JP4646609B2 - Plasma CVD equipment - Google Patents

Description

  The present invention relates to a plasma CVD apparatus for forming a film on a flexible substrate such as a plastic or metal wheel by a plasma CVD (chemical vapor deposition) method.

  In general, when a semiconductor film or an insulator film is formed in a semiconductor device such as an LSI, a liquid crystal display, and an organic EL thin film transistor, a parallel plane type plasma CVD apparatus 100 as shown in FIG. Used (see, for example, Patent Document 1).

  The parallel plane type plasma CVD apparatus 100 includes a reaction chamber 105 that is a vacuum vessel, and a pair of electrodes 102a and 102b that are provided inside the reaction chamber 105 and are opposed to each other while being electrically insulated from each other. I have.

  The pair of electrodes 102a and 102b includes a cathode electrode 102a that is an electrode to which a voltage (electrical energy) is applied and an anode electrode 102b that is an electrode at a ground potential. The cathode electrode 102a and the anode electrode 102b are each formed of a conductive plate and arranged in parallel to each other.

  As shown in FIG. 11, the anode electrode 102 b is provided on a substrate holder 109 fixed to the bottom wall surface in the reaction chamber 105, for example. A resistance heater 121 is provided on the substrate holder 109 (or the anode electrode 102b). On the substrate holder 109, the substrate to be processed 104, which is a target for film formation, is mounted via the anode electrode 102b. The substrate to be processed 104 is made of, for example, silicon or glass. Thus, the substrate 104 to be processed is heated by being mounted on the anode electrode 102b heated by the resistance heater 121, and the temperature is controlled.

  On the other hand, the cathode electrode 102 a is also referred to as a shower plate, and is fixed to the upper wall surface in the reaction chamber 105 through a plate-like dielectric portion 117 and a chamber-like gas retention portion 107. The gap between the cathode electrode 102a and the anode electrode 102b is defined to be about several tens of mm.

  A gas supply unit 113 provided outside the reaction chamber 105 is connected to the gas retention unit 107. In addition, a plurality of gas inlets 106 for introducing a material gas into the reaction chamber 105 are formed in the cathode electrode 102a and the dielectric part 117 so as to penetrate vertically. The gas inlets 106 are uniformly dispersed throughout the cathode electrode 102a and have an inner diameter of about 0.5 mm. Thus, the gas supplied from the gas supply unit 113 is introduced into the space region between the cathode electrode 102a and the anode electrode 102b through the gas retention unit 107 and the gas introduction port 106. Further, a gas discharge unit 110 is connected to the reaction chamber 105, and the gas after the plasma treatment is exhausted to the outside of the reaction chamber 105.

  The cathode electrode 102a is connected to the high frequency power supply 101 via the blocking capacitor 122, while the anode electrode 102b is connected to the ground potential. The high frequency power supply 101 is configured to generate an RF (Radio Frequency) high frequency voltage of 13.56 MHz or 27.12 MHz, for example. Then, by applying a high frequency voltage between the cathode electrode 102a and the anode electrode 102b, an electric field is generated in a spatial region between the cathode electrode 102a and the anode electrode 102b, and a dielectric breakdown phenomenon between these electrodes 102a and 102b. As a result, plasma, which is a glow discharge phenomenon, is generated.

  With the above configuration, in the plasma CVD apparatus 100, by introducing a material gas into the plasma region 111 formed in the reaction chamber 105, the material gas is decomposed and dissociated in the plasma region 111 to generate radicals. The radicals generated in the plasma region 111 are diffused to the substrate to be processed 104 and deposited on the surface of the substrate to be processed 104 to form, for example, a semiconductor film or an insulating film.

  By the way, in the recent device field, not only a hard substrate such as a silicon substrate and a glass substrate but also a device using a light and soft flexible substrate such as a plastic or a metal wheel has been attracting attention. A roller-to-roller method is known as a method for continuously carrying a flexible substrate to form a film. In the roller-to-roller system, the flexible substrate is unwound from the unwinding roller, subjected to film formation, and then wound onto the winding roller. As described above, the roller-to-roller method has a great merit that the manufacturing cost of the device can be reduced as compared with the single wafer method because the film forming process can be continuously performed while the substrate is conveyed at a high speed. Therefore, a vacuum deposition apparatus, a sputtering apparatus, etc. using a roller-to-roller conveyance system have already been developed (see, for example, Patent Document 2).

  It is also known to apply a roller-to-roller conveyance system to the conventional parallel plane type plasma CVD apparatus (see, for example, Patent Document 3).

  However, the plasma CVD apparatus is used when a semiconductor film or an insulator film, which is most important in a device, is formed. Furthermore, the film formation parameters of plasma CVD equipment are very important and sensitive, and minute changes in film formation parameters greatly affect the film quality of the formed thin film and even the device characteristics after manufacturing. It has the characteristic that it ends up.

  For example, with respect to the conventional parallel planar plasma CVD apparatus shown in FIG. 11, the relationship between the minute change in the distance between the planar cathode electrode and the planar anode electrode and the film stress when a silicon nitride film (SiNx) is formed. Is shown in FIG.

  Here, the film stress is one of the quantitative characteristics of the thin film, and has a property of distorting the substrate on which the stress accumulated during film formation is formed. When the film stress is positive, it means a thin film having a tensile stress, and when the film stress is negative, it means a thin film having a compressive stress. For example, in the case of a silicon nitride film, if the value of the film stress is too large, a phenomenon in which many defects in the formed thin film are included or the formed thin film is peeled off from the substrate generally occurs. Known.

  As can be seen from FIG. 12, the film stress varies greatly by several hundred MPa even when the distance between the electrodes is different by several mm. For example, the formed thin film changes from a characteristic having a compressive stress to a characteristic having a tensile stress by completely changing the distance between the electrodes by several mm. As a result, the film stress varies greatly, and the device characteristics and productivity are greatly adversely affected.

Therefore, in the conventional plasma CVD apparatus, the flexible substrate is supported by a roller with respect to the planar cathode electrode and the planar anode electrode that are horizontally arranged in parallel to each other in order to prevent the film forming parameters including the electrode interval from changing as much as possible. At the same time, the film is formed while being inserted horizontally from the side.
JP-A-5-166728 JP 2000-313953 A JP-A-4-299823

  However, a flexible substrate such as a plastic substrate is generally characterized in that the substrate has a higher coefficient of thermal expansion and a lower Young's modulus than silicon or glass. Furthermore, the film forming process using the plasma CVD apparatus has a feature that the processing temperature (that is, the substrate temperature) is higher than the film forming process using other vacuum vapor deposition apparatuses or sputtering apparatuses. Therefore, when a flexible substrate is formed by a parallel plane plasma CVD apparatus as described above, it is inevitable that the substrate swells or warps when the temperature rises, and the substrate is held in close contact with the anode electrode. I can't do it. That is, since film formation parameters such as film formation temperature and reaction gas flow vary greatly, it is extremely difficult to perform film formation uniformly.

  On the other hand, if the undulation or warpage of the substrate is forcibly suppressed, another problem arises that a mechanism for suppressing the substrate to the anode electrode is required.

