JP4662758B2 - アンモニアから水を除去する方法 - Google Patents
アンモニアから水を除去する方法 Download PDFInfo
- Publication number
- JP4662758B2 JP4662758B2 JP2004355342A JP2004355342A JP4662758B2 JP 4662758 B2 JP4662758 B2 JP 4662758B2 JP 2004355342 A JP2004355342 A JP 2004355342A JP 2004355342 A JP2004355342 A JP 2004355342A JP 4662758 B2 JP4662758 B2 JP 4662758B2
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- Prior art keywords
- oxide
- group
- metal oxide
- water
- mixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 69
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 title claims abstract description 46
- 229910021529 ammonia Inorganic materials 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 claims abstract description 43
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 33
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 33
- 150000004678 hydrides Chemical class 0.000 claims abstract description 22
- 239000002274 desiccant Substances 0.000 claims abstract description 13
- 230000008569 process Effects 0.000 claims abstract description 12
- 239000007789 gas Substances 0.000 claims description 43
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 31
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 claims description 25
- 239000000395 magnesium oxide Substances 0.000 claims description 17
- 239000000203 mixture Substances 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 239000011261 inert gas Substances 0.000 claims description 14
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 claims description 12
- 150000003839 salts Chemical class 0.000 claims description 12
- 229910000272 alkali metal oxide Inorganic materials 0.000 claims description 10
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Chemical compound [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 claims description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 7
- 238000001179 sorption measurement Methods 0.000 claims description 7
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 6
- 239000011734 sodium Substances 0.000 claims description 6
- 239000000292 calcium oxide Substances 0.000 claims description 5
- 229910018068 Li 2 O Inorganic materials 0.000 claims description 4
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 4
- KOPBYBDAPCDYFK-UHFFFAOYSA-N caesium oxide Chemical compound [O-2].[Cs+].[Cs+] KOPBYBDAPCDYFK-UHFFFAOYSA-N 0.000 claims description 3
- 229910001942 caesium oxide Inorganic materials 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims description 3
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 claims description 3
- 229910001947 lithium oxide Inorganic materials 0.000 claims description 3
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 3
- CHWRSCGUEQEHOH-UHFFFAOYSA-N potassium oxide Chemical compound [O-2].[K+].[K+] CHWRSCGUEQEHOH-UHFFFAOYSA-N 0.000 claims description 3
- 229910001950 potassium oxide Inorganic materials 0.000 claims description 3
- KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 claims description 3
- 229910001948 sodium oxide Inorganic materials 0.000 claims description 3
- 239000003463 adsorbent Substances 0.000 description 63
- 238000012360 testing method Methods 0.000 description 27
- 238000001035 drying Methods 0.000 description 14
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 10
- 239000001301 oxygen Substances 0.000 description 10
- 229910052760 oxygen Inorganic materials 0.000 description 10
