JP4566107B2 - Adhesive force / thickness measuring apparatus and measuring method thereof - Google Patents

Description

  The present invention relates to an adhesive force / thickness measuring apparatus for measuring an adhesive force of an adhesive member such as a silicone rubber plate and a method for measuring the same.

  Conventionally, for example, when a raw tire is manufactured by wrapping an unvulcanized rubber sheet around a tire part, the adhesive strength of the unvulcanized rubber sheet affects workability and subsequent quality. It is important that the uncured rubber sheet is cut out for each predetermined lot, etc., to prepare a measurement object for measuring the adhesive strength, and measure the adhesive strength of the measurement object. Had gone.

  As an apparatus for measuring the adhesive strength in this case, for example, it can be gripped with a hand capable of measuring the pressing force and tensile force for measuring the adhesive strength of unvulcanized rubber of various unvulcanized rubber sheets in the production of raw tires. A small portable adhesive force measuring device (for example, Handy Force Gauge HF series manufactured by Nihon Keisoku System Co., Ltd.) has been used (see Patent Document 1).

  As shown in FIG. 6, the adhesive force measurement using this portable adhesive force measuring device is performed by using a disk-shaped adhesive force measuring contact terminal at the tip of the shaft 102 protruding from the adhesive force measuring device main body 100. 104 is attached, and this adhesive force measuring contact terminal 104 is pressed against the unvulcanized rubber sheet 106 to be measured in parallel with a predetermined load, and then the unvulcanized rubber is held while holding the handy force gauge body 100 by hand. The sheet slowly moved in the direction away from the sheet 106 (see FIG. 7A), and the tensile load at the moment when the contact terminal 104 for measuring adhesive force was separated from the unvulcanized rubber sheet 106 was read.

  However, in order to accurately measure the adhesive force, it is necessary to move while keeping the contact surface of the contact terminal 104 for measuring the adhesive force parallel to the surface of the unvulcanized rubber sheet 106, as shown in FIG. As described above, there is a problem in that the measured value greatly fluctuates when pulled obliquely with respect to the measurement surface of the unvulcanized rubber sheet 106, so that it is difficult even for a skilled person to measure an accurate adhesive force.

Therefore, the method of measuring the adhesive force using a portable adhesive force measuring device is only used as a confirmation work at the person-in-charge level, and does not depend on the skill level of the measurer in actual quality control. A fixed-type large-sized adhesive force measuring device has been used, but the conventional fixed-type adhesive force measuring device has a large facility, and has a problem that the operation is troublesome and the equipment cost is high.
JP 2001-159598 A

  Therefore, the present invention solves the problems of the conventional portable adhesive force measuring device and the fixed adhesive force measuring device, is easy to measure, and can accurately measure the adhesive force in a short time. It is an object of the present invention to provide an adhesive force / thickness measuring device and a measuring method thereof.

  In order to realize the above-described problems, the invention according to claim 1 is configured such that the contact terminal that contacts the surface of the object to be measured placed on the base is at an arbitrary position on a plane parallel to the surface of the object to be measured. Adhesive force measuring device comprising: movable XY axial direction driving means; and measuring means for measuring the pressing force and tensile force that the object to be measured acts on the contact terminals by moving the contact terminals in the vertical direction. And the said XY axial direction drive means is equipped with the non-contact-type thickness measuring apparatus which irradiates the laser beam to the surface of the said to-be-measured object of the location where the said contact terminal contacts, and measures the thickness of to-be-measured object It is characterized by having.

  In addition to the configuration of claim 1, the invention according to claim 2 is a Z-axis direction driving means for raising and lowering the contact terminal in a vertical direction, and the contact terminal is raised and lowered under a preset condition. Control means for supplying a control signal to the Z-axis direction driving means, a sensor coupled to the contact terminal for detecting stress applied to the contact terminal, and a detection signal from the sensor Data processing means for displaying on a display device a list of measured values of pressing force and tensile force acting on the contact terminals at a plurality of measurement points with respect to the object to be measured, and measured values of thickness. It is said.

  The invention according to claim 3 is the structure according to claim 1 or 2, wherein the object to be measured is adhesively fixed to a sample plate that can be adsorbed by magnetic force or vacuum force. Is characterized in that it is equipped with a suction fixing device having switching means capable of generating or eliminating the suction force on the surface.

