JP2003077785A - Device manufacturing equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide device manufacturing equipment enabling accurate recognition of an actual using state of a user, increasing reliability in a practical state and contributing to development and design of a succeeding machine kind. SOLUTION: The device manufacturing equipment is provided with a means for summing up and storing history of execution of a device command and change of a control parameter.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device manufacturing apparatus such as an exposure apparatus used for manufacturing a device having a fine pattern such as a semiconductor element, and acquires an operation history of software commands / change history of control parameters.
Based on this, based on this, the convenience of operation is improved by changing the user interface of the device so that it is easier to execute commands that are used more frequently and change parameters that are changed more frequently, and By using the above-mentioned history data, it is possible to perform a software test under conditions close to the usage status of the device user.

[0002]

2. Description of the Related Art As the functions required for semiconductor manufacturing equipment have diversified, the number of types of software control commands and control parameters required to realize those functions has increased. The amount of confirmation work, especially the amount of software test and quality inspection work, becomes enormous.

Further, even if the individual commands are operating normally, there is a possibility that a specific command may not operate well due to a combination of various conditions. To prevent this from happening, in the pre-shipment inspection, in addition to confirming the operation of each function, set a test case that assumes the situation and conditions actually used by the user, perform a test based on that, It is common to make sure there are none.

Further, from the viewpoint of user friendliness, the developer has to decide how new parameters and commands should be added to the device interface.

Therefore, when developing a new function, the user is asked directly what kind of situation the function is used in, how often it is used, and how it is used in association with the existing function. After indirectly collecting user request information, the function is designed / developed and tested according to the information.

[0006]

However, the acquisition of information on the user's usage status as described above tends to be abstracted and generalized before it reaches the person in charge of development after some time. Even if a function is developed according to information, it may be used differently from the assumption at the time of development when actually used by the user. Even if the information is correct at that time, it is difficult to follow the user's request because the device operation of the user who is the semiconductor manufacturer changes with the change of the manufacturing process.

Similarly, even if the user wants to perform a pre-shipment inspection under the assumption of conditions and conditions actually used, if the user's usage conditions cannot be accurately grasped, the purpose cannot be achieved. turn into.

The present invention solves these problems.
It is possible to grasp the actual usage condition more accurately,
Therefore, it is an object of the present invention to provide a device manufacturing apparatus which is more reliable in a practical state and contributes to the development and design of a successor model. Another object is to provide a user-friendly device manufacturing apparatus that enhances operability by the user.

[0009]

To achieve the above object, the semiconductor manufacturing apparatus of the present invention is characterized by having means for accumulating and storing history of execution of apparatus commands and changes of control parameters. It is preferable that the history includes a totaling result of command use frequencies and parameter changing frequencies, and the device manufacturing apparatus further has means for simplifying the inputting operation of the command and the changing operation of the parameter based on the totaling result. Further, it is preferable that the operation confirmation test that matches the usage condition of the customer can be carried out by reproducing the command execution order and the parameter setting condition on the device based on the totalized result.

The means for simplifying the operation, for example, controls the input operation screen for the command and rearranges the execution buttons for frequently used commands so that they are located higher than the input operation screen. . Alternatively, the control parameter change history is referred to, and the screen configuration is changed so that the change screen of the parameter having a high change frequency can be transited in a smaller number of steps.

A semiconductor manufacturing apparatus according to a preferred embodiment of the present invention includes history data acquisition means for accumulating command execution history and parameter change history, history data totaling means for totaling history data in order of frequency, and totalization results. Based on the user interface control means that can automatically change frequently used commands and parameters into a form that is easy to operate, device state restoration means that resets device parameters based on history data, and history data Device operation reproducing means for sequentially executing commands based on the above, and data input / output means for providing history data / acquired data to the outside using a medium or communication means and for fetching history data / acquired data from the outside, Equipped with.