  In addition, in the conventional parallel plane plasma CVD apparatus, when a film having a low film formation rate is formed, in order to form a film with a predetermined film thickness, the planar anode electrode and the planar cathode electrode are arranged in the substrate transport direction. It needs to be extended for a long time. Further, when a multilayer film such as a silicon nitride film, an amorphous silicon film, and a three-layer film of an n-type amorphous silicon film in a thin film transistor for a liquid crystal display or the like is continuously formed, the planar anode electrode and the planar cathode are also formed. It is necessary to extend the electrode long in the substrate transport direction, and the reaction chamber provided for each type of film to be deposited must be arranged side by side in the substrate transport direction.

  In other words, if the area where the film can be simultaneously formed is increased, the arrangement space (so-called footprint) of the plasma CVD apparatus becomes very long, so that the arrangement mode is limited when introducing the plasma CVD apparatus into a factory or the like. In addition, there arises a problem that an extra cost is required to secure an introduction place.

  In addition, when a multilayer film is continuously formed on a flexible substrate, in order to suppress contamination of different gases from adjacent reaction chambers, the substrate passes between the adjacent reaction chambers very narrowly. Although it is conceivable to provide a gap, as described above, warping and undulation occur in the flexible substrate. Therefore, if the flexible substrate is allowed to pass, the gap cannot be sufficiently narrowed. Therefore, it is difficult to continuously form a multilayer film on a flexible substrate using the conventional parallel plane plasma CVD apparatus. In fact, the reaction chambers are completely separated from each other by the roller-to-roller system. In other words, the substrate was transported by a single wafer method to form a film.

  The present invention has been made in view of the above points, and the main object of the present invention is to improve the film quality by maintaining uniform film formation parameters for a plasma CVD apparatus for forming a film on a flexible substrate, The object is to reduce the installation area of the apparatus.

  In order to achieve the above object, a plasma CVD apparatus according to the present invention is provided between a reaction chamber, a gas introduction part for introducing a reaction gas into the reaction chamber, and the reaction chamber. Plasma CVD for providing a plasma CVD process to the flexible substrate, comprising: a first electrode and a second electrode for generating a plasma discharge in the step; and a transport mechanism for transporting the flexible substrate between the first electrode and the second electrode. The apparatus, wherein the first electrode has a curved first discharge surface, while the second electrode has a second discharge surface curved along the first discharge surface, the first electrode and the first electrode An interelectrode distance adjusting mechanism that adjusts the distance between the two electrodes, and the first discharge surface or the second discharge surface based on the distance between the first electrode and the second electrode adjusted by the interelectrode distance adjusting mechanism. Curvature adjustment to adjust the curvature of And a structure.

  The transport mechanism preferably includes the first electrode and is configured to transport the flexible substrate while being wound around the first discharge surface of the first electrode.

  The curvature adjusting mechanism is preferably constituted by a piezoelectric element.

The first discharge surface of the first electrode may be formed in a convex shape, while the second discharge surface of the second electrode may be formed in a concave shape .

  The reaction chamber may be provided with a cooling mechanism for cooling the flexible substrate subjected to the plasma CVD process.

  The cooling mechanism may include a cooling roller that constitutes a part of the transport mechanism.

  The cooling roller is preferably configured to support the back surface of the flexible substrate on which the plasma CVD process is not performed.

  The reaction chamber may be provided with a heating mechanism for heating a flexible substrate to be plasma CVD processed.

  The heating mechanism may include a heating roller that constitutes a part of the transport mechanism.

  The heating roller preferably supports the back surface of the flexible substrate on which the plasma CVD process is not performed.

  The transport mechanism cools the unwinding roller for unwinding the flexible substrate, the heating roller for heating and transporting the flexible substrate unwound from the unwinding roller, and the flexible substrate subjected to plasma CVD processing. A cooling roller to be transported, and a take-up roller for taking up the flexible substrate cooled by the cooling roller. The take-out roller, the heating roller, the cooling roller, and the take-up roller have parallel rotation axes. The unwinding roller is disposed closer to the cooling roller than the heating roller, and the winding roller is disposed closer to the heating roller than the cooling roller. Good.

  It is preferable that the unwinding roller and the take-up roller are arranged stepwise up and down.

  A plurality of the second electrodes may be provided along the first discharge surface of the first electrode.

  Each processing space that is formed between each second electrode and the first electrode and in which plasma CVD processing is performed is arranged with a predetermined gap with respect to the first discharge surface of the first electrode. It is preferable that the partition member has a curved surface that curves along the first discharge surface.

  Preferably, the first electrode is an anode electrode, while the second electrode is a cathode electrode.

-Action-
Next, the operation of the present invention will be described.

  When plasma CVD processing is performed on a flexible substrate, a reaction gas is introduced into the reaction chamber from the gas introduction portion, and between the first discharge surface of the first electrode and the second discharge surface of the second electrode. A plasma discharge is generated. In this state, the flexible substrate is transported between the cathode electrode and the anode electrode by the transport mechanism. At this time, the flexible substrate is conveyed while being wound around the first discharge surface of the first electrode, whereby the flexible substrate is continuously conveyed between the first electrode and the second electrode. A plasma CVD process is performed.

  Furthermore, since the first discharge surface and the second discharge surface are respectively formed to be curved and the second discharge surface is formed along the first discharge surface, the distance between the first electrode and the second electrode is increased. It can be kept constant. Furthermore, since the first discharge surface is curved, the flexible substrate can be wound in a close contact state. That is, the undulation and warping of the flexible substrate accompanying the temperature rise are prevented. As a result, since the deposition parameters are maintained constant, the quality of the deposited film can be improved and uniformized.

  Furthermore, if the curved first discharge surface and the second discharge surface are extended in a state of being opposed to each other, it is possible to increase the area where the film can be formed simultaneously. Therefore, unlike the conventional parallel plane type plasma CVD apparatus, the entire apparatus does not become long in the horizontal direction, so that the installation area of the apparatus can be reduced.

  By the way, in the conventional parallel plane type plasma CVD apparatus, since the flexible substrate moves at high speed on the flat electrode fixedly installed, static electricity is generated on the substrate or the substrate surface is damaged. Inevitable. On the other hand, in this invention, since a flexible substrate is conveyed in the state wound around the 1st discharge surface of the 1st electrode which comprises a conveyance mechanism, generation | occurrence | production of the static electricity and damage which arise on a board | substrate are suppressed.

Further, since the inter-electrode distance adjusting mechanism is provided, the distance between the first electrode and the second electrode can be adjusted according to the characteristics of the film to be formed. Further, at this time, since the curvature of the first discharge surface or the second discharge surface is adjusted by the curvature adjusting mechanism, the distance between the first discharge surface and the second discharge surface is kept constant .

  In addition, when the reaction chamber is provided with a heating mechanism and a cooling mechanism, the flexible substrate heated to a high temperature by the heating mechanism is subjected to a plasma CVD process in a state between the first electrode and the second electrode. Cooled by the cooling mechanism. When the heating mechanism has a heating roller that forms part of the transport mechanism, and the cooling mechanism has a cooling roller that forms part of the transport mechanism, the heating roller and the cooling roller support the back surface of the flexible substrate. Is preferred. This can prevent the surface subjected to the plasma CVD process from being damaged by the roller.

