JP4683385B2 - Electronic component clamping device - Google Patents

Electronic component clamping device Download PDF

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Publication number
JP4683385B2
JP4683385B2 JP2005017550A JP2005017550A JP4683385B2 JP 4683385 B2 JP4683385 B2 JP 4683385B2 JP 2005017550 A JP2005017550 A JP 2005017550A JP 2005017550 A JP2005017550 A JP 2005017550A JP 4683385 B2 JP4683385 B2 JP 4683385B2
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electronic component
stopper
piece
movable
fixed
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JP2006210447A (en
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敏行 菅沼
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Juki Corp
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Juki Corp
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Priority to CNB2006100029823A priority patent/CN100537158C/en
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Description

この発明は、基板上に電子部品を搭載するための電子部品搭載機の搭載ヘッドに設けた電子部品挟持装置に関する。 The present invention relates to an electronic component clamping device provided in a mounting head of an electronic component mounting machine for mounting electronic components on a substrate.

特許文献1に示す電子部品挟持装置には、図9に示すように固定挟持片1と可動挟持片2とで電子部品3を挟持するように構成されている。
固定挟持片1には電子部品3を挟持する際に部品上面と接触し、部品の上下方向の位置決めと、部品の挟持状態の安定化、及び可動挟持片2自体のストッパの役割を果たすためのストッパ4が水平方向に突出し設けられている。
このストッパ4の突出長さLは電子部品3を挟持するため挟持すべき電子部品3の幅Wより小さく形成されていた。
The electronic component clamping device shown in Patent Document 1 is configured to clamp an electronic component 3 between a fixed clamping piece 1 and a movable clamping piece 2 as shown in FIG.
The fixed clamping piece 1 is in contact with the upper surface of the component when the electronic component 3 is clamped, for positioning the component in the vertical direction, stabilizing the clamping state of the component, and serving as a stopper for the movable clamping piece 2 itself. A stopper 4 protrudes in the horizontal direction.
The protruding length L of the stopper 4 is formed to be smaller than the width W of the electronic component 3 to be clamped to clamp the electronic component 3.

特開2002−361587号公報JP 2002-361588 A

しかしながら、図10に示すオス型コネクタのような中抜け電子部品5の場合、メス型コネクタが挿入される開口部6を有するため、この中抜け電子部品5を挟持する場合に、図11に示すようにストッパ4を中抜け電子部品5の上面に押し当てた際、ストッパ4の先端部が開口部6に入り込んで中抜け電子部品5の姿勢に傾きが生じ、傾いた状態で電子部品を挟持してしまう恐れが生じる。そして、この傾いた状態で基板に中抜け電子部品5が搭載されると、基板の正確な位置に中抜け電子部品5が搭載できないという問題点が生じる恐れがあった。 However, in the case of the hollow electronic component 5 such as the male connector shown in FIG. 10, since the female connector is provided with the opening 6, the hollow electronic component 5 shown in FIG. When the stopper 4 is pressed against the upper surface of the hollow electronic component 5 as described above, the tip of the stopper 4 enters the opening 6 and the posture of the hollow electronic component 5 is inclined, and the electronic component is held in the inclined state. There is a fear of doing so. Then, if the hollow electronic component 5 is mounted on the board in this tilted state, there is a risk that the hollow electronic component 5 cannot be mounted at an accurate position on the board.

このため、ストッパ4の突出長さLの全体を中抜け電子部品の幅Wよりも長くしてストッパ4の先端が開口部6に入り込まないようにする構成も考えられるが、ストッパ4の突出長さLを電子部品の幅Wよりも長くすると可動挟持片2がストッパ4の先端に当ってしまい電子部品5を挟持することができない。即ち、ストッパ4の突出長さLよりも小さな幅Wの電子部品を挟持することができないという問題点があった。   For this reason, a configuration in which the entire protrusion length L of the stopper 4 is made longer than the width W of the hollow electronic component so that the tip of the stopper 4 does not enter the opening 6 is also conceivable. If the length L is longer than the width W of the electronic component, the movable clamping piece 2 hits the tip of the stopper 4 and the electronic component 5 cannot be clamped. That is, there is a problem that an electronic component having a width W smaller than the protruding length L of the stopper 4 cannot be clamped.

