JP4570752B2

JP4570752B2 - Power supply

Info

Publication number: JP4570752B2
Application number: JP2000264125A
Authority: JP
Inventors: 勝彦古矢; 均森
Original assignee: Nichicon Capacitor Ltd
Current assignee: Nichicon Capacitor Ltd
Priority date: 2000-08-31
Filing date: 2000-08-31
Publication date: 2010-10-27
Anticipated expiration: 2020-08-31
Also published as: JP2002078359A

Description

【０００１】
【発明の属する技術分野】
本発明は、主に繰り返しコンデンサ放電を行うためのコンデンサ充電に用いられる電源装置に関するものであり、特に放電励起レーザ装置に適した電源技術に関するものである。
【０００２】
【従来の技術】
コンデンサとリアクトルの直列共振を利用した共振充電において、コンデンサ電圧が設定値に達したところでリアクトルの両端に接続された環流用スイッチング素子を点弧することにより直列共振回路のＱ値を瞬間的に低下させ、具体的にはリアクトルに流れている電流を循環させることで、それ以後の充電を停止して所定のコンデンサ充電電圧を得る、ｄｅ−Ｑ（デキュー）と呼ばれる充電制御方法が知られている。
図１４に示す従来回路例においては、第１のサイリスタ１０１を点弧して共振充電を開始し、出力側コンデンサ電圧が設定値に達したところで第２のサイリスタ１０２を点弧して、リアクトルの電流を第２のサイリスタの回路で環流させて充電を停止するｄｅ−Ｑ動作を行っていた。
図１５は従来回路の電流・電圧波形図で、この時の充電電流瞬時値ｉおよび該第２のサイリスタ１０２の電流ｉｑ２およびコンデンサ電圧瞬時値ｖの波形を示す。
【０００３】
コンデンサを繰り返し充放電する応用例において、特に充電電圧目標値が繰り返される毎に変化する場合は、通常直流電源の電圧を急速には変化させられないので、環流用スイッチング素子を点弧して、それ以後の充電を停止するタイミングを変化させる必要がある。特に充電電圧目標値が低下した時には、リアクトルに流れる電流値が比較的大きい時点で環流用スイッチング素子を点弧する必要があり、リアクトルに残されていたエネルギーが損失となって発熱が増えるという問題があった。
さらに、この時コンデンサの回路に流れている比較的大きな充電電流を環流用スイッチング素子の回路に転流させるまでの時間が長くなり、この間にコンデンサの電圧が余分に上昇して充電電圧制御の誤差が増大するという問題もあった。
【０００４】
また、繰り返し放電を行うパルス電源装置においては、充放電用のコンデンサの電圧値は充電開始時にゼロとなっていない例が多い。例えば負荷回路に誘導性リアクタンスや変圧器を含む場合には、充電電圧と逆極性の電圧が残り、放電灯のような抵抗成分が支配的な非線型負荷の場合は充電電圧と同極性の電圧が残る場合が多かった。
【０００５】
共振充電においては、図１２の共振充電波形図の充電電流およびコンデンサ電圧の時間変化グラフに示すように、コンデンサの電圧波形は直流電源電圧値Ｖｉを中心値とし、これとコンデンサの充電開始前の電圧値Ｖｏｐと直流電源電圧値Ｖｉとの差すなわち（Ｖｉ−Ｖｏｐ）を初期振幅とする減衰振動となるので、直流電源電圧値Ｖｉ、コンデンサの充電開始前の電圧値Ｖｏｐおよびコンデンサ充電電圧目標値Ｖｏｅには次の関係が成立しているのが望ましい。
【０００６】
【数１】

【０００７】
〔数１〕において、Ｖｃｏｍｐは共振回路の損失分の補填、および／または転流動作を行うための電圧補正項である。
【０００８】
〔数１〕の右辺の値がＶｉを超えると、共振充電でコンデンサの電圧をＶｏｅまで充電することができなくなるため、直流電源電圧値Ｖｉの値はＶｏｅ／２よりもある程度高めにしておく必要がある。従来の共振充電型の電源装置においては、コンデンサ充電電圧目標値Ｖｏｅが低い場合や、コンデンサの充電開始前の電圧値Ｖｏｐが負の値となった場合は、〔数１〕の右辺の値よりも直流電源電圧値Ｖｉが高くなり、コンデンサの充電電圧が高くなる方向となり、充電電流値が下がらないうちに充電停止するので、その時点でリアクトルに残っているエネルギーが消費されるために損失が増えたり、充電電流が転流する時間を要し、この間の充電電流によって充電電圧制御の精度が悪くなるという問題があった。
【０００９】
本発明に関連しては、下記の先行技術が公知であるが、上記の問題点を有しているか、あるいはその解決手段として複雑な回路構成および／または制御方法を必要としていた。
特願平８−５２４９６０「エネルギーを取り戻すパルス電力生成回路」
US PAT. No.5,729,562 PULSE POWER GENERATING CIRUCUIT WITH ENERGY RECOVERY
US PAT. No.6,028,872 HIGH PULSE RATE PULSE POWER SYSTEM WITH RESONANT POWER SUPPLY
【００１０】
【発明が解決しようとする課題】
本発明は、上記課題を解決するためになされたもので、コンデンサの充電電圧目標値が繰り返される毎に変化する場合にも損失が少なく、かつ充電電圧の誤差が小さいコンデンサ充電用電源装置を実現するものである。
【００１１】
【課題を解決するための手段】
すなわち、正極側入力端子２ａと正極側出力端子２ｃとの間に第一の自己消弧型スイッチング素子２１を接続し、負極側入力端子２ｂと正極側出力端子２ｃとの間に第一の整流素子２２を接続し、正極側入力端子２ａと負極側出力端子２ｄとの間に第二の整流素子２３を接続し、負極側入力端子２ｂと負極側出力端子２ｄとの間に第二の自己消弧型スイッチング素子２４を接続してなるチョッパブリッジ２と、該チョッパブリッジ２の入力端子２ａ、２ｂ間に接続した直流電源１と、該チョッパブリッジ２の出力端子２ｃ、２ｄ間に直列接続したリアクトル３と充電用整流素子５とコンデンサ６と、チョッパブリッジ２を駆動するチョッパブリッジ駆動回路部１３と、チョッパブリッジ駆動回路部１３を制御することで、第一および第二の自己消弧型スイッチング素子２１，２４を所定の時間導通させた後に消弧し、第一および第二の整流素子２２，２３に転流させて三角波状の電流波形でコンデンサ６を第一段充電として充電するチョッパ動作と、第一および第二の自己消弧型スイッチング素子２１，２４を再度導通させて、直流電源１とリアクトル３とコンデンサ６とからなる共振回路により正弦半波状の電流波形で所定の電圧まで該コンデンサ６を第二段充電として充電する共振充電動作とを順次行わせる演算回路部１２とを備えることを特徴とする電源装置である。
【００１２】
また、正極側入力端子２ａと正極側出力端子２ｃとの間に第一の自己消弧型スイッチング素子２１を接続し、負極側入力端子２ｂと正極側出力端子２ｃとの間に第一の整流素子２２を接続し、正極側入力端子２ａと負極側出力端子２ｄとの間に第二の整流素子２３を接続し、負極側入力端子２ｂと負極側出力端子２ｄとの間に第二の自己消弧型スイッチング素子２４を接続してなるチョッパブリッジ２と、該チョッパブリッジ２の入力端子間に接続した直流電源１と、該チョッパブリッジ２の出力端子間に直列接続した変圧器８と充電用整流素子５とコンデンサ６と、チョッパブリッジ２を駆動するチョッパブリッジ駆動回路部１３と、チョッパブリッジ駆動回路部１３を制御することで、第一および第二の自己消弧型スイッチング素子２１，２４を所定の時間導通させた後に消弧し、第一および第二の整流素子２２，２３に転流させて三角波状の電流波形でコンデンサ６を第一段充電として充電するチョッパ動作と、第一および第二の自己消弧型スイッチング素子２１，２４を再度導通させて、直流電源１と変圧器８の漏れインダクタンスとコンデンサ６とからなる共振回路により正弦半波状の電流波形で所定の電圧まで該コンデンサ６を第二段充電として充電する共振充電動作とを順次行わせる演算回路部１３とを備えることを特徴とする電源装置である。
