplastic polyimide film.

従来、ポリイミドフィルムの表面滑性を良くする方法としては、エンボス加工のような表面処理をする方法やポリイミドフィルムにリン酸カルシウム(特許文献1)やシリカ(特許文献2)などの無機粉末を混合し、フィルム表面に微細な突起を生じさせ、表面摩擦を減らす方法が採用されてきた。また、微細無機フィラ−を分散させ溶媒中で重合したポリアミック酸溶液を流延製膜してポリイミドフィルムを製造する方法が提案された(特許文献3)。   Conventionally, as a method for improving the surface smoothness of a polyimide film, a method of performing a surface treatment such as embossing or mixing inorganic powders such as calcium phosphate (Patent Document 1) and silica (Patent Document 2) with a polyimide film, A method has been adopted in which fine protrusions are formed on the film surface to reduce surface friction. Further, a method for producing a polyimide film by casting a polyamic acid solution in which fine inorganic fillers are dispersed and polymerized in a solvent has been proposed (Patent Document 3).

特開昭62−68852号公報JP-A-62-68852 特開昭62−68853号公報JP 62-68853 A 特開平6−145378号公報JP-A-6-145378

しかしながら、第一の表面処理の方法は、フィルム表面に過度の凹凸が生じてフィルムの外観が損なわれ易いという欠点があった。また第二の方法では、ポリアミック酸溶液に無機粉末を混合するものであるが、特別な分散装置を使用しないと無機粉末をポリアミック酸溶液中に均一に分散し難く、分散せずに塊となって残ったりするため、フィルム表面に大きな突起が形成される場合がある。第三の方法においても同様に微粒子状の無機粉末を均一分散させることが困難であり、粒径の大きい無機粉末を使用すると第二の方法と大差がない。
このため、これらの無機フィラ−を添加する方法では、ファインパタ−ンが求められるCOFやTABなどに用いられる銅張り積層基板においては、熱可塑性ポリイミドフィルム表面の突起が微細ピッチ形成の障害となる場合がある。
However, the first surface treatment method has a drawback in that excessive unevenness occurs on the film surface and the appearance of the film is easily impaired. In the second method, the inorganic powder is mixed with the polyamic acid solution. However, if a special dispersing device is not used, the inorganic powder is difficult to uniformly disperse in the polyamic acid solution and becomes a lump without being dispersed. Large protrusions may be formed on the film surface. Similarly, in the third method, it is difficult to uniformly disperse the fine particle inorganic powder, and if an inorganic powder having a large particle size is used, there is no significant difference from the second method.
For this reason, in the method of adding these inorganic fillers, the projections on the surface of the thermoplastic polyimide film become an obstacle to the formation of fine pitches in the copper-clad laminated substrate used for COF, TAB, etc. that require a fine pattern. There is a case.

解決しようとする課題は、熱可塑性ポリイミド表面層を有するポリイミドフィルムの滑り性を改良することである。
さらに、他の課題は、滑り性を改良するとともに微細ピッチ形成の障害となる大きな表面突起の生成を抑えた熱可塑性ポリイミド表面層を有するポリイミドフィルムを得ることである。
The problem to be solved is to improve the slipperiness of a polyimide film having a thermoplastic polyimide surface layer.
Another object is to obtain a polyimide film having a thermoplastic polyimide surface layer that improves slipperiness and suppresses the formation of large surface protrusions that hinder fine pitch formation.

この発明は、熱可塑性であってガラス転移温度が190〜450℃であるポリイミドからなるポリイミド表面層を有し、少なくともポリイミド表面層約1μm中にピロメリット酸成分とp−フェニレンジアミン成分とを80%以上含有するポリイミドからなりメジアン径が0.3〜0.8μmでかつ最大径が2μm以下である全芳香族ポリイミド粒子をポリイミド表面層のポリイミドに対して約0.5〜10質量%の割合で分散してなる易滑性の改良されたポリイミドフィルムに関する。
また、この発明は、熱可塑性であってガラス転移温度が190〜450℃であるポリイミドからなり、ポリイミド表面層約1μm中にメジアン径が0.3〜0.8μmでかつ最大径が2μm以下である全芳香族ポリイミド粒子をポリイミド表面層のポリイミドに対して約0.5〜10質量%の割合で分散してなる無機粉末を含有しないポリイミド表面層を有し、静摩擦係数が0.05〜0.7、動摩擦係数が0.05〜0.7である易滑性の改良されたポリイミドフィルムに関する。
また、この発明は、少なくとも片面の熱融着性ポリイミド表面層のポリイミドに対して約0.5〜10質量%の割合で全芳香族ポリイミド粒子を分散してなる無機粉末を含有しない熱融着性ポリイミド表面層を有し、熱融着性を有し長尺で良好な巻取り性を有する易滑性ポリイミドフィルムに関する。
また、この発明は、少なくとも片面の熱融着性ポリイミド表面層のポリイミドに全芳香族ポリイミド粒子を分散してなる無機粉末を含有しない熱融着性ポリイミド表面層を有し、静摩擦係数が0.05〜0.7、動摩擦係数が0.05〜0.7である熱融着性を有し長尺で良好な巻取り性を有する易滑性ポリイミドフィルムに関する。
さらに、この発明は、前記の易滑性の改良された熱融着性ポリイミドフィルムのポリイミド表面層を介して銅層が積層されてなる銅張り積層基板に関する。
前記の記載において、少なくともポリイミド表面層約1μmとはポリイミド表面層が四捨五入して1μm以上の厚みで、好適には0.7μm以上の厚みであることをいう。
This invention has a polyimide surface layer made of polyimide that is thermoplastic and has a glass transition temperature of 190 to 450 ° C., and contains at least about 80 μm of pyromellitic acid component and p-phenylenediamine component in about 1 μm of the polyimide surface layer. The ratio of about 0.5 to 10% by mass with respect to the polyimide of the polyimide surface layer of wholly aromatic polyimide particles composed of polyimide containing at least% and having a median diameter of 0.3 to 0.8 μm and a maximum diameter of 2 μm or less It is related with the polyimide film with which the slipperiness improved by disperse | distributing.
Further, the present invention is made of polyimide which is thermoplastic and has a glass transition temperature of 190 to 450 ° C., and has a median diameter of 0.3 to 0.8 μm and a maximum diameter of 2 μm or less in about 1 μm of the polyimide surface layer. It has a polyimide surface layer that does not contain inorganic powder formed by dispersing certain aromatic polyimide particles at a ratio of about 0.5 to 10% by mass with respect to the polyimide of the polyimide surface layer, and has a static friction coefficient of 0.05 to 0. 7. It relates to a polyimide film with improved slidability having a dynamic friction coefficient of 0.05 to 0.7.
In addition, the present invention provides a heat fusion that does not contain inorganic powder in which the total aromatic polyimide particles are dispersed at a ratio of about 0.5 to 10% by mass with respect to the polyimide of at least one surface of the heat-fusible polyimide surface layer. The present invention relates to an easy-sliding polyimide film having a conductive polyimide surface layer, heat-fusible, long and good winding properties.
In addition, the present invention has a heat-fusible polyimide surface layer containing no inorganic powder in which all aromatic polyimide particles are dispersed in polyimide of at least one side of the heat-fusible polyimide surface layer, and has a static friction coefficient of 0. The present invention relates to a slippery polyimide film having a heat fusion property of 05 to 0.7 and a dynamic friction coefficient of 0.05 to 0.7 and having a long and good winding property.
Furthermore, the present invention relates to a copper-clad laminate in which a copper layer is laminated via a polyimide surface layer of the heat-sealable polyimide film having improved lubricity.
In the above description, at least about 1 μm of the polyimide surface layer means that the polyimide surface layer is rounded off to a thickness of 1 μm or more, preferably 0.7 μm or more.

この発明の易滑性の改良されたポリイミドフィルムは、適度の摩擦係数を有しておりロ−ルに巻き取ることが容易である。
また、この発明によれば、他の樹脂層を介在させることなく直接に銅箔と積層することができる。
また、この発明の銅張り積層基板は、ポリイミド表面に異常な特大突起を有しておらず、微細加工が可能である。
The polyimide film with improved slipperiness according to the present invention has an appropriate coefficient of friction and can be easily wound on a roll.
Moreover, according to this invention, it can laminate | stack with a copper foil directly, without interposing another resin layer.
In addition, the copper-clad laminate of the present invention does not have abnormal extra large protrusions on the polyimide surface and can be finely processed.