  According to a fourth aspect of the present invention, the contact terminal for contacting the surface of the object to be measured placed on the substrate is moved to an arbitrary position on a plane parallel to the surface of the object to be measured. Adhesive force / thickness measurement provided with possible XY axis direction driving means and measuring means for measuring the pressing force and tensile force that the object to be measured acts on the contact terminals by moving the contact terminals in the vertical direction A measuring method using an apparatus, wherein the contact terminal is brought into contact with the object to be measured and the thickness thereof is measured, and the contact terminal is placed at the position at which the thickness of the object to be measured is measured. Measuring a stress generated in the contact terminal when pushed to the side and applying a predetermined pressure, and measuring a stress generated in the contact terminal when the contact terminal is pulled up from the object to be measured. It is characterized by.

  According to a fifth aspect of the present invention, in addition to the configuration according to the fourth aspect, a non-contact type thickness measuring device that measures the thickness of the object to be measured by irradiating the XY axis direction driving means with a laser beam. And measuring the thickness of the object to be measured by irradiating the surface of the object to be measured where the contact terminal contacts with the laser beam emitted from the non-contact type thickness measuring device. Yes.

  Since the present invention has the above-described configuration, according to the first aspect of the present invention, the contact terminal is moved in the vertical direction after being moved to an arbitrary position on the surface of the object to be measured by the XY axial direction driving means. By doing so, it is possible to measure the pressing force and tensile force that the object to be measured acts on the contact terminal. In addition, since the surface of the contact terminal can move in a state parallel to the surface of the object to be measured, the pressing force and the tensile force that the object to be measured acts on the contact terminal can be accurately measured. Further, the XY axial direction driving means is provided with non-contact type thickness measuring means for measuring the thickness of the object to be measured by irradiating the surface of the object to be measured where the contact terminal contacts with the laser beam. In addition to measuring the adhesive strength of the measurement object, the thickness of the measurement object can be measured simultaneously. Moreover, since the thickness of the object to be measured is a non-contact type in which the thickness of the object to be measured is measured by irradiating a laser beam, there is no need to bring the contact terminal into contact with the surface of the object to be measured. Contact pressure is not applied to the object to be measured, and an accurate thickness can be measured for an adhesive member having elasticity.

  According to the second aspect of the present invention, the measured values of the pressing force and the tensile force and the measured values of the thickness acting on the contact terminals at a plurality of measurement points with respect to one object to be measured are sequentially displayed on the display device. In addition to the effect of the invention of claim 1, since the variation of a plurality of measured values can be sequentially confirmed, the measurement work due to poor installation of the object to be measured or other unforeseen accident can be detected at an early stage and the measurement operation can be interrupted. Therefore, it is possible to prevent unnecessary measurement work from occurring. In addition, using the data that lists the measured values of pressing force and tensile force and the measured values of thickness, statistical processing of these measured values can be easily performed using existing spreadsheet software, etc. Test materials such as reports can be created quickly.

  According to the invention described in claim 3, the object to be measured is adhesively fixed to a sample plate that can be adsorbed by magnetic force or vacuum force, and the substrate generates or adsorbs an adsorbing force on its surface. And a suction fixing device having a switching means capable of generating an adsorption force or erasing the adsorption force. In addition to the effects of the invention, when fixing the object to be measured to the substrate, a sample plate on which the object to be measured is fixed is placed on the substrate to generate an adsorption force on the surface of the substrate, and the object to be measured is removed from the substrate. When removing the sample plate, the adsorption force on the surface of the substrate is erased, and then the sample plate to which the object to be measured is adhered and fixed is lifted from the substrate. Therefore, since only the means for switching the generation / deletion of adsorption force is required for fixing and detaching the object to be measured, no adjustment work is required, such as when using a mechanical clamp. be able to.

  According to the invention described in claim 4, immediately after the contact terminal is brought into contact with the object to be measured and the thickness thereof is measured, the contact terminal is pushed into the object to be measured at the position where the thickness of the object to be measured is measured. Since the stress generated in the contact terminal is measured when the contact terminal is pulled up from the object to be measured after applying a predetermined pressure, the thickness of the object to be measured is measured by bringing the contact terminal into contact with the surface of the object to be measured. And measuring the adhesive force of the object to be measured from the pressing force and tensile force acting on the contact terminal is executed as a one-cycle measurement operation at the same measurement point. There is no need to use XY axial direction drive means between the measurement of adhesive force and the measurement of thickness. Therefore, the coordinate of the measurement point does not shift when measuring the adhesive force and thickness at the same measurement point. Therefore, even when it is necessary to measure the adhesive strength and thickness at a plurality of locations, quick and accurate measurement is possible.

