JP4601939B2 - Airtight connection structure of electron tube - Google Patents

Description

The present invention relates to an airtight junction structure of an electron tube.

  An electronic device using a vacuum, for example, an open type X-ray generator, is connected to a vacuum evacuation device via a vacuum-tight flange, and is operated while evacuating the device in a continuous or nearly continuous state. In the case of such an open type electronic device, the joint between the open door and the vacuum vessel necessary for replacement work such as the anode and the cathode is a seal structure using a rubber or metal O-ring, or copper or the like. A vacuum seal is maintained with a conflat seal structure using a soft metal gasket.

  On the other hand, a non-open type vacuum-sealed electron tube, for example, an X-ray tube is evacuated from the vacuum evacuation device while the inside of the tube is kept in vacuum in the manufacturing process. For example, a vacuum exhaust pipe such as a copper pipe or a glass tube is integrally attached to a part of a vacuum vessel constituting the X-ray tube, and an airtight seal is formed on the vacuum exhaust pipe portion and cut.

  When the vacuum exhaust pipe is a copper pipe, it is performed by a method in which a part of the pipe is locally pressurized and crushed. In the case of a glass tube, the method is performed by locally heating, melting and cutting. The vacuum exhaust pipe separated from the vacuum exhaust system is used in the market while remaining in a part of the vacuum vessel, and is disassembled when the X-ray tube reaches the end of its life.

  In the disassembling process, the welded portion welded during assembly is cut with a cutter or the like. Therefore, it is difficult to reuse components that require a long welding margin. Moreover, since a facet and oil generate | occur | produce at the time of a cutting | disconnection operation | work and a surrounding is contaminated, a cleaning operation | work is normally implemented. However, components assembled by welding are difficult to clean and cannot be reused. In addition, it is difficult to reuse components that are brazed, such as a vacuum exhaust pipe.

  For the reasons described above, only a part of the non-open electron tube is reused, and the other components are simply recycled as materials.

  In the case of a non-open type electron tube such as an X-ray tube, the lifetime is often determined by the lifetime of a specific component such as a cathode. Therefore, it is economically and environmentally desirable to replace only the components related to the lifetime with new components and to reuse the other components without disassembling.

  In this case, it is necessary to have an airtight seal structure in which a fixed part to which a specific component such as a vacuum exhaust pipe is fixed can be replaced. As the conventional hermetic seal structure, an O-ring seal structure used in an open type X-ray generator or the like, a conflat seal structure, or the like is used.

  However, these seal structures do not use an evacuation pump such as an ion pump, and in the case of a vacuum tube with a built-in getter, it is not reliable as a semi-permanent vacuum hermetic seal, and practical application is difficult. is there.

An object of the present invention is to solve the above-described drawbacks, and to provide an airtight junction structure of an electron tube that can withstand long-term use and has a replaceable airtight seal structure.

The present invention relates to an airtight junction structure of an electron tube comprising a first member constituting a part of a vacuum vessel constituting the electron tube and a second member airtightly joined to the first member, the first member and An annular recess is formed in at least one of the second members, a metal intermediate member is disposed in the annular recess, the first member and the intermediate member are hermetically bonded with a diffusion bonding metal structure, and the second The member and the intermediate member are hermetically joined with a diffusion-bonded metal structure, and the first member and the second member are fixed with bolts .

According to the present invention, it is possible to realize an electron tube hermetic joint structure in which the components of the electron tube can be easily reused.

  An embodiment of the present invention will be described with reference to FIG. 1, taking a rotary anode X-ray tube as an example. The vacuum container 11 constituting the rotary anode X-ray tube is composed of, for example, a copper metal container 11a located at the center and first and second glass containers 11b, 11c located on both sides of the metal container 11a. Yes. An X-ray radiation window 11w is provided in a part of the metal container 11a.

  In the metal container 11a, for example, a cathode-side funnel-shaped part a1 constituting the upper half of the figure and an anode-side funnel-like part a2 constituting the lower half of the figure are manufactured separately. Then, the first sealing ring 12 and the second sealing ring 13 are brazed to the respective opposite ends of the cathode-side funnel-shaped portion a1 and the anode-side funnel-shaped portion a2. And the front-end | tip of each of the 1st and 2nd sealing rings 12 and 13 is comprised by airtight joining by helium arc welding. A black layer 14 is attached to the inner surface side of the metal container 11a.

