JP4589062B2 - X-ray source - Google Patents

Description

  The present invention particularly relates to an X-ray source used as a microfocus X-ray source.

Conventionally, a microfocus X-ray source described in Patent Document 1 is known as a technique in such a field. This microfocus X-ray source is a type of X-ray source including an X-ray tube that collides electrons from an electron gun with a target and irradiates the generated X-rays to the outside through an irradiation window. This microfocus X-ray source is used in an X-ray non-destructive inspection apparatus that finds an abnormality of an inspection object based on a transmission image of X-rays that have passed through the inspection object.
Japanese Patent No. 2634369

  Such an inspection apparatus is required to obtain a clearer transmission image in order to enable inspection with higher accuracy. In order to obtain a clear transmission image, it is necessary to increase the amount of X-ray irradiation. Therefore, such an X-ray source is required to have a high output. In particular, when performing high-speed fluoroscopic inspection of objects distributed on the transport line, it is necessary to obtain a clear transmission image in a short time. Especially high.

  However, since this type of microfocus X-ray source needs to supply a large amount of power from the drive power supply unit to the X-ray tube as the output increases, the heat generated from the drive power supply unit during operation increases. The part becomes hot. Then, when the drive power supply unit becomes high temperature, the operation of the electronic components constituting the drive power supply unit may become unstable. Therefore, in order to increase the output of the X-ray source, it is necessary to cool the drive power supply unit that reaches a high temperature with higher efficiency, but in reality, no measures have been taken.

  Therefore, an object of the present invention is to provide an X-ray source that enables efficient cooling of the drive power supply unit.

  In order to solve the above-described problems, an X-ray source of the present invention has an X-ray tube and irradiates the X-ray to the outside, and is housed in a housing to support a circuit board and to face the X-ray generator. A circuit board holder having a first flat plate portion and a second flat plate portion, and a drive power supply that is housed between the first flat plate portion and the second flat plate portion and supplies drive power to the X-ray generator. And a cooling fan for flowing cooling air between the first flat plate portion and the second flat plate portion.

  According to this X-ray source, since the driving power supply unit is located in the ventilation path formed between the first flat plate portion and the second flat plate portion, sufficient cooling air is applied to the driving power supply unit. Thus, the driving power supply unit can be intensively and efficiently cooled by the cooling air.

  Moreover, it is preferable to connect the 1st member which has a 1st flat plate part, and the 2nd member which has a 2nd flat plate part. In this case, after attaching a drive power supply part to a 1st flat plate part or a 2nd flat plate part, a 1st member and a 2nd member are connected, a 1st flat plate part, a 2nd flat plate part, Since the drive power supply unit can be arranged between the two, assembly workability is improved.

  According to the present invention, it is possible to efficiently cool the drive power supply unit.

  Hereinafter, preferred embodiments of an X-ray source according to the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is used for the same element and the overlapping description is abbreviate | omitted.

(First embodiment)
As shown in FIGS. 1 and 2, the X-ray source 1 is an X-ray type equipped with an X-ray tube that causes electrons from an electron gun to collide with a target and irradiate the generated X-rays outside through an irradiation window. It is a radiation source, for example, used as an X-ray source in an X-ray nondestructive inspection apparatus. An X-ray generation unit 5 that generates and emits X-rays and a control unit 7 that controls the X-ray generation unit 5 are stored inside the housing 3 of the X-ray source 1. The internal space of the housing 3 is composed of an X-ray generation unit accommodation space R1 that accommodates the X-ray generation unit 5 and a control unit accommodation space R2 that accommodates the control unit 7, and the X-ray generation unit accommodation space R1. A partition wall 15 extending downward from the upper inner wall of the housing 3 is provided between the control unit housing space R2.

