JP4578190B2 - Burn-in equipment - Google Patents

Description

  The present invention relates to a test object that is a test object that is installed in a test chamber in which a burn-in board on which the test object is mounted is installed in a plurality of stages in a test chamber in which an air supply duct and an exhaust duct are arranged on both sides. The present invention relates to a burn-in device that enables a burn-in of a test sample to be tested by supplying a gas for burn-in from an air supply duct to a heat exchange part of the sample to be tested and discharging the gas from an exhaust duct.

  In the production process of a semiconductor device (hereinafter simply referred to as “device”), a burn-in test in which electrical stress is applied is performed in order to remove a device having a latent defect that causes an initial failure. The device in the test state (hereinafter referred to as “DUT (Device Under Test)”) self-heats during the test, but in the conventional device, the heat generation amount is several tens of milliwatts to several watts and is sufficiently small. In addition, since the DUT is mounted on a number of sockets arranged on a burn-in board (hereinafter referred to as “BIB”) formed of a printed circuit board, the BIB is regarded as a planar heating element in which small capacity heating elements are uniformly distributed. I was able to. Therefore, conventionally, BIB is accommodated in the burn-in device in multiple stages and in multiple rows (see, for example, Patent Document 1), and the flow rate is such that the temperature difference between the windward and leeward winds is within 125 ° C ± 3 ° C, for example. The burn-in test was carried out by blowing air in a flow parallel to the surface of the BIB.

  However, recently, due to an increase in operating current accompanying an increase in CPU speed and capacity, a self-heating amount of a device constituting the CPU has become several watts to several hundred watts. When the self-heating of the DUT increases in this way, the amount of generated heat cannot be sufficiently dissipated only from the surface of the DUT itself, and the junction temperature (junction temperature) in the DUT exceeds a predetermined burn-in temperature. Often, heat radiation fins are provided in the DUT socket. As a result, the BIB is in a state where a large-capacity heating element is locally dispersed and arranged, and cannot be regarded as a planar heating element like a conventional DUT.

  When such a BIB is accommodated in a conventional burn-in device that blows air in parallel with the BIB and burn-in is performed, an increase in the wind temperature due to the heat generated by the DUT significantly affects the downstream DUT, and the windward side Radiating fins become obstacles and the wind against the leeward radiating fins is deteriorated, resulting in insufficient heat radiation, resulting in a large temperature difference between the leeward side DUT and the leeward side DUT. In addition, since a large number of heat dissipating fins are arranged in parallel at a narrow interval to increase the heat exchange area, the air flow resistance of the fin gap where the wind should pass is large, and the wind is directed to the outside of the fin without resistance. It started to flow away from the fins. For this reason, the heat removal amount of the radiating fin is reduced, and the heat generation amount allowed for the DUT is up to about 10 watts.

  That is, in the conventional burn-in device, even if the size of the blower is increased and the air volume is increased, the flow of air avoids the radiating fins that should be cooled. I could not. Also, when a temperature difference occurs in the DUT, the burn-in time is determined in accordance with the lowest temperature and the electrically low stress state, so there is a large temperature difference between the leeward DUT and the leeward DUT as described above. When this occurs, the burn-in time becomes excessive and wasted in the high-temperature DUT, and eventually the productivity of the DUT is reduced due to the reduced efficiency of the burn-in test.

  In addition, as a semiconductor cooling device that cools the low heat generating elements and the high heat generating elements mounted on the mounting printed circuit board, the conventional device that cools the elements only by the air flow parallel to the printed circuit board is improved and paralleled by a fan. There is known an apparatus provided with a common air cooling means for supplying an air flow and a concentrated cooling means for injecting high-pressure air from a jet outlet to a high heating element with a small high-pressure fan in addition to this (see Patent Document 2). .

However, in such a cooling device, there is a difference in the cooling effect between the upstream side and the downstream side of the parallel air flow, and in the burn-in device, a difference occurs in the DUT burn-in time as described above, and the test efficiency is reduced. The problem is not resolved.
Japanese Patent Laid-Open No. 8-211122 (the overall arrangement of the burn-in apparatus in FIG. 3, the arrangement of the IC socket 2 in which the device in FIG. 4 is mounted, etc., and the related description) Japanese Patent Laid-Open No. 1-28886 (related explanations of FIGS. 1 and 2 and the specification)

  An object of the present invention is to solve the above-described problems in the prior art and to provide a burn-in apparatus capable of efficiently testing a large number of high-heat-generating devices by burning in a similar burn-in time.