  The metal container 11 a and the first glass container 11 b are hermetically joined by the first helium arc weld 15, and the metal container 11 a and the second glass container 11 c are hermetically joined by the second helium arc weld 16. One end of the metal ring 17 is sealed in the opening portion of the upper end of the first glass container 11b in the figure, and the annular sealing member 18 is airtightly joined to the other end of the metal ring 17.

  The sealing member 18 constitutes a part of the wall portion of the vacuum vessel 11, and a plurality of, for example, two circular recesses 19 having different diameters around the tube axis m are concentric with the sealing member 18. Is formed. The fixing member 20 is airtightly joined to the opening portion of the sealing member 18.

  For the hermetic joining of the sealing member 18 and the fixing member 20, for example, an intermediate member (not shown) such as a metal O-ring is disposed in one of the recesses 19 of the sealing member 18, and the peripheral portion of the fixing member 20. And the intermediate member are hermetically bonded with a diffusion bonding metal structure, and the inner surface of the recess 19 of the sealing member 18 and the intermediate member are hermetically bonded with a diffusion bonding metal structure, and at the same time, tightening with bolts 21 is performed.

  A cathode structure 22 and an anode target 23 are disposed in the metal container 11 a of the vacuum container 11. The cathode assembly 22 is supported by a cathode support 24, and the cathode support 24 passes through the first glass container 11b and is fixed to the fixing member 20. In addition to the cathode support 24, for example, a vacuum exhaust pipe 25 is fixed to the center of the fixing member 20, and a cathode terminal 26 is fixed near the vacuum exhaust pipe 25. The fixing member 20 is formed in a flange shape that spreads outward in a bowl shape from a fixing portion to which components such as the cathode support 24, the vacuum exhaust pipe 25, and the cathode terminal 26 are fixed.

  The anode target 23 is supported by an anode support 27 that rotatably supports the anode target 23. The anode support 27 extends downward in the figure in the second glass container 11c and is fixed to an end (not shown) of the second glass container 11c.

  Next, the structure of the joint portion between the sealing member 18 and the fixing member 20 shown in the circle A of FIG. 1 will be described with reference to FIG. In FIG. 2, parts corresponding to those in FIG.

  A plurality of, for example, first and second recesses 19a and 19b are formed in the sealing member 18 in an annular shape so as to draw a circle. A metal intermediate member 31 such as an O-ring is disposed in the second recess 19b located on the outer side farther from the tube axis than the inner recess 19a. The fixing member 20 and the intermediate member 31 are hermetically bonded with a diffusion bonded metal structure, and the sealing member 18 and the intermediate member 31 constituting the wall portion of the vacuum vessel 11 are hermetically bonded with a diffusion bonded metal structure. At the same time, the fixing member 20 and the sealing member 18 are fixed by a plurality of bolts 21.

  The through-hole through which the bolt 21 of the fixing member 20 passes is slightly larger than the outer diameter of the bolt 21 and has a so-called fool hole structure. The sealing member 18 is formed with a screw hole corresponding to the dimension of the bolt 21. The bolt 21 is screwed into the screw hole of the sealing member 18. At this time, the head portion 21a of the bolt 21 whose outer diameter is increased comes into contact with the fixing member 20, and the fixing member 20 and the sealing member 18 are strongly fixed.

  Here, a top view of the fixing member 20 shown in FIG. 1 is shown in FIG. The fixing member 20 is provided with, for example, four through holes 27a to 27d having a flaw hole structure at equal intervals in the circumferential direction. Further, for example, four separation holes 28a to 28d are provided at equal intervals in the circumferential direction between the through holes 27a to 27d. Screw holes a to d are formed in the separation holes 28a to 28d, and are used when the fixing member 20 is removed and separated as will be described later.

Next, a method of hermetically bonding the fixing member 20 and the sealing member 18 with the diffusion bonding metal structure via the intermediate member 31 will be described.