  As shown in FIG. 3, the X-ray generation unit 5 includes a high-voltage power supply unit 17 fixed to the bottom plate 3 a of the housing 3, and an X-ray tube that receives X-rays upon receiving power from the high-voltage power supply unit 17. 27 and a metal tube (X-ray tube surrounding portion) 29 that surrounds a part of the X-ray tube 27. The high voltage power supply unit 17 includes a high voltage transformer 19 that can generate a high voltage, a high voltage supply circuit 23 that multiplies the high voltage generated by the high voltage transformer 19 and supplies the high voltage to the X-ray tube 27, and a high voltage transformer 19 and a high voltage supply. A connection line 25 a for connecting the circuit 23 and a connection line 25 b for connecting the high voltage supply circuit 23 and the X-ray tube 27 are provided. The high-voltage supply circuit 23 and the connection lines 25 a and 25 b are molded in an insulating block 21 made of an electrically insulating material (for example, epoxy resin), and the high-voltage transformer 19 is controlled by the side surface of the insulating block 21. Projecting to the part 7 side. Such a structure of the high-voltage power supply unit 17 prevents discharge from the high-voltage supply circuit 23 to which a high voltage is applied and the connection lines 25a and 25b to the outside.

  The X-ray tube 27 located above the high-voltage power supply unit 17 is of a reflective target type, and is provided at the end of the rod-shaped anode 27b and the valve portion 27a that holds and accommodates the rod-shaped anode 27b in an insulated state. A target accommodating portion 27d that accommodates the provided target 27c and an electron gun portion 27e that accommodates an electron gun 27k that emits an electron beam toward the reflecting surface of the target 27c are provided.

  The valve portion 27a and the target accommodating portion 27d are arranged coaxially, and the axis of the electron gun portion 27e is substantially orthogonal to the axis. The base end portion of the rod-shaped anode 27b protrudes downward from the lower portion of the valve portion 27a as the high voltage application portion 27g.

  A socket 33 is coupled to the lower portion of the high voltage application unit 27g, and the socket 33 is connected to the high voltage supply circuit 23 via the connection line 25b of the high voltage power supply unit 17. With such a configuration, a high voltage is supplied to the X-ray tube 27 from the high voltage supply circuit 23 via the connection line 25b. When the electron gun 27k in the electron gun unit 27e emits electrons toward the target 27c in a state where the X-ray tube 27 is supplied with a high voltage, X-rays are generated from the target 27c, and the X-rays are generated. Irradiation is performed from an X-ray irradiation window 27h provided in the opening of the target accommodating portion 27d.

  The X-ray tube 27 is a hermetically sealed type sealed in a vacuum. For example, the X-ray tube 27 is provided with an exhaust pipe (not shown), and after the inside of the valve portion 27a, the target accommodating portion 27d and the electron gun portion 27e is evacuated, the exhaust tube is sealed. Sealed by stopping.

  The metal tube 29 protrudes upward from the upper surface of the high-voltage power supply unit 17 and is formed in a cylindrical shape surrounding the X-ray tube 27. In order to efficiently dissipate heat generated from the X-ray tube 27, the metal tube 29 is made of a metal (for example, aluminum) having excellent heat dissipation and is provided with a plurality of cooling fins 29a extending in the horizontal direction around the metal tube 29. ing. The cooling fin 29a is provided as a convex strip extending in the circumferential direction on the peripheral surface of the metal tube 29, and increases the surface area of the metal tube 29, and efficiently dissipates heat generated from the X-ray tube 27. Can do.

  An opening 29j is formed in the tip surface of the metal tube 29, and a valve portion 27a of the X-ray tube 27 is inserted through the opening 29j. Insulating oil that is a liquid electrical insulating material is inserted into the internal space of the metal tube 29. 31 has been injected. An attachment flange 27f is formed between the valve portion 27a and the target accommodating portion 27d of the X-ray tube 27, and the X-ray tube 27 is fixed to the distal end surface of the metal tube 29 by the attachment flange 27f. The part 27 a is immersed in the insulating oil 31. By adopting the insulating oil 31, the valve portion 27a of the X-ray tube 27 is surrounded by the insulating oil 31, and discharge from the X-ray tube 27 to the outside is prevented.

  Next, the control unit 7 will be described. As shown in FIGS. 1 and 4, the control unit 7 is provided in the control unit accommodating space R <b> 2 and includes a first circuit board 35, a second circuit board 37, and a drive power supply unit 39. The first circuit board 35 controls the voltage that can be generated by the high-voltage power supply unit 17 from a high voltage (for example, 160 kV) to a low voltage (for example, 0 V). Further, the first circuit board 35 controls the electron emission timing, tube voltage, tube current, and the like in the electron gun unit 27e. The second circuit board 37 controls the operation of the first circuit board 35 based on a control signal from the outside. The drive power supply unit 39 is a converter that performs AC / DC conversion (or DC / DC conversion) on electric power supplied from the outside, and supplies drive power to the first circuit board 35 and the second circuit board 37 and X Electric power for generating a high voltage is supplied to the high voltage transformer 19 of the line generator 5. Note that the first circuit board 35, the second circuit board 37, the drive power supply unit 39, and the X-ray generation unit 5 are appropriately connected to each other by wires (not shown).

