JP4705269B2 - Processing machine and protective member used therefor - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a grinding machine that grinds the back surface of a semiconductor wafer, a processing machine such as a cutting machine that cuts a semiconductor wafer, and a protective member that is used to protect required components in the processing machine.
[0002]
[Prior art]
A processing machine such as the grinding machine and the cutting machine includes: a movable support unit that is reciprocally mounted between a first position and a second position; and a reciprocating unit that reciprocates the movable support unit. I have. Usually, guide means extending in the reciprocating direction of the movable support means is provided, and the movable support means can be reciprocated by slidingly engaging the guided means arranged thereon with the guide means. It is installed. One of a processing tool such as a grinding wheel and a cutting blade and a workpiece such as a semiconductor wafer are mounted on the movable support means. When moving the movable support means forward and / or backward, the processing tool mounted on the movable support means is allowed to act on the workpiece, or the processing tool is mounted on the workpiece mounted on the movable support means. This causes the workpiece to be processed as required by the processing tool. A typical example of the reciprocating means for reciprocating the movable support means includes a male screw member extending in a reciprocating direction of the movable support means, a female screw member attached to the movable support means and screwed to the male screw member, and The motor is configured to rotate the male screw member. Usually, a circulated ball is arranged between the male screw of the male screw member and the female screw of the female screw member. A reciprocating means provided with a ball to be circulated is called a ball screw mechanism.
[0003]
When processing such as grinding or cutting is performed on a workpiece by a processing tool, swarf is generated. When such machining waste adheres to the male screw member or the guide means, smooth reciprocation of the movable support means is hindered. Therefore, a bellows member that covers the male screw member and the guide means is disposed on the upstream side and / or the downstream side in the forward movement direction of the movable support means. Such a bellows member can be formed of a cloth such as a campus cloth or a combination of a cloth and a metal plate.
[0004]
[Problems to be solved by the invention]
Thus, the bellows member is relatively expensive and its replacement operation is not always easy.
[0005]
The present invention has been made in view of the above-mentioned facts, and the main technical problem thereof is that the male screw member is replaced by a protective means that can be replaced easily and sufficiently inexpensively instead of or in addition to the bellows member. And to provide a new and improved processing machine in which debris is prevented from adhering to components to be protected, such as guide means.
[0006]
Another technical problem of the present invention is that it can be used in place of or in addition to the bellows member in order to protect the required components in the processing machine, and is considerably cheaper and sufficiently easy than the bellows member. It is to provide a protective member that can be exchanged.
[0007]
[Means for Solving the Problems]
The present inventor maintains at least one protection formed from a synthetic resin sheet or film that can be unwound by applying a tensile force that is maintained in a state of being wound around a roll in a free state where no tensile force is applied. It has been found that the main technical problem can be achieved by configuring the protection means from the members. The protective member itself that achieves the other technical modification can be formed by winding a synthetic resin sheet or film around a roll and heating in a wound state for a predetermined time. In this specification, for the sake of convenience, a synthetic resin sheet or film that is maintained in a state of being wound around a roll strip in a free state where no tensile force is applied and can be unwound by applying a tensile force is referred to as a “wrapping sheet or It is called “film”.
[0008]
That is, according to the present invention, as a processing machine that achieves the first technical problem, movable support means that is reciprocally mounted between a first position and a second position, and the movable support Reciprocating means for reciprocating the means, wherein the movable support means is a processing machine in which either the processing tool or the workpiece is mounted, and the movable support means is the first When viewed in the direction of moving forward from the position to the second position, the upstream side and / or the downstream side of the movable support means is maintained in a state of being wound around the roll strip in a free state where no tensile force is applied. A protective means including at least one protective member formed from a synthetic resin sheet or film that can be unwound by applying a tensile force; The protective member is a state in which the synthetic resin sheet or film is folded back in the length direction to be doubled, the folded portion is wound in a roll shape, and heated in a wound state for a predetermined time to be wound in a roll shape in a free state. Is formed to maintain The protective member is unwound in accordance with the forward movement of the movable support member and wound in response to the backward movement on the upstream side of the movable support means, and / or the forward movement of the movable support member on the downstream side of the movable support means. There is provided a processing machine that is wound in response to movement and unwinded in response to backward movement.
