JP4667573B2

JP4667573B2 - Substrate holder and optical component manufacturing method using the substrate holder

Info

Publication number: JP4667573B2
Application number: JP2000288392A
Authority: JP
Inventors: 正渡邊; 健川俣; 延好豊原; 武司出口
Original assignee: Olympus Corp
Current assignee: Olympus Corp
Priority date: 2000-09-22
Filing date: 2000-09-22
Publication date: 2011-04-13
Anticipated expiration: 2020-09-22
Also published as: JP2002097572A

Description

【０００１】
【発明の属する技術分野】
本発明は、光学部品の製造の際に用いられる基板ホルダー及び該基板ホルダーを用いた光学部品の製造方法に関する。
【０００２】
【従来の技術】
従来、レンズ、プリズムのような光学部品は、その表面に光学薄膜を形成する場合が多い。特にレンズは、その透過率を確保するために、レンズの両面に反射防止膜を形成することが多い。
【０００３】
ところで、光学部品の表面に反射防止膜等の光学膜を形成する際には、その高い要求性能を満たすために真空蒸着を代表例とするような、真空雰囲気内での成膜が行われる。前記真空雰囲気を得るには、通常１時間程度以上の真空排気が必要であり、前記真空排気の時間は、光学膜の形成に必要な時間の多くを占めている。
【０００４】
この真空排気のための必要時間は、前記両面に反射防止膜を形成するような光学部品を製造しようとする場合、製造タクトタイムの多くの部分を占めることになる。
【０００５】
前記長い真空排気の時間による時間損失を小さくし、生産の効率を高めるための方法として、たとえば実開平６−７３１５６号公報に開示されている同一バッチ（一度の真空排気）においてその両面の成膜を行うために反転パレットを用いた方法がある。
【０００６】
この方法によれば、成膜装置に両面成膜を行う機構を付加するために装置価格は上昇するが、前記長時間を要する真空排気は一回行うのみで済み、生産効率を確実に上げることができる。
【０００７】
【発明が解決しようとする課題】
しかしながら、実開平６−７３１５６号公報に開示されている反転パレットを用いた方法では、例えば、接合レンズを構成する接合前レンズのような、片面しか成膜の必要ない光学部品においては、前記成膜装置における両面成膜の恩恵を受けることができず、生産性を上げることができないという問題がある。
【０００８】
本発明は、上記問題点を解決するものであり、片面しか成膜の必要がない光学部品の成膜の場合においても、生産性向上に寄与し得る基板ホルダーを提供すること、及び前記基板ホルダーを使用し生産効率の向上を図ることができる光学部品の製造方法を提供することを目的とするものである。
【０００９】
【課題を解決するための手段】
請求項１記載の発明は、円形孔の部分を有し、第一の光学部品の光学機能面に対して成膜領域を決め成膜領域側から前記第一の光学部品を保持する第一の基板保持具と、円形孔の部分を有し、第二の光学部品の光学機能面に対して成膜領域を決め成膜領域側から前記第二の光学部品を保持する第二の基板保持具と、円形孔の部分を有し、前記第一の基板保持具と前記第二の基板保持具の間に介在し、前記第一の光学部品と前記第二の光学部品とを各々成膜領域の反対領域側から保持する第三の基板保持具と、前記第一乃至第三の基板保持具を一体的に保持する押さえ手段と、を有し、前記第一の基板保持具の前記円形孔の部分に設けられた受溝部と、前記第三の基板保持具の前記円形孔の部分に設けられた突条部との間に、前記第一の光学部品を保持可能であり、前記第二の基板保持具の前記円形孔の部分に設けられた受溝部と、前記第三の基板保持具の前記円形孔の部分に設けられた突条部との間に、前記第二の光学部品を保持可能であることを特徴とし、光学部品の光学機能面に成膜装置により光学薄膜を形成する際に、前記光学部品を保持する基板ホルダーである。
【００１０】
請求項１記載の発明について作用を説明する。複数面同時成膜を行うための機構を持たない、通常の成膜装置を使用して、光学部品の複数の面に対して成膜を行う場合には、それぞれの面を成膜するために、成膜基板のセット等の準備工程、真空排気工程、成膜工程、真空を大気圧に戻す工程を繰り返す必要がある。
【００１１】
これに対し、複数面同時成膜を行う機構を持つ成膜装置を使用する場合、前記の工程は、成膜工程を除き繰り返す必要がないため、光学部品の製造タクトタイムを短縮できる。
【００１２】
前記のような複数面同時成膜を行う方法としては、複数の成膜源に複数の成膜面が対向するような装置（たとえば、２個のスパッタリングターゲットを対向位置に設け、その間に成膜基板を配置したスパッタリング装置）を用いる方法や、成膜基板自体を反転させる（たとえば、実開平６−７３１６６号公報に開示されているような反転パレットを使用する）方法がある。
【００１３】
請求項１記載の発明は、第一、第二の基板保持具の間に第三の基板保持具を挟む形で設けることにより、片側からの成膜しか必要ない２つの光学部品を、同一の基板ホルダーに装着することができるようにして、恰も複数の成膜面を持つ光学部品のように扱うことを可能とするものである。
【００１４】
即ち、片側からの成膜しか必要ない光学部品の成膜を、２種類同時に、又は２倍の充填率において行うことができるようになり、これまで、複数面同時成膜の可能な成膜装置を用いてもその複数面同時成膜による生産効率向上の恩恵を受けることのできなかった片側からの成膜しか必要ない光学部品の場合においても、複数面同時成膜による光学部品の場合と同等の生産性向上の効果を得ることができる。
【００１５】
即ち、請求項１記載の発明の基板ホルダーによれば、前記複数の蒸着源に複数の成膜面が対向するような成膜装置においても、また、前記成膜基板自体を反転させる成膜装置においても、各々利用することができ、これにより、光学部品の広範な生産形態において生産性向上の効果を得ることができる。
【００１６】
請求項２記載の発明は、請求項１記載の基板ホルダーにおいて、前記基板ホルダーは、前記成膜装置に設けられた基板反転機構により表裏反転可能に支持可能される表裏反転軸を備えていることを特徴とするものである。
【００１７】
請求項２記載の発明によれば、請求項１記載の発明を、比較的光学部品表面に光学薄膜を形成する際に利用しやすく、実際によく利用されている成膜基板自体を反転させる基板反転機構を持った成膜装置に対して適用するものであり、これにより前記基板ホルダーにより保持した２個の光学部品の各成膜領域に光学薄膜を順に形成する場合において、容易に生産性向上の効果を得ることができる。
【００１８】
請求項３記載の発明は、第一の受溝部を有する第一の基板保持具と、第二の受溝部を有する第二の基板保持具と、前記第一の基板保持具と前記第二の基板保持具の間に配置された第三の基板保持具と、前記第一乃至前記第三の基板保持具を一体的に保持する押さえ手段を有し、第一の開口部は、前記第一の基板保持具の表面側から前記第三の基板保持具に向かって、開口径が徐々に小さくなるように形成され、第一の凹部は前記第一の受溝部を有し、前記第三の基板保持具と対向している前記第一の基板保持具の裏面に、前記第一の開口部の最小開口面よりも広く形成され、第二の開口部は、前記第二の基板保持具の裏面側から前記第三の基板保持具に向かって、開口径が徐々に小さくなるように形成され、第二の凹部は前記第二の受溝部を有し、前記第三の基板保持具と対向している前記第二の基板保持具の表面に、前記第二の開口部の最小開口面よりも広く形成され、前記第一の開口部の最小開口径は、前記第一の基板保持具と第三の基板保持具で保持される光学部品の光学機能面に成形する成膜領域と一致する径であり、前記第二の開口部の最小開口径は、前記第二の基板保持具と第三の基板保持具で保持される光学部品の光学機能面に成形する成膜領域と一致する径であり、前記第三の基板保持具は突条部を有し、前記突条部は第三の開口部と第三の凹部で形成され、前記第三の開口部は、前記第三の基板保持具側の表面から裏面までを貫通して形成され、前記第三の凹部は、前記第三の基板保持具の表面及び裏面に、前記第三の開口部の開口面よりも広く形成されていることを特徴とする。
【００１９】
請求項３記載の発明によれば、請求項１記載の発明と同様、これまで、複数面同時成膜の可能な成膜装置を用いてもその複数面同時成膜による生産効率向上の恩恵を受けることのできなかった片側からの成膜しか必要ない光学部品の場合においても、複数面同時成膜による光学部品の場合と同等の生産性向上の効果を得ることができる基板ホルダーを提供することができる。
請求項４記載の発明は、第一の自由曲面プリズムの成膜領域側から前記第一の自由曲面プリズムを保持し、第一の開口部を有する第一の基板保持具と、第二の自由曲面プリズムの成膜領域側から前記第二の自由曲面プリズムを保持し、第二の開口部を有する第二の基板保持具と、前記第一の基板保持具と前記第二の基板保持具の間に介在し、前記第一の自由曲面プリズムと前記第二の自由曲面プリズムとを各々成膜領域の反対側の一端を各々保持する分離構造であり第三の開口部を有する第三の基板保持具と、前記第一乃至第三の基板保持具を一体的に保持する押さえ手段と、を有し、前記第一の基板保持具は前記第一の開口部の部分に設けられた受溝部と、前記第三の基板保持具の第三の開口部に設けられた突出片との間に、前記第一の自由曲面プリズムを保持可能であり、前記第二の基板保持具の前記第二の開口部の部分に設けられた受溝部と、前記第三の基板保持具の第三の開口部に設けられた突出片との間に、前記第二の自由曲面プリズムを保持可能であることを特徴とする、光学部品の光学機能面に成膜装置により光学薄膜を形成する際に、前記光学部品を保持する基板ホルダーである。
