JP4677267B2 - Planar stage apparatus and exposure apparatus - Google Patents

Description

  The present invention relates to a planar stage apparatus and an exposure apparatus incorporating the same.

  Along with the rapid miniaturization of semiconductor devices in recent years, specifications required for device manufacturing apparatuses have become strict. Also in a semiconductor exposure apparatus, the speed and accuracy of a stage apparatus, which is an important component, is rapidly increasing.

  2. Description of the Related Art Conventionally, a wafer stage positioning mechanism has two stages of coarse movement / fine movement having a coarse movement part composed of an XY stage movable on an XY plane and a fine movement part mounted on the XY stage and capable of minute movement in the tilt and Z directions. A structured stage mechanism has been employed. Conventionally, a configuration using a linear motor as a drive mechanism and a non-contact bearing using a static pressure bearing as a guide mechanism has been common.

  Connected to the stage are, for example, lines such as a sensor drive cable used for alignment, a sensor signal cable, a suction tube for chucking the wafer, and a cooling tube for cooling the stage. Therefore, external vibration may be transmitted to the coarse movement part and the fine movement part via lines such as cables and tubes, and the positioning accuracy of the stage may be reduced.

Patent Document 1 discloses that the reaction force acting on the substrate stage from the cables is made constant by causing the cable relay portion to follow the stage, thereby increasing the positioning accuracy of the substrate stage.
Japanese Patent Laid-Open No. 10-233527

  In a semiconductor exposure apparatus, in order to improve throughput, it is required to increase the diameter of a wafer onto which an original pattern is transferred and to increase the acceleration force and maximum speed required for a linear motor. However, with the two-stage configuration of coarse movement and fine movement, the apparatus becomes larger, so that it becomes difficult to obtain 1) desired stage acceleration, and 2) increase in linear motor heat generation during acceleration to ensure exposure accuracy. 3) there is a problem that it becomes difficult to secure a servo band as the mechanical natural frequency of the stage decreases.

  Therefore, in the two-stage configuration of coarse movement and fine movement, it is becoming difficult to realize the device specifications corresponding to the high speed. Therefore, in order to provide a stage device that can increase the diameter of the wafer and aim for higher speed, a guideless 6-degree-of-freedom flat stage device capable of high-precision positioning even in a long stroke in the XY plane direction is provided. Proposed.

  In addition, two stages are provided to improve the throughput, and while performing an exposure operation using one stage, measurement for alignment is performed in parallel using the other stage. There has been proposed a twin stage method in which the next wafer can be exposed immediately by exchanging two stages.

  In such a situation, the auxiliary stage is required to increase the speed as well as the stage itself. In addition, in the stage device of the twin stage system, an auxiliary stage corresponding to the switching operation of the two stages is desired. Furthermore, in a flat stage device in which the coarse and fine movement parts are integrated, the vibration transmitted to the stage from the cable or tube line is directly used as the wafer vibration, so the rigidity of the auxiliary stage must be improved. It is done.

  The present invention has been made on the basis of recognition of the above problems, and an object of the present invention is to provide, for example, a flat stage apparatus that is advantageous for high accuracy and high speed and an exposure apparatus incorporating the same.

The planar stage device of the present invention is provided with respect to a stator having a planar portion, first and second movable elements moving on the planar portion, and the first and second movable elements on the planar portion . First and second auxiliary structures that move while maintaining a non-contact state, and first and second first direction guides that guide the first and second auxiliary structures along a first direction, respectively. And first and second second direction guides for guiding the first and second auxiliary structures along a second direction orthogonal to the first direction, respectively. The auxiliary structures are driven so as to maintain a substantially constant positional relationship with the first and second movable elements, respectively , and the first movable element and the second movable element are moved on the plane portion. When being replaced, the first and second auxiliary structures do not interfere with each other, and the first and second auxiliary structures, respectively. Almost driven to maintain a constant positional relationship with the mover.

  According to a preferred embodiment of the present invention, the planar stage device further includes first and second relay portions fixed to the first and second auxiliary structures, respectively. The lines drawn from the movable bodies are relayed by the first and second relay units.

  According to a preferred embodiment of the present invention, the first first direction guide is disposed along the first side surface of the stator, and the second first direction guide is the first side surface. Is disposed along the second side surface opposite to the first side surface. The first and second side surfaces are preferably side surfaces in the longitudinal direction of the stator.

