JP2009158418A - Rotary anode type x-ray tube assembly - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a rotary anode type X-ray tube assembly of which heat radiation characteristics is improved, and insulation characteristics of a high voltage connector is assured for an extended period. <P>SOLUTION: The assembly includes a vacuum enclosure 11 integrated with an anode target 15, a housing 3, a circulation path 8 in which a coolant circulates, a cathode 13, a support member 14, a baring mechanism and vacuum seal mechanism, a rotary drive device, and a high voltage connector 30 which supplies a high voltage to the cathode. The support member 14 includes a high voltage wiring part 14b, a high voltage supply terminal 14c, an end face 14e exposed to the outside of the housing 3, and a side face 14f which is positioned in the housing to contact a coolant. The high voltage connector 30 is electrically connected to the high voltage supply terminal 14c. An electrical insulating material of the high voltage connector 30 is tightly fitted to the end face 14e of the support member 14, directly or indirectly. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a rotary anode X-ray tube device, and more particularly to a rotary anode X-ray tube device capable of improving heat release characteristics.

Conventional rotary anode X-ray tube apparatuses are roughly classified into the following two types.
(1) Type 1: Rotating anode type X-ray tube device includes a rotating anode type X-ray tube in which a rotatable anode target is accommodated in a vacuum envelope, a housing for accommodating a rotating anode type X-ray tube, etc. In order to release the heat generated by the anode target or the like, a circulation path for circulating a cooling medium is provided inside the anode target (see, for example, Patent Document 1 and Patent Document 2).

  Since the heat of the anode target is transferred to the cooling medium through a short heat path, it is possible to improve the heat release characteristics generated by the anode.

  (2) Type 2: A rotary anode X-ray tube device is rotatable about an axis, a part of which is an anode target and a vacuum chamber which is a vacuum chamber, and a vacuum envelope around the axis Means for rotating the vessel, a cathode mounted in a vacuum chamber for generating electrons and focusing them in a region outside the axis of the anode target, and a housing (see, for example, US Pat. Thru | or patent document 6). A high voltage is supplied to the cathode from the outside of the housing.

Since the heat of the anode target is transferred to the cooling medium through a short heat path, it is possible to improve the heat release characteristics generated by the anode.
Japanese Patent Publication No. 5-27205 JP 2006-54181 A Japanese Patent No. 2539193 French Patent No. 2599555-A1 Japanese Patent No. 2929506 US Pat. No. 6,396,901

  The rotary anode X-ray tube device configured as in (2) is exposed to the outside of the housing together with a high voltage wiring portion electrically connected to the cathode and a high voltage supply terminal connected to the high voltage wiring portion. It has an end face and a high voltage connector that is in close contact with the end face and applies a high voltage to the cathode via a high voltage supply terminal. A part of the high voltage wiring portion near the end face is immersed in an insulating oil which is a high voltage insulating material.

  However, when the heat generation of the rotary anode X-ray tube apparatus configured as described above increases, the radiation function of heat transmitted from the cathode is limited. One reason is that the high-voltage supply terminal is immersed in insulating oil, but the insulating oil is not circulated, so the heat transfer rate is low. Another reason is that the heat transmitted from the cathode accumulates during use of the rotary anode X-ray tube device and the temperature of the insulating oil rises.

As a result, the electrically insulating rubber member of the high voltage connector may be deformed beyond the allowable temperature, and the close contact with the end face may be reduced. When such a problem occurs, discharge along the adhesion interface between the high voltage connector and the end face occurs relatively early.
The present invention has been made in view of the above points, and an object of the present invention is to provide a rotary anode type X-ray tube apparatus that can improve heat dissipation characteristics and can ensure insulation of a high-voltage connector over a long period of time.

In order to solve the above-described problem, a rotary anode X-ray tube apparatus according to an aspect of the present invention includes:
A vacuum envelope integrated with the anode target and formed to be rotatable;
A housing that houses at least the vacuum envelope and rotatably holds the vacuum envelope;
A circulation path formed in the housing and in which a cooling medium circulates in the vicinity of at least the anode target;
A stationary cathode housed in the vacuum envelope and stationary;
A support member for supporting the cathode;
A bearing mechanism and a vacuum seal mechanism provided between the vacuum envelope and the housing or a fixed body fixed to the housing;
A rotation driving device for rotating the vacuum envelope;
A high voltage connector for applying a high voltage to the cathode,
The support member is
A high-voltage wiring portion electrically connected to the cathode;
A high voltage supply terminal electrically connected to the high voltage wiring portion and exposed outside the housing;
An end face exposed to the outside of the housing together with the high voltage supply terminal;
A side surface located in the housing, surrounding the high voltage wiring portion and in contact with the cooling medium,
The high voltage connector is electrically connected to the high voltage supply terminal;
The electrical insulating material of the high voltage connector is in close contact with the end surface of the support member directly or indirectly.