[0009]
The protection means is preferably disposed on both the upstream side and the downstream side of the movable support means. In a preferred embodiment, guide means extending in the reciprocating direction of the movable support means is provided, and the guided means is slidably engaged with the guide means. The reciprocating means includes a male screw member extending in the reciprocating direction of the movable support means, a female screw member mounted on the movable support means and screwed into the male screw member, and the male screw member And a protection means comprising: a main protection member located opposite to the male screw member and the guide means; and two sub protection members located on both sides of the male screw member and the guide means. The male screw member and the guide means are covered on three sides by the main protection member and the sub protection member.
[0010]
Furthermore, according to the present invention, as a protective member that achieves the above other technical problems, in a free state where the tensile force does not act, the protective member is maintained in a state of being wound around the roll strip, and can be unwound by applying the tensile force. Made of synthetic resin sheet or film, The protective member is a state in which the synthetic resin sheet or film is folded back in the length direction to be doubled, the folded portion is wound in a roll shape, and heated in a wound state for a predetermined time to be wound in a roll shape in a free state. Formed to maintain A protective member is provided.
[0011]
The The protective member is formed by folding a synthetic resin sheet or film in the length direction to be doubled, winding the folded portion around a roll strip, and heating in a wound state for a predetermined time. When such a protective member is applied to a processing machine, one end can be fixed to the movable support means and the other end can be fixed to the stationary member. A protective member is formed by fixing one end of a synthetic resin sheet or film to a support shaft, winding the synthetic resin sheet or film around the support shaft, and heating for a predetermined time in the wound state. But it can. When such a protective member is applied to a processing machine, the support shaft may be rotatably mounted on the stationary member or the movable support means, and the free end may be fixed to the movable support means or the stationary member. it can.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
In the following, a preferred embodiment of a processing machine constructed in accordance with the present invention will be described in more detail with reference to the accompanying drawings.
[0013]
FIG. 1 shows a grinding machine for grinding the back surface of a semiconductor wafer, which is a workpiece, as a preferred embodiment of a processing machine configured according to the present invention. The illustrated grinder has a housing denoted as a whole by the number 2. The housing 2 has a rectangular parallelepiped main portion 4 extending elongated. An upright wall 6 extending substantially vertically upward is disposed at the rear end portion of the main portion 4. The upright wall 6 is provided with two grinding means, that is, rough grinding means 8a and precision grinding means 8b. The configurations of the rough grinding means 8a and the precision grinding means 8b and their mounting modes will be described in detail later.
[0014]
Continuing the description with reference to FIG. 1, a turntable 10 is disposed on the upper surface of the rear half of the main portion 4 of the housing 2. The turntable 10 is mounted so as to be rotatable about a central axis extending substantially vertically. A suitable electric motor (not shown) is drivingly connected to the turntable 10, and the turntable 10 is intermittently rotated every 120 degrees as will be further described later. Three chuck means 12 are disposed on the turntable 10 at equal angular intervals in the circumferential direction. The illustrated chuck means 12 is composed of a porous disc mounted so as to be rotatable about a central axis extending substantially vertically. An appropriate electric motor (not shown) is drivingly connected to the chuck means 12, and the chuck means 12 is rotated at a rotational speed that may be 5 to 100 rpm. A vacuum source (not shown) is selectively communicated with the chuck means 12, and the semiconductor wafer placed on the chuck means 12 is vacuum-sucked by the chuck means 12 as will be further described later. As the turntable 10 is intermittently rotated every 120 degrees, each of the chuck means 12 is sequentially positioned in the carry-in / carry-out area 14, the rough grinding area 16, and the precision grinding area 18.