  According to the fifth aspect of the present invention, the non-contact type thickness measuring device that measures the thickness of the object to be measured by irradiating the surface of the object to be measured where the contact terminal is in contact with the laser beam is provided in the XY axial direction driving means. Since the thickness of the object to be measured is measured by irradiating the surface of the object to be measured where the contact terminal comes into contact with the laser beam, in addition to the effect of the invention of claim 4, the contact Since it is not necessary to bring the terminal into contact with the surface of the object to be measured, no contact pressure is applied to the object to be measured at the time of measurement, and it becomes possible to measure an accurate thickness with respect to the adhesive member having elasticity, The measurement value of the thickness by the laser beam has the property that it is larger than the thickness value measured by bringing the contact terminal into contact with the object to be measured, so if there is a measurement point that has the opposite relationship, the measurement point The thickness value in By not to use, it increases reliability of the measurement value of the thickness.

Embodiment 1 of the Invention
Embodiment 1 of the present invention will be described below with reference to the drawings.

  FIG. 1 is a perspective view showing an adhesive force / thickness measuring apparatus according to Embodiment 1 of the present invention, and FIG. 2 is a contact terminal and an object to be measured of the adhesive force / thickness measuring apparatus according to Embodiment 1 of the present invention. It is principal part sectional drawing which showed the contact state with the thing.

  In FIG. 1, reference numeral 1 denotes an adhesive force / thickness measurement apparatus according to Embodiment 1 of the present invention, which has a surface plate 3 that is horizontally installed on a base 2 and has rigidity. A base 5 having a smooth surface on which the object to be measured 4 is placed is provided at the center of the surface plate 3. In the first embodiment, an electromagnet adsorption fixing device (trade name: electromagnetic chuck, KET-1530B, manufactured by Kanetech Co., Ltd.) having switching means capable of generating or erasing magnetic force on the surface of the substrate 5 is used. Adopted. On the other hand, the object to be measured 4 is an adhesive fixed to a stainless steel sample plate 6 that can be adsorbed by magnetic force, so that generation and erasure of magnetic force can be realized by electrical switching means of the magnetic adsorption device. The operation of fixing the device under test 4 to the base 5 and the operation of removing the device under test 4 from the base 5 are facilitated.

  Here, as the first embodiment, description has been given of the case where the magnetic force of the electromagnet is used for the adsorption fixing device, but the present invention is not limited to this, and may be a vacuum chuck using a vacuum force applying atmospheric pressure. . Since a non-magnetic material can be adsorbed with a vacuum chuck, the measurement object 4 made of a resin material can be directly fixed to the substrate 5. Furthermore, if a porous ceramic vacuum chuck is used, it has a micron-sized pore size, so even if the object to be measured 4 is a thin object such as a film, it is uniformly adsorbed and fixed on the substrate 5 without deformation. Is possible.

  The surface plate 3 has XY-axis direction driving means 7 that can move in any direction within a plane parallel to the surface of the base 5. The XY-axis direction driving means 7 is mounted on the surface plate 3 in a state where the X-axis guide rail 8 for guiding the X-axis direction (left-right direction) is horizontally supported by the left and right support columns 9 and 10 at a position behind the base 5. It is fixed. The right corner on the front side of the surface plate 3 is provided with a touch panel key 11 that can set measurement conditions and operation conditions at the height of the human eye, a numerical display unit 12 that can check the set measurement conditions, and the like. A control monitor 13 is attached.

  The X-axis guide rail 8 is provided with an X-direction slider 14 having a drive device (not shown) that can freely move the X-axis guide rail 8. The X-direction slider 14 is orthogonal to the X-axis guide rail 8. A Y-axis guide rail 15 for guiding the Y-axis direction (front-rear direction) is provided. That is, one end of the Y-axis guide rail 15 is fixed to the X-direction slider 11, and a movable support 16 extending vertically downward is fixed to the other end of the Y-axis guide rail 15. The X-direction slider 11 is movable in the X-axis direction while 15 is supported horizontally. An auxiliary slider 18 that is movable on an auxiliary X-axis guide rail 17 that is directly fixed to the surface plate 3 is provided at the lower end of the movable column 16.