Moreover, the rotary anode X-ray tube apparatus according to another aspect of the present invention includes:
An anode target that generates X-rays when electrons collide;
An electron emission source for emitting electrons toward the anode target;
A vacuum envelope for holding the anode target and the electron emission source under a predetermined reduced pressure;
A housing containing the vacuum envelope and hermetically sealed so that a coolant can circulate between the vacuum envelope;
A support member for fixing the electron emission source to the housing;
A holding member for rotatably holding the vacuum envelope in the housing;
A vacuum seal member that is located between the vacuum envelope and the holding member and enables the rotation of the vacuum envelope in the housing while maintaining the pressure in the vacuum envelope;
A high voltage connector for applying a high voltage to the electron emission source,
The support member is
A high voltage wiring portion electrically connected to the electron emission source;
A high voltage supply terminal electrically connected to the high voltage wiring portion and exposed outside the housing;
An end face exposed to the outside of the housing together with the high voltage supply terminal;
A side surface located within the housing, surrounding the high voltage wiring portion, and in contact with the coolant;
The high voltage connector is electrically connected to the high voltage supply terminal;
The electrical insulating material of the high voltage connector is in close contact with the end surface of the support member directly or indirectly.

  According to the present invention, since the support member has a side surface in contact with the cooling medium (cooling liquid), heat from the cathode is dissipated into the cooling medium, and the temperature of the high voltage connector connected to the support member can be lowered. It is possible to provide a rotary anode type X-ray tube apparatus capable of ensuring the insulation of the high voltage connector.

Hereinafter, a rotary anode type X-ray tube apparatus according to a first embodiment of the present invention will be described in detail with reference to the drawings.
As shown in FIG. 1, an X-ray tube apparatus 1 is incorporated in, for example, an X-ray image diagnostic apparatus or a nondestructive inspection apparatus, and emits X-rays to an object, that is, a non-inspection object. The X-ray tube device 1 includes a housing 3 and an X-ray tube main body (rotary anode type X-ray tube) 5. The X-ray tube body 5 is accommodated in the housing 3 and can emit X-rays having a predetermined intensity in a predetermined direction.

  The X-ray tube main body 5 is accommodated in a predetermined position of the housing 3 via the coolant 7. The coolant 7 is, for example, a non-oil-based coolant (water-based coolant) whose main component is water and whose electrical conductivity is controlled to be less than a predetermined level. As the cooling liquid 7, a cooling medium having a conductivity set to 1 mS / m or less is used in order to ensure insulation against low voltage and reduce corrosiveness to metal parts. The cooling medium is mainly an aqueous medium in which a predetermined amount of water or glycol is mixed. Moreover, as glycols mixed with water as a cooling medium, for example, ethylene glycol, propylene glycol, or the like can be used.

  The coolant 7 is in contact with an inert gas between the housing 3 and the vacuum envelope 11 and the inert gas is dissolved in a saturated state in advance. Here, the coolant 7 is saturated with helium (He) gas which is an inert gas.

  The X-ray tube main body 5 includes a vacuum envelope 11, a cathode (thermoelectron emission source) 13, and an anode target (rotary anode, anode) 15. The vacuum envelope 11 is grounded by being in contact with a grounding electrode 9 provided through a predetermined position of one end of the housing 3.

  The inside of the vacuum envelope 11 is maintained at a predetermined degree of vacuum. Inside the vacuum envelope 11, a cathode 13 and an anode target 15 are provided. The vacuum envelope 11 holds the cathode 13 and the anode target 15 under a predetermined reduced pressure. A cathode 13 is provided independently of the vacuum envelope 11. The anode target 15 is provided inside the vacuum envelope 11 so as to be rotatable integrally with the vacuum envelope 11. The anode target 15 emits X-rays having a predetermined wavelength when the electrons emitted from the cathode 13 collide with each other.