[0015]
A cassette carry-in area 20, a cassette carry-out area 22, a carrying mechanism 24, a semiconductor wafer receiving means 26 and a cleaning means 28 are disposed on the upper surface of the front half of the main part 4 of the housing 2. Conveying mechanisms 30 and 32 are disposed on the upper surface of the intermediate portion of the main portion 4 of the housing 2. On the cassette carry-in area 20, a cassette C containing a plurality of semiconductor wafers W whose back surface is to be ground is placed. In the cassette carry-out area 22, a cassette C for accommodating the semiconductor wafer W whose back surface is ground is placed. The transport mechanism 24 carries out the semiconductor wafers W one by one from the cassette C placed on the cassette carry-in area 20, turns the front and back, and places them on the semiconductor wafer receiving means 26. The transport mechanism 30 carries the semiconductor wafer W placed on the semiconductor wafer receiving means 26 with the back surface facing upward onto the chuck means 12 positioned in the carry-in / out area 14.
[0016]
The semiconductor wafer W carried onto the chuck means 12 with the back surface exposed upward is positioned in the rough grinding region 16 together with the chuck means 12 by the intermittent rotation of the turntable 10. In the rough grinding area 16, the chuck means 12 holding the semiconductor wafer W is rotated, and the rough grinding means 8a is applied to the back surface of the semiconductor wafer W, so that the back surface of the semiconductor wafer W is rough ground. The semiconductor wafer W roughly ground in the rough grinding area 16 is positioned in the precision grinding area 18 together with the chuck means 12 by the intermittent rotation of the turntable 10. In the precision grinding area 18, the chuck means 12 holding the semiconductor wafer W is rotated, and the precision grinding means 8a is applied to the back surface of the semiconductor wafer W so that the back surface of the semiconductor wafer W is precisely ground. The rough grinding by the coarse grinding means 8a and the precision grinding by the fine grinding means 8b will be further described later. Next, the semiconductor wafer W whose back surface is precisely ground is positioned in the loading / unloading area 14 together with the chuck means 12 by intermittent rotation of the turntable 10.
[0017]
The transport mechanism 32 transports the semiconductor wafer W on the chuck unit 12 positioned in the carry-in / carry-out area 14 to the cleaning unit 28. The cleaning means 28 sprays a cleaning liquid that may be pure water while rotating the semiconductor wafer W at a high speed, cleans the semiconductor wafer W, and dries it. The transport mechanism 24 inverts the cleaned and dried semiconductor wafer W again so that the surface faces upward, and transports the semiconductor wafer W into the cassette C placed on the cassette unloading area 22. When all the semiconductor wafers W in the cassette C placed in the cassette carry-in area 20 are carried out, the cassette C is replaced with the next cassette C containing the semiconductor wafer W whose back surface is to be ground. When a predetermined number of semiconductor wafers W are stored in the cassette C placed in the cassette carry-out area 22, the cassette C is carried out and an empty cassette C is placed.
[0018]
The description will be continued with reference to FIG. 2 together with FIG. 1. Guide means 34 a and 34 b are disposed on the front surface of the upright wall 6 disposed at the rear end of the housing 2. The guide means 34a and 34b are composed of a pair of guide rails 36a and 36b, respectively. The pair of guide rails 36a are fixed to the front surface of the upright wall 6 at an interval in the width direction and extend substantially vertically. Similarly, the pair of guide rails 36b are also fixed to the front surface of the upright wall 6 at intervals in the width direction, and extend substantially vertically. A pair of guide rails 36a is slidably mounted with a slide block 38a constituting a movable support means in a vertical direction, and a pair of guide rails 36b is slidably mounted with a slide block 38b constituting a movable support means in a vertical direction. Has been. Leg portions 40a and 40b extending in the vertical direction are formed on both sides in the width direction of the rear surface of each of the sliding blocks 38a and 38b, and grooves extending in the vertical direction are formed in the leg portions 40a and 40b. Each of the sliding blocks 38a and 38b is slidably mounted along the guide rails 36a and 36b by slidably engaging the grooves formed in the legs 40a and 40b with the guide rails 36a and 36b. Yes. Accordingly, the grooves formed in the leg portions 40a and 40b constitute guided means that cooperate with the guide rails 36a and 36b constituting the guiding means.
