JP4715628B2 - 接合材料及び接合方法 - Google Patents
接合材料及び接合方法 Download PDFInfo
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- JP4715628B2 JP4715628B2 JP2006133124A JP2006133124A JP4715628B2 JP 4715628 B2 JP4715628 B2 JP 4715628B2 JP 2006133124 A JP2006133124 A JP 2006133124A JP 2006133124 A JP2006133124 A JP 2006133124A JP 4715628 B2 JP4715628 B2 JP 4715628B2
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- 239000000463 material Substances 0.000 title claims description 174
- 238000000034 method Methods 0.000 title claims description 58
- 229910052751 metal Inorganic materials 0.000 claims description 143
- 239000002184 metal Substances 0.000 claims description 143
- 230000001681 protective effect Effects 0.000 claims description 64
- 238000000354 decomposition reaction Methods 0.000 claims description 23
- 239000011241 protective layer Substances 0.000 claims description 6
- 239000002105 nanoparticle Substances 0.000 description 57
- 239000007864 aqueous solution Substances 0.000 description 26
- 239000010949 copper Substances 0.000 description 25
- 239000002245 particle Substances 0.000 description 25
- 239000011230 binding agent Substances 0.000 description 22
- 229910052802 copper Inorganic materials 0.000 description 21
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 20
- 239000000758 substrate Substances 0.000 description 18
- 238000010438 heat treatment Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 13
- 150000003839 salts Chemical class 0.000 description 12
- 230000002194 synthesizing effect Effects 0.000 description 12
- 238000002844 melting Methods 0.000 description 11
- 230000008018 melting Effects 0.000 description 11
- 238000001035 drying Methods 0.000 description 9
- 239000002253 acid Substances 0.000 description 8
- 239000010931 gold Substances 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 239000003223 protective agent Substances 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 235000014113 dietary fatty acids Nutrition 0.000 description 6
- 229930195729 fatty acid Natural products 0.000 description 6
- 239000000194 fatty acid Substances 0.000 description 6
- 150000004665 fatty acids Chemical class 0.000 description 6
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 6
- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 238000005219 brazing Methods 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- TWJNQYPJQDRXPH-UHFFFAOYSA-N 2-cyanobenzohydrazide Chemical compound NNC(=O)C1=CC=CC=C1C#N TWJNQYPJQDRXPH-UHFFFAOYSA-N 0.000 description 4
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 4
- 235000021360 Myristic acid Nutrition 0.000 description 4
- TUNFSRHWOTWDNC-UHFFFAOYSA-N Myristic acid Natural products CCCCCCCCCCCCCC(O)=O TUNFSRHWOTWDNC-UHFFFAOYSA-N 0.000 description 4
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- IXSUHTFXKKBBJP-UHFFFAOYSA-L azanide;platinum(2+);dinitrite Chemical compound [NH2-].[NH2-].[Pt+2].[O-]N=O.[O-]N=O IXSUHTFXKKBBJP-UHFFFAOYSA-L 0.000 description 4
- 239000003638 chemical reducing agent Substances 0.000 description 4
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910021645 metal ion Inorganic materials 0.000 description 4