[0012]

According to the present invention, the means for accumulating and storing the history of execution of device commands and changes of control parameters is provided, so that the device maker can accurately know the user's device operation state, and at the time of shipment. The operation test and quality inspection of the device during maintenance can be performed more appropriately. Further, the succeeding model design developer can more accurately understand the user's request, and can use the information as the information for designing and developing a new product in response to the user's request.

Further, since the command usage status and parameter modification status of the user are stored as history data, based on this, commands that are frequently used can be used with fewer operations, and the frequency of modification is high. The parameter is
The operability can be improved by automatically changing the user interface of the device so that it can be changed with less operation. Furthermore, if the user's command usage status and parameter conditions are reproduced on the device, the operation confirmation test can be performed under conditions closer to the user's usage status.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below based on examples. FIG. 1 shows a part of the configuration of a semiconductor manufacturing apparatus according to an embodiment of the present invention. In the figure,
1 is a C for controlling the entire apparatus sequence of the semiconductor manufacturing apparatus
PU, 2 is a history data acquisition unit including a program for acquiring the software command execution history and the parameter change history as data, and 3 is a history data storage unit including a hard disk for storing the acquired history data and the aggregation result. Reference numeral 4 denotes an input / output device such as an MO drive or a communication means (data input / output means) for exchanging data with the outside of the device, and 5 a display device with a touch panel used by the device user to activate commands and change parameters. A user interface consisting of
User interface control software 6 is a program having a function of changing the user interface 6 based on history data. Reference numeral 7 is history data totaling means including a program for totaling acquired history data, 8 is device state restoring means including a program having a function of restoring parameters based on history data, and 9 is a function of sequentially executing commands based on history data. It is a device operation reproducing means consisting of a program having.

In the apparatus of FIG. 1, when the apparatus sequence control CPU 1 executes each command in accordance with the operation of the apparatus user, the history data acquisition program (history data acquisition means) 2 operates to store history data in the history data storage means 3
At the same time, the history data totaling program (history data totaling means) 7 is activated and the frequency of use is totaled.

An interface screen (user interface) 5 is used to activate a command or change a control parameter for the apparatus. A program (user interface control software) 6 for controlling the screen is used for the above history data. , And rearrange the execution buttons for frequently used commands so that they are located higher in the interface screen.
The operation time of the user can be shortened. Also, by referring to the change history of the control parameters and changing the screen configuration so that the change screen of the parameter that is frequently changed can be transitioned with a smaller number of steps, it is possible to similarly shorten the operation time of the user. I can.

Further, the device state restoring means 8 operates the history data and the device state restoring program to set the parameter configuration at a designated point in the past, or during a fixed period.
By returning the device parameters to the parameter configuration that has been used for the longest time, it is possible to create an environment that matches actual usage conditions.

Further, by operating the history data and the device operation reproducing program by the device operation reproducing means 9 and repeating the command execution order in the designated period in the past, it is possible to create an environment that matches the actual use condition. .

This conforms to the purpose of confirming the operation of the software in accordance with the actual situation of use, and is a powerful means especially in the reproduction test when a defect occurs.

The history data can be passed to the outside of the apparatus through the data input / output means 4. As a result, the command execution history and parameter change history of the user's device are acquired and reflected in the device of the developer,
Even when developing a new version of software, it is possible to create a test environment that enables operation confirmation that reflects the conditions of use by the user, and it is possible to perform operation confirmation with higher reliability compared to conventional test methods.

<Example of Semiconductor Production System> Next, an example of a production system of semiconductor devices (semiconductor chips such as IC and LSI, liquid crystal panels, CCDs, thin film magnetic heads, and micromachines) will be described. This is for maintenance services such as troubleshooting and regular maintenance of manufacturing equipment installed in semiconductor manufacturing plants, or software provision.
This is done using a computer network outside the manufacturing plant.