請求項５記載の発明は、請求項１又は２記載の基板ホルダーを用いて、前記第一の光学部品の成膜領域側から前記第一の基板保持具の前記受溝部により、前記第一の光学部品の成膜領域反対側から前記第三の基板保持具の前記突条部により、前記第一の光学部品を挟むことで、前記第一の光学部品を保持するとともに、その光学機能面に対して成膜領域を決める工程と、前記第三の基板保持具の前記突条部上に、前記第二の光学部品をその成膜領域の反対領域を下にして置く工程と、前記第三の基板保持具により支持された前記第二の光学部品の成膜領域側を前記第二の基板保持具の前記受溝部により挟み込み、前記第一乃至第三の基板保持具を一体化する工程と、前記第一乃至第三の基板保持具により保持された前記第一、第二の光学部品の各成膜領域に光学薄膜を同時に又は順に成膜する工程と、
を含み、前記第一の光学部品と、前記第二の光学部品の少なくとも一方は、成膜領域の反対側に凸形状を有していることを特徴とする光学部品の製造方法である。
請求項６記載の発明は、請求項４記載の基板ホルダーを用いて、前記第一の自由曲面プリズムの成膜領域側から前記第一の基板保持具の前記受溝部により、前記第一の自由曲面プリズムの前記成膜領域反対側から前記第三の基板保持具の前記突出片により、前記第一の自由曲面プリズムを挟むことで、前記第一の自由曲面プリズムを保持するとともに、その光学機能面に対して前記成膜領域を決める工程と、前記第三の基板保持具の前記突出片上に、前記第二の自由曲面プリズムをその成膜領域の反対領域を下にして置く工程と、前記第三の基板保持具により支持された第二の自由曲面プリズムの成膜領域を前記第二の基板保持具の前記受溝部により挟み込み、前記第一乃至第三の基板保持具を一体化する工程と、前記第一乃至第三の基板保持具により保持された前記第一、第二の自由曲面プリズムの各成膜領域に光学薄膜を同時に、又は、順に成膜する工程と、を含むことを特徴とする自由曲面プリズムからなる光学部品の製造方法である。
【００２０】
これら各発明において、基板ホルダーとして表裏一つずつの光学部品を保持する場合にも効果はあるが、従来例（実開平６−７３１６６号公報）にあるように、表裏それぞれ多数の基板室を設け、同時に多数の光学部品を保持する場合には、より生産性向上の効果が高くなる。
【００２１】
また、表裏組み合わされる前記第一の光学部品と前記第二の光学部品が同一のものであるか、それらの径が同一のものである場合、接合レンズの場合と同様に充填率を上げ易いという利点が生じ、特に効果が高くなる。
【００２２】
更に加えるならば、成膜に加熱を要して特に光学部品が大きい場合、加熱工程と冷却工程に多くの時間が必要となることから、このような場合に本発明の基板ホルダー及び光学部品の製造方法の適用による効果が高くなる。
【００２３】
具体的には、前記成膜に加熱を要して特に光学部品が大きい場合、前記排気行程中に並行して行う前記加熱工程では成膜対象となる光学部品の温度を２００℃以上の高温に安定させる必要があり、相当の時間を要する。
【００２４】
さらに、成膜工程後、真空を大気圧に戻す工程に移る前に、成膜後の光学部品を一定以下の温度にまで冷却しておかないと、前記真空を大気圧に戻す工程において前記光学部品が急冷されて光学部品に割れが生じる場合があるため、前記冷却時間にも相当の時間を要することから、本発明による光学部品の充填率の向上により高い効果を得ることができる。
【００２５】
また、本発明で用いる第３の基板保持具の役割は、前記第１の光学部品と、第二の光学部品を、それぞれ第一の基板保持具、第二の基板保持具と対になって保持することであるから、これは一体のものに限定されず、必要に応じて、二体以上の分離した形態をなす場合もあり、このような構成でも同様の効果を得ることが可能である。また、本発明で用いる第一乃至第三の基板保持具を一体的に保持する押さえ手段は、クリップのように押さえ具として一つの体をなす場合や、第一乃至第三の基板保持具に一体化され、それらの一部分として設けられる場合もある。前記押さえ手段は、前記どちらの場合においても、第一乃至第三の基板保持具を一体的に保持する機能を持てば、同様の効果を得ることができる。
【００２６】
【発明の実施の形態】
以下に、本発明の実施の形態を詳細に説明する。
【００２７】
（実施の形態１）
（構成）
図１は、本発明の実施の形態１の光学部品に対する表裏面同時成膜を行う連続成膜装置の成膜室１を示す概略断面図であり、図２は基板ホルダー９の平面図、図３は基板ホルダー９における２個の光学部品である凹レンズ１２、１３が保持される基板室１０の部分拡大断面図である。本実施の形態１の連続成膜装置は、上下にスパッタリングターゲット２、３を備えたスパッタリング装置として構成されている。
【００２８】
即ち、前記成膜室１には、室内上方に配置されたスパッタリングターゲット２と、室内下方に配置されたスパッタリングターゲット３とが配置されている。
【００２９】
前記成膜室１には、それぞれ前記スパッタリングターゲット２、３と前記基板ホルダー９との間にの位置にあり、成膜時には前記スパッタリングターゲット２、３と前記基板ホルダー９の間を塞がぬ位置（開位置）に移動し、非成膜時には前記スパッタリングターゲット２、３と前記基板ホルダー９の間を塞ぐ位置（閉位置）に移動するシャッター４、５を配置している。
【００３０】
さらに、前記成膜室１には、図示せぬ前室と前記成膜室１とを区切るゲートバルブ６と、図示せぬ後室と前記成膜室１とを区切るゲートバルブ７とを設けている。
【００３１】
また、前記成膜室１には、前記基板ホルダー９の移動のため、２本のコンベア状の基板ホルダー移動機構８を備えている。
【００３２】
前記基板ホルダー移動機構８は、前記スパッタリングターゲット２、３と、基板ホルダー９の円形孔状の１８個の基板室１０との間を塞がない位置に２本平行に配置されている。
【００３３】
ここで、前記基板ホルダー９は、図２に示す両端部の一対のすべり止め１１によって前記基板ホルダー移動機構８と係合して成膜室１の中を図１に示す矢印ａ方向に移動可能となっている。
【００３４】
前記基板ホルダー９の基板室１０には、光学薄膜の成膜領域を上方に向けた光学部品である第一の凹レンズ１２と、成膜領域を下方に向けた光学部品である第二の凹レンズ１３とが保持される。
【００３５】
前記基板室１０は、図３に示すように、前記第一の凹レンズ１２の成膜領域側から前記第一の凹レンズ１２を保持する第一の基板保持具１４と、前記第二の凹レンズ１３の成膜領域側から前記第二の凹レンズ１３を保持する第二の基板保持具１５と、前記第一の凹レンズ１２と前記第二の凹レンズ１３を成膜領域の反対側から各々保持する第三の基板保持具１６とから形成される。
【００３６】
これら第一乃至第三の基板保持具１４乃至１６は、ネジ１７により一体化される。ネジ１７は、図４に示すように、ネジ頭部１７ａと、ネジ山部１７ｂと、ネジ首部１７ｃとからなり、前記ネジ首都１７ｃは前記ネジ山部１７ｂよりも細くなっている。前記第一、第二の基板保持具１４，１５には、前記ネジ山部１７ｂに合致するネジ穴が設けられ、前記第三の基板保持具１６には、前記ネジ山部１７ｂを容易に貫通できる大ききの穴が設けられている。前記ネジ１７は、前記第二の基板保持具１５に予めワッシャー１８とともに取り付けられている。
【００３７】
即ち、基板ホルダー９は、それぞれ同じ大きさの長方形形状を持つ、前記第一の基板保持具１４と、前記第二の基板保持具１５と、前記第三の基板保持具１６とにより主要な構成をなし、さらに、両端部の配置する一対のすべり止め１１により、前記第一の基板保持具１４と、前記第二の基板保持具１５と、前記第三の基板保持具１６とが一体化されて構成される。
【００３８】
（作用）
以下に本実施の形態１の基板ホルダー９を使用した第一の凹レンズ１２、第二の凹レンズ１３に対する光学薄膜の成膜方法について図５乃至図８をも参照して説明する。
【００３９】
図５に示すように、前記第一の基板保持具１４の基板室１０を形成する円形孔の部分に設けた受溝部１４ａ上に１８個の既に洗浄された凹レンズ１２の成膜領域（成膜面）側を載せ、次に、図５に示すように、この第一の基板保持具１４により保持された１８個の凹レンズ１２の成膜領域側とは反対側から第三の基板保持具１６の基板室１０を形成する１８個の円形孔の部分に設けた円形の突条部１６ａの下面側を載せて１８個の凹レンズ１２を挟み込む。
【００４０】
次に、図７に示すように、第三の基板保持具１６の基板室１０を形成する１８個の円形孔の部分の突条部１６ａの上面側に、１８個の既に洗浄された凹レンズ１３の成膜領域側とは反対側の領域を各々載せる。
【００４１】
次に、図８に示すように、第三の基板保持具１６上の１８個の凹レンズ１３の成膜領域側に、第二の基板保持具１５の基板室１０を形成する円形孔の部分に設けた受溝部１５ａを各々被せて１８個の凹レンズ１３を挟み込む。
【００４２】
この後、ネジ１７を図示しないネジ止め具（ドライバー）により回転、固定することで、第一乃至第三の基板保持具１４、１５、１６の両端部を押さえ込み、一体化する。
【００４３】
次に、１８個ずつの凹レンズ１２、１３を保持した前記基板ホルダー９を、図示せぬ連続成膜装置の排気室にセットし、図示せぬ排気装置により排気を開始する。
【００４４】
その後、排気室の真空度が一定よりも良い値を示したところで、図示せぬ連続成膜装置の第一成膜（処理）室との間に設けられたゲートバルブが開き、前記基板ホルダー９は前記図示せぬ連続成膜装置の図示せぬ第一成膜室に送られる。
【００４５】
ここで、図示せぬ連続成膜装置の前記成膜室１を含む各成膜室は、図示せぬ排気装置によりあらかじめ一定以上の真空度に排気されている。
【００４６】
連続成膜装置の前記成膜室１の前段に置かれた図示せぬ各成膜室においてそれぞれの処理を施された後、前記基板ホルダー９は前記成膜室１へ前記ゲートバルブ６を経て送り込まれる。
【００４７】
前記基板ホルダー９が前記成膜室１に送られた後、図示せぬガス導入機構によりスパッタガスが導入され、成膜室１内は０．４Ｐａの一定圧に保たれる。ここで、前記スパッタリングターゲット２、３に図示せぬ電力供給装置により電力を供給し、前記スパッタリングターゲット２、３の上にプラズマを生成する。
【００４８】
プラズマ生成時点においては、前記シャッター４、５は閉位置にあるが、プラズマが生成されて１０秒後にこれは開位置に移動する。
【００４９】
前記シャッター４、５が開位置にきたら、前記基板ホルダー９は前記基板ホルダー移動機構８により位置９ａから位置９ｂに向かって移動を開始する。
【００５０】
前記凹レンズ１２、１３の各成膜領域には、前記基板ホルダー９の移動に伴って、各々光学薄膜が形成される。
【００５１】