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 9
- 239000010457 zeolite Substances 0.000 description 8
- 229910021536 Zeolite Inorganic materials 0.000 description 7
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 7
- 229910003455 mixed metal oxide Inorganic materials 0.000 description 7
- 239000002808 molecular sieve Substances 0.000 description 7
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 4
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 4
- 239000001569 carbon dioxide Substances 0.000 description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 description 4
- 238000005470 impregnation Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 150000001242 acetic acid derivatives Chemical class 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 238000011068 loading method Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 150000003891 oxalate salts Chemical class 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 2
- 150000001558 benzoic acid derivatives Chemical class 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000011437 continuous method Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 150000003893 lactate salts Chemical class 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 229910000480 nickel oxide Inorganic materials 0.000 description 2
- 150000002823 nitrates Chemical class 0.000 description 2
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 2
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- SCVFZCLFOSHCOH-UHFFFAOYSA-M potassium acetate Chemical compound [K+].CC([O-])=O SCVFZCLFOSHCOH-UHFFFAOYSA-M 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000002411 thermogravimetry Methods 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000004480 active ingredient Substances 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 150000001447 alkali salts Chemical class 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- UBAZGMLMVVQSCD-UHFFFAOYSA-N carbon dioxide;molecular oxygen Chemical compound O=O.O=C=O UBAZGMLMVVQSCD-UHFFFAOYSA-N 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 150000004675 formic acid derivatives Chemical class 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229940097364 magnesium acetate tetrahydrate Drugs 0.000 description 1
- XKPKPGCRSHFTKM-UHFFFAOYSA-L magnesium;diacetate;tetrahydrate Chemical compound O.O.O.O.[Mg+2].CC([O-])=O.CC([O-])=O XKPKPGCRSHFTKM-UHFFFAOYSA-L 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- VUZPPFZMUPKLLV-UHFFFAOYSA-N methane;hydrate Chemical compound C.O VUZPPFZMUPKLLV-UHFFFAOYSA-N 0.000 description 1
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 235000011056 potassium acetate Nutrition 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000002516 radical scavenger Substances 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 229940095064 tartrate Drugs 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/26—Drying gases or vapours
- B01D53/28—Selection of materials for use as drying agents
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- B01J19/02—Apparatus characterised by being constructed of material selected for its chemically-resistant properties
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- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/04—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising compounds of alkali metals, alkaline earth metals or magnesium
- B01J20/041—Oxides or hydroxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
