JPH09246634A - Pulse laser power supply - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize high reliability and high efficiency by providing a commutation circuit for diverting discharge currents of a second capacitor in different directions and a regenerative circuit for regenerating diverted energy to thereby regenerate excess energy. SOLUTION: A series circuit consisting of a commutation circuit 30 and a regenerative circuit 40 is connected to a second capacitor C2 in parallel. The commutation circuit 30 commutes discharge currents of the second capacitor C2 to the regenerative circuit 40 after the discharge of a laser discharge electrode 20 is completed. By this commutation function, all of the excess energy of the second capacitor C2 is transferred to the regenerative circuit 40 through the commutation circuit 30. The regenerative circuit 40 accumulates the transferred energy, converts the accumulated energy into dc or ac currents and regenerates the currents to a first capacitor C1 or a charging power supply 10.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pulse laser power supply for exciting an excimer laser, a metal vapor laser or the like.

[0002]

2. Description of the Related Art In recent years, industrial demand for pulse lasers has been increasing, such as ultra-precision machining of objects by excimer lasers and isotope separation by copper vapor lasers. In order to excite the pulsed laser, it is necessary to apply a pulse voltage of the order of 100 nanoseconds between the laser discharge electrodes to obtain a stable discharge, but it is necessary to generate such an ultrafast pulse voltage with a switch. Very difficult. Therefore, a primary pulse is generated by a semiconductor switch,
Further, a magnetic pulse compression circuit that compresses the pulse width by utilizing the saturation operation of the saturable inductance and supplies energy to the laser load is often used.

FIG. 11 shows the configuration of a conventional pulse laser power supply. In FIG. 11, the charging power supply 10 is used to charge the charging power supply 10 → first capacitor C1 → discharge reactor LD →
The first capacitor C1 is charged with the polarity shown by the route of saturable reactor SR → head inductance LH → charging reactor LG → charging power source 10.

This charging energy is applied to the semiconductor switch SW.
Is turned on, the first capacitor C1 → the semiconductor switch SW → the second capacitor C2 → the discharge reactor LD → the first capacitor C1 is passed through to the second capacitor C2 with the polarity shown in the drawing, and the second capacitor C2 C2 is pulse charged.

Due to the energy transferred to the second capacitor C2, the saturable reactor SR changes from the second capacitor C2 to the peaking capacitor CP to the saturable reactor S.
It is excited by a pulsed current flowing in the path of R → second capacitor C2.

Due to this exciting action, the saturable reactor SR
Is saturated, the inductance value is drastically reduced and the energy of the second capacitor C2 is transferred to the peaking capacitor CP through the route of the second capacitor C2 → peaking capacitor CP → saturable reactor SR → second capacitor C2 with the polarity shown in the figure. To do.

At this time, since the saturable inductance of the saturable reactor SR is extremely small, the charging of the peaking capacitor CP is accelerated, and so-called pulse compression is performed. Further, the inter-electrode voltage of the laser discharge electrode 20 is increased by charging the peaking capacitor CP, the insulation between the electrodes is broken, and the energy accumulated in the peaking capacitor CP is injected into the laser medium via the head inductance LH, The laser is excited.

[0008]

FIG. 12 shows the waveform of the voltage of the second capacitor C2 and the voltage between the electrodes of the laser discharge electrode 20. In an excimer laser or the like, the dielectric breakdown between the laser discharge electrodes is usually caused by the energy transfer process from the second capacitor C2 to the peaking capacitor CP, that is, the energy of the second capacitor C2 changes to the peaking capacitor CP.
Occurs before the full transition to. At this point, the energy of the second capacitor C2 is not completely discharged, so that the voltage remains in the second capacitor C2 as shown in FIG. During the discharge between the laser discharge electrodes 20, a part of the surplus energy left in the second capacitor C2 is generated by the second capacitor C2 → the laser discharge electrode 2
0 → Head inductance LH → Saturable reactor SR
→ Because the second capacitor C2 is discharged through the path,
The surplus energy of the capacitor C2 of is reduced.