  According to a preferred embodiment of the present invention, the first auxiliary structure runs in parallel with the first mover on the first direction side of the first mover, and the second auxiliary structure. The body runs parallel to the second mover on the first direction side of the second mover. According to another preferred embodiment of the present invention, the first auxiliary structure is parallel to the first mover on the first direction side of the first mover, and the second The auxiliary structure runs in parallel with the second mover on the second direction side of the second mover, wherein the first direction and the second direction are opposite to each other. .

According to a preferred embodiment of the present invention, the first and second second direction guides may include a cross roller guide.
According to a preferred embodiment of the present invention, the first and second second direction guides are provided on the first and second movable members respectively guided by the first and second first direction guides. It is done.
According to a preferred embodiment of the present invention, the planar stage device further includes first and second interferometers fixed to the first and second auxiliary movable members, respectively. The interferometers measure the vertical positions of the first and second movers, respectively.

  According to a preferred embodiment of the present invention, the planar stage device further includes a mechanism for reducing an impact when the first and second movable elements collide with the first and second auxiliary structures. Prepare.

  According to a preferred embodiment of the present invention, the planar stage device further includes encoders for measuring the positions of the first and second auxiliary structures, respectively, and the encoder is an absolute type.

  According to a preferred embodiment of the present invention, the first and second auxiliary structures are each driven by a linear motor.

  An exposure apparatus according to the present invention relates to an exposure apparatus that transfers a pattern to a substrate, and includes the above-described planar stage device as a substrate stage.

  According to the present invention, for example, it is possible to provide a flat stage apparatus advantageous for high accuracy and high speed and an exposure apparatus incorporating the same.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

(First embodiment)
1 and 2 are diagrams schematically showing a configuration of a planar stage device according to the first embodiment of the present invention. FIGS. 1A, 1 </ b> C, 1 </ b> D, and 1 </ b> E are plan views of the planar stage apparatus 100, and FIG. 1B is a side view of the planar stage apparatus 100. 2A is a plan view in which a part of the flat stage apparatus 100 is enlarged, and FIG. 2B is a side view in which the flat stage apparatus 100 is enlarged.

  First, the basic configuration of the flat stage apparatus 100 will be described with reference to FIG. The planar stage apparatus 100 can be incorporated in an exposure apparatus as a wafer stage apparatus having a twin stage configuration. The planar stage apparatus 100 includes a stator 1 having a planar portion and two movable elements 2a and 2b that move on the planar portion of the stator 1. The movers 2a and 2b can be configured as a stage that holds and moves an object such as a wafer (substrate).

  The movers 2a and 2b are two-dimensionally driven on the plane portion of the stator 1 by electromagnetic force such as Lorentz force generated between the movers 2a and 2b. Of course, the movers 2a and 2b may be driven in six axes. A configuration in which the movers 2a and 2b are driven with two or more axes in such a configuration is called a planar motor. The movers 2a and 2b can be configured so as to be positioned with high accuracy over the entire wide movable region, that is, to have both functions of the coarse moving portion and the fine moving portion. A magnet array (typically a permanent magnet array) is disposed on the lower surfaces of the movers 2a and 2b.

  When the planar stage apparatus 100 is incorporated in an exposure apparatus, an exposure area and an alignment measurement area can be arranged along the longitudinal direction (Y direction) of the stator 1. The two movers (stages) 2a and 2b can move back and forth between the exposure area and the measurement area.

  Exposure of a wafer placed on the first mover with the first mover (for example, 2a) disposed in the exposure region and the second mover (for example, 2b) disposed in the measurement region The process and the measurement process for the wafer placed on the second movable element (for example, 2b) can be executed in parallel. When this parallel processing ends, the first mover and the second mover are switched. Before, during or after the replacement (swap), the wafer placed on the first movable element is replaced with a new wafer. Then, after the replacement, the wafer placed on the second mover is exposed while being aligned based on the measurement result obtained by the measurement process, and the new wafer placed on the first mover. A measurement process is executed.

  A bar mirror (not shown) that reflects a light beam from an interferometer (not shown) is mounted at an appropriate place, for example, a side surface of the mover 2a, 2b, and the position of the mover 2a, 2b in the XY plane is measured. .

  Guide members (first direction guides or Y direction guides) 4 a and 4 b are provided along the longitudinal direction (Y direction) of the stator 1 on both sides of the stator 1. The first auxiliary tables (first direction movable members) 5a and 5b are guided by the guide members 4a and 4b so as to be movable in the Y direction. The guide members 4a and 4b are provided with, for example, guide rails extending in the Y direction, and the first auxiliary tables 5a and 5b can be guided by the guide rails via, for example, linear motion bearings. The first auxiliary tables 5a and 5b typically extend in directions orthogonal to the guide members 4a and 4b, respectively.

