JPH06119893A - Vacuum vessel having beryllium foil - Google Patents

Vacuum vessel having beryllium foil

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Publication number
JPH06119893A
JPH06119893A JP26622192A JP26622192A JPH06119893A JP H06119893 A JPH06119893 A JP H06119893A JP 26622192 A JP26622192 A JP 26622192A JP 26622192 A JP26622192 A JP 26622192A JP H06119893 A JPH06119893 A JP H06119893A
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JP
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Application
Patent type
Prior art keywords
beryllium
beryllium foil
foil
thickness
vacuum vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26622192A
Other languages
Japanese (ja)
Inventor
Shuji Ebisu
Keiichi Mimori
Tadashi Shimizu
恵一 三森
修二 戎
忠 清水
Original Assignee
Toshiba Corp
株式会社東芝
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

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Abstract

PURPOSE: To remarkably improve airtightness, and prevent a crack from occurring by keeping a grain boundary number equal to or above a specific value in a thicknesswise direction, when the thickness of a beryllium foil brazed to an opening in airtight state has thickness within a specific range.
CONSTITUTION: A beryllium foil 4 is brazed to the opening 3 of a vacuum vessel 1 in airtight state, using a brazing material 5 and a presser ring 6, and a beryllium window 2 is thereby constituted. In this constitution, when the thickness of the beryllium foil 4 is within the range of 10 to 100μm, a boundary grain number in a thicknesswise direction is kept at an average of 5 or more. As a result, not only a crack can be prevented from propagating from the vicinity of a joint, but also a fine leak source for the beryllium foil 4 due to thermal stress from evacuation can be prevented at a jointing or fabrication process.
COPYRIGHT: (C)1994,JPO&Japio

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【産業上の利用分野】この発明は、例えばX線管,X線蛍光増倍管,X線比例計数管,X線リソグラフィ,X線検出管等に使用して好適なベリリウム箔を有する真空容器に関する。 BACKGROUND OF THE INVENTION This invention, for example, X-ray tube, vacuum vessel with X-ray intensifier, the X-ray proportional counter, X-ray lithography, a suitable beryllium foil using the X-ray detector tube or the like on.

【0002】 [0002]

【従来の技術】一般にX線管,X線蛍光増倍管,X線比例計数管,X線リソグラフィ,X線検出管等においては、図5に示すように真空容器11の開口部にベリリウム箔12がろう材(図示せず)および押さえリング13により気密ろう接されたベリリウム窓14を備えており、入力窓あるいは出力窓として利用されている。 BACKGROUND ART Generally, X-ray tube, X-ray intensifier, the X-ray proportional counter, X-ray lithography, in the X-ray detector tube or the like, beryllium foil opening of the vacuum chamber 11 as shown in FIG. 5 the 12 Gallery material (not shown) and retaining ring 13 has a beryllium window 14, which is hermetically brazed, are used as the input window or output window. そして、製造時の排気工程においては、350乃至500℃の温度雰囲気に晒されるために、ベリリウムと異種金属との接合はろう接あるいは拡散接合法により高温に上げて接合していた。 Then, in the exhaust process at the time of manufacture, in order to be exposed to an ambient temperature range of 350 to 500 ° C., the bonding between the metal beryllium and dissimilar metals have joined raised to a high temperature by brazing or diffusion bonding.

【0003】 [0003]

【発明が解決しようとする課題】ところが上記従来の方法だけでは、強度的にも不安定であり、又、気密ろう接の信頼性も不十分であった。 Alone However the conventional METHOD SUMMARY is], is unstable in strength, also insufficient reliability of the hermetic brazing.