上記課題を解決するために、請求項1に記載の発明は、基板上に電子部品を搭載するため
の電子部品搭載機の搭載ヘッドに備えられていて、挟持片支持部材と、該挟持片支持部材
に固定支持され先端部が下方に突出した固定挟持片と、前記挟持片支持部材に揺動自在に
支持され先端部が下方に突出すると共に該先端部が前記固定挟持片の先端部に接近、離間
自在とされた可動挟持片と、前記固定挟持片に設けられ該固定挟持片の先端部よりも上側
で前記可動挟持片の方向に突出したストッパと、を含んでなり、該ストッパを電子部品の
上端に当接させつつ前記固定挟持片及び前記可動挟持片の先端部で電子部品を挟持、解放
自在とされた電子部品挟持装置において、
前記ストッパの可動挟持片方向への突出長さが、電子部品の幅よりも長い突出部と電子部
品の幅よりも短い突出部とを備えたことことにより上記目的を達成するものである。
In order to solve the above problems, the invention according to claim 1 is provided in a mounting head of an electronic component mounting machine for mounting an electronic component on a substrate, and includes a sandwiching piece support member, and the sandwiching piece support A fixed clamping piece fixedly supported by a member and having a tip projecting downward, and a tip supported by the clamping piece support member so as to be swingable, the tip projecting downward, and the tip approaching the tip of the fixed clamping piece A movable holding piece that is separable, and a stopper that is provided on the fixed holding piece and protrudes in the direction of the movable holding piece above the tip of the fixed holding piece. In the electronic component sandwiching device that is capable of sandwiching and releasing the electronic component at the tip of the fixed sandwiching piece and the movable sandwiching piece while being in contact with the upper end of the component,
The above-mentioned object is achieved by providing the stopper with a protrusion that is longer than the width of the electronic component and a protrusion that is shorter than the width of the electronic component.

請求項1に記載の発明によれば、電子部品を挟持する際に、その電子部品がメス型
コネクタ等の中抜け電子部品であっても、ストッパが中抜け電子部品の開口部に入り込む
ことはなく、しかも、ストッパが可動挟持部材の電子部品の挟持動作を妨害することがな
いので、電子部品を傾斜させることなく挟持することができ、基板への電子部品の装着精
度の向上が図れる。
According to the first aspect of the present invention, when the electronic component is held, even if the electronic component is a hollow electronic component such as a female connector, the stopper does not enter the opening of the hollow electronic component. In addition, since the stopper does not interfere with the clamping operation of the electronic component of the movable clamping member, the electronic component can be clamped without being inclined, and the mounting accuracy of the electronic component on the board can be improved.

本発明の実施の形態の例について、図面を参照しながら以下詳細に説明する。
図1は、本実施例の形態の一例を示す電子部品挟持装置7の全体構造を示す断面図である。この電子部品挟持装置7は図2に示すように基板8上に電子部品を搭載するための電子部品搭載機構9の搭載ヘッド10に装着され、XYZ方向に移動自在、Z方向の軸線廻りに回動自在なヘッドシャフト11に備えられている。
Examples of embodiments of the present invention will be described in detail below with reference to the drawings.
FIG. 1 is a cross-sectional view showing the overall structure of an electronic component clamping device 7 showing an example of the embodiment. As shown in FIG. 2, the electronic component clamping device 7 is mounted on a mounting head 10 of an electronic component mounting mechanism 9 for mounting an electronic component on a substrate 8, and is movable in the XYZ directions, and rotates around an axis in the Z direction. A movable head shaft 11 is provided.

電子部品挟持装置7は、図1に示すように挟持片支持部材12と、前記挟持片支持部材12に固定支持され先端部13Aが下方に突出した固定挟持片13と、挟持片支持部材12に揺動自在に支持され、先端部14Aが下方に突出すると共に先端部14Aが固定挟持片13の先端部13Aに接近・離間自在とされた可動挟持片14と、固定挟持片13に設けられ、この固定挟持片13の先端部13Aよりも上側で可動挟持片14の方向に突出したストッパ15とを含んでおり、このストッパ15を電子部品16(図3参照)の上端に当接させつつ固定挟持片13及び可動挟持片14の先端部13A及び14Aで電子部品を挟持、解放自在とする構成となっている。   As shown in FIG. 1, the electronic component clamping device 7 includes a clamping piece support member 12, a fixed clamping piece 13 that is fixedly supported by the clamping piece support member 12 and has a tip 13 </ b> A protruding downward, and a clamping piece support member 12. The movable holding piece 14 is supported on the movable holding piece 14 such that the tip end portion 14A protrudes downward and the tip end portion 14A can be moved toward and away from the tip end portion 13A of the fixed holding piece 13, and the fixed holding piece 13. And a stopper 15 protruding in the direction of the movable clamping piece 14 above the tip end portion 13A of the fixed clamping piece 13 and fixed while contacting the upper end of the electronic component 16 (see FIG. 3). The electronic parts are sandwiched and released by the front end portions 13A and 14A of the sandwiching piece 13 and the movable sandwiching piece 14.