  The transport mechanism includes a winding roller, a heating roller, a cooling roller, and a winding roller, and the winding roller is disposed closer to the cooling roller than the heating roller, and the winding roller is the cooling roller. Further, by disposing on the heating roller side, the back surface of the flexible substrate can be supported by the heating roller and the cooling roller. Furthermore, the horizontal width of the apparatus can be reduced by arranging the unwinding roller and the winding roller up and down.

  In addition, by providing a plurality of second electrodes along the first discharge surface of the first electrode, a plurality of types of films are continuously formed. Furthermore, each processing space formed between each of the second electrodes and the first electrode is partitioned by a partition member, and a curved surface that is curved along the first discharge surface is formed on the partition member. Thus, it is possible to partition the adjacent processing spaces so that the foreign matter does not move.

  According to the present invention, the first discharge surface and the second discharge surface are respectively curved and formed, and the second discharge surface is formed along the first discharge surface, so the distance between the first electrode and the second electrode. Can be kept constant. Furthermore, since the flexible substrate can be wound in close contact with the curved first discharge surface, it is possible to prevent undulation and warping of the flexible substrate accompanying a temperature rise. In addition, the distance between the first discharge surface and the second discharge surface is changed while appropriately changing the distance between the first electrode and the second electrode by the inter-electrode distance adjusting mechanism according to the characteristics of the film to be formed. It can be kept constant by the curvature adjustment mechanism. As a result, the film formation parameters can be kept constant, so that a uniform and high-quality CVD film can be formed on the flexible substrate.

  Furthermore, if the curved first discharge surface and the second discharge surface are extended in a state of being opposed to each other, the area where the film can be formed can be increased at the same time. Therefore, unlike the conventional parallel plane type plasma CVD apparatus, the entire apparatus does not become long in the horizontal direction, so that the installation area of the apparatus can be reduced.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The present invention is not limited to the following embodiment.

<< Reference Example 1 of the Invention >>
FIG. 1 shows Reference Example 1 of the plasma CVD apparatus according to the present invention. FIG. 1 is a cross-sectional view of a plasma CVD apparatus S.

  As shown in FIG. 1, the plasma CVD apparatus S includes a reaction chamber 1, a gas introduction unit 2, a plasma discharge generation unit 18, and a transport mechanism 19. The plasma CVD apparatus S is configured to perform film formation by performing plasma CVD processing on the flexible substrate 14 that is a substrate to be processed. The flexible substrate 14 is formed of, for example, a polyimide substrate having a thickness of about 0.2 mm.

  The reaction chamber 1 is a vacuum chamber and has a plurality of gas discharge portions 33 for discharging the gas inside the reaction chamber 1. Each gas discharge unit 33 is provided with a vacuum pump (not shown) such as a mechanical booster pump or a rotary pump.

  The plasma discharge generator 18 is provided inside the reaction chamber 1 and includes an anode electrode 6 as a first electrode and a cathode electrode 3 as a second electrode. The anode electrode 6 is electrically grounded via the ground wire 15, while the cathode electrode 3 is connected to the power supply box 8. The power supply box 8 is provided with a blocking capacitor and a high frequency power supply connected in series. In this way, for example, plasma discharge is generated between the anode electrode 6 and the cathode electrode 3 by applying an AC voltage of 13.56 MHz to the cathode electrode 3. If it is desired to apply a bias voltage to the anode electrode 6, a substrate bias mechanism may be provided.

  The anode electrode 6 is formed in a columnar shape having a diameter of, for example, 500 mm extending in a predetermined horizontal direction (a direction orthogonal to the paper surface in FIG. 1). The anode electrode 6 is supported on the side wall of the reaction chamber 1 so as to be rotatable around the center axis of the cylinder. In addition, the anode electrode 6 does not necessarily need to be formed in a columnar shape, and may be provided on at least the surface layer of the columnar rotating body. Thus, the anode electrode 6 has the first discharge surface 24 formed in a convex shape and curved. The anode electrode 6 is provided with a resistance heater 5 that heats the flexible substrate 14 to the film forming temperature along the outer peripheral surface.

  The cathode electrode 3 is disposed to face the first discharge surface 24 of the anode electrode 6. The cathode electrode 3 is fixed to the bottom of the reaction chamber 1 through an electrode holder 34. The electrode holder 34 has a U-shaped groove-shaped recess 35 opened to the anode electrode 6 side. The cathode electrode 3 is held by the electrode holder 34 so that the recess 35 of the electrode holder 34 is closed by the back surface of the cathode electrode 3. The inside of the concave portion 35 closed by the cathode electrode 3 constitutes a chamber 37, and a reactive gas (also referred to as a material gas) is supplied from a gas supply port 36 formed in the electrode holder 34. Yes.

  The cathode electrode 3 includes a second discharge surface 25 that faces the first discharge surface 24 of the anode electrode 6. The second discharge surface 25 is curved along the first discharge surface 24, and the curved length is formed to be 200 mm, for example. That is, the second discharge surface 25 of the cathode electrode 3 is formed in a concave shape. The cathode electrode 3 is formed of an aluminum alloy plate having a thickness of about 10 mm, for example. Thus, the distance between the first discharge surface 24 and the second discharge surface 25 is maintained at a constant size.

  The gas introduction part 2 includes a plurality of gas introduction ports 2 formed in the cathode electrode 3. Each gas introduction port 2 is formed uniformly distributed on the second discharge surface 25 and penetrates the plate-like cathode electrode 3 in the thickness direction. The inner diameter of the gas inlet 2 is formed to be about 0.5 mm, for example. The cathode electrode 3 is subjected to alumite treatment after the gas introduction port 2 is formed and is covered with an alumina coating, thereby improving durability and film holding function. Thus, the cathode electrode 3 is also called a shower plate, and the reaction gas supplied from the gas supply port 36 to the chamber 37 is uniformly introduced into the reaction chamber 1 from each gas introduction port 2. .

  The transport mechanism 19 includes an unwinding roller 41, the anode electrode 6, and a winding roller 42, and is configured to transport the flexible substrate 14 between the anode electrode 6 and the cathode electrode 3.

  The unwinding roller 41 and the winding roller 42 are formed in a columnar shape extending horizontally in parallel with the anode electrode 6, and each of the diameters is made of a stainless material having a diameter of, for example, 200 mm. That is, the axes of the unwinding roller 41 and the winding roller 42 are parallel to the axis of the anode electrode 6. The unwinding roller 41 and the winding roller 42 are supported on the side wall of the reaction chamber 1 in a state of being rotatable around the center axis of each column.

  The unwinding roller 41 and the take-up roller 42 have a tension controller function for adjusting the expansion of the flexible substrate 14 due to the temperature rise.