  The vacuum envelope 11 is held by a magnetic fluid vacuum seal member 53 as a vacuum seal mechanism and a bearing (rolling bearing, ball / roll bearing) member 55 as a bearing mechanism. The magnetic fluid vacuum seal member 53 is provided at a predetermined position on the inner peripheral surface of the cylindrical fixing portion 51 provided at a predetermined position of the housing 3. The bearing member 55 is provided at a predetermined position of the fixed portion 51 and closer to the flow path of the coolant 7 than the magnetic fluid vacuum seal member 53. The cylindrical fixing portion 51 is concentrically (coaxially) fixed to the vacuum envelope holding portion 59 of the housing 3 via an electrically insulating support member 57.

  The cathode 13 is supported by a support member 14. The support member 14 has a cylindrical and electrically insulating cathode holder 14a. A fixing member 63 fixed to the outer peripheral surface of the cathode holder 14 a and a predetermined region inside the cylindrical portion 59 a of the vacuum envelope holding part 59 are fixed via a seal member 61. As described above, the cathode 13 is fixed at a predetermined position inside the vacuum envelope 11.

  The fixing member 63 has an end 63 a on the side away from the side fixed to the seal member 61. The connection structure 51a is connected to the cylindrical fixing portion 51. The fixing unit 51 supports the vacuum envelope 11 outside the vacuum envelope 11. The end portion 63 a is connected (fixed) by the connection structure 51 a and the welded portion 65. The cathode holder 14a is given a predetermined length that penetrates the vacuum envelope holder 59 of the housing 3.

  The shape of the fixing member 63 is a bellows (bellows) -like cylindrical shape. Thereby, vibration of the rotating vacuum envelope 11 is reduced from being undesirably transmitted to the cathode 13. Further, a larger assembly error between the cathode holder 14a and the cylindrical fixing portion 51 or the fixing portion 51 is absorbed.

  A plurality of permanent magnets 69 are provided at predetermined positions of the vacuum envelope 11 that holds the anode target 15. The plurality of permanent magnets 69 are portions where the outer diameter of the vacuum envelope 11 is smaller than the outer diameter of the vacuum envelope 11 in the portion surrounding the anode target 15 in the vicinity of the ground electrode 9 (hereinafter referred to as a tip portion). 11d. The plurality of permanent magnets 69 receive propulsive force (magnetic force) for rotating the vacuum envelope 11.

  A stator coil 71 is provided at a predetermined position of the housing 3. The stator coil 71 is substantially coaxial (concentric) with the permanent magnet 69. The permanent magnet 69 is provided so as to surround the distal end portion 11 d of the vacuum envelope 11. The stator coil 71 provides magnetic force (propulsive force) to the permanent magnet 69 at an arbitrary timing. The stator coil 71 is formed as an electromagnet so that rotation can be controlled from the outside. Here, the stator coil 71 functions as a rotational drive device.

  In such an X-ray tube apparatus 1, the vacuum envelope 11 is rotated at a predetermined speed by supplying a predetermined current to the stator coil 71, and an anode target provided inside the vacuum envelope 11. (Rotary anode) 15 is rotated at a predetermined speed. In this state, the electrons emitted from the cathode 13 collide with the anode target 15, so that X-rays having a predetermined wavelength are output from the anode target 15. The outputted X-rays are radiated to the outside from the window portion 11 b defined at a predetermined position of the cylindrical portion of the vacuum envelope 11 and the predetermined defined window portion 3 a of the cylindrical portion of the housing 3.

  The coolant 7 is injected into the housing 3 through a coolant inlet (coolant inlet) 5b provided in the vicinity of the bearing portion 11a of the vacuum envelope 11. The coolant 7 is discharged from the coolant outlet 5 c provided in the vicinity of the ground electrode 9. The coolant 7 is circulated between most of the area outside the vacuum envelope 11 and a predetermined area inside the housing 3. For this reason, the magnetic fluid vacuum seal member 53 and the anode target 15 incorporated in the vacuum envelope 11 are cooled.

  The inside of the vacuum envelope 11, that is, the cathode 13 and the anode target 15 are positioned under a predetermined vacuum by a magnetic fluid vacuum seal member 53. The magnetic fluid vacuum seal member is reported in, for example, “Lubrication”, Vol. 30, No. 8, pp 75-78 by Kamiyama.