  The X-axis guide rail 15 is mounted on the base 5 by the X-axis direction driving device in which the X-axis guide rail 8, the X-direction slider 14, the Y-axis guide rail 15, the movable support column 16, and the auxiliary X-axis guide rail 17 are combined. Can be positioned at any position in the X-axis direction within a plane parallel to the surface of the substrate.

  The Y-axis guide rail 15 is provided with a Y-direction slider 19 provided with a drive device (not shown) that can freely move the Y-axis guide rail 15. Thereby, the Y-axis direction drive device which can position the Y-direction slider 19 at an arbitrary position in the Y-axis direction within a plane parallel to the surface of the substrate 5 is completed.

  An X-axis direction driving device capable of positioning the Y-axis guide rail 15 at an arbitrary position in the X-axis direction in a plane parallel to the surface of the base 5 and a Y-direction slider 19 in a plane parallel to the surface of the base 5 The Y-direction slider 19 is positioned at any position in the X-axis and Y-axis directions in a plane parallel to the surface of the substrate 5 by the Y-axis direction drive device that can be positioned at any position in the Y-axis direction. The XY axial direction drive means 7 that can do this is completed.

  A Z-axis guide rail 20 that guides the Z-axis direction (vertical direction) is fixed vertically to the Y-direction slider 19, and the Z-axis guide rail 20 can freely move the Z-axis guide rail 20. A Z-direction slider 21 having a not-shown) is provided. Thereby, the Z-axis direction drive device which can position the Z-direction slider 21 at an arbitrary position in the Z-axis direction within a plane perpendicular to the surface of the substrate 5 is completed.

  An adhesive force measuring device 23 having a contact terminal 22 and a non-contact type thickness measuring device 24 using a laser beam are fixed to the Z-direction slider 21.

  In the first embodiment, the adhesive force measuring device 23 employs a digital force gauge (trade name: ZP-50N, manufactured by Imada Co., Ltd.) capable of measuring tension and compression uniaxially and digitally displaying the measurement results. The contact terminal 22 is made of stainless steel having a cylindrical shape with a diameter of 10 mm.

The adhesive force measuring device 23 is capable of measuring the pressing force when the contact terminal 22 is pressed against the surface of the device under test 4 and the tensile force when pulling the contact terminal 22 away from the surface of the device under test 4. Furthermore, the thickness of the DUT 4 can be measured from the difference from the surface of the sample plate 6 by bringing the contact terminal 22 into contact with the surface of the DUT 4.

  In the digital force gauge employed in the first embodiment as the adhesive force measuring device 23, the contact terminal 22 and a sensor built in the adhesive force measuring device 23 are directly connected. A buffer member may be interposed between the sensor and the sensor built in the adhesive force measuring device 23. In the case where the buffer member is interposed, it is possible to give a time delay until the load is applied to the sensor after the contact terminal 22 is brought into contact with the surface of the object 4 to be measured. Since the load can be prevented from working, the safe use of the adhesive force measuring device 23 is guaranteed.

  The non-contact type thickness measuring device 24 using laser light can average irregular reflection due to fine surface irregularities of the object to be measured 4 to prevent variation in data, and can also sense the amount of laser light by sensing the surface of the object to be measured 4. A high-speed, high-precision CCD laser displacement meter (trade name: LK-G35, manufactured by Keyence Corporation) can be used. For this reason, practical measurement is possible even for transparent and translucent objects to be measured 4 that were not good at laser measurement, which is optimal for measuring the thickness of materials such as silicone rubber. I can say that.

  When measuring the thickness and adhesive strength of the object 4 to be measured by the adhesive force measuring device 23, the center of the contact terminal 22 of the adhesive force measuring device 23 is the measurement point 25 on the surface of the object 4 to be measured as shown in FIG. In this case, the laser beam 26 emitted from the non-contact type thickness measuring device 24 is also subjected to the object corresponding to the center of the contact terminal 22 of the adhesive force measuring device 23. Adjustment is made in advance so that the measurement point 25 on the surface of the measurement object 4 is irradiated.

  FIG. 3 is a block diagram showing a system configuration of the adhesive force / thickness measuring apparatus according to Embodiment 1 of the present invention.

