JP4594355B2 - Industrial equipment remote maintenance system and method - Google Patents

Description

  The present invention relates to a remote maintenance system and method for industrial equipment requiring maintenance such as equipment for semiconductor production.

  Conventionally, maintenance of industrial equipment that requires maintenance, such as equipment for semiconductor device manufacturing and maintenance such as periodic maintenance, is handled by maintenance personnel by telephone or facsimile when trouble occurs, or regularly or urgently. Personnel visited the equipment installation factory for maintenance.

  However, the rapid increase in investment in semiconductor production in recent years is creating a chronic shortage of maintenance personnel as the number of production equipment installed increases. In addition, with the global expansion of the production system, production bases are scattered in remote areas in Japan and overseas with the aim of lower cost regions. Due to such changes in the situation, it is becoming more difficult to quickly deal with troubles and regular maintenance than in the past, and how to solve this has become a major issue. In addition, with the spread of production bases, there is a problem that maintenance information remains at each production base and information sharing across production bases becomes less common, making it difficult to make use of past trouble experiences.

The present invention has been made in view of such a problem, and provides a remote maintenance system and method for a semiconductor device manufacturing apparatus that can manage maintenance information centrally, share the information, and enable rapid maintenance. The purpose is to provide.

1st invention is the remote maintenance system of the apparatus for semiconductor device manufacture connected to the intranet,
A database for recording information on an abnormal state of the apparatus for manufacturing a semiconductor device, information on a method for coping with the abnormal state including a coping method by online processing and a coping method by offline processing;
Information on the abnormal state of the semiconductor device manufacturing apparatus received via the Internet from a monitoring device that monitors the semiconductor device manufacturing apparatus is recorded in the database,
Based on the information on the abnormal state of the semiconductor device manufacturing apparatus received from the monitoring device via the Internet and the information recorded in the database, if online processing can be handled, online processing is performed,
Authenticate access to the database from a mobile terminal connected to the Internet,
The authentication permits the access to the information on the handling method by the offline processing recorded in the database and the input of the handling method information performed by the offline processing to the database.
A remote maintenance system for an apparatus for manufacturing a semiconductor device.

In addition, the second invention has a database for recording information on an abnormal state of a semiconductor device manufacturing apparatus and information on a countermeasure method for the abnormal condition including a countermeasure method by online processing and a countermeasure method by offline processing. And a remote maintenance method of a semiconductor device manufacturing apparatus by a host computer connected to an intranet,
A receiving step of receiving information on an abnormal state of the semiconductor device manufacturing apparatus via the Internet from a monitoring apparatus that monitors the semiconductor device manufacturing apparatus ;
A recording step of recording the information received in the receiving step in the database;
Line processing step of performing online processing if the monitoring device on the basis of the information recorded with the information of the abnormal condition of the semiconductor device manufacturing equipment which has received the database via the Internet from, can be dealt with online processing When,
An authentication step of authenticating access to the database from a mobile terminal connected to the Internet;
Permitted by the authentication performed by the authentication step, by the access, the input to the database of information Action performed by reference and offline processing of information Action by the recorded off-line processing in the database An authorization step to
A method for remotely maintaining a semiconductor device manufacturing apparatus , comprising:

According to the present invention, it is possible to provide a remote maintenance system and method for a semiconductor device manufacturing apparatus that can manage maintenance information in a centralized manner, share the information, and enable rapid maintenance.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<First Embodiment of Remote Maintenance System for Industrial Equipment>
FIG. 1 is an overall schematic diagram of a remote maintenance system for industrial equipment. Reference numeral 101 denotes a business office of a vendor (equipment supplier) that provides industrial equipment. In this example, as an industrial device, a device for manufacturing a semiconductor device used in a semiconductor factory, for example, a pre-process device (exposure device, coating and developing device, heat treatment device, etc.) or a post-process device (assembly device, inspection device, etc.) is assumed. is doing. Reference numerals 102, 103, and 104 denote production factories for industrial equipment users (semiconductor device manufacturers), and the factories are scattered in remote places in Japan or overseas. In this embodiment, each factory 102, 103, 104 is assumed to be a factory of a different company user, but these are different factories of the same manufacturer (for example, a pre-process factory or a post-process factory for semiconductor manufacturing). It may be.

  In each factory 102, 103, 104, a plurality of industrial devices 106, a LAN 109 (intranet) connecting them, and a host computer 107 that monitors the operating status of each industrial device 106 are installed. In addition, the host computer 107 in each factory can communicate maintenance information with the host computer 108 of the vendor 101 that is a host management system via the Internet 105 that is a communication means that covers all over the world. Various information including maintenance information is stored in the host computer. As a communication protocol for communicating maintenance information, a packet communication protocol (TCP / IP) used on the Internet is used.

