JP4593761B2 - Cleaning sheet and substrate processing apparatus cleaning method using the same - Google Patents
Cleaning sheet and substrate processing apparatus cleaning method using the same Download PDFInfo
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- JP4593761B2 JP4593761B2 JP2000348532A JP2000348532A JP4593761B2 JP 4593761 B2 JP4593761 B2 JP 4593761B2 JP 2000348532 A JP2000348532 A JP 2000348532A JP 2000348532 A JP2000348532 A JP 2000348532A JP 4593761 B2 JP4593761 B2 JP 4593761B2
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Landscapes
- Cleaning In General (AREA)
Description
【０００１】
【発明の属する技術分野】
本発明は、各種の基板処理装置をクリーニングするシート、及びこれを用いた基板処理装置のクリーニング方法に関し、例えば、半導体、フラットパネルディスプレイ、プリント基板などの製造装置や検査装置など、異物を嫌う基板処理装置のクリーニングシート及びクリーニング方法に関する。
【０００２】
【従来の技術】
各種基板処理装置は、各搬送系と基板とを物理的に接触させながら搬送する。その際、基板や搬送系に異物が付着していると、後続の基板を次々に汚染することになり、定期的に装置を停止させ、洗浄処理をする必要があった。このため、稼働率低下や多大な労力が必要になるという問題があった。これらの問題を解決するため、粘着性の物質を固着した基板を搬送することにより基板処理装置内の付着した異物をクリーニング除去する方法（特開平１０−１５４６８６号）や板状部材を搬送することにより基板裏面に付着する異物を除去する方法（特開平１１−８７４５８号）が提案されている。
【０００３】
【発明が解決しようとする課題】
粘着性の物質を固着した基板を搬送することにより基板処理装置内の付着した異物をクリーニング除去する方法は、前述の課題を克服する有効な方法である。しかし粘着性物質や板状部材が無色あるいは透明な場合、基板に当該物質が固着されているか判らず、誤ってクリーニング用途ではない通常の加工処理基板として処理装置に投入され、加工処理の熱、反応性ガス、プラズマエネルギーなどにより粘着性物質が溶解、変性し、処理装置内を汚染させる恐れがあり、加工処理ができなくなる恐れがあった。 また、板状部材を搬送することにより異物を除去する方法は、搬送は支障なくできるが、肝心の除塵性に劣るという問題がある。
本発明は、このような事情に照らし、基板処理装置内に基板を確実に搬送できると共に、装置内に付着している異物を簡便かつ確実に除去できるクリーニングシートを提供することを目的としている。
【０００４】
【課題を解決するための手段】
本発明者らは、上記の目的を達成するために、鋭意検討した結果、クリーニングあるいはこのシートを固着した基板等の搬送部材を搬送することにより、基板処理装置内の付着した異物をクリーニング除去するにあたり、クリーニングシートに色を着ける、あるいは非透明とすることにより、前記問題を生じることなく、さらに異物を簡便かつ確実に剥離除去できることを見出し、本発明を完成するに至つた。
【０００５】