  The reaction chamber 1 includes a load lock area 51 for taking out the flexible substrate 14 in the atmosphere, a film formation area 52 for performing plasma CVD processing, and an intermediate between the film formation area 52 and the load lock area 51. The area 53 is divided into three spaces. The load lock area 51 and the intermediate area 53 are partitioned by a partition plate 55. In the load lock area 51, an unwinding roller 41 and a winding roller 42 are provided. The partition plate 55 is formed with a slight gap 56 through which the flexible board 14 unwound from the unwinding roller 41 passes and a slight gap 57 through which the flexible board 14 taken up by the take-up roller 42 passes. . When the flexible substrate 14 taken up after film formation is taken out, the substrate 14 can be taken out by opening the load lock area 51 to the atmosphere after completely closing the gap 56 and the gap 57. It has become.

  On the other hand, the intermediate area 53 and the film forming area 52 are partitioned by a separation wall 61 that is a partition member. The separation wall 61 has a curved surface 62 that curves along the surface of the anode electrode 6, and a slight gap 63 is formed between the curved surface 62 of the separation wall 61 and the surface of the anode electrode 6. Has been. The gap 63 is defined as very narrow as about 1.0 mm so that the toxic reaction gas in the film formation area 52 does not enter the intermediate area 53 side. Further, the cathode electrode 3 is disposed in the film formation area 52 so that film formation processing is performed.

  The load lock area 51, the film formation area 52, and the intermediate area 53 are individually evacuated and decompressed. The film formation area 52 and the intermediate area 53 are controlled to have substantially the same internal pressure. On the other hand, the internal pressure of the load lock area 51 is set to be slightly higher than that of the intermediate area 53. As a result, even if a toxic reaction gas flows out from the film formation area 52 to the intermediate area 53, it does not flow into the high-pressure load lock area 51, but the gas discharge section 33 provided in the intermediate area 53. Is surely discharged.

  Thus, the flexible substrate 14 wound around the unwinding roller 41 is formed from the load lock area 51 through the intermediate area 53 by the rotation of the unwinding roller 41, the anode electrode 6, and the winding roller 42. It is conveyed to the area 52 while being wound around the first discharge surface 24 of the anode electrode 6. Further, the formed flexible substrate 14 is conveyed from the film formation area 52 to the load lock area 51 via the intermediate area 53 and is taken up by the take-up roller 42.

-Film formation method-
Next, a method for forming a silicon nitride film (SiNx) often used for LSIs, thin film transistors and the like on the flexible substrate 14 formed of polyimide by the plasma CVD apparatus S of this reference example will be described.

  First, the vacuum pump (not shown) of each gas discharge part 33 is driven, and the gas inside the reaction chamber 1 (that is, the load lock area 51, the film formation area 52, and the intermediate area 53) is exhausted and decompressed. Subsequently, the flexible substrate 14 is transported by the transport mechanism 19, and a voltage is applied to the plasma discharge generator 18 by the power supply box 8 while introducing the reaction gas into the film forming area 52 of the reaction chamber 1 from the gas inlet 2. . At this time, the flexible substrate 14 is heated to about 300 ° C. by being heated by the resistance heater 5.

  That is, for example, an AC voltage of 13.56 MHz is applied from the power supply box 8 to the cathode electrode 3 of the plasma discharge generator 18. As a result, a plasma discharge is generated between the first discharge surface 24 of the anode electrode 6 and the second discharge surface 25 of the cathode electrode 3. On the other hand, the reaction gas is a gas in which silane, ammonia, and nitrogen are mixed. The reaction gas is supplied from the gas supply port 36 to the chamber 37, and once retained, the reaction gas passes through the gas introduction ports 2 of the cathode electrode 3. It is uniformly introduced into the space between the first discharge surface 24 and the second discharge surface 25. As a result, the reaction gas is decomposed and dissociated between the first discharge surface 24 and the second discharge surface 25, and a silicon nitride film is formed on the surface of the flexible substrate 14.

  On the other hand, the flexible substrate 14 is unwound by rotating the unwinding roller 41, the anode electrode 6, and the winding roller 42, and is wound around the first discharge surface 24 of the anode electrode 6. It is transported between the surface 24 and the second discharge surface 25. At this time, the film formation is performed on the flexible substrate 14. Thereafter, the formed flexible substrate 14 is conveyed in a state of being wound around the first discharge surface 24, and is taken up by the take-up roller 42. Thereafter, the intermediate area 53 and the load lock area 51 are completely cut off, then the load lock area 51 is opened to the atmosphere, and the film-formed flexible substrate 14 that has been completely taken up by the take-up roller 42 is taken out. As described above, the flexible substrate 14 is continuously formed while being conveyed.

-Effects of Reference Example 1-
Therefore, according to the first reference example, the first discharge surface 24 of the anode electrode 6 and the second discharge surface 25 of the cathode electrode 3 are respectively curved and formed, and the second discharge surface 25 is formed as the first discharge surface 24. Therefore, the distance between the anode electrode 6 and the cathode electrode 3 can be kept constant. Furthermore, since the flexible substrate 14 is wound around the curved first discharge surface 24, the flexible substrate 14 can be brought into intimate contact with the first discharge surface 24, so that the flexible substrate 14 can be prevented from being swelled or warped as the temperature rises. As a result, the deposition parameters can be kept constant, so that the quality of the deposited film can be improved and uniformized.

  Further, since the undulation and warping of the flexible substrate 14 are prevented, the gaps 56 and 57 of the partition plate 55 through which the flexible substrate 14 passes can be formed very narrow. Therefore, the airtightness between the load lock area 51 and the intermediate area 53 can be improved. For the same reason, since the gap 63 between the separation wall 61 and the surface of the anode electrode 6 can be formed very narrow, the airtightness between the intermediate area 53 and the film formation area 52 can be improved. it can. Furthermore, since the internal pressure of the load lock area 51 is set larger than the internal pressures of the film formation area 52 and the intermediate area 53, it is possible to safely use harmful reaction gases such as phosphine and monosilane.

  In addition, a curved surface 62 that is curved along the surface of the anode electrode 6 is formed on the separation wall 61, and the gap 63 is formed between the curved surface 62 and the surface of the anode electrode 6. The toxic gas in the film formation area 52 can be prevented from entering the intermediate area 53.

  Furthermore, if the curved first discharge surface 24 and second discharge surface 25 are extended in a state of facing each other, the area where film formation can be performed simultaneously can be increased. Therefore, unlike the conventional parallel plane type plasma CVD apparatus, the entire apparatus does not become long in the horizontal direction, so that the installation area of the apparatus can be reduced. In addition, the film formation rate can be increased compared to the conventional parallel plane plasma CVD apparatus, so that the production efficiency of film formation can be greatly improved and the manufacturing cost can be reduced. It becomes.

  Further, since the flexible substrate 14 is transported while being wound around the first discharge surface 24 of the anode electrode 6 constituting the transport mechanism 19, it is possible to suppress the occurrence of static electricity and scratches generated on the flexible substrate 14.

<< Reference Example 2 of the Invention >>
FIG. 2 shows Reference Example 2 of the plasma CVD apparatus S according to the present invention. In the following reference examples and embodiments, the same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.

  The reaction chamber 1 of the plasma CVD apparatus S of this reference example is provided with heating mechanisms 5 and 65 for heating the flexible substrate 14 subjected to plasma CVD processing and a cooling mechanism 66 for cooling the flexible substrate 14 subjected to plasma CVD processing. It has been.