However, when the discharge is completed, the surplus energy is returned to the second capacitor C through the path of the second capacitor C2 → peaking capacitor CP → head inductance LH → saturable reactor SR → second capacitor C2 again.
2 is transferred to the peaking capacitor CP. As a result, the excess energy recharges the peaking capacitor CP in the same direction as in the beginning, so that the voltage is applied to the laser discharge electrode 20 again. This voltage produces an unwanted arc discharge between the laser discharge electrodes 20.

This arc discharge causes the consumption of the discharge electrode 20,
This may cause deterioration of the laser medium, etc., and significantly reduce the reliability and life of the device. This problem becomes more remarkable as the output of the laser device is increased. To increase the output of the laser device, a method of increasing the electrostatic capacitances of the first and second capacitors C1 and C2 and the peaking capacitor CP is generally used. When the capacitance of each capacitor is increased in this way, the resonance frequency of the circuit (f = 1 / (determined by 2πL · C) becomes low, that is, the energy transfer speed from the second capacitor C2 to the peaking capacitor CP becomes slow. Since the discharge start voltage of the laser discharge electrode 20 further decreases due to the decrease in the energy transfer speed, the surplus energy left in the second capacitor C2 increases and the unnecessary voltage applied to the laser discharge electrode 20 increases. Will result.

Therefore, the present invention provides a highly reliable and highly efficient pulsed laser power source by regenerating the surplus energy left in the second capacitor C2, and further, the highly reliable and long life of the laser discharge part. It is an object of the present invention to provide a pulsed laser power supply capable of achieving the above.

[0012]

In order to achieve the above object, the invention corresponding to claim 1 is such that a first capacitor and a saturable reactor are connected in series between a charging power source and a laser load, and A main switch, a second capacitor, and a peaking capacitor are respectively connected in parallel, and by closing the main switch, the energy of the first capacitor is transferred to the second capacitor, and by the saturation operation of the saturable reactor, In a pulsed laser power supply for supplying the energy of the second capacitor to the peaking capacitor and the laser load, a commutation circuit connected in parallel with the second capacitor and diverting the discharge current of the second capacitor in another direction. And a regenerative circuit for regenerating the energy diverted by the commutation circuit. It is THE power.

In order to achieve the above object, the invention according to claim 2 is characterized in that the commutation circuit comprises first switching means for commutating a discharge current of the second capacitor, and the first switching means. A second diode connected to the switching means in a direction in which a reverse current does not flow; and a discharge completion detecting means for detecting discharge completion of the laser load and giving an ON signal to the first switching means. 2. The pulsed laser power supply according to claim 1, wherein the series circuit of the first switching means and the first diode is connected to the ground side of the capacitor.

To achieve the above object, in the invention according to claim 3, the commutation circuit is a transformer connected in parallel with the second capacitor, and a transformer connected to the secondary side of the transformer. 2. A series circuit of one switching means and a first diode, and discharge completion detecting means for detecting completion of discharge of the laser load and giving an ON signal to the first switching means. Pulsed laser power supply.

In order to achieve the above object, the invention according to claim 4 is characterized in that the discharge completion detecting means outputs a post signal after a predetermined time has elapsed from the trigger output of the main switch; 4. A gate drive circuit for receiving a signal from a delay circuit and outputting an ON signal to the first switching means.
The pulsed laser power supply described in 1.

In order to achieve the above object, in the invention according to claim 5, the discharge completion detecting means detects the discharge current of the laser load, and a current zero point from the detection signal from the current detecting means. Current zero point detecting means for detecting,
4. The pulse laser power supply according to claim 2, further comprising a gate drive circuit which receives an output of the current zero point detecting means and outputs an ON signal to the first switching means.