  The second auxiliary tables (auxiliary structures; second direction movable members) 6a and 6b are supported by the first auxiliary tables (first direction movable members) 5a and 5b, respectively, so that they can move in the X direction. Yes. For example, the first auxiliary tables 5a and 5b are provided with guide rails (second direction guides) extending in the X direction, and the second auxiliary tables 6a and 6b are guided by the guide rails via linear motion bearings. sell.

  With the above configuration, the second auxiliary tables 6a and 6b can move in the X and Y directions.

The first auxiliary tables 5a and 5b can be driven along the Y direction by a linear motor, for example. The second auxiliary tables 6a and 6b can be driven along the X direction by a linear motor, for example.
The second auxiliary tables 6a and 6b run alongside the movers 2a and 2b in a state where the distance between the movers 2a and 2b and the second auxiliary tables 6a and 6b is kept constant.

  FIGS. 1C and 1D show an operation (swap operation) in which the two movable elements 2a and 2b are exchanged between the exposure region and the measurement region for alignment. First, in the state shown in FIG. 1A, the mover 2a moves in the + X direction and in the mover 2b-X direction, the second auxiliary table 6a accompanying this moves in the + direction, and the second auxiliary table 6b moves in the + direction. -Move in the X direction. Next, the mover 2a, the second table 6a, and the first auxiliary table 5a move in the + Y direction, and the mover 2b, the second auxiliary table 6b, and the first auxiliary table 5b move in the -Y direction. Thereby, as shown in FIG. 1C, first, the movers 2a and 2b pass in the vicinity of the center in the longitudinal direction of the stator 1, and then the auxiliary tables pass each other as shown in FIG. 1D. Next, the mover 2a moves in the −X direction and in the mover 2b + X direction, the second auxiliary table 6a accompanying the mover moves in the − direction, and the second auxiliary table 6b moves in the + X direction, and FIG. The replacement operation is completed as shown in FIG.

In order to enable such a passing operation, as shown in FIG. 1D, an auxiliary stage device 3a including a first auxiliary table 5a, a second auxiliary table 6a, and a guide member 4a, The auxiliary stage device 3b configured to include the first auxiliary table 5b, the second auxiliary table 6b, and the guide member 4b is disposed so as not to contact each other at the time of replacement. That is, at least when the movers 2a and 2b pass each other, the movable portion of the first auxiliary stage device 3a does not protrude to the left of the center of the stator 1 in the X direction, and the movable portion of the second auxiliary stage device 3b is not fixed to the stator. 1 does not protrude to the right of the center in the X direction.
Next, a detailed configuration example of the flat stage apparatus 100 shown in FIG. 1 will be described with reference to FIG. FIG. 2 shows only the auxiliary stage device 3a of the auxiliary stage devices 3a and 3b, but both have the same configuration. In the following description, the components of the auxiliary stage device 3b are appended using parentheses.

  Two linear guide rails 7a (7b) are arranged in parallel along the Y direction on the upper surface of the guide member 4a (4b). The first auxiliary table 5a (5b) having the bearing block can move along the rail 7a (7b), that is, along the Y direction. One or more bearing blocks are provided for at least each of the rails 7a (7b), and the rotation play in the XY plane, which is the moving surface of the first auxiliary table 5a (5b), is suppressed. Here, it is preferable to select a bearing block and a rail 7a (7b) capable of allowing a moment acting on the first auxiliary table 5a (5b) in the XY plane.

Two linear guide rails 10a (10b) are arranged in parallel along the X direction on the upper surface of the first auxiliary table 5a (5b). The second auxiliary table 6a (6b) having a bearing block (not shown) can move along the rail 10a (10b), that is, along the X direction.
The mover 2a (2b) has lines such as a sensor driving cable used for alignment, a sensor signal cable, a suction tube for chucking the wafer, and a cooling tube for cooling the stage.

  Such a line is drawn out of the movable element 2a (2b) from the first relay block 18a (18b) fixed to the movable element 2a (2b). The second relay block 16a (16b) is fixed to the second auxiliary table 6a (6b) of the auxiliary stage 3a (3b). The first line (for example, cable and / or tube) 17a (17b) drawn from the first relay block 18a (18b) is connected to the second relay block 16a (16b). The first line 17a (17b) connects, for example, the first relay block 18a (18b) and the second relay block 16a (16b) with a sag (buffer function) near the center. With such a buffer function, it is possible to suppress a change in tension of the first line 17a (17b) due to the fine movement of the mover, and to suppress a force from being applied to the mover by the first line 17a (17b).

