JP4673477B2 - Image sensor drive circuit, image sensor test apparatus - Google Patents

Image sensor drive circuit, image sensor test apparatus Download PDF

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Publication number
JP4673477B2
JP4673477B2 JP2000271629A JP2000271629A JP4673477B2 JP 4673477 B2 JP4673477 B2 JP 4673477B2 JP 2000271629 A JP2000271629 A JP 2000271629A JP 2000271629 A JP2000271629 A JP 2000271629A JP 4673477 B2 JP4673477 B2 JP 4673477B2
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image sensor
overflow
ofd
supply terminal
diode
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JP2002084461A (en
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雅志 亀山
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Advantest Corp
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Advantest Corp
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Description

【０００１】
【発明の属する技術分野】
この発明は一般にＣＣＤ（Charge Couple Device) と呼ばれている固体撮像素子を動作状態に維持する撮像素子駆動回路及びこの撮像素子駆動回路を搭載した撮像素子試験装置に関する。
【０００２】
【従来の技術】
図３に従来の撮像素子駆動回路の構成を示す。図中１０はＣＣＤ等と呼ばれている撮像素子、２０はこの撮像素子１０にオーバーフロー電圧ＶOFD を印加する駆動回路を示す。撮像素子１０には、このオーバーフロー電圧ＶOFD を印加する駆動回路２０の他に各種の駆動回路を接続して駆動するが、この発明の対象はオーバーフロー電圧ＶOFD を印加する駆動回路２０であるので、この駆動回路２０のみを示している。
【０００３】
オーバーフロー電圧ＶOFD とは撮像素子１０に入力される光量が規定よりオーバーした場合（このときの入力光量を飽和露光量と呼んでいる）、光電変換部に発生する過剰な電荷をオーバーフロードレインに排出させるための閾値を与える電圧である。このオーバーフロー電圧ＶOFD を一定値に維持しておくことにより、入力光−出力電圧の直線特性の範囲を一定値に維持することができる。
オーバーフロー電圧ＶOFD は電圧源２１からダイオードＤ１と抵抗器Ｒ１から成る並列回路を通じて撮像素子１０のオーバーフロー供給端子ＴOFD に印加される。
【０００４】
ここでダイオードＤ１が用いられる理由を説明する。つまり、オーバーフロー電圧供給端子ＴOFD にはオーバーフロー電圧ＶOFD の他にシャッタパルスＰCCも印加される。このシャッタパルスＰCCの印加により、各光電変換部に蓄積されている電荷を瞬時に放出（リセット）させ、その直後に入力された光量に従って蓄積された電荷を読み出すことによって、瞬時にとらえた画像データを得ることを目的としている。つまり、移動している物体の瞬時をとらえ、流線ボケの少ない画像を得ることを目的として考えられたシャッタ機構である。
【０００５】
シャッタパルスはドライバ２２からコンデンサＣを通じてオーバーフロー電圧供給端子ＴOFD に印加される。このシャッタパルスは正極性のパルスで与えられ、非印加時点ではドライバ２２の出力端子はＬ論理電位ＰＬを出力し、シャッタパルスの出力時点ではパルスの尖頭値はＨ論理電位を与えるＰＨとなる。従って、シャッタパルスＰCCが非出力時点ではオーバーフロー電圧供給端子ＴOFD には電圧源２１から一定電圧のオーバーフロー電圧ＶOFD が印加されており、またシャッタパルスＰCCの印加時点ではオーバーフロー電圧ＶOFD にシャッタパルスＰCCの振幅が加算されて印加される（図４参照）。シャッタパルスＰCCが出力される時点でダイオードＤ１はオフとなり、電圧源２１をドライバ２２の負荷から切離し、少ないパワーで撮像素子１０にシャッタパルスＰCCを印加するためにダイオードＤ１が用いられている。
【０００６】
【発明が解決しようとする課題】
撮像素子１０のオーバーフロー電圧供給端子ＴOFD から内部を見たインピーダンス（直流抵抗値）は、どの撮像素子１０であっても一定値となるように製造されている。しかしながら、製造上のバラツキ等によってわずかではあるが、オーバーフロー電圧供給端子ＴOFD から内部を見たインピーダンスは一様でなく、各撮像素子間でバラツキを持つ、このため撮像素子１０の動作を試験して新たな撮像素子に交換するごとにダイオードＤ１を流れる電流が変動し、この電流の変動によりオーバーフロー電圧ＶOFD も変動する不都合が生じる。
【０００７】
つまり、撮像素子１０を順次試験する場合、撮像素子の試験が終了すると、次に新しい撮像素子１０を試験装置に装着し、新たに装着された撮像素子１０を試験する。このために撮像素子１０が交換されるごとに、オーバーフロー電圧供給端子ＴOFD とダイオードＤ１を通じて流れる電流Ｉc は撮像素子１０の抵抗値（オーバーフロー電圧供給端子ＴOFD から見た内部インピーダンス）の値に通じて変化し、これによりオーバーフロー電圧ＶOFD も変動してしまう欠点がある。