以下にこの発明の好ましい態様を列記する。
1)ポリイミド表面層が、1,3−ビス(4−アミノフェノキシ)ベンゼンおよび2,3,3’,4’−ビフェニルテトラカルボン酸二無水物と3,3’,4,4’−ビフェニルテトラカルボン酸二無水物との両成分の割合(モル比)が10/90〜90/10の割合で共重合して得られる熱可塑性のポリイミドからなる上記の易滑性の改良されたポリイミドフィルム。
2)ポリイミド表面層が、4,4’−ジアミノジフェニルエ−テルおよび3,3’,4,4’−ビフェニルテトラカルボン酸二無水物を重合して得られるポリイミドからなる上記の易滑性の改良されたポリイミドフィルム。
The preferred embodiments of the present invention are listed below.
1) Polyimide surface layer is composed of 1,3-bis (4-aminophenoxy) benzene and 2,3,3 ′, 4′-biphenyltetracarboxylic dianhydride and 3,3 ′, 4,4′-biphenyltetra The polyimide film with improved slipperiness as described above, comprising thermoplastic polyimide obtained by copolymerization at a ratio (molar ratio) of both components to carboxylic dianhydride of 10/90 to 90/10.
2) The above-described slippery material comprising a polyimide obtained by polymerizing 4,4′-diaminodiphenyl ether and 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride. Improved polyimide film.

3)フィルム全体の厚みが約10〜50μmである上記の易滑性の改良されたポリイミドフィルム。
4)銅層が、ラミネ−ト法によって銅箔が積層されるかあるいは薄膜成膜法および電気めっき法を用いて金属薄膜および銅めっき層を形成して銅層を積層したものである上記の銅張り積層基板。
3) The polyimide film with improved slipperiness as described above, wherein the entire film has a thickness of about 10 to 50 μm.
4) The copper layer is formed by laminating a copper foil by a laminating method, or forming a metal thin film and a copper plating layer using a thin film deposition method and an electroplating method, and laminating the copper layer. Copper-clad laminated board.

この発明の易滑性の改良されたポリイミドフィルムとしては、熱可塑性を有しガラス転移温度が190〜450℃、好適には190〜320℃であるポリイミドからなるフィルムの表面に前記の条件を満足する表面層を有するもの、あるいは耐熱性のポリイミド層の両面に前記の条件を満足する表面層を有するものが挙げられる。
前記の発明の易滑性の改良されたポリイミドフィルムは、例えば、熱可塑性を有しガラス転移温度が190〜450℃、好適には190〜320℃であるポリイミドを与えるポリアミック酸溶液およびピロメリット酸成分とp−フェニレンジアミン成分とを80%以上含有しメジアン径が0.3〜0.8μmでかつ最大径が2μm以下である全芳香族ポリイミド粒子を前記ポリアミック酸に対して0.5〜10質量%、好適には0.5〜5質量%の割合で含有するポリアミック酸溶液組成物を乾燥後の厚みが約1μm以上となるように支持体上に塗布、乾燥し、加熱して溶媒除去およびイミド化することによって、製造することができる。
The polyimide film with improved slipperiness according to the present invention satisfies the above conditions on the surface of a film made of polyimide having thermoplasticity and a glass transition temperature of 190 to 450 ° C., preferably 190 to 320 ° C. And a surface layer satisfying the above conditions on both sides of a heat-resistant polyimide layer.
The polyimide film with improved slipperiness according to the present invention includes, for example, a polyamic acid solution and pyromellitic acid which give a polyimide having thermoplasticity and a glass transition temperature of 190 to 450 ° C., preferably 190 to 320 ° C. The total aromatic polyimide particles containing 80% or more of the component and the p-phenylenediamine component, having a median diameter of 0.3 to 0.8 μm and a maximum diameter of 2 μm or less are 0.5 to 10 to the polyamic acid. A polyamic acid solution composition containing 5% by mass, preferably 0.5 to 5% by mass, is applied onto a support so that the thickness after drying is about 1 μm or more, dried and heated to remove the solvent. And by imidization.

また、この発明の易滑性の改良されたポリイミドフィルムは、例えば、耐熱性ポリイミドからなるポリイミドコア層を与えるポリアミック酸溶液を支持体上に流延、乾燥して自己支持性フィルムを形成し、その両面に、熱可塑性を有しガラス転移温度が190〜450℃、好適には190〜320℃であるポリイミドを与える表面層用ポリアミック酸溶液およびピロメリット酸成分とp−フェニレンジアミン成分とを80%以上含有しメジアン径が0.3〜0.8μmでかつ最大径が2μm以下である全芳香族ポリイミド粒子を前記表面層用ポリアミック酸に対して0.5〜10質量%、好適には0.5〜5質量%の割合で含有する表面層用ポリアミック酸溶液組成物を乾燥後の厚みが約1μm以上となるように塗布、乾燥し、必要であれば更に他の面に前記の表面層用ポリアミック酸溶液組成物を乾燥後の厚みが約1μm以上となるように塗布、乾燥し、加熱して溶媒除去およびイミド化することによって、製造することができる。   In addition, the polyimide film with improved lubricity according to the present invention is, for example, a polyamic acid solution that gives a polyimide core layer made of heat-resistant polyimide is cast on a support and dried to form a self-supporting film. A polyamic acid solution for a surface layer which gives a polyimide having thermoplasticity and a glass transition temperature of 190 to 450 ° C., preferably 190 to 320 ° C., a pyromellitic acid component and a p-phenylenediamine component on both sides % Of the total aromatic polyimide particles having a median diameter of 0.3 to 0.8 μm and a maximum diameter of 2 μm or less with respect to the polyamic acid for the surface layer, preferably 0.5 to 10% by mass, preferably 0 The surface layer polyamic acid solution composition contained at a ratio of 5 to 5% by mass is applied and dried so that the thickness after drying is about 1 μm or more. Applying another of said surface layer for a polyamic acid solution composition on a surface so that the thickness after drying of about 1μm or more, by dried and the solvent removal and imidization by heating, can be produced.

前記の熱可塑性を有しガラス転移温度が190〜450℃、好適には190〜320℃である熱可塑性ポリイミド層のポリイミドとしては、1,3−ビス(4−アミノフェノキシ)ベンゼンおよび2,3,3’,4’−ビフェニルテトラカルボン酸二無水物と3,3’,4,4’−ビフェニルテトラカルボン酸二無水物との両成分の割合(モル比)が20/80〜80/20の割合で共重合して得られる熱融着性のポリイミド、あるいは4,4−ジアミノジフェニルエ−テルおよび3,3’,4,4’−ビフェニルテトラカルボン酸二無水物を重合して得られるポリイミドが挙げられる。
また、前記の熱可塑性ポリイミド表面層のポリイミドとして、3,3’,4,4’−ベンゾフェノンテトラカルボン酸二無水物、2,2−ビス(3,4−ジカルボキシフェニル)プロパン、ビス(3,4−ジカルボキシフェニル)メタン、ビス(3,4−ジカルボキシフェニル)エ−テル、4,4’−ジアミノジフェニルエ−テル、3,3’−ジアミノジフェニルエ−テルなどのポリイミド分子中に柔軟性構造のモノマ−成分を有するポリイミドが挙げられる。
As the polyimide of the thermoplastic polyimide layer having the above thermoplasticity and a glass transition temperature of 190 to 450 ° C., preferably 190 to 320 ° C., 1,3-bis (4-aminophenoxy) benzene and 2,3 , 3 ′, 4′-biphenyltetracarboxylic dianhydride and 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride have a ratio (molar ratio) of both components of 20/80 to 80/20. It is obtained by polymerizing a heat-fusible polyimide obtained by copolymerization at a ratio of 4,4-diaminodiphenyl ether and 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride. A polyimide is mentioned.
Further, as the polyimide of the thermoplastic polyimide surface layer, 3,3 ′, 4,4′-benzophenonetetracarboxylic dianhydride, 2,2-bis (3,4-dicarboxyphenyl) propane, bis (3 , 4-dicarboxyphenyl) methane, bis (3,4-dicarboxyphenyl) ether, 4,4′-diaminodiphenylether, 3,3′-diaminodiphenylether A polyimide having a monomer component having a flexible structure is exemplified.