  The vendor's host computer 108 can grasp the operation status of the industrial equipment 106 in each factory 102, 103, 104 of the user from time to time, and each vendor's department, for example, maintenance department, manufacturing department, development department, etc. Maintenance information can be referred to also from the computer 110, and is fed back to maintenance, manufacturing, and development.

  The host computer 107 installed in each factory periodically monitors the operating status of the n industrial devices 106 according to the flow shown in FIG. That is, the operational status of the industrial equipment 106 is sequentially monitored (steps 203 to 207). If there is an abnormality, information on the status of the equipment is collected (step 204), and information is sent to the vendor via the Internet 105. Communicate and report (step 205).

  On the other hand, the host computer 107 of the vendor 101 stands by for 24 hours for communication from the host computer 107 installed in each factory. The flowchart shown in FIG. 3 shows an operation flow of the vendor host computer 108 when a report is received from the user host computer 107 to the vendor host computer 108 in response to an abnormality in the industrial device 106 of the vendor 101. . The trouble report is monitored (step 302), and if the report is recognized, detailed information on the operating state of the industrial device 106 having an abnormality is collected (step 303). Based on the information, a trouble DB (trouble database) provided in the vendor's host computer 108 is referred to and it is checked whether or not the contents are registered through experience in the past (step 304). In the case of a new trouble that is not registered, new trouble is automatically registered in the trouble DB (step 305), and the database is sequentially updated. Then, the process is reported to the person in charge (306).

  On the other hand, the flowchart shown in FIG. 4 shows a corresponding flow of the maintenance system. First, the system automatically determines whether troubleshooting is necessary by referring to the information in the database, and also asks the maintenance staff to determine the reliability (step 312). If there is no need to take any action, watching is performed in preparation for the reproduction of the phenomenon (step 314). If a countermeasure is required, an optimum countermeasure method is selected with reference to past database accumulated information (step 318). Specifically, it is first determined whether or not it is possible to cope with remote online processing via a network. If it is a software problem, consider whether it can be handled by modifying the operating memory contents of the industrial equipment or modifying the software via the network. If possible, update the data or supply the software by online remote operation. Update is performed (step 317). If it is not possible to cope with the online processing on the network, the user's operator is instructed to deal with it using means such as e-mail, facsimile, or telephone (step 316). For serious troubles that still cannot be made, a vendor maintenance staff visits the user and takes action (step 315). All of the above information records the contents and countermeasures in the trouble DB and sequentially updates the database (step 318).

  The operation terminal for accessing the trouble DB incorporates dedicated or general-purpose Internet access browser software, and has a user interface having a screen as shown in FIG. 5, for example. From this screen, the operator can use the industrial equipment model (401), equipment serial number (402), trouble subject (403), date of occurrence (404), trouble urgency (405), symptom (406), and countermeasures. (407) and progress (408) are input. Further, the hyperlink function (410, 411, 412) accesses a database of more detailed latest information of each item, the latest version software from the software library of industrial equipment, and further auxiliary information (operation guide) to the operator. ) Etc. from the host management system. It is also possible to access various information on the Internet using this browser.

  The trouble DB can be referred to and entered by maintenance department, manufacturing department, and development department personnel using a computer 110 connected to the LAN 109 of the vendor's office 101, and external maintenance personnel can use the mobile terminal via the Internet 105. It is also possible to refer to and input with. As a result, the information held by each department of the vendor can be centrally accumulated and managed, and the latest information can always be obtained by each department of the vendor. In addition, by releasing a part of the information in the trouble DB to the user, the user can access various trouble information accumulated in the past, and the user can take appropriate measures. In this way, maintenance efficiency is dramatically improved by sharing maintenance information among vendors and multiple users.

  On the other hand, a communication security system is provided so that a third party cannot refer to confidential information when the trouble DB is opened using the Internet. In this system, in addition to password authentication, registered computers are registered in advance in the vendor's host computer 108 to restrict registered users and prohibit access from an unspecified number. FIG. 6 is an explanatory diagram thereof. 108 is a host computer of a vendor, 107 is a host computer of each factory, and these are connected via the Internet 105. Communication when the user accesses the database 501 of the host computer 108 with the browser 500 is performed by encrypted packet communication. In order to realize this, both the host computers 108 and 107 include encryption / decryption algorithm devices 502 and 504 and communication means 503 and 505, respectively. The encryption / decryption algorithm is different for each factory (user) and is periodically changed to enhance security.