  When forming the magnetic fluid vacuum seal member, first, a predetermined amount of magnetic fluid is prepared on the outer periphery of a shaft structure in which a shaft made of a magnetic material or a shaft of a nonmagnetic material is covered with a cylinder made of a magnetic material. Here, the magnetic fluid is a colloidal solution in which ferromagnetic particles are dispersed in a liquid. Next, a magnetic circuit and a permanent magnet are brought close to the shaft or shaft structure to form a magnetic circuit. As a result, the magnetic fluid can remain around the shaft or the shaft structure. The magnetic fluid vacuum seal member is a seal material that maintains a pressure (atmospheric pressure) difference. Providing the magnetic fluid vacuum seal member is beneficial for maintaining the inside of the vacuum envelope 11 rotated at a high speed under a predetermined vacuum (reduced pressure).

  The coolant 7 supplied into the housing 3 is cooled by a heat exchanger 7b provided in a cooler, that is, a cooler unit 7a. The pump 7 c circulates the coolant 7 through the heat exchanger 7 b and between the coolant inlet 5 b and the coolant outlet 5 c, that is, in the circulation path 8 formed in the housing 3. Thereby, the heat generated in the X-ray tube apparatus 1 is released to the outside of the housing 3 through the coolant 7.

  As described above, the coolant 7 can efficiently cool the magnetic fluid vacuum seal member 53 and the anode target 15. In addition, the flow path of the coolant 7 is devised so as to flow in contact with a fixed portion 51 that is generally formed of metal.

  Further, a wettability reducing flange 11 e is provided at a predetermined position of the vacuum envelope 11. The wettability reducing flange 11 e is provided in the vicinity of the anode target 15 of the vacuum envelope 11 in the vicinity of the one end portion 51 b of the fixed portion 51 of the housing 3. The wettability reducing flange 11e is provided integrally with the end portion 11c. The wettability reducing flange 11e can reduce the coolant 7 from entering the bearing member 55 and the magnetic fluid vacuum seal member 53. The wettability reducing flange 11e and the one end 51b of the fixing portion 51 provide a slight gap therebetween, that is, a gap 5d having low wettability. For this reason, the wettability reducing flange 11 e and the one end 51 b can prevent the coolant 7 from entering the inside of the vacuum envelope 11. This prevents the coolant 7 from entering the magnetic fluid vacuum seal member 53 and undesirably lowering the performance (capability) of the magnetic fluid vacuum seal member 53.

  In addition, when using the cooling liquid 7 as a liquid with a comparatively large contact angle as a cooling medium, the clearance gap 5d with low wettability is prescribed | regulated smaller than a fixed magnitude | size. As a result, the coolant 7 is prevented from entering the gap (5d). However, in this embodiment, a medium mixed with water or glycol is used as the cooling medium. In this case, in order to increase the contact angle, it is preferable to coat the flange 11 e of the vacuum envelope 11 and the one end 51 b of the fixing portion 51 with resin or the like. This prevents the coolant 7 from entering the magnetic fluid vacuum seal member 53 and undesirably lowering the performance (capability) of the magnetic fluid vacuum seal member 53.

Further, the bearing member on the side away from the magnetic fluid vacuum seal member 53 in the bearing member 55 is a seal type. As a result, the coolant 7 can be further prevented from entering the magnetic fluid vacuum seal member 53.
Although not described in detail, in the rotary anode X-ray tube apparatus shown in FIG. 1, the cooler unit 7a is connected to the housing 3 via a detachable pipe joint.

Here, the support member 14 and the high-voltage connector 30 connected to the support member 14 will be described.
In addition to the cathode holder 14a, the support member 14 includes a high voltage wiring portion 14b, a high voltage supply terminal 14c, a plate portion 14d, an end surface 14e, and a side surface 14f.

  The high voltage wiring portion 14 b is electrically connected to the cathode 13. The high voltage wiring part 14b is located inside the cathode holder 14a. The high voltage supply terminal 14 c is electrically connected to the high voltage wiring portion 14 b and exposed outside the housing 3. The plate portion 14d closes the opening of the housing 3 on the side opposite to the side where the ground electrode 9 is provided. The plate portion 14d and the cathode holder 14a are each formed of ceramics and are joined to each other. The high voltage supply terminal 14c passes through the plate portion 14d.

  The end surface 14e of the plate portion 14d is exposed to the outside of the housing 3 together with the high voltage supply terminal 14c. In this embodiment, the end face 14e is a plane. A side surface 14 f of the cathode holder 14 a is located in the housing 3, surrounds the high voltage wiring portion 14 b, and is in contact with the coolant 7. More specifically, the side surface 14 f is the entire side surface located on the plate portion 14 d side from the portion facing the fixing member 63.