In order to achieve the above object, the invention corresponding to claim 6 is the pulse laser power source according to claim 5, wherein the current detecting means is a high frequency current transformer or a shunt resistor.

In order to achieve the above object, in the invention according to claim 7, the discharge completion detecting means includes a light detecting means for detecting discharge light of a laser load, and an output for detecting a detection signal zero point of the light detecting means. 4. The pulse laser power supply according to claim 2, further comprising: a zero point detecting means and a gate drive circuit for receiving an output of the output zero point detecting means and outputting an ON signal to the first switching means. Is.

In order to achieve the above object, the invention corresponding to claim 8 is the pulse laser power source according to claim 7, wherein the photodetection means is a photodiode. In order to achieve the above object, in the invention corresponding to claim 9, the regenerative circuit includes a regenerative capacitor that stores energy diverted by the commutation circuit and a second switching means, and 2. The pulse according to claim 1, wherein the high voltage side is connected to the charging power source side of the first capacitor via the second switching means, and the low voltage side is connected to the high voltage side of the second capacitor. It is a laser power supply.

In order to achieve the above-mentioned object, the invention according to claim 10 is characterized in that the regenerative circuit comprises a regenerative capacitor for accumulating the energy diverted by the commutation circuit, a second switching means, and the second switching means. A second diode connected in a direction that does not affect the discharge of the regeneration capacitor when the switching means is closed, and the high-voltage side of the regeneration capacitor is connected to the second switching means and the second diode.
2. The charging power source side of the first capacitor is connected through a series circuit of the diode of 1), and the low voltage side is connected to the high voltage side of the second capacitor.
It is the pulsed laser power supply described.

In order to achieve the above object, in the invention corresponding to claim 11, the regenerative circuit is connected in parallel with the regenerative capacitor for accumulating the energy diverted by the commutation circuit, and is connected in parallel to the regenerative capacitor. 2. The pulse laser power supply according to claim 1, further comprising an inverter that converts the energy stored in the regeneration capacitor into AC power and returns the AC power to the AC input of the charging power supply.

In order to achieve the above object, the invention according to claim 12 is characterized in that the regenerative circuit is connected in parallel with the regenerative capacitor for accumulating the energy diverted by the commutation circuit, and the regenerative capacitor is connected in parallel. 7. An inverter, which converts the energy stored in the regeneration capacitor into AC power and returns it to the AC input of the charging power source, and a rectifier circuit that rectifies the output of the inverter and returns it to the DC capacitor of the charging power source. 1 is a pulsed laser power supply.

According to the invention described in any one of claims 1 to 12, a commutation circuit and a regenerative circuit for promptly discharging the surplus energy left in the second capacitor to regenerate the first capacitor or the charging power source. By providing the circuit, it is possible to provide a highly efficient and highly reliable pulsed laser power supply, and to provide a pulsed laser power supply capable of achieving a long life and high reliability of the laser discharge part. .

[0024]

Embodiments of the present invention will be described below with reference to the drawings. 1st Embodiment corresponding to Claim 1 WHEREIN: As shown in FIG. 1, the energy of the 1st capacitor | condenser C1 charged by the charging power supply 10 and the 1st capacitor | condenser C1 by making it into a 2nd capacitor is closed. The configuration of the main switch SW that shifts to C2 and the pulse laser power supply that has the saturable reactor SR that supplies the energy of the second capacitor C2 to the peaking capacitor CP and the laser load by the saturation operation is the same as that of the conventional example of FIG. is there.

The difference from this is that a series circuit composed of a commutation circuit 30 and a regenerative circuit 40 is newly connected in parallel with the second capacitor C2. In the pulsed laser power supply having such a configuration, the process in which the surplus energy is left in the second capacitor C2 is as described above.