  First, the annular intermediate member 31 is disposed in the second recess 19b. The intermediate member 31 has a cylindrical cross section, for example, and its outer diameter is set slightly larger than the depth of the second recess 19b. A diffusion promoting material such as a gold film 32 is formed on the outer surface of the intermediate member 31 to a thickness of about 0.1 μm to 10 μm by a method such as plating.

  Thereafter, the lower surface of the fixing member 20 is fixed to the upper surface of the sealing member 18 with the pressing bolt 21. At this time, the cross-sectional shape of the intermediate member 31 is deformed, and the fixing member 20 and the intermediate member 31 and the sealing member 18 and the intermediate member 31 come into strong contact.

  Then, it heats in a vacuum furnace or an atmospheric gas furnace. By this heating, the gold on the surface of the intermediate member 31 diffuses into the fixing member 20 and the sealing member 18, or the elements constituting the fixing member 20 and the sealing member 18 diffuse into the diffusion promoting material. By such diffusion, high-strength airtight joints are formed in the annular region between the fixing member 20 and the intermediate member 31, and between the sealing member 18 and the intermediate member 31, respectively, by a diffusion-bonded metal structure.

  Next, a method for separating the fixing member 20 portion from the vacuum vessel 11 when the cathode assembly 22 and the like have reached the end of their life will be described.

  First, the bolt 21 is removed. Thereafter, a bolt (not shown) is screwed into the screw grooves a to d of the separation holes 28 a to 28 d provided in the fixing member 20, and the tip of the bolt is brought into contact with the surface of the sealing member 18. From this state, the bolt is further rotated and lowered, the tip of the bolt is pressed against the sealing member 18, the diffusion bonding portion is peeled off by the force, and the fixing member 20 is separated.

  The above method utilizes bolts. However, the fixing member 20 can be separated using a cutter. For example, the bolt 21 is removed, and then the diffusion bonding region of the fixing member 20 and the sealing member 18 including the intermediate member 31 is cut with a cutter to separate the fixing member 20. Moreover, the method of using a bolt and the method of using a cutter can be appropriately combined.

  According to the above-described configuration, the fixing member 20 and the sealing member 18 are hermetically joined in the annular region corresponding to the shape of the intermediate member 31 with the diffusion-bonded metal structure, and the other regions are not joined. Therefore, the fixing member 20 can be separated without damaging the sealing member 18 by a method using a bolt or a method using a cutter. Therefore, the main part of the vacuum vessel 11 and components such as the anode target 23 and the anode support 27 fixed in the vacuum vessel 11 can be reliably reused.

  In this case, even if some damage occurs in the vicinity of the second recess 19b of the sealing member 18, a new fixing member can be fixed by disposing the intermediate member in the first recess 19a that is not damaged during reuse. . Therefore, even if some damage occurs in the vicinity of the second recess 19b, it does not hinder reuse.

  In the above embodiment, the plurality of annular recesses 19 are formed concentrically. The plurality of recesses 19 do not necessarily need to be concentric, and need not be a correct circle. For example, the arrangement may be such that the outer concave portion having a large diameter includes the entire concave portion having a small diameter positioned on the inner side, that is, so-called concentric. Moreover, the shape of the recessed part 19 should just be a shape which forms a closed loop, for example, can also be made into square shapes other than circular.

  Further, a metal O-ring is used as an intermediate member. In this case, nickel, copper, or the like is used as a material for the metal O-ring. As the fixing member, iron, iron alloy, nickel-plated iron, iron alloy, copper, copper alloy, or the like is used. The diffusion-promoting material film having a high self-diffusion coefficient may be provided not on the surface of the intermediate member but on the joint surface of the fixing member or the sealing member, or on both the fixing member, the sealing member, and the intermediate member. May be. As the diffusion promoting material, gold, silver or copper, or an alloy mainly containing at least one of gold, silver, and copper can be used. A diffusion promoting material such as gold diffuses by heating during the exhaust process or local heating by high frequency, and forms a strong vacuum-tight seal joint.

  Further, the fixing member 20 and the sealing member 18 are firmly brought into contact with each other using the bolt 21. However, depending on the environmental conditions, the fixing member 20 and the sealing member 18 can be brought into contact with each other and fixed using atmospheric pressure without using the bolt 21.