  In the control unit 7, it is preferable that the first circuit board 35, the second circuit board 37, and the drive power supply unit 39 are accommodated in the control unit accommodation space R <b> 2 in a compact manner and securely fixed. For this reason, the control unit 7 is provided with a circuit board holder 49 made of a heat conductive metal (for example, aluminum) in the control unit accommodating space R2, and the first circuit board 35 and the first circuit board 35 are provided in the circuit board holder 49. The two-circuit board 37 and the drive power supply unit 39 are supported.

  The circuit board holder 49 includes a first plate (first member) 45 and a second plate (second member) 47 made of a heat conductive metal. The first plate 45 has a first flat plate portion 46 that is inclined and erected with respect to the bottom plate 3a, and the second plate 47 is a second flat plate that is erected substantially perpendicular to the bottom plate 3a. Part 48 is provided. The lower ends of the first plate 45 and the second plate 47 are fixed to the bottom plate 3a by screws 49a, and are connected by screws 49b in a state where the upper ends of the plates 45 and 47 are overlapped.

  The first flat plate portion 46 has a first mounting surface 45a for mounting the first circuit board 35, and the second flat plate portion 48 has a second mounting surface 47b for mounting the second circuit board 37. And a third mounting surface 47c which is the back surface of the second mounting surface 47b. In this way, the circuit board holder 49 has an angle structure, so that the circuit boards 35 and 37 attached to the circuit board holder 49 are securely fixed to the bottom plate 3a while maintaining the mechanical strength of the circuit board holder 49 itself. can do.

  The lower portion of the second plate 47 is bent in an L shape so as to approach the side wall 3 f of the housing 3, and the high voltage transformer 19 of the high voltage power supply unit 17 is located between the second plate 47 and the first plate 45. It is supposed to be located in.

  The first circuit board 35 is attached along the first attachment surface 45 a of the first plate 45 via the spacer 51. Similarly, the second circuit board 37 is attached along the second attachment surface 47 b of the second plate 47 via the spacer 51, and the drive power supply unit 39 is provided along the third attachment surface 47 c of the second plate 47. It is attached via a spacer 51.

  Since the first mounting surface 45a of the circuit board holder 49 is provided to be inclined with respect to the bottom plate 3a, the first circuit board 35 can be accommodated in the control unit accommodating space R2 while being inclined, and the X-ray source This contributes to the reduction in height. Further, since the circuit board holder 49 is composed of two members, the first plate 45 and the second plate 47, the circuit boards 35 and 37 and the drive power supply unit 39 are provided on the first to third mounting surfaces 45a, 47b and 47c. After attaching the first power supply unit 39 between the first plate 45 and the second plate 47 by connecting the first plate 45 and the second plate 47 with screws, the circuit board holder 49 is completed. Therefore, the assembly workability of the control unit 7 is improved.

  In such an X-ray source 1, since the X-ray tube 27 generates heat during operation, the X-ray tube 27 and the metal tube 29 become high temperature. The heat generated by the X-ray tube 27 increases as the output of the X-ray irradiation increases. If the temperature of the X-ray tube 27 becomes high, other parts are adversely affected and the output of the X-ray tube 27 is reduced. In order to cool the X-ray tube 27 efficiently, it is necessary to cool the metal tube 29 efficiently.

  Therefore, in the X-ray source 1, as shown in FIG. 1, the X-ray generation unit 5 including the metal tube 29 is stored inside the housing 3 and stands up in a direction orthogonal to the bottom plate 3 a of the housing 3. The cooling fan unit 55 is provided on the side wall (second wall) 3b, and the metal tube 29 is cooled by flowing cooling air in the housing 3.