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- B01J20/06—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising oxides or hydroxides of metals not provided for in group B01J20/04
- B01J20/08—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising oxides or hydroxides of metals not provided for in group B01J20/04 comprising aluminium oxide or hydroxide; comprising bauxite
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- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
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- C—CHEMISTRY; METALLURGY
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- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/04—Purification or separation of nitrogen
- C01B21/0405—Purification or separation processes
- C01B21/0433—Physical processing only
- C01B21/045—Physical processing only by adsorption in solids
- C01B21/0455—Physical processing only by adsorption in solids characterised by the adsorbent
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- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
- C01B23/001—Purification or separation processes of noble gases
- C01B23/0036—Physical processing only
- C01B23/0052—Physical processing only by adsorption in solids
- C01B23/0057—Physical processing only by adsorption in solids characterised by the adsorbent
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- C—CHEMISTRY; METALLURGY
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- C01C—AMMONIA; CYANOGEN; COMPOUNDS THEREOF
- C01C1/00—Ammonia; Compounds thereof
- C01C1/02—Preparation, purification or separation of ammonia
- C01C1/024—Purification
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- B01J2220/50—Aspects relating to the use of sorbent or filter aid materials
- B01J2220/56—Use in the form of a bed
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0042—Making ultrapure specific gas
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0043—Impurity removed
- C01B2210/0062—Water
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Drying Of Gases (AREA)
- Physical Water Treatments (AREA)
Description
・アンモニア及び他の水素化物ガスから水及び二酸化炭素を本質的に検出不可能な限界、例えば、40ppb以下まで除去できること;並びに
・非常に低い水分圧で水に関する高い親和性、高い容量、及び優れた水吸収動態を有するスカベンジャーを使用できること;
がある。
試験吸着剤の有効性を評価するのに2つの方法を用いた。並列法では、床を試験吸着剤で充填し、別の床を商用吸着剤で満たした。商用吸着剤で満たした床は、限界容量でないような大きさにした。ガス流を同一の流量で何れかの床に供給した。試験床の微量の水含有量を、商用吸着剤を満たした床の微量の水含有量と対比して測定した。測定した水含有量の差は、水の除去における試験吸着剤の有効性を示していた。
[プロセス構成]
容量、吸着動態などに関して情報を得るために、破過に対する試験運転を一般的に実施した。試験床は、内径0.85cm、長さ5cmの寸法であった。容器内部の空スペースをガラスビーズで満たした。各吸着剤に関して容器に充填した媒体の量を表1に記載する。商用吸着剤で満たした床は、直径が1.5インチ、長さが4.5インチの寸法であった。
N2(7.5vol%)とH2O含有量が200ppbの高純度NH3(92.5vol%)との混合物を破過試験用の供給原料として使用した。N2は水分発生器からのものであり、混合物中のH2O濃度は1.8ppmで比較的安定であった。
水/アンモニアの混合ガスを流量250sccmで試験床に通した。並列法において、混合ガスを周期的に商用吸着剤で満たした床にシフトして、対照標準のH2O指示値を得た。84psig下、周囲温度(約25℃)で実験を行った。
MKS FTIRをH2Oの分析に使用した。これは分析法の検出限界(MDL)が40ppbである。連続的な下流系の乾燥及び周囲温度の変動によって、FTIRのH2O指示値は約50ppbシフトする場合がある。温度の依存を軽減するため、商用吸着剤で満たした床のH2O指示値を対照標準として用いた。
[吸着剤試料の調製]
いくつかの吸着剤を合成し、一般的な手順によってNH3からの水の除去におけるその有効性について試験した。以下の吸着剤を記載した手順に従って調製した。
受け入れたままの市販の4Aモレキュラーシーブは、直径が約2mm、長さが5mmの粒子サイズであった。破過試験に先立ち、モレキュラーシーブをグローブボックス内で16〜20メッシュに粉砕した。TGA分析によって、粉砕された吸着剤が0.3%の残留水を含むことが示された。
5Aモレキュラーシーブ試料を400℃で活性化することによる通常の方法で調製した。TGA分析によって、それが1.12%の残留水を含むことが示された。活性化の後、この材料をグローブボックス内で16〜20メッシュに粉砕した。