そして、このストッパ15は、図3に示すように電子部品16の幅Wより短い幅SWに形成した第1突出部15Aと、電子部品16の幅Wより長い幅LWに形成し、可動挟持片14が入り込む長さだけ離間して設けた第2突出部15B、15Bから構成されている。
尚、16Hは、電子部品16に形成した開口部で、この電子部品16は例えば、メス型コネクタ等の中抜け電子部品を一例として示すものであり、この開口部16Hにはメス型のコネクタ部品が挿入されるものである。
Then, as shown in FIG. 3, the stopper 15 is formed with a first protrusion 15A formed with a width SW shorter than the width W of the electronic component 16, and a width LW longer than the width W of the electronic component 16, and the movable clamping piece. It is comprised from the 2nd protrusion parts 15B and 15B provided apart by the length which 14 enters.
Reference numeral 16H denotes an opening formed in the electronic component 16. The electronic component 16 shows, for example, a hollow electronic component such as a female connector, and the opening 16H has a female connector component. Is inserted.

図1に示すように挟持片支持部材12は、固定挟持片13及びストッパ15と一体に形成され、上下方向の一定範囲で摺動自在にホルダ17に支持されている。
又、挟持片支持部材12は、圧縮コイルばね18により下方に付勢され、常態で下端位置に保持されている。
As shown in FIG. 1, the holding piece support member 12 is formed integrally with the fixed holding piece 13 and the stopper 15, and is supported by the holder 17 so as to be slidable within a certain range in the vertical direction.
The sandwiching piece support member 12 is biased downward by the compression coil spring 18 and is normally held at the lower end position.

可動挟持片14は、水平方向のピン19を介して挟持片支持部材12に支持され、ピストン20の上下方向の変位に連動して揺動するようにされている。ピストン20は、上下方向の一定範囲で摺動自在にホルダ17に支持されると共に、圧縮コイルばね21により上方に付勢されている。   The movable sandwiching piece 14 is supported by the sandwiching piece support member 12 via a horizontal pin 19 and swings in conjunction with the vertical displacement of the piston 20. The piston 20 is supported by the holder 17 so as to be slidable within a certain range in the vertical direction, and is urged upward by a compression coil spring 21.

次に、この電子部品挟持装置7の作用について説明する。図4に示すように、搭載ヘッド
10(図2参照から電子部品挟持装置7へエアを供給することにより、ピストン20は
圧縮コイルバネ21の付勢力に抗して下降し、これに連動して可動挟持片14が揺動して、
可動挟持片14の先端部14Aが固定挟持片13の先端部13Aから離間する。
Next, the operation of the electronic component clamping device 7 will be described. As shown in FIG. 4, by supplying air from the mounting head 10 (see FIG. 2 ) to the electronic component clamping device 7, the piston 20 descends against the urging force of the compression coil spring 21, and in conjunction with this, The movable clamping piece 14 swings,
The distal end portion 14 </ b> A of the movable sandwiching piece 14 is separated from the distal end portion 13 </ b> A of the fixed sandwiching piece 13.

この状態で、電子部品挟持装置7を電子部品供給装置21(図2参照)のピックアップ部
21Aに上 方から下降・接近させ、ストッパ15の第2突出部15Bの下端面を電子部品
16の上端に当接させる。 ( 図5参照)この第2突出部15Bの長さLWは電子部品16
の幅Wよりも長く形成されているので、電子部品16の開口部16Hを超えて電子部品16
上端に当接することになる。尚、この際、挟持片 支持部材12が圧縮コイルばね18の付勢
力に抗して上方に摺動することにより、当接に伴う衝撃を 吸収して電子部品16を保護する
ようにされている。
In this state, the electronic component clamping device 7 is lowered and approached from above the pickup portion 21A of the electronic component supply device 21 (see FIG. 2), and the lower end surface of the second projecting portion 15B of the stopper 15 is set to the upper end of the electronic component 16. Abut. (See FIG. 5) The length LW of the second protrusion 15B is equal to the electronic component 16
Since the width W is longer than the width W of the electronic component 16, the electronic component 16 exceeds the opening 16 </ b> H of the electronic component 16.
It will contact the upper end. At this time, the holding piece support member 12 slides upward against the urging force of the compression coil spring 18 to absorb the shock caused by the contact and protect the electronic component 16. .