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000000704 physical effect Effects 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- CLSUSRZJUQMOHH-UHFFFAOYSA-L platinum dichloride Chemical compound Cl[Pt]Cl CLSUSRZJUQMOHH-UHFFFAOYSA-L 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 239000005635 Caprylic acid (CAS 124-07-2) Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000002270 dispersing agent Substances 0.000 description 3
- 239000003349 gelling agent Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229960002446 octanoic acid Drugs 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- 239000005751 Copper oxide Substances 0.000 description 2
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 2
- 229910002651 NO3 Inorganic materials 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 2
- 235000021355 Stearic acid Nutrition 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- RJTANRZEWTUVMA-UHFFFAOYSA-N boron;n-methylmethanamine Chemical compound [B].CNC RJTANRZEWTUVMA-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910000431 copper oxide Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 235000019253 formic acid Nutrition 0.000 description 2
- IZLAVFWQHMDDGK-UHFFFAOYSA-N gold(1+);cyanide Chemical compound [Au+].N#[C-] IZLAVFWQHMDDGK-UHFFFAOYSA-N 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 2
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 2
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- 239000001103 potassium chloride Substances 0.000 description 2
- 235000011164 potassium chloride Nutrition 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- GTCKPGDAPXUISX-UHFFFAOYSA-N ruthenium(3+);trinitrate Chemical compound [Ru+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O GTCKPGDAPXUISX-UHFFFAOYSA-N 0.000 description 2
- YBCAZPLXEGKKFM-UHFFFAOYSA-K ruthenium(iii) chloride Chemical compound [Cl-].[Cl-].[Cl-].[Ru+3] YBCAZPLXEGKKFM-UHFFFAOYSA-K 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000010944 silver (metal) Substances 0.000 description 2
- CQLFBEKRDQMJLZ-UHFFFAOYSA-M silver acetate Chemical compound [Ag+].CC([O-])=O CQLFBEKRDQMJLZ-UHFFFAOYSA-M 0.000 description 2
- 229940071536 silver acetate Drugs 0.000 description 2
- SDLBJIZEEMKQKY-UHFFFAOYSA-M silver chlorate Chemical compound [Ag+].[O-]Cl(=O)=O SDLBJIZEEMKQKY-UHFFFAOYSA-M 0.000 description 2
- 229910001961 silver nitrate Inorganic materials 0.000 description 2
- LMEWRZSPCQHBOB-UHFFFAOYSA-M silver;2-hydroxypropanoate Chemical compound [Ag+].CC(O)C([O-])=O LMEWRZSPCQHBOB-UHFFFAOYSA-M 0.000 description 2
- 239000012279 sodium borohydride Substances 0.000 description 2
- 229910000033 sodium borohydride Inorganic materials 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000008117 stearic acid Substances 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 1
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 1
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 1
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- TUNFSRHWOTWDNC-HKGQFRNVSA-N tetradecanoic acid Chemical compound CCCCCCCCCCCCC[14C](O)=O TUNFSRHWOTWDNC-HKGQFRNVSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
Images
Description