BaO/Al2O3の試料を、AA300(アルカンからのAl2O3)76.4g(約100cc)をBa(NO2)2溶液50cc(0.3gBa(NO2)2・H2O/ccH2O)に溶解することにより調製した。この溶液をよく混合し、次いで、余分な溶液を別の容器に移し、吸着剤を一晩フードにおいて室温で乾燥した。次いで、この試験試料を16〜20メッシュに粉砕した。粉砕されたBa(NO2)2/Al2O3の試料1.050gを試験床に充填した。試験床を窒素によって流量1slpmでパージした。試験床を100℃で24時間及び300℃でさらに24時間加熱した。BaOの充填量は、約0.5mmol/g(試験吸着剤)即ち7wt%であると概算した。
MgO−K2O/Al2O3の試料は、酢酸マグネシウム四水和物(Mg(C2H3O2)2、ACSグレード)と酢酸カリウム(KC2H3O2、ACSグレード)の水溶液をAl2O3上に堆積させることにより調製した。この試料を乾燥して、乾燥した含浸Al2O3を16〜20メッシュに粉砕した。粉砕した材料をゼロ空気(実質的に水と二酸化炭素がない)中550℃で4時間焼成した。試料は、MgO充填量が0.4mmol/g(吸着剤)即ち1.6wt%、及びK2O充填量が1.0mmol/g(吸着剤)即ち9.1wt%であった。
[試験吸着剤の評価]
示された一般的な手順に従って、アンモニアからの水の除去における試験試料の有効性について評価した。評価の結果を表1〜5に報告する。
Claims (12)
- 水の吸着を達成するための条件下で、乾燥剤と水素化物ガス流又は不活性ガス流を接触させることを含んで成る、水素化物ガス又は不活性ガスから水を除去するプロセスにおいて、
酸化ナトリウム、酸化カリウム、酸化リチウム、及び酸化セシウムから成る群より選択された少なくとも1つのグループ1のアルカリ金属酸化物と、酸化カルシウム、酸化マグネシウム、酸化ストロンチウム、及び酸化バリウムから成る群より選択された少なくとも1つのグループ2のアルカリ土類金属酸化物とから成る金属酸化物の混合物を乾燥剤として利用することを含んで成り、
該金属酸化物は、酸化ガス流中200〜600℃の温度で金属塩から活性化され、該金属塩が金属酸化物に分解される、水の除去プロセスの改良された方法。 - 水の吸着を達成するための条件下で、乾燥剤とアンモニア流を接触させることを含んで成る、アンモニアから水を除去するプロセスにおいて、
酸化ナトリウム、酸化カリウム、酸化リチウム、及び酸化セシウムから成る群より選択された少なくとも1つのグループ1のアルカリ金属酸化物と、酸化カルシウム、酸化マグネシウム、酸化ストロンチウム、及び酸化バリウムから成る群より選択された少なくとも1つのグループ2のアルカリ土類金属酸化物とから成る金属酸化物の混合物を乾燥剤として利用することを含んで成り、
該金属酸化物は、酸化ガス流中200〜600℃の温度で金属塩から活性化され、該金属塩が金属酸化物に分解される、アンモニアから水を除去するための、水含有量が500ppm以下であるプロセスの改良された方法。 - 前記金属酸化物の混合物が多孔質担体上に分散された、請求項1又は請求項2に記載の方法。
- 前記多孔質担体が少なくとも100m2/gの表面積を有する、請求項3に記載の方法。
- 前記担体がアルミナである、請求項4に記載の方法。
- 前記金属酸化物の混合物が、K2O/MgOとCs2O/MgOから成る群より選択された、請求項3に記載の方法。
- グループ1のアルカリ金属酸化物/グループ2のアルカリ土類金属酸化物のモル比が0.1〜10である、請求項3に記載の方法。
- グループ1のアルカリ金属酸化物/グループ2のアルカリ土類金属酸化物のモル比が0.3〜5である、請求項7に記載の方法。
- 前記金属酸化物の混合物の充填量が、担体と金属酸化物の混合物との複合体の10〜90wt%である、請求項8に記載の方法。
- 前記金属酸化物の混合物の充填量が、担体と金属酸化物の混合物との複合体の30〜40wt%である、請求項8に記載の方法。
- 前記金属酸化物の混合物が、K2O/MgO、K2O/BaO、Na2O/MgO、Na2O/BaO、Cs2O/MgO、Cs2O/BaO、Li2O/MgO及びLi2O/BaOから成る群より選択された、請求項7に記載の方法。
- 前記金属酸化物の混合物が、K2O/MgOとCs2O/MgOから成る群より選択された、請求項11に記載の方法。
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EP1651093B1 (de) * | 2003-07-30 | 2016-09-07 | BSH Hausgeräte GmbH | Verfahren zum betreiben einer geschirrspülmaschine mit wenigstens einem teilprogrammschritt "trocknen" |
US7812188B2 (en) * | 2005-12-07 | 2010-10-12 | American Air Liquide, Inc. | Preparation of adsorbents for purifying organosilicon compounds |
US8449654B2 (en) * | 2011-08-22 | 2013-05-28 | Air Products And Chemicals, Inc. | Method and apparatus for the supply of dry gases |
PL224195B1 (pl) | 2012-06-08 | 2016-11-30 | Sławomir Andrzej Maculewicz | Sposób oczyszczania amoniaku, mieszanin azotu i wodoru albo azotu, wodoru i amoniaku |
US8748723B1 (en) * | 2013-03-14 | 2014-06-10 | Boveda, Inc. | Humidity control system for wood products |
CN104495871B (zh) * | 2014-12-15 | 2016-09-28 | 苏州金宏气体股份有限公司 | 超纯氨制备过程中水分杂质的去除装置 |
DE102016213360A1 (de) * | 2016-07-21 | 2018-01-25 | Thyssenkrupp Ag | Verfahren zur elektrochemischen Herstellung von Ammoniak |
KR20190005741A (ko) * | 2017-07-07 | 2019-01-16 | 도쿄엘렉트론가부시키가이샤 | 반도체 장치의 제조 방법 및 금속 산화물 막의 형성 방법 |
CN107501122A (zh) * | 2017-08-29 | 2017-12-22 | 湖北工程学院 | 色谱纯n,n‑二甲基甲酰胺及其制备方法、生产系统 |
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CN100400143C (zh) | 2008-07-09 |
EP1541218B1 (en) | 2006-08-09 |
US6892473B1 (en) | 2005-05-17 |
DE602004001838D1 (de) | 2006-09-21 |
TW200519040A (en) | 2005-06-16 |
KR20050055602A (ko) | 2005-06-13 |
CN1644501A (zh) | 2005-07-27 |
DE602004001838T2 (de) | 2006-12-07 |
JP2005169392A (ja) | 2005-06-30 |
KR100635961B1 (ko) | 2006-10-19 |
TWI265149B (en) | 2006-11-01 |
ATE335532T1 (de) | 2006-09-15 |
US20050120581A1 (en) | 2005-06-09 |
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