前記の耐熱性ポリイミド層のポリイミドとしては、15〜100モル%以上の3,3’,4,4’−ビフェニルテトラカルボン酸二無水物と0〜85モル%のピロメリット酸二無水物と15〜100モル%以上のp−フェニレンジアミンと0〜85モル%の4,4’−ジアミノジフェニルエ−テルとから、重合およびイミド化によって得られるポリイミド、あるいはピロメリット酸二無水物と4,4’−ジアミノジフェニルエ−テルとp−フェニレンジアミンとを両成分の割合(モル比)が90/10〜10/90の割合で共重合して得られるポリイミドが挙げられる。   As the polyimide of the heat-resistant polyimide layer, 15 to 100 mol% or more of 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 0 to 85 mol% of pyromellitic dianhydride and 15 Polyimide or pyromellitic dianhydride obtained by polymerization and imidization from ˜100 mol% or more of p-phenylenediamine and 0 to 85 mol% of 4,4′-diaminodiphenyl ether and 4,4 A polyimide obtained by copolymerizing '-diaminodiphenyl ether and p-phenylenediamine at a ratio of both components (molar ratio) of 90/10 to 10/90 is mentioned.

前記の方法において、耐熱性ポリイミドを与えるポリアミック酸溶液は、有機極性溶媒中で耐熱性ポリイミドを与える芳香族ジアミンと芳香族テトラカルボン酸二無水物とを定法によって重合することによって得ることができる。
前記の有機極性溶媒としては、N,N−ジメチルホルムアミド、N,N−ジメチルアセトアミド、N−メチル−2−ピロリドン、N−メチルカプロラクタムのアミド系溶媒、ジメチルスルホキシド、ヘキサメチルフォスホルアミド、ジメチルスルホン、テトラメチレンスルホン、ジメチルテトラメチレンスルホン、ピリジン、エチレングリコ−ル等を挙げることができる。
In the above method, the polyamic acid solution that gives heat-resistant polyimide can be obtained by polymerizing an aromatic diamine that gives heat-resistant polyimide and an aromatic tetracarboxylic dianhydride by an ordinary method in an organic polar solvent.
Examples of the organic polar solvent include N, N-dimethylformamide, N, N-dimethylacetamide, N-methyl-2-pyrrolidone, N-methylcaprolactam amide solvents, dimethyl sulfoxide, hexamethylphosphoramide, dimethyl sulfone. , Tetramethylene sulfone, dimethyltetramethylene sulfone, pyridine, ethylene glycol and the like.

前記の方法において、ポリアミック酸溶液を、例えばポリエステルフィルム、ステンレス鏡面、ベルト面等の支持体面上に流延塗布し、100〜200℃で半硬化状態またはそれ以前の乾燥状態とすることが好ましい。200℃を越えた高い温度で流延フィルムを処理すると、熱可塑性ポリイミドフィルムの製造において、接着性の低下などの欠陥を来す傾向にある。この半硬化状態またはそれ以前の状態とは、加熱および/または化学イミド化によって自己支持性の状態にあることを意味する。   In the above-described method, it is preferable that the polyamic acid solution is cast-coated on a support surface such as a polyester film, a stainless steel mirror surface, or a belt surface to be semi-cured or dried at 100 to 200 ° C. When a cast film is processed at a high temperature exceeding 200 ° C., defects such as a decrease in adhesion tend to be caused in the production of thermoplastic polyimide films. This semi-cured state or an earlier state means that it is in a self-supporting state by heating and / or chemical imidization.

前記の方法において、熱可塑性を有しガラス転移温度が190〜450℃、好適には190〜320℃であるポリイミドを与える表面層用ポリアミック酸溶液およびピロメリット酸成分とp−フェニレンジアミン成分とを80%以上含有しメジアン径が0.3〜0.8μmでかつ最大径が2μm以下である全芳香族ポリイミド粒子を前記表面層用ポリアミック酸に対して0.5〜10質量%、好適には0.5〜5質量%の割合で含有するポリアミック酸溶液組成物を使用する。   In the above method, a polyamic acid solution for a surface layer which gives a polyimide having thermoplasticity and a glass transition temperature of 190 to 450 ° C., preferably 190 to 320 ° C., a pyromellitic acid component and a p-phenylenediamine component 0.5 to 10% by mass of the wholly aromatic polyimide particles containing 80% or more and having a median diameter of 0.3 to 0.8 μm and a maximum diameter of 2 μm or less with respect to the polyamic acid for the surface layer, preferably A polyamic acid solution composition containing 0.5 to 5% by mass is used.

前記の全芳香族ポリイミド粒子としては、前記の極性溶媒にp−フェニレンジアミンおよびピロメリット酸二無水物が80%以上の等モル量を混合物中のポリイミドが3〜10質量%となる割合で加え、必要であれば分散剤を加えて、窒素ガスなどの不活性ガス雰囲気下に攪拌しながら160℃程度まで昇温し、この温度で2〜5時間程度加熱した後冷却して得られる全芳香族ポリイミド粒子を含有する溶液混合物をそのまま、あるいは必要であれば該極性溶媒を除去あるいは加えて全芳香族ポリイミド粒子溶媒混合物として使用することが好ましい。   As said total aromatic polyimide particle, p-phenylenediamine and pyromellitic dianhydride are added to the above polar solvent in an amount of 80% or more in an amount of 3 to 10% by mass of polyimide in the mixture. If necessary, a dispersant is added, the temperature is raised to about 160 ° C. while stirring in an inert gas atmosphere such as nitrogen gas, the whole fragrance obtained by heating at this temperature for about 2 to 5 hours and then cooling. It is preferable to use the solution mixture containing the aromatic polyimide particles as it is, or, if necessary, remove or add the polar solvent as a wholly aromatic polyimide particle solvent mixture.

この発明においては、前記の全芳香族ポリイミド粒子は、p−フェニレンジアミンおよびピロメリット酸二無水物が80%以上である芳香族ジアミンおよび芳香族テトラカルボン酸成分を使用することが好ましい。芳香族ジアミンおよび芳香族テトラカルボン酸成分が前記の両成分以外であると、0.3〜0.8μmでかつ最大径が2μm以下である全芳香族ポリイミド粒子を得ることができない。また、ポリイミド粒子の形状が前記の範囲外の粒径のものであると、熱可塑性ポリイミド層表面に微細な突起を形成することが困難であり、ファインパタ−ンが求められる銅張り積層基板には好ましくない。
前記のメジアン径とは、累積分布曲線の50%累積値に相当する径を指す。
従って、この発明におけるポリイミド粒子は真球状のものであってもよいが、短径と長径との比が2〜10、特に3〜6程度の柱状のものであってもよい。柱状の場合、短径が0.05〜0.5μmで、長径が0.7〜1.5μmであるものが好ましい。
また、銅張り積層基板としてファインパタ−ンが求められない場合には、メジアン径が0.3〜10μmである全芳香族ポリイミド粒子を使用することができる。
In the present invention, the wholly aromatic polyimide particles preferably use an aromatic diamine and an aromatic tetracarboxylic acid component in which p-phenylenediamine and pyromellitic dianhydride are 80% or more. When the aromatic diamine and the aromatic tetracarboxylic acid component are other than the two components, it is impossible to obtain wholly aromatic polyimide particles having a maximum diameter of 0.3 to 0.8 μm and a maximum diameter of 2 μm or less. Further, if the shape of the polyimide particles is of a particle size outside the above range, it is difficult to form fine protrusions on the surface of the thermoplastic polyimide layer, and a copper-clad laminate substrate that requires a fine pattern is required. Is not preferred.
The median diameter refers to a diameter corresponding to a 50% cumulative value of the cumulative distribution curve.
Accordingly, the polyimide particles in the present invention may be spherical, but may be columnar having a ratio of the minor axis to the major axis of 2 to 10, particularly about 3 to 6. In the case of a columnar shape, those having a minor axis of 0.05 to 0.5 μm and a major axis of 0.7 to 1.5 μm are preferable.
In addition, when a fine pattern is not required for the copper-clad laminate, fully aromatic polyimide particles having a median diameter of 0.3 to 10 μm can be used.

この発明によれば、熱可塑性であってガラス転移温度が190〜450℃であるポリイミドからなり無機粉末を含有しないポリイミド表面層を有し、静摩擦係数が0.05〜0.7、好適には0.1〜0.7、動摩擦係数が0.05〜0.7、好適には0.1〜0.7であり、フィルム表面に大きな突起が形成されず、易滑性の改良されたポリイミドフィルムが得られる。
特に、この発明によれば、少なくとも片面が熱融着性を有し長尺で1m/分以上の速度で巻取りロ−ルに巻き取り可能である易滑性ポリイミドフィルムおよびそれを用いた銅張り積層基板を得ることが可能となる。
According to this invention, it has a polyimide surface layer that is made of polyimide that is thermoplastic and has a glass transition temperature of 190 to 450 ° C. and does not contain inorganic powder, and has a coefficient of static friction of 0.05 to 0.7, preferably Polyimide having 0.1 to 0.7, a coefficient of dynamic friction of 0.05 to 0.7, preferably 0.1 to 0.7, no large protrusions formed on the film surface, and improved slipperiness A film is obtained.
In particular, according to the present invention, at least one surface is heat-sealable and is a long and easy-sliding polyimide film that can be wound on a winding roll at a speed of 1 m / min or more, and a copper using the same A stretched laminated substrate can be obtained.