上記説明した体積平均粒径がnmオーダの金属核を含む接合材料1を一方の銅板(寸法:厚さ1mm×幅10mm×長さ50mm)の表面に塗布(塗布面積:幅5mm×長さ5mm、塗布厚:40μm)した。次に150℃で10分乾燥しバインダを蒸発させた後、他方の銅板を挟み加熱加圧処理した。加熱加圧処理は、250℃で30分加熱(昇温速度10℃/分)しながら、銅板に5MPaの圧力をかけた。
上記説明した体積平均粒径がμmオーダの金属核を含む接合材料1の接合方法についても上記と同様に行った。
上記説明した接合材料2を一方の銅板(寸法:厚さ1mm×幅10mm×長さ50mm)の表面に塗布(塗布面積:幅5mm×長さ5mm、塗布厚:40μm)した。次に150℃で10分乾燥しバインダを蒸発させた後、他方の銅板を挟み加熱加圧処理した。加熱加圧処理は、250℃で30分加熱(昇温速度10℃/分)しながら、銅板に5MPaの圧力をかけた。
上記説明した銀ナノ粒子を一方の銅板(寸法:厚さ1mm×幅10mm×長さ50mm)の表面に塗布(塗布面積:幅5mm×長さ5mm、塗布厚:40μm)した。次にアルミナ粒子を散布(配置)し、150℃で10分乾燥しバインダを蒸発させた後、他方の銅板を挟み加熱加圧処理した。加熱加圧処理は、250℃で30分加熱(昇温速度10℃/分)しながら、銅板に5MPaの圧力をかけた。
Claims (4)
- 有機保護膜(A)により周囲が被覆された金属核(A)と、前記金属核(A)の酸化物標準生成自由エネルギと異なる酸化物標準生成自由エネルギを有する金属核(B)と、を含み、前記金属核(B)の周囲が有機保護膜(B)により被覆され、金属核(B)の酸化物標準生成自由エネルギが金属核(A)の酸化物標準生成自由エネルギより低く、
前記有機保護膜(B)の分解温度は、前記有機保護膜(A)の分解温度より低いことを特徴とする接合材料。 - 請求項1記載の接合材料であって、前記接合材料は、硬質材料を含むことを特徴とする接合材料。
- 接合材料を用いて基材と基材との接合を行う接合方法であって、
有機保護膜(A)により周囲が被覆された金属核(A)と、前記金属核(A)の酸化物標準生成自由エネルギと異なる酸化物標準生成自由エネルギを有する金属核(B)と、を含み、前記金属核(B)の周囲が有機保護膜(B)により被覆され、金属核(B)の酸化物標準生成自由エネルギが金属核(A)の酸化物標準生成自由エネルギより低く、前記有機保護膜(B)の分解温度が、前記有機保護膜(A)の分解温度より低い接合材料を前記基材のうち少なくとも一方に塗布し、もう一方の基材を貼り合わせて加熱加圧処理することを特徴とする接合方法。 - 請求項3記載の接合方法であって、前記接合材料は、硬質材料を含むことを特徴とする接合方法。
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JP2006133124A JP4715628B2 (ja) | 2006-05-11 | 2006-05-11 | 接合材料及び接合方法 |
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JP2007302953A JP2007302953A (ja) | 2007-11-22 |
JP4715628B2 true JP4715628B2 (ja) | 2011-07-06 |
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JP2006133124A Expired - Fee Related JP4715628B2 (ja) | 2006-05-11 | 2006-05-11 | 接合材料及び接合方法 |
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2009090915A1 (ja) | 2008-01-17 | 2009-07-23 | Nichia Corporation | 導電性材料の製造方法、その方法により得られた導電性材料、その導電性材料を含む電子機器、発光装置、発光装置製造方法 |
WO2009122467A1 (ja) * | 2008-04-04 | 2009-10-08 | ニホンハンダ株式会社 | 金属製部材の接合方法、金属製部材接合体、および、電気回路接続用バンプの製造方法 |
JP5399110B2 (ja) * | 2008-04-23 | 2014-01-29 | トヨタ自動車株式会社 | 接合材料及び接合材料の成分算出方法 |
EP2293324B1 (en) * | 2008-06-25 | 2019-05-15 | Panasonic Intellectual Property Management Co., Ltd. | Packaging structure and method for manufacturing packaging structure |
DE102009000192A1 (de) * | 2009-01-14 | 2010-07-15 | Robert Bosch Gmbh | Sinterwerkstoff, Sinterverbindung sowie Verfahren zum Herstellen eines Sinterverbindung |
US8836130B2 (en) | 2009-01-23 | 2014-09-16 | Nichia Corporation | Light emitting semiconductor element bonded to a base by a silver coating |
EP3151268B1 (en) | 2009-01-23 | 2020-04-01 | Nichia Corporation | Method of producing a semiconductor device by directly bonding silver oxide on a surface of a semiconductor element with silver or silver oxide on a surface of a base |
CN102292835B (zh) | 2009-01-23 | 2015-03-25 | 日亚化学工业株式会社 | 半导体装置及其制造方法 |
JP5673536B2 (ja) | 2009-07-21 | 2015-02-18 | 日亜化学工業株式会社 | 導電性材料の製造方法、その方法により得られた導電性材料、その導電性材料を含む電子機器、および発光装置 |
Citations (1)
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JP2005205696A (ja) * | 2004-01-21 | 2005-08-04 | Ebara Corp | 接合用品 |
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JP2005205696A (ja) * | 2004-01-21 | 2005-08-04 | Ebara Corp | 接合用品 |
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