  Further, a second line (for example, a cable and / or a tube) 15a (15b) is provided between the third relay block 14a (14b) and the second relay block 16a (16b) fixed to the first auxiliary table 11a (11b). ). The second line 15a (15b) is disposed along the first auxiliary table 5a (5b), and the second relay block 16a (16b) also moves with the movement of the second auxiliary table 6a (6b). Therefore, the second line 15a (15b) can be partially fixed with a clamp (not shown) provided with a U-turn portion in part. A cable bear or the like may be used instead of the clamp.

  Further, the third relay block 14a (14b) and an external connection portion (not shown) of the planar stage device are connected by a third line (for example, cable and / or tube) 13a (13b). The third relay block 14a (14b) is fixed on the first auxiliary table 5a (5b), and the third line 13a (13b) is moved when the first auxiliary table 5a (5b) moves in the Y direction. A U-turn portion or the like may be provided in part so as not to hinder the movement, and can be connected to the third relay block 14a (14b).

  As a drive source for driving the second auxiliary table 6a (6b) and the first auxiliary table 5a (5b) in the X direction and the Y direction, respectively, a linear motor can be adopted. For example, magnets (not shown) are arranged on the second auxiliary table 6a (6b) so that the magnetic poles of adjacent magnets are opposite to each other, and a plurality of coils (not shown) are arranged on the first auxiliary table 5a (5b). ) Can be arranged. The second auxiliary table 6a (6b) can be driven in the X direction by passing a current through this coil. Here, by arranging the coil on the first auxiliary table 5a (5b) side, the total weight of the first auxiliary table 5a (5b) and the second auxiliary table 6a (6b) can be suppressed. Moreover, generation | occurrence | production of the vibration in the 2nd auxiliary | assistant table 6a (6b) can be suppressed by not mounting the tube for cooling of a coil, and the cable for a drive in the 2nd auxiliary | assistant table 6a (6b).

  The position of the second auxiliary table 6a (6b) is measured by a second encoder including a head portion 12a (12b) and a scale 11a (11b). The head portion 12a (12b) can be fixed to the second auxiliary table 6a (6b), and the scale 11a (11b) can be fixed to the first auxiliary table 5a (5b). By controlling the linear motor for driving in the X direction based on the position information provided from the second encoder, the mover 2a (2a (2b) is maintained while maintaining a constant X direction interval. The second auxiliary table 6a (6b) can be run in parallel in the X direction without contacting 2b).

  For driving in the Y direction, a linear motor can be configured by a plurality of coils fixed to the first auxiliary table 5a (5b) and a magnet fixed to the guide member 4a (4b). Here, by arranging the magnet on the guide member 4a (4b) side, the weight of the first auxiliary table 5a (5b) on the movable side can be reduced.

  The position of the first auxiliary table 5a (5b) is measured by a first encoder including a head portion 9a (9b) and a scale 8a (8b). The head portion 9a (9b) can be fixed to the first auxiliary table 5a (5b), and the scale 8a (8b) can be fixed to the guide member 4a (4b). By controlling the linear motor for driving in the Y direction based on the position information provided from the first encoder, the movable element 2a (2b) is maintained while maintaining a constant Y-direction interval with respect to the movable element 2a (2b). ), The first auxiliary table 5a (5b) and the second auxiliary table 6a (6b) can run in parallel in the Y direction.

Accordingly, the second auxiliary table 6a (6b) runs in parallel with the mover 2a (2b) while maintaining a fixed positional relationship and a non-contact state with respect to the mover 2a (2b). Further, since the auxiliary stage device 3a and the auxiliary stage 3b are configured not to interfere (collision), the auxiliary stage device can be caused to run in parallel with the mover even when the movers 2a and 2b are replaced.
By using absolute type encoders as the first and second encoders described above, it becomes unnecessary to reset at a predetermined position reference required for the increment type, and the auxiliary stage device can be controlled promptly when the device is started up. it can. At the same time, it is possible to grasp the position of the mover during the initial drive, and based on this position information, it is possible to selectively energize a plurality of coils arranged on the stator. Also, non-contact drive can be realized by adopting a linear motor as the drive source for the second auxiliary table and the first auxiliary table, so it can be used in places where a clean environment is required or where high durability is required. It is effective for. Thereby, the twin stage which does not give disturbances, such as a vibration, with a line, such as a cable and a tube, with respect to a needle | mover can be provided.