【０００８】
この様子を図５を用いて説明する。試験すべき撮像素子１０に流れる電流Ｉc がダイオードＤ１のオンの状態とオフの状態のほぼ中間点に対応する電流値ＩO であった場合には、ダイオードＤ１の電流−電圧特性曲線の彎曲部分で動作することになる。この動作電流ＩO で動作した場合、撮像素子１０の内部抵抗のバラツキによってわずかでも電流ＩO が＋ΔＩO ，−ΔＩO に変動すると、ダイオードＤ１の順方向電圧降下ＶD1が大きく変動し、この変動によって撮像素子１０に印加されるオーバーフロー電圧ＶOFD も大きく変動してしまうことになる。
【０００９】
試験すべき撮像素子１０に印加するオーバーフロー電圧ＶOFD が撮像素子ごとに変動すると、各撮像素子ごとに光電変換特性の直線範囲が変動するため、撮像素子ごとに光電変換特性の範囲が異なる状態で試験が行われることになり、均一な試験を行うことができない不都合が生じる。
従って、従来は試験しようとする撮像素子１０ごとにオーバーフロー電圧供給端子ＴOFD の内部インピーダンスを予め測定し、その測定された内部インピーダンスに従って電圧源２１に設定する電圧を調整し、オーバーフロー電圧ＶOFD が一定値になるように係数管理する必要があった。
【００１０】
この発明の目的は、予めオーバーフロー電圧供給端子ＴOFD の内部インピーダンスを測定する必要がなく、また、この測定結果により電圧源２１の電圧を設定変更する必要のない撮像素子駆動回路と、この撮像素子駆動回路を搭載した撮像素子試験装置を提供しようとするものである。
【００１１】
【課題を解決するための手段】
この発明の請求項１では、撮像素子のオーバーフロー電圧供給端子にダイオードと抵抗器を通じてオーバーフロー電圧ＶOFD を印加し、撮像素子を動作状態に維持する構造の撮像素子駆動回路において、
ダイオードとオーバーフロー電圧供給端子との接続点と共通電位点との間に定電流回路を接続した構造の撮像素子駆動回路を提案するものである。
【００１２】
この発明の請求項２では、請求項１記載の撮像素子駆動回路を搭載し、被試験撮像素子が順次交換されてもオーバーフロー電圧供給端子に供給されるオーバーフロー電圧が一定値を維持する構造とした撮像素子試験装置を提案するものである。
【００１３】
【作 用】
この発明による請求項１で提案した撮像素子駆動回路の構成によれば、定電流回路を流れる電流がダイオードを通じて流れるため、ダイオードは常時順方向電流が流れた状態に維持される。
この結果、負荷となる撮像素子のオーバーフロー電圧供給端子の内部インピーダンスが多少変動しても、ダイオードの順方向電圧降下は一定値を維持する。この結果、このダイオードを通じて印加されるオーバーフロー電圧ＶOFD は一定値を維持することができる。
【００１４】
この発明の請求項２で提案する撮像素子試験装置によれば、被試験撮像素子が順次交換され、この交換ごとにオーバーフロー電圧供給端子の内部インピーダンスが変動しても、オーバーフロー電圧ＶOFD を供給するダイオードの順方向電圧降下は一定値に維持され続ける。この結果、被試験撮像素子が交換されても、各撮像素子のオーバーフロー電圧供給端子に印加されるオーバーフロー電圧は一定値に維持され、特定した光電変換特性上で試験を行うことができる利点が得られる。
【００１５】
【発明の実施の形態】
図１にこの発明による撮像素子駆動回路の一実施例を示す。図３と対応する部分には同一符号を付して示す。この発明の請求項１では電圧源２１からダイオードＤ１と抵抗器Ｒ１を通じて撮像素子１０のオーバーフロー電圧供給端子ＴOFD にオーバーフロー電圧ＶOFD を印加する構造の撮像素子駆動回路２０において、ダイオードＤ１とオーバーフロー電圧供給端子ＴOFD との接続点と共通電位点との間に定電流回路２３を接続した構造とした点を特徴とするものである。
【００１６】
定電流回路２３はダイオードＤ１を通じて電圧源２１から一定の電流ＩS を吸い込む動作を行う。定電流回路２３で一定の電流ＩS を吸い込むことにより、ダイオードＤ１は一定の電流ＩS で決まる動作点で動作する。この動作点で決まる電圧降下ＶD2は電流ＩS が一定値に維持されている限りにおいては、図２に示すように一定電圧ＶD2に維持される。更に、ダイオードＤ１には一定電流ＩS に加えて撮像素子１０のオーバーフロー電圧供給端子ＴOFD に流れる電流ＩO が流れ。結局ダイオードＤ１に流れる電流はＩ1 ＝Ｉ0 ＋ＩS となる。一定電流ＩS と電流ＩO とを比較してＩS ＞ＩO の関係に設定することにより、電流ＩO が−ΔＩ1 ，−ΔＩ1 に変動しても、ダイオードＤ１の順方向の電圧降下ＶD2の変動はわずかな変動に抑えることができる。
【００１７】
【発明の効果】
以上説明したように、この発明によればダイオードＤ１を通じて撮像素子１０のオーバーフロー電圧ＶOFD を印加する撮像素子駆動回路において、オーバーフロー電圧供給端子から内部を見たインピーダンスが各撮像素子ごとにバラツキを有していても、ダイオードには定電流回路２３により撮像素子１０に流れる電流ＩO より大きい一定電流ＩS を流した構造としたから、撮像素子１０に流れ込む電流ＩO が多少変動しても、ダイオードＤ１の順方向電圧降下ＶD2の変動を小さい値に抑えることができる。
【００１８】
従って、この発明によればどの撮像素子に対してもほぼ一定の値のオーバーフロー電圧ＶOFD を与えた状態で試験を行うことができ、均一な条件に揃った状態で試験を行うことができる利点が得られる。
なお、上述ではこの発明による撮像素子駆動回路を撮像素子試験装置に適用した場合を説明したが、試験装置に限らず、他の装置にも適用できることは容易に理解することができよう。