In order to solve the above-mentioned problems, the present invention provides a burn-in board with a test object mounted in a plurality of stages in a test chamber in which an air supply duct and an exhaust duct are arranged on both sides. The gas to be burned in is supplied from the air supply duct to the heat exchange part of the test sample that is the test sample put in the test chamber, and is discharged from the exhaust duct. In the burn-in device that enabled the burn-in of
In the burn-in board, a plurality of the test specimens are mounted in a plurality of rows with a row interval so that the direction of the exhaust duct from the air supply duct is a row direction, and the test chamber includes: A first space in which the burn-in board on which the test specimen is mounted is stored; and all the test specimens that are mounted on the burn-in board in a plurality of rows at intervals of the rows; A partition member provided so as to face the row interval is formed by the first space portion and the second space portion partitioned , and the partition member is accommodated in the first space portion. has a planar surface facing the entire surface of the burn-in board, said on the facing surface of the partition member in a position opposed to the line spacing and a position facing the test試被test of the row direction Each has an air supply and exhaust port And the second space portion includes the air supply port and the exhaust port, respectively, so as to form an air supply side intermediate duct and an exhaust side intermediate duct from the air supply duct toward the exhaust duct. The air supply duct is electrically connected to the air supply side intermediate duct and is isolated from the first space part, and the exhaust duct is electrically connected to the exhaust side intermediate duct and is isolated from the first space part. The gas for burn-in from the air supply duct is sent from the air supply port at a position facing the DUT through the air supply side intermediate duct of the second space. The exhaust duct supplies the gas for burn-in from the first space portion through the exhaust-side intermediate duct of the second space portion from the exhaust port at a position facing the row interval. To discharge into That.

  According to a second aspect of the present invention, in addition to the above, the air supply side intermediate duct gradually narrows from the air supply duct toward the exhaust duct, and the exhaust side intermediate duct extends from the air supply duct toward the exhaust duct. It is formed so that it may become gradually wide.

According to a third aspect of the present invention, in addition to the first or second aspect of the invention, the air supply port is a slit-like opening extending in the row direction and facing the plurality of test specimens, The exhaust port is an opening that extends in the row direction and faces the row interval, and the width of the opening in the column direction perpendicular to the row direction of the air supply port is the width of the opening in the column direction of the exhaust port. It is narrower than that.

  As described above, according to the present invention, in the first aspect of the present invention, a plurality of test pieces such as a DUT which is a semiconductor device to be burned-in tested so that the direction from the air supply duct to the exhaust duct is the row direction. Since the test objects are installed in multiple lines with a line interval, gas such as temperature-controlled circulating air or outside air, which is a gas for burn-in, is used as a heat exchange part of the test object on its upper surface or on this. When supplied to a radiation fin or the like that contacts and expands the heat exchange area, the supplied gas can be moved to the row interval portion.

The test chamber is opposed to the first space including the test specimen and all the test specimens mounted in a plurality of rows with a row interval on the burn-in board and the row interval. The partition member is formed by the second space portion partitioned from the first space portion, and the partition member faces the entire surface of the burn-in board stored in the first space portion. It has a flat opposing surface, and an air supply port and an exhaust port are opened on the opposing surface of the partition member at a position facing the DUT in the row direction and a position facing the row interval, respectively. Therefore, it becomes possible to supply gas from the second space part to the heat exchange part of the test specimen in the row direction at the opposite position in the first space part through the air supply port, After the gas supplied to the exchange part hits that part, When moved to the line spacing portion between the rows of the DUT, it is possible to discharge from the second space via the outlet at the position facing the gas line spacing.

  The second space portion is partitioned by an intermediate partition member so as to form an air supply side intermediate duct and an exhaust side intermediate duct from the air supply duct side to the exhaust duct side including the air supply port and the exhaust port, respectively. And the air supply duct is connected to the air supply side intermediate duct and is cut off from the first space part, and the exhaust duct is connected to the exhaust side intermediate duct and is cut off from the first space part. Therefore, no gas is supplied to the test specimen from the row direction, so that the gas once supplied from the row direction and once hitting the heat exchange part of the test specimen again hits another heat exchange part and heats them. There is no difference in temperature between test specimens, and there is no difference in the heat exchange part of the test specimens that are placed facing each air supply port. Only from the opposite direction of the opposite air supply port For gas not subject to thermal influence or the like is supplied, each of the heat exchange portion, so that the direct and independently homogeneously maximum amount of isothermal gas is supplied.

  Further, the gas thus supplied and moved to the row interval is directly introduced into and discharged from only the exhaust port facing the row interval without hitting other test specimens. As a result, an independent air supply / exhaust system is formed without mutual interference between the test specimens, the heat exchange action on the test specimens is uniformized, and the test specimens have a high calorific value. However, it is possible to improve the efficiency of the burn-in test by setting the burn-in times of all the test specimens to be tested to the same level.