  As described above, in the system according to the present embodiment, maintenance information on industrial equipment is communicated by utilizing the existing infrastructure, the Internet, its communication protocol, and software for accessing the Internet. It reduces the burden of laying lines and developing new software, making it possible to build a quick and low-cost remote maintenance system.

  In addition, by connecting multiple factories with industrial equipment and vendor management systems via communication means, centrally managing various maintenance information and sharing information, it is possible to transcend production bases. The experience of past troubles can be utilized, and the troubles can be quickly dealt with. In particular, if maintenance information is shared between different user companies, it can also contribute to improving the efficiency of the entire industry.

<Second Embodiment of Remote Maintenance System for Industrial Equipment>
FIG. 7 is a conceptual diagram of an industrial equipment maintenance system according to the second embodiment of the present invention. In the previous embodiment, a plurality of user factories each equipped with industrial equipment and a management system of a vendor of the industrial equipment are connected by communication means, and the industrial equipment of each factory is connected via the communication means. However, in this embodiment, a factory equipped with a plurality of vendors' industrial devices and a management system of each vendor of the plurality of industrial devices are connected by communication means. Thus, maintenance information of each industrial device is communicated via the communication means.

  In FIG. 7, reference numeral 201 denotes an industrial equipment user (semiconductor device manufacturer) production factory, and an exposure apparatus 202, a coating and developing apparatus 203, and a heat treatment apparatus 204, which are semiconductor device manufacturing apparatuses, are introduced into the factory production line. Has been. Each of these devices is connected via a LAN 206 (intranet), and the line operation is managed by the production management host computer 205. On the other hand, vendors (apparatus supply manufacturers) such as the exposure apparatus manufacturer 210, the coating and developing apparatus manufacturer 220, and the heat treatment apparatus manufacturer 230 have host management systems 211, 211, and 231 for performing remote maintenance of supply devices. I have. The host computer 205 that manages each device in the user's production factory and the vendor management systems 211, 221, and 231 of each device are connected by the Internet 200 as a communication means.

  In this system, if a trouble occurs in any of a series of production equipment on the production line, the operation of the production line stops. However, by receiving remote maintenance via the Internet from the vendor of the troubled equipment. Quick response is possible and production line outages can be minimized. Each vendor's host management system includes a trouble DB as described in the first embodiment, and stores maintenance information. In addition, the communication between the production factory and each vendor is equipped with a different communication security system to prevent leakage of confidential information. Since the specific contents and method of maintenance are the same as those in the first embodiment, detailed description thereof will be omitted.

  As described above, in the system according to the present embodiment, the user's factory having industrial devices of a plurality of vendors on the production line and the management system of each vendor are connected by communication means to communicate maintenance information. Therefore, even if trouble occurs in equipment during production, it is possible to receive prompt maintenance from the required vendor, and it is possible to increase production efficiency by minimizing the time that the line stops. In particular, if maintenance information is shared among different vendor companies, it can contribute to improving the efficiency of the entire industry.

<Embodiment of Semiconductor Device Production Method>
Next, an example of a semiconductor device production method using the remote maintenance system described above will be described.

  FIG. 8 shows the flow of manufacturing a microdevice (semiconductor chip such as IC or LSI, liquid crystal panel, CCD, thin film magnetic head, micromachine, etc.). In step 1 (circuit design), a semiconductor device circuit is designed. In step 2 (mask production), a mask on which the designed circuit pattern is formed is produced. On the other hand, in step 3 (wafer manufacture), a wafer is manufactured using a material such as silicon. Step 4 (wafer process) is called a pre-process, and an actual circuit is formed on the wafer by lithography using the prepared mask and wafer. The next step 5 (assembly) is referred to as a post-process, and is a process for forming a semiconductor chip using the wafer produced in step 4, such as an assembly process (dicing, bonding), a packaging process (chip encapsulation), and the like. including. In step 6 (inspection), inspections such as an operation confirmation test and a durability test of the semiconductor device manufactured in step 5 are performed. Through these steps, the semiconductor device is completed and shipped (step 7). The pre-process and post-process are performed in separate dedicated factories, and maintenance is performed for each of these factories by the remote maintenance system described above.

