JP4586110B1 - Reflection mirror device and reflection mirror substrate - Google Patents

Abstract

An optical mount for fixing a reflecting mirror base is not required, and the direction of an adjustable reflecting surface can be adjusted without being limited to a rotation direction about one axis.
The reflection mirror device is directly fixed to an optical stage, which is a structure holding the reflection mirror substrate, in a state where the position and posture of the reflection mirror substrate can be adjusted. The optical stage is formed with a first payout mechanism portion 20 and a second payout mechanism portion 22, and these mechanisms are configured to be capable of adjusting the position and posture of the reflecting mirror base relative to the optical stage. ing. By providing the first and second feeding mechanism portions, the direction of the reflecting surface of the reflecting mirror base can be adjusted without being limited to the rotation direction about one axis.
[Selection] Figure 4

Description

  The present invention relates to a reflection mirror device having a function that makes it possible to adjust the position of a reflection mirror and the direction of a reflection surface.

  Optical elements such as lenses and reflecting mirrors are usually fixed to an optical mount by screws or springs, and are attached to an optical stage that is a mechanical structure that holds the position and posture of the optical mount in an adjustable state. Used.

  For example, a first plate for holding the optical element and a second plate connected to the first plate using a screw and a spring, and the first plate is separated from the second plate by the above-described screw and spring, or An optical device mount is disclosed which is configured to be close and capable of rotating the first plate relative to the second plate. (See Patent Document 1). The optical element is fixed and held on the first plate by a fastener that is a screw mechanism, and the second plate is attached to a base such as an optical stage by a set screw.

  Here, the first plate corresponds to the optical mount, and the second plate corresponds to the optical stage. In other words, the optical device mount disclosed in Patent Document 1 is configured such that an optical element is fixed to an optical mount with a screw, and this optical mount is connected to an optical stage with a spring and a screw.

  Also, an optical component fixing comprising an adjustment member that adjusts the installation angle of the reflection mirror, a fulcrum part that serves as a fulcrum for changing the installation angle by the adjustment member, and an elastic member that presses the reflection mirror against the fulcrum part and the adjustment member. A mechanism is disclosed (see Patent Document 2). In this optical component fixing mechanism, the elastic member includes an adjustment member side pressing portion that presses the side closer to the adjustment member on the side surface of the reflecting mirror, and a fulcrum side pressing portion that presses the side closer to the fulcrum portion on the side surface of the reflecting mirror. The fulcrum side pressing portion is configured such that the pressing force is changed in conjunction with the change in the installation angle by the adjusting member of the reflection mirror. Here, the reflection mirror corresponds to the optical element.

  According to this optical component fixing mechanism, a force point to which a force for changing the posture and a fulcrum for changing the posture are provided directly on the reflecting mirror itself, and an optical mount for fixing the optical element is not required. The reflection mirror, which is a direct optical element, is connected to and attached to the optical stage.

  In the following description, it is assumed that the optical element is a reflection mirror, and when it is necessary to distinguish between the reflection surface of the reflection mirror and the structure of the reflection mirror, the structure of the reflection mirror is It is assumed to be a reflection mirror substrate. Here, the structure of the reflecting mirror is a constituent material of the reflecting mirror having a reflecting surface, and refers to, for example, a glass substrate, a ceramic substrate, or a resin substrate.

JP 2002-506998 A JP 2007-130032 A

  Like the optical device mount disclosed in Patent Document 1 described above, the reflecting mirror base is fixed to the optical mount with a point-like fulcrum by a screw, and the orientation of the reflecting surface is adjusted by adjusting the attitude of the optical mount. In the conventional support mechanism of the system, the reflecting surface may be deformed by a stress applied to the reflecting mirror base from a point-like fulcrum for fixing the reflecting mirror base to the optical mount.

  Further, the material of the reflecting mirror base is different from the constituent material of the optical mount that fixes the reflecting mirror base, and the thermal expansion coefficient thereof is also different. Therefore, a difference occurs in the magnitude of thermal expansion between the reflecting mirror base and the optical mount as the temperature changes. Due to this difference, the magnitude of the stress acting on the fulcrum by the screw fixing the reflecting mirror changes, and the reflecting surface may be further deformed by the change in the stress generated thereby.

  Therefore, if the optical component fixing mechanism disclosed in Patent Document 2 does not require an optical mount for fixing the optical element, the unevenness of the stress acting on the fulcrum by the screw is eliminated, and the above-mentioned The problem of deformation of the optical element due to the stress generated from the fulcrum that fixes the optical component to the optical mount is avoided. However, according to the optical component fixing mechanism disclosed in Patent Document 2, the direction of the adjustable reflecting surface is limited to the rotation direction about one axis.

  The inventor of this application does not require an optical mount for fixing the reflecting mirror base, and is configured so that the reflecting mirror base is directly connected to the optical stage, and the attitude control of the reflecting mirror base is in any direction. The mechanism that is possible is studied. As a result, the above-described optical mount is not required and the reflecting mirror is configured by pushing or pulling the reflecting mirror base from the optical stage side at two spaced apart positions on the back surface facing the reflecting surface of the reflecting mirror base. It has been found that the normal direction of the reflecting surface of the substrate can be controlled to an arbitrary direction.

  Therefore, the object of the present invention is that an optical mount for fixing the reflecting mirror base is not required, and the direction of the adjustable reflecting surface can be adjusted without being limited to the rotation direction about one axis. It is to provide a reflection mirror device.

  According to the gist of the present invention, the reflecting mirror device of the following invention is provided.

  The first reflection mirror device of the present invention is such that the reflection mirror substrate can adjust the position and posture of the reflection mirror substrate with respect to the optical stage that is a structure that holds the reflection mirror substrate having the reflection surface. It is a fixed reflection mirror device.

The reflecting mirror base, which is a substrate having a reflecting surface, has two points of action on the back side facing the reflecting surface of the reflecting mirror base, and the optical stage has a feeding tool that advances in a straight line. or feeding mechanism configured to retract is formed at two positions spaced apart, the head of the feeding device is formed in contact respectively created for point of the reflecting mirror substrate. The position and posture of the reflecting mirror base relative to the optical stage can be adjusted by moving the feeding tool forward to push out the action point of the reflecting mirror, or by retracting the feeding tool to pull back the action point of the reflecting mirror. It is configured in a form.

  The feeding mechanism section may be constituted by a female screw formed on the optical stage and a male screw that is screwed into the female screw and combined so as to be fed out from the female screw. In this case, the male screw corresponds to a feeding tool.

  Further, the feeding mechanism unit may be a control mechanism that includes a cylinder fixed to the optical stage and a piston fitted so as to be able to be fed out from the cylinder, and transmits a force to the piston using a working fluid as a medium. In this case, the piston corresponds to the feeding tool.

  The reflection mirror device of the present invention further includes an elastic force mechanism that maintains the positional relationship between the optical stage and the reflection mirror base body with an elastic force. It is preferable to have a configuration in which the state in contact with the surface is maintained.