  In the invention of claim 2, in addition to the invention of claim 1, the air supply side intermediate duct is formed so as to be gradually narrowed from the air supply duct side to the exhaust duct side. The introduced gas is sequentially introduced from the side to the air supply port, so that the gas flows at a constant flow rate in the direction of the air supply port, so that the flow resistance is minimized and a good flow state with less turbulence is formed. Is done. As a result, even if the portion on the opposite exhaust duct side is narrow, the required amount of the same amount of gas can be introduced into the air supply port as in the portion on the air supply duct side. That is, when the duct cannot be widened, it becomes difficult to flow gas uniformly to the back of a long duct of the same width, but by widening this side and narrowing the back, Even with ducts of the same volume, gas can be uniformly introduced into the entire air supply port provided in the row direction so as to face the test sample.

  Further, since the exhaust side intermediate duct is formed so as to gradually widen from the air supply duct side to the exhaust duct side by the same partition member, the flow rate of the gas passing through the exhaust port is increased in the exhaust side intermediate duct. When increasing sequentially from the direction of the air supply duct to the direction of the exhaust duct, the gas flows in the exhaust side intermediate duct at a uniform flow velocity, minimizing the flow resistance and achieving a good flow state with less turbulence. Are introduced into the exhaust duct.

  As a result, the second space of the same size can be partitioned so as to be optimal for the gas flow, and the gas can be supplied more uniformly to all the test specimens in a good flow state.

In the invention of claim 3, since the width in the column direction of the air supply port extending in the row direction is narrower than the width in the column direction of the exhaust port extending in the row direction, the gas from the air supply port has a certain speed. Thus, it is possible to reduce the passage resistance of the gas exhausted from the exhaust port.

1 to 3 show an example of the overall configuration of a burn-in apparatus to which the present invention is applied, a planar state of a lower space portion of a test chamber, device arrangement on a burn-in board, and a planar state of an upper space portion.
The burn-in apparatus of this example has a plurality of stages in a test chamber 5 in which an air supply duct 3 and an exhaust duct 4 are arranged on both sides of a BIB 2 which is a burn-in board on which a device 1 which is a semiconductor device as a device under test is mounted. As shown in FIG. 1, the apparatus is mounted in seven stages in the vertical Z direction, and is used as a burn-in gas from the air supply duct 3 to the heat exchange portion 6 of the DUT 1 as the device 1 placed in the test chamber 5. Is supplied to the exhaust duct 4 and discharged from the exhaust duct 4 to enable burn-in of the DUT 1. Note that the BIB 2 is actually mounted in multiple stages of more than a dozen. A gas such as an inert gas may be used instead of air.

  The burn-in device is a normal structural part, in this example, a blower 7 driven by a motor 71 installed on the ceiling of the device, a heater 8, an intake / exhaust damper 9, and a heat insulating wall 10 surrounding the inside of the tank in a heat insulating state. , A thermally insulated door 11, a connector 12 into which an edge 2a for electrical connection at the tip of the BIB 2 is inserted; , Etc. The BIB 2 is configured as a printed circuit board that enables power supply to the DUT 1 and transmission / reception of signals for burn-in, and includes a socket 21 for electrical connection with the DUT 1.

  The device 1 such as a high power CPU is formed in a square of 40 mm × 40 mm, for example, and the upper surface 1a is made of a metal having a high thermal conductivity such as copper or aluminum so as to constitute the heat exchange portion 6. Has been. Although not shown on the bottom surface 1b, pins arranged in a matrix at intervals of about 1 mm, a pad with a diameter of about 0.6 mm attached with the copper foil of the printed board remaining, and 0.3 mm An electrode composed of any one of a pad or the like to which a solder ball of a degree is attached is formed. By pressing the upper surface 1a, the device 1 and the BIB 2 are connected via an intermediate contact (not shown) provided in the socket 21. Are electrically connected.

  In BIB2, a plurality of DUTs 1 are arranged as row intervals in FIG. 1 and FIG. 2 so that the direction from the air supply duct 3 to the exhaust duct 4 is the horizontal X direction which is the row direction. As shown in FIG. 2 and the like, a plurality of lines are mounted at intervals d as intervals between the sockets 21 in the front and rear Y directions. The interval d is determined so as to improve the gas flow as will be described later, but is set to about 20 to 30 mm in the DUT 1 having the above dimensions.

The test chamber 5 includes a lower space 51 that is a first space including the DUT 1, and all the DUTs 1 in the lower space 51 and a partition plate 52 that is a partition member provided so as to face the row interval. The partition plate 52 is formed by a lower space 51 and an upper space 53 that is a second space portion partitioned , and the partition plate 52 has a planar facing surface that faces the entire surface of the BIB 2 housed in the lower space 51. the said opposing surface of the partition plate 52, respectively as a position opposed to the position and distance d opposite the X direction of DUT1 which is indicated by a chain line those of a portion of DUT1 below in FIG space as DUT1 ₁ to 1 ₄ An air supply port 54 and an exhaust port 55 are opened at positions immediately above the DUT 1 and the interval d, respectively. Although the figure shows a long slit-shaped opening continuously air supply port 54, it is also possible to those separated into respective DUT1 ₁ to 1 every _4.