FIG. 2 shows the entire system cut out from a certain angle. In the figure, 101 is a business office of a vendor (apparatus supplier) that provides a semiconductor device manufacturing apparatus. As an example of the manufacturing apparatus, a semiconductor manufacturing apparatus for various processes used in a semiconductor manufacturing factory, for example, pre-process equipment (exposure apparatus, resist processing apparatus, lithography apparatus such as etching apparatus, heat treatment apparatus, film forming apparatus, planarization apparatus) Equipment) and post-process equipment (assembling equipment, inspection equipment, etc.). In the business office 101, a host management system 10 that provides a maintenance database for manufacturing equipment is provided.
8. A plurality of operation terminal computers 110, and a local area network (LAN) 109 that connects these to construct an intranet. Host management system 10
Reference numeral 8 has a gateway for connecting the LAN 109 to the Internet 105, which is an external network of the office, and a security function for limiting access from the outside.

On the other hand, 102 to 104 are manufacturing factories of a semiconductor device maker as a user of the manufacturing apparatus. The manufacturing factories 102 to 104 may be factories belonging to different manufacturers or may be factories belonging to the same manufacturer (for example, a factory for pre-process, a factory for post-process, etc.). In each of the factories 102 to 104, a plurality of manufacturing apparatuses 106, a local area network (LAN) 111 that connects them to form an intranet, and a host apparatus as a monitoring apparatus that monitors the operating status of each manufacturing apparatus 106 are managed. A system 107 is provided. Each factory 1
02-104 host management system 107
Is provided with a gateway for connecting the LAN 111 in each factory to the Internet 105 which is an external network of the factory. As a result, the host management system 108 on the vendor 101 side can be accessed from the LAN 111 of each factory via the Internet 105, and only the limited user is permitted to access by the security function of the host management system 108. In particular,
Via the Internet 105, the factory side notifies the vendor side of status information indicating the operating status of each manufacturing apparatus 106 (for example, a symptom of a manufacturing apparatus in which a trouble has occurred), and response information corresponding to the notification (for example, It is possible to receive maintenance information such as information instructing how to deal with troubles, software and data for dealing with troubles, the latest software, and help information from the vendor side. For data communication between the factories 102 to 104 and the vendor 101 and data communication on the LAN 111 in each factory, a communication protocol (T
CP / IP) is used. Instead of using the Internet as an external network outside the factory, it is also possible to use a leased line network (ISDN or the like) which is highly secure without being accessed by a third party. Further, the host management system is not limited to one provided by a vendor, and a user may construct a database and place it on an external network to permit access from a plurality of factories of the user to the database.

Now, FIG. 3 is a conceptual diagram showing the whole system of this embodiment cut out from an angle different from that of FIG.
In the above example, a plurality of user factories each equipped with a manufacturing apparatus and a management system of a vendor of the manufacturing apparatus are connected by an external network, and production management of each factory or at least one unit is performed via the external network. The information of the manufacturing apparatus was data-communicated. On the other hand, in this example, a factory equipped with manufacturing equipment of a plurality of vendors and a management system of each vendor of the plurality of manufacturing equipments are connected by an external network outside the factory, and maintenance information of each manufacturing equipment is displayed. It is for data communication. In the figure, reference numeral 201 denotes a manufacturing factory of a manufacturing apparatus user (semiconductor device maker), and a manufacturing apparatus for performing various processes is installed on the manufacturing line of the factory. Has been introduced. In addition, in FIG.
Only 01 is drawn, but in reality, multiple factories are similarly networked. Each device in the factory is a LAN
The host management system 205 manages the operation of the manufacturing line by connecting them at 206 to form an intranet. On the other hand, each business office of a vendor (apparatus supply manufacturer) such as an exposure apparatus maker 210, a resist processing apparatus maker 220, a film forming apparatus maker 230, etc., has host management systems 211 and 22 for performing remote maintenance of the supplied apparatus.
1, 231 which, as mentioned above, comprise the maintenance database and the gateway of the external network. A host management system 205 that manages each device in the user's manufacturing plant, and a vendor management system 211, 2 for each device
21 and 231 are connected to each other via the external network 200 such as the Internet or a leased line network. In this system, if a trouble occurs in any of the series of manufacturing equipment on the manufacturing line, the operation of the manufacturing line is suspended, but the vendor of the equipment in trouble receives remote maintenance via the Internet 200. This enables quick response and minimizes production line downtime.