  Further, the reflection mirror device of the present invention further includes a magnetic mechanism that holds the optical stage and the reflection mirror substrate with each other by a magnetic force, and the leading portion of the feeding tool serves as an action point by the magnetic force mechanism. It is good also as a structure by which the state which contacted is maintained.

  The above-described elastic force mechanism is preferably a spring mechanism in which one end is fixed to one point of the optical stage and the other end is fixed to one point of the reflecting mirror base.

  Further, the above-described magnetic force mechanism is preferably configured as a set of magnets fixed to respective portions of the optical stage and the reflecting mirror base.

  In the second reflecting mirror device of the present invention, the above-described reflecting mirror base has a back surface facing the reflecting surface and a bottom surface orthogonal to the back surface, and the first projecting portion and the second projecting portion are provided on the bottom surface. Configuration. The optical stage is provided with a first recess and a second recess that are respectively fitted to the first protrusion and the second protrusion, and the first protrusion and the second protrusion are respectively the first recess and the second protrusion. The reflecting mirror base is attached to the optical stage by being fitted to the two recesses. Here, the first recess is a substantially conical recess having a central symmetry axis, and the second recess is a substantially arc-shaped recess centered on the central symmetry axis of the first recess. The second protrusion is rotatable about the first protrusion, and the reflection mirror base is rotatable about a straight line connecting the first protrusion and the second protrusion.

  The reflecting mirror substrate, which is a component of the first and second reflecting mirror devices of the present invention, is a spring whose one end is fixed to the optical stage in order to maintain the mutual positional relationship with the optical stage by elastic force. A spring fixing hole for fixing the other end may be provided.

  In addition, the reflecting mirror substrate, which is a constituent element of the first and second reflecting mirror devices of the present invention, is fixed to the optical stage in order to maintain the mutual positional relationship with the optical stage with a magnetic force. The other magnet with respect to the magnet may be fixed.

  The reflection mirror substrate, which is a constituent element of the second reflection mirror device of the present invention, has a reflection surface, a back surface opposite to the reflection surface, and a bottom surface orthogonal to the back surface. A configuration in which a first protrusion and a second protrusion are provided to be supported from the optical stage is preferable.

  According to the reflecting mirror device of the present invention, as described above, the reflecting mirror base is directly connected to the optical stage in a state where the position and posture of the reflecting mirror base can be adjusted without passing through the optical mount. ing.

  Therefore, there is no need for a screw mechanism for fixing the reflecting mirror base to the optical mount. Accordingly, since no stress is generated on the reflecting mirror base by the screw, it is possible to remove one of the causes for the deformation of the reflecting surface.

  In the reflection mirror device of the present invention, since the reflection mirror base is directly fixed to the optical stage without passing through the optical mount, there is no portion where the reflection mirror base is covered by the optical mount. For this reason, it is possible to increase the effective area of the reflecting surface of the reflecting mirror base. That is, according to the reflection mirror device of the present invention, the entire reflection surface of the reflection mirror substrate can be used effectively, whereas in the reflection mirror device configured using the conventional optical mount, the periphery of the reflection mirror substrate is The part is covered by an optical mount. Therefore, when the reflection mirror device is configured using the same size of the reflection mirror substrate, the reflection mirror device of the present invention is more reflective than the reflection mirror device configured using the conventional optical mount. It has the advantage that the area that can be effectively used as a surface can be widened.

  Even in the reflection mirror device of the present invention, the non-uniform stress acts on the reflection mirror substrate to fix it to the optical stage, as in the conventional reflection mirror device of the same type. However, the distortion of the reflecting surface due to the stress acting on the reflecting mirror substrate is largely in the peripheral portion of the reflecting surface of the reflecting mirror substrate. In other words, according to the reflection mirror device of the present invention that can ensure a wide range of available reflection surfaces, it is possible to reduce the influence of the distortion of the reflection surface by using only the central portion of the reflection surface with a small distortion. It becomes. This is due to the fact that the reflecting mirror device of the present invention has a feature that a large area that can be effectively used as a reflecting surface can be taken, and this point is experimentally described later. Has been confirmed by.

  Furthermore, according to the first reflecting mirror device of the present invention, the feeding mechanism part is formed at two positions apart from the optical stage, and the feeding mechanism part formed at these two places allows the optical of the reflecting mirror base to be It is comprised in the form which can adjust the position and attitude | position with respect to a stage. By adopting such a configuration, the direction of the reflective surface that can be adjusted is not limited to the rotation direction around one axis, and the direction of the reflective surface formed on the reflective mirror base is adjusted without restriction. It becomes possible.

  Further, the second reflection mirror device of the present invention is common to the first reflection mirror device described above in that the feeding mechanism portion is formed at two positions apart from the optical stage. In addition, in the second reflecting mirror device of the present invention, the second projecting portion is rotatable about the first projecting portion, and the reflecting mirror is configured with a straight line connecting the first projecting portion and the second projecting portion as a rotation axis. The substrate is configured to be rotatable. With this configuration, the second protrusion can be adjusted in an arc shape around the first protrusion, and in addition, a straight line connecting the first protrusion and the second protrusion is the center of rotation. Therefore, it is possible to adjust the orientation of the reflecting surface formed on the reflecting mirror substrate without any restriction.