[0019]
Between the upright wall 6 and the sliding blocks 38a and 38b, reciprocating means 42a and 42b for moving the sliding blocks 38a and 38b up and down, that is, reciprocating in the vertical direction, are disposed. More specifically, on the front surface of the upright wall 6, the mounting pieces 44a and 44b and the male thread members 48a and 48b extending substantially vertically by the mounting pieces 46a and 46b are rotatably mounted. Male screws are engraved on the peripheral surfaces of the male screw members 48a and 48b. Electric motors 50a and 50b, which may be pulse motors, are also mounted on the mounting pieces 44a and 44b, and output shafts of the electric motors 50a and 50b are connected to male screw members 48a and 48b. A female screw member (not shown) having a through screw hole extending in the vertical direction is fixed to the center of the rear surface of the sliding blocks 38a and 38b, and the female screw member is screwed to the male screw members 48a and 48b. . Therefore, when the electric motors 50a and 50b are rotated forward, the sliding blocks 38a and 38b are moved forward or lowered, and when the electric motors 50a and 50b are reversed, the sliding blocks 38a and 38b are moved backward or raised. .
[0020]
1 and 2, the rough grinding means 8a is attached to the sliding block 38a, and the precision grinding means 8b is attached to the sliding block 38b. Support portions 54a and 54b projecting forward are formed on the sliding blocks 38a and 38b, and casings 56a and 56b are fixed to the support portions 54a and 54b, respectively. Rotating shafts 58a and 58b extending substantially vertically are rotatably mounted on the casings 56a and 56b. An electric motor (not shown) is disposed in the casings 56a and 56b, and the output shaft of the electric motor is connected to the rotating shafts 58a and 58b. Disc-shaped mounting members 60a and 60b are fixed to the lower ends of the rotating shafts 58a and 58b, and grinding tools 62a and 62b are fixed to the lower surfaces of the mounting members 60a and 60b. A plurality of grinding members each having an arc shape are disposed on the lower surfaces of the grinding tools 62a and 62b. The grinding member is advantageously formed by bonding diamond abrasive grains with a suitable binder such as a resin bond. When the electric motor disposed in the casings 56a and 56b is energized, the grinding tools 62a and 62b are rotated at a high speed.
[0021]
When roughly grinding the back surface of the semiconductor wafer W held on the chuck means 12 in the rough grinding area 16, the chuck means 12 is rotated and the grinding tool 62a is rotated at a high speed. Then, by lowering the sliding block 38a, the grinding tool 62a is pressed against the back surface of the semiconductor wafer W, and further gradually lowered, so that the back surface of the semiconductor wafer W is roughly thickly ground. Similarly, when the semiconductor wafer W held on the chuck means 12 in the precision grinding region 18 is precision ground, the chuck means 12 is rotated and the grinding tool 62b is rotated at a high speed. Then, by lowering the sliding block 38b, the grinding tool 62b is pressed against the back surface of the semiconductor wafer W, and further lowered gradually, and thus the back surface of the semiconductor wafer W is relatively thin and precision ground.
[0022]
Thus, the configuration and operation as described above in the illustrated grinding machine are substantially the same as the configuration and operation in the grinding machine sold under the trade name “DFG841” by DISCO Corporation, for example. Is well known. Therefore, a detailed description of these configurations and operations will be omitted herein.