Each manufacturing apparatus installed in the semiconductor manufacturing factory has a display, a network interface, and a computer for executing network access software and apparatus operation software stored in a storage device. The storage device is a built-in memory, a hard disk, or a network file server. The network access software includes a dedicated or general-purpose web browser,
For example, a user interface having a screen as shown in FIG. 4 is provided on the display. The operator who manages the manufacturing apparatus at each factory refers to the screen, and the manufacturing apparatus model (401), serial number (402), trouble subject (403), date of occurrence (404), urgency (4)
05), symptom (406), coping method (407), progress (4)
08) etc. is input to the input items on the screen. The input information is transmitted to the maintenance database via the Internet, and the appropriate maintenance information as a result is returned from the maintenance database and presented on the display. Further, the user interface provided by the web browser further realizes a hyperlink function (410 to 412) as shown in the figure, and the operator can access more detailed information of each item or use the software library provided by the vendor for the manufacturing apparatus. You can pull out the latest version of the software, or pull out the operation guide (help information) for reference by the factory operator. Here, the maintenance information provided by the maintenance database also includes information on the storage history of the device command execution history and control parameter change history described above, and the software library stores the device command execution history and control parameters. We also provide the latest software to realize the function of storing and tabulating change history.

Next, a semiconductor device manufacturing process using the above-described production system will be described. FIG. 5 shows a flow of the whole manufacturing process of the semiconductor device. In step 1 (circuit design), a semiconductor device circuit is designed. In step 2 (mask manufacturing), a mask having the designed circuit pattern is manufactured. On the other hand, step 3
In (wafer manufacture), a wafer is manufactured using a material such as silicon. Step 4 (wafer process) is called a pre-process, and an actual circuit is formed on the wafer by the lithography technique using the mask and the wafer prepared above. The next step 5 (assembly) is called a post-process, and step 4
This is a step of forming a semiconductor chip using the wafer manufactured by, and includes an assembly step such as an assembly step (dicing, bonding) and a packaging step (chip encapsulation). In step 6 (inspection), the semiconductor device manufactured in step 5 undergoes inspections such as an operation confirmation test and a durability test. A semiconductor device is completed through these processes and shipped (step 7). The front-end process and the back-end process are performed in separate dedicated factories, and maintenance is performed for each of these factories by the remote maintenance system described above. Information for production management and device maintenance is also data-communicated between the front-end factory and the back-end factory via the Internet or the leased line network.

FIG. 6 shows a detailed flow of the wafer process. In step 11 (oxidation), the surface of the wafer is oxidized. In step 12 (CVD), an insulating film is formed on the wafer surface. In step 13 (electrode formation), electrodes are formed on the wafer by vapor deposition. In step 14 (ion implantation), ions are implanted in the wafer. Step 15
In (resist processing), a photosensitive agent is applied to the wafer. In step 16 (exposure), the circuit pattern of the mask is printed and exposed on the wafer by the exposure apparatus which is one of the device manufacturing apparatuses described above. In step 17 (development), the exposed wafer is developed. In step 18 (etching), parts other than the developed resist image are removed. Step 1
In 9 (resist peeling), the unnecessary resist after etching is removed. By repeating these steps, multiple circuit patterns are formed on the wafer. Since the manufacturing equipment used in each process is maintained by the remote maintenance system described above, troubles can be prevented in advance, and even if troubles occur, quick recovery is possible, and Productivity can be improved.

[0028]

As described above, according to the present invention, the means for accumulating and storing the history of the execution of the device command and the change of the control parameter is provided, so that the device maker can know the user's device operating state accurately, Can be more appropriately tested and inspected. In addition, the device design developer can more accurately understand the user's request, which can be helpful in designing and developing a new product which is easier to use.

Furthermore, depending on the result of the accumulation, commands that are frequently used can be used with fewer operations, and
By changing the user interface of the device automatically so that the parameters that are frequently changed can be changed with less operation, operability can be improved and the user's command usage status and parameter conditions can be changed on the device. If it is reproduced, the operation confirmation test can be performed under the condition closer to the usage condition of the user.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of a semiconductor manufacturing apparatus according to an embodiment of the present invention.