It is the perspective view seen from the optical mount side of the conventional reflective mirror apparatus of the typical structure of the same kind as the reflective mirror apparatus of embodiment of this invention. It is the perspective view seen from the optical stage side of the conventional reflective mirror apparatus of the same kind of typical structure as the reflective mirror apparatus of embodiment of this invention. FIG. 5 is a perspective view seen from the main surface side where the reflecting surface of the reflecting mirror substrate of the first reflecting mirror device of the embodiment of the present invention is formed. FIG. 5 is a perspective view seen from the back surface side facing the main surface on which the reflecting surface of the reflecting mirror substrate of the first reflecting mirror device of the embodiment of the present invention is formed. It is an exploded view of the reflective mirror apparatus of embodiment of this invention. It is a diagram for explaining the planar shape over the entire reflection surface of the reflection mirror substrate provided in the first reflection mirror device of the embodiment of the present invention, (A) is the reflection of the reflection mirror substrate at the time of mounting on the optical stage FIG. 3B is a diagram showing a surface shape over the entire surface in a three-dimensional manner, and FIG. 5B is a diagram showing an intersection line between a reflecting surface and a plane substantially perpendicular to the reflecting surface passing through the central portion of the reflecting surface of the reflecting mirror base. . It is a diagram for explaining the planar shape in the circle of the central portion of the reflecting surface of the reflecting mirror substrate provided in the first reflecting mirror device of the embodiment of the present invention, (A) is a reflection at the time of mounting on the optical stage It is a figure which shows the surface shape in the circle | round | yen of the center part of the reflective surface of a mirror base | substrate in three dimensions, (B) is a plane substantially perpendicular to the reflective surface which passes along the center of the circle | round | yen of the center part of the reflective surface of a reflective mirror base | substrate It is a figure which shows the intersection line of and a reflective surface. It is a figure used for explanation of the planar shape over the entire reflection surface of the reflection mirror base before being fixed to the optical mount provided with the conventional reflection mirror device, and (A) is a view of the reflection mirror base before mounting to the optical mount. It is a diagram showing the surface shape over the entire surface of the reflecting surface in a three-dimensional manner, (B) is a diagram showing the intersection of the plane and the reflecting surface substantially perpendicular to the reflecting surface passing through the central portion of the reflecting surface of the reflecting mirror base is there. It is a figure used for explanation of the planar shape over the entire reflecting surface of the reflecting mirror substrate after being fixed to the optical mount provided with the conventional reflecting mirror device, and (A) is a diagram of the reflecting mirror substrate after being mounted on the optical mount. It is a diagram showing the surface shape over the entire surface of the reflecting surface in a three-dimensional manner, (B) is a diagram showing the intersection of the plane and the reflecting surface substantially perpendicular to the reflecting surface passing through the central portion of the reflecting surface of the reflecting mirror base is there. FIG. 5 is a diagram for explaining a second reflection mirror device according to an embodiment of the present invention, and is a schematic perspective view seen from the main surface side where a reflection surface of a reflection mirror base is formed. It is a diagram for explaining the second reflection mirror device of the embodiment of the present invention, (A) is a schematic side view of the reflection mirror substrate viewed from a direction parallel to the reflection surface of the reflection mirror substrate, B) is a schematic side view of the optical stage viewed from a direction parallel to the reflecting surface of the reflecting mirror substrate. It is a diagram for explaining the second reflection mirror device of the embodiment of the present invention, (A) is a schematic front view of the reflection mirror substrate viewed from a direction orthogonal to the reflection surface of the reflection mirror substrate, B) is a schematic plan view of the reflecting mirror device viewed from a direction parallel to the reflecting surface of the reflecting mirror substrate.

  Embodiments of the present invention will be described below with reference to the drawings. In addition, each figure has only shown each component schematically to such an extent that this invention can be understood, and this invention is not limited to the example of illustration. Moreover, in each figure, the same number is shown about the same component, The overlapping description about these functions etc. may be abbreviate | omitted.

<Conventional reflection mirror device>
In order to clarify that the configuration of the reflection mirror device according to the embodiment of the present invention is basically different from the configuration of a conventional reflection mirror device of the same type, a conventional reflection mirror will be described with reference to FIGS. First, the configuration of the apparatus will be described. FIG. 1 is a perspective view of a conventional reflecting mirror device having a representative configuration of the same type as that of a reflecting mirror device according to an embodiment of the present invention, which will be described later, as viewed from the optical mount side, and FIG. It is the perspective view seen from the optical stage side of a mirror apparatus.

  FIG. 1 and FIG. 2 are perspective views in a state in which the reflecting mirror base is not attached. When the reflection mirror base is attached, the perspective view shown in FIG. 1 is a perspective view seen from the reflection surface side of the reflection mirror base, and FIG. 2 is a perspective view seen from the back side of the reflection surface of the reflection mirror base. Become.

  The conventional reflecting mirror device shown in FIGS. 1 and 2 includes an optical mount 150 that holds the reflecting mirror base, and an optical stage 112 that connects the optical mount 150 using a feeding mechanism portion and a spring, and includes the above-described feeding mechanism. The reflection mirror has a configuration in which the optical mount 150 can be separated from or brought close to the optical stage 112 by a portion and a spring, and the optical mount 150 can be rotated by a minute angle (about 10 ° at the maximum) with respect to the optical stage 112. Device. In the following description, rotating the posture of the optical mount 150 by a minute angle with respect to the optical stage 112 may also cause a partial rotational movement.

  The feeding mechanism section includes two parts, a first feeding mechanism section 120 and a second feeding mechanism section 122. Further, the leading portion 130P of the pin 130 attached to the optical stage 112 is in contact with one point of the optical mount 150, and the posture of the optical mount 150 is changed using this one point as a fulcrum.

  The first feeding mechanism 120 is a combination of a male screw 116-1 and a female screw 116-2, and is attached to the optical stage 112. The leading end 116-1P of the male screw 116-1 is in contact with one point of the optical mount 150. By pushing or pulling back the male screw 116-1, the leading end 116-1P of the male screw 116-1 is in contact with the optical mount 150-1. One point on the mount 150 moves forward or backward.

  The second feeding mechanism 122 is a combination of a male screw 118-1 and a female screw 118-2, and is attached to the optical stage 112. The head portion 118-1P of the male screw 118-1 is in contact with one point of the optical mount 150, and the head portion 118-1P of the male screw 118-1 is in contact with the male screw 118-1 by pushing or pulling back the male screw 118-1. One point on the mount 150 moves forward or backward.

  As described above, the leading portion 130P of the pin 130 is brought into contact with the optical mount 150 by the operation of moving one point forward or backward of the optical mount 150 with which the leading portion 116-1P of the male screw 116-1 is in contact. The optical mount 150 is shown in FIG. 1 with the center line connecting the fulcrum and the point where the leading end 118-1P of the male screw 118-1 of the second feeding mechanism portion 122 is in contact with the optical mount 150 as a center. The posture of the optical mount 150 is adjusted by performing a partial rotational movement with the direction as the rotational center.

  Similarly, the fulcrum in which the leading portion 130P of the pin 130 is in contact with the optical mount 150 by the operation of moving one point of the optical mount 150 in contact with the leading portion 118-1P of the male screw 118-1 to advance or retract. And the optical mount 150 in the z-axis direction shown in FIG. 1 centering on a center line connecting the leading end 116-1P of the male screw 116-1 of the first feeding mechanism portion 120 and one point in contact with the optical mount 150. The attitude of the optical mount 150 is adjusted by performing a partial rotational movement around the rotation center.

  The normal direction of the reflecting surface of the reflecting mirror base attached to the optical mount 150 can be adjusted to an arbitrary direction by adjusting the attitude of the optical mount 150 by the first feeding mechanism 120 and the second feeding mechanism 122 described above. It is possible.

  The reflecting mirror base is fitted into a window portion 154 formed in a circular shape of the optical mount 150 and fixed by a fixing screw 152.

  In FIG. 1 and FIG. 2, a plurality of screws for fixing the reflecting mirror substrate are used instead of one fixing screw 152, but the illustration is omitted except for the fixing screw 152. Further, the illustration of the spring, which is a component for connecting the optical mount 150 to the optical stage 112, is omitted because the drawing becomes cumbersome and difficult to see. Instead of omitting the illustration of the spring that is a component for connecting the optical mount 150, a hole portion necessary for mounting the spring and a hole for inserting a pin for fixing the spring The schematic position and structure are indicated by circles or ellipses. In FIGS. 1 and 2, the holes required for mounting the springs are 158-1 and 158-2, and the holes for inserting the pins are 160-1 and 160-2 (not shown). .