【００１３】
また、正極側入力端子２ａと正極側出力端子２ｃとの間に第一の自己消弧型スイッチング素子２１を接続し、負極側入力端子２ｂと正極側出力端子２ｃとの間に第一の整流素子２２を接続し、正極側入力端子２ａと負極側出力端子２ｄとの間に第二の整流素子２３を接続し、負極側入力端子２ｂと負極側出力端子２ｄとの間に第二の自己消弧型スイッチング素子２４を接続してなるチョッパブリッジ２と、該チョッパブリッジ２の入力端子間に接続した直流電源１と、該チョッパブリッジ２の出力端子間に直列接続したリアクトル３と変圧器８と充電用整流素子５とコンデンサ６と、チョッパブリッジ２を駆動するチョッパブリッジ駆動回路部１３と、チョッパブリッジ駆動回路部１３を制御することで、第一および第二の自己消弧型スイッチング素子２１，２４を所定の時間導通させた後に消弧し、第一および第二の整流素子２２，２３に転流させて三角波状の電流波形でコンデンサ６を第一段充電として充電するチョッパ動作と、第一および第二の自己消弧型スイッチング素子２１，２４を再度導通させて、直流電源１とリアクトル３と変圧器８の漏れインダクタンスとコンデンサ６とからなる共振回路により正弦半波状の電流波形で所定の電圧まで該コンデンサ６を第二段充電として充電する共振充電動作とを順次行わせる演算回路部１３とを備えることを特徴とする電源装置である。
【００１４】
そして、上記充電用整流素子５とコンデンサ６とを含む直列回路に転流用スイッチング素子４を並列接続したことを特徴とする電源装置である。
【００１５】
また、演算回路部１２は、共振充電動作の後にさらに、コンデンサ６の電圧が所定の値に達した時点で転流用スイッチング素子４を導通させ、該コンデンサ６に流れる充電電流を急速に該転流用スイッチング素子４に転流させて充電を停止する充電電流転流動作を行わせることを特徴とする電源装置である。
【００１６】
さらに、直流電源１に接続した直流電源電圧測定用分圧器１４と、コンデンサ６に接続したコンデンサ電圧測定用分圧器１５と、直流電源電圧値をＶｉ、コンデンサの充電開始前の電圧値をＶｏｐおよびコンデンサの充電電圧目標値をＶｏｅとしたときに、演算回路部１２は、前記チョッパ動作の際に｛Ｖｉ−（Ｖｏｅ−Ｖｏｐ）／２｝なる値を演算し、該演算値をコンデンサ６の充電電圧値が超えた時点で、第一および第二の自己消弧型スイッチング素子２１，２４の消弧を行わせることを特徴とする電源装置である。
【００１７】
そして、上記充電用整流素子５が充電用スイッチング素子５ａに置き換えられたことを特徴とする電源装置である。
【００１８】
また、上記コンデンサ６と負荷７との間に負荷用スイッチング素子９、負荷用整流素子および磁気スイッチのうち少なくとも１つを接続したことを特徴とする電源装置である。
【００１９】
さらに、上記負荷７が放電励起レーザ１１であることを特徴とする上記の電源装置である。
【００２０】
【発明の実施の形態】
本発明の電源装置においては、上記のチョッパブリッジ２を設け、必要なエネルギーが直流電源１から供給された段階で、第一のスイッチング素子２１および第二の自己消弧型スイッチング素子２４を消弧することで、リアクトル３および／または変圧器８の漏れインダクタンスに蓄えられているエネルギーのうち、コンデンサ６の充電に寄与しない分はその大部分が、第一の整流素子２２および第二の整流素子２３を通じて上記直流電源に回生される。
【００２１】
また、充電を三角波状の電流波形でコンデンサ６を第一段充電するチョッパ動作とそれに続いて正弦半波状の電流波形でコンデンサ６を第二段充電する共振充電動作とを順次行う充電方法を取ることで、充電目標電圧が毎回変わったり、充電開始前のコンデンサ電圧値が変動するような場合でも、第二段充電の開始時点のコンデンサ電圧を最適化し、損失が少なくかつ充電電圧精度の良好な充電動作を行うことができる。
【００２２】
さらに、充電用整流素子５とコンデンサ６の直列回路に対して並列に転流用スイッチング素子４を含む回路を設け、充電の終期にコンデンサ６の電圧が目標値に達した時点で転流用スイッチング素子４を点弧して、充電電流を転流させることで０．１％以内の高精度に充電電圧を制御する。このような高精度の充電は、特に負荷回路に磁気スイッチ１０を用いる場合、その動作タイミングを例えば１０ｎｓ以下の低ジッタ時間に抑えることを可能とする。また、本発明を放電励起レーザ１１の電源装置として用いた場合、出力エネルギーを精密に制御することができる。
【００２３】
【実施例】
図１は、本発明の電源装置の一実施例の回路図であり、図１により本発明の実施を詳述する。直流電源１にチョッパブリッジ２の入力端子２ａ，２ｂを接続し、該チョッパブリッジ２の出力端子２ｃ，２ｄ間にリアクトル３と充電用整流素子５とコンデンサ６との直列回路を接続する。該コンデンサ６に並列に負荷用スイッチング素子９と負荷７との直列回路を接続する。上記直流電源１の両端に直流電源電圧測定用分圧器１４の入力端子を接続し、上記コンデンサ６の両端にコンデンサ電圧測定用分圧器１５の入力端子を接続する。上記直流電源電圧測定用分圧器１４の出力端子および上記コンデンサ電圧測定用分圧器１５の出力端子は各々演算回路部１２の入力端子に接続される。また、上記チョッパブリッジ２の出力回路に設けられた変流器１６の出力端子も上記演算回路部１２の他の入力端子に接続される。さらに該演算回路部１２には充電指令信号ＣＨＧおよびコンデンサ充電電圧目標値Ｖｏｅの信号が入力される。上記演算回路部１２のチョッパブリッジ操作指令信号の出力端子はチョッパブリッジ駆動回路部１３の入力端子に接続される。該チョッパブリッジ駆動回路部１３の２組の出力端子には、上記チョッパブリッジ２の第一の自己消弧型スイッチング素子２１および第二の自己消弧型スイッチング素子２４のゲート端子が各々接続される。
【００２４】
本発明の電源装置において、チョッパブリッジ２を設けることで、充電停止時にリアクトル３に残っているエネルギーを直流電源１に回生することができる。
すなわち、図１に示す回路図において、演算回路部１２が充電指令信号ＣＨＧを受けると、チョッパブリッジ駆動回路１３を介して第一の自己消弧形スイッチング素子２１および第二の自己消弧形スイッチング素子２４を導通させ、直流電源１、上記第一の自己消弧形スイッチング素子２１、リアクトル３、充電用整流素子５、コンデンサ６、上記第二の自己消弧形スイッチング素子２４から上記直流電源１へ戻る回路に通電し、主に上記リアクトル３と上記コンデンサ６の共振による正弦波状の電流を流す。直流電源電圧値Ｖｉは直流電源電圧測定手段１４により、また、コンデンサ電圧瞬時値ｖはコンデンサ電圧測定用分圧器１５により測定されて上記演算回路部１２へ入力される。また、上記リアクトル３の電流は変流器１６により測定されて上記演算回路部１２へ入力される。上記コンデンサ６の電圧が後述する〔数２〕で示される値に達したことを上記演算回路部１２で判定し、この時点で、上記第一の自己消弧形スイッチング素子２１および上記第二の自己消弧形スイッチング素子２４を消弧させることにより、電流は上記第一の整流素子２２および上記第二の整流素子２３を通じて上記直流電源１に逆方向に流れ、上記リアクトル３に残っていたエネルギーの一部は上記直流電源１に回生され、一部は上記コンデンサ６に蓄えられ、理想的にはエネルギー損失は生じない。
【００２５】
上記チョッパブリッジ２の自己消弧形スイッチング素子２１および２４を消弧させる時点は以下の演算により決定する。すなわち、直流電源電圧値Ｖｉ、コンデンサ電圧瞬時値ｖ、コンデンサ充電電圧目標値Ｖｏｅ、コンデンサ静電容量値Ｃ、充電電流瞬時値ｉおよびインダクタンス値Ｌに対し、次の関係が成立した時点とする。
【００２６】
【数２】