【0004】即ち、ベリリウム箔12の厚さが薄くなるとベリリウム箔12の絶対温度が低下し、熱膨脹係数の異なる材質の例えば押さえリング13にろう接又は拡散接合した時に発生する応力、あるいは排気時に気圧差と温度上昇に伴ない発生する熱応力により、図5に示すように接合部近傍よりクラック15が入り気密性が損なわれる。 [0004] That is, the stress when the thickness of the beryllium foil 12 is reduced to decrease the absolute temperature of the beryllium foil 12, occurs when the different joining of example pressing ring 13 Jiro contact or diffusion material having a thermal expansion coefficient or pressure during the exhaust, the thermal stress generated in conjunction with the difference and the temperature rise, is impaired airtightness cracked 15 of the junction near as illustrated in FIG. 更に、ベリリウム窓14の中央部近傍にも非常に小さなリ− Furthermore, also very near the center of the beryllium window 14 smaller Li -
ク源(図示せず)が発生し、結果的にはスロ−リ−クとなり気密性が損なわれる。 Click source (not shown) is generated, resulting in the Ro - Li - click and becomes airtight is impaired.

【0005】これらの原因を調査してみると、接合部近傍からのクラック15はろう材とベリリウムが接合時の温度上昇に伴なって反応し、ベリリウム箔12の厚さが1/ [0005] Looking to investigate these cause cracks 15 from the joint portion near the brazing material and beryllium reacts with an increase in temperature at the time of bonding, the thickness of the beryllium foil 12 1 /
3乃至1/5まで減少し、この境界で応力集中を受け、 3 to be reduced to 1/5, receives the stress concentration at the boundary,
更にベリリウム箔12が2次再結晶による結晶粒子成長が生じ、強度が低下することによって発生するものである。 Furthermore cause grain growth beryllium foil 12 by the secondary recrystallization, strength is what occurs by reduction. 又、2次再結晶粒子は、ベリリウム箔12の厚さ方向に対し粒界形状が単純形状となり、上記の応力を受けた場合に粒界がリ−クの発生源となり、接合部以外の箇所でのスロ−リ−クとなるものである。 Further, secondary recrystallization grains, the grain boundary shape to the thickness direction of the beryllium foil 12 becomes a simple shape, grain boundaries Li when receiving the stress - will click sources, portions other than the joints Sulo in - Li - and serves as a click.

【0006】この発明は、以上のような不都合を解決するものであり、ベリリウム窓の気密性を著しく向上すると共にクラックの発生を未然に防止したベリリウム箔を有する真空容器を提供することを目的とする。 [0006] The present invention is intended to solve the disadvantages described above, and aims to provide a vacuum vessel having a beryllium foil to prevent cracking from occurring while significantly improving the airtightness of the beryllium window to.

【0007】 [0007]

【課題を解決するための手段】この発明は、開口部に気密接合されているベリリウム箔は、厚さが10乃至10 SUMMARY OF THE INVENTION This invention provides a beryllium foil is hermetically joined to the opening, a thickness of 10 to 10
0μmの範囲である場合、厚さ方向の結晶粒界数を平均5以上有してなるベリリウム箔を有する真空容器である。 If the range of 0 .mu.m, a vacuum container with a beryllium foil made having the thickness direction grain boundaries number average 5 or more.

【0008】 [0008]

【作用】この発明によれば、ベリリウム窓の気密性は製造後は勿論、製造時の排気工程における熱履歴に対しても十分に気密性が保たれている。 SUMMARY OF] According to the invention, of course airtightness beryllium window after manufacture, sufficiently airtight is maintained against heat history in the production time of the exhaust process. 又、接合部近傍からのクラックが避けられるばかりでなく、接合時あるいは製造工程における排気時の熱応力によって生じるベリリウム箔の微少なリ−ク源を防止出来る。 Furthermore, not only cracks from junction vicinity is avoided, slight re beryllium foil caused by thermal stress during the exhaust at the junction or during production steps - can prevent click source.

【0009】 [0009]

【実施例】以下、図面を参照して、この発明の一実施例を詳細に説明する。 EXAMPLES Hereinafter, with reference to the drawings, a description will be given of an embodiment of the present invention in detail.

