JP2001307971A - Semiconductor manufacturing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus wherein the error message adapted to its utilization of a user can be registered, and the proper error message to its trouble is outputted to its operator when its trouble has been generated, and the present processsing state of its trouble can be also registered. SOLUTION: The semiconductor manufacturing apparatus has a data storing portion 11 capable of storing therein the generative information of its trouble which was generated at a past time, the content information of its processing which was performed at that past time, and its present status information; a displaying means 16 for displaying thereby concurrently the past trouble information whereon it processed an error message and the present trouble information; a trouble registering means 14 for recording thereby in the data storing portion 11 the generative information of its trouble when it has been generated; an input updating means 15 whereby its user can register the generative information of its trouble, its status information, and the content information of its processing; and a displaying apparatus 17 for displaying therein the error message when its trouble has been generated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a semiconductor manufacturing apparatus,
In particular, the present invention relates to a semiconductor manufacturing apparatus having an error message display function.

[0002]

2. Description of the Related Art In a conventional semiconductor manufacturing apparatus, when any trouble occurs in the apparatus, the contents of the trouble, an assumed cause, a general remedy method, and the like are included, and are prepared in advance by a vendor. An error message was output to the display of the device.

[0003] The operator of the device recognizes that the device has a trouble by seeing the error message, and performs a recovery work by taking a general predetermined treatment method described in the error message. Was. Further, if the recovery cannot be performed by the general predetermined treatment method, the device manual, the past occurrence case, the inquiry to the vendor, and the like are performed to find the treatment method in the user environment. Restoration work was being performed.

[0004]

However, in recent years, various forms of utilization of semiconductor manufacturing apparatuses have been adopted by users, such as centralized management of a plurality of apparatuses and line configurations with apparatuses in other processes.

[0005] As described above, since the use of the device unique to each user has increased, an error message displayed when a device trouble occurs is common to all users prepared by the vendor side and is suitable for the use of each user. It has become no content. For example, the troubleshooting method varies depending on the usage of the user, and cannot be recovered by the displayed troubleshooting method. For this reason, the user needs to investigate a treatment method suitable for his / her own use form, and there is a problem that the time until the apparatus is restored is lost.

[0006] In addition, various modes of operation of the semiconductor manufacturing apparatus are taken by users. For example, a large number of operators operate and monitor one device, operate the device in automatic operation, or respond to a failure by a person in charge different from the operating operator. Various operation modes are adopted. In such an operation mode, there is no need to check the status of the device where the trouble has occurred, since an unspecified number of people cannot immediately know what kind of response status the device is in. There is a problem that occurs.

SUMMARY OF THE INVENTION The present invention has been made in view of such a problem, and allows a user to register an error message suitable for his / her own use of a device, and to output an appropriate error message to an operator when a device trouble occurs. It is another object of the present invention to provide a semiconductor manufacturing apparatus having a function capable of registering a current support status.

[0008]

In order to achieve the above object, the present invention relates to a semiconductor manufacturing apparatus for displaying an error message when an apparatus trouble occurs, in which information on occurrence of troubles occurring in the past and measures corresponding to the troubles are taken. It has a data storage unit capable of storing content information and current status information, and has display means for simultaneously displaying past and current trouble information corresponding to an error message.

Further, the semiconductor manufacturing apparatus according to the present invention has a trouble registering means for recording trouble information in the data storage unit when a trouble occurs, the trouble occurrence information, status information, and treatment content information. It is preferable to provide an input updating unit that allows the user to register the apparatus, and by connecting a plurality of the semiconductor manufacturing apparatuses via a network, trouble information for the same error message generated in another semiconductor manufacturing apparatus is searched and displayed. It is preferable to have a function of

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) A first embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram that best illustrates the features of the present invention, and shows the relationship between a control unit 1 and an error processing unit 2 inside a semiconductor manufacturing apparatus according to the embodiment, and the configuration of the error processing unit 2. I have. The error processing unit 2 of the semiconductor manufacturing apparatus includes a data storage unit 11,
The system includes a trouble registration unit 14, an input update unit 15, and a display unit 16. The data storage unit 11 stores an error message table 12 and a trouble information table 13
It is comprised including.