The width b ₁ in the column direction orthogonal to the Y direction , that is, the row direction (X direction) of the air supply port 54 is heated when the air that has passed through it hits the upper surface 1a that is the heat exchange part of the opposing DUT 1. It is narrowed so that it can be surely hit with a certain speed to improve the exchange. The blower 7 is set to a discharge pressure that allows air to pass through the narrow width b ₁ at a high flow rate. On the other hand, the width b _{2 in the} column direction of the exhaust ports 55 is made as wide as possible in order to reduce the passage resistance of the exhaust side air, and is made wider than the width b ₁ of the air supply ports 54 as shown in FIG.

  The upper space 53 includes an air supply port 54, forms an air supply side intermediate duct 56 in the X direction, and includes an exhaust port 55 to form an exhaust side intermediate duct 57 in the same direction. It is partitioned by 58. The air supply port 54 and the exhaust port 55 are disposed at the center position in the Y direction in the intermediate duct. The air supply side intermediate duct 56 and the exhaust side intermediate duct 57 may be parallel ducts parallel to the X direction as shown in FIG. 3B, but particularly when the number of DUTs 1 in the X direction is large. For example, as shown in FIG. 5A, it is desirable that the air supply side intermediate duct 56 is formed so that the width gradually decreases in the X direction and the exhaust side intermediate duct 57 is gradually increased in width.

  Corresponding to the upper and lower spaces 53 and 51 formed in this way, the air supply duct 3 and the exhaust duct 4 are electrically connected to the air supply side intermediate duct 56 and the exhaust side intermediate duct 57, respectively, and are cut off from the lower space 51. . An opening plate 59 such as a perforated plate or a metal mesh is provided at a conduction portion between the air supply / exhaust duct and the air supply / exhaust intermediate duct to prevent entry of foreign matter and rectification.

  For a large DUT 1 provided with a large number of pins for electrical connection, as shown in FIG. 2B, a latch 22 rotatably attached to a socket 21 and a pressing plate 23 hooked on the latch 22 are provided. , Etc., and a pressure contact mechanism for pressing the DUT 1 against a contact pin (not shown) of the socket 21 is provided. Note that the latches 22 are provided on both sides in the X direction, but in the drawing, the schematic shape is shown by two-dot chain lines on both sides in the Y direction. The pressing plate 23 is formed in a frame plate shape having an opening 23a that is slightly smaller than the outer shape of the DUT 1 and a projection 23b that is in the periphery of the opening 23a and contacts the periphery of the DUT 1. The pressing plate 23 also constitutes a part of the heat exchange part 6.

  As shown by a two-dot chain line in the drawing, a heat sink 23c having an enlarged heat dissipation area may be attached to the pressing plate 23 so as to be in pressure contact with the upper surface 1a of the DUT 1. In that case, the heat sink 23c together with the pressing plate 23 also becomes a heat exchange part. At this time, when the amount of heat generated by the DUT 1 is small, the pressing plate 23 may be made of plastic or the like of the same material as the socket 21. Further, when the heat generation amount of the DUT 1 is increased, a heat exchange element 61 as shown in FIG. 4 is provided. Instead of providing the latch 22 on both sides of the pressing plate 23, one side may be a hinge 24.

FIG. 4 shows a preferred structural example of the heat exchange part 6.
The heat exchange portion 6 of this example has a heat exchange body 61. The heat exchanger 61 includes a heat sink 62 that is a pressure contact member that is pressed against the DUT 1 mounted on the BIB 2, a deep multi-row bent shape, and the top surface 63 is the central portion of the length in the Y direction as a central portion. When the BIB 2 is mounted in the test chamber 5 when the BIB 2 is mounted in the test chamber 5, the notch 64 faces the air supply port 54 and is bent in multiple rows in the X direction. The bottom surface 65 opposite to the top surface 63 is provided with heat radiation fins 66 as heat exchange members joined to the heat sink 62.

  In this example, the heat sink 62 is a solid metal plate having a high thermal conductivity such as aluminum or copper, and a convex portion 62b having a pressure contact surface 62a pressed against the DUT 1 is formed at the lower end thereof. Yes. Instead of a solid metal plate, a heat pipe in which a heat medium liquid is enclosed may be used. Similarly to the pressing plate 23 shown in FIG. 2, the heat sink 62 is pressed against the upper surface 1 a of the DUT 1 by a pressing mechanism including the latch 22 and the like. Therefore, the heat sink 62 is a member having both functions of electrical connection and heat transfer through the socket 21 portion of the DUT 1 and the BIB 2.

  As shown in FIG. 4B, the heat radiation fin 66 is a corrugated fin formed by bending a thin plate material having a thickness of about 0.3 mm at the position of the folding line L. The material is similarly made of a metal with high thermal conductivity such as aluminum or copper. The bottom surface 65 is brazed on the entire top surface of the heat sink 62 so as to improve the heat transfer between them. The top 63 may be a curved surface such as an arc. Due to such a fin shape, a tunnel-like portion is formed between the inner side surfaces 67a on both sides inside the opening formed by the notch portion 64 of the top portion 63.