  Further, when actually using the reflection mirror device, it is necessary to fix the reflection mirror device to a magnet chuck or the like. FIG. 1 shows that the optical stage 112 is used as a magnet chuck or the like in such a case. A screw hole 156 for fixing is shown.

  One of the features of the conventional reflecting mirror device shown in FIGS. 1 and 2 is that it includes an optical mount 150 in which the reflecting mirror base is constituted by screws. The optical mount 150 shown in FIGS. 1 and 2 is formed with a window portion 154 for fitting the reflecting mirror base in a circular shape. For this reason, the reflecting mirror base to be fitted into the optical mount 150 needs to have a disk shape cut at the outer periphery surrounding the reflecting surface in a circle.

  In general, it is necessary to process a reflecting mirror base fitted in the optical mount 150 into a shape that matches the shape of the window portion 154 formed in the optical mount 150. The reflection surface of the reflection mirror base that can be used as the reflection surface is limited by the shape of the window portion 154 formed in the optical mount 150. That is, the effective area of the reflecting surface that can be used as the reflecting surface cannot be larger than the area of the window portion 154 formed in the optical mount 150.

  Further, as described above, since the reflecting mirror base is fixed to the optical mount 150 by the fixing screw 152, the reflecting surface may be deformed by the stress applied to the reflecting mirror base from the dotted fulcrum by the fixing screw 152. Furthermore, the reflective surface may be deformed by thermal stress due to the difference between the material of the reflecting mirror base and the constituent material of the optical mount 150.

<First Reflective Mirror Device of Embodiment of the Invention>
With reference to FIGS. 3 to 5, a first reflecting mirror device according to an embodiment of the present invention will be described. FIG. 3 is a perspective view seen from the main surface side on which the reflecting surface of the reflecting mirror substrate provided in the first reflecting mirror device of the embodiment of the present invention is formed, and FIG. FIG. 3 is a perspective view seen from the back side facing the main surface on which the reflecting surface of the mirror base provided in the first reflecting mirror device of the embodiment of the invention is formed. FIG. 5 is an exploded view of the reflecting mirror device according to the embodiment of the present invention.

  Hereinafter, the reflection mirror base used in the first reflection mirror device of the embodiment of the present invention is not limited to the case where it is formed as a normal total reflection mirror that reflects all incident light without being transmitted. Even when it is formed as a semi-transparent mirror that transmits a part of light, it can be used similarly.

  As shown in FIG. 3, the first reflecting mirror device according to the embodiment of the present invention is configured such that the reflecting mirror substrate 10 is provided with respect to the optical stage 12 that is a structure holding the reflecting mirror substrate 10 having the reflecting surface 10R. The reflection mirror device is connected and attached with its position and posture adjustable, and the reflection mirror base 10 is a first support point 14-1 and a second support point 14-2 separated from the optical stage 12. It is supported movably at a point.

  The optical stage 12 is formed with a first feeding mechanism unit 20 and a second feeding mechanism unit 22 configured so that the feeding tool moves forward or backward on a straight line, and the first feeding mechanism unit 20 and the second feeding mechanism are formed. The leading part of the feeding tool, which is a component of each part 22, corresponds to the leading part of each feeding tool on the surface on the back side of the reflecting mirror base 10 other than the area of the reflecting surface of the reflecting mirror base 10 It is formed in the state which touched each set action point. Then, the position of the reflecting mirror base 10 with respect to the optical stage 12 can be determined by pushing the working point of the reflecting mirror base 10 by advancing the feeding tool, or by pulling back the working point of the reflecting mirror base 10 by retreating the feeding tool. The posture can be adjusted.

  Further, as shown in FIG. 5, the head 32P of the male screw 32 meshed with the female screw 34 attached to the optical stage 12 is in contact with a fulcrum 30 that is one point of the reflecting mirror base, and this one point is used as a fulcrum. The posture of the reflecting mirror base 10 is changed. Only when the manufacturing and assembly of the first reflecting mirror device according to the embodiment of the present invention is performed or when the reflecting mirror base 10 is exchanged, the male screw 34 is rotated, and the fulcrum 30 and the optical stage 12 are rotated. The positional relationship is adjusted. Usually, the male screw 34 is used while being fixed to the female screw 34.

  As shown in FIG. 4, the first feeding mechanism unit 20 includes a male screw 16-1, which is a feeding tool, a female screw 16-2 that meshes with the male screw 16-1, and a screw fixing tool 16-3. The female screw 16-2 is attached to the optical stage 12.

  As shown in FIG. 5, by rotating the male screw 16-1 clockwise or counterclockwise, the action point 26 (in FIG. 5) of the reflecting mirror base 10 with which the leading portion 16-1P of the male screw 16-1 is in contact. The position is indicated by a cross.) Can be pushed out or retracted. The action point 26 is one point provided on the back surface 10B facing the reflection surface of the reflection mirror base 10, and no depression or the like is provided at that position.

  The screw fixture 16-3 fixes the male screw 16-1 so as not to rotate, that is, in the posture adjustment process of the reflecting mirror base 10 when the first reflecting mirror device of the embodiment of the present invention is used. When the adjustment work by 16-1 is completed, the male screw 16-1 has a function of fixing so that no rotation occurs even if a rotational force is applied.

  Specifically, the fixing screw 36-1 is fitted into the screw fixing device 16-3, and the posture of the screw fixing device 16-3 is slightly changed by the fixing screw 36-1, and this posture is slightly changed. As a result, a part of the screw thread of the male screw 16-1 and a part of the screw thread of the female screw are strongly pressed against each other, and the sliding friction at the strongly pressed part is increased so that the male screw 16-1 can be easily rotated. It has a configuration that can be disabled.

  The reflection mirror base 10 and the optical stage 12 have one end fixed to a point on the optical stage 12 by a pin 38-1 and the other end fixed to a point on the reflection mirror base 10 by a spring 40-1. It is movably supported by the formed elastic force mechanism. Therefore, even if the male screw 16-1 is moved forward or backward, the leading portion 16-1P of the male screw 16-1 does not move away from the action point 26 of the reflecting mirror base 10.

  As shown in FIG. 4, the second feeding mechanism portion 22 includes a male screw 18-1, which is a feeding tool, a female screw 18-2 that meshes with the male screw 18-1, and a screw fixing tool 18-3. The female screw 18-2 is attached to the optical stage 12.

  By rotating the male screw 18-1 clockwise or counterclockwise, the action point 28 of the reflecting mirror base 10 in contact with the head portion 18-1P of the male screw 18-1 can be pushed out or retracted. The action point 28 is a point provided on the back surface 10B facing the reflection surface of the reflection mirror base 10, and a substantially elliptical depression is formed.

  The screw fixture 18-3 has the same shape and function as the screw fixture 16-3, and the spring 42-2 also has the same shape and function as the spring 42-1. Also, the pins 38-2 and 40-2 are the same in shape and function as the pins 38-1 and 40-1. Similarly to the screw fixture 16-3, the screw fixture 18-3 is fitted with a fixing screw 36-2 so that the male screw 18-1 cannot be easily rotated. ing.