即ち、本発明は、基板処理装置内に搬送部材に貼り付けて搬送して上記装置内に付着している異物を除去するためのクリーニングシートであって、物体色を有する、あるいは非透明である物質からなる支持体として、着色されたあるいは濁度を有するプラスチックフィルムを使用し、この支持体の少なくとも片面に、クリーニング層が設けられなるクリーニングシート（請求項１）、基板処理装置内に搬送部材に貼り付けて搬送して上記装置内に付着している異物を除去するためのクリーニングシートであって、物体色を有する、あるいは非透明である物質からなる支持体として、着色されたあるいは濁度を有するプラスチックフィルムを使用し、この支持体の片面にクリーニング層が設けられ、他面に粘着剤層が設けられてなるクリーニングシート（請求項２）などに係るものである。
【０００６】
【発明の実施の形態】
本発明において物体色とは、光を反射又は透過する物体の色のことであり、物体色を有するとは、光が物体に当りこれが視覚を刺激し、色が見えることを意味し、有彩色、無彩色などの区分、マンセル表色系での色の３属性である色相、明度、彩度での表現、たとえばＪＩＳ Ｚ ８７２１にある該３属性による色の表示方法、ＪＩＳ Ｚ ８７２３による表面色の比較方法などになんら制限されない。
また、非透明とは、無色透明でないことを意味し、有色透明を含むものをいう。
【０００７】
本発明においてはクリーニングシート自体が、上記の如く物体色を有する、あるいは非透明である物質からなるシートであってもよいが、物体色を有する、あるいは非透明である物質からなる支持体の少なくとも片面に、クリーニング層が設けられなるクリーニングシートとすることが好ましい。
かかるクリーニングシートとしては、その支持体が着色されたあるいは濁度を有するものが好ましい。
ここで着色された支持体とは、物体色を有しない支持体に例えば印刷法などにより、支持体の片面あるいは両面上に色を有する物質を形成、あるいは支持体形成時に色を有する物質を支持体に分散させるなどの方法により、支持体が色を有することを意味するものである。 かかる支持体の色は、加工処理基板と異なる色が好ましいが、その明度、彩度が異なり目視で区別可能であれば同一色でもよい。
また濁度を有する支持体とは、例えば支持体表面を梨地（マット）処理、シリカなどの充填材などの他物質を混入などにより、濁度が付与されたことを意味する。
【０００８】
かかる支持体の具体例としては、特に限定されないが、例えばポリエチレン、ポリエチレンテレフタレート、アセチルセルロース、ポリカーボネート、ポリプロピレン、ポリアミド、ポリイミド、ポリカルボジイミドなどのプラスチックフィルムなどが挙げられる。 その厚みは通常１０〜１００μｍ程度である。
【０００９】
本発明におけるクリーニング層は、異物の除去機能を有する限り特に限定されないが、特にクリーニング層として用いられる材料のヴィッカース硬度が１０以上で、かつその表面自由エネルギーが２０ｍＪ／ｍ2以上、好ましくは３０ｍＪ／ｍ2以上であることが望ましい。 また、クリーニング層表面の水の接触角が９０度以下、好ましくは８０度以下となるようにするのが望ましい。 クリーニング層のヴィッカース硬度、表面自由エネルギー、水の接触角をこれらの値に設定することで、クリーニングシートの搬送時に搬送トラブルを生じることなく被クリーニング部の異物を確実に除去できるという優れた効果が得られる。
【００１０】
かかるクリーニング層の材質などは特に限定されないが、紫外線や熱などの活性エネルギー源により架橋反応や硬化が促進されて、その引張弾性率を大きくできるものが好ましい。 本発明において好ましいクリーニング層は、その引張弾性率（試験法ＪＩＳ Ｋ７１２７に準ずる）が０．１Ｎ／ｍｍ2以上、好ましくは１〜３０００Ｎ／ｍｍ2である。
さらに、その分子構造が三次元網状化して実質的に粘着性を有さず、搬送系材料とぬれ難いものが好ましい。 かかる材料からなるクリーニング層を用いると、搬送時にクリーニング層が被クリーニング部と強く接着することがなく、確実に搬送できる。
またクリーニング層の厚さは特に限定されないが、通常５〜１００μｍ程度である。
【００１１】