FIG. 2 is a conceptual view of the semiconductor device production system viewed from an angle.

FIG. 3 is a conceptual view of the semiconductor device production system viewed from another angle.

FIG. 4 is a specific example of a user interface.

FIG. 5 is a diagram illustrating a flow of a device manufacturing process.

FIG. 6 is a diagram illustrating a wafer process.

[Explanation of symbols]

1: CPU, 2: history data acquisition means, 3: history data storage means, 4: data input / output means, 5: user interface, 6: user interface control software, 7: history data aggregation means, 8: device state restoration means ,
9: Device operation reproducing means.

Claims (12)

[Claims] 1. A device manufacturing apparatus having means for accumulating and storing a history of execution of apparatus commands and changes of control parameters. 2. The history includes an aggregated result of command use frequency and parameter change frequency, and the device manufacturing apparatus further comprises means for simplifying the input operation of the command and the parameter change operation based on the aggregated result. The device manufacturing apparatus according to claim 1, wherein: 3. The means for simplifying the operation controls the input operation screen of the command and rearranges the execution buttons of frequently used commands so that they are located higher than the input operation screen. The device manufacturing apparatus according to claim 2, which is a means. 4. The means for simplifying the operation is a means for referring to a change history of a control parameter and changing a screen configuration so that a change screen of a parameter having a high change frequency can be transited in a smaller number of steps. Item 2. The device manufacturing apparatus according to Item 2 or 3. 5. The history includes an aggregated result of command use frequency and parameter change frequency, and the device manufacturing apparatus further has means for reproducing the command execution order and parameter setting condition on the apparatus according to the aggregated result. The device manufacturing apparatus according to any one of claims 1 to 4. 6. The device manufacturing apparatus according to claim 1, further comprising a display, a network interface, and a computer that executes network software, and stores maintenance information for the device manufacturing apparatus. A device manufacturing apparatus that enables data communication via a computer network. 7. The network software is connected to an external network of a factory where the device manufacturing apparatus is installed, and has a user interface for accessing a maintenance database provided by a vendor or a user of the device manufacturing apparatus on the display. 7. The device according to claim 6, which is provided to the user and enables to obtain information from the database via the external network. 8. A step of installing a manufacturing apparatus group for various processes including the device manufacturing apparatus according to claim 1 in a semiconductor manufacturing factory, and a plurality of processes using the manufacturing apparatus group. And a step of manufacturing a semiconductor device according to the present invention. 9. Data communication of information relating to at least one of said manufacturing apparatus group between the step of connecting said manufacturing apparatus group by a local area network and between said local area network and an external network outside said semiconductor manufacturing factory. The method according to claim 8, further comprising: 10. A database provided by a vendor or a user of the device manufacturing apparatus is accessed through the external network to obtain maintenance information of the manufacturing apparatus by data communication, or a semiconductor manufacturing different from the semiconductor manufacturing factory. The method according to claim 9, wherein production management is performed by data communication with a factory via the external network. 11. A manufacturing apparatus group for various processes including the device manufacturing apparatus according to claim 1, a local area network connecting the manufacturing apparatus groups, and a factory from the local area network. A semiconductor manufacturing factory having a gateway that enables access to an external network outside, and capable of performing data communication of information regarding at least one of the manufacturing apparatus group. 12. The method according to claim 1, wherein the semiconductor manufacturing factory is installed.
7. The device manufacturing apparatus maintenance method according to any one of claims 1 to 7, wherein a vendor or a user of the device manufacturing apparatus provides a maintenance database connected to an external network of a semiconductor manufacturing factory, And a step of permitting access to the maintenance database from within the manufacturing factory via the external network, and a step of transmitting the maintenance information accumulated in the maintenance database to the semiconductor manufacturing factory side via the external network. And a device manufacturing apparatus maintenance method.