  The high voltage connector 30 is for applying a high voltage to the cathode 13. The high voltage connector 30 includes a lid portion 31, an epoxy resin 32 filled in the lid portion 31, a silicone plate 33 as an electrical insulating material located between the epoxy resin 32 and the end surface 14 e, and a high voltage cable 34. is doing. The silicone plate 33 has an opening.

  The high voltage cable 34 is covered with the epoxy resin 32 and faces the high voltage supply terminal 14c. The lid 31 is attached to the housing 3 by bolts 35. The high voltage supply terminal 14 c is connected to the high voltage cable 34 through the opening of the silicone plate 33. The silicone plate 33 is in close contact with the end face 14e.

Next, the vacuum envelope holding part 59 will be described.
The vacuum envelope holding part 59 has a first flow path t1, a second flow path t2, and a third flow path t3 as flow paths through which the coolant 7 flows. The first flow path t1 is located in the vicinity of the housing 3, and is for flowing the coolant 7 from the coolant inlet 5b side to the coolant outlet 5c side. The first flow path t <b> 1 is formed through a part of the vacuum envelope holding part 59 and forms a circulation path 8.

  The second flow path t2 is located in the vicinity of the cathode holder 14a, and is used for flowing the coolant 7 from the coolant inlet 5b side to the region surrounded by the side surface 14f of the cathode holder 14a and the fixing member 63. . The second flow path t <b> 2 is formed through a part of the vacuum envelope holding part 59, and forms the circulation path 8.

  The third flow path t3 is for allowing the coolant 7 to flow from the region surrounded by the cathode holder 14a and the fixing member 63 to the first flow path t1. The third flow path t <b> 3 is formed through a part of the vacuum envelope holding part 59, and forms the circulation path 8. A region surrounded by the side surface 14 f and the fixing member 63 also forms the circulation path 8.

  According to the rotary anode type X-ray tube apparatus configured as described above, the side surface 14f of the cathode holder 14a is immersed in and in contact with the coolant 7 filled in the housing 3. By directly cooling the cathode holder 14a, the deformation of the silicone plate 33 due to heat can be suppressed, and the discharge along the adhesion interface between the high voltage connector 30 and the end face 14e can be suppressed.

  In addition, heat release characteristics can be improved by using an aqueous cooling medium, and stable characteristics can be ensured over a long period of time. Thereby, the lifetime of, for example, an X-ray image diagnostic apparatus or a nondestructive inspection apparatus in which the rotary anode X-ray tube apparatus is incorporated is increased.

  Since the water-based coolant 7 has the highest heat transfer coefficient, the heat transferred to the high-voltage insulating member can be most effectively removed. Of course, for the same reason, the heat of the anode target 15 provided integrally with the vacuum envelope 11 can be removed most promptly by using the aqueous coolant 7.

  Moreover, according to this invention, it is not necessary to consider the insulation with respect to the high voltage of a cooling liquid, a cooling medium with high cooling efficiency can be utilized, and cooling efficiency is improved. Furthermore, according to the present invention, since the life of the rotary anode X-ray tube apparatus itself is increased, the running cost of the X-ray image diagnostic apparatus and the nondestructive inspection apparatus is also reduced.

The end surface 14e is a flat surface. For this reason, a rotary anode type X-ray tube apparatus can be formed compactly.
From the above, it is possible to obtain a rotary anode type X-ray tube device that can improve the heat dissipation characteristics and can ensure the insulation of the high voltage connector over a long period of time.

Next, a rotary anode type X-ray tube apparatus according to a second embodiment of the present invention will be described in detail. In this embodiment, other configurations are the same as those of the first embodiment described above, and the same parts are denoted by the same reference numerals and detailed description thereof is omitted.
As shown in FIG. 2, the end surface 14 e is a convex surface that protrudes from the inside of the housing 3 toward the outside.

  The high voltage connector 30 includes a lid portion 31, an electrical insulation rubber 36 as an electrical insulation material filled in the lid portion 31, and a high voltage cable 34. The electrically insulating rubber 36 is formed to be recessed so as to be in close contact with the end face 14e.

  The high voltage cable 34 is covered with an electrically insulating rubber 36 and faces the high voltage supply terminal 14c. The lid 31 is attached to the housing 3 by bolts 35. The high voltage supply terminal 14 c is connected to the high voltage cable 34. The electrically insulating rubber 36 is in close contact with the end face 14e.