  In addition, when the joining region of the fixing member or the sealing member is immersed in the insulating oil and corrosion of the joining region due to the sulfur content of the insulating oil becomes a problem, for example, a gap is provided around the joining region, and a Teflon ( If an oil repellent coating such as (registered trademark) is applied, corrosion of the joint area can be prevented.

  Next, another embodiment of the present invention will be described with reference to FIG. FIG. 3 is a diagram in which a joint portion between the sealing member 18 and the fixing member 20 is extracted. The same reference numerals are given to the portions corresponding to FIG. 1, and the overlapping description is partially omitted.

  In this embodiment, the peripheral region of the fixing member 20 is thickened stepwise toward the outside, and the first flat surfaces 33a and 33b having a plurality of steps, for example, two steps, are formed in an annular shape. One sealing member 18 is thinned stepwise toward the outside, and a plurality of, for example, two, second flat surfaces 34a and 34b are formed in an annular shape. The first flat surfaces 33a and 33b and the second flat surfaces 34a and 34b are all formed concentrically. The step portions of the first flat surfaces 33a and 33b are shifted outward from the step portions of the second flat surfaces 34a and 34b.

  When the fixing member 20 and the sealing member 18 are hermetically joined, first, between the first flat surface 33b located outside the fixing member 20 and the second flat surface 34b located outside the sealing member 18. Further, the metal intermediate member 35 is disposed. The thickness of the intermediate member 35 is, for example, such a size that a gap is generated between the fixing member 20 and the sealing member 18. For example, a ring-shaped copper gasket is used for the intermediate member 35, and a gold plating layer 35a is formed on the surface thereof.

  Thereafter, the bolt 21 is screwed into the screw hole of the sealing member 18 through the through hole of the fixing member 20 and tightened. At this time, the fixing member 20 is pressed by the head portion 21a of the bolt 21, and the right end portion of the upper surface of the intermediate member 35 and the first flat surface 33b come into strong contact. At the same time, the left end portion of the lower surface in the drawing and the second flat surface 34b come into strong contact. In this state, heating is performed, and the fixing member 20 and the intermediate member 35 and the intermediate member 35 and the sealing member 18 are hermetically bonded by a diffusion bonding metal structure in the same manner as described in FIG. .

  The separation work of the fixing member 20 is performed by a method using a bolt, a method using a cutter, or a method in which these two methods are appropriately combined, as described in the embodiment of FIGS.

  According to the configuration described above, the fixing member 20 and the intermediate member 35 and the sealing member 18 and the intermediate member 35 are partially joined, and there is a gap between the fixing member 20 and the sealing member 18. Is provided. Therefore, when the fixing member 20 is separated, the sealing member 18 is less damaged, and the main part of the vacuum vessel 11 and the components such as the anode target 23 and the anode support 27 fixed to the vacuum vessel 11 are reused. Becomes easier.

  In this case, even if some damage occurs in the joining region of the sealing member 18 with the intermediate member 35, when reused, the first flat surface 33a located on the inside and If the intermediate member 35 is disposed between the second flat surfaces 34a and airtight bonding is performed, the new fixing member and the sealing member 18 can be reliably fixed.

  In FIG. 3B, the same reference numerals are given to the portions corresponding to FIG.

  In FIG. 3, a metal gasket is used as the intermediate member 35. Nickel and copper are suitable for the metal gasket material. As the fixing member, iron, iron alloy, nickel-plated iron, iron alloy, copper, copper alloy, or the like is suitable. Further, the fixing member 20, the sealing member 18, and the intermediate member 35 are formed on one or both surfaces of the two members to be joined to each other with a metal having a high self-diffusion coefficient, such as gold, silver, copper, or at least one of these materials. An alloy having one as a main component is formed as a film of the diffusion promoting material.

  Next, another embodiment of the present invention will be described with reference to FIG.

  The vacuum vessel 41 constituting the rotary anode X-ray tube is composed of, for example, a large metal diameter portion 41a having a large outer diameter, and a small insulator diameter portion 41b having a smaller outer diameter. An X-ray window 41w that allows X-rays to pass through is provided in part of the large-diameter portion 41a, and the small-diameter portion 41b has a double cylindrical structure.