【００２７】
この時点ではｖ＝Ｖｉを中心とした電圧振動の電気エネルギーが、来るべき電流ゼロ点において上記コンデンサ６の電圧をコンデンサ充電電圧目標値Ｖｏｅにするのに必要な値となる。〔数２〕においてＶｃｏｍｐは共振回路の損失分の補填および／または転流動作を行うための電圧補正項である。この演算は上記演算回路部１２の高速高精度アナログ演算回路において実行される。デジタル演算による方法も可能であり、この場合にはＡ／Ｄ変換器の変換速度の限界による遅延時間を補正する手段が必要となる。
【００２８】
図１３は、本実施例における充電電流とコンデンサ電圧の時間変化を示す図である。図１３においてＶｏｐはコンデンサ充電開始前の電圧値、Ｖｏｅはコンデンサ充電電圧目標値、Ｖｉは直流電源電圧値である。自己消弧形スイッチング素子２１、２４を時刻ｔ＝ｔｏにおいて点弧し、時刻ｔ＝ｔｓにおいて消弧させている。
【００２９】
充電完了後、適当なタイミングで負荷用スイッチング素子９をオンし、コンデンサ６、上記負荷用スイッチング素子９および負荷７からなる回路で放電して負荷７にパルス電力を与える。
【００３０】
ここでは自己消弧形スイッチング素子としてＩＧＢＴを用いた例を示したが、ＧＴＯ、ＧＣＴ、ＦＥＴのような他の固体スイッチング素子を用いても同様の効果がある。また、上記直流電源１には本発明で必然となるパルス充放電に耐えるような平滑コンデンサをその出力端に並列接続することが望ましい。
【００３１】
図２は、本発明の電源装置の他の実施例の部分回路図であり、変圧器８を図１のチョッパブリッジ２の出力端子２ｃ、２ｄに接続したものである。
【００３２】
特にコンデンサ６の電圧を高くする要求がある場合に、入力側と出力側の電圧の整合を取るために変圧器８が必要となる。装置の小型化を目的として、共振充電用のリアクトル３を上記変圧器８の漏れインダクタンスで代用することも可能である。この場合には、前述または後述する演算の際、巻数比に従って電圧値を換算する必要がある。
【００３３】
本発明の電源装置の他の実施例について、図３の回路図、図１７の演算回路部構成図、および図６の充電電流およびコンデンサ電圧の時間変化グラフにより詳述する。本実施例の図３の回路図の電源装置は、図１に示す回路図において、チョッパブリッジ２の出力回路に設けられた変流器１６を省いた構成としている。
【００３４】
本実施例においては図６に示すように、２段階に分けた充電制御を行う。その目的は、チョッパブリッジ２の自己消弧型スイッチング素子の電力損失が消弧時の電流値に大きく依存し、大電流領域での消弧がより大きな電力損失を生じるので、第一段の回生チョッパ動作時に低い電流値での消弧を行い、第二段では共振充電により基本的には消弧を行わないことで損失を低減させて装置の効率をさらに良くすることである。
【００３５】
図１７において、信号名Ｖｏｅはコンデンサ充電電圧目標値、Ｖｉは直流電源電圧値、ｖはコンデンサ電圧瞬時値、ＣＨＧは充電指令信号、Ｖｏｐはコンデンサの充電開始前の電圧値、ＧＡＴＥ−Ｃ．は充電ゲート信号であり、ブロック記号ＤＩＦ．は差動増幅器、ＡＲＩ．は演算器、Ｓ．Ｈ．はサンプルホールド回路、ＴＩＭ１およびＴＩＭ２は各々第一および第二のタイマ、ＯＲは論理和回路を示す。
演算回路部１２では、充電指令信号ＣＨＧを受けると充電開始時点でのコンデンサ電圧Ｖｏｐをサンプルホールド回路Ｓ．Ｈ．で記憶保持する。第一段の回生チョッパ充電では、第一のタイマＴＩＭ１が動作して充電ゲート信号ＧＡＴＥ−Ｃ．を出力し、チョッパブリッジ駆動回路１３を介して第一の自己消弧形スイッチング素子２１および第二の自己消弧形スイッチング素子２４を導通させる。コンデンサ６が第二段充電の共振充電を開始するのに適した中間電圧Ｖｏｓまで充電されるように演算回路部１２中の演算器ＡＲＩ．により計算されたタイミングを第一のタイマＴＩＭ１が検出した時点で充電ゲート信号ＧＡＴＥ−Ｃ．を停止し、上記の自己消弧型スイッチング素子２１，２４を消弧させる。この時にリアクトル３または変圧器８の漏れインダクタンスに蓄えられていた電磁エネルギーの大部分は第一の整流素子２２および第二の整流素子２３を通じて直流電源１に回生される。充電電流がゼロになる時間を、演算回路部１２に組み込まれた第二のタイマＴＩＭ２で予め設定しておき、この時間が経過した時点で再び充電ゲート信号ＧＡＴＥ−Ｃ．を出力して第二段の共振充電を行う。
【００３６】
本発明の電源装置の他の実施例について、図４の回路図により詳述する。本実施例は、図１に示す実施例において、充電用整流素子５とコンデンサ６との直列回路に並列にさらに転流用スイッチング素子４を含む回路を接続したものである。
【００３７】
本実施例においては、コンデンサの充電目標電圧値Ｖｏｅよりも僅かに高い電圧に向けて充電するように演算回路部１２で補正を行い、充電の終期において上記コンデンサ６の電圧が目標値に達した時点を演算回路部１２中の比較回路より判定して、上記転流用スイッチング素子４を導通させて充電電流を上記コンデンサ６から上記転流用スイッチング素子４へと転流させることにより速やかに充電を停止して、より高精度にコンデンサ充電電圧を制御する。この時点では上記第一の自己消弧形スイッチング素子２１および第二の自己消弧形スイッチング素子２４は消弧しており、リアクトル３に残っている電磁エネルギーを下記の電流路により直流電源１へ回生する。この電流路は、上記直流電源１の負極から第一の整流素子２２、上記リアクトル３、上記転流用スイッチング素子４、第二の整流素子２３から上記直流電源１の正極へと至るものである。この実施の形態においては、上記直流電源１を電圧安定化することなしに上記コンデンサ６の充電電圧を必要かつ十分な精度に制御できるので、上記直流電源１は一般的には商用交流電源を整流したものとすることができる。
【００３８】
本発明の電源装置の他の実施例について、図５の回路図、図１９の演算回路部構成図、および図７の充電電流およびコンデンサ電圧の時間変化グラフにより詳述する。本実施例の図５の回路図の電源装置は、図３に示す回路図において、充電用整流素子５とコンデンサ６との直列回路に並列に転流用スイッチング素子４を接続した構成としている。
【００３９】
本実施例においては図７に示すように、３段階に分けた充電制御を行う。その目的は、チョッパブリッジ２の自己消弧型スイッチング素子の電力損失が消弧時の電流値に大きく依存し、大電流領域での消弧がより大きな電力損失を生じるので、第一段の回生チョッパ動作時に低い電流値での消弧を行い、第二段での共振充電により消弧を行う時点での電流値を低くして損失を低減させ、さらに充電転流動作によりリアクトル３または変圧器８に残存しているエネルギーを直流電源１へ回生して装置の効率を良くすると同時にコンデンサ６の充電電圧を０．１％程度以下の高精度に制御することである。
図１９において、信号名Ｖｏｅはコンデンサ充電電圧目標値、Ｖｉは直流電源電圧値、ｖはコンデンサ電圧瞬時値、ＣＨＧは充電指令信号、Ｖｏｐはコンデンサの充電開始前の電圧値、ＧＡＴＥ−Ｃ．は充電ゲート信号、ＧＡＴＥ−Ｄ．は転流ゲート信号であり、ブロック記号ＤＩＦ．は差動増幅器、ＡＲＩ．は演算器、Ｓ．Ｈ．はサンプルホールド回路、ＴＩＭ１およびＴＩＭ２は各々第一および第二のタイマ、ＬＯＧ．は論理回路、ＣＭＰ２は第二の比較器を示す。
演算回路部１２では、充電指令信号ＣＨＧを受けると充電開始時点でのコンデンサ電圧Ｖｏｐをサンプルホールド回路Ｓ．Ｈ．で記憶保持する。第一段の回生チョッパ充電では、第一のタイマＴＩＭ１が動作して充電ゲート信号ＧＡＴＥ−Ｃ．を出力し、チョッパブリッジ駆動回路１３を介して第一の自己消弧形スイッチング素子２１および第二の自己消弧形スイッチング素子２４を導通させる。コンデンサ６が第二段充電の共振充電を開始するのに適した中間電圧Ｖｏｓまで充電されるように演算回路部１２中の演算器ＡＲＩ．により計算されたタイミングを第一のタイマＴＩＭ１が検出した時点で充電ゲート信号ＧＡＴＥ−Ｃ．を停止し、上記の自己消弧型スイッチング素子２１，２４を消弧させる。この時にリアクトル３または変圧器８の漏れインダクタンスに蓄えられていた電磁エネルギーの大部分は第一の整流素子２２および第二の整流素子２３を通じて直流電源１に回生される。充電電流がゼロになる時間を、演算回路部１２に組み込まれた第二のタイマＴＩＭ２で予め設定しておき、この時間が経過した時点で再び充電ゲート信号ＧＡＴＥ−Ｃ．を出力して第二段の共振充電を行う。共振充電の終期にコンデンサ電圧瞬時値ｖがコンデンサ充電電圧目標値Ｖｏｅに達した時点で第二の比較器ＣＭＰ２がこれを検出して充電ゲート信号ＧＡＴＥ−Ｃ．を停止すると同時に転流ゲート信号ＧＡＴＥ−Ｄ．を出力して転流用スイッチング素子４を点弧する。この時にリアクトル３または変圧器８の漏れインダクタンスに残っていた電磁エネルギーの大部分は、転流用スイッチング素子４、第一の整流素子２２および第二の整流素子２３を通じて直流電源１に回生される。
【００４０】
本発明の電源装置の他の実施例について、図５の回路図、図１７および１９の演算回路部構成図および図６の充電電流およびコンデンサ電圧の時間変化グラフにより詳述する。本実施例は上記実施例の充電方法において上記第一の自己消弧形スイッチング素子２１および第二の自己消弧形スイッチング素子２４を消弧させるタイミングを決定する判定条件の演算式に特徴がある。
上記実施例の充電方法において、リアクトル３とコンデンサ６からなる共振回路の損失がない理想的な場合は、コンデンサ６の第二段の共振充電開始前の中間電圧Ｖｏｓは〔数３〕で計算される値となっているのが良い。
【００４１】
【数３】