  As shown in FIGS. 1 and 4, the housing 3 extends in parallel with the bottom plate 3 a and is provided with an opening (irradiation unit) 3 j for irradiating X-rays from the X-ray tube 27 to the outside. It has a wall (first wall) 3c. The opening 3j is provided at a position corresponding to the irradiation window 27h of the X-ray tube 27, and exposes the irradiation window 27h to the outside. Moreover, in the housing | casing 3, the wall which connects the upper wall 3c and the side wall 3b is formed as the inclined wall 3d. Further, the wall connecting the side wall 3f facing the side wall 3b and the upper wall 3c is also an inclined wall 3e. The degree of inclination of the inclined wall 3d and the inclined wall 3e with respect to the upper wall 3c may be different from each other or the same.

  The cooling fan unit 55 is provided on the side wall 3b of the housing 3 as described above, and includes the cooling fan 55a that rotates about an axis perpendicular to the side wall 3b. The cooling fan 55a rotates to cause air to flow from the outside to the inside of the housing 3. The cooling fan 55 a is located in the vicinity of the X-ray generator 5 so that the cooling air directly hits the X-ray generator 5.

  The air taken into the housing 3 by the cooling fan 55a flows in the X-ray generation unit accommodating space R1 as cooling air and passes around the metal cylinder 29 while uniformly hitting the metal cylinder 29. It will flow in the direction of the side wall 3f. Then, the cooling air passing around the metal tube 29 is guided by the cooling fins 29a and smoothly flows in the horizontal direction, and contacts the metal tube 29 with a sufficient contact area, and efficiently heats from the metal tube 29. Remove it. As a result, the metal tube 29 can be efficiently cooled, and the X-ray tube 27 surrounded by the metal tube 29 can be efficiently cooled. And since the metal cylinder 29 contacts the cooling air without any unevenness and is cooled, output fluctuation and output decrease due to temperature unevenness of the X-ray tube 27 can be suppressed. Thereafter, the cooling air that has received heat from the metal tube 29 and has increased in temperature is discharged to the outside through the exhaust port 3k provided in the inclined wall 3e.

  At this time, since the wall connecting the upper wall 3c and the side wall 3b is the inclined wall 3d, the stagnation of the cooling air is suppressed, and a smooth flow of the cooling air in the housing 3 can appear. it can. As a result, the cooling air smoothly flows around the metal cylinder 29, and the metal cylinder 29 can be efficiently cooled. In addition, since the wall which connects the upper wall 3c and the side wall 3f of the housing 3 is also the inclined wall 3e, this also contributes to the smooth flow of the cooling air. As described above, in the X-ray source 1, the metal tube 29 is efficiently cooled, so that the X-ray tube 27 can be efficiently cooled. Therefore, the output of the X-ray source can be increased.

  The X-ray source 1 has a connector part (not shown) connected to a personal computer or the like in a part of the side wall 3b on the control part accommodation space R2 side. Signals related to control information from a personal computer or the like are input / output via the. Of the casing 3 excluding the bottom plate 3a, the cooling fan unit 55 and the connector section (not shown) have wiring connections to the control section 7 and the like, so that they are different from other parts of the casing 3. If it is, it is preferable in terms of maintenance of the X-ray source 1 or the like. In the present embodiment, the cooling fan unit 55 and the connector part (not shown) are fixed to the bottom plate 3a and connected to the control part 7 by wiring.

  In addition, since the inclined wall 3d and the inclined wall 3e are formed in the housing | casing 3 of the X-ray source 1, the following effects are also acquired. When the inclined walls 3d and 3e are not formed, corners are formed between the upper wall 3c and the side walls 3b and 3f. Here, in the case where a fluoroscopic image in which the inspection object is tilted by such an X-ray source is acquired, the tilted inspection object hits a corner, and therefore the irradiation window 27h and the inspection object are sufficiently close to each other. I can't let you. Compared to this, in the X-ray source 1, the inspection object can be brought closer to the irradiation window 27h without being obstructed by the corners. For this reason, it is possible to obtain a fluoroscopic image of the inspection object having a larger magnification.

  In such an X-ray source 1, various electronic components are mounted on the first and second circuit boards 35 and 37 and the drive power supply unit 39 of the control unit 7. In order to stabilize the operating characteristics of each component, it is necessary to cool these components. In particular, the drive power supply unit 39 generates a large amount of heat when performing AC / DC conversion (or DC / DC conversion), and thus needs to be efficiently cooled.