かかるクリーニング層の具体例としては、例えば感圧接着性ポリマーに分子内に不飽和二重結合を１個以上有する化合物と重合開始剤を少なくとも含有させたものを、活性エネルギーにより重合硬化反応させて粘着性が実質的に消失されてなるものが挙げられる。 かかる感圧接着性ポリマーとしては、例えばアクリル酸、アクリル酸エステル、メタクリル酸、メタクリル酸エステルから選ばれる（メタ）アクリル酸及び／又は（メタ）アクリル酸エステルを主モノマーとしたアクリル系ポリマーが挙げられる。このアクリル系ポリマーの合成にあたり、共重合モノマーとして分子内に不飽和二重結合を２個以上有する化合物を用いるか、あるいは合成後のアクリル系ポリマーに分子内に不飽和二重結合を有する化合物を官能基間の反応で化学結合させるなどして、アクリル系ポリマーの分子内に不飽和二重結合を導入しておくことにより、このポリマー自体も活性エネルギーにより重合硬化反応に関与させるようにすることもできる。
【００１２】
ここで、分子内に不飽和二重結合を１個以上有する化合物（以下、重合性不飽和化合物という）としては、不揮発性でかつ重量平均分子量が１００００以下の低分子量体であるのがよく、特に硬化時のクリーニング層の三次元網状化が効率よくなされるように、５０００以下の分子量を有しているのが好ましい。
【００１３】
また、クリーニング層に添加される重合開始剤は、特に限定されず公知のものを使用でき、例えば活性エネルギー源に熱を用いる場合は、ベンゾイルパーオキサイド、アゾビスイソブチロニトリルなどの熱重合開始剤、また光を用いる場合は、ベンゾイル、ベンゾインエチルエーテル、シベンジル、イソプロピルベンゾインエーテル、ベンゾフェノン、ミヒラーズケトンクロロチオキサントン、ドデシルチオキサントン、ジメチルチオキサントン、アセトフェノンジエチルケタール、ベンジルジメチルケタール、α−ヒドルキシシクロヒキシルフェニルケトン、２−ヒドロキシジメチルフェニルプロパン、２，２−ジメトキシ−２−フェニルアセトフェノンなどの光重合開始剤が挙げられる。
【００１４】
本発明は、上記の支持体の片面にクリーニング層が設けられ、他面に粘着剤層が設けられたクリーニングシート（請求項２）も提供する。この粘着剤層は、粘着機能を満たす限りその材質などは特に限定されず、通常の粘着剤（例えばアクリル系、ゴム系など）を用いることができる。
かかる構成とすることにより、クリーニングシートをこの粘着剤層により各種基板や他のテープ・シートなどの搬送部材に貼り付けて、クリーニング機能付き搬送部材（請求項３）として装置内に搬送して、被洗浄部位に接触させてクリーニングすること（請求項４）ができる。
【００１５】
本発明において上記の基板などの搬送部材を再利用するために、クリーニング後に基板をかかる粘着剤層から剥がす場合は、かかる粘着剤層の粘着力は、シリコンウエハ（ミラー面）に対する１８０°引き剥がし粘着力が０．２０〜０．９８Ｎ／１０ｍｍ、特に０．４０〜０．９８Ｎ／１０ｍｍ程度であれば、搬送中に剥離することなく、かつクリーニング後に容易に再剥離できるので好ましい。
【００１６】
またクリーニングシートが貼り付けられる搬送部材としては特に限定されないが、例えば半導体ウエハ、ＬＣＤ、ＰＤＰなどのフラットパネルディスプレイ用基板、その他コンパクトディスク、ＭＲヘッドなどの基板などが挙げられる。
【００１７】
【実施例】
以下、本発明を実施例に基づいて説明するが、本発明はこれらに限定されるものではない。 なお、以下、部とあるのは重量部を意味するものとする。
実施例
アクリル酸−２−エチルヘキシル７５部、アクリル酸メチル２０部、及びアクリル酸５部からなるモノマ―混合液から得たアクリルポリマー（重量平均分子量７０万）１００部に対して、ポリエチレングリコ―ル２００ジメタクリレ―ト（新中村化学製：商品名：ＮＫエステル４Ｇ）５０部、ウレタンアクリレート（新中村化学製：商品名：Ｕ−Ｎ−０１）５０部、およびポリイソシアネート化合物（日本ポリウレタン工業製：商品名：コロネートＬ）３部、および光重合開始剤としてベンジルジメチルケタール（チバ・スペシャリティケミカルズ製：商品名：イルガキュアー６５１）３部を均一に混合して、紫外線硬化型の粘着剤溶液Ａを調整した。
一方、上記粘着剤溶液Ａから光重合開始剤のベンジルジメチルケタールを除いた以外は、上記と同様にして得た粘着剤溶液を、幅２５０ｍｍ、厚み２５μｍの片面に白色塗料が印刷されたポリエステル製支持体フィルムの片面に、乾燥後の厚みが１０μｍになるように塗布して通常の粘着剤層を設け、その表面に厚み３８μｍのポリエステル系剥離フィルムを貼った。 次に支持体フィルムのもう一方の側に、前記の紫外線硬化型粘着剤溶液Ａを乾燥後の厚みが１０μｍになるように塗布してクリーニング層を設け、その表面に同様の剥離フィルムを貼った。