The data storage unit 11 is constituted by a memory of a hard disk device and is in the form of a database DB. An error message table 12 and a trouble information table 13 are present in the database DB. The error message table 12 stores commonly used general error messages, and includes information such as “title”, “guide”, and “method of coping” for each error code. The trouble information table 13 stores information on individual errors that have occurred during use of the semiconductor manufacturing apparatus. Data is added each time an error occurs, and an error history remains.

FIG. 2 is a diagram showing an example of the configuration of the trouble information table 13. The trouble information table 13 is
As shown in the figure, "trouble occurrence information area 21",
It is composed of a "status information area 22" and a "treatment content information area 23". The "trouble occurrence information area 21" has information of an error code, an occurrence date and time, a data update date and time, an occurrence cause, and a confirmer. When an error occurs, the error code and the occurrence date and time that occurred are recorded, and the user can display the information. The recognized occurrence cause and input information of the confirmer can be recorded, and the data update date and time when the data on the trouble information table 13 is updated is recorded.

The "status information area 22" is for recording the current status of the error that has occurred.
As the current status, four states of occurrence, investigation, waiting for treatment, and treatment completed can be displayed.

The "treatment content information area 23" has information of the treatment content, the treatment date and time, the person in charge of the treatment, and the memo. The input information of the person in charge can be recorded, and what is desired to be recorded for the error that has occurred can be recorded as a memo.

When the trouble registering means 14 shown in FIG. 1 receives an error occurrence signal from the semiconductor manufacturing equipment control section 1, it creates a new record and creates a new record in the trouble information table 13.
The additional error is written to and the occurrence error is recorded. Further, the trouble registration means 14 sends an error occurrence signal to the display means 16 to notify the occurrence of the error.

When the display means 16 receives the error occurrence signal, the display means 16 searches the data storage section 11 for the corresponding error message and past trouble information, and displays the same.
(CRT, liquid crystal display, etc.).

The input updating means 15 allows the user to input data from the input device 1.
8 (keyboard, mouse, touch panel, etc.), the relevant data on the trouble information table 13 is updated based on the trouble information relating to the generated error.

Next, the function and operation of the semiconductor manufacturing apparatus according to this embodiment will be described with reference to the flowchart of FIG. When any error occurs in a manufacturing process such as exposure, the semiconductor manufacturing apparatus control unit 1 transmits an error signal including an error code to the semiconductor manufacturing apparatus error processing unit 2. In the semiconductor manufacturing apparatus error processing unit 2, this error signal is received by the trouble registration unit 14, and when it is determined that an error has occurred (S31), an error code, an occurrence date and time, a data update date and time, and a current status (= occurrence) are set. A new record is created, and additional writing is performed on the trouble information table 13 to record the error that has occurred (S3).
2). Then, an error signal including an error code is transmitted to the display unit 16.

The display means 16 receives the error signal, searches the error message table 12 for a corresponding error message by using the error code as a key, and reads the searched data (S33). Further, similarly, using the error code as a key, the trouble information of the same error that occurred in the past is searched from the trouble information table 13 (S34). The presence or absence of the past trouble information searched here is confirmed (S35). If the past trouble information of the same error is searched, the past trouble information is sorted by the occurrence date and time, and the latest trouble information is sorted. The data regarding the trouble information is read (S36). However, when the past trouble information of the same error is not searched, the reading is not performed.

Next, the display means 16 displays the error message read in step S33, the trouble occurrence information generated this time in step S32, and the past trouble information read in step S36 when there is past trouble information. Is output to the display device 17. FIG.
FIG. 8 is a diagram showing an example of a trouble information screen output to the display device 17 at that time.

By looking at this screen, the apparatus operator can simultaneously refer to the error message prepared by the vendor side as well as the contents of treatment when the same error has occurred in the past.