【0010】この発明によるベリリウム箔を有する真空容器は、図1に示すように構成され、真空容器1はベリリウム窓2を備えている。 [0010] vacuum vessel having a beryllium foil according to the present invention is configured as shown in FIG. 1, the vacuum chamber 1 is provided with a beryllium window 2. 即ち、真空容器1の開口部3 That is, the opening portion 3 of the vacuum chamber 1
に、ベリリウム箔4がろう材5および押さえリング6により気密ろう接され、ベリリウム窓2を構成している。 To, hermetically brazed by beryllium foil 4 Gallery member 5 and the press ring 6 constitute a beryllium window 2.
このとき、ベリリウム箔4は、厚さが10乃至100μ In this case, the beryllium foil 4, to a thickness of 10 100 microns
mの範囲である場合、厚さ方向の結晶粒界数を平均5以上有している。 If the range of m, and has a thickness direction grain boundaries number average 5 or more. 図2がベリリウム箔4を拡大して示した模式図であり、図中の符号7が結晶である。 It is a schematic diagram FIG. 2 is an enlarged view of a beryllium foil 4, reference numeral 7 in the figure is a crystal. この場合のベリリウム箔4の厚さ方向に任意の場所での垂直な線P Vertical line P at any location in the thickness direction of the beryllium foil 4 in this case
−Pにおける結晶粒界数は、7である。 The crystal grain boundary number in -P is 7.

【0011】製造に当たっては、厚さ60μmのベリリウム箔4を用い、ろう材5としてはAg(61%),C [0011] In the manufacture, using a beryllium foil 4 having a thickness of 60μm, Ag (61%) as a brazing material 5, C
u(24%),In(15%)の銀ろうを使用し、開口部3にベリリウム箔4を真空拡散法により接合した。 u (24%), using a silver solder of In (15%), beryllium foil 4 were bonded by vacuum diffusion in the opening 3. 拡散接合条件は、温度が600℃、圧力が35Kg/mm Diffusion bonding conditions, the temperature is 600 ° C., the pressure is 35 Kg / mm
2 2 、接合時の保持時間が30分である。 Retention time at the time of bonding is 30 minutes. 尚、ベリリウム窓2の有効径は19mmである。 The effective diameter of the beryllium window 2 is 19 mm. 又、接合部のベリリウム箔4の厚さは45μmであり、非接合部の75%である。 The thickness of the beryllium foil 4 of the joint is 45 [mu] m, 75% of the non-joined portion. この厚さについては、接合部のベリリウム箔4の厚さが非接合部のベリリウム箔4の厚さに対し、50μm This thickness is the thickness of the beryllium foil 4 of the junction to the thickness of the beryllium foil 4 unbonded portion, 50 [mu] m
以上では50%以上、50μm未満では70%以上の範囲にあれば良い。 More than 50% or more, may be in the range of 70% or more is less than 50 [mu] m.

【0012】さて、接合後のベリリウム箔4の結晶組織は樹脂に埋込み切断し、湿式研磨により時間をかけ鏡面に仕上げた後、金属顕微鏡により観察した。 [0012] Now, the crystalline structure of beryllium foil 4 after bonding is embedded cut resin, after mirror-finished over time by wet polishing was observed by a metal microscope. 結晶組織観察時に注意しなければならないことは、金属顕微鏡の明視野では結晶粒界は見られず、偏光レンズを通さなければならない。 It must be noted when the crystal structure observation, the crystal grain boundary is a bright field metal microscope was not observed, must pass through the polarizing lens. 結晶粒界数の測定は約1mm間隔で5点を写真に取り、写真上のベリリウム箔4の厚さ方向に線を引き、この線と交わる粒界数を計算して平均数で表わすものである。 Measurement of crystal grain boundaries number takes a 5-point at about 1mm intervals photograph, draw a line in the thickness direction of the beryllium foil 4 on the photograph, which represents the average number of the number of grain boundaries intersecting this line calculated by is there.