  Therefore, the partition wall 15 in the housing 3 partitions the metal tube 29 and the control unit 7 without completely partitioning the X-ray generation unit housing space R1 and the control unit housing space R2, and below the partition wall 15. Is provided with a vent hole 59 for communicating the X-ray generation unit accommodation space R1 and the control unit accommodation space R2. Thus, since the partition between the metal cylinder 29 and the control unit 7 is partitioned by the partition wall 15, the cooling air that has become high temperature after the cooling of the metal cylinder 29 may directly flow into the control unit accommodating space R2. Can be suppressed. Further, it is possible to suppress the radiant heat generated from the metal cylinder 29 from being blocked by the partition wall 15 and directly transmitted to the control unit 7. As a result, the temperature rise of the control unit 7 can be suppressed, and the operations of the circuit boards 35 and 37 of the control unit 7 can be stabilized. At the same time, since the X-ray generation unit accommodation space R1 and the control unit accommodation space R2 are communicated with each other through the ventilation port 59, a part of the cooling air generated by the cooling fan 55a is transmitted through the ventilation port 59 to the control unit accommodation space R2. Therefore, the controller 7 can be cooled by the cooling air.

  At this time, since the circuit board holder 49 is configured as described above, as shown in FIG. 4, the control unit housing space R2 is surrounded by the first plate 45, the second plate 47, and the bottom plate 3a. A tunnel portion R2a appears. Since the tunnel portion R2a extends in a direction in which the cooling air flows in through the ventilation port 59 (a direction perpendicular to the paper surface of FIG. 4), it functions as a cooling air ventilation path. Accordingly, a smooth flow of cooling air that is concentrated in the tunnel portion R2a is generated. Since the drive power supply 39 is present in the tunnel R2a, the heat generated in the drive power supply 39 is efficiently removed by the cooling air, and the drive power supply 39 is cooled intensively and efficiently. can do. As a result, the operation characteristics of the drive power supply unit 39 can be stabilized.

  The high-voltage transformer 19 is provided so as to protrude from the insulating block 21 toward the control unit 17 and is located in the tunnel portion R2a. Therefore, the high-voltage transformer 19 also has cooling air flowing through the tunnel portion R2a. (Refer to FIG. 2). Therefore, the high-pressure transformer 19 that becomes high temperature is also efficiently cooled by the cooling air. The cooling air that has received heat from the drive power supply unit 39 and the high-voltage transformer 19 and has risen in temperature is discharged to the outside through an exhaust port 3h (see FIGS. 1 and 2) provided in the side wall 3g of the housing 3. .

  At this time, a part of the cooling air that has flowed into the control unit housing space R2 through the ventilation port 59 also flows into the space R2b outside the circuit board holder 49, and is configured by the outer space R2b. Since the first circuit board 35 and the second circuit board 37 exist in the ventilation path, the circuit boards 35 and 37 are cooled by the cooling air flowing in the space R2b.

  As described above, the cooling air that cools the first circuit board 35 and the second circuit board 37 and the cooling air that cools the drive power supply unit 39 and the high-voltage transformer 19 flow in different ventilation paths. The circuit board holder 49 prevents the cooling air from being mixed. As a result, the drive power supply 39 and the high-voltage transformer 19 that generate a large amount of heat are efficiently cooled, while the cooling air whose temperature has risen due to the cooling of the drive power supply 39 and the high-voltage transformer 19 flows into the tunnel portion R2a. Thus, it is possible to suppress the temperature of the first circuit board 35 and the second circuit board 37 from rising. As a result, the operation characteristics of the components of the first circuit board 35 and the second circuit board 37 can be stabilized.

  The first circuit board 35, the second circuit board 37, and the drive power supply unit 39 are mounted in a state of being lifted from the mounting surfaces 45a, 47b, and 47c via the spacers 51. The first circuit board 35, the second circuit board 37, and the driving power supply unit 39 are in contact with both front and back sides. Therefore, this way of attachment also contributes to efficient cooling of the first circuit board 35, the second circuit board 37, and the drive power supply unit 39.

