JP4713399B2 - Input device and input system - Google Patents

Description

The present invention relates to an input system for an input device that inputs a signal to an electronic device such as a computer or a game device.

In recent years, due to advances in computer technology, there are more opportunities to operate computers during work and life. Generally, a computer is provided with an input device operated by hand. The input device mainly includes a mouse having a cursor operation function and a selection function for characters and files, and a keyboard having a character input function.

FIG. 11 shows the configuration of the computer 21 and its input device. A desk 24 is prepared, and the display 20 is arranged on the desk 24. A keyboard 23 is disposed in front of the display 20, and a mouse 22 is disposed beside the keyboard 23. Usually, since the mouse 22 is operated by a dominant hand, it is arranged on the operator's dominant hand side. The computer 21 is freely arranged in an empty space such as above or below the desk 24.

In the configuration of FIG. 11, the operator often operates the mouse 22 and the keyboard 23 alternately or simultaneously. In this case, the operator operates the keyboard 23 with one hand and operates the mouse 22 with the other hand, or releases the mouse 22 and operates the keyboard 23 with both hands. In general, the keyboard 23 can be operated more quickly with both hands than with one hand. Therefore, the movement of one hand between the keyboard 23 and the mouse 22 increases, and the operation efficiency decreases accordingly.

As means for solving this problem, a mouse operated with a foot has been considered (for example, see Patent Document 1).
JP 2000-181621 A

Computer operators often operate the mouse and keyboard alternately or simultaneously, and operate the keyboard with one hand and operate the mouse with the other hand, or release the mouse and move the keyboard with both hands. I was operating. Usually, it is possible to operate the keyboard faster with two hands than with one hand. Therefore, the movement of one hand increases between the keyboard and the mouse, and the operation efficiency is reduced accordingly.

As a means for solving this problem, a mouse operated with a foot as described in Patent Document 1 has been considered. However, since this mouse uses a mouse ball for cursor operation, it has a structure that places a burden on the foot and body, and is not suitable for continuous operation for a long time. Also, the ease of operation of the mouse ball depends on the floor material.

Therefore, in the present invention, a wireless signal instead of a mouse that can be comfortably operated without depending on the floor material without imposing a burden on the foot or body, and can improve the efficiency of computer operation. It is an object of the present invention to provide a foot operation type input system and an input method that use the above.

In order to solve the above problems, the present invention provides an input system using a wireless signal under a desk on which an electronic device such as a computer or a game device is installed, and an operator of the electronic device operates with a foot. A cursor operation equivalent to that when the pointing device is operated by hand is realized.

The specific configuration of the present invention is shown below.

One embodiment of the present invention is an input device that inputs a signal to an electronic device, and includes a sheet on which a plurality of wireless chips that can read out the position information through wireless communication in which the position information is recorded, and the sheet moves on the sheet An input device comprising a pointing device that can be arranged and is capable of wireless communication with a wireless chip.

Another embodiment of the present invention is an input device for inputting a signal to an electronic device, a sheet on which a plurality of wireless chips that can read the position information by wireless communication in which the position information is recorded are arranged, and the sheet moves on the sheet And a pointing device capable of wireless communication with the wireless chip, the wireless chip having a resonance circuit, a power supply circuit connected to the resonance circuit, and a memory circuit connected to the power supply circuit Is an input device.

Another embodiment of the present invention includes an electronic device in which a cursor is displayed and an input device that inputs a signal to the electronic device, and the input device can read the position information by wireless communication in which the position information is recorded. An input system comprising: a sheet on which a plurality of wireless chips are disposed; and a pointing device that is movably disposed on the sheet and capable of wireless communication with the wireless chip.

Another embodiment of the present invention includes an electronic device in which a cursor is displayed and an input device that inputs a signal to the electronic device, and the input device can read the position information by wireless communication in which the position information is recorded. A wireless chip having a plurality of wireless chips, a pointing device that is movably disposed on the sheet and capable of wireless communication with the wireless chip, the wireless chip includes a resonance circuit, and a power supply circuit connected to the resonance circuit; An input system comprising: a memory circuit connected to a power supply circuit; and a control circuit connected to the power supply circuit and the memory circuit.

Another embodiment of the present invention is an input device for inputting a signal to an electronic device, a sheet on which a plurality of wireless chips that can read the position information by wireless communication in which the position information is recorded are arranged, and the sheet moves on the sheet A pointing device capable of wirelessly communicating with the wireless chip, the pointing device reading position information on a plurality of adjacent wireless chips and obtaining position information on a sheet; and the position information An input device comprising: means for transmitting information to an electronic device.

Another embodiment of the present invention is an input device for inputting a signal to an electronic device, a sheet on which a plurality of wireless chips that can read the position information by wireless communication in which the position information is recorded are arranged, and the sheet moves on the sheet And a pointing device capable of wirelessly communicating with the wireless chip, the wireless chip including a resonant circuit, a power circuit connected to the resonant circuit, and a memory circuit connected to the power circuit, and pointing The device is an input device including position information analyzing means for reading information on a plurality of adjacent wireless chips to obtain position information on a sheet, and means for transmitting the position information to an electronic device. .

Note that the wireless chip can be formed using a thin film transistor (TFT).

In the present invention, when performing a cursor operation with a foot, since a position is detected using a wireless signal, the weight of the input system becomes lighter than when a mouse ball is used, and the burden on the foot and body can be reduced. Long continuous operation is possible. Moreover, it becomes possible to operate comfortably without being influenced by the material of the floor.

Therefore, the cursor can be operated with the feet and the keyboard can be operated with both hands, so that unnecessary operations can be reduced and the operation efficiency of the electronic device can be improved. In addition, the space left for the mouse on the desk can be used for other purposes.

In addition, by using a wireless chip using a thin film transistor (TFT), a wireless chip can be directly formed on a sheet without performing a process of embedding the wireless chip in a sheet made of an insulator. It can be simplified.

Embodiments of the present invention will be described below with reference to the drawings. However, the present invention can be implemented in many different modes, and those skilled in the art can easily understand that the modes and details can be variously changed without departing from the spirit and scope of the present invention. Is done. Therefore, the present invention is not construed as being limited to the description of this embodiment mode. Note that in all the drawings for describing the embodiments, the same portions or portions having similar functions are denoted by the same reference numerals, and repetitive description thereof is omitted.

(Embodiment 1)
In this embodiment, an input system using a wireless signal is provided under a desk on which a computer is installed, and a pointing device, specifically, a mouse is operated by a hand by a computer operator operating with a foot. A mode for realizing a cursor operation equivalent to the above case will be described.