即ち、前記上方に成膜領域を持つ凹レンズ１２への成膜は、前記成膜室１の上方に配置されたスパッタリングターゲット２により行われ、前記下方に成膜領域を持つ凹レンズ１３への成膜は、前記成膜室１の下方に配置されたスパッタリングターゲット３により行われる。
【００５２】
ここで、基板ホルダー９の移動中での成膜により、各凹レンズ１２、１３の膜厚が所定の値になる。
【００５３】
所定の膜厚の光学薄膜の形成が完了すると、図示せぬ電力供給装置による電力の供給が断たれ、プラズマが消滅する。同時に図示せぬガス導入機構によるガスの導入も停止し、前記シャッター４、５も閉位置へ移動する。
【００５４】
次に、前記成膜室１のゲートバルブ７が開き、前記基板ホルダー９は、成膜室１から図示せぬ後室へ搬出される。
【００５５】
このようにして、光学部品として同径の凹レンズ１２、１３への成膜を行うものであるが、上述した基板ホルダー９と同様の構造を有する基板ホルダーを使用し、かつ、同様の製造工程によって、径や形状の異なるレンズや、形状の異なるプリズム等、片面しか成膜の必要ない他の光学部品に対しても、各々成膜が必要な片面ずつの成膜を通常の２倍の充填率をもっ同時に行うことができる。
【００５６】
本実施の形態１における、前記凹レンズ１２を前記第一の基板保持具１４と、前記第三の基板保持具１６とに挟み込む工程の作業順序は、先に前記第一の基板保持具１４を置き、その上に凹レンズ１２、次に前記第三の基板保持具１６を置くとしている。この作業順序は、先に前記第三の基板保持具１６を置き、その上に凹レンズ１２、次に前記第一の基板保持具１４を置くとしても、本実施の形態の効果になんら影響がない。
【００５７】
また、本実施の形態１において、第一乃至第三の基板保持具１４乃至１６を一体的に保持する押さえ具として機能したネジ１７は、予め第一の基板保持具１４に取り付けられ、一体化されていたが、前記ネジ１７が別に用意され、後から取り付けられたとしても本実施の形態１の効果になんら影響がない。
【００５８】
（効果）
本実施の形態１によれば、各々片面しか成膜の必要ない光学部品である凹レンズ１２、１３に対して、前記成膜室１における成膜工程によって通常の２倍の充填率で各々の片面に対して同時に成膜を行うことができ、高い生産性を得ることができる。
【００５９】
（実施の形態２）
（構成）
以下に本発明の実施の形態２の構成を、図９、図１０、図１１を参照して説明する。
【００６０】
図９はバッチ式成膜装置（真空蒸着装置）の成膜室２１を示すものである。また図１０は、略三角形状に形成され前記バッチ式成膜装置の基板反転機構に合致して、前記成膜室２１内で反転が可能な反転パレット（基板ホルダー）２６を示す平面図であり、図１１は前記反転パレット２６の基板室３０を示す拡大断面図である。
【００６１】
また、前記反転パレット２６は、実施の形態１の第一乃至第三の基板保持具１４、１５、１６と同様、受溝部３４ａを有する第一の基板保持具３４、受溝部３５ａを有する第二の基板保持具３５及び突条部３６ａを有する第三の基板保持具３６を備え、これら第一乃至第三の基板保持具３４、３５、３６により３１個の基板室３０を形成している。
【００６２】
そして、図１１に示すように、前記各基板室３０により、成膜後接合され、一つの接合レンズとなる一組ずつの凹レンズ３１、凸レンズ３２を、凹レンズ３１の成膜領域が下側、凸レンズ３２の成膜領域が上側となるようにして挟み込み状態で保持するようになっつている。
【００６３】
即ち、前記反転パレット２６は、基板室３０において、前記凹レンズ３１の成膜領域側からこの凹レンズ３１を保持する第一の基板保持具３４と、前記凸レンズ３２の成膜領域側からこの凸レンズ３２を保持する第二の基板保持具３５と、前記凹レンズ３１と前記凸レンズ３２を成膜領域の反対側から保持する第三の基板保持具３６とを具備している。
【００６４】
前記凹レンズ３１と、前記凸レンズ３２とは、屈折率の異なる光学ガラスを素材としている。
【００６５】
前記成膜室２１は、下方に配置された電子銃型蒸着源２２、下方に配置されたエンドホール型イオンガン２３、上方に配置された前記反転パレット２６が装着され、その中で前記反転パレット２８の反転動作が可能なドーム枠２４、前記電子銃型蒸着源２２に付属しており、成膜時には前記電子銃型蒸着源２２と前記ドーム枠２４に装着された反転パレット２６の間を塞がぬ位置（開位置）、非成膜時には前記電子銃型蒸着源２２と前記ドーム枠２４に装着された反転パレット２６の間を塞ぐ位置（閉位置）とるシャッター２５、及び、反転パレット２６を反転させる図示せぬ基板反転機構を具備している。
【００６６】
前記電子銃型蒸着源２２は、複数の蒸着物質を蒸着するために、図示せぬ材料交換機構を具備している。
【００６７】
前記反転パレット２６は、この反転パレット２６が反転する時にその回転軸となる図９に示す反転軸２７、２８を介して、前記ドーム枠２４に装着される。
【００６８】
（作用）
以下に本実施の形態２における凹レンズ３１、凸レンズ３２への成膜方法について説明する。
【００６９】
実施の形態１の場合と同様にして、前記第一の基板保持具３４と前記第三の基板保持具３６の間に３１個の既に洗浄された凹レンズ３１を挟み込み、更に、第二の基板保持具３５と第三の基板保持具３６の間に３１個の既に洗浄された凸レンズ３２を挟み込み、前記図示せぬ押さえ手段によりこれらを一体化して、反転パレット２６とする。
【００７０】
この反転パレット２６を、前記凹レンズ３１の成膜領域（下面）が電子銃型蒸着源２２に対面する配置で前記成膜室２１の前記ドーム枠２４に装着し、図示せぬ排気装置により排気を開始する。
【００７１】
その後、排気室の真空度が一定よりも良い値を示した後、前記イオンガン２３を動作させて、成膜対象である前記凹レンズ３１に向けて、図示せぬイオンビームを放出する。
【００７２】
更に、前記シャッター５が閉位置にある状態で前記図示せぬ材料交換機構により蒸着材料２２ａの選択が行われた後、前記電子銃型蒸着源２２を動作させて蒸着材料２２ａを加熱する。前記電子銃型蒸着源２２が安定したところで前記シャッター２５を開位置として前記凹レンズ３１に対する蒸着を開始する。
【００７３】
ここで、前記図示せぬイオンビームの働きにより、前記凹レンズ３１の表面に形成される光学薄膜は、十分な光学特性、機械的強度を持った薄膜となる。
【００７４】
前記凹レンズ３１の成膜領域表面に所定の光学薄膜の形成が完了して、前記シャッター５が閉位置をとった後に、前記電子銃型蒸着源２２は一時動作を止めて、図示せぬ材料交換機構により次層の蒸着材料が選択される。
【００７５】
このようなプロセスにより必要な層数の光学薄膜を形成した後、前記イオンガン３の動作を停止させ、図示せぬ基板反転機構により、反転パレット２６を表裏反転する。反転パレット２６の表裏反転により、成膜対象である凸レンズ３２の成膜領域が電子銃型蒸着源２２に向く。
【００７６】
この後、前記と同様のプロセスにより、前記凸レンズ３２の成膜領域にも、所定の光学薄膜を形成する。
【００７７】
本実施の形態２では、光学部品として一つの接合レンズを構成する一組の凹レンズ３１、凸レンズ３２の成膜を行う場合について説明したが、反転パレット２６と同様の構造の基板ホルダー、及び、製造工程によって、径や形状の異なるレンズや、形状の異なるプリズム等、他の片面しか成膜の必要ない光学部品に対しても、本実施の形態２の場合と同様にして成膜が可能である。
【００７８】
また、本実施の形態２では、十分な光学特性、機械的強度を持った薄膜を得るために、エンドホール型のイオンガン２３を利用したが、十分な光学特性、機械的強度を持った薄膜を得るには、この他、イオンガン２３を使用する代わりに加熱を行い基板を予め高い温度に安定させる等して成膜を行っても本実施の形態２の効果に変わりはない。
【００７９】
更に、成膜基板がプラスチックで、イオンガンや加熱、又はそれに代替えする手段を用いずとも所望の特性をもつ薄膜が得られる場合には、同様の成膜装置で、イオンガンや加熱、又はそれに代替する手段を用いずに成膜を行い、本実施の形態２と同様の効果を得ることができる。
【００８０】
（効果）
本実施の形態２によれば、片面しか成膜の必要ない光学部品においても、片面ずつ順次成膜を行う両面成膜装置を使用して、同バッチで通常の２倍の充填率をもって成膜領域が表裏に配置された一対ずつの光学部品に対する成膜を順次に行うことができ、高い生産性を得ることができる。
【００８１】
特に、一つの接合レンズを構成する一組の凹レンズ３１、凸レンズ３２を対象としたことで、その生産数量は同一となることから、接合レンズ生産の編成がし易いという利点と、その径が同一であるため成膜室２１内への充填率が高くなり、より高い効果を得ることができる。
【００８２】
（実施の形態３）
（構成）
本発明の実施の形態３の構成は、蒸着装置が、排気室、成膜室、ベント室の３槽からなる連続式の蒸着装置であること、反転パレット用の反転枠を排気室から成膜室、成膜室からベント室へ移送するための移送機構が具備されていること、成膜室にはイオンガンが無く、これに替わり、排気室、成膜室に反転パレットを加熱するためのヒータが備え付けてあることを除き、上述した実施の形態２の場合と同様である。
【００８３】
前記排気室に備え付けられたヒータは、反転パレットの基板室を上下から効率よく加熱することのできるように、排気室の上下に設けられており、前記成膜室に備え付けられたヒータは、成膜室上方に備え付けられている。また、前記成膜室は、成膜を行うのに必要な真空度となるように予め排気されている。
【００８４】
（作用）
実施の形態２と同様にして第一の光学部品、第二の光学部品を保持した反転パレットを反転枠に装着した状態で前記排気室に投入し、排気を始める。
【００８５】
前記反転枠に装着された反転パレット及びこれに保持される各光学部品は、排気工程中に、前記排気室に設けられたヒータにより、第一の光学部品及び第二の光学部品共に効率よく加熱され、前記排気室が前記成膜室の真空度と同等程度の真空度にまで排気されるまでに、２５０℃程度の温度で安定する。
【００８６】
前記排気室の真空度が、前記成膜室の真空度と同等程度の真空度にまで排気されると、前記移送機構により、反転粋が成膜室に移送される。
【００８７】
反転枠が成膜室に移送された後、第一の光学部品及び第二の光学部品は前記成膜室上方に設けられたヒータにより、加熱が継続され、光学部品の温度は２５０℃程度で安定される。
【００８８】