The operation will be described with reference to FIG. The commutation circuit 30 commutates the discharge current of the second capacitor C2 to the regenerative circuit 40 immediately after the discharge of the laser discharge electrode 20 is completed. Due to this commutation action, all the surplus energy of the second capacitor C2 is transferred to the regeneration circuit 40 via the commutation circuit 30. The regenerative circuit 40 stores the transferred energy,
This stored energy is converted into direct current or alternating current, and the first
Is regenerated to the capacitor C1 or the charging power source 10 side.

As a result, it is possible to provide a highly reliable and highly efficient pulse laser power supply, and further provide a highly reliable and long life pulse laser power supply. Next, an embodiment corresponding to claim 2 showing a specific example of the commutation circuit 30 will be described with reference to the configuration diagram of FIG.

In FIG. 3, a series circuit of a commutation switch SWr1 and a first diode Dr1 is connected between the ground side of the second capacitor C2 and the regenerative circuit 40, and discharge completion detection is performed at the gate terminal of the commutation switch SWr1. Means 31 are connected.

When the discharge between the laser discharge electrodes 20 is completed, the discharge completion detecting means 31 outputs an ON signal to the gate terminal of the commutation switch SWr1, whereby the commutation switch SWr1 is turned on. When the commutation switch SWr1 is turned on, the second capacitor C2 → commutation switch S
Wr1 → first diode Dr1 → regeneration circuit 40 → second
The path of the capacitor C2 is formed, and the surplus energy of the second capacitor C2 is quickly transferred to the regenerative circuit 40. This transferred energy is firstly transferred by the regenerative circuit 40.
Is regenerated by the capacitor C1 of.

Next, an embodiment corresponding to claim 3 will be described with reference to the block diagram of FIG. In FIG.
A transformer TR is connected in parallel with the second capacitor C2, a series circuit of a commutation switch SWr1 and a first diode Dr1 is connected between the secondary side of the transformer TR and the regenerative circuit 40, and a commutation switch SWr1 is connected. The discharge completion detecting means 31 is connected to the gate terminal.

When the discharge between the laser discharge electrodes 20 is completed, the discharge completion detecting means 31 outputs an ON signal to the gate terminal of the commutation switch SWr1, whereby the commutation switch SWr1 is turned on. When the commutation switch SWr1 is turned on, a path of the second capacitor C2 → transformer TR → commutation switch SWr1 → first diode Dr1 → regeneration circuit 40 → transformer TR → second capacitor C2 is formed, and the second capacitor C2 is formed. The surplus energy of C2 is quickly transferred to the regenerative circuit 40. The transferred energy is regenerated by the regeneration circuit 40 to the first capacitor C1.

With the above configuration, the transformer TR
Since the voltage can be stepped down by means of the above, the voltage rating of the commutation switch SWr1 and the first diode Dr1 can be made lower than that of the second aspect, and the circuit can be downsized and the cost can be reduced.

Next, an embodiment corresponding to claim 4 will be described with reference to the block diagram of FIG. In FIG.
A gate drive circuit 31G that receives the output of the delay circuit 31D and outputs a gate pulse to the output of the delay circuit 31D having a terminal for inputting the trigger signal of the main switch SW.
Is connected. The output of the gate drive circuit 31G is connected to the gate terminal of the commutation switch SWr1.

The discharge between the laser discharge electrodes 20 ends after a certain period of time has passed since the main switch SW was turned on, although there are some variations. The present embodiment utilizes this characteristic. The delay circuit 31D receiving the trigger signal of the main switch outputs a signal after a preset time (time from turning on of the main switch to the end of discharge) has elapsed. Upon receiving this output signal, the gate drive circuit outputs an ON signal to the gate of the commutation switch SWr1.

Next, an embodiment corresponding to claims 5, 6, and 7 will be described with reference to the configuration diagram of FIG. In FIG. 6, the output of the current detecting means 31ID for detecting the current flowing between the laser discharge electrodes 20 is connected to the comparator 31CP, and one of the two branched outputs of the comparator 31CP is passed through the latch circuit 31LH.
The other is directly connected to the input of the exclusive OR XOR. The output of the exclusive OR XOR is connected to the gate drive circuit 31G, and the output of the gate drive circuit 31G is connected to the gate terminal of the commutation switch SWr1.