  The heating mechanisms 5 and 65 are configured by the resistance heater 5 and a heating roller 65 provided in the load lock area 51 and constituting a part of the transport mechanism 19. The cooling mechanism 66 includes a cooling roller 66 provided in the load lock area 51 and constituting a part of the transport mechanism 19.

  In other words, the transport mechanism 19 has been subjected to a plasma CVD process, an unwinding roller 41 for unwinding the flexible substrate 14, a heating roller 65 for heating and transporting the flexible substrate 14 unwound from the unwinding roller 41, and the like. A cooling roller 66 that cools and conveys the flexible substrate 14 and a winding roller 42 that winds the flexible substrate 14 cooled by the cooling roller 66 are provided.

  The unwinding roller 41, the heating roller 65, the cooling roller 66, and the winding roller 42 are arranged so that their rotation axes are parallel to each other. The heating roller 65 is disposed closer to the winding roller 42 than the unwinding roller 41. On the other hand, the cooling roller 66 is disposed closer to the unwinding roller 41 than the winding roller 42. For example, the cooling roller 66 can cause cooling water to flow therethrough.

  With this configuration, the flexible substrate 14 that has been unwound from the unwinding roller 41 is heated by being wound around the heating roller 65, and the temperature is raised to substantially the film forming temperature. Thereafter, the flexible substrate 14 moves from the load lock area 51 to the intermediate area 53 and is transported through the film forming area 52 while being wound around the anode electrode 6 and heated. The flexible substrate 14 formed in the film formation area 52 moves to the load lock area 51 again through the intermediate area 53.

  The flexible substrate 14 that has moved to the load lock area 51 is quickly cooled down to about room temperature by being wound around the cooling roller 66, and is thereafter wound up by the winding roller 42.

-Effect of Reference Example 2-
Therefore, according to the reference example 2, the temperature of the flexible substrate 14 can be quickly raised by the heating roller 65 and the temperature can be quickly lowered by the cooling roller 66. As a result, the time required for the film formation process as a whole can be reduced and the production efficiency can be increased. In addition, since the formed flexible substrate 14 can be reliably cooled and wound on the winding roller 42, unnecessary deformation of the wound flexible substrate 14 can be prevented. Furthermore, since the unwinding roller 41 and the winding roller 42 are arranged side by side in the horizontal direction, the height of the entire apparatus can be suppressed.

  In order to increase the temperature lowering ability of the cooling roller 66, it is preferable to increase the outer shape of the cooling roller 66 or to provide a plurality of cooling rollers 66. Further, in order to increase the contact area between the flexible substrate 14 and the heating roller 65 and the cooling roller 66, it is preferable to install the flexible substrate 14 above the winding roller 41 and the winding roller 42. Furthermore, the heating roller 65 and the cooling roller 66 are both functions of the heating mechanism and the cooling mechanism, respectively, in preparation for forming a film again on the flexible substrate 14 wound by rotating the winding roller 41 in the opposite direction. You may comprise by the roller which has.

<< Reference Example 3 of the Invention >>
FIG. 3 shows Reference Example 3 of the plasma CVD apparatus S according to the present invention. This reference example is different from the reference example 2 in the arrangement of the winding roller 41, the heating roller 65, the cooling roller 66, and the winding roller 42.

  That is, the unwinding roller 41 is disposed closer to the cooling roller 66 than the heating roller 65, and the winding roller 42 is disposed closer to the heating roller 65 than the cooling roller 66. Further, as shown in FIG. 3, the unwinding roller 41 and the take-up roller 42 are arranged in a stepped manner up and down.

  Thus, the cooling roller 66 is configured to support the back surface of the flexible substrate 14 on the side where the plasma CVD process is not performed. Furthermore, the heating roller 65 is configured to support the back surface of the flexible substrate 14 on the side where the plasma CVD process is not performed.

-Effect of Reference Example 3-
Therefore, according to this reference example, the heating roller 65 and the cooling roller 66 support the back surface of the flexible substrate 14 and do not support the sensitive film-formed surface subjected to the plasma CVD process. It is possible to prevent the film surface from being damaged by the rollers 65 and 66 and static electricity.

  Further, the unwinding roller 41 is disposed closer to the cooling roller 66 than the heating roller 65, the winding roller 42 is disposed closer to the heating roller 65 than the cooling roller 66, and further, the unwinding roller 41 and the winding roller described above. Since the 42 is arranged in a stepwise manner up and down, the horizontal width of the apparatus can be reduced.

Embodiment 1 of the Invention
4 to 6 show Embodiment 1 of the plasma CVD apparatus S according to the present invention.

  The plasma CVD apparatus S of this embodiment includes an interelectrode distance adjustment mechanism 45 and a curvature adjustment mechanism 46.

  As shown in FIG. 4, the interelectrode distance adjusting mechanism 45 is connected to the electrode holder 34, and moves the electrode holder 34 and the cathode electrode 3 in the diameter direction of the anode electrode 6. The distance between and is adjusted. The inter-electrode distance adjustment mechanism 45 has a structure in which the center of gravity of the cathode electrode 3 is minutely translated with millimeter level accuracy.

  The curvature adjusting mechanism 46 is composed of, for example, a piezoelectric element, and finely adjusts the curvature of the second discharge surface 25 based on the distance between the anode electrode 6 and the cathode electrode 3 adjusted by the interelectrode distance adjusting mechanism 45. It is supposed to be.

  The curvature adjusting mechanism 46 may be adjusted by a mechanical force such as a motor. However, since high accuracy is required, it is desirable to apply a piezoelectric material that changes the force minutely by electricity. Further, when the electrode length of the cathode electrode 3 is increased, it is possible to adjust at three or more support points.

  The curvature adjusting mechanisms 46 are provided at both ends of the electrode holder 34 and the cathode electrode 3 in the conveyance direction of the flexible substrate 14 (hereinafter abbreviated as the substrate conveyance direction). The electrode holder 34 and the cathode electrode 3 are supported by the curvature adjusting mechanism 46 in an elastically curved state. Then, the curvature of the second discharge surface 25 is reduced by raising the curvature adjustment mechanism 46, while the curvature of the second discharge surface 25 is increased by lowering the curvature adjustment mechanism 46.

  In FIG. 4, the interelectrode distance between the second discharge surface 25 of the cathode electrode 3 and the first discharge surface 24 of the anode electrode 6 is maintained at a constant size in the substrate transport direction. 5 indicates a state in which the electrode holder 34 and the cathode electrode 3 are translated upward (to the anode electrode 6 side) with respect to FIG. As indicated by a two-dot chain line in FIG. 5, the distance between the electrodes cannot be kept constant over the substrate transport direction simply by moving the electrode holder 34 and the cathode electrode 3 in parallel upward. That is, the distance between the electrodes gradually increases from the center portion in the substrate transport direction on the second discharge surface 25 toward both end portions in the substrate transport direction.

  Therefore, the curvature adjustment mechanism 46 pushes up both ends of the electrode holder 34 and the cathode electrode 3 upward by a height corresponding to the amount of movement of the cathode electrode, as indicated by the solid line in FIG. As a result, the curvature of the second discharge surface 25 is adjusted, and the distance between the electrodes between the second discharge surface 25 and the first discharge surface 24 is kept constant.