[0023]
1 and 2, the description will be continued with reference to FIGS. 1 and 2. Each of the sliding blocks 38 a and 38 b constituting the movable support means is viewed upstream and / or downstream, that is, each of the sliding blocks 38 a and 38 b. It is important that protective means for preventing grinding dust from adhering to the male screw members 48a and 48b and the guide rails 36a and 36b is disposed on the upper side and / or the lower side of the rail. In the illustrated grinder, protective means 64a and 66a are disposed on the upper and lower sides of the sliding block 38a, respectively, and protective means 64b and 66b are disposed on the upper and lower sides of the sliding block 38b, respectively. ing. More specifically, stationary members 67a and 67b covering the upper ends of the guide rails 36a and 36b and stationary members 68a and 68b covering the lower ends of the guide rails 36a and 36b are fixed to the front surface of the upright wall 6. Each of the stationary members 67a and 67b has a rectangular plate shape in which a notch is formed corresponding to the mounting pieces 44a and 44b, and the front edge and both side edges thereof are the front and both sides of the sliding blocks 38a and 38b in the vertical direction. It is almost aligned with the surface. Each of the stationary members 68a and 68b is also in the shape of a rectangular plate in which notches are formed corresponding to the mounting pieces 46a and 46b, and the front edge and both side edges thereof are the front and both sides of the sliding blocks 38a and 38b in the vertical direction. It is almost aligned with the surface. The protection means 64a and 64b are formed by sliding the main protection members 70a and 70b disposed between the front edges of the stationary members 67a and 67b and the front upper ends of the sliding blocks 38a and 38b, and both side edges of the stationary members 67a and 67b. Sub-protection members 72a and 72b disposed between upper ends of both side surfaces of the blocks 38a and 38b. The protection means 66a and 66b include main protection members 74a and 74b disposed between the lower front ends of the sliding blocks 38a and 38b and the front edges of the stationary members 68a and 68b, and lower ends on both sides of the sliding blocks 38a and 38b. Sub-protection members 76a and 76b disposed between both side edges of the stationary members 68a and 68b.
[0024]
The main protection members 70a and 70b and 74a and 74b, the sub-protection members 72a and 72b, and 76a and 76b are maintained in a state where they are wound around a roll sheet in a free state where a wrapping sheet or film, ie, tensile force does not act It is important to be composed of a synthetic resin sheet or film that can be unwound by applying force. Connecting rods 78 are fixed to the upper and lower ends of the winding sheets or films constituting the main protective members 70a and 70b, and one connecting rod 78 is fixed to the stationary members 67a and 67b by appropriate connecting means (not shown). The other connecting rod 78 is fixed to the front edge of the sliding block 38a and 38b, and the wrapping sheet or film constituting the main protection members 70a and 70b is one end of the wrapping sheet or film constituting the main members 70a and 67b. The other end is fixed to the upper front end of the slide blocks 38a and 38b. The connecting rod 80 is also fixed to the upper and lower ends of the winding sheets or films constituting the sub-protection members 72a and 72b, and one connecting rod 80 is fixed to the stationary members 67a and 67b by appropriate connecting means (not shown). The other connecting rod 80 is fixed to each side edge of the sliding block 38a and 38b, and the other side of the wrapping sheet or film constituting the secondary protection members 72a and 72b has one end of the stationary members 67a and 67b. It is fixed to each side edge and the other end is fixed to the upper end of each side surface of the sliding blocks 38a and 38b. Connecting rods 82 are fixed to the upper and lower ends of the wrapping sheets or films constituting the main protective members 74a and 74b, and one connecting rod 82 is slid into the blocking blocks 38a and 38b by appropriate connecting means (not shown). The other connecting rod 82 is fixed to the front edge of the stationary members 68a and 68b, and the winding sheet or film constituting the main protection members 74a and 74b has one end of the front lower end of the sliding blocks 38a and 38b. The other end is fixed to the front edges of the stationary members 68a and 68b. The connecting rod 84 is also fixed to the upper and lower ends of the wrapping sheets or films constituting the sub-protection members 76a and 76b, and one connecting rod 84 is slid into the blocking blocks 38a and 38b by appropriate connecting means (not shown). The other connecting rod 84 is fixed to each side edge of the stationary members 68a and 68b, and the winding sheet or film constituting the auxiliary protection members 76a and 76a has one end of the sliding blocks 38a and 38b. The other ends are fixed to the side edges of the stationary members 68a and 68b.