次に、図6に示すように、搭載ヘッド10(図2参照)からピストン20の上端へのエアの供給を遮断し、(場合により)更に負圧を供給すると、ピストン20が上方に摺動して、可動挟持片14が揺動する。この際、ストッパ15の第1突出部15Aの長さSWは電子部品の幅Wよりも短く形成されているので、可動挟持片14は、ストッパ15に邪魔されることなく、第2突出部15Bの間に入り込み、これにより電子部品16を固定挟持片13の先端部13Aと可動挟持片14の先端部14Aとの間で確実に挟持することが可能となる。   Next, as shown in FIG. 6, when the supply of air from the mounting head 10 (see FIG. 2) to the upper end of the piston 20 is shut off and a negative pressure is further supplied (in some cases), the piston 20 slides upward. Thus, the movable holding piece 14 swings. At this time, since the length SW of the first protrusion 15A of the stopper 15 is shorter than the width W of the electronic component, the movable holding piece 14 is not obstructed by the stopper 15 and the second protrusion 15B. Thus, the electronic component 16 can be securely clamped between the distal end portion 13A of the fixed clamping piece 13 and the distal end portion 14A of the movable clamping piece 14.

挟持された電子部品16は基板8(図2参照)上の所定の搭載位置まで搬送され、搭載ヘッド10から電子部品挟持装置7にエアを供給すると、可動挟持片14の先端部14Aが電子部品16から離間し、これにより電子部品16は電子部品挟持装置7から解放されて基板8上に載置される。   The clamped electronic component 16 is transported to a predetermined mounting position on the substrate 8 (see FIG. 2), and when air is supplied from the mounting head 10 to the electronic component clamping device 7, the distal end portion 14A of the movable clamping piece 14 becomes the electronic component. Accordingly, the electronic component 16 is released from the electronic component clamping device 7 and placed on the substrate 8.

高精度な電子部品16の搭載を実現するためには、挟持される電子部品と電子部品挟持装置7との相対的な位置関係が一定に保持されている必要がある。電子部品挟持装置7は、固定挟持片13の先端部13Aにより電子部品16の水平方向の位置決めをすると共に、ストッパ15の第2突出部15B、15Bにより電子部品16の上下方向の位置決めをし、メス型コネクタ部品等の中抜き電子部品16の挟持することができるように構成されている。   In order to realize mounting of the electronic component 16 with high accuracy, it is necessary that the relative positional relationship between the electronic component to be clamped and the electronic component clamping device 7 is kept constant. The electronic component clamping device 7 positions the electronic component 16 in the horizontal direction by the tip portion 13A of the fixed clamping piece 13, and positions the electronic component 16 in the vertical direction by the second projecting portions 15B and 15B of the stopper 15. The hollow electronic component 16 such as a female connector component can be clamped.

尚、この実施形態においては、挟持されるべき電子部品16は中抜き電子部品16でなくとも通常の電子部品でも良い。例えば、従来はストッパ15の突出長さが一様の長さであり、ストッパの突出長さにより可動挟持片の揺動範囲が制限されるため、電子部品を精度よく挟持するためにはストッパの突出長さより若干短い幅を有する電子部品1種類しか挟持することができないが、この実施形態においては、挟持される電子部品の幅Wが前記幅SWから幅LWの長さを有する電子部品を挟持することが可能となり、1種類のストッパ15で挟持できる電子部品の種類が多くなるという効果がある。   In this embodiment, the electronic component 16 to be sandwiched may be a normal electronic component instead of the hollow electronic component 16. For example, conventionally, the protruding length of the stopper 15 is a uniform length, and the swinging range of the movable clamping piece is limited by the protruding length of the stopper. Therefore, in order to pinch an electronic component with high accuracy, Although only one type of electronic component having a width slightly shorter than the protruding length can be sandwiched, in this embodiment, the electronic component having a width W between the width SW and the width LW is sandwiched. Thus, the number of types of electronic components that can be held by one type of stopper 15 is increased.