このシートに中心波長３６５ｎｍの紫外線を積算光量２０００ｍＪ／ｃｍ2照射して、本発明のクリーニングシートを得た。 このクリーニングシートのクリーニング層側の剥離フィルムを剥がし、ヴィッカース硬度計（ＮＥＣ製、薄膜硬度計 ＭＨＡ−４００）にてこのクリーニング層のヴィッカース硬度を測定したところ、４０であった。 またこのクリーニング層の表面自由エネルギーを測定したところ、４０．１ｍＪ／ｍ2、水の接触角は７８．２度であった。
また、このクリーニング層の紫外線硬化後の引張弾性率は１４７．２Ｎ／ｍｍ2であった。ここで引張弾性率は、試験法ＪＩＳ Ｋ７１２７に準じて測定した。また、クリーニング層をシリコンウエハのミラー面に幅１０ｍｍで貼り付け、ＪＩＳ Ｚ０２３７に準じてシリコンウエハに対する１８０°引き剥がし粘着力を測定した結果、０．００４９Ｎ（０．５ｇ）／１０ｍｍで実質的に粘着性を有さないことが確認できた。
【００１８】
得られたクリーニングシートの通常の粘着剤層側の剥離フィルムを剥がし、８ｉｎｃｈのシリコンウエハの裏面（ミラー面）にハンドローラで貼り付け、クリーニング機能付き搬送用クリーニングウエハを作製した。
【００１９】
一方、基板処理装置のウエハステージを２つ取り外し、レーザー式異物測定装置で、０．３μｍ以上の異物を測定したところ、８ｉｎｃｈウエハサイズのエリア内で１つは２５０００個、もう一方は２３０００個であった。
【００２０】
次いで前記で得た搬送用クリーニングウエハのクリーニング層側の剥離フィルムを剥がし、上記の２５０００個の異物が付着していたウエハステージを持つ基板処理装置内に搬送したところ、支障なく搬送できた。 その後にウエハステージを取り外し、レーザー式異物測定装置で０．３μｍ以上の異物を測定したところ、８ｉｎｃｈウエハサイズのエリア内で４８００個であり、もともと付着していた異物の４／５以上を除去することができた。
【００２１】
比較例
透明なポリエステル製支持体フィルムを用いた以外は実施例と同様にして、クリーニングシートを得た。
このクリーニングシートから実施例と同じ方法で作製した搬送用クリーニングウエハを、２３０００個の異物が付着していたウエハステージを持つ基板処理装置内を搬送するため、剥離フィルムを剥がそうとしたが、クリーニングシートが透明なため、シリコンウエハのどちらの面に貼ってあるのか判別が非常にしにくかった。 また剥離フィルムを剥がしたウエハを基板処理装置にセットする際、誤ってクリーニングシートを貼り付けていない面側を搬送系に接触させるなど、誤使用が多発した。
【００２２】
【発明の効果】
以上のように本発明のクリーニングシートによれば、基板処理装置内を確実に搬送できると共に、装置内に付着している異物を簡便かつ確実に除去できる。[0001]
BACKGROUND OF THE INVENTION
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sheet for cleaning various substrate processing apparatuses and a substrate processing apparatus cleaning method using the same, and, for example, a substrate that dislikes foreign matters, such as a manufacturing apparatus or an inspection apparatus such as a semiconductor, a flat panel display, and a printed board. The present invention relates to a cleaning sheet and a cleaning method for a processing apparatus.