FIG. 1A shows a foot in which an input system using a wireless signal 15 is provided under a desk 24 on which a computer 21 is installed, and an operator of the computer 21 is wearing footwear 12 to which a reader / writer 13 is attached. A configuration is realized in which the operation of the cursor 25 equivalent to the case where the mouse 22 is operated by hand is realized by moving. However, the cursor 25 is also called a mouse cursor or a mouse pointer, and is displayed on the display 20 of the computer 21. When the mouse 22 is moved mainly by a symbol in the shape of an arrow, the cursor 25 also moves on the display 20 in conjunction with it. The shape and function change according to the situation and position, and the operations that can be performed change. In this explanatory diagram, the case where the footwear 12 is worn with the right foot is shown, but the present invention is not limited to this, and it may be worn with the left foot.

In FIG. 1A, an input system using a wireless signal 15 includes a wireless chip (or a wireless chip) formed by forming a semiconductor integrated circuit or an antenna over a single crystal substrate such as silicon, a glass substrate, or a plastic substrate. (Tag) 10 and a reader / writer 13 that communicates a wireless signal 15 with the wireless chip 10.

When a glass substrate is used, the glass substrate can be thinned by polishing the surface opposite to the side where the semiconductor integrated circuit is formed. As a result, even a semiconductor integrated circuit formed over a glass substrate can increase flexibility.

The plastic substrate refers to a flexible substrate. Examples of the plastic include polynorbornene having a polar group, polyethylene terephthalate (PET), polyethersulfone (PES), polyethylene naphthalate (PEN), polycarbonate ( PC), nylon, polyetheretherketone (PEEK), polysulfone (PSF), polyetherimide (PEI), polyarylate (PAR), polybutylene terephthalate (PBT), polyimide, and the like are included in its category.

Therefore, a plurality of wireless chips 10 storing position information are prepared, and embedded in the sheet 11 made of an insulator in accordance with the position information of the wireless chip 10 as shown in FIG. FIG. 1B is an enlarged view of X in FIG. The sheet 11 is laid on the floor under the desk 24 on which the computer 21 is installed with the surface on which the wireless chip is formed as the upper surface. For example, when the sheet 11 is installed, it is preferable that the predetermined lateral direction of the sheet 11 and the long side direction of the screen of the display 20 are parallel to each other. Further, it is not preferable to install the seat 11 so that the left and right sides of the seat 11 are interchanged. In addition, the magnitude | size and installation method of the sheet | seat 11 are not specifically limited. As another method, the sheet 11 may be attached to the floor or the like using a seal or an adhesive tape.

Here, since a plurality of wireless chips 10 are used, the reader / writer 13 may receive a plurality of wireless signals 15 at the same time. If they are received at the same time, the wireless signals 15 collide with each other. Correct information cannot be extracted from the signal 15. Therefore, as a method for avoiding this, when the wireless chip 10 is provided on the seat 11, it is provided with a certain distance. Since the wireless signals 15 output from the wireless chip 10 and the reader / writer 13 do not need to be distant, output can be suppressed to the minimum necessary.

The interval between the vertices of the lattice is appropriately determined. Since the present invention is operated with a foot, it cannot perform a finer operation than a manual operation, so that the operation becomes larger. Therefore, the operation result is reduced and reflected in the cursor operation.

In the present invention, a plurality of wireless chips are not necessarily required. For example, by preparing one wireless chip and a plurality of readers / writers (for example, two), it is possible to check the movements and positions of the plurality of readers / writers. For example, one wireless chip is prepared in a certain space, and two reader / writers attached to footwear or the like are brought close to the space. When the distance between the reader / writer and the wireless chip or the speed of the reader / writer changes, the phase or amplitude changes. From the change, two distances between the reader / writer and the wireless chip are calculated to determine the position. I can do it. Of course, when using this system, a plurality of wireless chips may be used.

Similarly, one wireless chip and a plurality of reader / writers (for example, two) are prepared, and on the contrary, the position and movement of the wireless chip can be confirmed. For example, two reader / writers are prepared as position sensors at the end of a certain space, and one wireless chip attached to footwear is brought close to that space. By bringing the wireless chip closer, the phase or amplitude changes, and the two distances between the reader / writer and the wireless chip can be calculated from the change and the position can be determined. Of course, when using this system, a plurality of wireless chips may be used.

On the other hand, as shown in FIG. 1C, a reader / writer 13 that performs communication between the wireless chip 10 and the wireless signal 15 is attached to the back side of the footwear 12. FIG. 1C is a diagram showing Y in FIG. 1A, and is a diagram of the back side of the footwear 12. Here, in order to reliably receive the radio signal 15, it is preferable to arrange an antenna on the back side of the footwear 12 so that the radio signal 15 can be received without being interrupted by anything. Further, only the antenna part of the reader / writer 13 is attached to the footwear 12, and the part other than the antenna of the reader / writer 13 is arranged in another place, and the portion is connected via the cable 14. By doing so, the weight of the actually operated footwear 12 can be reduced, and the burden on the foot and body can be reduced.

Furthermore, at least one switch 16 for the selection function of the mouse 22 is provided in the reader / writer 13 in order to improve work efficiency. The switch 16 is attached at a position where it can be surely pushed with a foot. For example, it may be configured such that the footwear 12 is processed, a hole is formed, and the foot 12 can be pushed with a foot from the inside. The structure is shown as a cross-sectional view of the footwear 12 in FIG. FIG. 1D is a cross-sectional view taken along P-P ′ in FIG. The power of the reader / writer 13 is supplied from the computer 21 via the cable 14 or by a battery.

With the above configuration, when the foot of the footwear 12 to which the reader / writer 13 is attached is placed on a part of the seat 11, the reader / writer 13 is connected to the wireless chip 10 directly below the reader / writer 13. On the other hand, a radio signal 15 including a command for outputting position information is transmitted. Then, the wireless chip 10 that has received the wireless signal 15 transmits the wireless signal 15 including the position information of the wireless chip 10 to the reader / writer 13, and the wireless signal 15 including the position information is transmitted to the reader / writer. 13 receives. The reader / writer 13 extracts position information from the radio signal 15 and stores it.

Next, when the foot placed on the sheet 11 is moved, the reader / writer 13 receives a radio signal 15 including position information from the radio chip 10 directly below the reader / writer 13 different from the above, and from the radio signal 15 The position information is extracted and stored. The reader / writer 13 calculates the distance, angle, and speed that the reader / writer 13 has moved by moving the foot from the previous position information and the current position information.