【0013】この実施例で得られた結晶の粒界数は15 [0013] the number of grain boundaries of the obtained crystal in this Example 15
個であり、この実施例で得られたベリリウム窓2の気密性は接合後は勿論、排気工程における熱履歴に対しても十分に気密性が保たれている。 A number, airtightness of the obtained beryllium window 2 in this embodiment, after joining of course, have sufficiently airtight is maintained against heat history in the exhaust process.

【0014】尚、接合方法は拡散接合の他にろう接でも可能であるが、結晶組織の粗大化を防ぎ、請求範囲内の結晶粒界数を得るためには、800℃以下で短時間で望ましくは5分以内で行なうことが強度的にも安定したベリリウム窓が得られる。 [0014] Although the bonding method can be brazed to another diffusion bonding to prevent coarsening of the crystal structure, in order to obtain a crystal grain boundary number in the claims is a short 800 ° C. or less desirably beryllium window be performed within 5 minutes also stable in strength is obtained. 図3に封着後のベリリウム泊結晶組織と真空気密性との関係、図4に封着部のベリリウム泊形状と真空気密性との関係をそれぞれ示す。 Relationship between the beryllium Night crystal structure and vacuum tightness after sealing in Figure 3, respectively the relationship between the beryllium Night shape and vacuum tightness of the sealing portion in FIG.

【0015】 [0015]

【発明の効果】この発明によれば、開口部に気密ろう接されているベリリウム箔は、厚さが10乃至100μm Effects of the Invention According to the present invention, beryllium foil is hermetically brazed to the opening, a thickness of 10 to 100μm
の範囲である場合、厚さ方向の結晶粒界数を平均5以上有しているので、従来技術で発生した接合部近傍からのクラックが避けられるばかりでなく、接合時あるいは製造工程における排気時の熱応力によって生じるベリリウム箔の微少なリ−ク源を防止出来る。 If the range of, because it has a crystal grain boundary number in the thickness direction average 5 above, but only crack junction near that occurred in the prior art are avoided, when the exhaust gas in the junction or during production steps minute re beryllium foil caused by thermal stress - can prevent click source.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】この発明の一実施例に係るベリリウム箔を有する真空容器を示す断面図。 Figure 1 is a cross-sectional view showing a vacuum vessel having a beryllium foil according to an embodiment of the present invention.

【図2】図1の要部を拡大して示す断面図。 2 is a cross-sectional view showing an enlarged main portion of FIG.

【図3】封着後のベリリウム箔結晶組織と真空気密性との関係を示す特性曲線図。 [Figure 3] characteristic diagram showing the relationship between the beryllium foil crystal structure and vacuum tightness after the sealing.

【図4】封着部のベリリウム箔形状と真空気密性との関係を示す特性曲線図。 [4] characteristic diagram showing the relationship between the beryllium foil shape and the vacuum tightness of the sealing portion.

【図5】従来のベリリウム箔を有する真空容器を示す平面図。 5 is a plan view showing a vacuum vessel having a conventional beryllium foil.

【符号の説明】 DESCRIPTION OF SYMBOLS

1…真空容器、2…ベリリウム窓、3…真空容器の開口部、4…ベリリウム箔、5…ろう材、6…押さえリング、7…結晶。 1 ... vacuum vessel, 2 ... beryllium window, the opening of 3 ... vacuum vessel, 4 ... beryllium foil, 5 ... brazing material, 6 ... holding ring, 7 ... crystals.