[0025]
The protection means 64a and 66a cover the male screw member 48a and the guide rail 36a from three sides, that is, from the front side and both sides, thereby sufficiently preventing grinding scraps from adhering to the male screw member 48a and the guide rail 36a. When the sliding block 38a is moved forward or lowered, the wound sheet or film constituting the main protection member 70a and the sub protection member 72a is caused by a tensile force applied according to the lowering of the sliding block 38a. The winding sheet or film that is gradually unwound and forms the main protection member 74a and the sub-protection member 76a is gradually wound due to the release of the tensile force as the sliding block 38a descends. On the contrary, when the sliding block 38a is moved backward, that is, the wrapping sheet or film constituting the main protection member 70a and the secondary protection member 72a is released from the tensile force according to the rising of the sliding block 38a. The winding sheet or film which is gradually wound due to the above and constitutes the main protection member 74a and the sub protection member 76a is gradually unwound due to the application of a tensile force in accordance with the rise of the sliding block 38a. Similarly, the protection means 64b and 66b cover the male screw member 48b and the guide rail 36b from three sides, that is, from the front side and the both sides, thereby sufficiently preventing grinding dust from adhering to the male screw member 48b and the guide rail 36b. When the sliding block 38b is moved forward or lowered, the winding sheet or film constituting the main protection member 70b and the secondary protection member 72b is caused by a tensile force applied in accordance with the lowering of the sliding block 38b. The winding sheet or film that is gradually unwound and forms the main protection member 74b and the sub protection member 76b is gradually wound due to the release of the tensile force in accordance with the lowering of the sliding block 38b. On the contrary, when the sliding block 38b is moved backward, that is, the wrapping sheet or film constituting the main protection member 70b and the secondary protection member 72b is released from the tensile force according to the rising of the sliding block 38b. The winding sheet or film constituting the main protection member 74b and the sub protection member 76b is gradually unwound due to the application of a tensile force in response to the rise of the sliding block 38b.
[0026]
FIG. 3 illustrates a manufacturing mode of a preferred embodiment of a wound sheet or film constituting the main protective member and the sub protective member. As shown in FIG. 3A, an elongated synthetic resin sheet or film 86 is prepared. Preferable examples of such a synthetic resin sheet or film include a polyester sheet or film having a thickness of 0.03 to 2.0 mm, particularly 0.04 to 0.10 mm. Next, as shown in FIG. 3B, the synthetic resin sheet or film 86 is folded back in the length direction to be doubled. Next, as illustrated in FIG. 3C, the synthetic resin sheet or film 86 is gradually wound from the folded portion. Then, the synthetic resin sheet or film 86 wound as required leaving both ends is heated in a required temperature for a required time while being maintained in the wound state. For example, when the synthetic resin sheet or film 86 is a 0.05 mm thick polyester sheet or film, it is heated at a temperature of about 140 ° C. for about 2 hours. Next, it is gradually cooled at room temperature. Thus, the synthetic resin sheet or film 86 is permanently set in a wound state, and in a state where no tensile force is applied, the synthetic resin sheet or film 86 is maintained in a wound state as shown by a solid line in FIG. When a tensile force is applied by pulling, the wire is unwound as shown by a two-dot chain line in FIG. And if tension | pulling force is cancelled | released, it will return to the state wound by roll shape as shown by the continuous line in FIG. Such wrapping sheets or films can be easily manufactured using inexpensive materials, are considerably less expensive than the bellows members conventionally used to protect the components of processing machines, and It should also be noted that it is fairly easy to attach to the required part of the processing machine.