[0002]
[Prior art]
Various substrate processing apparatuses transport each transport system and the substrate in physical contact with each other. At this time, if foreign substances adhere to the substrate or the transport system, subsequent substrates are contaminated one after another, and it is necessary to periodically stop the apparatus and perform a cleaning process. For this reason, there existed a problem that an operation rate fall and a lot of labor were needed. In order to solve these problems, a method of cleaning and removing adhered foreign substances in the substrate processing apparatus by transporting a substrate to which an adhesive substance is fixed (Japanese Patent Laid-Open No. 10-154686) or transporting a plate-like member A method (Japanese Patent Laid-Open No. 11-87458) for removing foreign substances adhering to the back surface of the substrate is proposed.
[0003]
[Problems to be solved by the invention]
The method of cleaning and removing the adhered foreign matter in the substrate processing apparatus by transporting the substrate to which the adhesive substance is fixed is an effective method for overcoming the above-described problems. However, if the adhesive substance or the plate-like member is colorless or transparent, it is not known whether the substance is fixed to the substrate, and it is mistakenly put into the processing apparatus as a normal processing substrate that is not used for cleaning. Reactive gas, plasma energy, etc. may cause the adhesive substance to be dissolved and denatured, possibly contaminating the inside of the processing apparatus, and processing may not be possible. Moreover, although the method of removing a foreign material by conveying a plate-like member can perform the conveyance without any trouble, there is a problem that the essential dust removing property is inferior.
In view of such circumstances, an object of the present invention is to provide a cleaning sheet capable of reliably transporting a substrate into a substrate processing apparatus and easily and reliably removing foreign substances adhering to the apparatus.
[0004]
[Means for Solving the Problems]
As a result of diligent investigations to achieve the above object, the present inventors have carried out cleaning or removal of adhering foreign matter in the substrate processing apparatus by conveying a conveying member such as a substrate to which the sheet is fixed. At that time, the inventors have found that the cleaning sheet can be colored or made non-transparent to further easily and surely remove and remove foreign matters without causing the above-mentioned problems, and the present invention has been completed.
[0005]
That is, the present invention is a cleaning sheet for removing foreign substances adhering to the apparatus by being attached to a conveying member in the substrate processing apparatus and conveyed , and has an object color or is not transparent. A colored or turbid plastic film is used as a support made of a substance, a cleaning sheet having a cleaning layer provided on at least one surface of the support (Claim 1), a conveying member in the substrate processing apparatus paste and then transported to a cleaning sheet for removing foreign matter adhering to the above device, having a body color, or as a support made of a non-transparent is material, colored or turbidity use a plastic film having the cleaning layer is provided on one surface of the support, comprising a pressure-sensitive adhesive layer is provided on the other surface cleaning Sheet (Claim 2) are those of the like.
[0006]
DETAILED DESCRIPTION OF THE INVENTION
In the present invention, the object color is a color of an object that reflects or transmits light, and having an object color means that light hits the object, which stimulates vision and the color can be seen. , Achromatic color classification, hue, brightness, and saturation, which are the three attributes of the color in the Munsell color system, for example, a color display method according to the three attributes in JIS Z 8721, and the surface color according to JIS Z 8723 There are no restrictions on the comparison method.
Moreover, non-transparent means that it is not colorless and transparent, and includes colored transparency.
[0007]
In the present invention, the cleaning sheet itself may be a sheet made of a substance having an object color or non-transparent as described above, but at least a support made of a substance having an object color or non-transparent is used. It is preferable that the cleaning sheet is provided with a cleaning layer on one side.