  On the other hand, a two-dot chain line in FIG. 6 shows a state in which the electrode holder 34 and the cathode electrode 3 are translated downward with respect to FIG. As shown by the two-dot chain line in FIG. 6, in this case as well, the distance between the electrodes can be kept constant over the substrate transport direction simply by moving the electrode holder 34 and the cathode electrode 3 downward in parallel. Can not. That is, the distance between the electrodes gradually decreases from the central portion in the substrate transport direction on the second discharge surface 25 toward both end portions in the substrate transport direction.

  Therefore, as shown by the solid line in FIG. 6, the curvature adjusting mechanism 46 is lowered by a height corresponding to the amount of movement of the cathode electrode, and accordingly, both ends of the electrode holder 34 and the cathode electrode 3 are lowered elastically. Let As a result, the curvature of the second discharge surface 25 is adjusted, and the distance between the electrodes between the second discharge surface 25 and the first discharge surface 24 is kept constant.

-Effect of Embodiment 1-
Therefore, according to the first embodiment, by providing the inter-electrode distance adjusting mechanism 45, the distance between the anode electrode 6 and the cathode electrode 3 can be adjusted according to the characteristics of the film to be formed. Further, at this time, since the curvature of the second discharge surface 25 of the cathode electrode 3 can be finely adjusted by the curvature adjusting mechanism 46, the distance between the first discharge surface 24 and the second discharge surface 25 can be kept constant. Therefore, the interelectrode distance can be used as a film formation parameter, and the interelectrode distance, which is an important parameter, can be controlled even in the plasma CVD apparatus having the curved cathode electrode 3 and the curved anode electrode 6. Become. As a result, the curvature of the cathode electrode 3 can be finely adjusted so that the distance between the electrodes can be kept constant over the entire surface of the second discharge surface 25. Therefore, a uniform and high-quality CVD film can be formed over the entire surface of the second discharge surface 25. can do.

<< Reference Example 4 of the Invention >>
7 and 8 show a reference example 4 of the plasma CVD apparatus S according to the present invention. This embodiment is characterized by the structure of the cathode electrode 3.

The cathode electrode 3 of this reference example is configured as an assembly of a plurality of unit members 48. That is, the unit member 48 is formed of a plate-like member having a trapezoidal cross section as shown in an enlarged view of FIG. 8 in which the cathode electrode 3 is divided into a plurality of planes including the axis of the anode electrode 6. Each unit member 48 has a first flat surface portion 49 that constitutes the second discharge surface 25. A plurality of gas inlets 2 are formed in the first plane portion 49 side by side in the length direction of the unit member 48 (length direction of the anode electrode 6). Further, a second flat surface portion 50 is formed on the back side of the first flat surface portion 49. The 1st plane part 49 and the 2nd plane part 50 are formed in the mutually parallel plane.

  Here, for example, the unit member 48 has a height of about 10 mm, the width of the first plane part 49 (that is, the width of the upper side) is about 10 mm, and the width of the second plane part 50 (that is, the lower side). The width is about 11 mm and the length is about 200 mm. The inner diameter of the gas inlet 2 is about 0.5 mm.

And the cathode electrode 3 which has the surface of a shower plate structure is formed by performing the alumite process after connecting the said several unit member 48. As shown in FIG. Since the width of the unit member 48 is about 10 mm and the length is about 200 mm and it is formed in a fairly long and narrow strip shape, the discharge was confirmed by argon gas after the cathode electrode 3 was manufactured, but no discharge unevenness occurred. It was. In addition, the second discharge surface 25 of the cathode electrode 3 according to the present reference example is formed along the first discharge surface 24 of the anode electrode 6 as a whole by connecting and connecting the first flat portions 49 continuously. Since it is curved, a high-quality film can be formed as in the above embodiments and reference examples.

-Effects of Reference Example 4-
Therefore, according to the reference example 4 , the cathode electrode 3 is constituted by the plurality of unit members 48, and the gas introduction port 2 is formed in the first plane portion 49 parallel to the second plane portion 50. Compared with the case where the surface of 3 is a curved surface, the gas inlet 2 can be formed easily and with high accuracy, and the manufacturing cost can be reduced.

  In addition, the curvature of the cathode electrode 3 can produce the cathode electrode 3 of various curvature easily by changing the cross-sectional shape of each unit member 48. FIG.

<< Embodiment 2 of the Invention >>
9 and 10 show Embodiment 2 of the plasma CVD apparatus S according to the present invention.

  In the plasma CVD apparatus S of each of the embodiments described above, one cathode electrode 3 is provided and one kind of film is formed, whereas in the plasma CVD apparatus S of the present embodiment, three cathode electrodes 11 and 12 are formed. , 13, and is configured to continuously form a three-layer film.

  The cathode electrodes 11, 12, and 13 are constituted by the first cathode electrode 11, the second cathode electrode 12, and the third cathode electrode 13, and are arranged along the first discharge surface 24 that forms the surface of the anode electrode 6. They are arranged in this order in the transport direction. Each of the cathode electrodes 11, 12, and 13 has the same configuration as the cathode electrode 3 described in the embodiment. That is, each of the cathode electrodes 11, 12, 13 has a second discharge surface 25 formed along the first discharge surface 24 of the anode electrode 6.

  As shown in FIG. 9, the first cathode electrode 11 is installed on the side wall of the reaction chamber 1 and is connected to a power supply box 71. The second cathode electrode 12 is installed on the bottom wall of the reaction chamber 1 and is connected to a power supply box 72. The third cathode electrode 13 is installed on the side wall of the reaction chamber 1 so as to face the first cathode electrode 11 with the anode electrode 6 interposed therebetween, and a power supply box 73 is connected thereto.

  Thus, processing spaces 75, 76, and 77 in which plasma CVD processing is performed are formed between the second discharge surfaces of the cathode electrodes 11, 12, and 13 and the first discharge surface 24 of the anode electrode 6, respectively. ing. The processing spaces 75, 76, 77 are partitioned by partition members 81, 82, 83, 84 that are arranged with a predetermined gap with respect to the first discharge surface 24 of the anode electrode 6.

  That is, the processing space 75 between the first cathode electrode 11 and the anode electrode 6 includes a partition member 81 disposed between the first cathode electrode 11 and the partition plate 55, the first cathode electrode 11, and the second cathode electrode 11. It is partitioned by a partition member 82 arranged between the cathode electrode 12. Further, the processing space 76 between the second cathode electrode 12 and the anode electrode 6 includes a partition member 82 disposed between the second cathode electrode 12 and the first cathode electrode 11, the second cathode electrode 12, and the first cathode electrode 12. It is partitioned by a partition member 83 disposed between the three cathode electrodes 13. The processing space 77 between the third cathode electrode 13 and the anode electrode 6 includes a partition member 83 disposed between the third cathode electrode 13 and the second cathode electrode 12, the third cathode electrode 13, and the above-described It is partitioned by a partition member 84 disposed between the partition plates 55.

  The partition members 81, 82, 83, 84 have curved surfaces 85, 86, 87, 88 that are curved along the first discharge surface 24 of the anode electrode 6, respectively. The gaps for allowing the flexible substrate 14 to pass are formed between 87 and 88 and the surface of the anode electrode 6.

