JP4631857B2 - Heat source system for high temperature cold water application - Google Patents

Description

  The present invention relates to a heat source system for applying high-temperature cold water, and in particular, to an air conditioning system that uses a large amount of outside air and maintains a predetermined temperature and humidity in a clean room of a manufacturing plant for semiconductors, liquid crystals, etc. that generate large amounts of heat from internal equipment In addition, the present invention relates to a heat source system for high-temperature cold water that can save energy in an air-conditioning system.

  Generally, in a manufacturing factory for semiconductors, liquid crystals, etc. that use a large amount of outside air, outside air is taken in from outside and cooled to a predetermined temperature by a cooling coil for outside air treatment, and this cooled air and air circulating in the room Air conditioning system that mixes and supplies to the clean room via the fan filter unit, circulates inside the clean room, discharges it to the outside of the clean room, circulates around the clean room, cools it with a dry coil, and then feeds it into the clean room again Is being used.

  For example, as shown in FIG. 5, a conventional air conditioning system includes a refrigerator 21 that produces cold water, a dry coil 22 that is connected in parallel with cold water supplied from the refrigerator 21 as a cold heat source, and a cooling coil for external air treatment. 24, an outside air processing air conditioner 23, and a production facility 25. For example, 6 ° C. cold water is supplied from the refrigerator 21 through the dry coil 22, the outside air processing cooling coil 24, and the heat exchanger. 25, the dry coil 22 is cooled using this cold water as a cooling heat source, the outside air taken in from the outside is cooled by the outside air processing cooling coil 24, and the production facility 25 is further cooled.

  By the way, in a semiconductor manufacturing plant or the like in which the air conditioning system as described above is used, the outside air load out of all the cooling loads occupies 35 to 45% of the whole, and about 2/3 of them is the latent heat load. In addition, about 2/3 to 4/5 of the outside air load can be treated by a cooling coil for treating outside air using high-temperature cold water of about 12 ° C. as a cold heat source. Therefore, only about 1/5 to 1/3 of the outside air load (7 to 15% of the total cooling load) should use 6 ° C. cold water as a cooling heat source, and other cooling loads. Can be sufficiently treated with high-temperature cold water at 12 to 20 ° C. On the other hand, in the example shown in FIG. 5, since cold water of about 6 ° C. is used as a cold heat source for all cooling loads, the results of the cold water production means are compared with the case of high temperature cold water of 12-20 ° C. The coefficient is lowered, and as a result, extra energy is consumed.

On the other hand, Patent Document 1 is configured to increase the cooling / heating capacity of the existing air conditioner by adding a water-cooled heat pump without changing the size of the piping in front of or behind the air conditioner of the existing air conditioning system. Things have been proposed.
JP 2005-69552 A

  However, no consideration is given to energy saving as a whole system. The air conditioning system described in Patent Document 1 is intended to renew buildings and facilities in order to improve the cooling and heating capacity.

 The present invention has been made in view of the above-described conventional problems, and when applied to an air conditioning system in a clean room of a manufacturing factory for semiconductors, liquid crystals, etc., does not consume more energy than necessary and saves energy. An object of the present invention is to provide a heat source system for high-temperature chilled water that can reduce the cost and resources.

The heat source system for high-temperature cold water application of the present invention is connected in series with a plurality of refrigerators connected in series for producing high-temperature cold water at a predetermined temperature, and cooled with the high-temperature cold water supplied from the plurality of refrigerators as a cold heat source. Among the plurality of cooling objects, the cooling object on the most upstream side with respect to the flow of the high-temperature cold water is a dry coil, and the cooling water used in the plurality of cooling objects is the plurality of cooling objects. It is characterized by returning to the most upstream refrigerator among the refrigerators.
Also, the heat source system for high temperature cold water application according to the present invention includes a plurality of serially connected refrigerators for producing high temperature cold water at a predetermined temperature, and a series that is cooled using the high temperature cold water supplied from the plurality of refrigerators as a cold heat source. A plurality of connected cooling objects, and among the plurality of cooling objects, the cooling object on the most upstream side with respect to the flow of the high-temperature cold water is an outside air processing cooling coil that is cooled using the high-temperature cold water as a cold heat source. A cooling means for cooling the outside air cooled by the outside-air treatment cooling coil without using the high-temperature cold water as a cold heat source, and the cold water used in the plurality of objects to be cooled is It is characterized by returning to the most upstream refrigerator among the plurality of refrigerators .

  According to the present invention, since the temperature of the high-temperature cold water on the outlet side of the refrigerator can be made higher than before, the coefficient of performance of the cold water production means can be greatly increased, and the power consumption can be greatly reduced. Can do.