The burn-in apparatus as described above is operated as follows and exhibits its effects.
When performing the burn-in test of the DUT 1, first, the device 1 is dropped into the installation portion 21a formed in the concave shape of the socket 21 of the BIB 2, and the pressing plate 23 of FIG. 2 or the heat exchanger 61 of FIG. The heat sinks 62 are installed so that the press contact surfaces 62a of the edge portions 23b or the projections 62b are in contact with the upper surface 1a of the device 1, and are pressed down to be in a press contact state and fixed by the latch 22. As a result, the electrical connection between the device 1 and the BIB 2 is ensured, and when the pressing plate 23 has the heat sink 23c, between the upper surface 1a of the device 1 and the heat sink 23c, and the heat sink 62 In this case, good heat-passability with low thermal resistance is ensured between this and the upper surface 1a.

Next, the device 1 or the BIB 2 mounted with the heat exchanger 61 together with the device 1 is mounted so that both ends in the X direction fit into guide grooves (not shown) of the test chamber 5 and inserted into the front Y ₁ direction. The edge 2a is inserted into the connector 12. Accordingly, the device 1 is sequentially connected to the control board via the contact pin (not shown) of the socket 21, the BIB 2, the edge 2a, the connector 12, the relay board 100, the driver / test board and the relay board (not shown), and connected to the DUT 1. Become. In the burn-in apparatus shown in FIG. 1 and the like, when all of the 140 devices 1 in a row of 4 × 5 rows × 7 stages are set to DUT 1, the burn-in test can be performed.

  In this state, the blower 7 and the heater 8 are operated. At the beginning of this operation, the damper 9 is in a closed state as shown by the solid line in FIG. Further, a test apparatus (not shown) is operated to supply power to the DUT 1, and a necessary electrical signal is given to make it operational. When the DUT 1 is in an operating state, the DUT 1 self-heats according to its type and size. The calorific value of some large ones exceeds 100 W and is about 300 W.

In this operating state, the air supplied by the blower 7 circulates as shown by the arrow in FIG. 1, and the heater 8 is controlled so that the air temperature of the air supply duct 3 becomes the set temperature Ts, for example. The set temperature Ts is set to a temperature corresponding to the heat generation amount of the DUT 1 at a low temperature in the range of about 80 ° C. to 40 ° C. for the high heat generation type DUT 1. When the air at the temperature Ts is circulated, the jacktion temperature of the DUT 1 is about 120 ° C. to 150 ° C. and becomes a burn-in temperature corresponding to the DUT 1. The state at this time will be described in detail as follows.
The temperature of the circulating air at the time of burn-in is controlled to be the set temperature Ts. The air that is discharged from the blower 7 and is 125 ° C. in the air supply duct 3 is above the test chamber 5 that has seven stages. The air is divided into the space 53 and enters the air supply side intermediate ducts 56 that are further divided into five rows by the partition plate 52 and flows into the air supply port 54 while flowing in the X direction from the air supply duct 3 side. flowed, it enters the lower space 51 of the test chamber 5, is blown to each of DUT1 that opposite are arranged four from DUT1 ₁ to 1 ₄ in the X direction to the air outlet 54. At this time, since the air supply port 54 is provided at the center position in the Y direction in the duct 56 as a normal design, the air in the duct 56 is perpendicular to the paper surface in FIG. In FIG. 1, it blows out in the direction just below. Then, it directly hits the heat exchange part 6 of the DUT 1 at a position facing the air supply port 54.

  In this case, in order to test as many DUTs 1 as possible in the test chamber 5 having a certain size, the upper and lower step intervals and the interval d in the Y direction of the DUTs 1 are made as small as possible. Is made as narrow as possible. As a result, when the air flowing in from the air supply duct 3 flows in the X direction, the air flow enters the air supply port 54 and the flow rate decreases, but a certain amount of flow resistance occurs in that direction. This resistance affects the flow rate distribution in the X direction of the air passing through the air supply port 54.

On the other hand, according to the inclined duct having the shape shown in FIG. 3 (a) or an inclined duct having a slightly changed inclination, the duct width is large and the flow rate is reduced in a place where the amount of air flowing in the X direction is large. Since the duct width is gradually narrowed, the air in the duct flows at an equal flow rate, so that the flow resistance is reduced, the turbulence is reduced, the flow state is improved, and the air is supplied at a uniform flow rate in the X direction. passes through 54, so that the blown substantially air of the same flow rate for each of DUT1 ₁ to 1 _4. On the other hand, since the air supply port 54 has a sufficiently narrow width so that the air passing through the air supply port 53 becomes a high-speed flow, the inside of the air supply side intermediate duct 56 is set to a somewhat high pressure. If the flow resistance or flow state in the X direction in the air supply side intermediate duct 56 does not significantly affect the amount of air passing through the air supply port 54 when the number of airflows is relatively small, FIG. An equally spaced duct such as

  FIG. 5 shows a flow state of the air blown out from the air supply port 54 when the heat exchange portion 6 is the heat exchange body 61. In FIG. 2B, a part of the air flow when the upper surface 1a of the DUT 1 is the direct heat exchange portion 6 is indicated by an arrow.