  A first high voltage supply mechanism 42, a so-called anode receptacle, is fixed to a first opening region in the center of the front surface of the large-diameter portion 41a. A second high voltage supply mechanism 43, that is, a so-called cathode receptacle is fixed to a second opening region that is shifted from the center to the right side in the figure. A vacuum exhaust pipe 44 is fixed to a third opening region shifted from the center to the left side in the figure.

  The first high voltage supply mechanism 42 is fixed to the first wall portion 45 surrounding the first opening region. The second high voltage supply mechanism 43 is fixed to the fixing member 46, and is fixed to the annular second wall portion 47 of the second opening portion via the fixing member 46.

  The fixing member 46 extends in a flange shape outward from the region where the second high voltage supply mechanism 43 is fixed, and its peripheral portion is fixed to the second wall portion 47. For example, a plurality of annular recesses 48 having different diameters are formed concentrically on the upper surface of the second wall portion 47 in the drawing, and an intermediate member (not shown) is formed in one recess 48, for example, the recess 48 located outside. And the fixing member 46 is arranged so as to seal the opening of the second wall portion 47. Then, the bolt 49 is screwed into the screw hole of the second wall portion 47 through the through hole having the hole structure of the fixing member 46 and tightened. At this time, the head portion of the bolt 49 contacts the fixing member 46, and the fixing member 46 and the second wall portion 47 are fixed.

  Heating is performed in this state, and the fixing member 46 and the intermediate member, and the intermediate member and the second wall portion 47 are hermetically bonded in an annular shape with high strength by a diffusion bonding metal structure. Also in this case, a film of the diffusion promoting material is formed on one or both of the fixing member 46, the intermediate member, and the second wall portion 47 that are joined to each other.

  Further, the vacuum exhaust pipe 44 is fixed to the fixing member 50, and is fixed to the third wall portion 51 surrounding the third opening portion via the fixing member 50. The fixing member 50 spreads outward from the region where the vacuum exhaust pipe 44 is fixed in a flange shape, and the periphery of the fixing member 50 is fixed to the third wall portion 51.

  A plurality of annular recesses 52 having different diameters are formed concentrically on the upper surface of the third wall portion 51 in the figure, and an intermediate member (not shown) is formed in one recess 52, for example, the recess 52 located outside. Is placed. Further, the fixing member 50 is disposed on the third wall portion 51, and the fixing member 50 and the third wall portion 51 are tightened with the bolts 53. Heating is performed in this state, and the fixing member 50 and the third wall portion 51 are hermetically bonded with high strength by a diffusion bonding metal structure via an intermediate member. Also in this case, a film of the diffusion promoting material is formed on one or both of the joint portions of the fixing member 50, the third wall portion 51, and the intermediate member.

  A through hole in a portion through which the bolt 53 of the fixing member 50 passes is a fool hole, and a screw hole matching the bolt 53 is formed in the third wall portion 51. When the bolt 53 is screwed into the screw hole of the third wall portion 51, the head portion of the bolt 53 contacts the fixing member 50, and the fixing member 50 and the third wall portion 51 are fixed.

  An anode target 54 is disposed in the large diameter portion 41 a of the vacuum vessel 41. The anode target 54 is connected to the rotary support 56 via a joint portion 55. The rotary support 56 includes a rotary part and a fixed part. The rotary part includes, for example, a first cylindrical rotary body 57 having a small outer diameter, a second cylindrical rotary body 58 having a larger outer diameter, and a first cylinder. The cylindrical connection part 59 which connects the cylindrical rotary body 57 and the 2nd cylindrical rotary body 58, the cylindrical rotor 60 joined to the outer peripheral surface of the 2nd cylindrical rotary body 58, etc. are comprised.

  The second cylindrical rotating body 58 and the cylindrical rotor 60 are located in the small diameter portion 41 b of the vacuum vessel 41. A cylindrical fixed body 61 that constitutes a fixed portion of the rotation support 56 is fitted inside the second cylindrical rotary body 58 and the cylindrical connecting portion 59.