【００４２】
また、第一段の回生チョッパ充電においては、第一の自己消弧型スイッチング素子２１および第二の自己消弧形スイッチング素子２４を消弧に転じる時点をピークとした二等辺三角波状の電流が流れるので、この時点を決める判定電圧Ｖｓ１をコンデンサの充電開始前の電圧Ｖｏｐと第二段の共振充電開始前の中間電圧Ｖｏｓの平均値であるとすると、次式が得られる。
【００４３】
【数４】

【００４４】
ここで、〔数４〕に〔数３〕を代入し、Ｖｏｓを消去すると、次式が得られる。
【００４５】
【数５】

【００４６】
従って、第一の自己消弧型スイッチング素子２１および第二の自己消弧形スイッチング素子２４を消弧に転じる判定電圧Ｖｓ１は近似計算として〔数５〕の演算により得られる。実際には共振回路の損失や、第一段チョッパ充電における二等辺三角波状電流波形の傾きの変化があるので、〔数５〕の少なくとも一つの項に補正を与えて判定を行う方法が有効である。すなわち、アナログ演算増幅器を用いたオフセット調整付きの加減算器の各抵抗値を調整して、充電電圧の変動を極小化する方法が採られる。デジタル演算による場合は、補正係数を乗算または／および加算することで等価な効果が得られる。
図１６および図１８において、信号名Ｖｏｅはコンデンサ充電電圧目標値、Ｖｉは直流電源電圧値、ｖはコンデンサ電圧瞬時値、ＣＨＧは充電指令信号、Ｖｏｐはコンデンサの充電開始前の電圧値、Ｖｓ１は判定電圧、ＧＡＴＥ−Ｃ．は充電ゲート信号、ＧＡＴＥ−Ｄ．は転流ゲート信号であり、ブロック記号ＤＩＦ．は差動増幅器、ＡＤＤ．は加減算器、Ｓ．Ｈ．はサンプルホールド回路、ＣＭＰ１およびＣＭＰ２は各々第一および第二の比較器、ＴＩＭ２は第二のタイマ、ＯＲは論理和回路、ＬＯＧは論理回路を示す。
上述の〔数５〕の演算を加減算器ＡＤＤで行ない、第一の比較器ＣＭＰ１により第一段チョッパ充電の第一の自己消弧形スイッチング素子２１および第二の自己消弧形スイッチング素子２４を消弧させるタイミングを決定すること以外は、図１７および図１９の説明と同一の構成、機能および動作となる。
【００４７】
本発明の電源装置の他の実施例について、図８の回路図により以下に述べる。
本実施例は図２に示す実施例において充電用整流素子５を充電用スイッチング素子５ａに置き換えたものである。
【００４８】
繰り返し充放電を行う時、負荷回路に誘導性リアクタンスや変圧器を含む場合には、負荷への放電後にコンデンサ６に充電電圧とは逆極性の電圧が残る場合が多い。この逆電圧が残ると、充電用整流素子５は導通方向となり、第一の自己消弧型スイッチング素子２１および第二の自己消弧形スイッチング素子２４に順方向電圧が立ち上がる方向に印加されてｄｖ／ｄｔによる誤点弧等の問題が生じる場合がある。また、図２の回路図の場合には、変圧器８の二次巻線を通して振動電流が流れてしまい、次の充電制御の妨げとなる。これらの現象を防止して安定に繰り返し充放電動作する目的で、上記充電用整流素子５の代わりに能動的スイッチングが可能な充電用スイッチング素子５ａを用いるものである。該充電用スイッチング素子５ａは、第一の自己消弧型スイッチング素子２１および第二の自己消弧形スイッチング素子２４をオンする時点で同時に点弧すれば良いので、同じタイミング信号で制御することができる。
【００４９】
本発明の電源装置の他の実施例について、図９の回路図により以下に述べる。
本実施例は図１に示す実施例の主回路において、コンデンサ６に並列に接続される負荷７の回路の負荷用スイッチング素子９をＩＧＢＴとしたものである。
【００５０】
繰り返し充放電を行う場合において、負荷が放電灯のような自己放電負荷ではない場合や、急峻な電圧立ち上がりを要求される場合に、負荷との間に負荷用スイッチング素子９が必要となる。装置のメンテナンス周期を長くするためには、該負荷用スイッチング素子９をサイラトロンのような放電管ではなく固体スイッチング素子とする方法が有利であり、ここではＩＧＢＴを用いた例を示した。当然サイリスタ、ＧＴＯ、ＧＣＴ、ＳＩサイリスタ、ＦＥＴのような他の固体スイッチング素子も用いることができる。
【００５１】
これらのスイッチング素子の特性上、逆方向に電圧が加わるのを阻止する必要がある場合は整流素子を追加する。負荷が放電灯のような自己放電負荷の場合でも、電流方向を一方向に特定することにより電極材料を陽極と陰極それぞれに最適に選択できる利点があるので、負荷用整流器を置くことが有利となる場合がある。また、放電後にコンデンサ６に残るエネルギーを多くし、このエネルギーを直流電源１へ回生して再度利用するために、負荷回路の電流方向を一方向に限定する負荷用整流素子を直列に挿入することが有利となる場合も多い。
【００５２】
本発明の電源装置の他の実施例について、図１０の回路図により詳述する。本実施例は図５に示す実施例の主回路において、コンデンサ６と負荷７との間に磁気スイッチ１０を設けたものである。
【００５３】
最終的な負荷が放電励起レーザの場合など、急峻な電圧立ち上がりを有する出力電圧波形を要求される場合があるが、磁性体の磁気飽和現象を利用して電圧パルスの立ち上がり時間および持続時間を短縮する磁気スイッチ１０を用いた磁気パルス圧縮と呼ばれる技術がある。コンデンサ６、上記磁気スイッチ１０、負荷７からなる回路は上記磁気スイッチ１０の飽和後のインダクタンスにより、負荷７が放電終了後非導通状態へと回復した時点で、上記コンデンサ６に残留電圧が残っている場合が多く、その値も条件によって変動するので、前述の電源装置および充電方法により、次回の充電電圧を安定化する方法が有効である。
【００５４】
本発明の電源装置の他の実施例について、図１１の回路図により詳述する。本実施例は図８に示す実施例の主回路において、リアクトル３を変圧器８の漏れインダクタンスで代用し、負荷７を昇圧変圧器１７、高圧コンデンサ１８、磁気スイッチ１０、ピーキングコンデンサ１９、および放電励起レーザ１１で構成し、負荷用スイッチング素子９としてサイリスタを採用したものである。
【００５５】
最終的な負荷が放電励起レーザ１１の場合には、１０ｋＶ以上の高電圧が要求されるので、通常、整合のために昇圧変圧器１７を設ける。図１１の回路では、コンデンサ６充電完了後、負荷用スイッチング素子９を点弧して昇圧変圧器１７を介して上記コンデンサ６から高圧コンデンサ１８へのエネルギー転送を行う。
磁気スイッチ１０の飽和後、さらにピーキングコンデンサ１９へと通常０．１μｓ程度の短時間でエネルギー転送が行われ、放電励起レーザ１１が放電を開始してレーザ媒質を励起する。放電励起レーザ１１は、初期の励起後アーク放電状態となってインピーダンスが急激に低下し、消費されなかったエネルギーで上記ピーキングコンデンサ１９の電荷が反転する。この後、上記磁気スイッチ１０が逆方向に飽和して上記高圧コンデンサ１８を反転方向に充電して、さらに上記昇圧変圧器１７を介して上記コンデンサ６を反転方向に充電してエネルギーが戻る。
この時点で上記負荷用スイッチング素子９が消弧し、充電用スイッチング素子５ａは先の充電完了時点で消弧しているので上記コンデンサ６は反転方向に充電された状態を次回の充電開始まで保持する。
【００５６】
【発明の効果】
本発明により、コンデンサの充電電圧目標値が繰り返される毎に変化する場合にも損失が少なく、かつ充電電圧の誤差が小さいコンデンサ充電用電源装置を簡単な回路構成で実現し、高性能かつ信頼性の高いパルス電源が提供できる。また、充電開始時にコンデンサ電圧が正負どちらの極性で残留している場合でも、このエネルギーを無駄にすることなく効率の良い共振充電が可能な電源装置を実現することができる。
【００５７】
さらに、充電回路中に変圧器８を挿入し、直流電源と負荷回路の整合を取ると同時に変圧器の漏れインダクタンスを充電用のリアクトルとして利用することにより、適用範囲の拡大および装置の小型化を同時に実現することが可能となる。
【００５８】
また、第一段のチョッパ充電と第二段の共振充電に分割した充電方法により、チョッパブリッジの自己消弧型スイッチング素子の動作負担を軽減し、１回の共振充電の場合よりも１ランク低い電流定格の素子で同じエネルギーの充電動作が可能になり、電源装置を小型化・低コスト化することができる。
【００５９】
そして、充電用整流素子５とコンデンサ６との直列回路に並列にさらに転流用スイッチング素子４を含む回路を接続することにより、充電電圧を０．１％以内の高精度に制御することができる。
【００６０】
また、コンデンサ６と負荷７との間に負荷用スイッチング素子９を設けることにより、コンデンサ６の充電動作を負荷７と独立に行い、正確なタイミングで負荷７にパルス電力を供給することが可能となる。
【００６１】
さらに、コンデンサ６と負荷７との間に磁気スイッチ１０を設けることで、より急峻な電圧の立ち上がりが可能となり、簡単な構成で高効率化、長寿命化、および信頼性向上を図ることができ、充電電圧の安定度向上により磁気スイッチ１０が飽和してオン状態になるまでの動作時間ジッタの小さいパルス電源を実現することができる。
【００６２】
さらに、放電励起レーザ１１との組み合わせにより、簡単な構成で高効率化、長寿命化、および信頼性向上を図ることができ、出力エネルギーを精度良く制御できる放電励起レーザ装置を実現することができる。
【図面の簡単な説明】
【図１】本発明の電源装置の一実施例の回路図である。
【図２】本発明の電源装置の他の実施例の部分回路図である。
【図３】本発明の電源装置の他の実施例の回路図である。
【図４】本発明の電源装置の他の実施例の回路図である。
【図５】本発明の電源装置の他の実施例の回路図である。
【図６】本発明の電源装置の一実施例における充電電流とコンデンサ電圧の経時変化を示す図である。
【図７】本発明の電源装置の他の実施例における各部電流とコンデンサ電圧の経時変化を示す図である。
【図８】本発明の電源装置の他の実施例の部分回路図である。
【図９】本発明の電源装置の他の実施例の部分回路図である。
【図１０】本発明の電源装置の他の実施例の部分回路図である。
【図１１】本発明の電源装置の他の実施例の部分回路図である。
【図１２】従来例の電源装置における充電電流とコンデンサ電圧の経時変化を示す図である。
【図１３】本発明の電源装置の他の実施例における充電電流とコンデンサ電圧の経時変化を示す図である。
【図１４】従来例の電源装置の部分回路図である。
【図１５】従来例の電源装置における各部電流とコンデンサ電圧の経時変化を示す図である。
【図１６】本発明の電源装置の一実施例における演算回路部構成図である。
【図１７】本発明の電源装置の他の実施例における演算回路部構成図である。
【図１８】本発明の電源装置の他の実施例における演算回路部構成図である。
【図１９】本発明の電源装置の他の実施例における演算回路部構成図である。
【符号の説明】
１直流電源
２チョッパブリッジ
２ａ正極側入力端子
２ｂ負極側入力端子
２ｃ正極側出力端子
２ｄ負極側出力端子
３リアクトル
４転流用スイッチング素子
５充電用整流素子
５ａ充電用スイッチング素子
６コンデンサ
７負荷
８変圧器
９負荷用スイッチング素子
１０磁気スイッチ
１１放電励起レーザ
１２演算回路部
１３チョッパブリッジ駆動回路
１４直流電源電圧測定用分圧器
１５コンデンサ電圧測定用分圧器
１６変流器
１７昇圧変圧器
１８高圧コンデンサ
１９ピーキングコンデンサ
２１第一の自己消弧型スイッチング素子
２２第一の整流素子
２３第二の整流素子
２４第二の自己消弧型スイッチング素子
１０１第一のサイリスタ
１０２第二のサイリスタ
Ｖｉ直流電源電圧値
Ｖｏｐコンデンサの充電開始前の電圧値
Ｖｏｅコンデンサ充電電圧目標値
ｖコンデンサ電圧瞬時値
ｉ充電電流瞬時値
ｔｏ点弧タイミング
ｔｓ消弧タイミング
Ｖｏｓ第二段の充電開始前の中間電圧
Ｖｓ１判定電圧
ＧＡＴＥ−Ｃ．充電ゲート信号
ＧＡＴＥ−Ｄ．転流ゲート信号
ＤＩＦ．差動増幅器
ＡＤＤ．加減算器
Ｓ．Ｈ．サンプルホールド回路
ＣＭＰ１第一の比較器
ＣＭＰ２第二の比較器
ＴＩＭ１第一のタイマ
ＴＩＭ２第二のタイマ
ＯＲ論理和回路
ＬＯＧ論理回路[0001]
BACKGROUND OF THE INVENTION
The present invention mainly relates to a power supply device used for capacitor charging for repeatedly performing capacitor discharge, and more particularly to a power supply technology suitable for a discharge excitation laser device.
[0002]
[Prior art]
In resonant charging using the series resonance of the capacitor and the reactor, when the capacitor voltage reaches the set value, the Q value of the series resonance circuit is instantaneously lowered by firing the switching elements connected to both ends of the reactor. Specifically, a charge control method called de-Q (dequeue) is known in which the current flowing in the reactor is circulated to stop the subsequent charging and obtain a predetermined capacitor charging voltage. .
In the conventional circuit example shown in FIG. 14, the first thyristor 101 is fired to start resonance charging, and when the output side capacitor voltage reaches a set value, the second thyristor 102 is fired to A de-Q operation is performed in which charging is stopped by circulating current through the circuit of the second thyristor.
FIG. 15 is a current / voltage waveform diagram of the conventional circuit, showing the waveform of the charging current instantaneous value i, the current iq2 of the second thyristor 102, and the capacitor voltage instantaneous value v at this time.
[0003]
In the application example in which the capacitor is repeatedly charged / discharged, especially when the charging voltage target value changes each time it is repeated, the voltage of the DC power supply cannot normally be changed rapidly. It is necessary to change the timing for stopping the subsequent charging. Especially when the charge voltage target value decreases, it is necessary to ignite the circulating switching element when the value of the current flowing through the reactor is relatively large, and the energy remaining in the reactor is lost and heat generation increases. was there.
Furthermore, at this time, it takes a long time to commutate a relatively large charging current flowing in the capacitor circuit to the circuit for the recirculation switching element. During this time, the voltage of the capacitor increases excessively, resulting in an error in charging voltage control. There was also a problem that increased.
[0004]
Further, in a pulse power supply device that repeatedly discharges, there are many cases where the voltage value of the capacitor for charging / discharging is not zero at the start of charging. For example, when an inductive reactance or transformer is included in the load circuit, a voltage with the opposite polarity to the charge voltage remains, and in the case of a non-linear load with a dominant resistance component such as a discharge lamp, the voltage with the same polarity as the charge voltage Often remained.
[0005]
In the resonant charging, as shown in the time-dependent graph of the charging current and the capacitor voltage in the resonant charging waveform diagram of FIG. 12, the voltage waveform of the capacitor has a DC power supply voltage value Vi as the center value, and this before the capacitor charging starts. Since the difference between the voltage value Vop and the DC power supply voltage value Vi, that is, (Vi−Vop), is the damped oscillation with the initial amplitude, the DC power supply voltage value Vi, the voltage value Vop before the start of capacitor charging, and the capacitor charging voltage target value It is desirable that the following relationship is established for Voe.
[0006]
[Expression 1]