  FIG. 9 shows a detailed flow of the wafer process. In step 11 (oxidation), the wafer surface is oxidized. In step 12 (CVD), an insulating film is formed on the wafer surface. In step 13 (electrode formation), an electrode is formed on the wafer by vapor deposition. In step 14 (ion implantation), ions are implanted into the wafer. In step 15 (resist process), a photosensitive agent is applied to the wafer. In step 16 (exposure), the circuit pattern of the mask is printed onto the wafer by exposure using an exposure apparatus. In step 17 (development), the exposed wafer is developed. In step 18 (etching), portions other than the developed resist image are removed. In step 19 (resist stripping), unnecessary resist after etching is removed. By repeating these steps, multiple circuit patterns are formed on the wafer. Since the production equipment used in each process is maintained by the remote maintenance system described above, it is possible to prevent troubles in advance and to recover quickly even if trouble occurs. Productivity can be improved.

  According to the embodiment described above, an effective maintenance system can be constructed with a small investment regardless of the installation area of the equipment by using the world-wide Internet as a communication means for remote maintenance of industrial equipment. It becomes possible to do.

  In addition, remote maintenance can be performed by connecting the user factory where the industrial equipment is installed and the vendor's management system via communication means, so that trouble can be quickly dealt with, and maintenance can be performed by sharing maintenance information. We can expect improvement of ability.

The conceptual diagram of the industrial equipment maintenance system by 1st Embodiment Diagram showing the device monitoring flow of the host computer installed at the user Diagram showing the device monitoring flow of the host computer installed at the vendor Figure showing the maintenance department's response flow Figure showing an example of the user interface on the trouble database input screen Illustration of security system The conceptual diagram of the industrial equipment maintenance system by 2nd Embodiment Diagram showing semiconductor device manufacturing flow Diagram showing detailed flow of wafer process

Explanation of symbols

101 Vendor's Office 102-104 User's Production Factory 105 Internet 106 Industrial Equipment 107 Host Computer at Each Factory (User) 108 Vendor's Host Computer 109 LAN
110 Vendor Department Computer 200 Internet 201 User Production Factory 202 Exposure Device 203 Coating and Development Device 204 Heat Treatment Device 205 Production Management Host Computer 206 LAN
210 Exposure Equipment Manufacturer Office 211 Host Management System 220 Coating and Development Equipment Manufacturer Office 221 Host Management System 230 Heat Treatment Equipment Manufacturer Office 231 Host Management System

Claims (5)

A remote maintenance system for semiconductor device manufacturing equipment connected to an intranet,
A database for recording information on an abnormal state of the apparatus for manufacturing a semiconductor device, information on a method for coping with the abnormal state including a coping method by online processing and a coping method by offline processing;
Information on the abnormal state of the semiconductor device manufacturing apparatus received via the Internet from a monitoring device that monitors the semiconductor device manufacturing apparatus is recorded in the database,
Based on the information on the abnormal state of the semiconductor device manufacturing apparatus received from the monitoring device via the Internet and the information recorded in the database, if online processing can be handled, online processing is performed,
Authenticate access to the database from a mobile terminal connected to the Internet,
The authentication permits the access to the information on the handling method by the offline processing recorded in the database and the input of the handling method information performed by the offline processing to the database.
A remote maintenance system for an apparatus for manufacturing a semiconductor device.   The remote maintenance system according to claim 1, wherein either data or software related to the coping method is supplied as the online processing.   3. The remote maintenance according to claim 1, wherein remote maintenance of the semiconductor device manufacturing apparatus monitored by each of the plurality of monitoring apparatuses is performed based on the information on the abnormal state from each of the plurality of monitoring apparatuses. system.   The remote maintenance system according to any one of claims 1 to 3, wherein communication data with the mobile terminal connected to the Internet is encrypted / decrypted according to an encryption / decryption algorithm. A database for recording information on an abnormal state of a semiconductor device manufacturing apparatus and information on a method for dealing with the abnormal state including a method for dealing with online processing and a method for dealing with offline processing, and connected to an intranet; A remote maintenance method of a semiconductor device manufacturing apparatus by a host computer,
A receiving step of receiving information on an abnormal state of the semiconductor device manufacturing apparatus via the Internet from a monitoring apparatus that monitors the semiconductor device manufacturing apparatus;
A recording step of recording the information received in the receiving step in the database;
An on-line processing step for performing on-line processing when it is possible to deal with on-line processing based on information on an abnormal state of the semiconductor device manufacturing apparatus received from the monitoring apparatus via the Internet and information recorded in the database; and ,
An authentication step of authenticating access to the database from a mobile terminal connected to the Internet;
Permission to permit the access to refer to the information of the coping method by the offline processing recorded in the database and the input of the coping method information performed by the offline processing to the database by the authentication performed by the authentication step. Steps,
A method for remotely maintaining a semiconductor device manufacturing apparatus, comprising:

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