その後、実施の形態２と同様のプロセスにより、前記第一の光学部品、前記第二の光学部品それぞれの成膜領域に所望の光学薄膜が形成され、光学薄膜の形成が終了したら、さらに前記反転枠は前記移送機構により前記ベント室に移送され、反転パレットの冷却、大気解放がなされ、前記反転枠に装着された前記反転パレット、及び、これに保持される第一の光学部品、第二の光学部品が取り出される。
【００８９】
（効果）
本実施の形態３によれば、片面しか成膜の必要ない光学部品においても、両面成膜装置によって同バッチに通常の２倍の充填率で表裏に配置された一組ずつの光学部品に対する成膜を順次に行うことができ、高い生産性を得ることができる。
【００９０】
特に、光学部品として、一つの接合レンズを構成する一組のレンズを対象とすれば、その生産数量は同一となることから接合レンズの生産の編成がしやすいという利点と、その径が同一であることから成膜室内における充填率が高くなり、より高い効果を得ることができる。
【００９１】
また、成膜前に第一の光学部品、第二の光学部品ともに直接に加熱できる機能を持つ蒸着装置を用いたことで、両方の光学部品が短時間で同程度の温度になるように安定して加熱でき、安定した生産性をえることができる。
【００９２】
（実施の形態４）
（構成）
次に、本発明の実施の形態４について図１２を参照して説明する。
本実施の形態４における基板ホルダー４１は、図１２に示すように、基板室５０において、第一の自由曲面プリズム５２の成膜領域側が外側（図１２において下側）となる状態で受溝部４４ａにて保持する第一の基板保持具４４と、第二の自由曲面プリズム５３の成膜領域側を外側（図１１において上側）となる状態で受溝部４５ａにて保持する第二の基板保持具４５と、第一の基板保持具４４、第二の基板保持具４５の間に介在して第一の自由曲面プリズム５２、第二の自由曲面プリズム５３の各成膜領域とは反対側の一端を各々保持する分離構造の第三の基板保持具４６ａ、４６ｂと、第一の基板保持具４４、第二の基板保持具４５、第三の基板保持具４６ａ、４６ｂを一体化する図示しない押さえ手段とを具備している。
【００９３】
（作用）
本実施の形態４において、各自由曲面プリズム５２、５３を、基板ホルダー４１の基板室５０に取り付る際、最初に第一の基板保持具４４の受溝部４４ａ上に第一の自由曲面プリズム５２の成膜領域側を載せ、一方の第三の基板保持具４６ａに設けた突出片４６ｃにより第一の自由曲面プリズム５２の成膜領域とは反対側の一端を固定保持する。
【００９４】
次に、前記第一の基板保持具４４に第一の自由曲面プリズム５２を固定した場合と同様に、第二の基板保持具４５の受溝部４５ａにより第二の自由曲面プリズム５３を載せ、第三の基板保持具４６ｂに設けた突出片４６ｄにより第二の自由曲面プリズム５３の成膜領域とは反対側の一端を固定保持する。
【００９５】
このようにして第一の基板保持具４４、第二の基板保持具４５上にそれぞれ第一の自由曲面プリズム５２、第二の自由曲面プリズム５３が固定保持された後、図１１に示すように第一の自由曲面プリズム５２、第二の自由曲面プリズム５３の各成膜領域と反対側の領域が対向するようにしてこれらを突き合わせて、図示しない押さえ手段により一体化することで、図１２に示すような基板室５０の構造とするものである。
【００９６】
本実施の形態４における基板室５０の構成は、既述した実施の形態１乃至３のいずれの場合にも適用でき、その場合の作用は光学部品の保持方法を除き、各々実施の形態１乃至３の場合と同様である。
【００９７】
（効果）
本実施の形態４によれば、自由曲面プリズムのような光学部品の場合においても、実施の形態１乃至３に示した場合と同様の効果を得ることができる。また、自由曲面プリズムの固定保持に用いた第三の基板保持具４６ａ、４６ｂが一体をなさず分離した構造でも、同様の効果を得ることができる。
【００９８】
以上説明した本発明によれば、以下の構成を付記することができる。
【００９９】
（付記）接合レンズを構成する接合前の第一のレンズの成膜領域側から第一の基板保持具により、第一のレンズの成膜領域反対側から第三の基板保持具により前記第一のレンズを挟むことでこの第一のレンズを保持するとともにその光学機能面に対して成膜領域を決める工程と、第三の基板保持具上に接合レンズを構成する接合前の第二のレンズを置く工程と、第三の基板保持具により支持された前記第二のレンズの成膜領域側を第二の基板保持具により挟み込み、前記第一乃至第三の基板保持具を一体化する工程と、第一乃至第三の基板保持具により保持された前記両レンズの各成膜領域に光学薄膜を同時に又は順に成膜する工程とを含むことを特徴とする光学部品の製造方法。
【０１００】
この光学部品の製造方法によれば、接合前の各レンズが、最終的に接合され一つの接合レンズとなる一組のレンズである場合、その生産数量は同一となることから生産の編成がし易いという利点と、一般にその径が同一か略同じであるため成膜室内における充填率を上げ易いという利点があり、特に効果が高くなる。
【０１０１】
【発明の効果】
請求項１、３、４記載の発明によれば、複数の蒸着源に複数の成膜面が対向するような成膜装置においても、また、前記成膜基板自体を反転させる成膜装置においても、各々利用することができ、これにより、光学部品の広範な生産形態において生産性向上の効果を得ることができる基板ホルダーを提供することができる。
【０１０２】
請求項２記載の発明によれば、固定保持した２個の光学部品の成膜が必要な各成膜領域に光学薄膜を順に形成する場合において、容易に生産性向上の効果を得ることができる基板ホルダーを提供することができる。
【０１０３】
請求項５、６記載の発明によれば、前記請求項１記載の発明の基板ホルダーを用いて、又は、前記請求項５記載の発明の基板ホルダーを用いて、前記第一、第二の光学部品の各成膜領域に光学薄膜を同時に又は順に成膜するものであり、第一、第二の光学部品を恰も一つの光学部品のような状態で扱い、各成膜領域に対する成膜を行うことができ、これにより、光学部品に対する成膜を行う際の効率向上、さらには生産性向上を図ることができる光学部品の製造方法を提供できる。
【図面の簡単な説明】
【図１】本発明の実施の形態１の連続成膜装置の成膜室を示す概略断面図である。
【図２】本発明の実施の形態１の基板ホルダーの平面図である。
【図３】本発明の実施の形態１の基板ホルダーにおける２個の光学部品である凹レンズ、凸レンズが保持される基板室の部分拡大断面図である。
【図４】本発明の実施の形態１の第一乃至第三の基板保持具及びこれらを一体化するネジの構造を示す部分断面図である。
【図５】本発明の実施の形態１の基板ホルダーにより凹レンズを保持する工程を示す部分拡大断面図である。
【図６】本発明の実施の形態１の基板ホルダーにより凹レンズを挟み込む工程を示す部分拡大断面図である。
【図７】本発明の実施の形態１の基板ホルダーにより凸レンズを保持する工程を示す部分拡大断面図である。
【図８】本発明の実施の形態１の基板ホルダーにより凸レンズを挟み込む工程を示す部分拡大断面図である。
【図９】本発明の実施の形態２の成膜室を示す概略構成図である。
【図１０】本発明の実施の形態２の反転パレットの平面図である。
【図１１】本発明の実施の形態２の反転パレットにより２個の光学部品である凹レンズ、凸レンズが保持される基板室の部分拡大断面図である。
【図１２】本発明の実施の形態４の基板室の部分拡大断面図である。
【符号の説明】
１成膜室
２スパッタリングターゲット
３スパッタリングターゲット
４シャッター
６ゲートバルブ
７ゲートバルブ
８基板ホルダー移動機構
９基板ホルダー
１０基板室
１１すべり止め
１２凹レンズ
１３凹レンズ
１４第一の基板保持具
１５第二の基板保持具
１６第三の基板保持具
１７ネジ
１８ワッシャー
２１成膜室
２２電子銃型蒸着源
２３イオンガン
２４ドーム枠
２５シャッター
２６反転パレット
２７反転軸
３０基板室
３１凹レンズ
３２凸レンズ
３４第一の基板保持具
３５第二の基板保持具
３５第三の基板保持具[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate holder used for manufacturing an optical component and an optical component manufacturing method using the substrate holder.
[0002]
[Prior art]
Conventionally, optical parts such as lenses and prisms often have an optical thin film formed on the surface thereof. In particular, the lens often has an antireflection film formed on both surfaces of the lens in order to ensure the transmittance.
[0003]
By the way, when an optical film such as an antireflection film is formed on the surface of the optical component, film formation is performed in a vacuum atmosphere such that vacuum deposition is a representative example in order to satisfy the high required performance. In order to obtain the vacuum atmosphere, it is usually necessary to perform evacuation for about 1 hour or more, and the evacuation time occupies much of the time necessary for forming the optical film.
[0004]
The time required for this evacuation occupies a large part of the manufacturing tact time when an optical component having an antireflection film formed on both surfaces is to be manufactured.
