JP4601683B2 - 半導体収納容器開閉装置 - Google Patents
半導体収納容器開閉装置 Download PDFInfo
- Publication number
- JP4601683B2 JP4601683B2 JP2008090109A JP2008090109A JP4601683B2 JP 4601683 B2 JP4601683 B2 JP 4601683B2 JP 2008090109 A JP2008090109 A JP 2008090109A JP 2008090109 A JP2008090109 A JP 2008090109A JP 4601683 B2 JP4601683 B2 JP 4601683B2
- Authority
- JP
- Japan
- Prior art keywords
- opening
- container
- opener
- semiconductor
- closing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Description
110:ステージ
111:スライダ
112:位置決めピン
120:オープナ
121:回転キー
130:オープナ開閉機構
131:オープナ昇降機構
140:安全カバー
150:表面板
200:半導体収納容器
210:容器本体
211:ラッチ溝
212:フランジ
220:蓋
221:キー溝
222:ラッチ
300:ウエハ
400:半導体製造装置。
Claims (3)
- 半導体ウエハを収納した半導体収納容器を載置するステージと、上記半導体収納容器の開口部と半導体製造装置の開口部とを接続する接続部と、上記半導体収納容器の蓋を把持して容器の開口面に対して上記蓋を垂直に開閉するオープナと、上記半導体収納容器の開口部と上記半導体製造装置の開口部とが開いて接続されるように上記半導体収納容器の蓋を把持したオープナを降下する、または上記オープナを上昇して上記開口部の接続を閉じるオープナ昇降機構とを備えた半導体収納容器開閉装置において、
上記半導体収納容器の蓋を開ける時の最大速度を、上記半導体製造装置内部の圧力と外界の圧力との差圧で除した速度差圧比を0.06m/(s・Pa)以下とするオープナの開き動作速度に設定することを特徴とする半導体収納容器開閉装置。 - 上記降下されたオープナおよびオープナ昇降機構を覆うカバーを備え、
上記半導体収納容器開閉装置裏側の上記カバー下部に開口を設けたことを特徴とする請求項1記載の半導体収納容器開閉装置。 - 上記半導体収納容器開閉装置裏側の上記カバー下部に排気ファンを設けたことを特徴とする請求項2記載の半導体収納容器開閉装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008090109A JP4601683B2 (ja) | 2008-03-31 | 2008-03-31 | 半導体収納容器開閉装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008090109A JP4601683B2 (ja) | 2008-03-31 | 2008-03-31 | 半導体収納容器開閉装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21172499A Division JP4260298B2 (ja) | 1999-07-27 | 1999-07-27 | 半導体部品の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008172276A JP2008172276A (ja) | 2008-07-24 |
JP4601683B2 true JP4601683B2 (ja) | 2010-12-22 |
Family
ID=39700001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008090109A Expired - Fee Related JP4601683B2 (ja) | 2008-03-31 | 2008-03-31 | 半導体収納容器開閉装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4601683B2 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05226205A (ja) * | 1991-11-12 | 1993-09-03 | Nec Corp | ロードロック型真空処理装置 |
JPH09153530A (ja) * | 1995-11-30 | 1997-06-10 | Tokyo Electron Ltd | クリーン度の高い検査装置 |
JPH10125763A (ja) * | 1996-08-29 | 1998-05-15 | Tokyo Electron Ltd | 処理装置 |
JPH10321698A (ja) * | 1997-05-21 | 1998-12-04 | Tokyo Electron Ltd | 基板処理方法及びその装置 |
-
2008
- 2008-03-31 JP JP2008090109A patent/JP4601683B2/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05226205A (ja) * | 1991-11-12 | 1993-09-03 | Nec Corp | ロードロック型真空処理装置 |
JPH09153530A (ja) * | 1995-11-30 | 1997-06-10 | Tokyo Electron Ltd | クリーン度の高い検査装置 |
JPH10125763A (ja) * | 1996-08-29 | 1998-05-15 | Tokyo Electron Ltd | 処理装置 |
JPH10321698A (ja) * | 1997-05-21 | 1998-12-04 | Tokyo Electron Ltd | 基板処理方法及びその装置 |
Also Published As
Publication number | Publication date |
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JP2008172276A (ja) | 2008-07-24 |
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