The reader / writer 13 outputs the calculated information to the computer 21. When the switch 16 for selecting a file or the like is pressed with a foot, the reader / writer 13 adds the information to the calculated information and outputs it to the computer 21. These pieces of information are used to move the cursor 25 and select a file and are reflected on the display 20. Accordingly, by moving the foot wearing the footwear 12 to which the reader / writer 13 is attached, the operation of the cursor 25 or the operation of selecting a file or the like by pressing the switch 16 with the foot can be performed.

As described above, by using the present embodiment, it is possible to perform the cursor 25 operation with a foot and the selection operation of a file or the like simultaneously with other manual operations. For this reason, it is possible to simultaneously perform operations such as soldering and printed circuit board inspection while closing data on the circuit diagram and the like stored in the computer 21.

(Embodiment 2)
In the present embodiment, the second embodiment will be described with reference to FIG.

In FIG. 2A, an input system using a wireless signal 15 is provided under a desk 24 on which a computer 21 is installed, and an operator of the computer 21 wears footwear 12 with a wireless signal blocking member 17 attached thereto. FIG. 5 is an explanatory diagram for explaining a configuration for realizing a cursor 25 operation equivalent to a case where a mouse 22 is operated by a hand by moving a foot. However, although the illustration shows a case where the footwear 12 is worn with the right foot, the present invention is not limited to this, and the footwear 12 may be worn with the left foot.

In FIG. 2A, an input system using a wireless signal 15 includes a wireless chip 10 (or a semiconductor integrated circuit or an antenna formed over a single crystal substrate such as silicon, a glass substrate, or a flexible substrate (or A reader / writer 13 that communicates the wireless signal 15 with the wireless tag 10 and the wireless chip 10 is used. Therefore, a plurality of wireless chips 10 storing position information are prepared, and embedded in the sheet 11 in accordance with the position information of the wireless chip 10 as shown in FIG. FIG. 2B is an enlarged view of X in FIG. The sheet 11 is laid on the floor under the desk 24 on which the computer 21 is installed with the surface on which the wireless chip is formed as the upper surface. For example, when the sheet 11 is installed, it is preferable that the predetermined longitudinal direction of the sheet 11 and the long side direction of the screen of the display 20 be perpendicular to each other. Further, it is not preferable to install the seat 11 so that the left and right sides of the seat 11 are interchanged. In addition, the magnitude | size and installation method of the sheet | seat 11 are not specifically limited. As another method, the sheet 11 may be attached to the floor or the like using a seal or an adhesive tape.

Here, since the plurality of wireless chips 10 are used, the reader / writer 13 may receive a plurality of wireless signals 15 at the same time. When the wireless signals 15 are received at the same time, the wireless signals 15 collide with each other. Therefore, correct information cannot be extracted from the radio signal 15. Therefore, as a method of avoiding this, it is preferable to set the output timing of the wireless signal 15 of the wireless chip 10 so that each wireless chip 10 does not collide.

On the other hand, a reader / writer 13 for transmitting a wireless signal 15 including a command to output position information to the wireless chip 10 and receiving the wireless signal 15 including position information from the wireless chip 10 is shown in FIG. As shown, it is provided on the back side of the desk 24. FIG. 2D is a rear view of the desk 24 in FIG. The reader / writer 13 is connected to the computer 21 via wired communication using the cable 14 or wireless communication using infrared rays or the like.

Further, as shown in FIG. 2C, a radio signal blocking material 17 is attached to the back side of the footwear 12 in order to block communication between the reader / writer 13 and the radio chip 15. FIG. 2 (C) is a view showing Y in FIG. 2 (A), and is a view of the back side of the footwear 12. Here, the radio signal blocking member 17 may be attached to the back side of the footwear 12 in order to block the radio signal 15 reliably. Further, the radio signal blocking member 17 can be any material as long as it can block the radio signal 15 and may be a conductive plate. Therefore, it is possible to easily reduce the weight and prevent the foot and body from being burdened.

On the other hand, for the selection function of the mouse 22, the keyboard 23 is provided with at least one dedicated button.

With the above configuration, the wireless signal 15 including a command for outputting position information is transmitted from the reader / writer 13 to all the wireless chips 10 arranged on the sheet 11. At this time, when the footwear 12 to which the wireless signal blocking member 17 is attached is put on and the foot is placed on a part of the seat 11, between the reader / writer 13 and the wireless chip 10 just below the wireless signal blocking member 17. The communication of the radio signal 15 is blocked by the radio signal blocking material 17. Therefore, the reader / writer 13 cannot receive the wireless signal 15 from the wireless chip 10 directly below the wireless signal blocking material 17. However, the wireless signal of the wireless chip 10 other than directly below the wireless signal blocking material 17 can be received.

The reader / writer 13 identifies the position of the current wireless signal blocking member 17 by determining the position information included in the wireless signal 15 that could not be received from the position information of the plurality of received wireless signals 15, and the position Store information.

Next, when the foot placed on the sheet 11 is moved, the reader / writer 13 is based on the position information stored immediately before, and a wireless signal including a command for outputting the position information to the peripheral wireless chip 10. 15 is transmitted. Then, there are again a wireless signal 15 that is blocked by the wireless signal blocking member 17 and cannot be received, and other wireless signals 15 that can be received. Therefore, the current wireless signal is blocked from a plurality of pieces of position information included in the received wireless signal 15. The position of the material 17 is determined and stored. The distance, angle, and speed of movement of the wireless signal blocking member 17 are calculated by moving the foot from the previously determined position information and the currently determined position information.

The reader / writer 13 outputs the calculated information to the computer 21. This information is used to move the cursor 25 and is reflected on the display 20. Therefore, the cursor 25 can be operated by moving the foot wearing the footwear 12 to which the wireless signal blocking member 17 is attached.

As described above, by using the present embodiment, it is possible to simplify what the operator actually operates when operating the cursor 25, thereby reducing costs and reducing the burden on the foot and body. It becomes possible to do.

(Embodiment 3)
In the present embodiment, a third embodiment of the present invention will be described with reference to FIG.

FIG. 3A shows a case where an input system using the wireless signal 15 is provided in the computer 21 and the operator of the computer 21 operates the keyboard 23 by hand to perform character input, character conversion, etc. 13 is an explanatory diagram for explaining a configuration for realizing assistance for character input and character conversion by moving a foot wearing footwear 12 (operation device) to which 13 is attached. However, in this explanatory diagram, the case where the footwear 12 is worn with the left foot is shown, but the present invention is not limited to this, and the footwear 12 may be worn with the right foot.