[0005]
As a method for reducing the time loss due to the long evacuation time and increasing the production efficiency, film formation on both sides of the same batch (one evacuation) disclosed in, for example, Japanese Utility Model Publication No. 6-73156. There is a method using an inverted palette to perform the above.
[0006]
According to this method, the cost of the apparatus increases because a mechanism for performing double-sided film formation is added to the film forming apparatus, but the evacuation that requires a long time only needs to be performed once, and the production efficiency is reliably increased. Can do.
[0007]
[Problems to be solved by the invention]
However, in the method using the reversal palette disclosed in Japanese Utility Model Laid-Open No. 6-73156, for example, in an optical component that requires film formation on only one side, such as a pre-junction lens constituting a cemented lens, There is a problem that the benefits of double-sided film formation in the film apparatus cannot be obtained and productivity cannot be increased.
[0008]
The present invention solves the above problems, and provides a substrate holder that can contribute to productivity improvement even in the case of film formation of an optical component that needs to be formed on only one side, and the substrate holder An object of the present invention is to provide a method of manufacturing an optical component that can improve the production efficiency by using the above.
[0009]
[Means for Solving the Problems]
  The invention described in claim 1Having a circular hole part,A first substrate holder that determines the film formation region relative to the optical functional surface of the first optical component and holds the first optical component from the film formation region side;Having a circular hole part,A second substrate holder for determining the film formation region with respect to the optical functional surface of the second optical component and holding the second optical component from the film formation region side;Having a circular hole part,A third intervening between the first substrate holder and the second substrate holder and holding the first optical component and the second optical component from the opposite side of the film formation region, respectively. A substrate holder and holding means for integrally holding the first to third substrate holders.And between the receiving groove portion provided in the circular hole portion of the first substrate holder and the protruding portion provided in the circular hole portion of the third substrate holder. One optical component can be held, a receiving groove provided in the circular hole portion of the second substrate holder, and a protrusion provided in the circular hole portion of the third substrate holder The second optical component can be held between the optical component and the optical component when the optical thin film is formed on the optical functional surface of the optical component by the film forming apparatus.Board holderIt is.
[0010]
The operation of the invention of claim 1 will be described. When film formation is performed on multiple surfaces of an optical component using a normal film formation apparatus that does not have a mechanism for performing simultaneous film formation on multiple surfaces, It is necessary to repeat a preparation process such as setting of a film formation substrate, a vacuum exhaust process, a film formation process, and a process for returning the vacuum to atmospheric pressure.
[0011]
On the other hand, when a film forming apparatus having a mechanism for simultaneously forming a plurality of surfaces is used, the above process does not need to be repeated except for the film forming process, so that the manufacturing tact time of the optical component can be shortened.
[0012]
As a method for performing simultaneous film formation on a plurality of surfaces as described above, an apparatus in which a plurality of film formation surfaces are opposed to a plurality of film formation sources (for example, two sputtering targets are provided at opposed positions and a film is formed between them. There are a method using a sputtering apparatus in which a substrate is disposed, and a method for inverting the film formation substrate itself (for example, using an inversion pallet as disclosed in Japanese Utility Model Publication No. 6-73166).
[0013]
According to the first aspect of the present invention, two optical components that only require film formation from one side are provided in the same manner by providing a third substrate holder between the first and second substrate holders. It can be mounted on a substrate holder and can be handled like an optical component having a plurality of film-forming surfaces.
[0014]
That is, it is possible to perform film formation of optical components that require film formation only from one side at the same time, or at a filling rate that is twice as high. Even in the case of optical components that only require film deposition from one side, which could not benefit from improved production efficiency due to simultaneous film deposition on multiple surfaces, it is equivalent to the case of optical components by simultaneous film deposition on multiple surfaces The effect of improving productivity can be obtained.
[0015]
That is, according to the substrate holder of the first aspect of the present invention, even in a film forming apparatus in which a plurality of film forming surfaces face the plurality of vapor deposition sources, the film forming apparatus for inverting the film forming substrate itself Can also be used, and thereby the effect of improving productivity can be obtained in a wide range of production forms of optical components.
[0016]
According to a second aspect of the present invention, in the substrate holder according to the first aspect, the substrate holder includes a front / back reversing shaft that can be supported by the substrate reversing mechanism provided in the film forming apparatus so that the front / back can be reversed. It is characterized by.
[0017]
According to the second aspect of the present invention, the substrate according to the first aspect of the present invention can be used when forming the optical thin film on the surface of the optical component relatively, and the substrate that reverses the film formation substrate that is often used in practice. Applicable to a film forming apparatus having a reversing mechanism, thereby improving productivity when forming an optical thin film in order in each film forming region of two optical components held by the substrate holder. The effect of can be obtained.
[0018]
  The invention described in claim 3A first substrate holder having a first receiving groove, a second substrate holder having a second receiving groove, and disposed between the first substrate holder and the second substrate holder; A third substrate holder and pressing means for integrally holding the first to third substrate holders, and the first opening is formed from the surface side of the first substrate holder. The opening is formed so that the opening diameter gradually decreases toward the third substrate holder, and the first recess has the first receiving groove and faces the third substrate holder. The back surface of the first substrate holder is formed wider than the minimum opening surface of the first opening, and the second opening is formed from the back surface side of the second substrate holder to the third substrate. The opening is formed so that the opening diameter gradually decreases toward the holder, the second recess has the second receiving groove, and the third substrate holder is formed. Formed on the surface of the second substrate holder facing the tool wider than the minimum opening surface of the second opening, and the minimum opening diameter of the first opening is the first substrate The diameter coincides with the film forming region formed on the optical functional surface of the optical component held by the holder and the third substrate holder, and the minimum opening diameter of the second opening is the second substrate holding The diameter coincides with the film forming region formed on the optical functional surface of the optical component held by the fixture and the third substrate holder, and the third substrate holder has a protrusion, and the protrusion Is formed of a third opening and a third recess, and the third opening is formed to penetrate from the surface on the third substrate holder side to the back surface, and the third recess is It is formed wider on the front and back surfaces of the third substrate holder than the opening surface of the third opening.It is characterized by that.
[0019]
  According to the invention described in claim 3, as in the invention described in claim 1, even if a film forming apparatus capable of simultaneous film formation on a plurality of surfaces has been used so far, the benefit of improving the production efficiency due to the simultaneous film formation on the plurality of surfaces can be obtained. To provide a substrate holder capable of obtaining the same productivity improvement effect as that of an optical component by simultaneous film formation on a plurality of surfaces even in the case of an optical component that only requires film formation from one side that could not be received Can do.
  Claim 4In the invention described, the first free-form surface prism is held from the film formation region side of the first free-form surface prism, the first substrate holder having the first opening, and the second free-form surface prism A second substrate holder holding the second free-form curved prism from the film formation region side and having a second opening, and interposed between the first substrate holder and the second substrate holder A third substrate holder having a third opening and a separation structure for holding the first free-form surface prism and the second free-form surface prism at one end opposite to the film formation region, respectively. Pressing means for integrally holding the first to third substrate holders, wherein the first substrate holder is provided with a receiving groove provided in a portion of the first opening, The first free curved surface plug is interposed between the protruding piece provided in the third opening of the third substrate holder. A receiving groove portion provided in the second opening portion of the second substrate holder, and a protruding piece provided in the third opening portion of the third substrate holder. The substrate holder for holding the optical component when the optical thin film is formed on the optical functional surface of the optical component by a film forming apparatus, wherein the second free-form curved prism can be held between It is.
  Claim 5According to the invention described in claim 1, using the substrate holder according to claim 1 or 2, the first optical component of the first optical component is formed by the receiving groove portion of the first substrate holder from the film formation region side of the first optical component. The first optical component is sandwiched by the protrusions of the third substrate holder from the opposite side of the film formation region to hold the first optical component and to the optical functional surface. A step of determining a film region, a step of placing the second optical component on the protruding portion of the third substrate holder with the region opposite to the film formation region facing down, and the third substrate holding A step of sandwiching the film formation region side of the second optical component supported by the tool by the receiving groove of the second substrate holder, and integrating the first to third substrate holders; Each film formation of the first and second optical components held by the first to third substrate holders A step of forming an optical thin film simultaneously or sequentially pass,
And at least one of the first optical component and the second optical component has a convex shape on the opposite side of the film formation region.
  Claim 6The described inventionClaim 4Using the substrate holder described above, the receiving groove portion of the first substrate holder from the film formation region side of the first free-form surface prism, and the film formation region of the first free-form surface prism from the opposite side of the film formation region A step of holding the first free-form curved prism by sandwiching the first free-form curved prism by the protruding piece of the third substrate holder, and determining the film formation region with respect to the optical function surface And a step of placing the second free-form curved prism on the protruding piece of the third substrate holder with the region opposite to the film formation region facing down, and a second supported by the third substrate holder A step of sandwiching the film-forming region of the second free-form curved prism by the receiving groove of the second substrate holder, and integrating the first to third substrate holders; and the first to third substrate holders Said first held by a tool, Second optical thin film on each deposition region of the free-form surface prisms simultaneously, or a method of manufacturing an optical component made of a free curved surface prism, characterized in that in order includes a step of forming, the.
[0020]
In each of these inventions, there is an effect when holding optical components one by one as a substrate holder, but as in the conventional example (Japanese Utility Model Publication No. 6-73166), a large number of substrate chambers are provided for each front and back. When a large number of optical components are held at the same time, the effect of improving productivity is further increased.
[0021]
Also, if the first optical component and the second optical component that are combined front and back are the same, or if their diameters are the same, it is easy to increase the filling rate as in the case of a cemented lens. Advantages arise and are particularly effective.
[0022]
In addition, if heating is required for film formation and the optical component is particularly large, a lot of time is required for the heating process and the cooling process. In such a case, the substrate holder and the optical component of the present invention are used. The effect by application of a manufacturing method becomes high.
[0023]
Specifically, when heating is required for the film formation and the optical component is particularly large, the temperature of the optical component to be formed is set to a high temperature of 200 ° C. or higher in the heating step performed in parallel during the exhaust stroke. It needs to stabilize and takes a considerable amount of time.