  According to the rotary anode type X-ray tube apparatus configured as described above, the side surface 14f of the cathode holder 14a is immersed in and in contact with the coolant 7 filled in the housing 3. By directly cooling the cathode holder 14a, deformation of the electrical insulating rubber 36 due to heat can be suppressed, and discharge along the adhesion interface between the high voltage connector 30 and the end face 14e can be suppressed.

  In addition, heat release characteristics can be improved by using an aqueous cooling medium, and stable characteristics can be ensured over a long period of time. Thereby, the lifetime of, for example, an X-ray image diagnostic apparatus or a nondestructive inspection apparatus in which the rotary anode X-ray tube apparatus is incorporated is increased.

  Moreover, according to this invention, it is not necessary to consider the insulation with respect to the high voltage of a cooling liquid, a cooling medium with high cooling efficiency can be utilized, and cooling efficiency is improved. Furthermore, according to the present invention, since the life of the rotary anode X-ray tube apparatus itself is increased, the running cost of the X-ray image diagnostic apparatus and the nondestructive inspection apparatus is also reduced.

The end surface 14e is a convex surface that is convex from the inside of the housing 3 toward the outside. For this reason, compared with the case where the end surface 14e is a flat surface, although the rotary anode X-ray tube apparatus is bulky, good adhesion between the electrical insulating rubber 36 and the end surface 14e can be realized.
From the above, it is possible to obtain a rotary anode type X-ray tube device that can improve the heat dissipation characteristics and can ensure the insulation of the high voltage connector over a long period of time.

Next, a rotary anode X-ray tube apparatus according to a third embodiment of the present invention will be described in detail. In this embodiment, other configurations are the same as those of the first embodiment described above, and the same parts are denoted by the same reference numerals and detailed description thereof is omitted.
As shown in FIG. 3, the end surface 14 e is a concave surface that is recessed from the outside of the housing 3 toward the inside.

  The high voltage connector 30 includes a lid portion 31, an electrical insulation rubber 36 as an electrical insulation material filled in the lid portion 31, and a high voltage cable 34. The electrically insulating rubber 36 has a convex surface so as to be in close contact with the end surface 14e.

  The high voltage cable 34 is covered with an electrically insulating rubber 36 and faces the high voltage supply terminal 14c. The lid 31 is attached to the housing 3 by bolts 35. The high voltage supply terminal 14 c is connected to the high voltage cable 34. The electrically insulating rubber 36 is in close contact with the end face 14e.

  According to the rotary anode type X-ray tube apparatus configured as described above, the side surface 14f of the cathode holder 14a is immersed in and in contact with the coolant 7 filled in the housing 3. By directly cooling the cathode holder 14a, deformation of the electrical insulating rubber 36 due to heat can be suppressed, and discharge along the adhesion interface between the high voltage connector 30 and the end face 14e can be suppressed.

  In addition, heat release characteristics can be improved by using an aqueous cooling medium, and stable characteristics can be ensured over a long period of time. Thereby, the lifetime of, for example, an X-ray image diagnostic apparatus or a nondestructive inspection apparatus in which the rotary anode X-ray tube apparatus is incorporated is increased.

  Moreover, according to this invention, it is not necessary to consider the insulation with respect to the high voltage of a cooling liquid, a cooling medium with high cooling efficiency can be utilized, and cooling efficiency is improved. Furthermore, according to the present invention, since the life of the rotary anode X-ray tube apparatus itself is increased, the running cost of the X-ray image diagnostic apparatus and the nondestructive inspection apparatus is also reduced.

The end surface 14 e is a concave surface that is recessed from the outside of the housing 3 toward the inside. For this reason, compared with the case where the end surface 14e is a flat surface, although the rotary anode X-ray tube apparatus is bulky, good adhesion between the electrical insulating rubber 36 and the end surface 14e can be realized.
From the above, it is possible to obtain a rotary anode type X-ray tube device that can improve the heat dissipation characteristics and can ensure the insulation of the high voltage connector over a long period of time.

  Note that the present invention is not limited to any of the above-described embodiments as they are, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. Various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in any of the above embodiments. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, constituent elements over different embodiments may be appropriately combined.