[0007]
In [Equation 1], Vcomp is a voltage correction term for compensating for the loss of the resonance circuit and / or performing a commutation operation.
[0008]
If the value on the right side of [Equation 1] exceeds Vi, the capacitor voltage cannot be charged to Voe by resonant charging, so the DC power supply voltage value Vi needs to be somewhat higher than Voe / 2. There is. In the conventional resonance charging type power supply device, when the capacitor charging voltage target value Voe is low or when the voltage value Vop before starting charging of the capacitor becomes a negative value, the value on the right side of [Equation 1] However, since the DC power supply voltage value Vi is increased, the charging voltage of the capacitor is increased, and charging is stopped before the charging current value is decreased. Therefore, the energy remaining in the reactor at that time is consumed and the loss is lost. There is a problem that the time required for the charging current to increase or the commutation of the charging current is required, and the charging voltage control accuracy is deteriorated by the charging current during this time.
[0009]
In relation to the present invention, the following prior arts are known, but have the above-mentioned problems or require a complicated circuit configuration and / or control method as a solution.
Japanese Patent Application No. 8-524960 "Pulse power generation circuit to recover energy"
US PAT. No.5,729,562 PULSE POWER GENERATING CIRUCUIT WITH ENERGY RECOVERY
US PAT.No.6,028,872 HIGH PULSE RATE PULSE POWER SYSTEM WITH RESONANT POWER SUPPLY
[0010]
[Problems to be solved by the invention]
The present invention has been made to solve the above-described problem, and realizes a capacitor charging power supply device that has a small loss even when the charging voltage target value of the capacitor changes each time it is repeated and has a small charging voltage error. To do.
[0011]
[Means for Solving the Problems]
That is, the first self-extinguishing switching element 21 is connected between the positive input terminal 2a and the positive output terminal 2c, and the first rectification is performed between the negative input terminal 2b and the positive output terminal 2c. The element 22 is connected, the second rectifying element 23 is connected between the positive electrode side input terminal 2a and the negative electrode side output terminal 2d, and the second self rectifier is connected between the negative electrode side input terminal 2b and the negative electrode side output terminal 2d. Between the chopper bridge 2 formed by connecting the arc extinguishing type switching element 24, the DC power source 1 connected between the

input terminals

2a and 2b of the chopper bridge 2, and the

output terminals

2c and 2d of the chopper bridge 2 Connected in series Reactor 3, charging rectifier 5 and capacitor 6 After the chopper bridge driving circuit unit 13 for driving the chopper bridge 2 and the chopper bridge driving circuit unit 13 are controlled, the first and second self-extinguishing

switching elements

21 and 24 are made conductive for a predetermined time. A chopper operation in which the arc is extinguished and commutated to the first and

second rectifier elements

22 and 23 to charge the capacitor 6 as a first-stage charge with a triangular waveform, and first and second self-extinguishing types Resonance charging in which the

switching elements

21 and 24 are turned on again, and the capacitor 6 is charged as a second-stage charge to a predetermined voltage with a sinusoidal half-wave current waveform by a resonance circuit including the DC power source 1, the reactor 3, and the capacitor 6. And an arithmetic circuit unit 12 for sequentially performing operations. This is a power supply device.
[0012]
Also, Positive side input terminal 2a The first self-extinguishing switching element 21 is connected between the positive electrode side output terminal 2c and the first rectifier element 22 is connected between the negative electrode side input terminal 2b and the positive electrode side output terminal 2c. A second rectifier 23 is connected between the side input terminal 2a and the negative output terminal 2d, and a second self-extinguishing switching element 24 is connected between the negative input terminal 2b and the negative output terminal 2d. A connected chopper bridge 2, a DC power source 1 connected between the input terminals of the chopper bridge 2, a transformer 8, a charging rectifier element 5, and a capacitor 6 connected in series between the output terminals of the chopper bridge 2. By controlling the chopper bridge driving circuit unit 13 for driving the chopper bridge 2 and the chopper bridge driving circuit unit 13, the first and second self-extinguishing

switching elements

21 and 24 are made conductive for a predetermined time. After the arc extinguishing, commutating to the first and second rectifying

elements

22 and 23, charging the capacitor 6 as a first stage charge with a triangular waveform, and the first and second self-extinguishing. The arc-

type switching elements

21 and 24 are turned on again, and the capacitor 6 is driven to a predetermined voltage with a sinusoidal half-wave current waveform by a resonance circuit composed of the DC power supply 1, the leakage inductance of the transformer 8, and the capacitor 6. And an arithmetic circuit unit 13 for sequentially performing a resonance charging operation for charging as charging. This is a power supply device.
[0013]
Also, positive side input terminal 2a The first self-extinguishing switching element 21 is connected between the positive electrode side output terminal 2c and the first rectifier element 22 is connected between the negative electrode side input terminal 2b and the positive electrode side output terminal 2c. A second rectifier 23 is connected between the side input terminal 2a and the negative output terminal 2d, and a second self-extinguishing switching element 24 is connected between the negative input terminal 2b and the negative output terminal 2d. A connected chopper bridge 2, a DC power source 1 connected between the input terminals of the chopper bridge 2, a reactor 3, a transformer 8, and a charging rectifier element 5 connected in series between the output terminals of the chopper bridge 2. By controlling the capacitor 6, the chopper bridge driving circuit unit 13 for driving the chopper bridge 2, and the chopper bridge driving circuit unit 13, the first and second self-extinguishing

switching elements

21, 24 are placed in place. And the first and

second rectifier elements

22 and 23 commutated to charge the capacitor 6 as a first-stage charge with a triangular wave current waveform, The two self-extinguishing

switching elements

21 and 24 are turned on again, and the resonance circuit including the DC power source 1, the reactor 3, the leakage inductance of the transformer 8, and the capacitor 6 has a sinusoidal half-wave current waveform up to a predetermined voltage. And an arithmetic circuit unit 13 for sequentially performing a resonance charging operation for charging the capacitor 6 as second-stage charging. This is a power supply device.
[0014]
The charging rectifier 5 and the capacitor 6 including The power supply device is characterized in that a commutation switching element 4 is connected in parallel to a series circuit.
[0015]
Also, The arithmetic circuit unit 12 further turns on the commutation switching element 4 when the voltage of the capacitor 6 reaches a predetermined value after the resonant charging operation, and rapidly transfers the charging current flowing through the capacitor 6 to the commutation switching element. Charge current commutation operation to stop charging by commutating to 4 This is a power supply device.
[0016]
In addition, the DC power supply 1 Connected DC power supply voltage divider 14 When To capacitor 6

Connected

Voltage divider 15 for measuring capacitor voltage When DC power supply voltage value The Vi, voltage value before starting capacitor charging The Vop and capacitor of Charge voltage target value The Voe And when , The arithmetic circuit unit 12 {Vi- (Voe-Vop) / 2} during the chopper operation Play value The calculated value is a capacitor 6 When the charging voltage value exceeds First and second self-extinguishing

switching elements

21, 24 extinguish the arc Ruko The power supply device characterized by the above.
[0017]
The charging rectifier element 5 is replaced with a charging switching element 5a.
[0018]
Also, a load switching element 9 and a load rectifying element are provided between the capacitor 6 and the load 7. and Magnetic switch Chi The power supply device is characterized in that at least one of them is connected.
[0019]
Further, in the above power supply apparatus, the load 7 is a discharge excitation laser 11.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
In the power supply device of the present invention, the chopper bridge 2 is provided, and the first switching element 21 and the second self-extinguishing switching element 24 are extinguished when necessary energy is supplied from the DC power supply 1. As a result, most of the energy stored in the leakage inductance of the reactor 3 and / or the transformer 8 does not contribute to the charging of the capacitor 6, most of which is the first rectifying element 22 and the second rectifying element. 23 to regenerate the DC power source.
[0021]
In addition, a charging method is used in which charging is performed sequentially by a chopper operation in which the capacitor 6 is charged in the first stage with a triangular waveform, and a resonance charging operation in which the capacitor 6 is charged in the second stage with a sine half-wave current waveform. Therefore, even when the target charging voltage changes every time or the capacitor voltage value before the start of charging fluctuates, the capacitor voltage at the start of the second stage charging is optimized, and the loss is low and the charging voltage accuracy is good. Charging operation can be performed.
[0022]
Further, a circuit including the commutation switching element 4 is provided in parallel to the series circuit of the charging rectifier element 5 and the capacitor 6, and when the voltage of the capacitor 6 reaches the target value at the end of charging, the commutation switching element 4 is provided. And the charging voltage is controlled with high accuracy within 0.1% by commutating the charging current. Such highly accurate charging makes it possible to suppress the operation timing to a low jitter time of, for example, 10 ns or less, particularly when the magnetic switch 10 is used in the load circuit. Further, when the present invention is used as a power supply device for the discharge excitation laser 11, the output energy can be precisely controlled.
[0023]
【Example】
FIG. 1 is a circuit diagram of an embodiment of a power supply device according to the present invention. The implementation of the present invention will be described in detail with reference to FIG.