(Second Embodiment)
FIG. 3 is a diagram schematically showing the configuration of the planar stage device according to the second embodiment of the present invention. In FIG. 3, the constituent elements shown by the same reference numerals as those shown in FIGS. 1 and 2 are the same as the constituent elements of the first embodiment, and therefore, the description thereof is omitted unless necessary.

  In FIG. 3, the relative positional relationship between the auxiliary stage device 3b and the mover 2b is different from that in FIG. 1 showing the first embodiment, and the mover is arranged on the + Y direction side and the auxiliary stage is arranged on the −Y direction side Has been. That is, in this embodiment, the auxiliary stage devices 3a and 3b are respectively arranged on the −Y direction side with respect to the movers 2a and 2b, and follow the movers without contact.

  FIG. 4 is a diagram comparing the first embodiment and the second embodiment. FIG. 4A is a schematic diagram of the planar stage device according to the second embodiment. The two-dot chain line described in the stator 1 is movable by the movers 2a and 2b during exposure and during measurement for alignment. The area to be shown is shown. L1 indicates the length in the Y direction occupied by the stator 1 and the auxiliary stage devices 3a and 3b when the two movers (stages) are farthest in the Y direction. On the other hand, FIG. 4B is a schematic diagram of the planar stage device of the first embodiment, and L2 is occupied by the stator 1 and the auxiliary stage devices 3a and 3b when the two stages are farthest in the Y direction. The length in the Y direction is shown. By adopting the relative positional relationship between the mover and the auxiliary stage device as in the second embodiment, even if the length of the stator is the same, the length in the Y direction of one auxiliary stage device is the same. The plane stage device can be reduced by an amount corresponding to ΔL (= L2−L1), and the size of the device can be reduced.

(Third embodiment)
FIG. 5 is a diagram schematically showing the configuration of the planar stage device according to the third embodiment of the present invention. In FIG. 5A, guide members 4 a and 4 b are arranged along the longitudinal direction (Y direction) of the stator 1 at the sides of the both side surfaces of the stator 1. On the guide members 4a and 4b, telescopic mechanisms 19a and 19b including cross roller guides extending in a direction perpendicular to the guide members 4a and 4b are arranged. The telescopic mechanisms 19a and 19b can move in the Y direction along the guide members 4a and 4b. The cross roller guide includes X fixed portions 20a and 20b, X movable portions 22a and 22b that move in a non-contact state while maintaining a certain distance from the mover, and a rolling element including a plurality of rolling elements such as rollers and balls. It has moving parts 21a and 21b.

  FIG. 5B shows a state when the mover 2a is moved to the right side (+ X direction) and the mover 2b is moved to the left side (−X direction) for the swap operation of the movers 2a and 2b. Yes. When the X movable portions 22a and 22b of the cross roller guide move and the cross roller guide contracts, the auxiliary stages do not come into contact with each other when the mover is swapped.

  FIG. 6 shows an example of mounting of a driving mechanism and lines (for example, cables and / or tubes) in the direction of the planar stage device X of the third embodiment. The second auxiliary table 6a (6b) is configured such that the X movable portion 22a (22b) of the cross roller guide is fixed to the lower surface thereof and is movable in the X direction. A rotational force of a motor (not shown) is provided from the pulley 23a (23b) to the gear 25a (25b) via the belt 24a (24b) and to the pinion 26a (26b) provided in the second auxiliary table 6a (6b). As a result, the second auxiliary table 6a (6b) is driven. Similarly to the first embodiment, the second relay block 16a (16b) is fixed to the second auxiliary table 6a (6b), and the second line 15a (15b) is connected to the second relay block 16a (16b). Has been. By using the cross roller guide as a driving mechanism in the X direction of the auxiliary stage device, the X movable portion can be reduced in weight. Thereby, the twin stage which does not give disturbances, such as a vibration, with a line, such as a cable and a tube, with respect to a needle | mover can be provided.