As such a cleaning sheet, a support having a colored or turbid support is preferable.
Here, the colored support means that a substance having color is formed on one or both sides of the support by, for example, a printing method on a support having no object color, or a substance having a color is supported at the time of forming the support. It means that the support has a color by a method such as dispersing in the body. The color of the support is preferably a color different from that of the processed substrate, but may be the same color as long as the brightness and saturation are different and can be distinguished visually.
Further, the support having turbidity means that the surface of the support has been given turbidity by, for example, matte treatment or mixing with other substances such as a filler such as silica.
[0008]
Specific examples of such a support are not particularly limited, and examples thereof include plastic films such as polyethylene, polyethylene terephthalate, acetyl cellulose, polycarbonate, polypropylene, polyamide, polyimide, and polycarbodiimide. The thickness is usually about 10 to 100 μm.
[0009]
The cleaning layer in the present invention is not particularly limited as long as it has a function of removing foreign matters, but the Vickers hardness of the material used as the cleaning layer is 10 or more and its surface free energy is 20 mJ / m 2 or more, preferably 30 mJ / It is desirable that it is m 2 or more. Further, it is desirable that the contact angle of water on the cleaning layer surface is 90 degrees or less, preferably 80 degrees or less. By setting the Vickers hardness, surface free energy, and water contact angle of the cleaning layer to these values, there is an excellent effect that foreign matters in the portion to be cleaned can be reliably removed without causing a conveyance trouble when the cleaning sheet is conveyed. can get.
[0010]
The material of the cleaning layer is not particularly limited, but a material that can increase the tensile elastic modulus by promoting the crosslinking reaction or curing by an active energy source such as ultraviolet rays or heat is preferable. Preferred cleaning layer in the present invention, the tensile modulus (according to test method JIS K7127) is 0.1 N / mm 2 or more, preferably 1~3000N / mm 2.
Furthermore, it is preferable that the molecular structure is a three-dimensional network and does not substantially have adhesiveness, and is difficult to wet with the carrier material. When a cleaning layer made of such a material is used, the cleaning layer does not adhere strongly to the portion to be cleaned during transport, and can be transported reliably.
The thickness of the cleaning layer is not particularly limited, but is usually about 5 to 100 μm.
[0011]
As a specific example of such a cleaning layer, for example, a pressure-sensitive adhesive polymer containing at least a compound having at least one unsaturated double bond in the molecule and a polymerization initiator is polymerized and cured by active energy. Examples include those in which adhesiveness is substantially lost. Examples of the pressure-sensitive adhesive polymer include acrylic polymers having (meth) acrylic acid and / or (meth) acrylic acid ester selected from acrylic acid, acrylic acid ester, methacrylic acid, and methacrylic acid ester as main monomers. It is done. In synthesizing this acrylic polymer, a compound having two or more unsaturated double bonds in the molecule is used as a copolymerization monomer, or a compound having an unsaturated double bond in the molecule is used in the synthesized acrylic polymer. By introducing an unsaturated double bond into the molecule of the acrylic polymer, for example, by chemically bonding it with a reaction between functional groups, this polymer itself is also involved in the polymerization curing reaction by active energy. You can also.
[0012]
Here, the compound having one or more unsaturated double bonds in the molecule (hereinafter referred to as a polymerizable unsaturated compound) is preferably a low molecular weight substance that is nonvolatile and has a weight average molecular weight of 10,000 or less. In particular, it is preferable that the molecular weight is 5000 or less so that the three-dimensional network of the cleaning layer can be efficiently formed at the time of curing.