In FIG. 3A, an input system using a wireless signal 15 includes a wireless chip 10 (or a semiconductor integrated circuit or an antenna formed over a single crystal substrate such as silicon, a glass substrate, or a flexible substrate (or A reader / writer 13 that communicates the wireless signal 15 with the wireless tag 10 and the wireless chip 10 is used. A plurality of wireless chips 10 are prepared and embedded in a sheet 11 made of an insulator as shown in FIG. FIG. 3B is an enlarged view of X in FIG. The sheet 11 is laid on the floor under the desk 24 on which the computer 21 is installed with the surface on which the wireless chip is formed as the upper surface. For example, when the sheet 11 is installed, it is preferable that the predetermined lateral direction of the sheet 11 and the long side direction of the screen of the display 20 are parallel to each other. Further, it is not preferable to install the seat 11 so that the left and right sides of the seat 11 are interchanged. In addition, the magnitude | size and installation method of the sheet | seat 11 are not specifically limited. As another method, the sheet 11 may be attached to the floor or the like using a seal or an adhesive tape. Here, the wireless chip 10 arranged at equal intervals stores a certain character input function, a control key function, a shift key function, and the like as information. This is because the function used by each operator is different, so that the operator can arbitrarily set the function.

On the other hand, as shown in FIG. 3C, a reader / writer 13 that performs communication between the wireless chip 10 and the wireless signal 15 is attached to the back side of the footwear 12. FIG. 3C is a diagram showing Y in FIG. 3A, and is a diagram on the back side of the footwear 12. Here, in order to receive the radio signal 15 reliably, it is better to attach it to the back side of the footwear 12. The power of the reader / writer 13 is supplied from the computer 21 via the cable 14 or a battery. Further, the footwear 12 may be configured such that only the antenna portion of the reader / writer 13 is attached, the portions other than the antenna of the reader / writer 13 are arranged at different locations, and the portion is connected via the cable 14. With such a configuration, the weight of the actually operated footwear 12 can be reduced, and the burden on the foot and body can be reduced.

Further, the present embodiment can be combined with the above-described embodiment for the operation of the cursor 25 of the mouse 22.

With the above configuration, when the footwear 12 to which the reader / writer 13 is attached is put on and the foot is placed on a part of the seat 11, the reader / writer 13 is connected to the wireless chip 10 just below the reader / writer 13. In response to this, a radio signal 15 including a command for outputting function information is transmitted. Then, the wireless chip 10 that has received the wireless signal 15 transmits a wireless signal 15 including function information to the reader / writer 13, and the reader / writer 13 receives the wireless signal 15 including this information.

The reader / writer 13 outputs the received function information to the computer 21. Here, the information input to the computer 21 is processed by the computer 21 and reflected on the display 20 or the like. Accordingly, character input, character conversion, and the like can be performed by moving the foot wearing the footwear 12 to which the reader / writer 13 is attached.

Thus, by providing the control key and shift key provided on the keyboard 23 in the input system operated with the foot, for example, shortcut operations, switching between uppercase letters and lowercase letters can be performed quickly, so that work efficiency is improved. Can be improved.

(Embodiment 4)
In the present embodiment, Embodiment 4 different from the above embodiment will be described with reference to FIG.

FIG. 4A is a block diagram showing a configuration of the present invention. The input system of the present invention includes a wireless chip 110, 120, 130 (or a wireless tag) manufactured by forming a semiconductor integrated circuit or an antenna on a silicon substrate, a glass substrate, or a plastic substrate, a wireless chip 110, and the like. And a reader / writer 100 that performs communication of the radio signal 109. The reader / writer 100 is connected to the computer 200 via wired communication using the cable 201 or wireless communication using infrared rays or the like.

As shown in FIG. 4A, the reader / writer 100 of the present invention has an antenna 101, a modulation circuit 102, a demodulation circuit 103, a control unit 106 having a storage unit 104 and a calculation unit 105, and a character and file selection function. A switch 107 and an input / output unit 108 are provided. If the operator can arbitrarily assign a function to each switch 107, work efficiency may be improved. The input / output unit 108 is connected to the computer 200 via wired communication using the cable 201 or wireless communication using infrared rays or the like.

When the cursor operation is performed using the input system of the present invention, the cursor position is inquired from the computer 200 to the reader / writer 100 via wired communication using the cable 201 or wireless communication using infrared rays or the like. The instruction is transferred. The input / output unit 108 of the reader / writer 100 receives the command and transfers it to the control unit 106.

Here, assuming that the cursor position is the position of the reader / writer 100, the position information stored in the wireless chip closest to the reader / writer 100 indicates the position of the reader / writer 100. As shown in FIG. 4B, here, the nearest wireless chip is a wireless chip 110. The reader / writer 100 receives a cursor position inquiry command from the computer, analyzes it by the control unit 106, and moves to an operation of transmitting a position information read command to the wireless chip 110.

The control unit 106 generates a signal obtained by encoding a position information read command and transfers the signal to the modulation circuit 102. The modulation circuit 102 modulates a carrier wave based on the encoded signal and outputs the modulated carrier wave to the antenna 101, and the antenna 101 transmits it to the wireless chip 110 as a wireless signal 109.

The wireless chip 110 that has received the wireless signal 109 extracts an instruction included in the wireless signal 109 and proceeds to an analysis operation.

The wireless chip 110 of the present invention includes a resonance circuit 111 including an antenna and a resonance capacitor, a power supply circuit 112, a clock circuit 113, a modulation circuit 114, a demodulation circuit 115, a control circuit 116, and a memory circuit 117. The wireless chip 110 is not limited to the above configuration and may include a central processing unit (CPU), a congestion control circuit, an A / D conversion circuit, and the like.

As a memory element provided in the memory circuit 117, a mask ROM (Read Only Memory) and a write-once memory having an insulator between electrodes can be used as a non-rewritable nonvolatile memory. Examples of the rewritable nonvolatile memory include flash memory, EEPROM (Electrically Erasable Programmable Read Only Memory), and ferroelectric memory.

When the wireless chip 110 receives the wireless signal 109 transmitted from the antenna 101 of the reader / writer 100 by the resonance circuit 111, the wireless chip 110 generates an AC signal at both ends of the antenna. Based on the generated AC signal, the power supply circuit 112 generates a power supply potential and supplies it to each circuit, and the clock circuit 113 generates clock signals of various frequencies and supplies them to each circuit.

Furthermore, the AC signal generated in the resonance circuit 111 includes information such as a command transmitted from the antenna 101 of the reader / writer 100, and the demodulation circuit 115 demodulates the information included in the AC signal. The control circuit 116 extracts a command from the demodulated signal and controls the memory circuit 117 to execute a series of operations according to the command. Further, a circuit for checking whether the demodulated signal has an error may be provided.

The memory circuit 117 holds information unique to the wireless chip 110. Here, the unique information corresponds to position information indicating where the wireless chip 110 is arranged, set function information, and the like.