[0027]
FIG. 4 illustrates a manufacturing mode of another embodiment of the wound sheet or film constituting the main protective member and the sub protective member. Also in the manufacturing mode illustrated in FIG. 4, a synthetic resin sheet or film 88 that is elongated is prepared as illustrated in FIG. The synthetic resin sheet or film 88 is also preferably a polyester sheet or film having a thickness of 0.03 to 2.0 mm, particularly 0.04 to 0.10 mm. Next, as shown in FIG. 4B, one end of the synthetic resin sheet or film is fixed to the support shaft 90. The support shaft 90 may be a round bar formed of an appropriate synthetic resin or metal. The diameter of the support shaft 90 is preferably about 2 to 5 mm. Next, as illustrated in FIG. 4C, the synthetic resin sheet or film 88 is wound around the support shaft 90. Then, the synthetic resin sheet or film 88 wound around the support shaft 90 while leaving the free end portion is maintained in a wound state and heated at a required temperature (for example, about 140 ° C.) for a predetermined time (for example, about 2 hours). To do. Next, it is gradually cooled at room temperature. Thus, the synthetic resin sheet or film 88 is permanently set in a wound state, and in a state where no tensile force is applied, the synthetic resin sheet or film 88 is maintained in a state of being wound around the support shaft 90 as indicated by a solid line in FIG. When a tensile force is applied by holding the support shaft 90 rotatably at a predetermined position and pulling the free end, the support shaft 90 is unwound as shown by a two-dot chain line in FIG. And if tension | pulling force is cancelled | released, as shown to the continuous line in FIG. 4-d, it will return to the state wound around the support shaft 90. FIG. When the winding sheet or film 88 of the form shown in FIG. 4-d is used in the grinding machine shown in FIGS. 1 and 2, the support shaft 90 is fixed to the stationary members 67a and 67b and 68a and 68b or the sliding block 38a. And the free end of the wound sheet or film 88 may be fixed to the sliding blocks 38a and 38b or the stationary members 67a and 67b and 68a and 68b.
[0028]
The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to such embodiments, and various modifications and corrections can be made without departing from the scope of the present invention. It should be understood that this is possible.
[0029]
For example, in the embodiment shown in FIGS. 1 and 2, the protection means 64a and 64b and 66a and 66a are provided on both the upstream side and the downstream side as viewed in the forward movement direction of the sliding blocks 38a and 38b constituting the movable support means. 66b is provided, but if there is substantially no possibility of grinding dust scattering on the upstream side or downstream side, the provision of the protective means can be omitted on the upstream side or downstream side. In the embodiment shown in FIGS. 1 and 2, grinding tools 62a and 62b, which are processing tools, are mounted on the sliding blocks 38a and 38b constituting the movable support means. The present invention can also be applied to a processing machine in which a workpiece is mounted without being attached. Furthermore, in the embodiment shown in FIGS. 1 and 2, a protective member made of a wound sheet or film is used in place of the conventionally used bellows member. Wound sheets or films can also be used in a protective manner. In this case, the required configuration can be more reliably protected by the presence of the bellows member. In addition, the bellows member is protected by the wrapping sheet or film. Therefore, if the wrapping sheet or film that is relatively inexpensive and used for the mounting operation is replaced as necessary, it is relatively expensive and the mounting operation is relatively complicated. The bellows member can be used for a long time.
[0030]
【The invention's effect】
In the processing machine according to the present invention, instead of or in addition to the bellows member, the protection means that can be replaced with a considerably low cost and sufficiently easily can be used to protect the components to be protected such as the male screw member and the guide means. Is prevented from adhering.