  Further, among the components of the first circuit board 35, the power transistor 61 (see FIG. 2) generates a relatively large amount of heat, so that it is separated from the first circuit board 35, and the high voltage power supply unit 17, the cooling fan unit 55, It is installed in close contact with a metal heat sink 63 provided between the two. At this time, the power transistor 61 functions as a component of the first circuit board 35 by being electrically connected to the first circuit board 35 through a wiring (not shown). With such an arrangement, the heat sink 63 is cooled by receiving the cooling air from the cooling fan 55 a, and the power transistor 61 in close contact with the heat sink 63 is indirectly cooled. As described above, by separately cooling components that generate particularly large heat away from the circuit board main body, the temperature rise of the control unit 7 can be effectively suppressed.

(Second Embodiment)
As shown in FIG. 5, the X-ray source 71 includes a housing 73. A partition wall 75 that partitions the X-ray generation unit accommodation space R <b> 1 and the control unit accommodation space R <b> 2 is formed in the housing 73 so as to extend from the inner wall of the housing 73. That is, the internal space of the casing 73 is partitioned by the partition wall 75 into an X-ray generation unit accommodation space R1 and a control unit accommodation space R2, so that cooling air does not flow in and out between the two spaces. It has become. According to such a configuration of the X-ray source 71, the cooling fan 55a allows the cooling air to flow into the X-ray generation unit accommodating space R1 to intensively cool the X-ray generation unit 5 including the metal tube 29. In addition, it is possible to reliably suppress the cooling air that has reached a high temperature from flowing into the control unit housing space R2.

  Further, the X-ray source 71 includes a cooling fan unit 77 that is different from the cooling fan unit 55 on the control unit accommodation space R <b> 2 side of the housing 73. The cooling fan unit 77 and the other cooling fan unit 55 are juxtaposed, and the cooling fan 77a is located in the vicinity of the first circuit board 35 so that the cooling air generated by the cooling fan 77a directly hits the first circuit board 35. Is arranged. With such a configuration, the cooling fan 55a causes the cooling air to flow into the X-ray generation unit accommodation space R1 to cool the X-ray generation unit 5 intensively, and at the same time, the cooling fan 77a cools the control unit accommodation space R2. Wind can be flowed and the control part 7 can be cooled intensively. In this way, the X-ray generation unit accommodating space R1 and the control unit accommodating space R2 are individually cooled, so that the X-ray generation unit 5 including the metal tube 29 and the control unit 7 including the drive power supply unit 39 can be efficiently performed. Can be cooled. In this case, it is preferable that the power transistor 61 and the metal heat sink 63 for cooling the power transistor 61 are disposed in the vicinity of the cooling fan 77a in the control unit housing space R2 because the cooling efficiency is increased.

  As described above, also by the X-ray source 71, the X-ray tube 27 can be efficiently cooled by efficiently cooling the metal tube 29. Therefore, the output of the X-ray source can be increased, and the controller 7 is driven. By efficiently cooling the power supply unit 39, the operation characteristics of each component of the drive power supply unit 39 can be stabilized.

(Third embodiment)
As shown in FIG. 6, the control unit 7 in the X-ray source 91 has a structure in which the circuit boards 35 and 37 are fixed to the bottom plate 3a via a circuit board holder 85 composed of plates 81 and 83 that are independent from each other. Yes. Also with such an X-ray source 91, the drive power supply unit 39 is efficiently cooled by the cooling air flowing in the space between the plate 81 and the plate 83. The plates 81 and 83 may extend until reaching the upper wall 3c and come into contact with the upper wall 3c.

  In addition, this invention is not limited to the said embodiment. For example, the circuit board holder 49 is not limited to being screwed, and may be fixed to the bottom plate 3a by welding or adhesion. Further, the circuit board holder 49 may be fixed to a portion other than the bottom plate 3 a of the housing 3 or may be fixed to a member fixed to the housing 3. The first plate 45 and the second plate 47 are preferably connected by fastening means such as screws in order to improve the assembly workability. However, the present invention is not limited to this, and the first plate 45 and the second plate 47 are connected. The plate 47 may be connected by welding or adhesion. The circuit board holder 49 is not limited to one consisting of one member or two members including the first plate 45 and the second plate 47, and may be formed by combining a number of members. In this case, bending can be omitted by forming a circuit board holder by combining a large number of flat plate members. The circuit board holder 49 is not limited to a heat conductive metal, and may be made of resin.

  In the above embodiment, as the cooling fans 55a and 77a, an intake type cooling fan that sends air from the outside to the inside of the casing is used. However, the cooling fans 55a and 77a are air from the inside to the outside of the casing. May be an exhaust type.