In this case, since the command extracted by the control circuit 116 is a read command for position information, the control circuit 116 can send a read command to the memory circuit 117 and read the position information. The control circuit 116 generates a signal obtained by encoding the read information by the encoding circuit in the control circuit 116 and outputs the signal to the modulation circuit 114.

The modulation circuit 114 has a function of modulating a carrier wave based on the encoded signal. Therefore, the modulation circuit 114 modulates the encoded signal input from the control circuit 116 and outputs the modulated signal to the resonance circuit 111 having the antenna 101.

The antenna 101 transmits an AC signal input from the modulation circuit 114 to the resonance circuit 111 as a radio signal 109 to the reader / writer 100.

The antenna 101 of the reader / writer 100 receives the wireless signal 109 including the position information from the wireless chip 110. The antenna 101 of the reader / writer 100 outputs the received radio signal 109 to the demodulation circuit 103. The demodulation circuit 103 demodulates the radio signal 109 and outputs it to the control unit 106.

The control unit 106 extracts position information from the demodulated signal, stores it in the storage unit 104 in the control unit 106, and transfers it to the calculation unit 105. The computing unit 105 compares the position information (first position information) received immediately before with the position information (second position information) received this time.

In this case, since there is no previous position information, the calculation unit 105 does not need to perform comparison. When the comparison is performed, the comparison result is output to the input / output unit 108. However, since no comparison has been performed this time, information indicating this is output to the input / output unit 108. The input / output unit 108 transfers the information to the computer 200.

Based on this information, the computer 200 determines the position of the cursor and reflects it on the display. Then, a cursor position inquiry command is transferred from the computer 200 to the reader / writer 100 again through wired communication using the cable 201 or wireless communication using infrared rays or the like.

The reader / writer 100 that has received this command transmits a wireless signal 109 including a position information read command to the wireless chip again. Here, as shown in FIG. 4B to FIG. 4C, when the position of the reader / writer 100 is moved and the nearest wireless chip is changed from the wireless chip 110 to the wireless chip 120, an inquiry command is issued. The received reader / writer 100 transmits a wireless signal 109 including a position information read command to the wireless chip 120.

The wireless chip 120 that has received the wireless signal 109 performs the same operation as that of the wireless chip 110 described above, and transmits the wireless signal 109 including the position information stored in the wireless chip 120 to the reader / writer 100. .

The reader / writer 100 that has received the wireless signal 109 extracts position information from the wireless signal 109 by the control unit 106 and transfers it to the storage unit 104 and the calculation unit 105. The storage unit 104 stores this position information. Then, the storage unit 104 transfers the previously stored position information to the calculation unit 105. For this reason, the calculation unit 105 receives the position information extracted this time and the previous position information, and compares the two pieces of information. The distance, angle, and speed of movement of the reader / writer 100 are calculated by comparing the two pieces of information.

The control unit 106 outputs the result to the input / output unit 108. Further, when the switch 107 is pressed here, information indicating that the switch 107 has been pressed is also added by the control unit 106 and output to the input / output unit 108. The input / output unit 108 transfers this information to the computer 200.

Here, the computer 200 determines the position of the cursor based on the received information and reflects it on the display. By preparing a plurality of wireless chips and repeating this series of operations, a cursor operation can be realized with the input system of the present invention.

Although this embodiment mode shows an example of a series of communication between the wireless chips 110 and 120 and the reader / writer 100, the present invention is not limited to this mode. For example, as shown in FIGS. 5A, 5 </ b> B, and 5 </ b> C, the reader / writer 100 can be fixed and only the antenna 101 portion can be moved.

(Embodiment 5)
In this embodiment mode, structures of a transistor, a capacitor element, and a resistor element included in each circuit included in the wireless chip are described with reference to FIGS.

Each circuit included in the wireless chips 110, 120, and 130 described in the above embodiments includes a transistor. In addition to a MOS transistor formed on a single crystal substrate such as silicon, the transistor can be formed of a thin film transistor (TFT) formed on a glass substrate or a plastic substrate through a base film 401 or the like. FIG. 6 is a diagram showing a cross-sectional structure of transistors constituting these circuits. FIG. 6 shows an n-channel transistor 301, an n-channel transistor 302, a capacitor 304, a resistor 305, and a p-channel transistor 303. Each transistor can be a thin film transistor (TFT) including a semiconductor layer 405, a gate insulating layer 408, and a gate electrode 409. The gate electrode 409 has a stacked structure of a first conductive layer 403 and a second conductive layer 402. 7A to 7E are top views corresponding to the n-channel transistor 301, the n-channel transistor 302, the capacitor 304, the resistor 305, and the p-channel transistor 303 shown in FIG. Can be referred to.

In FIG. 6, an n-channel transistor 301 is also referred to as a low concentration drain (LDD) on both sides of a gate electrode in a channel length direction (carrier flow direction), and a source and drain region that forms a contact with a wiring 404 is formed. An impurity region 407 doped at a lower concentration than the impurity concentration of the impurity region 406 is formed in the semiconductor layer 405. In the case of forming the n-channel transistor 301, phosphorus or the like is added to the impurity region 406 and the impurity region 407 as an impurity imparting n-type conductivity. LDD is formed as a means for suppressing hot electron degradation and short channel effect.

As shown in FIG. 7A, in the gate electrode 409 of the n-channel transistor 301, the first conductive layer 403 is formed so as to spread on both sides of the second conductive layer 402. In this case, the first conductive layer 403 is formed thinner than the second conductive layer 402. The first conductive layer 403 is formed to a thickness that allows the ion species accelerated by an electric field of 10 to 100 kV to pass through. The impurity region 407 is formed so as to overlap with the first conductive layer 403 of the gate electrode 409. That is, an LDD region overlapping with the gate electrode 409 is formed. In this structure, an impurity region 407 is formed in a self-aligned manner in the gate electrode 409 by adding one conductivity type impurity through the first conductive layer 403 using the second conductive layer 402 as a mask. That is, the LDD overlapping with the gate electrode 409 is formed in a self-aligning manner.

Transistors having LDDs on both sides are applied to transistors constituting a rectifying TFT of the power supply circuit 112 of the wireless chip 110 in FIG. 4A and a transmission gate (also referred to as an analog switch) used in a logic circuit. In these TFTs, since both positive and negative voltages are applied to the source electrode and the drain electrode, it is preferable to provide LDDs on both sides of the gate electrode.