Hereinafter, an embodiment of an air conditioning system of the present invention will be described with reference to the drawings.
FIG. 1 shows a first embodiment of a heat source system for high-temperature cold water application according to the present invention. This heat-source system 1 for high-temperature cold water application is located inside a building such as a semiconductor or liquid crystal manufacturing factory. The present invention is applied to cooling of a provided clean room and is effective for an air conditioning system that keeps the inside of a clean room at predetermined conditions (predetermined temperature and humidity).

  The heat source system 1 for high temperature cold water application according to the present embodiment includes a cold water production means 2 for producing high temperature cold water at a predetermined temperature, and the high temperature cold water supplied from the cold water production means 2 as a cold heat source, and the air taken in to a predetermined temperature. A cooling coil 7 for cooling the outside air to be cooled, a first cooling object 5 that is cooled using the high-temperature cold water supplied from the cold water production means 2 as a cooling heat source, and the high-temperature cold water used in the first cooling object 5 as a heat source water, The water heat source heat pump 8 that further cools the outside air cooled by the outside air treatment cooling coil 7 is mixed with the high temperature cold water used in the outside air treatment cooling coil 7 and the high temperature cold water used in the water heat source heat pump 8. A second cooling target 10 that is cooled using the mixed high-temperature cold water as a cold heat source, and the high-temperature cold water used in the second cooling target 10 and the mixed high-temperature cold water are returned to the cold-water production means 2. It is configured to.

  That is, in the heat source system 1 applied with high-temperature cold water according to the present embodiment, the cold water production means 2 for producing cold water has a configuration in which the first refrigerator 3 and the second refrigerator 4 are connected in series. The cooling target to be cooled using the cold water as the heat source water is the first cooling target dry coil 5 and the second cooling means 10 connected in series, and the first cooling target dry coil 5 includes The outside air processing cooling coil 7 is connected in parallel.

The cold water production means 2 is configured by connecting a first refrigerator 3 and a second refrigerator 4 in series, and the temperature (T ₀ ) of high-temperature cold water on the inlet side of the first refrigerator 3 is, for example, The high temperature cold water having the temperature T ₀ (22 ° C.) is cooled by the first refrigerator 3 to be the high temperature cold water having a predetermined temperature (T ₁ = 17 ° C.). Then, high-temperature cold water having this temperature (T ₁ = 17 ° C.) is supplied to the second refrigerator 4 and cooled by the second refrigerator 4 to obtain high-temperature cold water having a predetermined temperature (T ₂ = 12 ° C.). High-temperature cold water having a temperature (T ₂ = 12 ° C.) is supplied to the outside air processing cooling coil 7 and the first cooling object 5 through the pipe 15. In addition, you may comprise the cold water manufacturing means 2 by three or more refrigerators.

The first cooling object 5 is the dry coil 5 and is used for cooling the sensible heat of the air circulating around the clean room. The dry coil 5 uses a high-temperature cold water having a temperature (T ₂ = 12 ° C.) supplied from the second refrigerator 4 as a cold heat source, and between this cold heat source and the air circulating around the clean room acting on the dry coil 5. The air is cooled by exchanging heat. In the dry coil 5, the air is cooled to a temperature that does not cause condensation. The high-temperature cold water used in the dry coil 5 becomes high-temperature cold water having a predetermined temperature (T ₃ = 15 ° C.), is discharged into the pipe 15, and is supplied to the water heat source heat pump 8 through the pipe 15.

The outside air treatment cooling coil 7 uses high temperature cold water supplied from the second refrigerator 4 at a predetermined temperature (T ₂ = 12 ° C.) as a cold heat source, and performs heat exchange between the high temperature cold water and outside air taken from the outside. As a result, the outside air is cooled to a predetermined temperature. In this case, since the outside air processing cooling coil 7 cannot cool the outside air to the required condition in the clean room at a time, the air cooled by the outside air processing cooling coil 7 is directly used for a water heat source heat pump described later. Further cooling is performed by the expansion coil 9, and the cooling is performed to a required temperature. The high temperature cold water used in the outside air treatment cooling coil 7 is discharged into the pipe 15 as high temperature cold water at a predetermined temperature (T ₄ = 22 ° C.).

The water heat source heat pump 8 uses high-temperature cold water (T ₃ = 15 ° C.) from the dry coil 5 as heat source water. The water heat source heat pump 8 is integrally provided with a direct expansion coil 9 connected to the outside air processing cooling coil 7. The refrigerant circulating in the direct expansion coil 9 and the air cooled by the outside air processing cooling coil 7 are provided. The air from the outside air processing cooling coil 7 is further cooled to a temperature required in the clean room. In the water heat source heat pump 8, the high temperature cold water (T ₃ = 15 ° C.) from the dry coil 5 is used as the heat source water, and the heat that is directly circulated through the expansion coil 9 is exhausted to the high temperature cold water to be used in the water heat source heat pump 8. The high-temperature cold water thus produced becomes high-temperature cold water at a predetermined temperature (T ₅ = about 16.5 ° C.) and is discharged into the pipe 15.