この発明の銅張り積層基板は、前記の易滑性の改良されたポリイミドフィルムのポリイミド表面層を介して銅層を積層して得られる。
前記の銅層は、ラミネ−ト法によって銅箔を積層するかあるいは薄膜成膜法および電気めっき法を用いて金属薄膜および銅めっき層を形成することができる。
前記のラミネ−ト法による銅箔の積層および薄膜成膜法および電気めっき法を用いた金属薄膜および銅めっき層を形成する銅層の積層法としては、それ自体公知のすべての方法が採用できる。
The copper-clad laminate of the present invention is obtained by laminating a copper layer via the polyimide surface layer of the polyimide film having improved lubricity.
The copper layer can be formed by laminating a copper foil by a laminating method or forming a metal thin film and a copper plating layer by using a thin film forming method and an electroplating method.
Lamination of the copper foil by the laminating method and thin film forming method and metal thin film using the electroplating method and the copper layer laminating method for forming the copper plating layer can employ all methods known per se. .

この明細書において、易滑性[静摩擦係数、動摩擦係数]の評価方法は次による。
ASTM D1894に記載の方法に従って、23℃、60%RH、24時間で保持、調湿したポリイミドフィルムの片面を基板とし、その反対側の面がすり合わさるようにスレッドメタルに張り付け、ダイナミックスリップテスタ−を用いて(滑り速度:150mm/min)摩擦係数を測定した。
チャ−トの動き出したときの値を静摩擦係数、チャ−トの安定したときの値を動摩擦係数で表示する。
この明細書において、巻き取りの良否の評価方法は次による。
即ち、巻取り性の良否は、長尺状のポリイミドフィルムを巻取りロ−ル(心棒の外径:15cm)に2m/分の速度で巻取る際に、皺が発生したりロ−ルに巻きついて円滑に巻取りが出来ない場合を巻取り性が不良と、皺が生じず円滑に巻取りが可能である場合を巻き取り性が良好とした。
In this specification, the evaluation method of slipperiness [coefficient of static friction, coefficient of dynamic friction] is as follows.
In accordance with the method described in ASTM D1894, one side of a polyimide film held at 23 ° C., 60% RH for 24 hours and humidity-adjusted is used as a substrate, and is adhered to a thread metal so that the opposite side is rubbed together. (Sliding speed: 150 mm / min) was used to measure the friction coefficient.
The value when the chart starts to move is displayed as a static friction coefficient, and the value when the chart is stabilized as a dynamic friction coefficient.
In this specification, the method for evaluating the quality of winding is as follows.
In other words, whether the winding property is good or bad is that when a long polyimide film is wound on a winding roll (the outer diameter of the mandrel: 15 cm) at a speed of 2 m / min, wrinkles are generated or the roll is wound. The winding property is considered to be good when winding is not smooth and winding is not good, and when winding is possible without causing wrinkles.

また、粒子状ポリイミドの大きさの分析は次による。
分散溶媒としてN,N−ジメチルアセトアミドを使用し、超音波で60分間分散させて、測定範囲0.02〜1000μmで、レ−ザ−回折−散乱式粒度分布測定法によって、粒子径基準として体積基準で測定したものである。粒子状ポリイミドの作製により得られたスラリ−溶液を超音波洗浄機により60分間分散させた。測定セルに分散媒を入れ、それに分散させたスラリ−溶液をレ−ザ−光・ランプの透過率が95〜75%になるように滴下、稀釈した。その後、マニュアルバッチ式セル測定により測定を行なった。機器:レ−ザ−回折−散乱式粒度分布測定装置(形式:LA−910、堀場製作所株式会社製)、測定モ−ド:マニュアルバッチ式セル測定
粒子状ポリイミドの形状分析は、ガラス板上の粒子状ポリイミドの形状をSEM観察によって確認した。
The size of the particulate polyimide is analyzed as follows.
Using N, N-dimethylacetamide as a dispersion solvent, dispersing for 60 minutes with ultrasonic waves, measuring range of 0.02 to 1000 μm, volume as a particle size reference by laser diffraction-scattering particle size distribution measurement method It is measured by the standard. The slurry solution obtained by producing the particulate polyimide was dispersed for 60 minutes with an ultrasonic cleaner. A dispersion medium was placed in the measurement cell, and the slurry solution dispersed therein was dropped and diluted so that the transmittance of the laser light / lamp was 95 to 75%. Then, it measured by manual batch type cell measurement. Equipment: Laser diffraction-scattering type particle size distribution measuring device (Type: LA-910, manufactured by Horiba, Ltd.), Measurement mode: Manual batch cell measurement Shape analysis of particulate polyimide is performed on a glass plate The shape of the particulate polyimide was confirmed by SEM observation.

以下、実施例及び比較例を挙げて本発明を具体的に説明するが、本発明は下記実施例に制限されるものではない。
ファインパタ−ンの可否は、20μmのファインパタ−ン:ライン10μm/スペ−ス10μmを形成する際の、マイグレ−ション発生の可能性から判断した。
○:ファインパタ−ン可、×:ファインパタ−ン不可
参考例1
粒子状ポリイミドの作製
粒子状ポリイミドの作製はN,N’−ジメチルアセトアミド中にp−フェニレンジアミン、ピロメリット酸二無水物を溶解し、分散剤(デスパ−サント:対モノマ−0.5質量%)を添加し、窒素雰囲気下で撹拌(40rpm)しながら160℃まで徐々に昇温し、該温度に到達後3時間攪拌を行なって得られたものを使用した。得られた粒子状ポリイミドの分析はレ−ザ−回折−散乱式粒度分布測定装置にて粒度分布の測定行ない、メジアン径0.3μm、分布範囲0.1〜1μmであった。また、SEM観察において粒子状ポリイミドの形状を確認した結果、短径と長径の比が3〜6の柱状粒子であった。
EXAMPLES Hereinafter, although an Example and a comparative example are given and this invention is demonstrated concretely, this invention is not restrict | limited to the following Example.
The possibility of fine patterning was judged from the possibility of migration when forming a fine pattern of 20 μm: line 10 μm / space 10 μm.
○: Fine pattern possible, ×: Fine pattern not possible Reference Example 1
Preparation of particulate polyimide Particulate polyimide is prepared by dissolving p-phenylenediamine and pyromellitic dianhydride in N, N'-dimethylacetamide, and dispersing agent (Desper-Sant: 0.5% by mass relative to monomer). ) Was added, and the temperature was gradually raised to 160 ° C. with stirring (40 rpm) in a nitrogen atmosphere, and after reaching this temperature, stirring was performed for 3 hours. Analysis of the obtained particulate polyimide was performed by measuring the particle size distribution with a laser diffraction-scattering particle size distribution measuring device, and the median diameter was 0.3 μm and the distribution range was 0.1 to 1 μm. Moreover, as a result of confirming the shape of the particulate polyimide in SEM observation, the ratio of the minor axis to the major axis was a columnar particle having 3 to 6.

3,3’,4,4’−ビフェニルテトラカルボン酸二無水物、2,3,3’,4’−ビフェニルテトラカルボン酸二無水物と1,3−ビス(4−アミノフェノキシ)ベンゼンを主として得られるポリアミック酸の18質量%溶液に粒子状ポリイミドをモノマ−濃度に対して0.5質量%となるように添加し、乾燥後のフィルム厚みが25μmとなるようにステンレス基板上に流延して120℃の熱風で乾燥を行い、基板から剥離して自己支持性フィルムを得た。得られた自己支持性フィルムを加熱炉で140℃から330℃に徐々に昇温して溶媒の除去、イミド化を行なって長尺のポリイミドフィルムを巻取りロ−ルに巻き取った。巻取る際の巻取り性は良好であった。また、得られたフィルムの摩擦係数を測定した。3,3’,4,4’−ビフェニルテトラカルボン酸二無水物、2,3,3’,4’−ビフェニルテトラカルボン酸二無水物と1,3−ビス(4−アミノフェノキシ)ベンゼンを主として得られるポリイミドのTgは240℃であった。
得られたポリイミドフィルムについて評価した結果を次に示す。
フィルム厚み(μm):25
表層易滑剤濃度(%):0.5
易滑剤種類:全芳香族粒子状ポリイミド
静摩擦係数:0.51
動摩擦係数:0.47
Mainly 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,3,3 ′, 4′-biphenyltetracarboxylic dianhydride and 1,3-bis (4-aminophenoxy) benzene Particulate polyimide is added to the obtained polyamic acid 18% by mass solution so as to be 0.5% by mass with respect to the monomer concentration, and cast onto a stainless steel substrate so that the film thickness after drying is 25 μm. The film was dried with hot air at 120 ° C. and peeled from the substrate to obtain a self-supporting film. The obtained self-supporting film was gradually heated from 140 ° C. to 330 ° C. in a heating furnace to remove the solvent and imidize, and wound up a long polyimide film on a winding roll. The windability during winding was good. Moreover, the friction coefficient of the obtained film was measured. Mainly 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,3,3 ′, 4′-biphenyltetracarboxylic dianhydride and 1,3-bis (4-aminophenoxy) benzene The Tg of the resulting polyimide was 240 ° C.
The result evaluated about the obtained polyimide film is shown next.
Film thickness (μm): 25
Surface lubricant concentration (%): 0.5
Type of lubricant: Totally aromatic particulate polyimide Static coefficient of friction: 0.51
Coefficient of dynamic friction: 0.47