[0024]
Further, after the film formation step, before the process of returning the vacuum to the atmospheric pressure, the optical component after the film formation must be cooled to a temperature below a certain level, the optical in the step of returning the vacuum to the atmospheric pressure. Since the optical component may be cracked due to rapid cooling of the component, the cooling time also requires a considerable amount of time. Therefore, a high effect can be obtained by improving the filling rate of the optical component according to the present invention.
[0025]
Further, the third substrate holder used in the present invention is configured such that the first optical component and the second optical component are paired with the first substrate holder and the second substrate holder, respectively. Since it is to hold, this is not limited to one, and if necessary, it may take two or more separate forms, and even with such a configuration, the same effect can be obtained. . In addition, the pressing means for integrally holding the first to third substrate holders used in the present invention is a case where a single body is formed as a pressing member like a clip, or the first to third substrate holders. They may be integrated and provided as part of them. In either case, the pressing means can obtain the same effect as long as it has a function of holding the first to third substrate holders integrally.
[0026]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail.
[0027]
(Embodiment 1)
(Constitution)
FIG. 1 is a schematic cross-sectional view showing a film forming chamber 1 of a continuous film forming apparatus that performs simultaneous film formation on the front and back surfaces of the optical component according to Embodiment 1 of the present invention. FIG. 3 is a partially enlarged sectional view of the substrate chamber 10 in which the concave lenses 12 and 13 which are two optical components in the substrate holder 9 are held. The continuous film forming apparatus of the first embodiment is configured as a sputtering apparatus provided with sputtering targets 2 and 3 above and below.
[0028]
That is, in the film forming chamber 1, a sputtering target 2 disposed above the room and a sputtering target 3 disposed below the room are disposed.
[0029]
The film formation chamber 1 is located between the sputtering targets 2 and 3 and the substrate holder 9, respectively, and does not block between the sputtering targets 2 and 3 and the substrate holder 9 during film formation. The shutters 4 and 5 move to the (open position) and move to a position (closed position) that closes the space between the sputtering targets 2 and 3 and the substrate holder 9 when the film is not formed.
[0030]
Further, the film formation chamber 1 is provided with a gate valve 6 for separating the front chamber (not shown) and the film formation chamber 1 and a gate valve 7 for separating the rear chamber (not shown) and the film formation chamber 1. Yes.
[0031]
Further, the film forming chamber 1 is provided with two conveyor-like substrate holder moving mechanisms 8 for moving the substrate holder 9.
[0032]
Two substrate holder moving mechanisms 8 are arranged in parallel at positions that do not block between the sputtering targets 2 and 3 and the 18 circular hole-shaped substrate chambers 10 of the substrate holder 9.
[0033]
Here, the substrate holder 9 can be moved in the film forming chamber 1 in the direction of arrow a shown in FIG. 1 by engaging with the substrate holder moving mechanism 8 by a pair of anti-slip 11 at both ends shown in FIG. It has become.
[0034]
In the substrate chamber 10 of the substrate holder 9, a first concave lens 12 which is an optical component with the film formation region of the optical thin film facing upward, and a second concave lens 13 which is an optical component with the film formation region facing downward. And are held.
[0035]
As shown in FIG. 3, the substrate chamber 10 includes a first substrate holder 14 that holds the first concave lens 12 from the film formation region side of the first concave lens 12, and a second concave lens 13. A second substrate holder 15 that holds the second concave lens 13 from the film formation region side, and a third substrate holder that holds the first concave lens 12 and the second concave lens 13 from the opposite side of the film formation region, respectively. The substrate holder 16 is formed.
[0036]
The first to third substrate holders 14 to 16 are integrated by screws 17. As shown in FIG. 4, the screw 17 includes a screw head portion 17a, a screw thread portion 17b, and a screw neck portion 17c. The screw capital 17c is thinner than the screw thread portion 17b. The first and second substrate holders 14 and 15 are provided with screw holes that match the screw thread portions 17b, and the third substrate holder 16 can easily penetrate the screw thread portions 17b. A large hole is provided. The screw 17 is attached to the second substrate holder 15 together with a washer 18 in advance.
[0037]
That is, the substrate holder 9 is mainly composed of the first substrate holder 14, the second substrate holder 15, and the third substrate holder 16 each having the same rectangular shape. Furthermore, the first substrate holder 14, the second substrate holder 15, and the third substrate holder 16 are integrated by a pair of slip stoppers 11 arranged at both ends. Configured.
[0038]
(Function)
Hereinafter, a method for forming an optical thin film on the first concave lens 12 and the second concave lens 13 using the substrate holder 9 of the first embodiment will be described with reference to FIGS.
[0039]
As shown in FIG. 5, film formation regions (film formations) of 18 already washed concave lenses 12 on the receiving groove portions 14 a provided in the circular holes forming the substrate chamber 10 of the first substrate holder 14. Next, as shown in FIG. 5, the third substrate holder 16 is arranged from the side opposite to the film formation region side of the 18 concave lenses 12 held by the first substrate holder 14. The 18 concave lenses 12 are sandwiched by placing the lower surface side of the circular ridges 16a provided in the 18 circular holes forming the substrate chamber 10.
[0040]
Next, as shown in FIG. 7, 18 already cleaned concave lenses 13 are formed on the upper surface side of the protrusion 16 a of the 18 circular holes forming the substrate chamber 10 of the third substrate holder 16. Each of the regions opposite to the film formation region side is placed.
[0041]
Next, as shown in FIG. 8, on the side of the film formation region of the 18 concave lenses 13 on the third substrate holder 16, in the circular hole portion forming the substrate chamber 10 of the second substrate holder 15. Eighteen concave lenses 13 are sandwiched by covering the provided receiving groove portions 15a.
[0042]
Thereafter, the screws 17 are rotated and fixed by a screw stopper (driver) (not shown), thereby pressing both ends of the first to third substrate holders 14, 15, and 16 so as to be integrated.
[0043]
Next, the substrate holder 9 holding the 18 concave lenses 12 and 13 is set in an exhaust chamber of a continuous film forming apparatus (not shown), and evacuation is started by an exhaust apparatus (not shown).
[0044]
Thereafter, when the degree of vacuum in the exhaust chamber shows a value better than a certain value, a gate valve provided between the first film forming (processing) chamber of a continuous film forming apparatus (not shown) is opened, and the substrate holder 9 Is sent to a first film forming chamber (not shown) of the continuous film forming device (not shown).
[0045]
Here, each film forming chamber including the film forming chamber 1 of the continuous film forming apparatus (not shown) is evacuated to a certain degree of vacuum in advance by an exhaust apparatus (not shown).
[0046]
After the respective processing is performed in each film forming chamber (not shown) placed in front of the film forming chamber 1 of the continuous film forming apparatus, the substrate holder 9 passes through the gate valve 6 to the film forming chamber 1. It is sent.
[0047]
After the substrate holder 9 is sent to the film formation chamber 1, a sputtering gas is introduced by a gas introduction mechanism (not shown), and the inside of the film formation chamber 1 is maintained at a constant pressure of 0.4 Pa. Here, power is supplied to the sputtering targets 2 and 3 by a power supply device (not shown), and plasma is generated on the sputtering targets 2 and 3.
[0048]
At the time of plasma generation, the shutters 4 and 5 are in the closed position, but 10 seconds after the plasma is generated, they move to the open position.
[0049]
When the shutters 4 and 5 are in the open position, the substrate holder 9 starts to move from the position 9a to the position 9b by the substrate holder moving mechanism 8.
[0050]
An optical thin film is formed in each film formation region of the concave lenses 12 and 13 as the substrate holder 9 moves.
[0051]
That is, the film formation on the concave lens 12 having the film formation region above is performed by the sputtering target 2 disposed above the film formation chamber 1, and the film formation on the concave lens 13 having the film formation region below is formed. Is performed by a sputtering target 3 disposed below the film forming chamber 1.
[0052]
Here, the film thickness of each concave lens 12 and 13 becomes a predetermined value by the film formation while the substrate holder 9 is moving.
[0053]
When the formation of the optical thin film having a predetermined thickness is completed, the power supply by a power supply device (not shown) is cut off, and the plasma disappears. At the same time, gas introduction by a gas introduction mechanism (not shown) is stopped, and the shutters 4 and 5 are also moved to the closed position.
[0054]
Next, the gate valve 7 of the film forming chamber 1 is opened, and the substrate holder 9 is unloaded from the film forming chamber 1 to a rear chamber (not shown).
[0055]
In this way, film formation is performed on the concave lenses 12 and 13 having the same diameter as the optical component. The substrate holder having the same structure as the above-described substrate holder 9 is used, and the manufacturing process is the same. For other optical components that only need to be deposited on one side, such as lenses with different diameters and shapes, prisms with different shapes, etc., one-sided deposition that requires deposition is twice the normal filling rate. Can be done at the same time.
[0056]
In the first embodiment, the work order of the step of sandwiching the concave lens 12 between the first substrate holder 14 and the third substrate holder 16 is the first substrate holder 14 placed first. The concave lens 12 and then the third substrate holder 16 are placed thereon. In this work sequence, even if the third substrate holder 16 is placed first, and the concave lens 12 and then the first substrate holder 14 are placed thereon, there is no influence on the effect of the present embodiment. .
[0057]
In the first embodiment, the screw 17 functioning as a pressing member for integrally holding the first to third substrate holders 14 to 16 is attached to the first substrate holder 14 in advance and integrated. However, even if the screw 17 is prepared separately and attached later, the effect of the first embodiment is not affected at all.
[0058]
(effect)
According to the first embodiment, with respect to the concave lenses 12 and 13 which are optical components that need to be formed on only one side, each side has a filling rate twice as high as that in the film forming process in the film forming chamber 1. Can be simultaneously formed, and high productivity can be obtained.
[0059]
(Embodiment 2)
(Constitution)
Hereinafter, the configuration of the second embodiment of the present invention will be described with reference to FIG. 9, FIG. 10, and FIG.
[0060]
FIG. 9 shows a film forming chamber 21 of a batch type film forming apparatus (vacuum deposition apparatus). FIG. 10 is a plan view showing a reversing pallet (substrate holder) 26 which is formed in a substantially triangular shape and matches the substrate reversing mechanism of the batch type film forming apparatus and can be reversed in the film forming chamber 21. FIG. 11 is an enlarged cross-sectional view showing the substrate chamber 30 of the reversing pallet 26.