  The upper end of the fixed body 61 in the figure is fixed to the first high voltage supply mechanism 42, and the lower end in the figure passes through the small diameter part 41 b of the vacuum vessel 41 and extends to the outside of the vacuum vessel 41. Further, a hydrodynamic slide bearing (not shown) is formed in a fitting portion between the first cylindrical rotating body 57 constituting the rotating portion of the rotating support 56 and the fixed body 61 constituting the fixed portion. . A pipe 62 made of, for example, a ceramic member having a bottomed cylindrical shape is fitted inside the fixed body 61.

  The upper end surface of the pipe 62 shown in the figure is fixed to the first high voltage supply mechanism 42, and the lower end of the pipe 62 extends to substantially the same position as the lower end of the small diameter portion 41 b of the vacuum vessel 41. The hollow portion inside the pipe 62 forms a cooling passage through which the cooling medium flows. For example, a partition wall 63 is provided in the cavity, and the cooling medium rises on the right side of the partition wall 62 as shown by an arrow Y1, and descends on the left side of the partition wall 62 as shown by an arrow Y2.

  A cathode assembly 64 is fixed to the second high voltage supply mechanism 43, and a coil 65 that generates an induction electromagnetic field is disposed outside the small diameter portion 41 b of the vacuum vessel 41.

  With the above configuration, for example, a positive high voltage is supplied into the vacuum container 41 through the first high voltage supply mechanism 42. This positive high voltage is applied to the anode target 54 via the fixed body 61, the liquid metal lubricant of the hydrodynamic slide bearing, the first cylindrical rotating body 57, and the joint portion 55. Further, for example, a negative high voltage is supplied to the cathode assembly 64 through the second high voltage supply mechanism 43. In accordance with this, an electric current is passed through the coil 65 to generate an induction electromagnetic field, and the anode target 54 is rotated. In this state, the cathode structure 64 emits an electron beam to the anode target 54 to emit X-rays from the anode target 54. The emitted X-ray is taken out from the X-ray window 41w.

  According to the configuration described above, the components of the X-ray tube, such as the vacuum exhaust tube 44 and the cathode assembly 64, are attached to the fixing members 50 and 46, and the fixing members 50 and 46 and the wall portions 51 and 47 of the vacuum vessel are respectively intermediate members. The airtight joining is partially performed by the diffusion metal structure. Therefore, the flange portions 50 and 46 to which the vacuum exhaust pipe 44 and the cathode structure 64 are fixed can be easily separated from the vacuum vessel 41, such as the remaining portion of the vacuum vessel 41 or the anode portion fixed to the vacuum vessel 41. Components can be reliably reused.

  Next, another embodiment of the present invention will be described with reference to FIG. FIG. 5 is a diagram in which a right half of a wall portion of the vacuum vessel, for example, a joint portion between the sealing member and the fixing member, is extracted from the central portion indicated by line a1-a1, and corresponds to FIG. 1 and FIG. Are given the same reference numerals, and duplicate descriptions are partially omitted.

As shown in FIG. 5A, the protrusion 71 is formed in an annular shape on the surface of the fixing member 70 on the sealing member 18 side. The sealing member 18, screw holes 72 are formed in the outer position than the protruding portion 71. Then, the bolt 21 is screwed into the screw hole 72 of the sealing member 18 through the through hole 73 having a flaw hole structure provided in the fixing member 70, and the tip 711 of the protruding portion 71 and the sealing member 18 are brought into firm contact. In this state, heating is performed, and the tip 711 of the fixing member 70 and the sealing member 18 are hermetically bonded by a diffusion bonding metal structure. In this case, a film of a diffusion promoting material is formed in advance on one or both of the protruding portion 71 and the sealing member 18 of the fixing member 70 to be hermetically bonded.

  The separation of the fixing member 70 is performed by the same method as in each of the above embodiments.

  Next, when a new fixing member is joined instead of the separated fixing member 70, a new fixing member 70a for replacement is prepared as shown in FIG. On the new fixing member 70a, a protruding portion 71a having the same height is formed in an annular shape inside the position of the protruding portion 71 of the old fixing member 70 temporarily shown by dotted lines.

  Then, the protruding portion 71a of the new fixing member 70a is brought into contact with the sealing member 18 portion avoiding the damaged region R when the old fixing member 70 is separated, and diffusion is performed in the same manner as in the case of the old fixing member 70. Airtight joining is performed by the joining metal structure.