3,3’,4,4’−ビフェニルテトラカルボン酸二無水物、2,3,3’,4’−ビフェニルテトラカルボン酸二無水物と1,3−ビス(4−アミノフェノキシ)ベンゼンを主として得られるポリアミック酸の18質量%溶液を乾燥後のフィルム厚みが24μmとなるようにステンレス基板上に流延して120℃の熱風で乾燥を行った。得られたフィルム上に3,3’,4,4’−ビフェニルテトラカルボン酸二無水物、2,3,3’,4’−ビフェニルテトラカルボン酸二無水物と1,3−ビス(4−アミノフェノキシ)ベンゼンを主として得られるポリアミック酸の5質量%溶液に粒子状ポリイミドをモノマ−濃度に対して2質量%となるように添加した溶液を乾燥後の総フィルム厚みが25μmとなるように積層し、120℃の熱風で乾燥を行い、基板から剥離して自己支持性フィルムを得た。 得られた自己支持性フィルムを加熱炉で140℃から330℃に徐々に昇温して溶媒の除去、イミド化を行なって長尺のポリイミドフィルムを巻取りロ−ルに巻き取った。巻取る際の巻取り性は良好であった。また、得られたフィルムの摩擦係数を測定した。表層に使用される3,3’,4,4’−ビフェニルテトラカルボン酸二無水物、2,3,3’,4’−ビフェニルテトラカルボン酸二無水物と1,3−ビス(4−アミノフェノキシ)ベンゼンを主として得られるポリイミドのTgは240℃であった。
得られたポリイミドフィルムについて評価した結果を次に示す。
フィルム厚み(μm):25
表層易滑剤濃度(%):2.0
易滑剤種類:全芳香族粒子状ポリイミド
静摩擦係数:0.37
動摩擦係数:0.33
Mainly 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,3,3 ′, 4′-biphenyltetracarboxylic dianhydride and 1,3-bis (4-aminophenoxy) benzene The obtained 18% by mass solution of polyamic acid was cast on a stainless steel substrate so that the film thickness after drying was 24 μm, and dried with hot air at 120 ° C. 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,3,3 ′, 4′-biphenyltetracarboxylic dianhydride and 1,3-bis (4- Aminophenoxy) A solution obtained by adding particulate polyimide to a 5% by mass solution of polyamic acid mainly obtained from benzene so as to be 2% by mass with respect to the monomer concentration is laminated so that the total film thickness after drying is 25 μm. Then, it was dried with hot air at 120 ° C. and peeled from the substrate to obtain a self-supporting film. The obtained self-supporting film was gradually heated from 140 ° C. to 330 ° C. in a heating furnace to remove the solvent and imidize, and wound up a long polyimide film on a winding roll. The windability during winding was good. Moreover, the friction coefficient of the obtained film was measured. 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,3,3 ′, 4′-biphenyltetracarboxylic dianhydride and 1,3-bis (4-amino) used for the surface layer The Tg of the polyimide obtained mainly from phenoxy) benzene was 240 ° C.
The result evaluated about the obtained polyimide film is shown next.
Film thickness (μm): 25
Surface lubricant agent concentration (%): 2.0
Easy lubricant type: Totally aromatic particulate polyimide Static coefficient of friction: 0.37
Coefficient of dynamic friction: 0.33

3,3’,4,4’−ビフェニルテトラカルボン酸二無水物、2,3,3’,4’−ビフェニルテトラカルボン酸二無水物と1,3−ビス(4−アミノフェノキシ)ベンゼンを主として得られるポリアミック酸の10質量%溶液を乾燥後のフィルム厚みが3μmとなるようにステンレス基板上に流延して120℃の熱風で乾燥を行った。得られた乾燥フィルム上に3,3’,4,4’−ビフェニルテトラカルボン酸二無水物、p−フェニレンジアミンを主として得られるポリアミック酸の18質量%溶液に乾燥後の厚みが22μmとなるように積層して120℃の熱風で乾燥を行い、さらにその上に3,3’,4,4’−ビフェニルテトラカルボン酸二無水物、2,3,3’,4’−ビフェニルテトラカルボン酸二無水物と1,3−ビス(4−アミノフェノキシ)ベンゼンを主として得られるポリアミック酸の10質量%溶液に粒子状ポリイミドをモノマ−濃度に対して2質量%となるように添加した溶液を乾燥後の総フィルム厚みが25μmとなるように積層し、120℃の熱風で乾燥を行い、基板から剥離して自己支持性フィルムを得た。得られた自己支持性フィルムを同様に加熱して長尺のポリイミドフィルムを巻取りロ−ルに巻き取った。巻取る際の巻取り性は良好であった。また、得られたフィルムの摩擦係数を測定した。表層に使用される3,3’,4,4’−ビフェニルテトラカルボン酸二無水物、2,3,3’,4’−ビフェニルテトラカルボン酸二無水物と1,3−ビス(4−アミノフェノキシ)ベンゼンを主として得られるポリイミドのTgは240℃であった。
得られたポリイミドフィルムについて評価した結果を次に示す。
フィルム厚み(μm):25
表層易滑剤濃度(%):2.0
易滑剤種類:全芳香族粒子状ポリイミド
静摩擦係数:0.45
動摩擦係数:0.40
Mainly 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,3,3 ′, 4′-biphenyltetracarboxylic dianhydride and 1,3-bis (4-aminophenoxy) benzene The obtained 10% by mass solution of polyamic acid was cast on a stainless steel substrate so that the film thickness after drying was 3 μm, and was dried with hot air at 120 ° C. On the obtained dry film, 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride and p-phenylenediamine are mainly used to obtain an 18% by mass solution of polyamic acid so that the thickness after drying becomes 22 μm. And dried with hot air at 120 ° C., and then 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride and 2,3,3 ′, 4′-biphenyltetracarboxylic acid After drying a solution obtained by adding particulate polyimide to a 10% by mass solution of polyamic acid mainly obtained from anhydride and 1,3-bis (4-aminophenoxy) benzene so as to be 2% by mass with respect to the monomer concentration The film was laminated so that the total film thickness was 25 μm, dried with hot air at 120 ° C., and peeled from the substrate to obtain a self-supporting film. The obtained self-supporting film was heated in the same manner, and a long polyimide film was wound on a winding roll. The windability during winding was good. Moreover, the friction coefficient of the obtained film was measured. 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,3,3 ′, 4′-biphenyltetracarboxylic dianhydride and 1,3-bis (4-amino) used for the surface layer The Tg of the polyimide obtained mainly from phenoxy) benzene was 240 ° C.
The result evaluated about the obtained polyimide film is shown next.
Film thickness (μm): 25
Surface lubricant agent concentration (%): 2.0
Easy lubricant type: Totally aromatic particulate polyimide Static coefficient of friction: 0.45
Coefficient of dynamic friction: 0.40