Input terminals

2 a and 2 b of a chopper bridge 2 are connected to a DC power source 1, and a series circuit of a reactor 3, a charging rectifier element 5 and a capacitor 6 is connected between

output terminals

2 c and 2 d of the chopper bridge 2. A series circuit of a load switching element 9 and a load 7 is connected in parallel with the capacitor 6. Input terminals of a DC power supply voltage measuring voltage divider 14 are connected to both ends of the DC power supply 1, and input terminals of a capacitor voltage measuring voltage divider 15 are connected to both ends of the capacitor 6. The output terminal of the DC power supply voltage measuring voltage divider 14 and the output terminal of the capacitor voltage measuring voltage divider 15 are each connected to the input terminal of the arithmetic circuit unit 12. The output terminal of the current transformer 16 provided in the output circuit of the chopper bridge 2 is also connected to the other input terminal of the arithmetic circuit unit 12. Further, a charging command signal CHG and a capacitor charging voltage target value Voe are input to the arithmetic circuit unit 12. The output terminal of the chopper bridge operation command signal of the arithmetic circuit unit 12 is connected to the input terminal of the chopper bridge drive circuit unit 13. The gate terminals of the first self-extinguishing switching element 21 and the second self-extinguishing switching element 24 of the chopper bridge 2 are respectively connected to the two sets of output terminals of the chopper bridge driving circuit unit 13. .
[0024]
In the power supply device of the present invention, by providing the chopper bridge 2, the energy remaining in the reactor 3 when charging is stopped can be regenerated to the DC power supply 1.
That is, in the circuit diagram shown in FIG. 1, when the arithmetic circuit unit 12 receives the charging command signal CHG, the first self-extinguishing switching element 21 and the second self-extinguishing switching are connected via the chopper bridge driving circuit 13. The element 24 is turned on, and the DC power source 1 is supplied from the DC power source 1, the first self-extinguishing switching element 21, the reactor 3, the charging rectifier element 5, the capacitor 6, and the second self-extinguishing switching element 24. The circuit returning to is supplied with current, and a sinusoidal current caused by the resonance of the reactor 3 and the capacitor 6 is mainly supplied. The DC power supply voltage value Vi is measured by the DC power supply voltage measuring means 14 and the capacitor voltage instantaneous value v is measured by the capacitor voltage measuring voltage divider 15 and inputted to the arithmetic circuit section 12. The current of the reactor 3 is measured by the current transformer 16 and input to the arithmetic circuit unit 12. The arithmetic circuit unit 12 determines that the voltage of the capacitor 6 has reached a value represented by [Equation 2] to be described later, and at this point, the first self-extinguishing switching element 21 and the second By extinguishing the self-extinguishing type switching element 24, the current flows in the reverse direction to the DC power source 1 through the first rectifying element 22 and the second rectifying element 23, and the energy remaining in the reactor 3 Is regenerated in the DC power source 1 and part is stored in the capacitor 6, and ideally no energy loss occurs.
[0025]
The point of time when the self-extinguishing

switching elements

21 and 24 of the chopper bridge 2 are extinguished is determined by the following calculation. That is, it is assumed that the following relationship is established with respect to the DC power supply voltage value Vi, the capacitor voltage instantaneous value v, the capacitor charging voltage target value Voe, the capacitor capacitance value C, the charging current instantaneous value i, and the inductance value L.
[0026]
[Expression 2]

[0027]
At this time, the electric energy of the voltage oscillation centering on v = Vi becomes a value necessary for setting the voltage of the capacitor 6 to the capacitor charging voltage target value Voe at the current zero point to come. In [Equation 2], Vcomp is a voltage correction term for compensating for the loss of the resonance circuit and / or performing a commutation operation. This calculation is executed in the high-speed and high-precision analog arithmetic circuit of the arithmetic circuit unit 12. A digital calculation method is also possible. In this case, a means for correcting the delay time due to the limit of the conversion speed of the A / D converter is required.
[0028]
FIG. 13 is a diagram showing the change over time of the charging current and the capacitor voltage in this example. In FIG. 13, Vop is a voltage value before starting capacitor charging, Voe is a capacitor charging voltage target value, and Vi is a DC power supply voltage value. The self-extinguishing

switching elements

21 and 24 are fired at time t = to and extinguished at time t = ts.
[0029]
After the charging is completed, the load switching element 9 is turned on at an appropriate timing, and is discharged by a circuit comprising the capacitor 6, the load switching element 9 and the load 7 to give pulse power to the load 7.
[0030]
Here, an example is shown in which an IGBT is used as a self-extinguishing type switching element, but the same effect can be obtained by using other solid-state switching elements such as GTO, GCT, and FET. Further, it is desirable that a smoothing capacitor that can withstand the pulse charge / discharge that is inevitable in the present invention is connected in parallel to the output terminal of the DC power source 1.
[0031]
FIG. 2 is a partial circuit diagram of another embodiment of the power supply device of the present invention, in which the transformer 8 is connected to the

output terminals

2c and 2d of the chopper bridge 2 of FIG.
[0032]
In particular, when there is a demand to increase the voltage of the capacitor 6, the transformer 8 is necessary to match the voltage on the input side and the output side. For the purpose of downsizing the device, the resonant charging reactor 3 can be replaced by the leakage inductance of the transformer 8. In this case, it is necessary to convert the voltage value according to the turn ratio in the above-described or later calculation.
[0033]
Another embodiment of the power supply device of the present invention will be described in detail with reference to the circuit diagram of FIG. 3, the arithmetic circuit unit configuration diagram of FIG. 17, and the time change graph of the charging current and capacitor voltage of FIG. The power supply apparatus shown in the circuit diagram of FIG. 3 of the present embodiment has a configuration in which the current transformer 16 provided in the output circuit of the chopper bridge 2 is omitted from the circuit diagram shown in FIG.
[0034]
In this embodiment, as shown in FIG. 6, charge control is performed in two stages. The purpose is that the power loss of the self-extinguishing type switching element of the chopper bridge 2 greatly depends on the current value at the time of extinction, and extinction in a large current region causes a larger power loss. In the second stage, the arc is extinguished at a low current value during the chopper operation, and basically the arc is not extinguished by resonance charging, thereby reducing the loss and further improving the efficiency of the apparatus.
[0035]
In FIG. 17, the signal name Voe is the capacitor charging voltage target value, Vi is the DC power supply voltage value, v is the capacitor voltage instantaneous value, CHG is the charging command signal, Vop is the voltage value before starting the capacitor charging, GATE-C. Is a charge gate signal, and the block symbol DIF. Is a differential amplifier, ARI. Is an arithmetic unit, S.I. H. Is a sample and hold circuit, TIM1 and TIM2 are first and second timers, respectively, and OR is an OR circuit.
When the arithmetic circuit unit 12 receives the charge command signal CHG, the sample and hold circuit S.P. H. Keep it in memory. In the first stage regenerative chopper charging, the first timer TIM1 operates and the charging gate signal GATE-C. And the first self-extinguishing switching element 21 and the second self-extinguishing switching element 24 are conducted through the chopper bridge driving circuit 13. The arithmetic unit ARI. In the arithmetic circuit unit 12 is charged so that the capacitor 6 is charged to an intermediate voltage Vos suitable for starting the resonant charging of the second stage charging. When the first timer TIM1 detects the timing calculated by the charging gate signal GATE-C. Is stopped, and the self-extinguishing

switching elements

21 and 24 are extinguished. At this time, most of the electromagnetic energy stored in the leakage inductance of the reactor 3 or the transformer 8 is regenerated to the DC power source 1 through the first rectifying element 22 and the second rectifying element 23. The time when the charging current becomes zero is set in advance by the second timer TIM2 incorporated in the arithmetic circuit unit 12, and when this time elapses, the charging gate signal GATE-C. Is output to perform second-stage resonance charging.
[0036]
Another embodiment of the power supply device of the present invention will be described in detail with reference to the circuit diagram of FIG. In this embodiment, in the embodiment shown in FIG. 1, a circuit including a commutation switching element 4 is further connected in parallel to a series circuit of a charging rectifier element 5 and a capacitor 6.
[0037]
In this embodiment, the arithmetic circuit unit 12 performs correction so as to charge toward a voltage slightly higher than the charging target voltage value Voe of the capacitor, and the voltage of the capacitor 6 reaches the target value at the end of charging. The time point is determined by the comparison circuit in the arithmetic circuit section 12, and the commutation switching element 4 is turned on, and the charging current is commutated from the capacitor 6 to the commutation switching element 4, thereby quickly stopping charging. Thus, the capacitor charging voltage is controlled with higher accuracy. At this time, the first self-extinguishing switching element 21 and the second self-extinguishing switching element 24 are extinguished, and the electromagnetic energy remaining in the reactor 3 is transferred to the DC power source 1 through the following current path. Regenerate. This current path extends from the negative electrode of the DC power supply 1 to the first rectifying element 22, the reactor 3, the commutation switching element 4, and the second rectifying element 23 to the positive electrode of the DC power supply 1. In this embodiment, since the charging voltage of the capacitor 6 can be controlled with necessary and sufficient accuracy without stabilizing the voltage of the DC power source 1, the DC power source 1 generally rectifies a commercial AC power source. Can be.
[0038]
Another embodiment of the power supply device of the present invention will be described in detail with reference to the circuit diagram of FIG. 5, the arithmetic circuit unit configuration diagram of FIG. 19, and the time change graph of the charging current and capacitor voltage of FIG. The power supply device of the circuit diagram of FIG. 5 of the present embodiment has a configuration in which the commutation switching element 4 is connected in parallel to the series circuit of the charging rectifier element 5 and the capacitor 6 in the circuit diagram shown in FIG.
[0039]
In this embodiment, as shown in FIG. 7, charging control is performed in three stages. The purpose is that the power loss of the self-extinguishing type switching element of the chopper bridge 2 greatly depends on the current value at the time of extinction, and extinction in a large current region causes a larger power loss. When the chopper is operated, the arc is extinguished at a low current value, the current value at the time when the arc is extinguished by the resonance charging in the second stage is reduced to reduce the loss, and the reactor 3 or the transformer is further reduced by the charge commutation operation. The energy remaining in 8 is regenerated to the DC power source 1 to improve the efficiency of the apparatus, and at the same time, the charging voltage of the capacitor 6 is controlled with high accuracy of about 0.1% or less.
In FIG. 19, the signal name Voe is the capacitor charging voltage target value, Vi is the DC power supply voltage value, v is the capacitor voltage instantaneous value, CHG is the charging command signal, Vop is the voltage value before starting the capacitor charging, GATE-C. Is a charge gate signal, GATE-D. Is a commutation gate signal, and the block symbol DIF. Is a differential amplifier, ARI. Is an arithmetic unit, S.I. H. Is a sample and hold circuit, TIM1 and TIM2 are first and second timers, LOG. Indicates a logic circuit, and CMP2 indicates a second comparator.
When the arithmetic circuit unit 12 receives the charge command signal CHG, the sample and hold circuit S.P. H. Keep it in memory. In the first stage regenerative chopper charging, the first timer TIM1 operates and the charging gate signal GATE-C. And the first self-extinguishing switching element 21 and the second self-extinguishing switching element 24 are conducted through the chopper bridge driving circuit 13. The arithmetic unit ARI. In the arithmetic circuit unit 12 is charged so that the capacitor 6 is charged to an intermediate voltage Vos suitable for starting the resonant charging of the second stage charging. When the first timer TIM1 detects the timing calculated by the charging gate signal GATE-C. Is stopped, and the self-extinguishing