【図面の簡単な説明】
【図１】この発明による撮像素子駆動回路の一実施例を説明するための接続図。
【図２】この発明の要部の動作を説明するためのグラフ。
【図３】従来の技術を説明するための接続図。
【図４】図３の動作を説明するための波形図。
【図５】従来の技術の欠点を説明するためのグラフ。
【符号の説明】
１０ 撮像素子
ＶOFD オーバーフロー電圧
ＴOFD オーバーフロー電圧供給端子
２０ 撮像素子駆動回路
２１ 電圧源
２２ ドライバ
２３ 定電流回路
Ｄ１ ダイオード
Ｒ１ 抵抗器[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an image sensor drive circuit that maintains a solid-state image sensor generally called a CCD (Charge Couple Device) in an operating state, and an image sensor test apparatus equipped with the image sensor drive circuit.
[0002]
[Prior art]
FIG. 3 shows a configuration of a conventional image sensor driving circuit. In the figure, reference numeral 10 denotes an image pickup device called a CCD or the like, and 20 denotes a drive circuit for applying an overflow voltage V OFD to the image pickup device 10. The image pickup device 10 is driven by being connected to various drive circuits in addition to the drive circuit 20 for applying the overflow voltage V OFD , but the object of the present invention is the drive circuit 20 for applying the overflow voltage V OFD . Only the drive circuit 20 is shown.
[0003]
Overflow voltage V OFD means that when the amount of light input to image sensor 10 exceeds the specified value (the amount of input light at this time is called the saturated exposure amount), excess charge generated in the photoelectric conversion unit is discharged to the overflow drain. It is a voltage that gives a threshold for By maintaining the overflow voltage V OFD at a constant value, the range of the linear characteristic of the input light-output voltage can be maintained at a constant value.
The overflow voltage V OFD is applied from the voltage source 21 to the overflow supply terminal T OFD of the image sensor 10 through a parallel circuit composed of the diode D1 and the resistor R1.
[0004]
Here, the reason why the diode D1 is used will be described. That is, the shutter pulse P CC are also applied to other overflow voltage V OFD in the overflow voltage supply terminal T OFD. By applying the shutter pulse PCC, the electric charge accumulated in each photoelectric conversion unit is instantaneously released (reset), and the accumulated electric charge is read according to the amount of light input immediately thereafter, thereby capturing the image instantaneously. The purpose is to obtain data. In other words, the shutter mechanism is designed to capture an instantaneous moving object and obtain an image with less streamline blurring.