With respect to the DUTs 1 arranged in the X direction in the lower space 51, the conduction between the air supply duct 3 and the lower space 51 is cut off, and there is no air flow component in the X direction toward the DUT 1, so that the air is as described above. DUT1 would strike directly from Z ₁ direction shown in FIG. 1, 2, 4 and 5 or the like is a direction from the opposite air supply port 54 with respect to ₁ to 1 _4. Air that hits the Z ₁ direction to the heat exchange portion of DUT1 ₁ to 1 _4, there is BIB2 down in that direction, because on both sides in the X direction is similarly Z ₁ direction of the air flow, inevitably As shown in the figure, it flows in the Y direction, which is the column direction, and flows out to the interval d in the Y direction, which is also shown in FIG. At this time, the conduction between the exhaust duct 4 and the lower space 51 including the interval d portion is interrupted, and the DUT 1 in the adjacent row arranged in the X direction exists in the Y direction, and the air is similarly separated from the interval d portion. As a result, the exhaust gas, which is the air that has exited the space d, eventually flows into the exhaust port 55 that is arranged in parallel with the air supply port 54 in the partition plate 52 and in which air can flow. Become.

  In such an air flow, as shown by the solid line in FIG. 2 (b), when air directly hits the upper surface 1a of the DUT 1, the air directly heats or cools this surface to give the DUT 1 a necessary heat exchange amount. become. That is, in the initial stage of the test in which power is supplied to the DUT 1 and the DUT 1 is in an operating state, the DUT 1 due to heat generation of the DUT 1 and the nearby members have a small amount of heat storage, and the upper surface 1a is still at a low temperature. If the air heats the upper surface 1a and then the heat generation of the DUT 1 continues and the temperature of the upper surface 1a exceeds Ts, the circulating air now cools the DUT 1.

  Then, the temperature of the exhaust gas, which has been lowered or increased after the heating or cooling action, is adjusted by the heater 8 and a temperature adjusting device (not shown), and is again supplied to the DUT 1 as air of the set temperature Ts. It circulates to. When the heat generation amount of the DUT 1 increases and the air temperature cannot be maintained at Ts even when the output of the heater 8 is 0 or the minimum value, the damper 9 is opened by the temperature adjusting device, and the temperature is lowered in the high-temperature circulating air. Outside air is added, the damper opening is adjusted by the above-mentioned device, and similarly, the temperature-controlled air is supplied to Ts. When the air at the set temperature Ts exchanges heat with the upper surface 1a, the DUT 1 maintains the internal junction temperature at the burn-in temperature. When such an operating state is maintained for several tens of hours, the burn-in test is performed. Will end.

  If the amount of heat exchange is insufficient simply by directly cooling the upper surface 1a due to the amount of heat generated by the DUT 1, etc., and the junction temperature cannot be maintained at the above temperature, the heat sink 23c indicated by a two-dot chain line in FIG. The heat exchanger 61 shown in detail in FIG. 4 and FIGS. 4 and 5 is provided to increase the heat exchange area and increase the cooling capacity.

According to the heat exchanging body 61, the heat radiating fins are multi-row folded corrugated fins, the heat exchange area formed mainly by the inner and outer side surface portions 67a, 67b is sufficiently large, and the top 63 is cut off. Since there is an opening formed by the notch portion 64, the space between the inner side surfaces 67 a on both sides of the corrugation is closed by the top portion 63 to form a tunnel shape, and from the notch portion 64 of the air blown in the Z ₁ direction. The inflowing air is reversed as it is, and does not escape upward in the figure, and heat exchange with the inner side surface 67a and the top portion 63 is ensured and heat exchange performance is extremely improved. ing. On the other hand, for example, in a normal multi-row heat radiation plate having no top portion 63 and having a heat radiating surface on the inner and outer sides, the effect of the tunnel-shaped portion and the effect of adding a heat radiating surface due to the top portion cannot be obtained. As a result, according to the heat exchanger 61 of the present example to which the present invention is applied, even if it is the largest class DUT 1 of about 300 W, the large amount of heat generation is cooled and removed as much as necessary, and the DUT 1 is set to the target temperature. You can burn in.