Further, when the past trouble information displayed on the trouble information screen of FIG. 4 is not suitable, for example, when it is clear that the content of the treatment is not suitable as a measure for the error which has occurred this time, or when the trouble information is older. When the user wants to refer to the trouble information screen (FIG. 4), the user presses the “▲” and “▼” buttons (S39).
1) It is possible to retrieve and read older trouble information of the same error and display it on the trouble information screen (FIG. 4) (S34 to S37).

Further, the user can input data relating to the trouble that has occurred this time from the input device 18 to the trouble information screen (FIG. 4), and "update" the screen.
By pressing the button, the trouble information table 13
The above trouble information can be updated (S3
92, S393, S37).

The user can set the current status according to the current status of the response to the device error. In the initial screen, the status is set to “occurred” by the system. Accordingly, the status can be set to one of “under investigation”, “waiting for treatment”, and “completed” and displayed.

Thus, even if a third party who does not understand the status of handling the error of the device looks at the device, the status of handling the error can be immediately understood. For example, the cause of occurrence cannot be grasped yet, and in the investigation stage, the name of the person in charge is entered in the column of the confirmer, and the status is set to "status = investigation". Then, at the stage where the cause of the occurrence can be determined and the treatment is being prepared, the details are entered in the cause column,
Change the status to “status = waiting for treatment”. At this time, a description of the situation at that time, such as "going for a lamp", "waiting for contact from a vendor", or "waiting for arrival of a service engineer", can be entered in the memo column.

Then, after an appropriate action is taken and the device returns to normal, the input contents of the action, the action date and time,
An operation can be performed in which a person in charge of the treatment is input and the status is set to “status = treated”.

Here, the trouble information screen (FIG. 4) is OK.
Pressing the button ends the process. It should be noted that this input function can be activated and used arbitrarily, not only when an error occurs.

(Second Embodiment) FIG. 5 is a view showing a network configuration of a semiconductor manufacturing apparatus according to a second embodiment of the present invention. This embodiment is a case where a plurality of semiconductor manufacturing apparatuses are connected via a network, and when an error occurs in a certain semiconductor manufacturing apparatus, trouble information of the same error that has occurred in the past in another semiconductor manufacturing apparatus is searched for, 1 is an example of a semiconductor manufacturing apparatus provided with a display unit having a function of displaying.

In FIG. 5, a plurality of semiconductor manufacturing apparatuses according to the present invention are connected by a network. For example, when an error occurs in the semiconductor manufacturing apparatus 51, another semiconductor manufacturing apparatus (52 to 55) according to the present invention is provided. The trouble information of the same error that occurred in the past is retrieved from the trouble information table of the data storage unit, and a screen similar to the trouble information screen shown in FIG. 4 is output to the display device of the semiconductor manufacturing apparatus 51.

By viewing this screen, the operator of the error generating apparatus can refer not only to the trouble information of the same error that has occurred in the past in the apparatus, but also to the trouble information of the same error that has occurred in another apparatus. The information required for troubleshooting can be widely obtained.

(Embodiment of Semiconductor Production System) Next, a semiconductor device (I) using a semiconductor manufacturing apparatus according to the present invention will be described.
An example of a production system for a semiconductor chip such as C or LSI, a liquid crystal panel, a CCD, a thin-film magnetic head, a micromachine, etc.) will be described. In this system, maintenance services such as troubleshooting and periodic maintenance of a manufacturing apparatus installed in a semiconductor manufacturing factory or provision of software are performed using a computer network outside the manufacturing factory.

FIG. 6 shows the whole system cut out from a certain angle. In the figure, reference numeral 101 denotes a business establishment of a vendor (apparatus supply maker) that provides a semiconductor device manufacturing apparatus. As an example of a manufacturing apparatus, a semiconductor manufacturing apparatus for various processes used in a semiconductor manufacturing factory, for example,
Pre-process equipment (lithography equipment such as exposure equipment, resist processing equipment, etching equipment, heat treatment equipment, film formation equipment,
It is assumed that flattening equipment and the like and post-processing equipment (assembly equipment, inspection equipment, etc.) are used. In the business office 101, a host management system 10 for providing a maintenance database of manufacturing equipment
8. It has a plurality of operation terminal computers 110 and a local area network (LAN) 109 connecting these to construct an intranet or the like. Host management system 1
Reference numeral 08 includes a gateway for connecting the LAN 109 to the Internet 105, which is an external network of the business office, and a security function for restricting external access.