[0005]
The shutter pulse is applied from the driver 22 to the overflow voltage supply terminal T OFD through the capacitor C. The shutter pulse is given as a positive pulse, the output terminal of the driver 22 outputs the L logic potential PL at the time of non-application, and the peak value of the pulse becomes PH giving the H logic potential at the time of output of the shutter pulse. . Thus, in the non-output time shutter pulse P CC has overflow voltage V OFD constant voltage from the voltage source 21 is applied to the overflow voltage supply terminal T OFD, also the overflow voltage V OFD in application time point of the shutter pulse P CC the amplitude of the shutter pulse P CC is applied is added (see FIG. 4). When the shutter pulse P CC is output, the diode D1 is turned off, the voltage source 21 is disconnected from the load of the driver 22, and the diode D1 is used to apply the shutter pulse P CC to the image sensor 10 with a small amount of power. .
[0006]
[Problems to be solved by the invention]
The impedance (DC resistance value) viewed from the overflow voltage supply terminal T OFD of the image sensor 10 is manufactured to be a constant value regardless of the image sensor 10. However, the impedance seen from the overflow voltage supply terminal T OFD is not uniform and varies between the image pickup devices, although there are slight variations due to manufacturing variations, etc. Therefore, the operation of the image pickup device 10 is tested. Each time the sensor is replaced with a new image sensor, the current flowing through the diode D1 varies, and the overflow voltage V OFD also varies due to the variation in current.
[0007]
That is, when sequentially testing the image sensor 10, when the test of the image sensor is completed, the new image sensor 10 is next mounted on the test apparatus, and the newly mounted image sensor 10 is tested. For this reason, each time the image sensor 10 is replaced, the current I c flowing through the overflow voltage supply terminal T OFD and the diode D1 becomes the resistance value of the image sensor 10 (internal impedance viewed from the overflow voltage supply terminal T OFD ). There is a drawback in that the overflow voltage V OFD also fluctuates.
[0008]
This will be described with reference to FIG. When the current I c flowing through the imaging device 10 to be tested is a current value I O corresponding to an approximately halfway point between the ON state and the OFF state of the diode D1, the curve of the current-voltage characteristic curve of the diode D1 Will work on the part. When operating with this operating current I O , if the current I O fluctuates slightly to + ΔI O , −ΔI O due to variations in the internal resistance of the image sensor 10, the forward voltage drop V D1 of the diode D1 fluctuates greatly. Due to the fluctuation, the overflow voltage V OFD applied to the image sensor 10 also fluctuates greatly.
[0009]
When the overflow voltage V OFD applied to the image sensor 10 to be tested varies for each image sensor, the linear range of the photoelectric conversion characteristic varies for each image sensor, so that the range of the photoelectric conversion characteristic varies for each image sensor. A test is performed, and a disadvantage that a uniform test cannot be performed occurs.
Therefore, conventionally, the internal impedance of the overflow voltage supply terminal T OFD is measured in advance for each image sensor 10 to be tested, and the voltage set in the voltage source 21 is adjusted according to the measured internal impedance, so that the overflow voltage V OFD is It was necessary to manage the coefficient so that it was a constant value.
[0010]
An object of the present invention is to provide an image sensor driving circuit that does not require the internal impedance of the overflow voltage supply terminal T OFD to be measured in advance and that does not require the voltage source 21 to be set and changed according to the measurement result, and the image sensor An object of the present invention is to provide an image sensor testing apparatus equipped with a drive circuit.
[0011]
[Means for Solving the Problems]
According to a first aspect of the present invention, there is provided an imaging element driving circuit having a structure in which an overflow voltage V OFD is applied to an overflow voltage supply terminal of an imaging element through a diode and a resistor to maintain the imaging element in an operating state.
An image sensor driving circuit having a structure in which a constant current circuit is connected between a connection point between a diode and an overflow voltage supply terminal and a common potential point is proposed.
[0012]
According to a second aspect of the present invention, the image pickup element driving circuit according to the first aspect is mounted, and the overflow voltage supplied to the overflow voltage supply terminal maintains a constant value even if the image pickup element under test is sequentially replaced. An image sensor testing apparatus is proposed.
[0013]
[Operation]
According to the configuration of the imaging element driving circuit proposed in claim 1 of the present invention, since the current flowing through the constant current circuit flows through the diode, the diode is always maintained in a state where the forward current flows.
As a result, the forward voltage drop of the diode maintains a constant value even if the internal impedance of the overflow voltage supply terminal of the image sensor serving as a load slightly varies. As a result, the overflow voltage V OFD applied through the diode can maintain a constant value.