次に、本実施の形態の第2例について説明する。
本実施の形態の第2例は、図7に示すようにストッパ22の長手方向の長さLDを電子部品16の長手方向の長さDよりも長く形成したものである。この様にストッパ22を構成すれば、このストッパ22の幅Wの長さが電子部品16の開口部16Hに入り込んでしまう長さであっても、ストッパ22の長手方向の長さLDが電子部品16の長手方向の長さDよりも長い構成なので、電子部品16を挟持した際に、ストッパ22の長手方向の端面部が開口部16Hに入り込むことはなくなり、電子部品16が傾斜して挟持される恐れはなくなる。このため、ストッパ22は電子部品16の上下方向の位置決めを確実になすことが可能となる。
Next, a second example of the present embodiment will be described.
In the second example of the present embodiment, the length LD of the stopper 22 in the longitudinal direction is longer than the length D of the electronic component 16 in the longitudinal direction, as shown in FIG. If the stopper 22 is configured in this way, the length LD of the stopper 22 in the longitudinal direction is equal to the length LD of the electronic component 16 even if the width W of the stopper 22 enters the opening 16H of the electronic component 16. 16 is longer than the length D in the longitudinal direction, and therefore, when the electronic component 16 is sandwiched, the longitudinal end surface portion of the stopper 22 does not enter the opening 16H, and the electronic component 16 is tilted and sandwiched. The fear of being lost. Therefore, the stopper 22 can reliably position the electronic component 16 in the vertical direction.

次に、本実施の形態の第3例について説明する。
本実施の形態の第3例は、図8に示すように、固定挟持片13に設けたストッパ15に形成した第2突出部15Bをストッパ15の中央に1つ形成し、第2突出部15Bの両脇に第1突出部15Aを形成したものである。その突出長さは図3に示した本実施の形態の第1例と同様に第1突出部15AがSW、第2突出部15BがLWとなっている。
又、第2突出部15Bをストッパ15の中央に形成したため、可動挟持片14と第2突出部15Bとの緩衝を防止し、その揺動範囲を広げるために可動挟持片14には第2突出部15Bが入り込む逆U次溝14Hが形成されている。
Next, a third example of the present embodiment will be described.
In the third example of the present embodiment, as shown in FIG. 8, one second protrusion 15B formed on the stopper 15 provided on the fixed clamping piece 13 is formed at the center of the stopper 15, and the second protrusion 15B is formed. The first protrusions 15A are formed on both sides. The protrusion length is SW for the first protrusion 15A and LW for the second protrusion 15B, as in the first example of the present embodiment shown in FIG.
Further, since the second projecting portion 15B is formed at the center of the stopper 15, the movable sandwiching piece 14 has a second projecting portion in order to prevent the movable sandwiching piece 14 and the second projecting portion 15B from being buffered and to widen the swing range. A reverse U-order groove 14H into which the portion 15B enters is formed.

この実施例によれば、本実施例の第1例と同様の作用を奏し、メス型コネクタ部品のような中抜き電子部品を傾けることなく確実に挟持できるという効果を奏すると共に中抜き電子部品に限らず1種類のストッパで挟持できる電子部品の種類を多くできるという効果を奏する。   According to this embodiment, the same effect as that of the first example of the present embodiment is obtained, and the effect that the hollow electronic component such as the female connector component can be securely clamped without being tilted and the hollow electronic component is obtained. There is an effect that the number of types of electronic components that can be held by one type of stopper is increased.