The high temperature cold water (T ₄ = 22 ° C.) discharged from the outside air processing cooling coil 7 and the high temperature cold water (T ₅ = about 16.5 ° C.) discharged from the water heat source heat pump 8 are mixed in the pipe 15. It is high-temperature cold water of a predetermined temperature (T ₆ = about 18.5 ° C.), and heat exchange is performed between the high-temperature cold water and the high-temperature cold water circulating through the second cooling target 10 via the heat exchanger 18, The high-temperature cold water circulating through the second cooling object 10 is cooled, and the production equipment 10 that is the second cooling object 10 is cooled to a predetermined temperature.

The high temperature cold water used for cooling the second cooling object 10 through the heat exchanger 18 is mixed with the high temperature cold water (T ₆ = about 18.5 ° C.), and a predetermined temperature (T ₇ = 22 ° C.). Is returned to the inlet side of the first refrigerator 3 through the pipe 15.

  FIG. 2 shows a second embodiment of the heat source system for high-temperature cold water application according to the present invention. The heat source system 1 for high-temperature cold water application directly supplies the high-temperature cold water to the second cooling object 10. The bypass circuit 13 is provided between the inlet side and the outlet side of the high-temperature cold water of the second cooling object 10, and the other configurations are the same as those shown in the first embodiment. These parts are denoted by the same reference numerals, and detailed description thereof will be omitted.

 A valve 14 that opens and closes the bypass circuit 13 is provided in the middle of the bypass circuit 13, and the high-temperature cold water used in the second cooling target 10 passes through the bypass circuit 13 by opening the valve 14 as necessary. Circulate.

 In the second embodiment, the heat exchanger 18 of the first embodiment is omitted, but in order to prevent high-temperature cold water from being supplied to the production facility 10 that requires high cleanliness, FIG. 1 may be through a heat exchanger 18,

FIG. 3 shows an example in which the heat source system 1 to which high-temperature cold water is applied according to the present invention is applied to an air conditioning system in a clean room of a semiconductor manufacturing factory.
That is, in this application example, the clean room 31 is provided inside the building 30. Further, under the floor of the building 30, an outside air processing cooling coil 7, a water heat source heat pump 8, and a direct expansion coil 9 are provided, and a dry coil 5 is provided in a portion adjacent to the clean room 31 inside the building 30, Inside the clean room 31, the production facility 10 as the second cooling object 10 is provided, and a fan filter unit 32 for supplying air into the clean room 31 is provided above the clean room 31.

  Then, by operating the air conditioning system and operating the outside air processing cooling coil 7, the water heat source heat pump 8, and the direct expansion coil 9, outside air is taken into the floor of the building 30 from the outside, and this outside air is cooled for outside air processing. The air is cooled by the coil 7 to be a predetermined temperature air, and this air is further cooled by the water heat source heat pump 8 to be the air having a predetermined temperature, and this air is jetted into the building 30 from under the floor. It circulates inside and is supplied to the inside of the clean room 31 through the fan filter unit 32, circulates inside the clean room 31 to cool the inside of the clean room 31, and then is discharged outside the clean room 31. And the air discharged | emitted out of the clean room 31 circulates around the clean room 31, is cooled by the dry coil 5, and is supplied in the clean room 31 again.

In the heat source system 1 applied with high-temperature cold water according to the present invention configured as described above, for example, the temperature of the high-temperature cold water on the inlet side of the first refrigerator 3 is T ₀ = T ₇ = 22 ° C., and the temperature on the outlet side The temperature at the inlet side of the second refrigerator 4 is set to T ₁ = 17 ° C., and the temperature at the outlet side of the second refrigerator 4 is set to T ₂ = 12 ° C.

Generally, the coefficient of performance of a refrigerator improves as the cold water temperature increases. Therefore, according to the present embodiment, since the cold water temperatures on the inlet side and the outlet side of the refrigerators 3 and 4 are higher than the conventional 6 ° C., the coefficient of performance of the refrigerators 3 and 4 is increased, Power consumption can be reduced. In particular, since the temperature T ₀ of the high-temperature cold water immediately before the first refrigerator 3 is increased, the first refrigerator 3 can obtain a higher coefficient of performance. Moreover, since the amount of the evaporating water in the cooling tower connected to the refrigerators 3 and 4 can be suppressed and the amount of makeup water can be reduced, water resources can be saved.