Setting device 31 included in the comparator 31CP
The threshold value is set to a value near zero by E. When no current flows between the laser discharge electrodes 20, the output signal of the comparator 31CP is "0" and the output of the latch circuit 31LH is also "0", so the output of the exclusive OR XOR is also "0". 31G does not output. When a current flows between the laser discharge electrodes 20 and the output signal of the current detection means 31ID exceeds the threshold value, both the output of the comparator 31CP and the output of the latch circuit 31LH become "1", but the exclusive OR XOR Output is "0"
Therefore, the gate drive circuit 31G keeps outputting no output. When the current between the laser discharge electrodes 20 decreases and the output signal of the current detecting means 31ID becomes equal to or less than the threshold value, the output of the comparator 31CP becomes "0", but the output of the latch circuit 31LH remains "1". Therefore, the output of the exclusive OR XOR changes to "1" and the gate drive circuit 31G outputs it. With the above operation, the commutation switch SWr1 can be turned on when the discharge is completed.

The embodiments corresponding to claims 8 and 9 operate in the same manner as the embodiments corresponding to claims 5, 6, and 7 described above. Next, an embodiment corresponding to claim 10 will be described with reference to FIG. 7.

In FIG. 7, the regenerative capacitor Cr is connected in parallel to the input end from the commutation circuit 30, and the high voltage side of the regenerative capacitor Cr is connected to the charging power source side of the first capacitor C1 via the regenerative switch SWr2. The low voltage side is connected to the high voltage side of the second capacitor C2.

When the discharge of the laser discharge electrode 20 is completed,
The surplus energy of the second capacitor C2 is transferred to the regeneration capacitor Cr by the commutation circuit 30, and the regeneration capacitor Cr is charged with the polarity shown in the figure. Regenerative capacitor Cr
The energy stored in the regenerative capacitor Cr → regenerative switch SWr2 → is turned on by turning on the regenerative switch SWr2 after the main switch SW has been sufficiently turned off.
It is regenerated by the first capacitor C1 through the path of the first capacitor C1 → the discharge reactor LD → the regeneration capacitor Cr.

Next, an embodiment corresponding to claim 11 will be described with reference to FIG. In FIG. 8, a regenerative capacitor Cr is connected in parallel to the input terminal from the commutation circuit 30, and the high voltage side of the regenerative capacitor Cr is connected to a first capacitor C1 via a series circuit of a regenerative switch SWr2 and a diode Dr2 having the illustrated polarity. Is connected to the charging power source side, and the low voltage side is connected to the high voltage side of the second capacitor C2.

In the pulse laser configured as described above, the surplus energy of the second capacitor C2 is transferred to the regeneration capacitor Cr and is regenerated by the regeneration switch SWr2 until the first capacitor C1 is regenerated. This is similar to the embodiment corresponding to claim 10.

When, for example, an IGBT is used as a switching element of the regeneration switch SWr2, the IGBT has a diode Dp for supplying a reverse current in the package, and therefore the first capacitor C1 is provided without the diode Dr2. → Diode Dp → Regenerative capacitor Cr →
Energy regurgitates from the first capacitor C1 to the regeneration capacitor Cr through the diode Dp due to the resonance operation of the path from the discharge reactor LD to the first capacitor C1. The diode Dr2 is inserted for the purpose of blocking this energy backflow. As a result, the energy is regenerated by the regeneration circuit 4
Since it is possible to prevent the backflow to 0, it is possible to realize a stable regenerative operation.

Next, an embodiment corresponding to claim 12 will be described with reference to FIG. In FIG. 9, a regeneration capacitor Cr is connected in parallel to the input terminal from the commutation circuit 30, an inverter 41 is connected in parallel to the regeneration capacitor Cr, and the output of this inverter 41 is connected to the AC input of the charging power source.