[0061]
The reversing pallet 26 is similar to the first to third substrate holders 14, 15, and 16 of the first embodiment, and includes a first substrate holder 34 having a receiving groove 34 a and a second groove 35 a. The substrate holder 35 and the third substrate holder 36 having the protruding portion 36a are provided, and 31 substrate chambers 30 are formed by the first to third substrate holders 34, 35 and 36.
[0062]
Then, as shown in FIG. 11, a set of concave lens 31 and convex lens 32 that are bonded after film formation by each of the substrate chambers 30 to form one cemented lens, and the film formation region of the concave lens 31 is on the lower side. The film forming region 32 is held in the sandwiched state with the upper side being the upper side.
[0063]
That is, the reversal palette 26 includes a first substrate holder 34 that holds the concave lens 31 from the film formation region side of the concave lens 31 and a convex lens 32 from the film formation region side of the convex lens 32 in the substrate chamber 30. A second substrate holder 35 for holding, and a third substrate holder 36 for holding the concave lens 31 and the convex lens 32 from the opposite side of the film forming region are provided.
[0064]
The concave lens 31 and the convex lens 32 are made of optical glass having different refractive indexes.
[0065]
The film forming chamber 21 is equipped with an electron gun type vapor deposition source 22 disposed below, an end hole type ion gun 23 disposed below, and a reversing palette 26 disposed above. Is attached to the electron gun type vapor deposition source 22 and the gap between the electron gun type vapor deposition source 22 and the reverse pallet 26 mounted on the dome frame 24 is closed. The shutter 25 and the reversing pallet 26 are reversed to close the position between the electron gun type vapor deposition source 22 and the reversing pallet 26 attached to the dome frame 24 (closed position). A substrate reversing mechanism (not shown) is provided.
[0066]
The electron gun-type deposition source 22 includes a material exchange mechanism (not shown) for depositing a plurality of deposition materials.
[0067]
The reversing pallet 26 is mounted on the dome frame 24 via reversing shafts 27 and 28 shown in FIG.
[0068]
(Function)
The film forming method on the concave lens 31 and the convex lens 32 in the second embodiment will be described below.
[0069]
In the same manner as in the first embodiment, 31 already cleaned concave lenses 31 are sandwiched between the first substrate holder 34 and the third substrate holder 36, and further the second substrate holder is held. Thirty-one already cleaned convex lenses 32 are sandwiched between the tool 35 and the third substrate holder 36, and these are integrated by the pressing means (not shown) to form the reversing pallet 26.
[0070]
The inversion pallet 26 is mounted on the dome frame 24 of the film formation chamber 21 so that the film formation region (lower surface) of the concave lens 31 faces the electron gun type vapor deposition source 22 and exhausted by an exhaust device (not shown). Start.
[0071]
Thereafter, after the degree of vacuum in the exhaust chamber shows a value better than a certain value, the ion gun 23 is operated to emit an ion beam (not shown) toward the concave lens 31 that is a film formation target.
[0072]
Furthermore, after the vapor deposition material 22a is selected by the material exchange mechanism (not shown) with the shutter 5 in the closed position, the electron gun type vapor deposition source 22 is operated to heat the vapor deposition material 22a. When the electron gun type deposition source 22 is stabilized, the deposition on the concave lens 31 is started with the shutter 25 in the open position.
[0073]
Here, the optical thin film formed on the surface of the concave lens 31 is a thin film having sufficient optical characteristics and mechanical strength by the action of the ion beam (not shown).
[0074]
After the formation of a predetermined optical thin film on the surface of the film formation region of the concave lens 31 is completed and the shutter 5 is in the closed position, the electron gun-type deposition source 22 stops operating temporarily, and material exchange (not shown) is performed. The next layer deposition material is selected by the mechanism.
[0075]
After forming the required number of optical thin films by such a process, the operation of the ion gun 3 is stopped, and the reversing pallet 26 is reversed by a substrate reversing mechanism (not shown). By reversing the front and back of the reversing pallet 26, the film formation region of the convex lens 32 that is the film formation target faces the electron gun type evaporation source 22.
[0076]
Thereafter, a predetermined optical thin film is formed also in the film forming region of the convex lens 32 by the same process as described above.
[0077]
In the second embodiment, the case where a pair of concave lens 31 and convex lens 32 constituting one cemented lens is formed as an optical component has been described. However, a substrate holder having the same structure as that of the reversing pallet 26 is manufactured. Depending on the process, it is possible to form a film in the same manner as in the case of the second embodiment even for optical components that need to be formed on only one side, such as lenses having different diameters and shapes and prisms having different shapes. .
[0078]
In the second embodiment, the end-hole type ion gun 23 is used to obtain a thin film having sufficient optical characteristics and mechanical strength. However, a thin film having sufficient optical characteristics and mechanical strength is used. In order to obtain this, in addition to the use of the ion gun 23, the effect of the second embodiment is not changed even if the film is formed by heating and stabilizing the substrate at a high temperature in advance.
[0079]
Furthermore, if the film formation substrate is plastic and a thin film having the desired characteristics can be obtained without using an ion gun, heating, or alternative means, the same film forming apparatus can be used to replace the ion gun, heating, or the like. Film formation can be performed without using any means, and the same effect as in the second embodiment can be obtained.
[0080]
(effect)
According to the second embodiment, even in an optical component that needs to be formed on only one side, a double-sided film forming apparatus that sequentially forms films on each side is used to form a film with a filling rate twice that of a normal batch. Films can be sequentially formed on a pair of optical components whose regions are arranged on the front and back sides, and high productivity can be obtained.
[0081]
In particular, since the production quantity is the same by targeting a set of concave lens 31 and convex lens 32 constituting one cemented lens, the advantage is that the knitting of the cemented lens production is easy and the diameter is the same. Therefore, the filling rate into the film forming chamber 21 is increased, and a higher effect can be obtained.
[0082]
(Embodiment 3)
(Constitution)
The configuration of Embodiment 3 of the present invention is that the vapor deposition apparatus is a continuous vapor deposition apparatus composed of three tanks of an exhaust chamber, a film formation chamber, and a vent chamber, and a reversal frame for a reverse pallet is formed from the exhaust chamber. Chamber, the transfer mechanism for transferring from the film forming chamber to the vent chamber, the film forming chamber has no ion gun, and instead, the heater for heating the reversing pallet to the exhaust chamber and the film forming chamber Is the same as in the case of the second embodiment described above.
[0083]
The heater provided in the exhaust chamber is provided above and below the exhaust chamber so that the substrate chamber of the reversal pallet can be efficiently heated from above and below. It is provided above the membrane chamber. In addition, the film formation chamber is evacuated in advance so as to obtain a degree of vacuum necessary for film formation.
[0084]
(Function)
In the same manner as in the second embodiment, the reverse pallet holding the first optical component and the second optical component is put into the exhaust chamber in a state where the reverse pallet is mounted on the reverse frame, and exhaust is started.
[0085]
The reversing pallet mounted on the reversing frame and the optical components held by the reversing frame are both efficiently heated by the heater provided in the exhaust chamber during the exhaust process. The evacuation chamber is stabilized at a temperature of about 250 ° C. until the evacuation chamber is evacuated to a degree of vacuum equivalent to that of the film formation chamber.
[0086]
When the degree of vacuum in the exhaust chamber is evacuated to a degree of vacuum equivalent to the degree of vacuum in the film formation chamber, the reverse mechanism is transferred to the film formation chamber by the transfer mechanism.
[0087]
After the reversal frame is transferred to the film forming chamber, the first optical component and the second optical component are continuously heated by the heater provided above the film forming chamber, and the temperature of the optical component is about 250 ° C. It is stabilized.
[0088]
Thereafter, a desired optical thin film is formed in the film formation region of each of the first optical component and the second optical component by the same process as in the second embodiment, and when the formation of the optical thin film is completed, the inversion is further performed. The frame is transferred to the vent chamber by the transfer mechanism, the reversing pallet is cooled and released to the atmosphere, the reversing pallet mounted on the reversing frame, and the first optical component held on the reversing pallet, the second The optical component is removed.
[0089]
(effect)
According to the third embodiment, even for an optical component that needs to be formed on only one side, a double-sided film forming apparatus forms a set of optical components arranged on the front and back in the same batch at twice the normal filling rate. Membranes can be sequentially formed, and high productivity can be obtained.
[0090]
In particular, if a set of lenses constituting one cemented lens is used as an optical component, the production quantity is the same, so the advantage is that it is easy to organize the production of the cemented lens, and the diameter is the same. For this reason, the filling rate in the film forming chamber is increased, and a higher effect can be obtained.
[0091]
In addition, by using a vapor deposition system that has the function of heating both the first and second optical components directly before film formation, both optical components can be stabilized at the same temperature in a short time. Can be heated and stable productivity can be obtained.
[0092]
(Embodiment 4)
(Constitution)
Next, a fourth embodiment of the present invention will be described with reference to FIG.
As shown in FIG. 12, the substrate holder 41 according to the fourth embodiment has a receiving groove 44a in the substrate chamber 50 in a state where the film formation region side of the first free-form curved prism 52 is on the outer side (lower side in FIG. 12). And the second substrate holder 44 held by the receiving groove 45a in a state where the film formation region side of the second free-form curved prism 53 is outside (upper side in FIG. 11). 45, one end of the first free-form surface prism 52 and the second free-form surface prism 53 on the opposite side of each film-forming region interposed between the first substrate holder 44 and the second substrate holder 45. 3rd substrate holders 46a and 46b having a separate structure for holding the first substrate holder 44, the second substrate holder 45, and the third substrate holders 46a and 46b. Means.
[0093]
(Function)
In the fourth embodiment, when the free-form surface prisms 52 and 53 are attached to the substrate chamber 50 of the substrate holder 41, the first free-form surface prism is first placed on the receiving groove 44a of the first substrate holder 44. The film formation region side of 52 is placed, and one end of the first free-form curved prism 52 opposite to the film formation region is fixedly held by a protruding piece 46c provided on one third substrate holder 46a.
[0094]
Next, as in the case where the first free-form curved prism 52 is fixed to the first substrate holder 44, the second free-form curved prism 53 is placed by the receiving groove 45a of the second substrate holder 45, One end of the second free-form curved prism 53 opposite to the film formation region is fixedly held by a protruding piece 46d provided on the third substrate holder 46b.