FIG. 4 shows an example of the relationship between the chilled water temperature of a refrigerator having a refrigeration capacity of 1000 USRT, the power consumption of the refrigerator, and the coefficient of performance. In FIG. 4, for example, when viewing the second stage from the top, the cold water temperature on the inlet side of the refrigerator is 11 ° C., the temperature on the outlet side is 6 ° C., the power consumption is 582 kW, and the coefficient of performance (COP) is 6.04. Show. From the relationship shown in FIG. 4, it can be seen that the coefficient of performance is better when the cold water temperature on the outlet side of the refrigerator is increased. On the other hand, in the present embodiment, the temperature of the high-temperature cold water on the inlet side of the first refrigerator 3 is T ₀ = T ₇ = 22 ° C., and the temperature on the outlet side (the temperature on the inlet side of the second refrigerator 4) is T ₁ = 17 ° C., and the temperature on the outlet side of the second refrigerator 4 is set to T ₂ = 12 ° C. In FIG. 4, for example, when the lowest data (20/15) is used, the power consumption is 444 kW. Also, if the fourth stage (17/12) from the bottom of FIG. 4 is used, the power consumption is 497 kW, so the total total power consumption is 444 + 497 = 941 kW in total. Since the conventional one uses 6 ° C. cold water, using the second data from the top (11/6), the power consumption is 582 × 2 = 1164 (kW), and the difference is 1164. −941 = 223 (kW), which is energy saving.

  In the present invention, since the high-temperature cold water is used in cascade, that is, the high-temperature cold water used in the dry coil 5 is reused in the water heat source heat pump 8 and the high-temperature cold water used in the outside-air treatment cooling coil 7 is used. And the high-temperature cold water used in the water heat source heat pump 8 are reused in the production facility 10, so that the first refrigerator 3 of the high-temperature cold water and The temperature difference between the inlet side and the outlet side of the second refrigerator 4 can be increased. Accordingly, the amount of high-temperature cold water circulating water can be greatly reduced, so that the diameter of the pipe 15 can be reduced and the capacity of the pump 16 for circulating the high-temperature cold water can be reduced, thereby reducing the cost of the piping system. Can be planned. As a result, the running cost can be greatly reduced without offsetting the increase in the cost of adding the water heat source heat pump 8 and increasing the initial cost.

Furthermore, since the temperature of the high-temperature cold water on the inlet side of the first refrigerator 3 is T ₀ = T ₇ = 22 ° C. and the temperature on the outlet side is T ₁ = 17 ° C., the first refrigerator 3 consumes very much power. It is possible to use a small energy-saving chilled water supply device, for example, a chilled tower (trade name; Hitachi Metals, Ltd.), and further energy saving can be achieved.

  In the above description, two cooling targets are provided as targets for cascade use of high-temperature cold water. However, three or more cooling targets may be provided, and in this case, the same effects can be obtained. .

It is the block diagram which showed the 1st form of the heat source system of the high temperature cold water application by this invention. It is the block diagram which showed the 2nd form of the heat source system of the high temperature cold water application by this invention. It is explanatory drawing which showed the example of application of the heat source system of the high temperature cold water application by this invention. It is explanatory drawing which showed the relationship between cold water temperature, the power consumption of a refrigerator, and a coefficient of performance. It is the block diagram which showed an example of the conventional circulation system of cold water.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Heat source system applied with high temperature cold water 2 Chilled water production means 3 First refrigerator 4 Second refrigerator 5 First cooling object (dry coil) 7 Cooling coil for outside air treatment 8 Water heat source heat pump 9 Direct expansion coil 10 Second cooling object ( Production equipment) 12 Water filter 15 Piping 16 Pump 18 Heat exchanger 21 Refrigerator 22 Dry coil 23 Outside air treatment air conditioner 24 Outside air treatment cooling coil 25 Production equipment 30 Building 31 Clean room 32 Fan filter unit

Claims (2)

A plurality of refrigerators connected in series for producing high-temperature cold water at a predetermined temperature;
A plurality of serially connected cooling objects that are cooled by using high-temperature cold water supplied from the plurality of refrigerators as a cold heat source, and
Among the plurality of cooling objects, the cooling object on the most upstream side with respect to the flow of the high-temperature cold water is a dry coil,
A heat source system for applying high-temperature cold water, wherein the cold water used in the plurality of objects to be cooled is returned to the most upstream refrigerator among the plurality of refrigerators. A plurality of refrigerators connected in series for producing high-temperature cold water at a predetermined temperature;
A plurality of serially connected cooling objects that are cooled by using high-temperature cold water supplied from the plurality of refrigerators as a cold heat source, and
Among the plurality of cooling targets, the cooling target on the most upstream side with respect to the flow of the high temperature cold water is an outside air treatment cooling coil that is cooled using the high temperature cold water as a cooling heat source, and an outside air cooled by the outside air treatment cooling coil. A cooling means for cooling the high-temperature cold water without using the high-temperature cold water as a cold heat source,
A heat source system for applying high-temperature cold water, wherein the cold water used in the plurality of objects to be cooled is returned to the most upstream refrigerator among the plurality of refrigerators .

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