On the other hand, reference numerals 102 to 104 denote manufacturing factories of semiconductor manufacturers as users of the manufacturing apparatus. The manufacturing factories 102 to 104 may be factories belonging to different manufacturers or factories belonging to the same manufacturer (for example, a factory for a pre-process, a factory for a post-process, etc.). In each of the factories 102 to 104, a plurality of manufacturing apparatuses 106, a local area network (LAN) 111 connecting them to construct an intranet or the like, and a host as a monitoring apparatus for monitoring the operation status of each manufacturing apparatus 106 are provided. A management system 107 is provided. Each factory 1
Host management system 107 provided in the storage system 02 to 104
Has a gateway for connecting the LAN 111 in each factory to the Internet 105 which is an external network of the factory. As a result, access to the host management system 108 on the vendor 101 side from the LAN 111 of each factory via the Internet 105 is possible, and access is allowed only to limited users by the security function of the host management system 108. In particular,
Via the Internet 105, status information indicating the operation status of each manufacturing apparatus 106 (for example, the symptom of the manufacturing apparatus in which a trouble has occurred) is notified from the factory side to the vendor side, and response information corresponding to the notification (for example, (Information indicating how to cope with a trouble, software and data for coping), and maintenance information such as the latest software and help information can be received from the vendor. For data communication between the factories 102 to 104 and the vendor 101 and data communication on the LAN 111 in each factory, a communication protocol (TC) generally used on the Internet is used.
P / IP) is used. Instead of using the Internet as an external network outside the factory, it is also possible to use a dedicated line network (such as ISDN) that cannot be accessed by a third party and has high security.
Further, the host management system is not limited to the one provided by the vendor, and a user may construct a database and place it on an external network, and permit access from a plurality of factories of the user to the database.

FIG. 7 is a conceptual diagram showing the entire system according to the present embodiment cut out from a different angle from FIG. In the above example, a plurality of user factories each having a manufacturing device and a management system of a vendor of the manufacturing device are connected via an external network, and the production management of each factory and at least one device are connected via the external network. The data of the manufacturing apparatus was communicated. On the other hand, in this example, a factory equipped with manufacturing equipment of a plurality of vendors is connected to a management system of each of the plurality of manufacturing equipments via an external network outside the factory, and maintenance information of each manufacturing equipment is stored. It is for data communication. In the figure, reference numeral 201 denotes a manufacturing plant of a manufacturing apparatus user (semiconductor device manufacturer), and a manufacturing line for performing various processes, for example, an exposure apparatus 202, a resist processing apparatus 203;
A film forming apparatus 204 is introduced. Although only one manufacturing factory 201 is illustrated in FIG. 7, a plurality of factories are actually networked similarly. Each device in the factory is connected by LAN 206 to form an intranet,
The operation management of the production line is performed by the host management system 205.

On the other hand, each business establishment of a vendor (apparatus maker) such as an exposure apparatus maker 210, a resist processing apparatus maker 220, and a film forming apparatus maker 230 has a host management system 21 for remote maintenance of the supplied equipment.
1, 211, and 231 which include a maintenance database and an external network gateway as described above. A host management system 205 for managing each device in the user's manufacturing plant, and a vendor management system 2 for each device
11, 221, and 231 are connected by the Internet or a dedicated line network which is the external network 200. In this system, if a trouble occurs in any of a series of manufacturing equipment on the manufacturing line,
Although the operation of the production line is suspended, quick response is possible by receiving remote maintenance via the Internet 200 from the vendor of the troubled device, and the suspension of the production line can be minimized.