  The gap between the partition member 81 and the surface of the anode electrode 6 is defined to be about 2.0 mm, for example. In addition, the gap between the partition member 82 and the surface of the anode electrode 6 is defined as, for example, about 0.5 mm, and the gap between the partition member 83 and the surface of the anode electrode 6 is defined as, for example, about 0.2 mm. Furthermore, the gap between the partition member 84 and the surface of the anode electrode 6 is regulated to about 1.0 mm, for example.

  Thus, the load lock area 51 of the reaction chamber 1 is partitioned above the partition plate 55, while the intermediate area 53 is partitioned by the partition members 81 and 84, the partition plate 55, and the surface of the anode electrode 6. ing. The film formation area 52 is configured by a space other than the load lock area 51 and the intermediate area 53 and accommodates the cathode electrodes 11, 12, and 13.

  Further, as shown in FIG. 9, a gas discharge portion 91 for discharging waste gas flowing out from the processing space 75 and an exhaust gas flowing out from the processing space 77 are discharged into the film forming area 52 of the reaction chamber 1. The gas discharge part 92 is provided. Further, the reaction chamber 1 is provided with gas discharge portions 93 and 94. The gas discharge unit 93 is configured to discharge the waste gas flowing out from the processing space 75 and the waste gas flowing out from the processing space 76. On the other hand, the gas discharge unit 94 is configured to discharge the waste gas flowing out from the processing space 77 and the waste gas flowing out from the processing space 76.

  Although not shown, a gas discharge part for reducing the pressure in the intermediate area 53 is provided on the side wall of the reaction chamber 1. For the sake of simplicity, the cooling roller and the heating roller are omitted, but it is needless to say that these may be provided as in the second embodiment.

-Film formation method-
Next, regarding the film forming method using the plasma CVD apparatus S of the present embodiment, three layers of SiNx film, a-Si film, and n ⁺ -Si film (n-type doped a-Si) generally used for thin film transistors such as liquid crystal displays are used. A case where the films are continuously formed will be described as an example. The three-layer continuous film formation is generally performed in a vacuum because the interface between the films is known to have a large influence on the characteristics of the thin film transistor.

  First, the flexible substrate 14 unwound from the unwinding roller 41 passes through the gap between the partition members 81 and moves to the processing space 75 where the SiNx film is formed. In the processing space 75, a mixed gas of monosilane, ammonia, and nitrogen gas, which are reactive gases, is introduced from the gas inlet 2 of the first cathode electrode 11, and a voltage is applied from the power supply box 71 to the first cathode electrode 11. A plasma discharge is generated. As a result, a SiNx film having a thickness of 3000 mm is formed on the flexible substrate 14. Thereafter, the flexible substrate 14 passes through the gap between the partition members 82 and moves to the processing space 76 for forming the a-Si film.

In the processing space 76, a mixed gas of monosilane and hydrogen gas, which are reaction gases, is introduced from the gas inlet 2 of the second cathode electrode 12, and a voltage is applied from the power source box 72 to the second cathode electrode 12 to cause plasma discharge. generate. As a result, an a-Si film is formed on the SiNx film to a thickness of 1500 mm. Thereafter, the flexible substrate 14 passes through the gap between the partition members 83 and moves to the processing space 77 for forming the n ⁺ -Si film.

In the processing space 77, a mixed gas of phosphine, monosilane, and hydrogen gas as reaction gases is introduced from the gas inlet 2 of the third cathode electrode 13, and a voltage is applied from the power supply box 73 to the third cathode electrode 13. A plasma discharge is generated. Thus, an n ⁺ -Si film having a thickness of 500 mm is formed on the a-Si film. Thereafter, the flexible substrate 14 passes through the gap between the partition members 84, moves to the load lock area 51, and is taken up by the take-up roller 42. Through the above steps, three layers of the SiNx film, the a-Si film, and the n ⁺ -Si film can be continuously formed on the flexible substrate 14.

-Effect of Embodiment 2-
Therefore, according to the second embodiment , by arranging the three cathode electrodes 11, 12, and 13 along the first discharge surface 24 of the anode electrode 6, three kinds of films can be obtained by taking advantage of the roller-to-roller system. Can be continuously formed. In addition, the processing spaces 75, 76, 77 are partitioned by partition members 81, 82, 83, 84, and the first discharge surface 24 of the anode electrode 6 is separated from the partition members 81, 82, 83, 84. Since the curved surfaces 85, 86, 87 that are curved along the first discharge surface 24 are formed so as to face each other, the airtightness between the processing spaces 75, 76, 77 can be improved. That is, since the movement of foreign substances such as reaction gas between the adjacent processing spaces 75, 76, 77 can be suppressed, the quality of the formed film can be improved. As a result, deterioration of the characteristics of the thin film transistor can be prevented and a high quality device can be manufactured.

  Further, by increasing the cathode electrode along the curved anode electrode 6, a plurality of types of film formation can be performed continuously, so that a plurality of linear films can be formed linearly as in a conventional parallel plane plasma CVD apparatus. It is not necessary to add a cathode electrode. That is, according to the present embodiment, even if a plurality of cathode electrodes are provided, the entire apparatus does not become long in the horizontal direction, so that the installation area of the apparatus can be reduced.

  Further, by forming the ratio of the electrode lengths of the cathode electrodes 11, 12, and 13 by the ratio of the required film thickness / deposition rate of each thin film to be formed, different kinds of thin films can be optimally and continuously formed. .

  By the way, when the different types of thin films are continuously formed on the continuously connected substrates as in the present embodiment, the most serious problem is the dissimilarity from the adjacent processing spaces 75, 76, 77. This is gas contamination. In particular, in the case of the present embodiment, ammonia gas and nitrogen gas used for forming the SiNx film are transferred from the processing space 75 to the processing space 76 for forming the a-Si film even at a ppm (1 / 1,000,000) level. If mixed, a normal a-Si film cannot be formed.

  In order to prevent this contamination, methods such as evacuating the gaps between the processing spaces 75, 76, and 77 to change the flow or providing a labyrinth seal can be considered. The labyrinth seal is designed to improve the sealing performance by reducing the so-called clearance conductance by narrowing the gap interval or increasing the seal length. In this case, the conductance of the gap decreases in inverse proportion to the square of the seal length but decreases in inverse proportion to the square of the gap interval, and the direction of the seal length is in the length direction of the cathode electrode. For this reason, if the seal length is excessively large, the film forming area becomes narrow. Therefore, it is desirable to reduce not the seal length but the gap interval as much as possible.

  However, in the conventional parallel plane plasma CVD apparatus to which the roller-to-roller system is applied, it is inevitable that the flexible substrate is warped or undulated, and it is limited to narrow the gap interval to about 3.0 mm at most. there were.

  On the other hand, in this embodiment, since the flexible substrate 14 is wound around the convex curved surface of the anode electrode 6, warping and undulation of the flexible substrate 14 can be prevented. That is, the gap between the partition members 82 can be formed very narrow to about 0.5 mm. As a result, since the gap can be reduced and the sealing performance can be improved, when different types of thin films are continuously formed on a continuous substrate, different types from adjacent processing spaces 75, 76, 77 can be obtained. Deterioration of film quality due to contamination of reaction gas and residual gas can be prevented.