To further supplement these points, the air flow reaches the back of the narrow gap of the radiating fin 66 by narrowing the width b _{1 of the} air supply port to obtain a high-speed flow as described above, thereby effectively increasing the heat radiation area. It can be utilized, high-speed air current becomes turbulent and collides with the radiation fins 66, so that a high heat transfer rate can be obtained. Because of these effects, the radiation fins 66 have a high heat radiation capability. In contrast, the allowable heat generation of the device can be increased, and the high cooling effect of the radiating fin reduces the difference between the junction temperature and the air supply temperature, and even a device with a large self-heating value burns in with a small temperature difference. What can be done, and due to such effects, a highly heat-generating device that exceeds 100 W and reaches 300 W can be evenly distributed with a slight temperature difference as described above. Can be burn, it is possible to obtain a significant effect of the equal to.

  On the other hand, when a large number of DUTs 1 are cooled with air that is adjusted to a temperature of 125 ° C. as a whole, if the amount of air supplied to each DUT 1 and the air temperature are not uniform, the cooling capacity is not good. Since the burn-in temperature between the DUTs 1 becomes uniform and the burn-in end time is set to the DUT 1 having a low burn-in temperature, the burn-in time is unnecessarily prolonged and the efficiency of the burn-in test is lowered. To do.

On the other hand, in the burn-in apparatus shown in FIG. 1 or the like to which the present invention is applied, air is supplied to the DUT 1 only from the air supply port 54 as described above. hit the DUT1 ₁ shown in its upstream example 3 by supplying temperature elevated air prevents such strike the DUT1 _2, only air from air supply port 54 to each of DUT1 ₁ to 1 ₄ are directly Since it hits in the state of the air temperature, the air of the same temperature hits with respect to all DUT1, and dispersion | variation does not arise in cooling capacity between DUT1 regarding temperature.

  In this case, when the heat exchanging member 61 shown in FIG. 5 is provided as the heat exchanging portion 6, the radiation fins 66 are corrugated on both sides in the X direction, and the inner and outer surfaces 67a and 67b face in the Y direction. The air that has entered the tunnel-shaped part and the part between them is reliably guided in the Y direction and does not flow in the X direction, and flows in the interval d part, and there is interference of air flow between the DUTs 1 arranged in the X direction. Since it is reliably prevented, the uniformity of the air temperature hitting all the DUTs 1 is more reliably maintained.

  In addition, regarding the amount of air supplied to each DUT 1, in the inclined partition plate type duct of FIG. 2 (a), air flows in the X direction at an equal flow rate as described above, and the resistance is low and the flow state is good. The variation in the X direction of the air amount flowing into the air supply port 54 can be sufficiently reduced to obtain a uniform flow rate. In the parallel partition plate type duct shown in FIG. 5B, the number of DUTs 1 arranged in the X direction is set to an appropriate number so that the flow resistance in the X direction is not affected. Air can flow uniformly in the direction. As a result, the amount of air hitting the heat exchange portion between the DUTs 1 can also be made uniform.

  From the above, it is possible to uniformly cool all the DUTs 1 to be tested, eliminate the variation in the burn-in temperature between the DUTs 1, complete the burn-in of all the DUTs 1 in the same time, and improve the efficiency of the burn-in test. . In addition, the productivity of devices in factories and the like can be increased, the number of burn-in devices installed can be reduced, and the equipment cost and the occupied space in the factory can be reduced.

  Note that even with the same type of device, the calorific value varies among individual devices, but such variation has been clarified in advance by other tests during the device manufacturing process. The effect of equalizing the air temperature and the flow rate between the DUTs 1 by selecting and testing a device having the same calorific value for each apparatus or when one burn-in apparatus is used for each burn-in test Below, an extremely efficient burn-in test with a substantially constant burn-in time can be performed.

Air from the Y direction on both sides arranged in the X direction DUT1 ₁ to 1 ₄ on the spacing d moiety, the exhaust-side intermediate duct 57 through an exhaust port 55 that is adjacent to the air supply port 54 as described above It flows in, passes through here, enters the exhaust duct 4, is sucked into the blower 7 through the heater 8, is sent again to the air supply duct 3, and circulates in the apparatus. When the damper 9 is partially or fully opened to adjust the temperature of the circulating air as described above, a part of the circulating air corresponding to the amount of outside air flowing into the damper portion as shown by a two-dot chain line in FIG. And discharged out of the device.

In such an exhaust flow, if the air supply side intermediate duct 56 is inclined by the partition plate 52 as shown in FIG. 3A, the exhaust side intermediate duct 57 is opposite to the duct 56 in the X direction by the intermediate partition plate 58. And the inlet side is narrow and the outlet side is wide. On the other hand, in the DUT _{1 1} portion on the inlet side, only the air hitting this passes through the duct 57 and only that air flows, and the amount of air exhausted from the DUT 1 ₂ to the portion corresponding to the DUT 1 ₄ sequentially increases. Therefore, similarly to the air supply side, on the exhaust side, the duct width is increased corresponding to the flow rate of the exhaust in the duct 57, an equal flow is formed in the duct, the resistance is reduced, and the flow state is also reduced. Get better. As a result, the overall air flow from the air supply duct 3 to the exhaust duct 4 becomes good, and the effect of equalizing the air flow rate for all the DUTs 1 is ensured.