In FIG. 9 configured as described above, the embodiment corresponding to claim 10 is provided until the surplus energy of the second capacitor C2 is transferred to the regeneration capacitor Cr via the commutation circuit 30. Is the same as. The energy stored in the regeneration capacitor Cr is converted into AC power by the inverter 41 and regenerated to the AC input of the charging power supply 10.

Next, an embodiment corresponding to claim 13 will be described with reference to FIG. In FIG. 10, the commutation circuit 3
The regeneration capacitor Cr is connected in parallel to the input terminal from 0, the inverter 41 is connected in parallel to the regeneration capacitor Cr, and the output of the inverter 41 is connected to the rectifier 42.
The output of the rectifier 42 is connected to the DC capacitor of the charging power source 10.

In FIG. 10 constructed as described above,
The surplus energy of the second capacitor C2 is transferred to the regenerative capacitor Cr via the commutation circuit 30, and the energy stored in the regenerative capacitor Cr is converted into AC power by the inverter 41 until the energy is stored. Is similar to the embodiment corresponding to. The AC power from the inverter 41 is converted into DC power by the rectifier 42 and regenerated in the DC capacitor of the charging power supply 10.

As described above, in the embodiment corresponding to claims 1 to 13, the surplus energy left in the second capacitor C2 is regenerated for regeneration in the first capacitor C1 or the charging power source 10. Flow circuit 30 and regenerative circuit 40
Since the above is added, the surplus energy can be effectively used and the efficiency of the power supply can be improved. Moreover, since it is possible to prevent unnecessary voltage from being applied between the electrodes of the laser discharge electrode 20 due to the surplus energy, it is possible to suppress arc discharge, and it is possible to achieve higher reliability and longer life of the laser discharge part.

[0048]

As described above, according to the present invention, the second
By providing a commutation circuit and a regenerative circuit that quickly discharge the excess energy left in the capacitor and regenerate the first capacitor or the charging power source, a highly efficient and highly reliable pulse laser power source can be obtained. Moreover, it is possible to provide a pulsed laser power supply which can achieve a long life and high reliability of the laser discharge part.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a pulse laser power supply according to an embodiment corresponding to claim 1.

FIG. 2 is a diagram showing voltage waveforms and current waveforms for explaining the operation of the embodiment of FIG.

FIG. 3 is a configuration diagram of a pulse laser power supply according to an embodiment corresponding to claim 2.

FIG. 4 is a configuration diagram of a pulse laser power supply according to an embodiment corresponding to claim 3.

FIG. 5 is a configuration diagram of a pulse laser power supply according to an embodiment corresponding to claim 4.

FIG. 6 is a configuration diagram of a pulse laser power supply according to an embodiment corresponding to claim 5.

FIG. 7 is a configuration diagram of a pulse laser power supply according to an embodiment corresponding to claim 10.

FIG. 8 is a configuration diagram of a pulse laser power supply according to an embodiment corresponding to claim 11.

FIG. 9 is a configuration diagram of a pulse laser power supply according to an embodiment corresponding to claim 12.

FIG. 10 is a configuration diagram of a pulse laser power supply according to an embodiment corresponding to claim 13.

FIG. 11 is a configuration diagram of a conventional pulse laser power supply.

FIG. 12 is a voltage waveform diagram for explaining the operation of the pulse laser power supply of FIG.

[Explanation of Codes] C1, C2 ... Capacitor, CP ... Peaking Capacitor, SW ... Main Switch, SR ... Saturable Reactor, LD, LH, LG ... Reactor, 10 ... Charging Power Supply, 20 ... Laser Discharge Electrode, 30 ... Commutation Circuit, 40 ... Regenerative circuit.