[0013]
The polymerization initiator added to the cleaning layer is not particularly limited, and known ones can be used. For example, when heat is used as an active energy source, thermal polymerization initiation of benzoyl peroxide, azobisisobutyronitrile, etc. Benzoyl, benzoin ethyl ether, cibenzyl, isopropyl benzoin ether, benzophenone, Michler's ketone chlorothioxanthone, dodecyl thioxanthone, dimethylthioxanthone, acetophenone diethyl ketal, benzyl dimethyl ketal, α-hydroxycyclohexyl Examples include photopolymerization initiators such as silphenyl ketone, 2-hydroxydimethylphenylpropane, and 2,2-dimethoxy-2-phenylacetophenone.
[0014]
The present invention also provides a cleaning sheet (Claim 2) in which a cleaning layer is provided on one side of the support and an adhesive layer is provided on the other side. The material of the pressure-sensitive adhesive layer is not particularly limited as long as it satisfies the pressure-sensitive adhesive function, and a normal pressure-sensitive adhesive (for example, acrylic or rubber-based) can be used.
By adopting such a configuration, the cleaning sheet is attached to a conveying member such as various substrates and other tapes and sheets by this adhesive layer, and conveyed into the apparatus as a conveying member with a cleaning function (Claim 3), Cleaning can be performed by contacting the portion to be cleaned (claim 4).
[0015]
In the present invention, when the substrate is peeled off from the pressure-sensitive adhesive layer after cleaning in order to reuse the transport member such as the above-mentioned substrate, the pressure-sensitive adhesive force of the pressure-sensitive adhesive layer is peeled off 180 ° from the silicon wafer (mirror surface). An adhesive strength of 0.20 to 0.98 N / 10 mm, particularly about 0.40 to 0.98 N / 10 mm, is preferable because it can be easily re-peeled after cleaning without peeling during transport.
[0016]
The transport member to which the cleaning sheet is attached is not particularly limited, and examples thereof include semiconductor wafers, substrates for flat panel displays such as LCDs and PDPs, and other substrates such as compact disks and MR heads.
[0017]
【Example】
Hereinafter, although the present invention is explained based on an example, the present invention is not limited to these. Hereinafter, “parts” means parts by weight.
EXAMPLE Polyethylene glycol per 100 parts of an acrylic polymer (weight average molecular weight 700,000) obtained from a monomer mixture consisting of 75 parts of 2-ethylhexyl acrylate, 20 parts of methyl acrylate, and 5 parts of acrylic acid 200 dimethacrylate (manufactured by Shin-Nakamura Chemical: trade name: NK ester 4G), 50 parts of urethane acrylate (manufactured by Shin-Nakamura Chemical: trade name: UN-01), and polyisocyanate compound (manufactured by Nippon Polyurethane Industry: 3 parts of product name: Coronate L) and 3 parts of benzyl dimethyl ketal (manufactured by Ciba Specialty Chemicals: trade name: Irgacure 651) as a photopolymerization initiator were uniformly mixed to prepare an ultraviolet curable adhesive solution A. It was adjusted.
On the other hand, except that the photopolymerization initiator benzyl dimethyl ketal was removed from the pressure-sensitive adhesive solution A, a pressure-sensitive adhesive solution obtained in the same manner as described above was prepared from a polyester having a white paint printed on one side having a width of 250 mm and a thickness of 25 μm. An ordinary pressure-sensitive adhesive layer was provided on one surface of the support film so that the thickness after drying was 10 μm, and a polyester-based release film having a thickness of 38 μm was pasted on the surface. Next, on the other side of the support film, the UV curable pressure-sensitive adhesive solution A was applied so that the thickness after drying was 10 μm, a cleaning layer was provided, and a similar release film was pasted on the surface. .
The cleaning sheet of the present invention was obtained by irradiating this sheet with ultraviolet light having a central wavelength of 365 nm and an integrated light quantity of 2000 mJ / cm 2 . The release film on the cleaning layer side of this cleaning sheet was peeled off, and the Vickers hardness of this cleaning layer was measured with a Vickers hardness tester (manufactured by NEC, thin film hardness tester MHA-400). When the surface free energy of this cleaning layer was measured, it was 40.1 mJ / m 2 and the contact angle of water was 78.2 degrees.