3,3’,4,4’−ビフェニルテトラカルボン酸二無水物、2,3,3’,4’−ビフェニルテトラカルボン酸二無水物と1,3−ビス(4−アミノフェノキシ)ベンゼンを主として得られるポリアミック酸の10質量%溶液を乾燥後のフィルム厚みが3μmとなるようにステンレス基板上に流延して120℃の熱風で乾燥を行った。得られた乾燥フィルム上に3,3’,4,4’−ビフェニルテトラカルボン酸二無水物、p−フェニレンジアミンを主として得られるポリアミック酸の18質量%溶液に乾燥後の厚みが21μmとなるように積層して120℃の熱風で乾燥を行い、さらに3,3’,4,4’−ビフェニルテトラカルボン酸二無水物、2,3,3’,4’−ビフェニルテトラカルボン酸二無水物と1,3−ビス(4−アミノフェノキシ)ベンゼンを主として得られるポリアミック酸の10質量%溶液乾燥後の厚みが24μmとなるように積層して120℃の熱風で乾燥を行った。続いて3,3’,4,4’−ビフェニルテトラカルボン酸二無水物、2,3,3’,4’−ビフェニルテトラカルボン酸二無水物と1,3−ビス(4−アミノフェノキシ)ベンゼンを主として得られるポリアミック酸の5質量%溶液に粒子状ポリイミドをモノマ−濃度に対して2質量%となるように添加した溶液を乾燥後の総フィルム厚みが25μmとなるように積層し、120℃の熱風で乾燥を行い、基板から剥離して自己支持性フィルムを得た。得られた自己支持性フィルムを同様に加熱して長尺のポリイミドフィルムを巻取りロ−ルに巻き取った。巻取る際の巻取り性は良好であった。また、得られたフィルムの摩擦係数を測定した。表層に使用される3,3’,4,4’−ビフェニルテトラカルボン酸二無水物、2,3,3’,4’−ビフェニルテトラカルボン酸二無水物と1,3−ビス(4−アミノフェノキシ)ベンゼンを主として得られるポリイミドのTgは240℃であった。
得られたポリイミドフィルムについて評価した結果を次に示す。
フィルム厚み(μm):25
表層易滑剤濃度(%):2.0
易滑剤種類:全芳香族粒子状ポリイミド
静摩擦係数:0.33
動摩擦係数:0.31
Mainly 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,3,3 ′, 4′-biphenyltetracarboxylic dianhydride and 1,3-bis (4-aminophenoxy) benzene The obtained 10% by mass solution of polyamic acid was cast on a stainless steel substrate so that the film thickness after drying was 3 μm, and was dried with hot air at 120 ° C. On the obtained dry film, 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride and p-phenylenediamine are mainly obtained to obtain an 18% by mass solution of polyamic acid so that the thickness after drying becomes 21 μm. And dried with hot air at 120 ° C., and 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,3,3 ′, 4′-biphenyltetracarboxylic dianhydride, 1,3-bis (4-aminophenoxy) benzene was laminated so that the thickness after drying a 10% by weight polyamic acid solution obtained mainly was 24 μm, and dried with hot air at 120 ° C. Subsequently, 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,3,3 ′, 4′-biphenyltetracarboxylic dianhydride and 1,3-bis (4-aminophenoxy) benzene A solution obtained by adding particulate polyimide to a 5% by mass solution of polyamic acid obtained mainly so as to be 2% by mass with respect to the monomer concentration is laminated so that the total film thickness after drying is 25 μm, and 120 ° C. The film was dried with hot air and peeled from the substrate to obtain a self-supporting film. The obtained self-supporting film was heated in the same manner, and a long polyimide film was wound on a winding roll. The windability during winding was good. Moreover, the friction coefficient of the obtained film was measured. 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 2,3,3 ′, 4′-biphenyltetracarboxylic dianhydride and 1,3-bis (4-amino) used for the surface layer The Tg of the polyimide obtained mainly from phenoxy) benzene was 240 ° C.
The result evaluated about the obtained polyimide film is shown next.
Film thickness (μm): 25
Surface lubricant agent concentration (%): 2.0
Easy lubricant type: Totally aromatic particulate polyimide Static coefficient of friction: 0.33
Coefficient of dynamic friction: 0.31

3,3’,4,4’−ビフェニルテトラカルボン酸二無水物と3,3’−ジアミノジフェニルエ−テルを主として得られるポリアミック酸の18質量%溶液を乾燥後のフィルム厚みが24μmとなるようにステンレス基板上に流延して120℃の熱風で乾燥を行った。得られた乾燥フィルム上に3,3’,4,4’−ビフェニルテトラカルボン酸二無水物と3,3’−ジアミノジフェニルエ−テルを主として得られるポリアミック酸を主として得られるポリアミック酸の2質量%溶液に粒子状ポリイミドをモノマ−濃度に対して2質量%となるように添加した溶液を乾燥後の総フィルム厚みが25μmとなるように積層し、120℃の熱風で乾燥を行い、基板から剥離して自己支持性フィルムを得た。得られた自己支持性フィルムを同様に加熱して長尺のポリイミドフィルムを巻取りロ−ルに巻き取った。巻取る際の巻取り性は良好であった。また、得られたフィルムの摩擦係数を測定した。表層に使用される3,3’,4,4’−ビフェニルテトラカルボン酸二無水物と3,3’−ジアミノジフェニルエ−テルを主として得られるポリイミドのTgは280℃であった。
得られたポリイミドフィルムについて評価した結果を次に示す。
フィルム厚み(μm):25
表層易滑剤濃度(%):2.0
易滑剤種類:全芳香族粒子状ポリイミド
静摩擦係数:0.42
動摩擦係数:0.31
The film thickness after drying an 18% by mass solution of polyamic acid obtained mainly from 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride and 3,3′-diaminodiphenyl ether is 24 μm. The product was cast on a stainless steel substrate and dried with hot air at 120 ° C. 2 masses of polyamic acid obtained mainly from polyamic acid obtained mainly from 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride and 3,3′-diaminodiphenyl ether on the obtained dry film A solution obtained by adding particulate polyimide to a solution of 2% by mass with respect to the monomer concentration is laminated so that the total film thickness after drying is 25 μm, and dried with hot air at 120 ° C. It peeled and the self-supporting film was obtained. The obtained self-supporting film was heated in the same manner, and a long polyimide film was wound on a winding roll. The windability during winding was good. Moreover, the friction coefficient of the obtained film was measured. Tg of the polyimide mainly obtained from 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride and 3,3′-diaminodiphenyl ether used for the surface layer was 280 ° C.
The result evaluated about the obtained polyimide film is shown next.
Film thickness (μm): 25
Surface lubricant agent concentration (%): 2.0
Easy lubricant type: Totally aromatic particulate polyimide Static coefficient of friction: 0.42
Coefficient of dynamic friction: 0.31

実施例1〜4で得られたポリイミドフィルムの各々を使用し、片面側に厚み12μmの銅箔(圧延銅箔あるいは電解銅箔)と他面側に保護材(ユ−ピレックス25S)とを、ダブルベルトプレスに連続的に供給し、予熱後、加熱ゾ−ンの温度(最高加熱温度)330℃(設定)、冷却ゾ−ンの温度(最低冷却温度)117℃)、圧着圧力40kg/cm、圧着時間2分で、連続的に加圧下に熱圧着−冷却して積層し、保護材付き片面銅張り積層基板であるロ−ル巻状物を連続的に得ることができた。
また、これらの片面銅張り積層基板について評価した。
銅箔とポリイミドフィルムとの剥離強度(90度剥離):いずれも1kgf/cm以上ファインパタ−ン可否:○
実施例5で得られたポリイミドフィルムを使用し、常法によりNi/Crの下地金属ついで銅を蒸着した後に電気銅メッキして、片面銅張り積層基板であるロ−ル巻状物を連続的に得ることができた。
また、この片面銅張り積層基板について評価した。
銅箔とポリイミドフィルムとの剥離強度(90度剥離):0.8kgf/cm
ファインパタ−ン可否:○
Using each of the polyimide films obtained in Examples 1 to 4, a 12 μm thick copper foil (rolled copper foil or electrolytic copper foil) on one side and a protective material (Upilex 25S) on the other side, Continuously supplied to the double belt press, after preheating, heating zone temperature (maximum heating temperature) 330 ° C (setting), cooling zone temperature (minimum cooling temperature) 117 ° C), pressure bonding pressure 40 kg / cm 2. In a crimping time of 2 minutes, it was possible to continuously obtain a roll wound product that was a single-sided copper-clad laminated substrate with a protective material by thermocompression-cooling and cooling under pressure.
Moreover, these single-sided copper clad laminated substrates were evaluated.
Peel strength between copper foil and polyimide film (90 degree peel): Either 1 kgf / cm or more Fine pattern propriety: ○
Using the polyimide film obtained in Example 5, copper was deposited on the Ni / Cr base metal by a conventional method, and then copper electroplating was performed to continuously roll the rolled product as a single-sided copper-clad laminate. Could get to.
Moreover, this single-sided copper-clad laminated substrate was evaluated.
Peel strength between copper foil and polyimide film (90 degree peel): 0.8 kgf / cm
Fine pattern availability: ○