Each of the manufacturing apparatuses installed in the semiconductor manufacturing factory includes a display, a network interface, and a computer for executing network access software and apparatus operation software stored in a storage device. The storage device is a built-in memory, a hard disk, a network file server, or the like. The network access software includes a dedicated or general-purpose web browser, and provides, for example, a user interface having a screen as shown in FIG. 8 on a display. The operator who manages the manufacturing equipment at each factory refers to the screen and refers to the manufacturing equipment model 401, the serial number 402, and the trouble subject 40.
3. Information such as date of occurrence 404, degree of urgency 405, symptom 406, coping method 407, progress 408, etc. is input to input items on the screen. The input information is transmitted to the maintenance database via the Internet, and the resulting appropriate maintenance information is returned from the maintenance database and presented on the display. The user interface provided by the web browser further includes hyperlink functions 410 to 4 as shown in the figure.
12 allows the operator to access more detailed information on each item, extract the latest version of software used for manufacturing equipment from the software library provided by the vendor, and operate the operation guide (help Information). Here, the maintenance information provided by the maintenance database includes the information on the present invention described above, and the software library also provides the latest software for realizing the present invention.

Next, a semiconductor device manufacturing process using the above-described production system will be described. FIG. 9 shows a flow of the whole semiconductor device manufacturing process. In step 1 (circuit design), the circuit of the semiconductor device is designed. Step 2 is a process for making a mask on the basis of the circuit pattern design. Step 3
In (wafer manufacture), a wafer is manufactured using a material such as silicon. Step 4 (wafer process) is called a pre-process, and an actual circuit is formed on the wafer by lithography using the prepared mask and wafer. The next step 5 (assembly) is called a post-process, and is a process of forming a semiconductor chip using the wafer produced in step 4, and assembly such as an assembly process (dicing and bonding) and a packaging process (chip encapsulation). Process. In step 6 (inspection), inspections such as an operation confirmation test and a durability test of the semiconductor device manufactured in step 5 are performed. Through these steps, a semiconductor device is completed and shipped (step 7). The pre-process and the post-process are performed in separate dedicated factories, and maintenance is performed for each of these factories by the above-described remote maintenance system. Further, information for production management and apparatus maintenance is also communicated between the pre-process factory and the post-process factory via the Internet or a dedicated line network.

FIG. 10 shows a detailed flow of the wafer process. Step 11 (oxidation) oxidizes the wafer's surface. Step 12 (CVD) forms an insulating film on the wafer surface. Step 13 (electrode formation) forms electrodes on the wafer by vapor deposition. In step 14 (ion implantation), ions are implanted into the wafer. Step 1
In 5 (resist processing), a photosensitive agent is applied to the wafer. Step 16 (exposure) uses the above-described exposure apparatus to print and expose the circuit pattern of the mask onto the wafer. Step 17 (development) develops the exposed wafer. In step 18 (etching), portions other than the developed resist image are removed. In step 19 (resist stripping), unnecessary resist after etching is removed. By repeating these steps, multiple circuit patterns are formed on the wafer. Since the manufacturing equipment used in each process is maintained by the remote maintenance system described above, troubles can be prevented beforehand, and if troubles occur, quick recovery is possible. Can be improved in productivity.

[0039]

As described above, according to the present invention, in addition to the error message prepared by the vendor, the operator of the apparatus in which the error has occurred can provide the trouble information when the same error has occurred in the past in the past. Since they can be referred to at the same time, it is possible to check a treatment method suitable for the user's usage form from past cases, and it is possible to shorten the time until the apparatus is restored.

In addition, by displaying status information of a device in which an error has occurred in an operation mode different for each user, an unspecified number of people can immediately determine what kind of response status the device in which a trouble has occurred is currently being handled. As a result, it is possible to eliminate unnecessary time such as checking the status of the apparatus.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a configuration of an error processing unit of a semiconductor manufacturing apparatus according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of a trouble information table according to the first embodiment of the present invention.

FIG. 3 is a flowchart illustrating a trouble information screen display processing procedure according to the first embodiment of the present invention.

FIG. 4 is a diagram showing a display example of a trouble information screen according to the first embodiment of the present invention.

FIG. 5 is a diagram illustrating a network configuration of a semiconductor manufacturing apparatus according to a second embodiment of the present invention.