  The normal direction of the reflecting surface of the reflecting mirror base 10 is adjusted by the first feeding mechanism 20 and the second feeding mechanism 22 as follows.

  One point of the reflecting mirror base 10 (the point of action 26 indicated by a cross in FIG. 5) that is in contact with the leading portion 16-1P of the male screw 16-1 of the first feeding mechanism portion 20 moves forward or backward. As a result, the fulcrum 30 where the leading end 32P of the male screw 32 is in contact with the reflecting mirror base 10 and the leading end 18-1P of the male screw 18-1 of the second feeding mechanism part 22 are in contact with the reflecting mirror base 10. The reflecting mirror base 10 is partially rotated around the center line connecting the action point 28, which is a single point, with the y-axis direction shown in FIG. 3 as the center of rotation, and the attitude of the reflecting mirror base 10 is adjusted. Is done.

  Similarly, the action point 28, which is one point of the reflecting mirror base 10 with which the leading portion 18-1P of the male screw 18-1 of the second feeding mechanism portion 22 is in contact, moves forward and backward, thereby moving the male screw 32. The center connecting the fulcrum 30 where the leading 32P is in contact with the reflecting mirror base 10 and the working point 26 where the leading part 16-1P of the female screw 16-1 of the first feeding mechanism portion 20 is in contact with the reflecting mirror base 10 The reflecting mirror base 10 is partially rotated around the line about the z-axis direction shown in FIG. 3, and the posture of the reflecting mirror base 10 is adjusted.

  The normal direction of the reflecting surface of the reflecting mirror base 10 can be adjusted to an arbitrary direction by adjusting the posture of the reflecting mirror base 10 by the first feeding mechanism 20 and the second feeding mechanism 22 described above. Yes.

  A conical depression is formed in the portion where the fulcrum 30 is provided on the back surface 10B facing the reflecting surface 10R of the reflecting mirror base 10, and an elliptical cone-shaped depression is formed in the action point 28. Has been. On the other hand, the depression 26 is not particularly provided with a depression or the like. The reason why the elliptical cone-shaped depression is formed in the portion where the action point 28 is set is as follows.

  When the reflecting mirror base 10 partially rotates around a straight line passing through the fulcrum 30 and parallel to the z-axis, the distance from the fulcrum 30 to the action point 28 changes, so that the action point 28 corresponds to this change. In the portion where is set, an elliptical cone-shaped depression is formed instead of a conical depression.

  By forming a conical depression in the part where the fulcrum 30 is set and forming an elliptical cone depression in the part where the action point 28 is set, the fulcrum 30 to the action point 28 as described above are formed. In addition to being able to cope with the change in the interval, the reflecting mirror base 10 is formed in the portion where the center position of the depression formed in the portion where the fulcrum 30 is set and the action point 28 is set. There is an effect that the fulcrum 30 and the action point 28 exist on a straight line connecting the center position of the elliptical cone-shaped depression, and the fulcrum 30 and the action point 28 do not deviate from the straight line.

  Further, the reason why no depression or the like is provided in the portion where the action point 26 is set is as follows.

  When the reflecting mirror base 10 partially rotates around the straight line passing through the fulcrum 30 and parallel to the y-axis, the distance from the fulcrum 30 to the action point 26 changes, so that the action point 26 corresponds to this change. The action point 26 part is flattened so that the position of the part can be freely changed. In addition, the reason why there is no need to form an elliptical cone-like depression similar to the action point 28 in the action point 26 part is that the fulcrum 30 and the action point 28 are on a specific straight line as described above. Since the fulcrum 30 and the action point 28 do not deviate outside this straight line, the structure that prevents the fulcrum 30 and the action point 26 from deviating from a specific straight line is also created. This is because it is ensured that the reflecting mirror base 10 partially rotates around the y-axis direction without being attached. For this reason, the formation of a costly depression at the point of action 26 is omitted.

<Configuration of feeding mechanism>
The feeding mechanism portion can be constituted by the female screw formed on the optical stage as described above and the male screw that is screwed into the female screw and can be fed from the female screw, but is not limited to this configuration. Other configurations are possible.

  The other structure of the feeding mechanism section is configured as a control mechanism that transmits a force to the piston using a working fluid composed of a cylinder fixed to the optical stage and a piston fitted so as to be able to be fed out from the cylinder. It is a feeding mechanism part. In this configuration, the male screw constituting the feeding mechanism portion included in the first reflecting mirror device of the above-described embodiment of the present invention corresponds to the piston, and the female screw corresponds to the cylinder. Such a configuration can be realized by appropriately using a configuration of a hydraulic control device represented by a known hydraulic jack or the like.

  When adjusting the direction of the reflecting surface of the reflecting mirror base manually, it is convenient to configure the feeding mechanism part as a combination of male and female screws. For example, it is automated by control from a mechanical control device. In this case, it is convenient to form it as a combination of a piston and a cylinder.

  In the first reflecting mirror device according to the embodiment of the present invention, as described above, the reflecting mirror base 10 and the optical stage 12 are movable relative to each other by an elastic force mechanism using the elastic force of the spring. It is supported. With this configuration, the state where the feeding mechanism portion and the reflection mirror base are in contact at the point of action is maintained.

  As a mechanism for maintaining the state where the feeding mechanism part and the reflection mirror base remain in contact with each other at the point of action, the optical stage and the reflection mirror base can be positioned relative to each other with magnetic force, regardless of the above-described elastic force mechanism. It can also be realized by a magnetic mechanism that maintains the relationship. This magnetic mechanism can be configured, for example, as a set of magnets fixed to the optical stage and the reflecting mirror base.

<Evaluation of reflection surface shape>
With reference to FIGS. 6 (A) and (B) to FIGS. 9 (A) and (B), the shape of the reflecting surface of the reflecting mirror substrate provided in the first reflecting mirror device of the embodiment of the present invention, and the related art The result of evaluating the shape of the reflecting surface of the reflecting mirror base fixed to the optical mount provided in the reflecting mirror device will be described.

  In the evaluation, the reflection mirror substrate provided in the first reflection mirror device of the embodiment of the present invention is a 46 mm square plate, and the reflection mirror substrate fixed to the optical mount provided in the conventional reflection mirror device is 28 mm. A circular plate was used. The thickness of the reflecting mirror substrate was 5 mm for both. Moreover, zero dewar (ZERODUR) was used for the material of both reflection mirror bases. Here, ZERODUR is a trademark of Shot Glass Technology.

  The material of the reflecting mirror substrate is not limited to this zero dewar, but a quartz glass substrate that has been used as a material for the reflecting mirror substrate in the past, and a ceramic material, a resin material, etc. that have recently begun to be used as a reflecting mirror substrate. Can be used as appropriate.