(参考例1)
粒子状ポリイミドを作製するために、p−フェニレンジアミンおよびピロメリット酸無水物に代えてp−フェニレンジアミンと3,3’,4,4’−ビフェニルテトラカルボン酸二無水物を使用してポリイミド粉末を得た。
このポリイミド粉末の形状は以下の通りであった。
メジアン径8.9μm,分布範囲0.1〜22.8μmであった。また、SEM観察において粒子状ポリイミドの形状を確認した結果、球状粒子であった。
このポリイミド粉末を使用した他は実施例4と同様に実施した。長尺のポリイミドフィルムを巻取りロ−ルに巻取る際の巻取り性は良好であった。
結果は次の通りであった。
フィルム厚み(μm):25
表層易滑剤濃度(%):2.0
易滑剤種類:全芳香族粒子状ポリイミド
静摩擦係数:0.35
動摩擦係数:0.29
得られたポリイミドフィルムの表面層の表面のSEM観察結果を図2に示す。
参考例1で得られたポリイミドフィルムを使用して保護材付き片面銅張り積層基板であるロ−ル巻状物を連続的に得ることができた。
また、これらの片面銅張り積層基板について評価した。
銅箔とポリイミドフィルムとの剥離強度(90度剥離):1kgf/cm以上
ファインパタ−ン可否:×
(Reference Example 1)
Polyimide powder using p-phenylenediamine and 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride instead of p-phenylenediamine and pyromellitic anhydride to produce particulate polyimide Got.
The shape of this polyimide powder was as follows.
The median diameter was 8.9 μm and the distribution range was 0.1 to 22.8 μm. Moreover, as a result of confirming the shape of the particulate polyimide in SEM observation, it was a spherical particle.
The same operation as in Example 4 was performed except that this polyimide powder was used. The winding property at the time of winding a long polyimide film on a winding roll was good.
The results were as follows.
Film thickness (μm): 25
Surface lubricant agent concentration (%): 2.0
Easy lubricant type: Totally aromatic particulate polyimide Static coefficient of friction: 0.35
Coefficient of dynamic friction: 0.29
The SEM observation result of the surface of the surface layer of the obtained polyimide film is shown in FIG.
Using the polyimide film obtained in Reference Example 1 , a roll wound product which is a single-sided copper-clad laminated substrate with a protective material could be obtained continuously.
Moreover, these single-sided copper clad laminated substrates were evaluated.
Peel strength between copper foil and polyimide film (90 degree peel): 1 kgf / cm or more Fine pattern propriety: x

(参考例2)
粒子状ポリイミドを作製するために、p−フェニレンジアミンおよびピロメリット酸無水物に代えて3,3’−ジアミノジフェニルエ−テルと3,3’,4,4’−ビフェニルテトラカルボン酸二無水物を使用してポリイミド粉末を得た。
このポリイミド粉末の形状は以下の通りであった。
メジアン径7.7μm、分布範囲0.2〜22.8μmであった。また、SEM観察において粒子状ポリイミドの形状を確認した結果、球状粒子であった。
このポリイミド粉末を使用した他は実施例4と同様に実施した。長尺のポリイミドフィルムを巻取りロ−ルに巻取る際の巻取り性は良好であった。
結果は次の通りであった。
フィルム厚み(μm):25
表層易滑剤濃度(%):2.0
易滑剤種類:全芳香族粒子状ポリイミド
静摩擦係数:0.38
動摩擦係数:0.32
得られたポリイミドフィルムの表面層の表面のSEM観察結果を図3に示す。
参考例2で得られたポリイミドフィルムを使用して保護材付き片面銅張り積層基板であるロ−ル巻状物を連続的に得ることができた。
また、これらの片面銅張り積層基板について評価した。
銅箔とポリイミドフィルムとの剥離強度(90度剥離):1kgf/cm以上
ファインパタ−ン可否:×

(Reference Example 2)
To prepare particulate polyimide, 3,3′-diaminodiphenyl ether and 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride instead of p-phenylenediamine and pyromellitic anhydride Was used to obtain polyimide powder.
The shape of this polyimide powder was as follows.
The median diameter was 7.7 μm, and the distribution range was 0.2 to 22.8 μm. Moreover, as a result of confirming the shape of the particulate polyimide in SEM observation, it was a spherical particle.
The same operation as in Example 4 was performed except that this polyimide powder was used. The winding property at the time of winding a long polyimide film on a winding roll was good.
The results were as follows.
Film thickness (μm): 25
Surface lubricant agent concentration (%): 2.0
Easy lubricant type: Totally aromatic particulate polyimide Static coefficient of friction: 0.38
Coefficient of dynamic friction: 0.32
The SEM observation result of the surface of the surface layer of the obtained polyimide film is shown in FIG.
Using the polyimide film obtained in Reference Example 2 , a roll wound product which is a single-sided copper-clad laminated substrate with a protective material could be obtained continuously.
Moreover, these single-sided copper clad laminated substrates were evaluated.
Peel strength between copper foil and polyimide film (90 degree peel): 1 kgf / cm or more Fine pattern propriety: x

比較施1
粒子状ポリイミドに代えて無機フィラ−であるシリカフィラ−(ST−ZL、日産化学社製、メジアン径0.13μm)を使用した他は実施例1と同様に実施した。長尺のポリイミドフィルムを巻取りロ−ルに巻取る際の巻取り性は不良であった。
結果は次の通りであった。
フィルム厚み(μm):25
表層易滑剤濃度(%):0.5
Comparison 1
It implemented similarly to Example 1 except having used the silica filler (ST-ZL, the Nissan Chemical Co., Ltd. make, median diameter 0.13 micrometer) which is an inorganic filler instead of the particulate polyimide. The winding property when winding a long polyimide film on a winding roll was poor.
The results were as follows.
Film thickness (μm): 25
Surface lubricant concentration (%): 0.5

比較施2
粒子状ポリイミドに代えて無機フィラ−であるシリカフィラ−(ST−ZL、メジアン径0.13μm)を使用した他は実施例2と同様に実施した。長尺のポリイミドフィルムを巻取りロ−ルに巻取る際の巻取り性は不良であった。
結果は次の通りであった。
フィルム厚み(μm):25
表層易滑剤濃度(%):2.0
Comparison 2
It implemented similarly to Example 2 except having used the silica filler (ST-ZL, median diameter 0.13 micrometer) which is an inorganic filler instead of particulate polyimide. The winding property when winding a long polyimide film on a winding roll was poor.
The results were as follows.
Film thickness (μm): 25
Surface lubricant agent concentration (%): 2.0

図1は、この発明の一例の実施例4で得られたポリイミドフィルムの表面層の表面のSEM観察結果(2000倍)を示す図である。FIG. 1 is a diagram showing SEM observation results (2000 times) of the surface of the surface layer of the polyimide film obtained in Example 4 of the present invention. 図2は、実施例6で得られたポリイミドフィルムの表面層の表面のSEM観察結果(2000倍)を示す図である。FIG. 2 is a diagram showing SEM observation results (2000 times) of the surface layer of the polyimide film obtained in Example 6. FIG. 図3は、実施例7で得られたポリイミドフィルムの表面層の表面のSEM観察結果(2000倍)を示す図である。3 is a diagram showing SEM observation results (2000 times) of the surface layer of the polyimide film obtained in Example 7. FIG.

Claims (11)