  Next, another embodiment of the present invention will be described with reference to FIG. FIG. 6 is a diagram in which the right half of the joining portion between the sealing member and the fixing member is extracted from the central portion indicated by the line a2-a2, and the same reference numerals are given to the portions corresponding to FIG. 1 and FIG. Some of the overlapping explanations are omitted.

  As shown in FIG. 6A, the first and second projecting portions 81a and 81b are concentrically and annularly formed on the surface of the fixing member 80 on the sealing member 18 side. In this case, the height of the inner first protrusion 81a closer to the center is lower than the outer second protrusion 81b far from the center.

  When the fixing member 80 is joined to the sealing member 18, first, the tip of the outer second projecting portion 81 b is brought into contact with the sealing member 18 and simultaneously fixed with the bolt 21. Then, it heats and airtightly joins the front-end | tip of the protrusion part 81b, and the sealing member 18 with a diffusion bonding metal structure. Also in this case, a film of a diffusion promoting material is formed in advance on one or both of the protruding portion 81b and the sealing member 18 that are joined to each other.

  The fixing member 80 is separated by the same method as in each of the above embodiments.

  Thereafter, when a new fixing member is joined to the portion where the fixing member 80 is separated, a new fixing member 80a for replacement is prepared as shown in FIG. 6B. In this case, the new fixing member 80a has the same shape as the old fixing member 80 separated earlier. In addition, a recess 82 is formed in a region where the second protrusion 81b of the old fixing member 80 is joined on the surface of the sealing member 18 on the fixing member 80a side.

  And the front-end | tip of the 1st protrusion part 81a of the new fixing member 80a is made to contact the sealing member 18. FIG. At this time, the tip of the second protrusion 81b is housed in the recess 82, and the first protrusion 81a and the sealing member 18 come into contact with each other. In this state, heating is performed, and the new fixing member 80a and the sealing member 18 are hermetically bonded by a diffusion bonding metal structure. Also in this case, a film of the diffusion promoting material is formed on one or both of the joining regions of the new fixing member 80a and the sealing member 18 before joining.

  In FIG. 5 and FIG. 6, a protrusion is formed on the fixing member. However, a structure in which the protruding portion is formed on the sealing member can also be used.

  Next, another embodiment of the present invention will be described with reference to FIG. FIG. 7 is a diagram in which the right half is extracted from the central portion indicated by line a3-a3 with respect to the joining portion of the sealing member and the fixing member, and the same reference numerals are given to the portions corresponding to FIG. 1 and FIG. Some overlapping explanations are omitted.

  In the case of this embodiment, for example, a part of the sealing member 18, for example, an end 18 a thereof extends upward in the figure, and has a shape surrounding the fixing member 90. On the other hand, the end surface 90a of the fixing member 90 to which the vacuum exhaust pipe or the like is fixed is inclined and gradually becomes thinner toward the concave portions 19a and 19b of the sealing member 18. A push screw 92 is screwed into a screw hole 91 provided in the end 18 a of the sealing member 18. At this time, the distal end of the push screw 92 comes into contact with the end surface 90a of the fixing member 90, and a downward force is exerted on the fixing member 90, so that the intermediate member 31 and the fixing member 90 housed in a recess, for example, reference numeral 19b The intermediate member 31 and the sealing member 18 come into strong contact at the same time.

  In this state, heating is performed, and the fixing member 90 and the intermediate member 31 are hermetically bonded by the diffusion bonding metal structure. At the same time, the intermediate member 31 and the sealing member 18 are hermetically bonded by the diffusion bonding metal structure. Also in this case, a film of the diffusion promoting material is formed on one or both of the joining portions of the fixing member 90, the intermediate member 31, and the sealing member 18 before joining.

  The separation of the fixing member 90, the attachment of a new fixing member, and the like are performed by the same method as in the above embodiments.

  In each of the above-described embodiments, the fixing member to which the vacuum exhaust pipe or the cathode structure is fixed and the wall portion of the vacuum vessel are hermetically bonded by a diffusion bonding metal structure directly or through an intermediate member, and the vacuum exhaust pipe or the cathode structure is fixed. The fixed member thus made can be exchanged. However, if the anode support, energization getter, X-ray window, etc. are fixed to a fixing member, and the fixing member is hermetically bonded to the wall portion of the vacuum vessel in the same manner, the anode support or energization getter that has reached the end of its life, X-ray windows can be easily replaced.