In FIG. 6, an n-channel transistor 302 has an impurity region 407 doped in a lower concentration than the impurity concentration of the impurity region 406 in the semiconductor layer 405 on one side of the gate electrode. As shown in FIG. 7B, in the gate electrode 409 of the n-channel transistor 302, the first conductive layer 403 is formed so as to spread on one side of the second conductive layer 402. In this case as well, an LDD can be formed in a self-aligned manner by adding an impurity of one conductivity type through the first conductive layer 403 using the second conductive layer 402 as a mask.

A transistor having an LDD on one side may be applied to a transistor to which only a positive voltage or only a negative voltage is applied between the source and drain electrodes. Specifically, if applied to a transistor constituting a logic gate such as an inverter circuit, a NAND circuit, a NOR circuit, or a latch circuit, or a transistor constituting an analog circuit such as a sense amplifier, a constant voltage generation circuit, or a VCO (Voltage Control Oscillator). Good.

In FIG. 6, the capacitor 304 is formed by sandwiching a gate insulating layer 408 between a first conductive layer 403 and a semiconductor layer 405. A semiconductor layer 405 that forms the capacitor 304 includes an impurity region 410 and an impurity region 411. The impurity region 411 is formed in the semiconductor layer 405 so as to overlap with the first conductive layer 403. Further, the impurity region 410 forms a contact with the wiring 404. Since the impurity region 411 can be doped with one conductivity type impurity through the first conductive layer 403, the impurity concentration contained in the impurity region 410 and the impurity region 411 can be the same or different. It is. In any case, since the semiconductor layer 405 functions as an electrode in the capacitor 304, it is preferable to reduce the resistance by adding an impurity of one conductivity type. Further, as shown in FIG. 7C, the first conductive layer 403 can sufficiently function as an electrode by using the second conductive layer 402 as an auxiliary electrode. In this manner, by using a composite electrode structure in which the first conductive layer 403 and the second conductive layer 402 are combined, the capacitor 304 can be formed in a self-aligning manner.

The capacitor is used as a storage capacitor included in the power supply circuit 112 of the wireless chip 110 in FIG. 4A or a resonance capacitor included in the resonance circuit 111. In particular, since both positive and negative voltages are applied between the two terminals of the capacitive element, the resonant capacitor needs to function as a capacitor regardless of whether the voltage between the two terminals is positive or negative.

In FIG. 6, the resistance element 305 is formed by the first conductive layer 403. Since the first conductive layer 403 is formed to a thickness of about 30 to 150 nm, the resistance element can be configured by appropriately setting the width and length.

The resistance element is used as a resistance load included in the modulation circuit 114 of the wireless chip 110 in FIG. Also, it may be used as a load when current is controlled by a VCO or the like. The resistance element may be formed using a semiconductor layer containing an impurity element at a high concentration or a thin metal layer. In contrast to a semiconductor layer whose resistance value depends on the film thickness, film quality, impurity concentration, activation rate, and the like, a metal layer is preferable because the resistance value is determined by the film thickness and film quality, so that variation is small.

In FIG. 6, the p-channel transistor 303 includes an impurity region 412 in the semiconductor layer 405. The impurity region 412 forms source and drain regions that form a contact with the wiring 404. The structure of the gate electrode 409 is a structure in which the first conductive layer 403 and the second conductive layer 402 overlap. The p-channel transistor 303 is a single drain transistor without an LDD. In the case of forming the p-channel transistor 303, boron or the like is added to the impurity region 412 as an impurity imparting p-type conductivity. On the other hand, when phosphorus is added to the impurity region 412, an n-channel transistor having a single drain structure can be obtained.

One or both of the semiconductor layer 405 and the gate insulating layer 408 is excited by microwaves, has an electron temperature of 2 eV or less, an ion energy of 5 eV or less, and an electron density of about 10 ¹¹ to 10 ¹³ / cm ^3. Oxidation or nitridation may be performed by the treatment. At this time, since the substrate temperature can be set to 300 to 450 ° C., the film can be formed over a substrate such as plastic having low heat resistance.

Such an insulating film can be formed in a nitrogen atmosphere or an oxygen atmosphere.
The nitrogen atmosphere is typically a mixed atmosphere of nitrogen and rare gas or a mixed atmosphere of nitrogen, hydrogen and rare gas. As the rare gas, at least one of helium, neon, argon, krypton, and xenon can be used. The oxygen atmosphere is typically a mixed atmosphere of oxygen and a rare gas, a mixed atmosphere of oxygen, hydrogen, and a rare gas, or a mixed atmosphere of dinitrogen monoxide and a rare gas. As the rare gas, at least one of helium, neon, argon, krypton, and xenon can be used.

By performing treatment in an oxygen atmosphere or a nitrogen atmosphere, the defect level at the interface between the semiconductor layer 405 and the gate insulating layer 408 can be reduced. By performing this treatment on the gate insulating layer 408, the insulating layer can be densified. That is, generation of charged defects can be suppressed and fluctuations in the threshold voltage of the transistor can be suppressed. In the case where the transistor is driven with a voltage of 3 V or lower, an insulating layer oxidized or nitrided by this plasma treatment can be used as the gate insulating layer 408. Further, when the driving voltage of the transistor is 3 V or more, the gate is formed by combining the insulating layer formed on the surface of the semiconductor layer 405 by this plasma treatment and the insulating layer deposited by the CVD method (plasma CVD method or thermal CVD method). An insulating layer 408 can be formed. Similarly, this insulating layer can also be used as a dielectric layer of the capacitor 304. In this case, since the insulating layer formed by this plasma treatment is formed with a thickness of 1 to 10 nm and is a dense film, a capacitor having a large charge capacity can be formed.

As the semiconductor film, amorphous silicon or polycrystalline silicon can be used. When polycrystalline silicon is used, amorphous silicon can be formed first, and heat treatment or laser irradiation can be performed to obtain polycrystalline silicon. . At this time, the crystallization temperature can be reduced by performing heat treatment or laser irradiation using a metal element typified by nickel. For laser irradiation, a continuous wave or pulsed laser irradiation apparatus can be used. Alternatively, a crystallization method involving heat treatment may be combined with a crystallization method in which a continuous wave laser or a laser beam oscillated at a frequency of 10 MHz or higher is irradiated. By irradiation with a continuous wave laser or a laser beam oscillated at a frequency of 10 MHz or higher, the surface of the crystallized semiconductor film can be flattened. As a result, the gate insulating film can be made thinner and can contribute to improving the breakdown voltage of the gate insulating film.

In addition, a semiconductor film obtained by scanning and crystallizing in one direction while irradiating a semiconductor film with a continuous wave laser or a laser beam oscillating at a frequency of 10 MHz or more grows a crystal in the beam scanning direction. There is a characteristic to do. By aligning the scanning direction with the channel length direction (the direction in which carriers flow when the channel formation region is formed), transistors are arranged, and by combining a gate insulating film that has been subjected to high-density plasma treatment, the characteristic variation is small. In addition, a transistor (TFT) having high field effect mobility can be obtained.