この発明の実施の形態の第1例に係る電子部品挟持装置の全体構造を示す断面図Sectional drawing which shows the whole structure of the electronic component clamping apparatus which concerns on the 1st example of embodiment of this invention 電子部品搭載機の要部構造を示す斜視図The perspective view which shows the principal part structure of an electronic component mounting machine この発明の実施の形態の第1例に係るストッパの周辺の構造を示す斜視図The perspective view which shows the structure around the stopper which concerns on the 1st example of embodiment of this invention この発明の実施の形態の第1例に係る電子部品挟持装置の全体構造を示す断面図Sectional drawing which shows the whole structure of the electronic component clamping apparatus which concerns on the 1st example of embodiment of this invention この発明の実施の形態の第1例に係る電子部品挟持装置の全体構造を示す断面図Sectional drawing which shows the whole structure of the electronic component clamping apparatus which concerns on the 1st example of embodiment of this invention この発明の実施の形態の第1例に係る電子部品挟持装置の全体構造を示す断面図Sectional drawing which shows the whole structure of the electronic component clamping apparatus which concerns on the 1st example of embodiment of this invention この発明の実施の形態の第2例に係るストッパの周辺の構造を示す斜視図The perspective view which shows the structure around the stopper which concerns on the 2nd example of embodiment of this invention この発明の実施の形態の第3例に係るストッパの周辺の構造を示す斜視図The perspective view which shows the structure around the stopper which concerns on the 3rd example of embodiment of this invention 従来の電子部品挟持装置の全体構造を示す断面図Sectional drawing which shows the whole structure of the conventional electronic component clamping apparatus 中抜き電子部品の斜視図Perspective view of hollow electronic components 従来の電子部品挟持装置の要部を示す断面図Sectional drawing which shows the principal part of the conventional electronic component clamping apparatus

符号の説明Explanation of symbols

7 電子部品挟持装置
12 挟持片支持部材
13 固定挟持片
14 可動挟持片
15 ストッパ
15A 第1突出部
15B 第2突出部











7 Electronic Component Clamping Device 12 Clamping Piece Support Member 13 Fixed Clamping Piece 14 Movable Clamping Piece 15 Stopper 15A First Protrusion 15B Second Protrusion











Claims (1)

基板上に電子部品を搭載するための電子部品搭載機の搭載ヘッドに備えられていて、挟持
片支持部材と、該挟持片支持部材に固定支持され先端部が下方に突出した固定挟持片と、
前記挟持片支持部材に揺動自在に支持され先端部が下方に突出すると共に該先端部が前記
固定挟持片の先端部に接近、離間自在とされた可動挟持片と、前記固定挟持片に設けられ
該固定挟持片の先端部よりも上側で前記可動挟持片の方向に突出したストッパと、を含ん
でなり、該ストッパを電子部品の上端に当接させつつ前記固定挟持片及び前記可動挟持片
の先端部で電子部品を挟持、解放自在とされた電子部品挟持装置において、前記ストッパ
の可動挟持片方向への突出長さが、電子部品の幅よりも長い突出部と電子部品の幅よりも
短い突出部とを備えたことを特徴とする電子部品挟持装置。
Provided in a mounting head of an electronic component mounting machine for mounting an electronic component on a substrate, a sandwiching piece support member, a fixed sandwiching piece fixedly supported by the sandwiching piece support member and having a tip projecting downward,
Provided on the fixed holding piece, a movable holding piece that is supported by the holding piece support member in a swingable manner and has a distal end projecting downward and having the distal end approaching and separating from the distal end of the fixed holding piece. And a stopper projecting in the direction of the movable sandwiching piece above the tip of the fixed sandwiching piece, the fixed sandwiching piece and the movable sandwiching piece while contacting the stopper with the upper end of the electronic component In the electronic component clamping device in which the electronic component is clamped and releasable at the tip of the projection, the protruding length of the stopper in the direction of the movable clamping piece is longer than the width of the protruding portion and the electronic component. An electronic component clamping device comprising a short protrusion.
JP2005017550A 2005-01-26 2005-01-26 Electronic component clamping device Active JP4683385B2 (en)

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CN102407529A (en) * 2011-09-30 2012-04-11 安徽沃德气门制造有限公司 Mechanical hand for clamping and conveying valve
CN102528816B (en) * 2012-01-11 2014-08-27 苏州大学 Operating claw and manipulator comprising same
JP6347068B2 (en) * 2014-02-07 2018-06-27 富士通株式会社 Robot hand
CN104703402A (en) * 2015-03-05 2015-06-10 苏州经贸职业技术学院 Grabbing mechanism of electronic element inserting machine
CN105082624B (en) * 2015-08-28 2017-10-13 浙江工业大学 Paper bag handle rope knotting device

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024100751A1 (en) * 2022-11-08 2024-05-16 株式会社Fuji Foreign matter removal device, picking chuck, and control method

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CN1810465A (en) 2006-08-02
JP2006210447A (en) 2006-08-10
CN100537158C (en) 2009-09-09

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