The cooling medium 7 is not limited to an aqueous system, and insulating oil or a gas body such as air can be used. As the bearing member, a sliding bearing or a magnetic bearing can be used in addition to a rolling bearing such as a ball bearing or a roll bearing. The fixing portion 51 is directly fixed to the housing via an electric insulating member. However, the elastic member, the damping member, or the absorbing member may be disposed between the electric insulating member and the housing, or between the electric insulating member and the fixed portion 51. Thereby, it is also possible to further reduce the vibration of the X-ray tube apparatus accompanying the rotation of the rotating part. The electrical insulating material of the high voltage connector 30 may be in close contact with the end surface 14e of the support member 14 directly or indirectly.
The present invention is not limited to the rotary anode X-ray tube apparatus used in the X-ray CT apparatus and the X-ray diagnostic apparatus, but can be applied to all rotary anode X-ray tube apparatuses.

1 is a schematic exploded sectional view showing a rotary anode X-ray tube device according to a first embodiment of the present invention. The schematic exploded sectional view which shows the rotary anode type | mold X-ray tube apparatus which concerns on 2nd Embodiment of this invention. The schematic exploded sectional view which shows the rotary anode type | mold X-ray tube apparatus which concerns on 3rd Embodiment of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... X-ray tube apparatus, 3 ... Housing, 5 ... X-ray tube main body, 3a ... Window part (of X-ray tube main body) 5b ... Coolant inlet (of X-ray tube main body), 5c ... (X-ray tube main body) ) Coolant outlet, 5d ... (low X-ray tube body) gap, low wettability, 7 ... Coolant (aqueous coolant), 7a ... Cooler (cooler unit), 7b ... Heat exchanger, 7c ... Pump, 8 ... circulation path, 11 ... vacuum envelope, 11b ... window portion (vacuum envelope), 11c ... end portion (vacuum envelope), 11d ... tip portion (vacuum envelope), 11e ... Wet reduction flange (of vacuum envelope), 13 ... cathode, 14 ... support member, 14a ... cathode holding body, 14b ... high voltage wiring part, 14c ... high voltage supply terminal, 14d ... plate part, 14e ... end face, 14f ... side, 15 ... anode target, 30 ... high voltage connector, 31 ... lid, 32 ... epoxy resin, 33 ... si Cone plate 34... High voltage cable 51... (Cylindrical) fixing part 51 a... (Cylindrical fixing part) connection structure 53. Magnetic fluid vacuum seal member 55. Support member, 59 ... vacuum envelope holding part, 59a ... cylindrical portion (of vacuum envelope holding part), 61 ... sealing member, 63 ... fixing member, 65 ... welded part, 69 ... permanent magnet, 71 ... stator coil .

Claims (24)