[0031]
Further, the protective member of the present invention can be used in place of or in addition to the bellows member in order to protect the required components in the processing machine, and is considerably cheaper than the bellows member and can be easily replaced. can do.
[Brief description of the drawings]
FIG. 1 is a perspective view showing the whole of a grinding machine which is a preferred embodiment of a processing machine constructed according to the present invention.
FIG. 2 is a partial perspective view showing a part of the grinding machine of FIG. 1;
FIGS. 3A to 3D are simplified diagrams showing a manufacturing mode of a wound sheet or film used in the grinding machine of FIG. 1;
FIGS. 4A to 4D are simplified diagrams showing a manufacturing mode of a modified example of a wound sheet or film.
[Explanation of symbols]
8a: Rough grinding means
8b: Precision grinding means
10: Turntable
12: Chuck means
16: Rough grinding area
18: Precision grinding area
34a: Guiding means
34b: Guiding means
38a: sliding block (movable support means)
38b: sliding block (movable support means)
40a: groove (guided means)
40b: groove (guided means)
42a: Reciprocating means
42b: Reciprocating means
48a: Male screw member
48b: female screw member
50a: Electric motor
50b: Electric motor
62a: Grinding tool
62b: Grinding tool
64a: Protection means
64b: Protection means
66a: Protection means
66b: Protection means
67a: Stationary member
67b: Stationary member
68a: stationary member
68b: Stationary member
70a: Main protective member
70b: Main protective member
72a: secondary protection member
72b: secondary protection member
74a: Main protective member
74b: Main protection member
76a: Secondary protection member
76b: Secondary protection member
86: Synthetic resin sheet or film
88: Synthetic resin sheet or film
90: Support shaft

Claims (5)

A movable support means mounted so as to reciprocate between a first position and a second position; and a reciprocating means for reciprocating the movable support means. In a processing machine to which one of a tool and a workpiece is mounted, the movable support means is located upstream of the movable support means when viewed in the direction of moving from the first position to the second position. The side and / or the downstream side is at least formed of a synthetic resin sheet or film that is maintained in a state of being wound around a roll in a free state where no tensile force is applied and can be unwound by applying a tensile force. protection means comprising one of the protective member is disposed, the protective member is synthetic resin sheet or film is folded in the longitudinal direction wound around the folded portion after allowed to double in a roll shape, a predetermined in wound state time By heat, in a free state is formed so as to maintain a state of being wound into a roll,
The protection member is unwound in response to the forward movement of the movable support member and wound in response to the backward movement on the upstream side of the movable support means, and / or the forward movement of the movable support member on the downstream side of the movable support means. A processing machine that is wound according to movement and unwound according to return movement. The processing machine according to claim 1, wherein the protection means is disposed on both the upstream side and the downstream side of the movable support means. Guide means extending in the reciprocating direction of the movable support means is disposed, and guided means that is slidably engaged with the guide means is disposed on the movable support means. The moving means comprises a male screw member extending in the reciprocating direction of the movable support means, a female screw member attached to the movable support means and screwed to the male screw member, and a motor for rotating the male screw member. The protective means includes a main protective member positioned opposite to the male screw member and the guide means, and two auxiliary protective members positioned on both sides of the male screw member and the guide means, and the male screw member and the guide The processing machine according to claim 1 or 2, wherein the means is covered on three sides by the main protection member and the sub protection member. The protective member one end is fixed to the movable support means, the other end is fixed to the stationary member, the processing machine according to claim 1. A protective member used to protect components in a processing machine, and in a free state where no tensile force acts, it is maintained in a state of being wound around a roll and can be unwound by applying a tensile force. The protective member is composed of a resin sheet or film , and the protective member is folded in the length direction to be doubled, and then the folded portion is wound in a roll shape and heated in a wound state for a predetermined time, thereby being in a free state. Then, it forms so that the state wound by roll shape may be maintained , The protection member characterized by the above-mentioned.

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