(Fourth embodiment)
FIG. 7 is a diagram schematically illustrating the configuration of the flat stage device according to the fourth embodiment of the present invention. In FIG. 7A, the X-direction expansion / contraction mechanisms 28a and 28b of the auxiliary stage device are in a non-contact state while maintaining a fixed positional relationship with the cross roller guide and the movers 2a and 2b similar to those of the third embodiment. Followers 29a and 29b that move at the same time. Similarly to the first embodiment, the second relay block is fixed to the driven portions 29a and 29b, and a line (for example, a cable and / or a tube) is connected to the movable elements 2a and 2b via the second relay block. The

  FIGS. 7B and 7C show a state in which the movers 2a and 2b are moving in the X direction during the parallel execution of exposure and measurement processing. The followers 29a and 29b of the stage device are accompanied. At this time, the X movable portions 22a and 22b of the cross roller guide can remain in the extended state. FIG. 7 (d) shows a state in which the mover 2a is moved to the right (+ X direction) and the mover 2b is moved to the left (−X direction) because the movers 2a and 2b pass each other during the swap operation. ing. The X movable portions 22a and 22b of the cross roller guide that have been extended move so that the distance between them increases. That is, the X movable part 22a moves in the + X direction, and the X movable part 22b moves in the -X direction.

  Accordingly, as shown in FIG. 7E, when the two movers 2a and 2b pass each other, the two auxiliary stage devices can run in parallel with the movers 2a and 2b without interference. Then, as shown in FIG. 7F, the X movable parts 22a and 22b are extended again and the next operation is executed.

  This eliminates the need to move the X movable portion of the cross roller guide during exposure and measurement, thereby reducing the drive time of the X movable portion and extending the life of the cross roller guide.

(Fifth embodiment)
FIG. 8 is a diagram schematically showing a configuration of a flat stage apparatus according to the fifth embodiment of the present invention. A second relay block 15a (15b) is fixed to the second auxiliary table 6a (6b) of the auxiliary stage device. The second relay block 15a (15b) and the first relay block 17a (17b) provided on the mover 2a (2b) are connected by a first line (cable and / or tube) 17a (17b). .

  A shock absorbing leaf spring 35a (35b) is fixed to the second auxiliary table 6a, (6b) via a connecting member 34a (34b). FIG. 9 is a perspective view illustrating a configuration example of the mover and the shock absorbing leaf spring. At the tip of the shock absorbing leaf spring 35a (35b), an appropriate gap of, for example, about 0.1 mm is provided around the entire circumference of the pin-shaped protrusion 36a (36b) attached to the side surface of the movable element 2a (2b). An annular pin receiving portion 50a is fixed.

  Absorbers 31a (31b) and 32a (32b) that absorb impact are provided at the end of the movable range of the second auxiliary table 6a (6b). Similarly, an absorber 30a (30b) that absorbs an impact is also provided at the end of the movable range of the first auxiliary table 5a (5b).

  By providing such an impact reduction mechanism (impact buffering mechanism and shock absorbing mechanism) in the auxiliary stage device, the mover runs away due to an unexpected cause, or the mover suddenly stops and is accompanied. When the auxiliary stage device cannot keep the non-contact state and collides with the mover, damage to the mover can be minimized. FIG. 10 shows an example of the behavior at the time of collision. In FIG. 10, the mover runs away in the −Y direction and the normal holding interval cannot be maintained, and the pin-shaped protrusion 36 a (36 b) attached to the side surface of the mover is an annular pin on the auxiliary stage device side. The state which contacted the receiving part 50a (50b) is shown. When a load is applied to the pin receiving portion 50a (50b), the shock absorbing plate spring 35a (35b) bends, and the impact force at the time of collision is reduced. This force is transmitted to the first table 5a (5b) via the second auxiliary table 6a (6b). Depending on the driving state of the first auxiliary table 5a (5b), if the force holding the first auxiliary table is small, the first auxiliary table moves in the -Y direction which is the direction of the force received by the first auxiliary table. The kinetic energy is absorbed by the absorber 30a (30b) and stops.

  In this way, not only the auxiliary stage device has a function of relaying the line to the mover, but also a mechanism that is effective for preventing damage to the stage (movable element) by providing an impact absorbing mechanism and an impact buffering mechanism. An auxiliary stage device having the above can be realized.

(Sixth embodiment)
FIG. 11 is a diagram schematically showing a configuration of a planar stage device according to the sixth embodiment of the present invention. The first auxiliary tables 5a and 5b extend in the X direction and also in the Y direction, and an interferometer for measuring the position of the movers 2a and 2b in the Z-axis direction at a portion extending in the Y direction. 38a and 38b are mounted. The laser beam projected to the interferometer from a laser head (not shown) is bent by the upper folding mirrors 39 to 42 and reflected by the plane mirrors 37a and 37b provided in the X direction on the upper surface of the movable element, thereby moving the laser beam. The position of the child in the Z direction can be measured.