switching elements

21 and 24 are extinguished. At this time, most of the electromagnetic energy stored in the leakage inductance of the reactor 3 or the transformer 8 is regenerated to the DC power source 1 through the first rectifying element 22 and the second rectifying element 23. The time when the charging current becomes zero is set in advance by the second timer TIM2 incorporated in the arithmetic circuit unit 12, and when this time elapses, the charging gate signal GATE-C. Is output to perform second-stage resonance charging. When the capacitor voltage instantaneous value v reaches the capacitor charge voltage target value Voe at the end of the resonance charge, the second comparator CMP2 detects this and detects the charge gate signal GATE-C. And the commutation gate signal GATE-D. Is output to ignite the switching element 4 for commutation. At this time, most of the electromagnetic energy remaining in the leakage inductance of the reactor 3 or the transformer 8 is regenerated to the DC power source 1 through the commutation switching element 4, the first rectifying element 22 and the second rectifying element 23.
[0040]
Another embodiment of the power supply device of the present invention will be described in detail with reference to the circuit diagram of FIG. 5, the operational circuit configuration diagram of FIGS. 17 and 19, and the time variation graph of the charging current and capacitor voltage of FIG. The present embodiment is characterized by an arithmetic expression of a determination condition for determining timing for extinguishing the first self-extinguishing switching element 21 and the second self-extinguishing switching element 24 in the charging method of the above-described embodiment. .
In the charging method of the above embodiment, in the ideal case where there is no loss of the resonance circuit composed of the reactor 3 and the capacitor 6, the intermediate voltage Vos before the start of the second stage resonance charging of the capacitor 6 is calculated by [Equation 3]. It is good that it is a value.
[0041]
[Equation 3]

[0042]
In the first stage regenerative chopper charging, an isosceles triangular current having a peak at the time when the first self-extinguishing switching element 21 and the second self-extinguishing switching element 24 turn to extinguishing is generated. If the determination voltage Vs1 that determines this time point is the average value of the voltage Vop before the start of charging the capacitor and the intermediate voltage Vos before the start of the second stage resonance charge, the following equation is obtained.
[0043]
[Expression 4]

[0044]
Here, by substituting [Equation 3] into [Equation 4] and eliminating Vos, the following equation is obtained.
[0045]
[Equation 5]

[0046]
Therefore, the determination voltage Vs1 for turning the first self-extinguishing switching element 21 and the second self-extinguishing switching element 24 to extinguishes is obtained by the calculation of [Equation 5] as an approximate calculation. Actually, since there is a loss of the resonant circuit and a change in the slope of the isosceles triangular current waveform in the first stage chopper charging, it is effective to make a determination by correcting at least one term of [Equation 5]. is there. That is, a method of minimizing fluctuations in the charging voltage by adjusting each resistance value of the adder / subtracter with offset adjustment using an analog operational amplifier is employed. In the case of digital calculation, an equivalent effect can be obtained by multiplying and / or adding correction coefficients.
In FIG. 16 and FIG. 18, the signal name Voe is the capacitor charging voltage target value, Vi is the DC power supply voltage value, v is the capacitor voltage instantaneous value, CHG is the charging command signal, Vop is the voltage value before starting the capacitor charging, and Vs1 is Determination voltage, GATE-C. Is a charge gate signal, GATE-D. Is a commutation gate signal, and the block symbol DIF. Is a differential amplifier, ADD. Is an adder / subtracter, S.P. H. Is a sample and hold circuit, CMP1 and CMP2 are first and second comparators, TIM2 is a second timer, OR is an OR circuit, and LOG is a logic circuit.
The calculation of the above [Equation 5] is performed by the adder / subtractor ADD, and the first comparator CMP1 supplies the first self-extinguishing switching element 21 and the second self-extinguishing switching element 24 for charging the first stage chopper. Except for determining the timing for extinguishing the arc, the configuration, function, and operation are the same as those described in FIGS. 17 and 19.
[0047]
Another embodiment of the power supply device of the present invention will be described below with reference to the circuit diagram of FIG.
In this embodiment, the charging rectifier 5 in the embodiment shown in FIG. 2 is replaced with a charging switching element 5a.
[0048]
When the charge circuit is repeatedly charged and the load circuit includes an inductive reactance or a transformer, a voltage having a polarity opposite to the charge voltage often remains in the capacitor 6 after discharge to the load. When this reverse voltage remains, the charging rectifying element 5 becomes conductive, and is applied to the first self-extinguishing switching element 21 and the second self-extinguishing switching element 24 in the direction in which the forward voltage rises to dv. Problems such as false firing due to / dt may occur. In the case of the circuit diagram of FIG. 2, an oscillating current flows through the secondary winding of the transformer 8 and hinders the next charging control. For the purpose of preventing these phenomena and performing stable and repetitive charging / discharging operations, a charging switching element 5a capable of active switching is used instead of the charging rectifying element 5. The charging switching element 5a may be fired at the same time when the first self-extinguishing switching element 21 and the second self-extinguishing switching element 24 are turned on. it can.
[0049]
Another embodiment of the power supply device of the present invention will be described below with reference to the circuit diagram of FIG.
In this embodiment, in the main circuit of the embodiment shown in FIG. 1, the load switching element 9 of the circuit of the load 7 connected in parallel to the capacitor 6 is an IGBT.
[0050]
When charging and discharging repeatedly, when the load is not a self-discharge load such as a discharge lamp or when a steep voltage rise is required, the load switching element 9 is required between the load and the load. In order to lengthen the maintenance cycle of the apparatus, a method of using the load switching element 9 as a solid switching element instead of a discharge tube such as a thyratron is advantageous. Here, an example using an IGBT is shown. Of course, other solid-state switching elements such as thyristors, GTO, GCT, SI thyristors, and FETs can also be used.
[0051]
If it is necessary to prevent the voltage from being applied in the reverse direction due to the characteristics of these switching elements, a rectifying element is added. Even when the load is a self-discharge load such as a discharge lamp, it is advantageous to place a load rectifier because the electrode material can be optimally selected for each anode and cathode by specifying the current direction in one direction. There is a case. Further, in order to increase the energy remaining in the capacitor 6 after discharging and regenerate and reuse this energy for the DC power supply 1, a load rectifying element that limits the current direction of the load circuit to one direction is inserted in series. Is often advantageous.
[0052]
Another embodiment of the power supply device of the present invention will be described in detail with reference to the circuit diagram of FIG. In this embodiment, a magnetic switch 10 is provided between a capacitor 6 and a load 7 in the main circuit of the embodiment shown in FIG.
[0053]
In some cases, such as when the final load is a discharge-pumped laser, an output voltage waveform with a steep voltage rise may be required. However, the rise time and duration of the voltage pulse are shortened using the magnetic saturation phenomenon of the magnetic material. There is a technique called magnetic pulse compression using the magnetic switch 10. The circuit composed of the capacitor 6, the magnetic switch 10, and the load 7 has a residual voltage remaining in the capacitor 6 when the load 7 is restored to a non-conducting state after the discharge ends due to the saturation inductance of the magnetic switch 10. Since the value fluctuates depending on conditions, a method of stabilizing the next charging voltage by the power supply device and the charging method described above is effective.
[0054]
Another embodiment of the power supply device of the present invention will be described in detail with reference to the circuit diagram of FIG. In this embodiment, in the main circuit of the embodiment shown in FIG. 8, the reactor 3 is substituted by the leakage inductance of the transformer 8, the load 7 is the step-up transformer 17, the high-voltage capacitor 18, the magnetic switch 10, the peaking capacitor 19, and the discharge. A thyristor is used as the switching element 9 for the load.
[0055]
When the final load is the discharge excitation laser 11, a high voltage of 10 kV or higher is required, and therefore a step-up transformer 17 is usually provided for matching. In the circuit of FIG. 11, after charging of the capacitor 6 is completed, the load switching element 9 is fired and energy is transferred from the capacitor 6 to the high voltage capacitor 18 via the step-up transformer 17.
After the magnetic switch 10 is saturated, energy is transferred to the peaking capacitor 19 in a short time, usually about 0.1 μs, and the discharge excitation laser 11 starts discharging to excite the laser medium. The discharge excitation laser 11 is in an arc discharge state after the initial excitation, and the impedance rapidly decreases, and the charge of the peaking capacitor 19 is inverted by energy that has not been consumed. Thereafter, the magnetic switch 10 saturates in the reverse direction, charges the high-voltage capacitor 18 in the reverse direction, and further charges the capacitor 6 in the reverse direction via the step-up transformer 17 to return energy.
At this time, the load switching element 9 is extinguished, and the charging switching element 5a is extinguished when the previous charging is completed, so that the capacitor 6 is charged in the reverse direction until the next charging starts. To do.
[0056]
【The invention's effect】
The present invention realizes a capacitor charging power supply device with a simple circuit configuration that has low loss and small charging voltage error even when the capacitor charging voltage target value changes each time it is repeated, and has high performance and reliability. High pulse power supply. Further, even when the capacitor voltage remains in either positive or negative polarity at the start of charging, it is possible to realize a power supply device capable of efficient resonance charging without wasting this energy.
[0057]
Furthermore, the transformer 8 is inserted into the charging circuit, the DC power supply and the load circuit are matched, and at the same time, the leakage inductance of the transformer is used as a charging reactor, thereby expanding the application range and reducing the size of the device. It can be realized at the same time.
[0058]
In addition, the charging method divided into the first-stage chopper charging and the second-stage resonance charging reduces the operation burden of the self-extinguishing switching element of the chopper bridge, and is one rank lower than the case of one resonance charging. The current rated elements can be charged with the same energy, and the power supply device can be reduced in size and cost.
[0059]
Further, by connecting a circuit including the commutation switching element 4 in parallel to the series circuit of the charging rectifier element 5 and the capacitor 6, the charging voltage can be controlled with high accuracy within 0.1%.
[0060]
Further, by providing the load switching element 9 between the capacitor 6 and the load 7, the capacitor 6 can be charged independently of the load 7 and pulse power can be supplied to the load 7 at an accurate timing. Become.
[0061]
Furthermore, by providing the magnetic switch 10 between the capacitor 6 and the load 7, it becomes possible to rise more steeply, and it is possible to achieve high efficiency, long life, and improved reliability with a simple configuration. By improving the stability of the charging voltage, it is possible to realize a pulse power source with small operating time jitter until the magnetic switch 10 is saturated and turned on.
[0062]
Furthermore, by combining with the discharge excitation laser 11, it is possible to achieve a high efficiency, long life, and improved reliability with a simple configuration, and it is possible to realize a discharge excitation laser device capable of controlling output energy with high accuracy. .
[Brief description of the drawings]
FIG. 1 is a circuit diagram of an embodiment of a power supply device of the present invention.
FIG. 2 is a partial circuit diagram of another embodiment of the power supply device of the present invention.
FIG. 3 is a circuit diagram of another embodiment of the power supply device of the present invention.
FIG. 4 is a circuit diagram of another embodiment of the power supply device of the present invention.
FIG. 5 is a circuit diagram of another embodiment of the power supply device of the present invention.
FIG. 6 is a diagram showing changes over time in charging current and capacitor voltage in an embodiment of the power supply device of the present invention.
FIG. 7 is a diagram showing changes with time of each part current and capacitor voltage in another embodiment of the power supply device of the present invention;
FIG. 8 is a partial circuit diagram of another embodiment of the power supply device of the present invention.
FIG. 9 is a partial circuit diagram of another embodiment of the power supply device of the present invention.
FIG. 10 is a partial circuit diagram of another embodiment of the power supply device of the present invention.
FIG. 11 is a partial circuit diagram of another embodiment of the power supply device of the present invention.
FIG. 12 is a diagram showing changes over time in charging current and capacitor voltage in a power supply device of a conventional example.
FIG. 13 is a diagram showing changes over time in charging current and capacitor voltage in another embodiment of the power supply device of the present invention.
FIG. 14 is a partial circuit diagram of a conventional power supply device.
FIG. 15 is a diagram showing a change with time of each part current and capacitor voltage in a conventional power supply device;
FIG. 16 is a configuration diagram of an arithmetic circuit unit in an embodiment of the power supply device of the present invention.
FIG. 17 is a configuration diagram of an arithmetic circuit unit in another embodiment of the power supply device of the present invention.
FIG. 18 is a configuration diagram of an arithmetic circuit unit in another embodiment of the power supply device of the present invention.
FIG. 19 is a configuration diagram of an arithmetic circuit unit in another embodiment of the power supply device of the present invention.
[Explanation of symbols]
1 DC power supply
2 Chopper bridge
2a Positive side input terminal
2b Negative side input terminal
2c Positive output terminal
2d Negative output terminal
3 reactors
4 Switching elements for commutation
5 Rectifying element for charging
5a Switching element for charging
6 capacitors
7 Load
8 Transformer
9 Load switching elements
10 Magnetic switch
11 Discharge excitation laser
12 Arithmetic circuit
13 Chopper bridge drive circuit
14 Voltage divider for DC power supply voltage measurement
15 Voltage divider for measuring capacitor voltage
16 Current transformer
17 Step-up transformer
18 High voltage capacitor
19 Peaking Capacitor
21 First self-extinguishing switching element
22 First rectifier
23 Second rectifier
24 Second self-extinguishing switching element
101 First thyristor
102 Second thyristor
Vi DC power supply voltage value
Vop Capacitor value before starting charging
Voe capacitor charge voltage target value
v Capacitor voltage instantaneous value
i Charge current instantaneous value
to firing timing
ts Arc extinguishing timing
Vos Intermediate voltage before the start of second stage charging
Vs1 judgment voltage
GATE-C. Charging gate signal
GATE-D. Commutation gate signal
DIF. Differential amplifier
ADD. Adder / subtractor
S. H. Sample hold circuit
CMP1 first comparator
CMP2 second comparator
TIM1 first timer
TIM2 Second timer
OR OR circuit
LOG Logic circuit