  Three-dimensional measurement of the shape of the reflecting surface of the reflecting mirror substrate was performed by a phase shift method using a Fizeau interferometer. For this measurement, monochromatic light with a wavelength of 632.8 nm was used.

  6 (A) and 6 (B) are diagrams for explaining the planar shape over the entire reflecting surface of the reflecting mirror substrate provided in the first reflecting mirror device of the embodiment of the present invention, and FIG. FIG. 6 is a diagram three-dimensionally showing the surface shape of the reflecting surface of the reflecting mirror base when mounted on the optical stage, and FIG. 6 (B) shows a plane substantially perpendicular to the reflecting surface of the reflecting mirror base and the reflecting surface. FIG.

  In FIG. 6 (B), a straight line indicated by a rough broken line is a reference line indicating a completely flat surface, and a curved line indicated by a solid line is an intersection line with a plane parallel to the y axis and substantially perpendicular to the reflecting surface. A curve indicated by a fine broken line is a diagram showing an intersection line with a plane parallel to the x-axis and substantially perpendicular to the reflecting surface. The set position is determined so that this intersection line passes through a portion where a large distortion occurs on a plane substantially perpendicular to the reflecting surface.

  The horizontal axis of FIG. 6 (A) represents the relative position coordinates, and represents the range over which the relative position coordinates range between 97 mm and 143 mm over 46 mm. In other words, the reflecting mirror base provided in the first reflecting mirror device is a square having a side of 46 mm.

  The surface shape of the reflecting surface of the reflecting mirror substrate after being mounted on the optical stage is the difference between the highest part and the lowest part of the reflecting surface from the curves shown in FIGS. 6 (A) and 6 (B). It can be seen that there is approximately 130 nm.

  FIGS. 7 (A) and 7 (B) are diagrams for explaining a planar shape in a circle having a diameter of 28 mm at the central portion of the reflecting surface of the reflecting mirror base body provided in the first reflecting mirror device of the embodiment of the present invention. FIG. 7 (A) is a diagram three-dimensionally showing the surface shape in a circle with a diameter of 28 mm of the central portion of the reflecting surface of the reflecting mirror base when mounted on the optical stage, FIG. 7 (B) FIG. 4 is a diagram showing an intersection line between a reflecting surface and a plane substantially perpendicular to the reflecting surface passing through the center of a circle having a diameter of 28 mm at the central portion of the reflecting surface of the reflecting mirror substrate. In FIG. 7 (B), the straight line indicated by a rough broken line is a reference line indicating a completely flat surface, and the curved line indicated by a solid line is an intersection line with a plane parallel to the y axis and substantially perpendicular to the reflecting surface. A curve indicated by a fine broken line is a diagram showing a line of intersection with a plane parallel to the x-axis and substantially perpendicular to the reflecting surface. The set position is determined so that a plane substantially perpendicular to the reflecting surface passes through the intersection where a large distortion occurs.

  The horizontal axis of FIG. 7 (A) indicates the relative position coordinates, and represents the range of the diameter of a circle having a diameter of 28 mm between which the relative position coordinates are 105 mm to 133 mm.

  The surface shape of the reflecting surface of the reflecting mirror substrate after being mounted on the optical stage is the difference between the highest part and the lowest part of the reflecting surface from the curves shown in FIGS. 7 (A) and 7 (B). It can be read that it is almost 5 nm. That is, it can be read that it is difficult to distinguish from a perfect plane and is flat to some extent.

  8 (A) and 8 (B) are diagrams for explaining the planar shape over the entire reflection surface of the reflection mirror substrate before being fixed to the optical mount provided in the conventional reflection mirror device, and FIG. ) Is a diagram three-dimensionally showing the surface shape over the entire reflective surface of the reflective mirror base before mounting on the optical mount, and FIG. 8B is a plane and reflective surface substantially perpendicular to the reflective surface of the reflective mirror base. FIG. In FIG. 8 (B), a straight line indicated by a rough broken line is a reference line indicating a completely flat surface, and a curve indicated by a solid line is an intersection line with a plane parallel to the y axis and substantially perpendicular to the reflecting surface. A curve indicated by a fine broken line is a diagram showing an intersection line with a plane parallel to the x-axis and substantially perpendicular to the reflecting surface. The set position is determined so that this intersection line passes through a portion where a large distortion occurs on a plane substantially perpendicular to the reflecting surface.

  The horizontal axis of FIG. 8 (A) shows the relative position coordinates, and represents the range where the relative position coordinates span between 28 mm and 109 mm to 137 mm. That is, the reflecting mirror base fixed to the optical mount provided in the conventional reflecting mirror device is a circle having a diameter of 28 mm.

  The surface shape of the reflecting surface of the reflecting mirror substrate before mounting on the optical mount is the difference between the highest and lowest portions of the reflecting surface from the curves shown in FIGS. 8 (A) and 8 (B). It can be seen that there is approximately 5 nm. That is, it can be read that it is difficult to distinguish from a perfect plane and is flat to some extent.

  It can be seen that the shape of the reflecting surface of the reflecting mirror base before being fixed to the optical mount provided in the conventional reflecting mirror device is difficult to distinguish from a perfect plane and is flat to some extent.

  On the other hand, if the first reflecting mirror device according to the embodiment of the present invention is limited to a circle having a diameter of 28 mm at the central portion of the reflecting surface of the reflecting mirror substrate, the figure is obtained even after being mounted on the optical stage. As shown in Fig. 7 (A) and Fig. 7 (B), the difference between the highest part and the lowest part of the reflective surface is about 5 nm, which is difficult to distinguish from a perfect plane. It was flat. That is, according to the first reflecting mirror device of the embodiment of the present invention, it can be seen that a particularly excellent effect is obtained that the reflecting surface of the reflecting mirror base can be handled as a perfect plane.

  Therefore, as described above, the first reflecting mirror device according to the embodiment of the present invention allows the reflecting mirror substrate to be limited to a circle having a diameter of 28 mm and the same width as the effective reflecting surface of the conventional reflecting mirror device. It has been confirmed that an ideal state can be realized in which a flat reflecting surface shape in a state before being mounted on the optical stage is maintained.

  Incidentally, in the conventional reflecting mirror device, the planar shape of the reflecting surface of the reflecting mirror substrate after fixing the reflecting mirror substrate to the optical mount is large as shown in FIGS. 9 (A) and 9 (B). You can see that it is distorted.

  9 (A) and 9 (B) are diagrams for explaining the planar shape over the entire reflection surface of the reflection mirror substrate after being fixed to the optical mount provided in the conventional reflection mirror device, and FIG. ) Is a diagram three-dimensionally showing the shape of the surface of the reflecting mirror substrate after it is mounted on the optical mount, and FIG. 9 (B) shows the reflecting surface passing through the central portion of the reflecting surface of the reflecting mirror substrate. It is a figure which shows the intersection of a substantially perpendicular plane and a reflective surface. In FIG. 9 (B), a straight line indicated by a rough broken line is a reference line indicating a completely flat surface, and a curved line indicated by a solid line is an intersection line with a plane parallel to the y axis and substantially perpendicular to the reflecting surface. A curve indicated by a fine broken line is a diagram showing an intersection line with a plane parallel to the x-axis and substantially perpendicular to the reflecting surface. The set position is determined so that this intersection line passes through a portion where a large distortion occurs on a plane substantially perpendicular to the reflecting surface.