[0014]
According to the imaging device testing apparatus proposed in claim 2 of the present invention, the imaging device under test is sequentially replaced, and the overflow voltage V OFD is supplied even if the internal impedance of the overflow voltage supply terminal varies with each replacement. The diode forward voltage drop continues to be maintained at a constant value. As a result, even when the image sensor under test is replaced, the overflow voltage applied to the overflow voltage supply terminal of each image sensor is maintained at a constant value, and there is an advantage that the test can be performed on the specified photoelectric conversion characteristics. It is done.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 shows an embodiment of an image sensor driving circuit according to the present invention. Parts corresponding to those in FIG. 3 are denoted by the same reference numerals. According to the first aspect of the present invention, in the image pickup device driving circuit 20 having a structure in which the overflow voltage V OFD is applied from the voltage source 21 to the overflow voltage supply terminal T OFD of the image pickup device 10 through the diode D1 and the resistor R1, the diode D1 and the overflow voltage are applied. It is characterized in that a constant current circuit 23 is connected between a connection point with the supply terminal T OFD and a common potential point.
[0016]
The constant current circuit 23 performs an operation of sucking a constant current I S from the voltage source 21 through the diode D1. By sucking the constant current I S by the constant current circuit 23, the diode D1 operates at an operating point determined by the constant current I S. As long as the current I S is maintained at a constant value, the voltage drop V D2 determined by this operating point is maintained at the constant voltage V D2 as shown in FIG. Furthermore, in addition to the constant current I S , a current I O flowing through the overflow voltage supply terminal T OFD of the image sensor 10 flows through the diode D1. Eventually, the current flowing through the diode D1 is I 1 = I 0 + I S. By comparing the constant current I S and the current I O and setting the relationship I S > I O , the forward voltage of the diode D1 even if the current I O varies to −ΔI 1 , −ΔI 1. The fluctuation of the drop V D2 can be suppressed to a slight fluctuation.
[0017]
【The invention's effect】
As described above, according to the present invention, in the image sensor driving circuit that applies the overflow voltage V OFD of the image sensor 10 through the diode D1, the impedance viewed from the overflow voltage supply terminal varies for each image sensor. also be, is from was by the constant current circuit 23 a current flow I O is greater than the constant current I S flowing through the imaging device 10 structure to the diode, also slightly vary the current I O flowing into the imaging device 10, The fluctuation of the forward voltage drop V D2 of the diode D1 can be suppressed to a small value.
[0018]
Therefore, according to the present invention, the test can be performed in a state where an almost constant overflow voltage V OFD is applied to any image pickup device, and the test can be performed in a uniform condition. Is obtained.
In the above description, the case where the image sensor driving circuit according to the present invention is applied to the image sensor test apparatus has been described. However, it can be easily understood that the present invention can be applied not only to the test apparatus but also to other apparatuses.
[Brief description of the drawings]
FIG. 1 is a connection diagram for explaining an embodiment of an image sensor driving circuit according to the present invention.
FIG. 2 is a graph for explaining the operation of the main part of the present invention.
FIG. 3 is a connection diagram for explaining a conventional technique.
4 is a waveform diagram for explaining the operation of FIG. 3; FIG.
FIG. 5 is a graph for explaining a defect of a conventional technique.
[Explanation of symbols]
10 Image sensor V OFD overflow voltage T OFD overflow voltage supply terminal 20 Image sensor drive circuit 21 Voltage source 22 Driver 23 Constant current circuit D1 Diode R1 Resistor

Claims (2)

撮像素子のオーバーフロー電圧供給端子にダイオードと抵抗器を通じてオーバーフロー電圧を印加して撮像素子を動作状態に維持する構造の撮像素子駆動回路において、
上記ダイオードと上記オーバーフロー電圧供給端子との接続点と共通電位との間に、上記オーバーフロー電圧供給端子に流れる電流よりも大きい定電流を流す定電流回路を接続した構造としたことを特徴とする撮像素子駆動回路。In an image sensor driving circuit having a structure in which an overflow voltage is applied to the overflow voltage supply terminal of the image sensor through a diode and a resistor to maintain the image sensor in an operating state.
An imaging device characterized in that a constant current circuit for flowing a constant current larger than a current flowing through the overflow voltage supply terminal is connected between a common potential and a connection point between the diode and the overflow voltage supply terminal. Element drive circuit. 請求項１記載の撮像素子駆動回路を搭載し、被試験撮像素子が順次交換されても、上記オーバーフロー電圧供給端子に供給されるオーバーフロー電圧が一定値を維持する構造としたことを特徴とする撮像素子試験装置。  An imaging device comprising the imaging device driving circuit according to claim 1, wherein the overflow voltage supplied to the overflow voltage supply terminal maintains a constant value even when the device under test is sequentially replaced. Element testing equipment.
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