熱可塑性であってガラス転移温度が190〜450℃であるポリイミドからなるポリイミド表面層を有し、少なくともポリイミド表面層(1μmの厚み)中にピロメリット酸成分とp−フェニレンジアミン成分とから得られるポリイミドからなりメジアン径が0.3〜0.8μm、最大径が2μm以下でかつ短径と長径との比が2〜10の柱状の全芳香族ポリイミド粒子をポリイミド表面層のポリイミドに対して0.5〜10質量%の割合で分散してなる易滑性の改良されたポリイミドフィルム。 Glass transition temperature A thermoplastic has a polyimide surface layer made of polyimide is 190-450 ° C., is obtained from at least a polyimide surface layer (1 [mu] m thick) pyromellitic acid component in the p- phenylenediamine component Columnar wholly aromatic polyimide particles made of polyimide having a median diameter of 0.3 to 0.8 μm, a maximum diameter of 2 μm or less, and a ratio of the short diameter to the long diameter of 2 to 10 are 0 with respect to the polyimide of the polyimide surface layer. A polyimide film with improved slipperiness which is dispersed at a ratio of 5 to 10% by mass. ポリイミド表面層は、ポリイミド表面層0.7μm以上の厚み中にピロメリット酸成分とp−フェニレンジアミン成分とから得られるポリイミドからなりメジアン径が0.3〜0.8μm、最大径が2μm以下でかつ短径と長径との比が2〜10の柱状の全芳香族ポリイミド粒子をポリイミド表面層のポリイミドに対して0.5〜10質量%の割合で分散していることを特徴とする請求項1に記載の易滑性の改良されたポリイミドフィルム。 The polyimide surface layer is composed of a polyimide obtained from a pyromellitic acid component and a p-phenylenediamine component in a thickness of 0.7 μm or more of the polyimide surface layer, and has a median diameter of 0.3 to 0.8 μm and a maximum diameter of 2 μm or less. The columnar wholly aromatic polyimide particles having a ratio of the minor axis to the major axis of 2 to 10 are dispersed at a ratio of 0.5 to 10% by mass with respect to the polyimide of the polyimide surface layer. 2. A polyimide film with improved slipperiness according to 1. ポリイミド表面層は、ポリイミド表面層0.7μm以上の厚み中にピロメリット酸成分とp−フェニレンジアミン成分とから得られるポリイミドからなりメジアン径が0.3〜0.8μm、粒子径の分布範囲が0.1〜1μmでかつ短径と長径との比が2〜6の柱状の全芳香族ポリイミド粒子をポリイミド表面層のポリイミドに対して0.5〜10質量%の割合で分散していることを特徴とする請求項1に記載の易滑性の改良されたポリイミドフィルム。 The polyimide surface layer is made of polyimide obtained from a pyromellitic acid component and a p-phenylenediamine component in a thickness of 0.7 μm or more of the polyimide surface layer, and has a median diameter of 0.3 to 0.8 μm and a particle diameter distribution range. Columnar wholly aromatic polyimide particles having a minor axis to major axis ratio of 2 to 6 of 0.1 to 1 μm are dispersed at a ratio of 0.5 to 10% by mass with respect to the polyimide of the polyimide surface layer. The polyimide film having improved slipperiness according to claim 1. ポリイミド表面層は、無機粉末を含有しないことを特徴とする請求項1〜3のいずれかに記載の易滑性の改良されたポリイミドフィルム。   The polyimide surface layer according to any one of claims 1 to 3, wherein the polyimide surface layer does not contain an inorganic powder. 易滑性の改良されたポリイミドフィルムは、易滑性の改良されたポリイミドフィルムのポリイミド表面層に、ラミネート法により直接銅箔を積層する用途、又は易滑性の改良されたポリイミドフィルムのポリイミド表面層に直接、Ni/Crの下地金属、ついで銅を蒸着した後に電気銅メッキした片面銅張り積層基板を製造する用途に用いることを特徴とする請求項1〜4のいずれかに記載の易滑性の改良されたポリイミドフィルム。   The polyimide film with improved slipperiness is used to laminate copper foil directly on the polyimide surface layer of the polyimide film with improved slipperiness by the lamination method, or the polyimide surface of the polyimide film with improved slipperiness The easy-sliding material according to any one of claims 1 to 4, which is used for producing a single-sided copper-clad laminated substrate obtained by depositing a Ni / Cr base metal directly on a layer, and then depositing copper and then electroplating copper. Improved polyimide film. 易滑性の改良されたポリイミドフィルムは、耐熱性ポリイミドからなるポリイミドコア層を与える自己支持性フィルムを形成し、片面又は両面にポリイミド表面層のポリアミック酸に対して全芳香族ポリイミド粒子0.5〜10質量%含む表面層用ポリアミック酸溶液組成物を塗布、乾燥し、加熱して溶媒除去およびイミド化することによって製造されることを特徴とする請求項1〜5のいずれかに記載の易滑性の改良されたポリイミドフィルム。   The polyimide film with improved slipperiness forms a self-supporting film that gives a polyimide core layer made of heat-resistant polyimide, and the total aromatic polyimide particle 0.5 on the polyamic acid of the polyimide surface layer on one or both sides It is manufactured by apply | coating and drying the polyamic acid solution composition for surface layers containing 10 mass%, heating, removing a solvent, and imidating, The easy in any one of Claims 1-5 characterized by the above-mentioned. Polyimide film with improved lubricity. ポリイミド表面層は、
1)1,3−ビス(4−アミノフェノキシ)ベンゼンおよび2,3,3’,4’−ビフェニルテトラカルボン酸二無水物と3,3’,4,4’−ビフェニルテトラカルボン酸二無水物との両成分の割合(モル比)が10/90〜90/10の割合で共重合して得られる熱可塑性のポリイミド、
2)4,4’−ジアミノジフェニルエ−テルおよび3,3’,4,4’−ビフェニルテトラカルボン酸二無水物を重合して得られるポリイミド、
または3)3,3’,4,4’−ベンゾフェノンテトラカルボン酸二無水物、2,2−ビス(3,4−ジカルボキシフェニル)プロパン、ビス(3,4−ジカルボキシフェニル)メタン、ビス(3,4−ジカルボキシフェニル)エ−テル、4,4’−ジアミノジフェニルエ−テル、又は3,3’−ジアミノジフェニルエ−テルのポリイミド分子中に柔軟性構造のモノマ−成分を有するポリイミドであることを特徴とする請求項1〜5のいずれかに記載の易滑性の改良されたポリイミドフィルム。
The polyimide surface layer
1) 1,3-bis (4-aminophenoxy) benzene and 2,3,3 ′, 4′-biphenyltetracarboxylic dianhydride and 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride And a thermoplastic polyimide obtained by copolymerization at a ratio (molar ratio) of both components of 10/90 to 90/10,
2) A polyimide obtained by polymerizing 4,4′-diaminodiphenyl ether and 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride,
Or 3) 3,3 ′, 4,4′-benzophenonetetracarboxylic dianhydride, 2,2-bis (3,4-dicarboxyphenyl) propane, bis (3,4-dicarboxyphenyl) methane, bis (3,4-dicarboxyphenyl) ether, 4,4'-diaminodiphenylether or polyimide having a flexible monomer component in the polyimide molecule of 3,3'-diaminodiphenylether The polyimide film with improved slipperiness according to any one of claims 1 to 5, wherein
耐熱性ポリイミドは、15〜100モル%以上の3,3’,4,4’−ビフェニルテトラカルボン酸二無水物と0〜85モル%のピロメリット酸二無水物と15〜100モル%のp−フェニレンジアミンと0〜85モル%の4,4’−ジアミノジフェニルエ−テルとから重合およびイミド化によって得られるポリイミド、あるいはピロメリット酸二無水物と4,4’−ジアミノジフェニルエ−テルとp−フェニレンジアミンとを両成分の割合(モル比)が90/10〜10/90の割合で共重合して得られるポリイミドであることを特徴とする請求項6に記載の易滑性の改良されたポリイミドフィルム。 The heat-resistant polyimide is composed of 15 to 100 mol% or more of 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 0 to 85 mol% of pyromellitic dianhydride and 15 to 100 mol% of p. A polyimide obtained by polymerization and imidization from phenylenediamine and 0-85 mol% of 4,4′-diaminodiphenyl ether, or pyromellitic dianhydride and 4,4′-diaminodiphenyl ether It is a polyimide obtained by copolymerizing the ratio (molar ratio) of both components with p-phenylenediamine in the ratio of 90/10 to 10/90, The improvement of the slipperiness of Claim 6 characterized by the above-mentioned. Polyimide film. フィルム全体の厚みが10〜50μmであることを特徴とする請求項1〜8のいずれかに記載の易滑性の改良されたポリイミドフィルム。   The thickness of the whole film is 10-50 micrometers, The polyimide film with improved slipperiness in any one of Claims 1-8 characterized by the above-mentioned. 請求項1〜9のいずれかに記載の易滑性の改良されたポリイミドフィルムの易滑性の改良されたポリイミドフィルムのポリイミド表面層に、ラミネート法により直接銅箔を積層したことを特徴とする銅張り積層基板。   The copper film is directly laminated by a laminating method on the polyimide surface layer of the polyimide film with improved slipperiness of the polyimide film with improved slipperiness according to any one of claims 1 to 9. Copper-clad laminated board. 請求項1〜9のいずれかに記載の易滑性の改良されたポリイミドフィルムの易滑性の改良されたポリイミドフィルムのポリイミド表面層に直接、Ni/Crの下地金属、ついで銅を蒸着した後に電気銅メッキしたことを特徴とする銅張り積層基板。   After depositing a Ni / Cr base metal and then copper directly on the polyimide surface layer of the polyimide film with improved slipperiness of the polyimide film with improved slipperiness according to any one of claims 1-9. A copper-clad laminate that is electro-copper plated.
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