  The horizontal axis of FIG. 9 (A) shows the relative position coordinates, and represents the range where the relative position coordinates extend between 28 mm and 109 mm to 137 mm.

  The surface shape of the reflecting surface of the reflecting mirror substrate after mounting on the optical mount is the difference between the highest and lowest parts of the reflecting surface from the curves shown in FIGS. 9 (A) and 9 (B). From the curve indicated by the solid line showing the intersecting line with the plane that is parallel to the y-axis having a large strain and substantially perpendicular to the reflecting surface, it can be seen that there is approximately 225 nm. That is, it can be seen that the surface shape of the reflecting surface of the reflecting mirror substrate is distorted by about 225 nm as the reflecting mirror substrate is mounted on the optical mount.

  The magnitude of this distortion is close to half the wavelength when the wavelength of visible light is 500 nm, and becomes a problem in most cases of actual use of the reflection mirror device. Therefore, in the conventional reflection mirror device, the effective utilization part of the reflection surface cannot cover the entire window part formed in the optical mount, and the reflection of the surface of the reflection part is sufficiently small. Only the central part is the effective use part. That is, when using a reflection mirror device having substantially the same size, according to the first reflection mirror device of the embodiment of the present invention, a reflection surface that is sufficiently wider than the conventional reflection mirror device is used as an effective utilization part. It means that it can be used.

<Second Reflective Mirror Device of Embodiment of the Invention>
With reference to FIGS. 10, 11A and 11B, and FIGS. 12A and 12B, a second reflecting mirror device according to an embodiment of the present invention will be described. FIG. 10 is a schematic perspective view seen from the main surface side where the reflecting surface of the reflecting mirror substrate of the second reflecting mirror device of the embodiment of the present invention is formed. FIG. 11 (A) is a schematic side view of the reflecting mirror substrate viewed from a direction parallel to the reflecting surface of the reflecting mirror substrate, and FIG. 11 (B) is an optical viewed from a direction parallel to the reflecting surface of the reflecting mirror substrate. It is a schematic side view of a stage. FIG. 12 (A) is a schematic front view of the reflecting mirror substrate viewed from a direction perpendicular to the reflecting surface of the reflecting mirror substrate, and FIG. 12 (B) is a diagram viewed from a direction parallel to the reflecting surface of the reflecting mirror substrate. It is a schematic plan view of the reflecting mirror base.

  Hereinafter, the reflection mirror base used in the second reflection mirror device of the embodiment of the present invention is not limited to the case where it is formed as a normal total reflection mirror that reflects all incident light without being transmitted. Even when it is formed as a semi-transparent mirror that transmits a part of light, it can be used similarly.

  As shown in FIGS. 11 (A) and 12 (A), the reflecting mirror base 60 of the second reflecting mirror device according to the embodiment of the present invention includes a back surface 60B that faces the reflecting surface 60R, and is orthogonal to the back surface 60B. The bottom surface 60D has a first protrusion 60-1 and a second protrusion 60-2 on the bottom 60D.

  In the optical stage 62, as shown in FIGS. 11 (B) and 12 (B), the first recess 62-1 and the second recess which are respectively fitted to the first protrusion 60-1 and the second protrusion 60-2. Two recesses 62-2 are provided, and the first and second projections 60-1 and 60-2 are provided with the first and second recesses 62-1 and 62-2, respectively. Are attached to the optical stage 62 by being fitted to each other.

  Here, the first recess 62-1 is formed as a substantially conical recess having a central symmetry axis perpendicular to the reflecting mirror support surface 62U of the optical stage 62, and the second recess 62-2 is the first recess 62-2. The recess 62-1 is formed as a substantially arc-shaped recess centered on the central symmetry axis. Then, the second protrusion 60-2 is rotatable about the first protrusion 60-1, and the reflection mirror with the straight line connecting the first protrusion 60-1 and the second protrusion 60-2 as the rotation axis The base body 60 is configured to be capable of partial rotational movement.

  With respect to the optical stage 62, the partial rotational movement of the reflecting mirror base 60 and the second projecting portion 60-2 around the first projecting portion 60-1 causes the feeding tool of the second feeding mechanism portion 64-2. This is realized by advancing or retreating the action point 66 in which the head portion of the second mirror is in contact with the reflecting mirror base 60 by the feeding tool of the second feeding mechanism unit 64-2.

  Further, the partial rotational movement of the reflecting mirror base 60 with the straight line connecting the first protrusion 60-1 and the second protrusion 60-2 as the rotation axis with respect to the optical stage 62 is caused by the first feeding mechanism section 64. This is realized by advancing or retreating the fitting hole 60-3 in which the leading portion of the feeding tool is fitted by the feeding tool of the first feeding mechanism section 64-1. .

  Here, in FIG. 10, FIG. 11 (B) and FIG. 12 (B), only the male screw that is the feeding tool of the first feeding mechanism portion 64-1 is shown in a simplified manner with respect to the first feeding mechanism portion 64-1. Yes. Similarly, for the second feeding mechanism portion 64-2, only the male screw that is the feeding tool is shown in a simplified manner. Similar to the first reflecting mirror device of the embodiment of the present invention described above, the first feeding mechanism unit 64-1 and the second feeding mechanism unit 64-2 can be configured using screws. It can also be configured as a combination of a piston and a cylinder.

  10, FIG. 11 (A) and (B), FIG. 12 (A) and (B) are not shown, the second reflection mirror device of the embodiment of the present invention is also of the present invention Similar to the first reflecting mirror device of the embodiment, the reflecting mirror base 60 and the optical stage 62 are movably supported in mutual positional relationship by an elastic force mechanism using the elastic force of a spring. With this configuration, the state in which the first feeding mechanism portion 64-1, the second feeding mechanism portion 64-2, and the reflection mirror base 60 are kept in contact at the point of action 66 is maintained.

  As a mechanism for maintaining the state where the first feeding mechanism part 64-1 and the second feeding mechanism part 64-2 and the reflection mirror base 60 are kept in contact at the action point 66, as in the first reflection mirror device, Regardless of the elastic force mechanism, the optical stage 62 and the reflecting mirror base 60 can also be realized by a magnetic force mechanism that maintains the mutual positional relationship with a magnetic force.

  As described above, the reflecting mirror base 60 that is a component of the second reflecting mirror device according to the embodiment of the present invention includes the reflecting surface 60R, the back surface 60B facing the reflecting surface 60R, and the bottom surface orthogonal to the back surface 60B. The bottom surface 60D includes a first protrusion 60-1 and a second protrusion 60-2 that are supported from the optical stage 62 at two spaced points. The reflection mirror base 60 configured in this way is used only when a failure such as breakage occurs in the reflection mirror base of the same shape mounted on the second reflection mirror device of the embodiment of the present invention. Can be a part.