As described with reference to FIGS. 6 and 7, elements having various structures can be formed by combining conductive layers having different film thicknesses. The region where only the first conductive layer is formed and the region where the first conductive layer and the second conductive layer are laminated are a photo provided with an auxiliary pattern having a light intensity reducing function consisting of a diffraction grating pattern or a semi-transmissive film. It can be formed using a mask or a reticle. That is, in the photolithography process, when the photoresist is exposed, the amount of light transmitted through the photomask is adjusted to vary the thickness of the resist mask to be developed. In this case, a resist having a complicated shape may be formed by providing a slit having a resolution limit or less in a photomask or a reticle. Alternatively, the mask pattern formed of the photoresist material may be deformed by baking at about 200 ° C. after development.

Further, by using a photomask or a reticle provided with an auxiliary pattern having a light intensity reduction function consisting of a diffraction grating pattern or a semi-transmissive film, a region where only the first conductive layer is formed, the first conductive layer and the second conductive layer A region where the conductive layer is stacked can be formed continuously. As shown in FIG. 7A, a region where only the first conductive layer 403 is formed can be selectively formed over the semiconductor layer. Such a region is effective on the semiconductor layer, but is not necessary in other regions (a wiring region continuous with the gate electrode). By using this photomask or reticle, it is not necessary to form a region of only the first conductive layer 403 in the wiring portion, so that the wiring density can be substantially increased.

6 and 7, the first conductive layer is a refractory metal such as tungsten (W), chromium (Cr), tantalum (Ta), tantalum nitride (TaN), or molybdenum (Mo), or a refractory metal. An alloy or a compound mainly composed of is formed with a thickness of 30 to 50 nm. The second conductive layer is made of a refractory metal such as tungsten (W), chromium (Cr), tantalum (Ta), tantalum nitride (TaN) or molybdenum (Mo), or an alloy or compound containing a refractory metal as a main component. To a thickness of 300 to 600 nm. For example, different conductive materials are used for the first conductive layer and the second conductive layer, and a difference in etching rate is caused in an etching process performed later. As an example, TaN can be used as the first conductive layer, and a tungsten film can be used as the second conductive layer.

Further, the first conductive layer may be patterned so that both ends thereof are aligned when the second conductive layer is used to form the gate wiring. As a result, a fine gate wiring can be formed. Further, it is not necessary to form the LDD overlapping the gate electrode in a self-aligning manner.

In this embodiment mode, transistors, capacitors, and resistors having different electrode structures are formed in the same patterning process using a photomask or a reticle provided with an auxiliary pattern having a light intensity reduction function including a diffraction grating pattern or a semi-transmissive film. It shows that it can be made separately. Thus, elements having different forms can be formed and integrated without increasing the number of steps in accordance with circuit characteristics.

(Embodiment 6)
In this embodiment, an example of forming a memory circuit as one of the elements included in the wireless chip illustrated in FIG. 4A will be described with reference to FIGS.

The semiconductor layers 510 and 511 illustrated in FIG. 8A are preferably formed using silicon or a crystalline semiconductor containing silicon as a component. For example, polycrystalline silicon or single crystal silicon obtained by crystallizing a silicon film by laser annealing or the like is applied. In addition, a metal oxide semiconductor, amorphous silicon, or an organic semiconductor that exhibits semiconductor characteristics can be used.

In any case, the semiconductor layer to be formed first is formed over the entire surface or part of the substrate having an insulating surface (a region having a larger area than that determined as a semiconductor region of the transistor). Then, a mask pattern is formed on the semiconductor layer by photolithography. By etching the semiconductor layer using the mask pattern, island-shaped semiconductor layers 510 and 511 having specific shapes including the source and drain regions of the TFT and the channel formation region are formed. The semiconductor layers 510 and 511 are determined in consideration of appropriate layout.

A photomask for forming the semiconductor layers 510 and 511 shown in FIG. 8A includes a mask pattern 530 shown in FIG. The mask pattern 530 differs depending on whether the resist used in the photolithography process is a positive type or a negative type. When a positive resist is used, the mask pattern 530 shown in FIG. 8B is manufactured as a light shielding portion. The mask pattern 530 has a shape obtained by deleting the top A of the polygon. Further, the inside B of the corner has a shape that bends over a plurality of steps so that the corner does not form a right angle. The corner portion of this photomask pattern is deleted.

The shape of the mask pattern 530 illustrated in FIG. 8B is reflected in the semiconductor layers 510 and 511 illustrated in FIG. In that case, a shape similar to the mask pattern 530 may be transferred, or the corner of the mask pattern 530 may be transferred so as to be more rounded. That is, a rounded portion having a smoother pattern shape than the mask pattern 530 may be provided.

An insulating layer containing at least part of silicon oxide or silicon nitride is formed over the semiconductor layers 510 and 511. One purpose of forming this insulating layer is a gate insulating layer. Then, as shown in FIG. 9A, gate wirings 512, 513, and 514 are formed so as to partially overlap the semiconductor layer. The gate wiring 512 is formed corresponding to the semiconductor layer 510. The gate wiring 513 is formed corresponding to the semiconductor layers 510 and 511. The gate wiring 514 is formed corresponding to the semiconductor layers 510 and 511. For the gate wiring, a metal layer or a highly conductive semiconductor layer is formed, and its shape is formed on the insulating layer by a photolithography technique.

A photomask for forming this gate wiring is provided with a mask pattern 531 shown in FIG. In this mask pattern 531, the corner portion is deleted to a length that is ½ or less of the line width of the wiring and １ ／ or more of the line width. The shape of the mask pattern 531 illustrated in FIG. 9B is reflected in the gate wirings 512, 513, and 514 illustrated in FIG. In that case, a shape similar to the mask pattern 531 may be transferred, or the corner of the corner of the mask pattern 531 may be further rounded. That is, the gate wirings 512, 513, and 514 may be provided with a rounded portion that has a smoother pattern shape than the mask pattern 531. The outside of the corner portions of the gate wirings 512, 513, and 514 can suppress generation of fine powder due to abnormal discharge during dry etching using plasma. Inside the corner portion, even when fine powder adheres to the substrate during cleaning, the cleaning liquid can be washed away without staying in the corner portion of the wiring pattern.