  In the burn-in apparatus as described above, since the blower 7 and the heater 8 are arranged on the upper part, the blower motor 71 and the power supply equipment are arranged on the ceiling of the apparatus, or the drive unit of the BIB 2 insertion / extraction mechanism (not shown) is provided. Can be placed on the ceiling. As a result, when a driver board (not shown) and its power supply unit are arranged on the back side of the apparatus via the relay board 100, the driver board and the like cover them as in the case where the power supply equipment and drive unit are arranged on the back side. Therefore, the maintenance inspection becomes easy.

  The present invention is particularly advantageously used for burn-in of a semiconductor device of high heat generation type.

The longitudinal cross-sectional state is shown with explanatory drawing of an example of the whole structure of the burn-in apparatus to which this invention is applied. (A) is explanatory drawing of an example of the arrangement | positioning state of DUT in the lower space of the said apparatus, and shows the AA sectional view state of FIG. 1, (b) is explanatory drawing which shows an example of the longitudinal cross-sectional state of a DUT part. . (A), (b) is explanatory drawing of an example of the intermediate | middle duct part of the upper space of the said apparatus, and shows the BB sectional condition of FIG. The structural example of a heat exchanger is shown, (a) thru | or (d) is a front view including a perspective view, a plane development view of a radiation fin, a top view, and a partial cross section, respectively. The YZ cross-sectional state is shown in the explanatory view of the air flow state in the upper and lower spaces.

Explanation of symbols

1 Device, DUT (DUT, DUT)
1a Top surface (heat exchange part)
2 BIB (burn-in board)
3 Air supply duct 4 Exhaust duct 5 Test room 6 Heat exchange part 23 Press plate (heat exchange part)
23c Heat sink (heat exchange part)
51 Lower space (first space)
52 Partition plate (partition member)
53 Upper space (second space)
54 Air supply port 55 Air exhaust port 56 Air supply side intermediate duct 57 Exhaust side intermediate duct 58 Intermediate partition plate (intermediate partition member)
61 Heat exchanger (heat exchange part)
62 Heat sink (pressure contact member, heat exchange part)
63 Top surface 64 Notch 65 Bottom surface 66 Radiation fin (heat exchange member)
d spacing, socket spacing (line spacing)
X Horizontal direction (from air supply duct to exhaust duct direction, row direction)

Claims (3)

A test-in-test, which is the test object placed in the test chamber, with the burn-in board with the test object mounted in a plurality of stages in a test chamber in which an air supply duct and an exhaust duct are arranged on both sides In a burn-in apparatus that supplies a gas for burn-in from the air supply duct to the heat exchange part of the object and discharges it from the exhaust duct, and enables burn-in of the test specimen.
In the burn-in board, a plurality of the test specimens are mounted in a plurality of rows with a row interval so that the direction of the exhaust duct from the air supply duct is a row direction, and the test chamber includes: A first space in which the burn-in board on which the test specimen is mounted is stored; and all the test specimens that are mounted on the burn-in board in a plurality of rows at intervals of the rows; A partition member provided so as to face the row interval is formed by the first space portion and the second space portion partitioned , and the partition member is accommodated in the first space portion. has a planar surface facing the entire surface of the burn-in board, said on the facing surface of the partition member in a position opposed to the line spacing and a position facing the test試被test of the row direction Each has an air supply and exhaust port And the second space portion includes the air supply port and the exhaust port, respectively, so as to form an air supply side intermediate duct and an exhaust side intermediate duct from the air supply duct toward the exhaust duct. The air supply duct is electrically connected to the air supply side intermediate duct and is isolated from the first space part, and the exhaust duct is electrically connected to the exhaust side intermediate duct and is isolated from the first space part. The gas for burn-in from the air supply duct is sent from the air supply port at a position facing the DUT through the air supply side intermediate duct of the second space. The exhaust duct supplies the gas for burn-in from the first space portion through the exhaust-side intermediate duct of the second space portion from the exhaust port at a position facing the row interval. To discharge into That the burn-in system.   The air supply side intermediate duct is formed to gradually narrow from the air supply duct in the direction of the exhaust duct, and the exhaust side intermediate duct is formed to gradually increase from the air supply duct to the direction of the exhaust duct. The burn-in device according to claim 1.   The air supply port is a slit-shaped opening that extends in the row direction and faces the plurality of test specimens, and the exhaust port is an opening that extends in the row direction and faces the row interval. 3. The burn-in according to claim 1, wherein the width of the opening in the column direction perpendicular to the row direction of the air supply port is narrower than the width of the opening in the column direction of the exhaust port. apparatus.

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