FIG. 6 is a conceptual view of a semiconductor device production system using a semiconductor manufacturing apparatus according to the present invention as viewed from a certain angle.

FIG. 7 is a conceptual view of a semiconductor device production system using the semiconductor manufacturing apparatus according to the present invention as viewed from another angle.

FIG. 8 is a specific example of a user interface.

FIG. 9 is a diagram illustrating a flow of a device manufacturing process.

FIG. 10 is a diagram illustrating a wafer process.

[Explanation of symbols]

1: semiconductor manufacturing apparatus (control section), 2: semiconductor manufacturing apparatus (error processing section), 11: data storage section, 12: error message table, 13: trouble information table, 1
4: trouble registration means, 15: input update means, 16: display means, 17: display device, 18: input device, 21: trouble occurrence information area, 22: status information area, 2
3: treatment content information area, 51 to 55: semiconductor manufacturing apparatus.

Claims (10)

[Claims] 1. A semiconductor manufacturing apparatus for displaying an error message when an apparatus trouble occurs, comprising a data storage unit capable of storing information on occurrence of a trouble that occurred in the past, action information corresponding to that time, and current status information. And a display unit for simultaneously displaying past and present trouble information corresponding to the error message. 2. The semiconductor manufacturing apparatus according to claim 1, further comprising trouble registration means for recording trouble information in said data storage unit when a trouble occurs, wherein trouble occurrence information, status information, and a measure are taken. A semiconductor manufacturing apparatus, comprising: an input updating unit capable of registering content information with an apparatus user. 3. The semiconductor manufacturing apparatus according to claim 1, wherein said display means connects trouble information for the same error message generated in another semiconductor manufacturing apparatus by connecting a plurality of said semiconductor manufacturing apparatuses via a network. A semiconductor manufacturing apparatus having a function of searching and displaying. 4. A step of installing a manufacturing apparatus group for various processes including the semiconductor manufacturing apparatus according to claim 1 in a semiconductor manufacturing factory, and a semiconductor device by a plurality of processes using the manufacturing apparatus group. Manufacturing a semiconductor device. 5. A step of connecting the group of manufacturing apparatuses via a local area network, and data communication between at least one of the group of manufacturing apparatuses between the local area network and an external network outside the semiconductor manufacturing plant. 5. The method according to claim 4, further comprising the step of: 6. A semiconductor manufacturing plant different from the semiconductor manufacturing plant by accessing a database provided by a vendor or a user of the semiconductor manufacturing device via the external network and obtaining maintenance information of the manufacturing device by data communication. 6. The production management is performed by performing data communication between the device and the external network via the external network.
The method for manufacturing a semiconductor device according to claim 1. 7. A manufacturing apparatus group for various processes including the semiconductor manufacturing apparatus according to claim 1; a local area network connecting the manufacturing apparatus group; A semiconductor manufacturing plant, comprising: a gateway enabling access to an external network; and capable of performing data communication of information on at least one of the manufacturing apparatus groups. 8. The semiconductor device according to claim 1, which is installed in a semiconductor manufacturing plant.
3. A method for maintaining a semiconductor manufacturing apparatus according to any one of claims 3, wherein a vendor or a user of the semiconductor manufacturing apparatus provides a maintenance database connected to an external network of the semiconductor manufacturing factory; A step of permitting access to the maintenance database via the external network, and a step of transmitting maintenance information stored in the maintenance database to the semiconductor manufacturing factory via the external network. Maintenance method for semiconductor manufacturing equipment. 9. The semiconductor manufacturing apparatus according to claim 1, further comprising a display, a network interface, and a computer for executing network software, wherein maintenance information of the semiconductor manufacturing apparatus is stored in a computer network. A semiconductor manufacturing apparatus characterized in that data communication can be performed via the Internet. 10. The network software,
Provided on the display is a user interface for accessing a maintenance database provided by a vendor or a user of the semiconductor manufacturing apparatus connected to an external network of a factory where the semiconductor manufacturing apparatus is installed, and providing the user interface via the external network. 10. The semiconductor manufacturing apparatus according to claim 9, wherein information can be obtained from a database.