The interlayer insulating layer is a layer formed next to the gate wirings 512, 513, and 514. The interlayer insulating layer is formed using an inorganic insulating material such as silicon oxide or an organic insulating material using polyimide or acrylic resin. An insulating layer such as silicon nitride or silicon nitride oxide may be interposed between the interlayer insulating layer and the gate wirings 512, 513, and 514. An insulating layer such as silicon nitride or silicon nitride oxide may be provided over the interlayer insulating layer. This insulating layer can prevent the semiconductor layer and the gate insulating layer from being contaminated by impurities that are not good for the TFT, such as exogenous metal ions and moisture.

Openings are formed in predetermined positions in the interlayer insulating layer. For example, it is provided corresponding to the gate wiring or semiconductor layer in the lower layer. A wiring layer formed of a single layer or a plurality of layers of metal or metal compound is formed with a mask pattern by a photolithography technique and formed into a predetermined pattern by etching. Then, as illustrated in FIG. 10A, wirings 515 to 520 are formed so as to partially overlap the semiconductor layer. A wiring connects between specific elements. The wiring does not connect a specific element with a straight line, but includes a bent portion due to layout restrictions. In addition, the wiring width changes in the contact portion and other regions. In the contact portion, when the contact hole is equal to or larger than the wiring width, the wiring width is changed to widen at that portion.

A photomask for forming the wirings 515 to 520 includes a mask pattern 532 shown in FIG. Also in this case, the wiring is a corner portion bent into an L shape, and one side of the right triangle is 10 μm or less, or 1/2 or less of the line width of the wiring and 1/5 or more of the line width. Remove the corners and give the corners a rounded pattern. Specifically, in order to round the outer peripheral edge of the corner portion, two first straight lines perpendicular to each other sandwiching the corner portion, and one second straight line forming an angle of about 45 degrees with these two first straight lines, A part of the wiring layer corresponding to the right isosceles triangular portion formed by. When removed, two obtuse angle parts are newly formed in the wiring layer. By appropriately setting the mask design and etching conditions, a curve that touches both the first straight line and the second straight line is formed at each obtuse angle part. It is preferable to etch the wiring layer as described above. The length of two equal sides of the right-angled isosceles triangle is set to 1/5 or more and 1/2 or less of the wiring width.
Also, the inner periphery of the corner portion is formed so that the inner periphery is rounded along the outer periphery of the corner portion. Such a wiring shape can suppress generation of fine powder due to abnormal discharge during dry etching using plasma. Further, when cleaning the substrate, even if fine powder is adhered to the substrate, the cleaning liquid can be washed away without staying in the corner portion of the wiring pattern, and as a result, the yield is improved. This is also an advantage that when there are a large number of parallel wirings on the substrate, the attached fine powder can be easily removed by washing. It can be expected that the corners of the wiring corners take a round shape to be electrically conducted. In addition, a large number of parallel wires are very convenient for washing away dust.

In FIG. 10A, n-channel transistors 521 to 524 and p-channel transistors 525 and 526 are formed. The n-channel transistor 523 and the p-channel transistor 525 constitute an inverter. Further, the n-channel transistor 524 and the p-channel transistor 526 also constitute an inverter. The circuit including these six transistors forms a memory circuit. An insulating layer such as silicon nitride or silicon oxide may be formed over these transistors.

It is a perspective view which shows the structure of the 1st form of this invention. It is a perspective view which shows the structure of the 2nd form of this invention. It is a perspective view which shows the structure of this invention. It is a block diagram which shows the structure of this invention. It is a block diagram which shows the structure of this invention. It is sectional drawing which shows the structure of the radio | wireless chip of this invention. It is a top view showing the structure of the wireless chip of the present invention. It is a top view of the memory circuit of the wireless chip of the present invention. It is a top view of the memory circuit of the wireless chip of the present invention. It is a top view of the memory circuit of the wireless chip of the present invention. It is a perspective view which shows the structure of the conventional computer.

Explanation of symbols

10 wireless chip 11 sheet 12 footwear 13 reader / writer 14 cable 15 wireless signal 16 switch 17 wireless signal blocking material 20 display 21 computer 22 mouse 23 keyboard 24 desk 25 cursor 100 reader / writer 101 antenna 102 modulation circuit 103 demodulation circuit 104 storage unit 105 arithmetic unit 106 control unit 107 switch 108 input / output unit 109 wireless signal 110 wireless chip 111 resonance circuit 112 power circuit 113 clock circuit 114 modulation circuit 115 demodulation circuit 116 control circuit 117 memory circuit 120 wireless chip 130 wireless chip 200 computer 201 cable 301 n-channel transistor 302 n-channel transistor 303 p-channel transistor 304 capacitor element 305 resistor element 401 base film 40 Second conductive layer 403 First conductive layer 404 Wiring 405 Semiconductor layer 406 Impurity region 407 Impurity region 408 (doped less than impurity concentration 406) Insulating layer 409 Gate electrode 410 Impurity region 411 Impurity region 412 Impurity region 510 Semiconductor Layer 511 semiconductor layer 512 gate wiring 513 gate wiring 514 gate wiring 515 wiring 516 wiring 517 wiring 518 wiring 519 wiring 520 wiring 521 n-channel transistor 522 n-channel transistor 523 n-channel transistor 524 n-channel transistor 525 p-channel transistor 526 p-channel transistor 530 (semiconductor layer) mask pattern 531 (gate wiring) mask pattern 532 (wiring) mask pattern

Claims (6)

An input device for inputting a signal to an electronic device,
A sheet having a plurality of wireless chips on which position information is recorded and the position information can be read out by wireless communication;
A reader / writer disposed above the seat and capable of wireless communication with the wireless chip;
An input apparatus comprising: a pointing device that is movably disposed on the sheet and provided with a blocking material that blocks communication of a wireless signal between the reader / writer and the wireless chip. Oite to claim 1,
The wireless chip includes a resonance circuit, a power supply circuit connected to the resonance circuit, and a memory circuit connected to the power supply circuit. In claim 1 or claim 2 ,
The input device, wherein the pointing device is operated by an operator's foot. An electronic device on which a cursor is displayed, and an input device for inputting a signal to the electronic device;
The input device includes a sheet in which a plurality of wireless chips on which position information is recorded and the position information can be read out by wireless communication are arranged,
A reader / writer disposed above the seat and capable of wireless communication with the wireless chip;
An input system comprising: a pointing device that is movably disposed on the sheet and provided with a blocking material that blocks communication of a wireless signal between the reader / writer and the wireless chip. In claim 4 ,
The wireless system includes a resonance circuit, a power supply circuit connected to the resonance circuit, and a memory circuit connected to the power supply circuit. In claim 4 or claim 5 ,
The pointing device input system, characterized in that it is operated by the operator's foot.

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