  In addition, the reflecting mirror base body, which is a component of the first and second reflecting mirror devices according to the embodiment of the present invention, has one end at the optical stage in order to maintain mutual positional relationship with the optical stage by elastic force. And a spring fixing hole for fixing the other end of the spring fixed to. The reflection mirror base configured as described above is dedicated when a failure such as breakage occurs in the reflection mirror base of the same shape mounted on the first and second reflection mirror devices of the embodiment of the present invention. It can be a replacement part.

  In addition, the reflecting mirror base, which is a component of the first and second reflecting mirror devices of the embodiment of the present invention, is fixed to the optical stage in order to maintain the mutual positional relationship with the optical stage using magnetic force. The other magnet corresponding to the one magnet is fixed to the reflecting mirror base. The reflection mirror base configured as described above is dedicated when a failure such as breakage occurs in the reflection mirror base of the same shape mounted on the first and second reflection mirror devices of the embodiment of the present invention. It can be a replacement part.

10, 60: Reflective mirror base
10R, 60R: Reflective surface
10B, 60B: Back side facing the reflective surface
12, 62: Optical stage
14-1: First support point
14-2: Second support point
16-1, 18-1, 32: Male thread
16-2, 18-2, 34: Female thread
16-3, 18-3: Screw fixing tool
20: First feed mechanism
22: Second feed mechanism
26, 28, 66: Action point
30: fulcrum
36-1, 36-2: Fixing screw
38-1, 38-2, 40-1, 40-2: Pin
42-1, 42-2: Spring
60-1: First protrusion
60-2: Second protrusion
60-3: Mating hole
60D: Bottom
62-1: First recess
62-2: Second recess
62U: Reflective mirror support surface
64-1: First feed mechanism
64-2: Second feeding mechanism
112: Optical stage
116-1, 118-1: Male thread
116-2, 118-2: Female thread
120: First feed mechanism
122: Second feed mechanism
130: Pin
150: Optical mount
152: Fixing screw
154: Window part
156: Screw hole
158-1, 158-2: Holes for mounting springs
160-1, 160-2: Holes for inserting pins

Claims (8)

A reflection mirror device in which the reflection mirror substrate is fixed to an optical stage that is a structure holding a reflection mirror substrate, which is a substrate having a reflection surface, in a state where the position and posture of the reflection mirror substrate can be adjusted. And
In the reflection mirror base, action points are set at two spaced locations on the back surface facing the reflection surface of the reflection mirror base.
In the optical stage, a feeding mechanism part configured so that the feeding tool moves forward or backward on a straight line is formed at two positions apart from each other, and the leading part of the feeding tool is the action of the reflecting mirror base. Each point is in contact with
The position and posture of the reflecting mirror base with respect to the optical stage by moving the feeding tool forward to push out the working point of the reflecting mirror, or by retracting the feeding tool to pull back the working point of the reflecting mirror base. Is configured in a form that can be adjusted ,
The optical stage and the reflecting mirror base are provided with an elastic force mechanism that holds the positional relationship between each other with an elastic force, and the elastic force mechanism causes the leading portion of the feeding tool to be in contact with the action point. It is supposed to be maintained,
The elastic force mechanism is a spring mechanism in which one end is fixed to one point of the optical stage and the other end is fixed to one point of the reflecting mirror base,
The reflecting mirror base includes a spring fixing hole for fixing the other end of the spring fixed to the optical stage in order to maintain the positional relationship with the optical stage with elasticity. A reflection mirror device characterized by the above. A reflection mirror device in which the reflection mirror substrate is fixed to an optical stage that is a structure holding a reflection mirror substrate, which is a substrate having a reflection surface, in a state where the position and posture of the reflection mirror substrate can be adjusted. And
In the reflection mirror base, action points are set at two spaced locations on the back surface facing the reflection surface of the reflection mirror base.
In the optical stage, a feeding mechanism part configured so that the feeding tool moves forward or backward on a straight line is formed at two positions apart from each other, and the leading part of the feeding tool is the action of the reflecting mirror base. Each point is in contact with
The position and posture of the reflecting mirror base with respect to the optical stage by moving the feeding tool forward to push out the working point of the reflecting mirror, or by retracting the feeding tool to pull back the working point of the reflecting mirror base. Is configured in a form that can be adjusted ,
The magnetic stage is provided with a magnetic force mechanism that maintains a mutual positional relationship between the optical stage and the reflecting mirror base with a magnetic force, and the state in which the leading portion of the feeding tool is in contact with the action point is maintained by the magnetic force mechanism. It is made up of
The magnetic mechanism is a set of magnets fixed to the optical stage and the reflecting mirror base, respectively.
The reflection mirror base is fixed with the other magnet with respect to the one magnet fixed to the optical stage in order to maintain a mutual positional relationship with the optical stage with a magnetic force. A reflection mirror device. The feeding mechanism portion is composed of a female screw formed on the optical stage and a male screw that is screwed into the female screw and is capable of being fed out from the female screw, and the feeding tool is the male screw. The reflection mirror device according to claim 1 or 2 . The feeding mechanism unit is a control mechanism that transmits a force to the piston using a working fluid including a cylinder fixed to the optical stage and a piston fitted so as to be able to be fed from the cylinder, and the feeding tool. 3. The reflecting mirror device according to claim 1, wherein is a piston. The reflective mirror base has a back surface facing the reflective surface, and a bottom surface orthogonal to the back surface,
A first protrusion and a second protrusion are provided on the bottom surface,
The optical stage is provided with a first recess and a second recess,
The first recess is a substantially conical recess having a central symmetry axis, and the second recess is a substantially arc-shaped recess centered on the central symmetry axis of the first recess,
The first protrusion and the second protrusion are fitted and installed in the first recess and the second recess, respectively;
The second protrusion is rotatable about the first protrusion, and the reflection mirror base is rotatable about a straight line connecting the first protrusion and the second protrusion. reflection mirror apparatus according to any one of claims 1 to 4, characterized in that. A reflection mirror substrate used in the reflection mirror device according to claim 1 ,
A reflection mirror base having a spring fixing hole for fixing the other end of the spring fixed to the optical stage in order to maintain the positional relationship between the optical stage and the elastic stage. . A reflection mirror substrate used in the reflection mirror device according to claim 2 ,
A reflection mirror substrate, wherein the other magnet with respect to one magnet fixed to the optical stage is fixed in order to maintain a mutual positional relationship with the optical stage with a magnetic force. A reflection mirror base used in the reflection mirror device according to claim 5 ,
A first projecting portion and a second projecting portion having a reflecting surface, a back surface facing the reflecting surface, and a bottom surface orthogonal to the back surface, the bottom surface being supported from the optical stage at two points apart from each other; A reflecting mirror substrate characterized in that is provided.

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