Claims (12)

[Claims] 1. A first capacitor and a saturable reactor are connected in series between a charging power source and a laser load, and a main switch, a second capacitor and a peaking capacitor are respectively connected in parallel, and the main switch is provided. A pulse laser which transfers the energy of the first capacitor to the second capacitor by closing the circuit, and supplies the energy of the second capacitor to the peaking capacitor and the laser load by the saturation operation of the saturable reactor. The power supply includes a commutation circuit that is connected in parallel with the second capacitor and that diverts the discharge current of the second capacitor in another direction; and a regenerative circuit that regenerates the energy diverted by the commutation circuit. Pulse laser power supply characterized by. 2. The commutation circuit is connected to a first switching means for commutating a discharge current of the second capacitor and a direction in which a reverse current of the first switching means does not flow. A first diode and discharge completion detecting means for detecting completion of discharge of the laser load and providing an ON signal to the first switching means are provided, and the first switching means is connected to the ground side of the second capacitor. The pulsed laser power supply according to claim 1, wherein a series circuit of the first diode is connected. 3. The commutation circuit, a transformer connected in parallel with the second capacitor, a series circuit of a first switching means and a first diode connected to the secondary side of the transformer, 2. The pulse laser power supply according to claim 1, further comprising discharge completion detection means for detecting completion of discharge of the laser load and providing an ON signal to the first switching means. 4. The discharge completion detecting means includes a delay circuit which outputs a post signal after a predetermined time has elapsed from the trigger output of the main switch, and the first circuit which receives the signal of the delay circuit.
4. The pulsed laser power source according to claim 2, further comprising a gate drive circuit for outputting an ON signal to the switching means. 5. The discharge completion detection means includes a current detection means for detecting a discharge current of a laser load, a current zero point detection means for detecting a current zero point from a detection signal from the current detection means, and the current zero point detection means. The pulsed laser power supply according to claim 2 or 3, further comprising a gate drive circuit that receives an output and outputs an ON signal to the first switching means. 6. The pulse laser power source according to claim 5, wherein the current detecting means is a high frequency current transformer or a shunt resistor. 7. The discharge completion detecting means includes a light detecting means for detecting discharge light of a laser load, an output zero point detecting means for detecting a detection signal zero point of the light detecting means, and an output of the output zero point detecting means. 4. The pulse laser power supply according to claim 2, further comprising a gate drive circuit for outputting an ON signal to the first switching means. 8. The pulsed laser power supply according to claim 7, wherein the light detection means is a photodiode. 9. The regenerative circuit comprises a regenerative capacitor for accumulating the energy diverted by the commutation circuit and a second switching means, and a high voltage side of the regenerative capacitor is connected via the second switching means. 2. The pulse laser power source according to claim 1, wherein the pulsed laser power source is connected to the charging power source side of the first capacitor, and the low voltage side is connected to the high voltage side of the second capacitor. 10. The regenerative circuit includes a regenerative capacitor that stores energy diverted by the commutation circuit, and a second regenerative circuit.
Switching means and a second diode connected in a direction that does not affect the discharge of the regeneration capacitor when the second switching means is closed, and the high voltage side of the regeneration capacitor is the second switching means. 2. The charging source side of the first capacitor is connected through a series circuit of the second diode and the second diode, and the low voltage side is connected to the high voltage side of the second capacitor. Pulsed laser power supply. 11. The regenerative circuit converts a energy for accumulating the energy diverted by the commutation circuit and an energy stored in the regenerative capacitor connected in parallel with the regenerative capacitor into AC power. The pulse laser power supply according to claim 1, further comprising an inverter for returning to an AC input of the charging power supply. 12. The regenerative circuit converts the energy stored in the regenerative capacitor, which is stored in the regenerative capacitor in parallel with the regenerative capacitor that stores the energy diverted by the commutation circuit, into AC power. The pulse laser power supply according to claim 1, further comprising: an inverter for returning to an AC input of the charging power supply; and a rectifying circuit for rectifying an output of the inverter to return to a DC capacitor of the charging power supply.