  Further, the arrangement of the cooling fan 55a is not limited to the side wall 3b, and the cooling fan 55a may be provided in another portion as long as the cooling air flows between the first flat plate portion 45 and the second flat plate portion 47. For example, by providing a ventilation opening in the housing 3 and arranging a cooling fan in the vicinity of the ventilation opening and inside the housing 3, the cooling air can flow between the first flat plate portion 45 and the second flat plate portion 47. May be. Further, for example, an exhaust type cooling fan may be arranged on the side wall 3g so as to send out air of the tunnel portion R2a where the drive power supply unit 39 exists to the outside of the housing 3.

  The X-ray source 1 may include a plurality of cooling fans. In this case, a plurality of cooling fans of the same type may be arranged, but a combination of an intake type cooling fan and an exhaust type cooling fan can be used. For example, in addition to the cooling fan 55a on the side wall 3b of the X-ray generation unit housing space R1, an exhaust type cooling fan can be further provided on the substantially opposing wall (particularly the inclined wall 3e). Further, for example, in addition to the cooling fan 77a on the side wall 3b of the control unit housing space R2, an exhaust type cooling fan can be further provided on the substantially opposing wall (particularly the side wall 3f) or the side wall 3g.

  In addition, when the X-ray generation unit accommodating space R1 and the control unit accommodating space R2 are not partitioned, an intake type cooling fan is provided on the X-ray generation unit accommodating space side R1, and an exhaust type cooling is provided on the control unit accommodating space R2 side. A fan may be provided, an exhaust type cooling fan may be provided on the X-ray generation unit accommodation space side R1, and an intake type cooling fan may be provided on the control unit accommodation space R2 side. For example, in the case where a cooling fan is provided in the control unit accommodation space R2 in addition to the intake type cooling fan 55a on the X-ray generation unit accommodation space R1 side, the air in the tunnel portion R2a having the drive power supply unit 39 is smoothly discharged outside the housing. An exhaust type cooling fan may be arranged on the side wall 3g so that the air can be sent out.

  The X-ray tube 27 may be a sealed X-ray tube or an open X-ray tube. The X-ray tube 27 may be a transmissive target type instead of a reflective target type. The entire X-ray tube 27 may be accommodated in a metal tube 29. In this case, in order to irradiate the X-ray from the X-ray tube 27 to the outside, the metal tube 29 has a portion with high X-ray permeability. Can be provided. A part of the X-ray tube 27 may protrude from the metal tube 29 and further protrude from the housing 3. The metal cylinder 29 surrounding the X-ray tube 27 may not be provided with the cooling fin 29a.

  Further, the X-ray generator 5 may not be accommodated in the housing 3.

  Further, the above-described configurations can be combined with each other without departing from the spirit of the present invention.

1 is a perspective view showing a first embodiment of an X-ray source according to the present invention. It is a front view of the X-ray source shown in FIG. It is sectional drawing of the X-ray generation part of the X-ray source shown in FIG. It is sectional drawing of the control part of the X-ray source shown in FIG. It is a front view which shows 2nd Embodiment of the X-ray source which concerns on this invention. It is a perspective view which shows 3rd Embodiment of the X-ray source which concerns on this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,71,91 ... X-ray source, 3,73 ... Housing, 5 ... X-ray generation part, 27 ... X-ray tube, 35 ... 1st circuit board, 37 ... 2nd circuit board, 39 ... Drive power supply part, 45 ... first plate (first member), 46 ... first flat plate portion, 47 ... second plate (second member), 48 ... second flat plate portion, 49b ... screw (fastening means), 49,85 ... Circuit board holder, 55a, 77a ... cooling fan, 83, 81 ... plate.

Claims (2)

An X-ray generator having an X-ray tube and irradiating the outside with X-rays;
A circuit board holder that is accommodated in the housing and supports the circuit board, and has a first flat plate portion and a second flat plate portion facing each other;
A drive power supply unit that is housed between the first flat plate portion and the second flat plate portion and supplies drive power to the X-ray generation unit;
An X-ray source comprising: a cooling fan that causes cooling air to flow between the first flat plate portion and the second flat plate portion.   The X-ray source according to claim 1, wherein a first member having the first flat plate portion and a second member having the second flat plate portion are connected.

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