The tensile modulus of the cleaning layer after UV curing was 147.2 N / mm 2 . Here, the tensile elastic modulus was measured according to the test method JIS K7127. Further, the cleaning layer was attached to the mirror surface of the silicon wafer with a width of 10 mm, and the 180 ° peel adhesion to the silicon wafer was measured according to JIS Z0237. As a result, the cleaning layer was substantially 0.0049 N (0.5 g) / 10 mm. It was confirmed that there was no tackiness.
[0018]
The release film on the normal pressure-sensitive adhesive layer side of the obtained cleaning sheet was peeled off and attached to the back surface (mirror surface) of an 8-inch silicon wafer with a hand roller to prepare a transport cleaning wafer with a cleaning function.
[0019]
On the other hand, when two wafer stages of the substrate processing apparatus were removed and a foreign substance measuring 0.3 μm or more was measured with a laser type foreign substance measuring apparatus, one was 25000 pieces and the other was 23000 pieces within an 8-inch wafer size area. there were.
[0020]
Next, the release film on the cleaning layer side of the transport cleaning wafer obtained above was peeled off and transported into the substrate processing apparatus having the wafer stage on which the above-mentioned 25000 foreign substances had adhered. After that, the wafer stage was removed, and a foreign substance measuring 0.3 μm or more was measured with a laser type foreign substance measuring apparatus. As a result, 4800 pieces were removed in an area of an 8-inch wafer size, and 4/5 or more of the originally attached foreign substance was removed. I was able to.
[0021]
Comparative Example A cleaning sheet was obtained in the same manner as in the example except that a transparent polyester support film was used.
In order to transport a cleaning wafer for transport produced from this cleaning sheet in the same manner as in the example to the inside of the substrate processing apparatus having a wafer stage on which 23,000 foreign substances had adhered, an attempt was made to peel off the release film. Since the sheet is transparent, it was very difficult to determine which side of the silicon wafer was attached. Moreover, when setting the wafer from which the release film has been peeled off to the substrate processing apparatus, misuse has frequently occurred, such as bringing the side of the surface on which the cleaning sheet has not been accidentally attached into contact with the transport system.
[0022]
【The invention's effect】
As described above, according to the cleaning sheet of the present invention, the inside of the substrate processing apparatus can be reliably conveyed, and foreign substances adhering to the inside of the apparatus can be easily and reliably removed.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000348532A JP4593761B2 (en) | 2000-11-15 | 2000-11-15 | Cleaning sheet and substrate processing apparatus cleaning method using the same |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2000348532A JP4593761B2 (en) | 2000-11-15 | 2000-11-15 | Cleaning sheet and substrate processing apparatus cleaning method using the same |
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| Publication Number | Publication Date |
|---|---|
| JP2002143782A JP2002143782A (en) | 2002-05-21 |
| JP4593761B2 true JP4593761B2 (en) | 2010-12-08 |
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| JP5075460B2 (en) * | 2007-04-17 | 2012-11-21 | 株式会社ニトムズ | Adhesive tape roll |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04169438A (en) * | 1990-10-31 | 1992-06-17 | Shin Etsu Polymer Co Ltd | Cleaning sheet with stopper for information apparatus and cleaning method using the sheet |
| JPH0725589U (en) * | 1993-10-04 | 1995-05-12 | 沖電線株式会社 | Incorrect insertion prevention connection method with color modular plug |
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2000
- 2000-11-15 JP JP2000348532A patent/JP4593761B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04169438A (en) * | 1990-10-31 | 1992-06-17 | Shin Etsu Polymer Co Ltd | Cleaning sheet with stopper for information apparatus and cleaning method using the sheet |
| JPH0725589U (en) * | 1993-10-04 | 1995-05-12 | 沖電線株式会社 | Incorrect insertion prevention connection method with color modular plug |
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| JP2002143782A (en) | 2002-05-21 |
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