[0095]
After the first free-form surface prism 52 and the second free-form surface prism 53 are fixedly held on the first substrate holder 44 and the second substrate holder 45, respectively, as shown in FIG. The first free-form surface prism 52 and the second free-form surface prism 53 are opposed to each other so that the regions opposite to the film formation regions face each other, and are integrated by pressing means (not shown), so that FIG. The structure of the substrate chamber 50 is as shown.
[0096]
The configuration of the substrate chamber 50 according to the fourth embodiment can be applied to any of the first to third embodiments described above, and the operation in this case is the same as that of the first to third embodiments except for the method of holding the optical component. This is the same as the case of 3.
[0097]
(effect)
According to the fourth embodiment, even in the case of an optical component such as a free-form curved prism, the same effects as those shown in the first to third embodiments can be obtained. Further, the same effect can be obtained even in a structure in which the third substrate holders 46a and 46b used for fixing and holding the free-form surface prism are separated without being integrated.
[0098]
According to the present invention described above, the following configurations can be added.
[0099]
(Supplementary note) The first substrate holder from the film formation region side of the first lens before the cemented lens constituting the cemented lens and the third substrate holder from the opposite side of the first lens film formation region to the first lens Holding the first lens by sandwiching the first lens and determining the film forming area with respect to the optical function surface, and the second lens before bonding constituting the bonded lens on the third substrate holder And the step of sandwiching the film formation region side of the second lens supported by the third substrate holder with the second substrate holder and integrating the first to third substrate holders And a method of forming an optical thin film simultaneously or sequentially on the film forming regions of the two lenses held by the first to third substrate holders.
[0100]
According to this method of manufacturing an optical component, when each lens before being joined is a set of lenses that are finally joined to become one joined lens, the production quantity is the same, so the production is organized. The advantage is that it is easy and the diameter is generally the same or substantially the same, so that there is an advantage that it is easy to increase the filling rate in the film forming chamber, and the effect is particularly high.
[0101]
【The invention's effect】
  Claims 1, 3, 4According to the described invention, the present invention can be used both in a film forming apparatus in which a plurality of film forming surfaces face a plurality of vapor deposition sources, and in a film forming apparatus that inverts the film forming substrate itself. Thus, it is possible to provide a substrate holder capable of obtaining the effect of improving productivity in a wide range of production forms of optical components.
[0102]
According to the second aspect of the present invention, in the case where the optical thin film is sequentially formed in each film formation region where the film formation of the two optical components fixedly held is required, the effect of improving the productivity can be easily obtained. A substrate holder can be provided.
[0103]
  Claims 5 and 6According to the invention described above, each film formation of the first and second optical components is performed using the substrate holder according to the invention according to the first aspect or using the substrate holder according to the invention according to the fifth aspect. An optical thin film is formed on a region simultaneously or sequentially, and the first and second optical components can be handled as if they were one optical component, and film formation can be performed on each film formation region. Thus, it is possible to provide a method for manufacturing an optical component capable of improving efficiency when forming a film on the optical component and further improving productivity.
[Brief description of the drawings]
FIG. 1 is a schematic sectional view showing a film forming chamber of a continuous film forming apparatus according to a first embodiment of the present invention.
FIG. 2 is a plan view of a substrate holder according to the first embodiment of the present invention.
FIG. 3 is a partial enlarged cross-sectional view of a substrate chamber in which a concave lens and a convex lens, which are two optical components, in the substrate holder according to the first embodiment of the present invention are held.
4 is a partial cross-sectional view showing the structure of first to third substrate holders according to Embodiment 1 of the present invention and a screw for integrating them. FIG.
FIG. 5 is a partially enlarged cross-sectional view showing a step of holding the concave lens by the substrate holder according to the first embodiment of the present invention.
FIG. 6 is a partially enlarged cross-sectional view showing a step of sandwiching the concave lens by the substrate holder according to the first embodiment of the present invention.
FIG. 7 is a partially enlarged cross-sectional view showing a process of holding the convex lens by the substrate holder according to the first embodiment of the present invention.
FIG. 8 is a partially enlarged cross-sectional view showing a step of sandwiching a convex lens by the substrate holder according to the first embodiment of the present invention.
FIG. 9 is a schematic configuration diagram showing a film forming chamber according to a second embodiment of the present invention.
FIG. 10 is a plan view of an inversion pallet according to Embodiment 2 of the present invention.
FIG. 11 is a partial enlarged cross-sectional view of a substrate chamber in which a concave lens and a convex lens, which are two optical components, are held by an inversion palette according to Embodiment 2 of the present invention.
FIG. 12 is a partial enlarged cross-sectional view of a substrate chamber according to Embodiment 4 of the present invention.
[Explanation of symbols]
1 Deposition chamber
2 Sputtering target
3 Sputtering target
4 Shutter
6 Gate valve
7 Gate valve
8 Substrate holder moving mechanism
9 Substrate holder
10 Substrate room
11 Anti-slip
12 Concave lens
13 Concave lens
14 First substrate holder
15 Second substrate holder
16 Third substrate holder
17 Screw
18 Washer
21 Deposition chamber
22 Electron gun type evaporation source
23 Ion Gun
24 Dome frame
25 Shutter
26 Reverse palette
27 Reverse axis
30 Substrate room
31 concave lens
32 Convex lens
34 First substrate holder
35 Second substrate holder
35 Third substrate holder

Claims

A first substrate holder having a circular hole portion, determining a film formation region with respect to the optical functional surface of the first optical component, and holding the first optical component from the film formation region side;
A second substrate holder having a circular hole portion, determining a film formation region with respect to the optical functional surface of the second optical component, and holding the second optical component from the film formation region side;
A circular hole portion is interposed between the first substrate holder and the second substrate holder, and the first optical component and the second optical component are respectively opposite to the film formation regions. A third substrate holder that holds from the region side;
Holding means for integrally holding the first to third substrate holders;
Have
Between the receiving groove provided in the circular hole portion of the first substrate holder and the protrusion provided in the circular hole portion of the third substrate holder, the first Can hold optical components,
Between the receiving groove provided in the circular hole portion of the second substrate holder and the protrusion provided in the circular hole portion of the third substrate holder, the second It is possible to hold optical components,
A substrate holder for holding the optical component when an optical thin film is formed on the optical functional surface of the optical component by a film forming apparatus.

The substrate holder according to claim 1, wherein the substrate holder includes a front / back reversing shaft that can be supported by a substrate reversing mechanism provided in the film forming apparatus so that the front / back can be reversed.

A first substrate holder having a first receiving groove portion;
A second substrate holder having a second receiving groove portion;
A third substrate holder disposed between the first substrate holder and the second substrate holder;
Holding means for integrally holding the first to third substrate holders;
The first opening is formed such that the opening diameter gradually decreases from the surface side of the first substrate holder toward the third substrate holder.
The first recess has the first receiving groove, and is located on the back surface of the first substrate holder facing the third substrate holder more than the minimum opening surface of the first opening. Widely formed,
The second opening is formed so that the opening diameter gradually decreases from the back side of the second substrate holder toward the third substrate holder,
The second recess has the second receiving groove, and is on the surface of the second substrate holder facing the third substrate holder more than the minimum opening surface of the second opening. Widely formed,
The minimum opening diameter of the first opening is a diameter that coincides with a film formation region formed on the optical function surface of the optical component held by the first substrate holder and the third substrate holder,
The minimum opening diameter of the second opening is a diameter that coincides with a film formation region formed on the optical function surface of the optical component held by the second substrate holder and the third substrate holder,
The third substrate holder has a protrusion,
The protrusion is formed by a third opening and a third recess,
The third opening is formed to penetrate from the surface on the third substrate holder side to the back surface,
The substrate holder, wherein the third recess is formed wider on the front and back surfaces of the third substrate holder than the opening surface of the third opening.

Holding the first free-form curved prism from the film formation region side of the first free-form curved prism, and a first substrate holder having a first opening;
Holding the second free-form surface prism from the film formation region side of the second free-form surface prism, and a second substrate holder having a second opening,
Interposed between the first substrate holder and the second substrate holder, each holding the first free-form surface prism and the second free-form surface prism at one end on the opposite side of the film formation region. A third substrate holder having a third opening and a separating structure
Holding means for integrally holding the first to third substrate holders,
The first substrate holder is provided between the receiving groove provided in the first opening portion and the protruding piece provided in the third opening of the third substrate holder. Can hold one free-form surface prism,
Between the receiving groove provided in the second opening portion of the second substrate holder and the protruding piece provided in the third opening of the third substrate holder, the first A substrate holder for holding an optical component when an optical thin film is formed on the optical functional surface of the optical component by a film forming apparatus, wherein the second free-form curved prism can be held.

Using the substrate holder according to claim 1 or 2, the film receiving region of the first optical component is opposite to the film forming region of the first optical component from the film forming region side of the first optical component. To hold the first optical component by sandwiching the first optical component by the protrusions of the third substrate holder, and determine a film formation region for the optical functional surface When,
Placing the second optical component on the protrusion of the third substrate holder with the region opposite to the film formation region facing down;
The film forming region side of the second optical component supported by the third substrate holder is sandwiched between the receiving groove portions of the second substrate holder, and the first to third substrate holders are integrated. And a process of
A step of forming an optical thin film simultaneously or sequentially in each film formation region of the first and second optical components held by the first to third substrate holders;
Including
At least one of the first optical component and the second optical component has a convex shape on the opposite side of the film formation region.

The substrate holder according to claim 4 , wherein the first free-form surface prism is opposite the film-formation region by the receiving groove portion of the first substrate holder from the first free-form surface prism film-formation region side. The first free-form surface prism is held by sandwiching the first free-form surface prism by the projecting piece of the third substrate holder from the side, and the film formation region with respect to its optical function surface The process of deciding
Placing the second free-form curved prism on the protruding piece of the third substrate holder with the region opposite to the film formation region facing down;
The film formation region of the second free-form curved prism supported by the third substrate holder is sandwiched between the receiving groove portions of the second substrate holder, and the first to third substrate holders are integrated. Process,
A step of forming an optical thin film simultaneously or sequentially in each film formation region of the first and second free-form surface prisms held by the first to third substrate holders. A method of manufacturing an optical component comprising a free-form surface prism.