  10, for example, a passage 90 communicating with the gap may be formed in the partition member 82, and the inside of the passage 90 may be decompressed by a vacuum pump or the like.

  That is, in the processing space 75 where film formation is performed under relatively high pressure conditions, the reaction is completed and residual gas 95 is generated. On the other hand, in the processing space 76 where film formation is performed under relatively low pressure conditions, the reaction is completed and residual gas 96 is generated. As described above, between the adjacent processing chambers 75 and 76 can be sealed in an airtight manner without the passage 90, but by providing the passage 90 and depressurizing the interior, Even if a part of the residual gas 95 in the processing space 75 passes through the gap as the contamination gas and moves to the processing space 76 side, the contamination gas is discharged through the passage 90. Therefore, it is possible to reliably prevent contamination by providing the passage 90 to reduce the pressure.

<< Other Embodiments >>
In each of the above embodiments and reference examples, the first discharge surface 24 of the anode electrode 6 is formed to be curved in a convex shape, while the second discharge surface 25 of the cathode electrodes 3 is formed to be curved in a concave shape. The present invention is not limited to this, and the reverse configuration is adopted, in which the first discharge surface 24 of the anode electrode 6 is formed in a concave shape, while the second discharge surface 25 of the cathode electrodes 3,. You may do it.

  In this case, a curvature adjusting mechanism 46 that adjusts the curvature of the first discharge surface 24 of the anode electrode 6 based on the distance between the anode electrode 6 and the cathode electrode 3 adjusted by the interelectrode distance adjusting mechanism 45 is provided. You may make it prepare.

  As described above, the present invention is useful for a plasma CVD apparatus that forms a film on a flexible substrate such as a plastic or metal wheel by a plasma CVD method.

It is sectional drawing which shows the plasma CVD apparatus of the reference example 1 typically. It is sectional drawing which shows the plasma CVD apparatus of the reference example 2 typically. It is sectional drawing which shows the principal part of the plasma CVD apparatus of the reference example 3. 2 is a cross-sectional view showing an anode electrode and a cathode electrode of Embodiment 1. FIG. It is explanatory drawing which shows the state by which the distance between electrodes and the curvature of the cathode electrode were adjusted small. It is explanatory drawing which shows the state by which the distance between electrodes and the curvature of the cathode electrode were adjusted large. 10 is a side view showing a cathode electrode of Reference Example 4. FIG. It is a side view which expands and shows a unit member. It is sectional drawing which shows the plasma CVD apparatus of Embodiment 2 typically. It is sectional drawing which expands and shows a partition member. It is sectional drawing which shows the conventional parallel plane type plasma CVD apparatus. It is a graph which shows the relationship between the distance between electrodes, and film | membrane stress.

S Plasma CVD equipment 1 Reaction chamber
2 Gas inlet (gas inlet)
3 Cathode electrode (second electrode)
5 Resistance heater (heating mechanism)
6 Anode electrode (first electrode, transport mechanism)
11 First cathode electrode
12 Second cathode electrode
13 Third cathode electrode
14 Flexible substrate
19 Transport mechanism
24 First discharge surface
25 Second discharge surface
41 Unwinding roller (conveyance mechanism)
42 Winding roller (conveyance mechanism)
45 Electrode distance adjustment mechanism
46 Curvature adjustment mechanism
48 unit parts
49 1st plane part
65 Heating roller (heating mechanism, transport mechanism)
66 Cooling roller (cooling mechanism, transport mechanism)
81, 82, 83, 84 Partition member
85, 86, 87, 88 Curved surface

Claims (15)

A reaction chamber;
A gas introduction part for introducing a reaction gas into the reaction chamber;
A first electrode and a second electrode provided inside the reaction chamber and generating a plasma discharge between each other;
A plasma CVD apparatus comprising a transport mechanism for transporting a flexible substrate between the first electrode and the second electrode, and performing plasma CVD treatment on the flexible substrate,
The first electrode has a curved first discharge surface, while the second electrode has a second discharge surface curved along the first discharge surface;
An inter-electrode distance adjusting mechanism for adjusting a distance between the first electrode and the second electrode;
A curvature adjusting mechanism that adjusts the curvature of the first discharge surface or the second discharge surface based on the distance between the first electrode and the second electrode adjusted by the inter-electrode distance adjustment mechanism. A characteristic plasma CVD apparatus. In claim 1,
The plasma CVD apparatus, wherein the transport mechanism includes the first electrode, and is configured to transport the flexible substrate in a state of being wound around the first discharge surface of the first electrode. In claim 1,
The plasma CVD apparatus, wherein the curvature adjusting mechanism is constituted by a piezoelectric element. In claim 1,
The plasma CVD apparatus, wherein the first discharge surface of the first electrode is formed in a convex shape, and the second discharge surface of the second electrode is formed in a concave shape . In claim 1,
The plasma CVD apparatus, wherein the reaction chamber is provided with a cooling mechanism for cooling the flexible substrate subjected to the plasma CVD process. In claim 5 ,
The plasma CVD apparatus, wherein the cooling mechanism includes a cooling roller that constitutes a part of the transport mechanism. In claim 6 ,
The plasma CVD apparatus, wherein the cooling roller is configured to support a back surface of the flexible substrate on which the plasma CVD process is not performed. In claim 1,
A plasma CVD apparatus, wherein the reaction chamber is provided with a heating mechanism for heating a flexible substrate to be plasma CVD processed. In claim 8 ,
The plasma CVD apparatus, wherein the heating mechanism includes a heating roller that constitutes a part of the transport mechanism. In claim 9 ,
The said heating roller supports the back surface of the side in which the plasma CVD process in the said flexible substrate is not performed, The plasma CVD apparatus characterized by the above-mentioned. In claim 1,
The transport mechanism cools the unwinding roller that unwinds the flexible substrate, the heating roller that heats and transports the flexible substrate unwound from the unwinding roller, and the flexible substrate that has been subjected to plasma CVD processing. A cooling roller that conveys, and a winding roller that winds the flexible substrate cooled by the cooling roller;
The unwinding roller, the heating roller, the cooling roller, and the winding roller are arranged so that the respective rotation axes are parallel,
The unwinding roller is disposed closer to the cooling roller than the heating roller,
The plasma CVD apparatus, wherein the winding roller is disposed closer to the heating roller than the cooling roller. In claim 11 ,
The plasma CVD apparatus, wherein the unwinding roller and the take-up roller are arranged in a vertical difference. In claim 1,
The plasma CVD apparatus, wherein a plurality of the second electrodes are provided along the first discharge surface of the first electrode. In claim 13 ,
Each processing space that is formed between each second electrode and the first electrode and in which plasma CVD processing is performed is arranged with a predetermined gap with respect to the first discharge surface of the first electrode. Partitioned by a partition member,
The plasma CVD apparatus, wherein the partition member has a curved surface that curves along the first discharge surface. In claim 1,
The plasma CVD apparatus, wherein the first electrode is an anode electrode, and the second electrode is a cathode electrode.

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