Claims (1)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 開口部にベリリウム箔が気密接合されてなるベリリウム箔を有する真空容器において、 上記ベリリウム箔は、厚さが10乃至100μmの範囲である場合、厚さ方向の結晶粒界数を平均5以上有することを特徴とするベリリウム箔を有する真空容器。 1. A beryllium foil openings in the vacuum vessel having a beryllium foil formed by hermetically bonding said beryllium foil, when the thickness is in the range of 10 to 100 [mu] m, the thickness direction of the grain boundary number vacuum vessel having a beryllium foil and having an average of 5 or more.
JP26622192A 1992-10-05 1992-10-05 Vacuum vessel having beryllium foil Pending JPH06119893A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26622192A JPH06119893A (en) 1992-10-05 1992-10-05 Vacuum vessel having beryllium foil

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26622192A JPH06119893A (en) 1992-10-05 1992-10-05 Vacuum vessel having beryllium foil

Publications (1)

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JPH06119893A true true JPH06119893A (en) 1994-04-28

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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005135786A (en) * 2003-10-31 2005-05-26 Toshiba Corp Component mounting structure of electronic tube
EP1547116A1 (en) * 2002-09-13 2005-06-29 Moxtek, Inc. Radiation window and method of manufacture
US7382862B2 (en) 2005-09-30 2008-06-03 Moxtek, Inc. X-ray tube cathode with reduced unintended electrical field emission
US7428298B2 (en) 2005-03-31 2008-09-23 Moxtek, Inc. Magnetic head for X-ray source
US8804910B1 (en) 2011-01-24 2014-08-12 Moxtek, Inc. Reduced power consumption X-ray source
US8929515B2 (en) 2011-02-23 2015-01-06 Moxtek, Inc. Multiple-size support for X-ray window
US8948345B2 (en) 2010-09-24 2015-02-03 Moxtek, Inc. X-ray tube high voltage sensing resistor
US8964943B2 (en) 2010-10-07 2015-02-24 Moxtek, Inc. Polymer layer on X-ray window
US8989354B2 (en) 2011-05-16 2015-03-24 Brigham Young University Carbon composite support structure
US8995621B2 (en) 2010-09-24 2015-03-31 Moxtek, Inc. Compact X-ray source
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure
US9173623B2 (en) 2013-04-19 2015-11-03 Samuel Soonho Lee X-ray tube and receiver inside mouth
US9174412B2 (en) 2011-05-16 2015-11-03 Brigham Young University High strength carbon fiber composite wafers for microfabrication
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1547116A1 (en) * 2002-09-13 2005-06-29 Moxtek, Inc. Radiation window and method of manufacture
EP1547116A4 (en) * 2002-09-13 2006-05-24 Moxtek Inc Radiation window and method of manufacture
US7233647B2 (en) 2002-09-13 2007-06-19 Moxtek, Inc. Radiation window and method of manufacture
JP2005135786A (en) * 2003-10-31 2005-05-26 Toshiba Corp Component mounting structure of electronic tube
JP4601939B2 (en) * 2003-10-31 2010-12-22 東芝電子管デバイス株式会社 Hermetically bonding structure of an electronic tube
US7428298B2 (en) 2005-03-31 2008-09-23 Moxtek, Inc. Magnetic head for X-ray source
US7382862B2 (en) 2005-09-30 2008-06-03 Moxtek, Inc. X-ray tube cathode with reduced unintended electrical field emission
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window
US8948345B2 (en) 2010-09-24 2015-02-03 Moxtek, Inc. X-ray tube high voltage sensing resistor
US8995621B2 (en) 2010-09-24 2015-03-31 Moxtek, Inc. Compact X-ray source
US8964943B2 (en) 2010-10-07 2015-02-24 Moxtek, Inc. Polymer layer on X-ray window
US8804910B1 (en) 2011-01-24 2014-08-12 Moxtek, Inc. Reduced power consumption X-ray source
US8929515B2 (en) 2011-02-23 2015-01-06 Moxtek, Inc. Multiple-size support for X-ray window
US8989354B2 (en) 2011-05-16 2015-03-24 Brigham Young University Carbon composite support structure
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure
US9174412B2 (en) 2011-05-16 2015-11-03 Brigham Young University High strength carbon fiber composite wafers for microfabrication
US9173623B2 (en) 2013-04-19 2015-11-03 Samuel Soonho Lee X-ray tube and receiver inside mouth

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