JP4648435B2 - 検査装置 - Google Patents

検査装置 Download PDF

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Publication number
JP4648435B2
JP4648435B2 JP2008205955A JP2008205955A JP4648435B2 JP 4648435 B2 JP4648435 B2 JP 4648435B2 JP 2008205955 A JP2008205955 A JP 2008205955A JP 2008205955 A JP2008205955 A JP 2008205955A JP 4648435 B2 JP4648435 B2 JP 4648435B2
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JP
Japan
Prior art keywords
optical system
illumination
light
scratch
inspection apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008205955A
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English (en)
Japanese (ja)
Other versions
JP2008261893A (ja
JP2008261893A5 (enExample
Inventor
伊知郎 石丸
稔 野口
一郎 盛山
義和 田辺
保夫 八掛
行雄 見坊
健二 渡辺
洋史 土山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Technologies Corp, Hitachi Ltd filed Critical Hitachi High Technologies Corp
Priority to JP2008205955A priority Critical patent/JP4648435B2/ja
Publication of JP2008261893A publication Critical patent/JP2008261893A/ja
Publication of JP2008261893A5 publication Critical patent/JP2008261893A5/ja
Application granted granted Critical
Publication of JP4648435B2 publication Critical patent/JP4648435B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2008205955A 2008-08-08 2008-08-08 検査装置 Expired - Fee Related JP4648435B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008205955A JP4648435B2 (ja) 2008-08-08 2008-08-08 検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008205955A JP4648435B2 (ja) 2008-08-08 2008-08-08 検査装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2006028261A Division JP4343911B2 (ja) 2006-02-06 2006-02-06 欠陥検査装置

Publications (3)

Publication Number Publication Date
JP2008261893A JP2008261893A (ja) 2008-10-30
JP2008261893A5 JP2008261893A5 (enExample) 2008-12-11
JP4648435B2 true JP4648435B2 (ja) 2011-03-09

Family

ID=39984443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008205955A Expired - Fee Related JP4648435B2 (ja) 2008-08-08 2008-08-08 検査装置

Country Status (1)

Country Link
JP (1) JP4648435B2 (enExample)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6333649A (ja) * 1986-07-28 1988-02-13 Canon Inc 表面状態検査装置
JP3135063B2 (ja) * 1989-09-22 2001-02-13 株式会社日立製作所 比較検査方法および装置
JP2898669B2 (ja) * 1989-11-06 1999-06-02 株式会社日立製作所 欠陥検査装置
JPH1164234A (ja) * 1997-08-20 1999-03-05 Advantest Corp 異物検出方法、および異物検出装置
JP3875383B2 (ja) * 1997-12-02 2007-01-31 株式会社トプコン 表面検査装置
JPH11237344A (ja) * 1998-02-19 1999-08-31 Hitachi Ltd 欠陥検査方法およびその装置

Also Published As

Publication number Publication date
JP2008261893A (ja) 2008-10-30

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