A vacuum envelope integrated with the anode target and formed to be rotatable;
A housing that houses at least the vacuum envelope and rotatably holds the vacuum envelope;
A circulation path formed in the housing and in which a cooling medium circulates in the vicinity of at least the anode target;
A stationary cathode housed in the vacuum envelope and stationary;
A support member for supporting the cathode;
A bearing mechanism and a vacuum seal mechanism provided between the vacuum envelope and the housing or a fixed body fixed to the housing;
A rotation driving device for rotating the vacuum envelope;
A high voltage connector for applying a high voltage to the cathode,
The support member is
A high-voltage wiring portion electrically connected to the cathode;
A high voltage supply terminal electrically connected to the high voltage wiring portion and exposed outside the housing;
An end face exposed to the outside of the housing together with the high voltage supply terminal;
A side surface located in the housing, surrounding the high voltage wiring portion and in contact with the cooling medium,
The high voltage connector is electrically connected to the high voltage supply terminal;
The rotary anode type X-ray tube device in which the electrical insulating material of the high voltage connector is in close contact with the end face of the support member directly or indirectly.   The rotary anode type X-ray tube apparatus according to claim 1, wherein an end surface of the support member is a flat surface.   The rotary anode type X-ray tube apparatus according to claim 1, wherein an end surface of the support member is a convex surface that protrudes from the inside of the housing toward the outside.   The rotary anode X-ray tube apparatus according to claim 1, wherein an end surface of the support member is a concave surface that is recessed from the outside to the inside of the housing.   The rotary anode X-ray tube apparatus according to claim 1, wherein the housing has a cooling medium inlet formed at a position connected to the circulation path and facing a side surface of the support member. The housing has a vacuum envelope holding part that is located between the cooling medium inlet and the anode target inside the housing and holds a vacuum envelope.
The rotary anode type X-ray tube apparatus according to claim 5, wherein the vacuum envelope holding part penetrates a part of the vacuum envelope holding part to form the circulation path. It further includes a fixing member that is positioned closer to the anode target than the vacuum envelope holding part and fixes the housing and the support member,
The rotary anode X-ray tube apparatus according to claim 6, wherein the vacuum envelope holding portion penetrates a part of the vacuum envelope holding part to form the circulation path between the side surface of the support member and the fixing member.   The rotary anode X-ray tube apparatus according to any one of claims 1 to 7, wherein the vacuum seal mechanism includes a magnetic fluid vacuum seal member. A heat exchanger for cooling the cooling medium;
The rotation according to any one of claims 1 to 8, further comprising: a circulation pump that circulates the cooling medium between the housing and the vacuum envelope while circulating the heat exchanger. Anode X-ray tube device.   The cooling medium is in contact with an inert gas between the housing and the vacuum envelope, and the inert gas is dissolved in a saturated state in advance. The rotating anode type X-ray tube device according to item.   The rotary anode X-ray tube apparatus according to any one of claims 1 to 10, wherein the cooling medium is an aqueous cooling medium whose main component is water.   The rotary anode type X-ray tube device according to claim 11, wherein the conductivity of the aqueous cooling medium is 1 mS / m or less. An anode target that generates X-rays when electrons collide;
An electron emission source for emitting electrons toward the anode target;
A vacuum envelope for holding the anode target and the electron emission source under a predetermined reduced pressure;
A housing containing the vacuum envelope and hermetically sealed so that a coolant can circulate between the vacuum envelope;
A support member for fixing the electron emission source to the housing;
A holding member for rotatably holding the vacuum envelope in the housing;
A vacuum seal member that is located between the vacuum envelope and the holding member and enables the rotation of the vacuum envelope in the housing while maintaining the pressure in the vacuum envelope;
A high voltage connector for applying a high voltage to the electron emission source,
The support member is
A high voltage wiring portion electrically connected to the electron emission source;
A high voltage supply terminal electrically connected to the high voltage wiring portion and exposed outside the housing;
An end face exposed to the outside of the housing together with the high voltage supply terminal;
A side surface located within the housing, surrounding the high voltage wiring portion, and in contact with the coolant;
The high voltage connector is electrically connected to the high voltage supply terminal;
The rotary anode type X-ray tube device in which the electrical insulating material of the high voltage connector is in close contact with the end face of the support member directly or indirectly.   The rotary anode type X-ray tube apparatus according to claim 13, wherein an end surface of the support member is a flat surface.   The rotary anode type X-ray tube device according to claim 13, wherein an end surface of the support member is a convex surface convex from the inside of the housing toward the outside.   The rotary anode type X-ray tube device according to claim 13, wherein an end surface of the support member is a concave surface recessed from the outside of the housing toward the inside.   The rotary anode X-ray tube apparatus according to claim 13, wherein the housing has a cooling medium inlet formed at a position facing the side surface of the support member while being connected to the circulation path. The housing has a vacuum envelope holding part that is located between the cooling medium inlet and the anode target inside the housing and holds a vacuum envelope.
The rotary anode type X-ray tube apparatus according to claim 17, wherein the vacuum envelope holding part penetrates a part of the vacuum envelope holding part to form the circulation path. It further includes a fixing member that is positioned closer to the anode target than the vacuum envelope holding part and fixes the housing and the support member,
19. The rotary anode X-ray tube apparatus according to claim 18, wherein the vacuum envelope holding part penetrates a part of the vacuum envelope holding part to form the circulation path between a side surface of the support member and a fixing member.   The rotary anode X-ray tube apparatus according to any one of claims 13 to 19, wherein the vacuum seal mechanism includes a magnetic fluid vacuum seal member. A heat exchanger for cooling the coolant;
The rotation according to any one of claims 13 to 20, further comprising a circulation pump that circulates the coolant through the heat exchanger and circulates between the housing and the vacuum envelope. Anode X-ray tube device.   The coolant is in contact with an inert gas between the housing and the vacuum envelope, and the inert gas is dissolved in a saturated state in advance. The rotating anode type X-ray tube device according to item.   The rotary anode X-ray tube apparatus according to any one of claims 13 to 22, wherein the coolant is an aqueous coolant whose main component is water.   24. The rotary anode X-ray tube device according to claim 23, wherein the conductivity of the aqueous cooling medium is 1 mS / m or less.

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