  Further, the above embodiment has been described in the case of an X-ray tube. However, the present invention is not limited to an X-ray tube, for example, an X-ray image tube or a transmitter tube, a high-frequency power output tube, a vacuum sealed tube such as a magnetron, a gyrotron, or a cathode ray tube, or a thyratron, an in-core monitor, a proportional counter tube, or a laser. It can also be applied to gas-sealed tubes such as tubes and plasma display devices.

  For example, in an image tube, a vacuum exhaust tube or a photocathode material introduction tube such as antimony or alkali metal is fixed to a fixing member, and the fixing member and the wall portion of the vacuum vessel are hermetically bonded in the same manner as described above. When the exhaust pipe or photocathode material introduction pipe reaches the end of its life, it can be replaced with another component. Further, if a plurality of components such as a vacuum exhaust pipe and a photocathode material introduction pipe are fixed to a common fixing member, the number of fixing members and the number of joining portions are reduced, and the cost can be reduced.

  Further, the intermediate member does not necessarily have to be disposed in the recess as shown in FIGS. For example, an intermediate member is disposed between the flat surfaces of the fixing member and the vacuum vessel wall portion, and the fixing member and the intermediate member and the vacuum vessel wall portion and the intermediate member are each hermetically bonded by a diffusion bonding metal structure. You can also.

It is a schematic sectional view for explaining an embodiment of the present invention. (A) is a general | schematic expanded sectional view which extracted the junction part of the fixing member of this invention, and a vacuum vessel part, (b) is a top view of a fixing member part. It is a schematic sectional drawing for explaining other embodiments of the present invention, and is a figure which extracted a joined part of a fixing member and a vacuum vessel part. It is a schematic sectional drawing for demonstrating other embodiment of this invention. It is a schematic sectional drawing for explaining other embodiments of the present invention, and is a figure which extracted a joined part of a fixing member and a vacuum vessel part. It is a schematic sectional drawing for explaining other embodiments of the present invention, and is a figure which extracted a joined part of a fixing member and a vacuum vessel part. It is a schematic sectional drawing for explaining other embodiments of the present invention, and is a figure which extracted a joined part of a fixing member and a vacuum vessel part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 ... Vacuum container 11a ... Metal container 11b ... Glass container 11c ... Glass container 17 ... Metal ring 18 ... Sealing member 19 ... Recess 20 ... Fixing member 21 ... Bolt 22 ... Cathode structure 23 ... Anode target 24 ... Cathode support 25 ... Vacuum exhaust pipe 27 ... Anode support

Claims (6)

  In the airtight junction structure of an electron tube comprising a first member constituting a part of a vacuum vessel constituting the electron tube and a second member airtightly joined to the first member, the first member and the second member An annular recess is formed in at least one of the metal, an intermediate member made of metal is disposed in the annular recess, the first member and the intermediate member are hermetically bonded with a diffusion bonding metal structure, and the second member and the intermediate An electron tube hermetic junction structure, wherein members are hermetically joined with a diffusion-bonded metal structure, and the first member and the second member are fixed with bolts. The bolt through the large through hole than the outer diameter of the bolt provided in the second member is screwed into the screw hole of the first member to the dimensions of the bolt and the head portion of the bolt 2. The airtight junction structure of an electron tube according to claim 1 , wherein an outer diameter of the electron tube is larger than that of the through hole and is in contact with the second member so as to fix the first member and the second member .   2. The electron tube according to claim 1, wherein an end surface of the second member is gradually thinned and inclined, and the bolt is screwed into a screw hole of the first member and a tip thereof is in contact with the inclined end surface of the second member. Airtight junction structure.   2. The airtight junction structure for an electron tube according to claim 1, wherein a plurality of annular recesses are formed concentrically, and the annular recess in which the intermediate member is disposed is positioned outside at least one of the recesses.   The electron tube airtight junction structure according to claim 1, wherein components of the electron tube are fixed to the second member.   The airtight junction structure of the electron tube according to claim 1, wherein the first member and the second member are fixed with a bolt from the outside of the vacuum vessel.

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