  The plane mirrors 37a and 37b are arranged in two rows offset in the Y direction, and measure two points for one movable element so that pitching around the X axis can be measured. In addition, the bending mirrors 39 to 42 extend in the Y direction, and measurement can be continued even when the mover is swapped.

  By providing the interferometer components in the auxiliary stage device in this way, it is not necessary to separately arrange a guide rail and a drive system for the interferometer, which is advantageous in terms of space and cost.

  Here, the interferometer is installed on the first auxiliary table. However, the folding mirror can be arranged on the first auxiliary table by placing the interferometer separately.

(Seventh embodiment)
FIG. 12 is a diagram schematically showing the configuration of the planar stage device according to the seventh embodiment of the present invention. For each mover 2a (2b), two first auxiliary tables 44a and 46a (44b and 46b) are provided that are guided to move in the Y direction on the guide member 43a (43b). Two second auxiliary tables 45a and 47a are held by the first auxiliary tables 44a and 46a, respectively, so as to be movable in the X direction.
By this configuration, by dividing the line (for example, cables and / or tubes) and reducing the weight that can be mounted on one of the first auxiliary table and the second auxiliary table, compared to the above-described embodiments, It is possible to reduce the weight of each of the first and second auxiliary tables. In addition, it is possible to disperse the impact force and load load at the time of contact between the mover and the auxiliary stage device, and at the same time, it is possible to select an impact reduction mechanism (impact absorption mechanism, impact buffer mechanism) with a smaller allowable load. This is effective for reducing the weight.

  The above embodiment is an example in which the present invention is provided to a twin stage type stage apparatus having two movable elements, but the present invention can also be applied to a stage apparatus having one movable element.

(Example of application to exposure equipment)
As described above, the flat stage apparatus represented by each of the above embodiments can be incorporated into an exposure apparatus as a stage apparatus on a twin stage configuration. FIG. 13 is a view showing the schematic arrangement of an exposure apparatus incorporating a flat stage apparatus typified by the above embodiments. In FIG. 13, the auxiliary stage device is not shown.

  The exposure apparatus includes a measurement unit 110 for measurement processing for alignment on the stator 1, and an exposure unit that sequentially transfers a pattern to a plurality of shot areas while aligning a wafer (substrate) according to a measurement result by the measurement unit 110. 120.

  A measurement area in which measurement is performed by the measurement unit 110 and an exposure area in which exposure is performed by the exposure unit 120 are arranged along the longitudinal direction (Y direction) of the stator 1. The two movers (stages) 2a and 2b can move back and forth between the exposure area and the measurement area.

  Exposure of a wafer placed on the first mover with the first mover (for example, 2a) disposed in the exposure region and the second mover (for example, 2b) disposed in the measurement region The process and the measurement process for the wafer placed on the second movable element (for example, 2b) are executed in parallel. When this parallel processing is completed, the first mover and the second mover are switched (swap). Before, during or after the replacement, the wafer placed on the first mover is replaced with a new wafer. After the replacement, the wafer placed on the second movable element is exposed while being aligned based on the measurement result of the measurement process, and the measurement process is performed on the new wafer placed on the first movable element. Executed.

It is a figure which shows roughly the structure of the plane stage apparatus of 1st Embodiment of this invention. It is a figure which shows roughly the structure of the plane stage apparatus of 1st Embodiment of this invention. It is a figure which shows schematically the structure of the plane stage apparatus of 2nd Embodiment of this invention. It is a figure which shows schematically the structure of the plane stage apparatus of 2nd Embodiment of this invention. It is a figure which shows schematically the structure of the plane stage apparatus of 3rd Embodiment of this invention. It is a figure which shows schematically the structure of the plane stage apparatus of 3rd Embodiment of this invention. It is a figure which shows schematically the structure of the plane stage apparatus of 4th Embodiment of this invention. It is a figure which shows schematically the structure of the plane stage apparatus of 5th Embodiment of this invention. It is a figure which shows schematically the structure of the plane stage apparatus of 5th Embodiment of this invention. It is a figure which shows schematically the structure of the plane stage apparatus of 5th Embodiment of this invention. It is a figure which shows schematically the structure of the planar stage apparatus of 6th Embodiment of this invention. It is a figure which shows schematically the structure of the planar stage apparatus of 6th Embodiment of this invention. It is a figure which shows schematically the structure of the exposure apparatus of suitable embodiment of this invention.