Claims

Connect the first self-turn-off switching element between the positive-side input terminal and the positive electrode side output terminal, a first rectifier element connected between said positive output terminal and negative input terminals, the a second rectifying element connected between the positive side input terminal and the negative side output terminal, and connect the second self-extinguishing type switching element between said negative input terminal and the negative side output terminal Chopper bridge
A DC power source connected between the input terminals of the chopper bridge;
A reactor connected in series between the output terminals of the chopper bridge, a charging rectifier, and a capacitor ;
A chopper bridge driving circuit unit for driving the chopper bridge;
By controlling the chopper bridge drive circuit unit, the first and second self-extinguishing switching elements are turned on after being turned on for a predetermined time, and commutated to the first and second rectifying elements. A chopper operation that charges the capacitor as a first-stage charge with a triangular waveform, and the first and second self-extinguishing switching elements are turned on again, and the DC power supply, the reactor, and the capacitor An arithmetic circuit unit for sequentially performing a resonance charging operation for charging the capacitor as a second stage charge to a predetermined voltage with a sinusoidal half-wave current waveform by a resonance circuit comprising:
Power supply, characterized in that it comprises a.

A first self-extinguishing switching element is connected between the positive electrode side input terminal and the positive electrode side output terminal, and a first rectifier element is connected between the negative electrode side input terminal and the positive electrode side output terminal, A second rectifying element is connected between the positive input terminal and the negative output terminal, and a second self-extinguishing switching element is connected between the negative input terminal and the negative output terminal. Chopper bridge
A DC power source connected between the input terminals of the chopper bridge;
A transformer connected in series between the output terminals of the chopper bridge, a charging rectifier, and a capacitor;
A chopper bridge driving circuit unit for driving the chopper bridge;
By controlling the chopper bridge drive circuit unit, the first and second self-extinguishing switching elements are turned on after being turned on for a predetermined time, and commutated to the first and second rectifying elements. A chopper operation for charging the capacitor as a first-stage charge with a triangular wave-like current waveform, and conducting again the first and second self-extinguishing switching elements, and the leakage inductance of the DC power supply and the transformer And an arithmetic circuit unit for sequentially performing a resonance charging operation of charging the capacitor as a second stage charge to a predetermined voltage with a sinusoidal half-wave current waveform by a resonance circuit comprising the capacitor and
Power supply, characterized in that it comprises a.

A first self-extinguishing switching element is connected between the positive electrode side input terminal and the positive electrode side output terminal, and a first rectifier element is connected between the negative electrode side input terminal and the positive electrode side output terminal, A second rectifying element is connected between the positive input terminal and the negative output terminal, and a second self-extinguishing switching element is connected between the negative input terminal and the negative output terminal. Chopper bridge
A DC power source connected between the input terminals of the chopper bridge;
A reactor, a transformer, a charging rectifier, and a capacitor connected in series between the output terminals of the chopper bridge;
A chopper bridge driving circuit unit for driving the chopper bridge;
By controlling the chopper bridge drive circuit unit, the first and second self-extinguishing switching elements are turned on after being turned on for a predetermined time, and commutated to the first and second rectifying elements. A chopper operation for charging the capacitor as a first-stage charge with a triangular waveform, and the first and second self-extinguishing switching elements are made conductive again, and the DC power supply, the reactor, and the transformer An arithmetic circuit unit that sequentially performs a resonance charging operation of charging the capacitor as a second stage charge to a predetermined voltage with a sinusoidal half-wave current waveform by a resonance circuit including a leakage inductance of the capacitor and a capacitor
Power supply, characterized in that it comprises a.

The power supply device according to any one of claims 1 to 3, wherein a commutation switching element is connected in parallel to a series circuit including the charging rectifier element and the capacitor.

The arithmetic circuit unit further conducts the commutation switching element when the voltage of the capacitor reaches a predetermined value after the resonant charging operation, and rapidly transfers the charging current flowing through the capacitor to the commutation switching element. The power supply device according to claim 4, wherein a charging current commutation operation is performed to stop charging by commutating to a power source.

A DC power supply voltage measuring divider which is connected to the DC power source,
A divider for content measurement capacitor voltage connected to the capacitor,
Said DC power source voltage value Vi, the charging voltage target value of Vop and the capacitor voltage value before start of charging of the capacitor when the Voe,
The arithmetic circuit unit, said by computation the {Vi- (Voe-Vop) / 2} becomes a value at the time of the chopper operation, the calculation value when the charge voltage value exceeds the capacitor, the first and second power supply device according to any of claims 1 to 5, wherein the benzalkonium to perform the extinguishing of the self-extinguishing type switching elements.

The power supply device according to any one of claims 1 to 6, characterized in that the charging rectifier element is replaced with a charging switching element.

Load switching element, the power supply device according to any one of claims 1 to 7, characterized in that connected at least one of the load rectifier element and a magnetic switch between the capacitor and the load.

9. The power supply apparatus according to claim 8, wherein the load is a discharge excitation laser.