Explanation of symbols

1: stator, 2a, 2b: mover, 3a, 3b: auxiliary stage device, 4a, 4b: guide member, 5a, 5b: first auxiliary table, 6a, 6b: second auxiliary table, 7a, 7b: rail 8a, 8b: Encoder scale, 9a, 9b: Encoder head, 10a, 10b: Rail, 11a, 11b: Encoder scale, 12a, 12b: Encoder head, 13a, 13b: Third line, 14a, 14b: First 3 relay blocks, 15a, 15b: second line, 16a, 16b: second relay block, 17a, 17b: first line, 18a, 18b: first relay block, 19a, 19b: telescopic mechanism, 20a, 20b: cross Roller guide X fixed part, 21a, 21b: Cross roller guide rolling part, 22a, 22b: Cross roller guide X movable part 23a, 23b: pulley, 24a, 24b: belt, 25a, 25b: gear, 26a, 26b: pinion, 28a, 28b: telescopic mechanism, 29a, 29b: driven part, 30a, 30b: absorber, 31a, 31b, 32a, 32b: Absorber, 34a, 34b: Connecting member, 35a, 35b: Shock absorbing leaf spring, 36a, 36b: Projection, 37a, 37b: Planar mirror, 38a, 38b: Interferometer, 39, 40, 41, 42 : Bending mirror, 43a, 43b: guide member, 44a, 44b, 46a, 46b: first auxiliary table, 45a, 45b, 47a, 47b: second auxiliary table

Claims (13)

A planar stage device,
A stator having a planar portion;
First and second movers that move on the plane portion;
First and second auxiliary structures that move while maintaining a non-contact state with respect to the first and second movers on the planar portion;
First and second first direction guides respectively guiding the first and second auxiliary structures along a first direction;
First and second second direction guides for guiding the first and second auxiliary structures along a second direction orthogonal to the first direction, respectively.
The first and second auxiliary structures are driven so as to maintain a substantially constant positional relationship with the first and second movers, respectively .
When the first mover and the second mover are exchanged on the plane portion, the first and second auxiliary structures are not interfered with each other, and the first and second auxiliary structures, respectively. Driven to maintain a substantially constant positional relationship with the mover of
A flat stage device characterized by the above. The apparatus further includes first and second relay portions fixed to the first and second auxiliary structures, respectively, and the lines drawn from the first and second movable bodies are the first and second lines, respectively. Relayed by
The flat stage apparatus according to claim 1 , wherein The first first direction guide is disposed along a first side surface of the stator, and the second first direction guide is along a second side surface opposite to the first side surface. Arranged,
The flat stage apparatus according to claim 1 or 2 , wherein The first and second side surfaces are side surfaces in the longitudinal direction of the stator,
The flat stage apparatus according to claim 3. The first auxiliary structure runs in parallel with the first mover on a first direction side of the first mover, and the second auxiliary structure is the second mover of the second mover. Running in parallel with the second mover on the first direction side,
The flat stage apparatus according to any one of claims 1 to 4 , wherein the flat stage device is characterized in that: The first auxiliary structure is parallel to the first mover on the first direction side of the first mover, and the second auxiliary structure is the second mover of the second mover. 2 side by side with the second mover, the first direction and the second direction are opposite to each other,
The flat stage apparatus according to any one of claims 1 to 4 , wherein the flat stage device is characterized in that: The first and second second direction guides include a cross roller guide,
Planar stage device according to any one of claims 1 to 6, characterized in that. The first and second second direction guides are provided on first and second movable members respectively guided by the first and second first direction guides. The flat stage apparatus according to any one of claims 1 to 7 . Further comprising first and second interferometers respectively fixed to the first and second auxiliary movable members;
The vertical positions of the first and second movers are measured by the first and second interferometers, respectively.
The flat stage apparatus according to claim 8 . A mechanism for reducing an impact when the first and second movable elements collide with the first and second auxiliary structures;
The flat stage apparatus according to any one of claims 1 to 9 , wherein An encoder for measuring the position of each of the first and second auxiliary structures, and the encoder is of an absolute type;
The flat stage apparatus according to any one of claims 1 to 10 , wherein the flat stage apparatus is characterized in that The first and second auxiliary structures are each driven by a linear motor;
Planar stage device according to any one of claims 1 to 11, characterized in that. An exposure apparatus for transferring a pattern to a substrate,
An exposure apparatus comprising the planar stage device according to any one of claims 1 to 12 as a substrate stage.

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