  The adhesive force / thickness measuring apparatus 1 is provided with an X-axis stepping motor 27 as a drive source for the X-direction slider 14 to move freely along the X-axis guide rail 8. In addition, a ball screw (not shown) incorporated in a rotatable state on the X-axis guide rail 8 is connected to the rotation shaft of the X-axis stepping motor 27 and cannot rotate on the X-direction slider 14. A screw member (not shown) incorporated in a state is screwed together. Thus, when the X-axis stepping motor 27 rotates, the screw member attached to the X-direction slider 14 moves in the axial direction of the ball screw due to the rotation of the ball screw. The X-direction slider 14 can move in the axial direction of the X-axis guide rail 8 according to the rotation amount of the motor 27.

  Further, the adhesive force / thickness measuring apparatus 1 is provided with a Y-axis stepping motor 28 as a drive source for the Y-direction slider 19 to freely move on the Y-axis guide rail 15. A ball screw (not shown) rotatably connected to the Y-axis guide rail 15 is connected to the rotation shaft of the Y-axis stepping motor 28 and is rotatably integrated to the Y-direction slider 19. A screw member (not shown) is screwed together. As a result, when the Y-axis stepping motor 28 rotates, the screw member attached to the Y-direction slider 19 moves in the axial direction of the ball screw in a non-rotatable state due to the rotation of the ball screw. The Y-direction slider 19 can move in the axial direction of the Y-axis guide rail 15 according to the rotation amount of the Y-axis stepping motor 28.

  Further, the adhesive force / thickness measuring apparatus 1 is provided with a Y-axis stepping motor 29 as a drive source for the Z-direction slider 22 to move freely along the Z-axis guide rail 20. On the rotation axis of the Z-axis stepping motor 29, a ball screw (not shown) rotatably incorporated in the Z-axis guide rail 20 and a screw member (not shown) incorporated non-rotatably in the Z-direction slider 22 are provided. Are screwed together. Thus, when the Z-axis stepping motor 29 rotates, the screw member attached to the Z-direction slider 22 moves in the axial direction of the ball screw in a non-rotatable state due to the rotation of the ball screw. The Z-direction slider 22 can move in the axial direction of the Z-axis guide rail 20 according to the rotation amount of the Z-axis stepping motor 29.

  The stress applied to the tip of the contact terminal 22 of the adhesive force measuring device 23 is detected by a sensor built in the adhesive force measuring device 23, and the stress signal is supplied to the microcomputer 30. The stress signal supplied to the microcomputer 30 is converted into a digital signal via an amplifier and an A / D converter, and is connected to the liquid crystal display device 31 and the microcomputer 30 provided in the adhesive force measuring device 23. Displayed on the display 33 connected to the control monitor 13 and the personal computer 32 as numerical data.

  The stress signal is converted into a digital signal suitable for the specification of the display device via an amplifier and an A / D converter. The amplifier and the A / D converter are connected to either the adhesive force measuring device 23 or the microcomputer 30. It may be incorporated.

  Hereinafter, a method of using the adhesive force / thickness measuring apparatus according to Embodiment 1 of the present invention will be described with reference to the drawings.

  FIG. 4 is an example of an automatic setting screen of a control monitor which is a part of the adhesive force / thickness measuring apparatus according to Embodiment 1 of the present invention. FIG. 5 is an example of an automatic operation screen of a control monitor which is a part of the adhesive force / thickness measuring apparatus according to Embodiment 1 of the present invention.

  The object to be measured 4 is one that is adhesively fixed to a stainless steel sample plate 6 that is attracted to a square magnet that is slightly larger than the object to be measured 4.

  The sample plate 6 of the first embodiment has a square planar shape, 110 mm long, 110 mm wide, and 0.8 mm thick, and the DUT 4 has a rectangular planar shape, 90 mm long, 100 mm wide, 1.8 mm thick. is there. The measurement points 25 are 9 points with an X-axis direction pitch of 32 mm and a Y-axis direction pitch of 35 mm. The measurement environment includes a temperature of 20 ° C. (actual measurement value: 19 to 23 ° C.) and a humidity of 50% (actual measurement value: 40 to 40%). 60%).

  First, an L-shaped positioning gauge (not shown) in which two adjacent sides of the four sides of the sample plate 6 to which the object to be measured 4 is adhesively fixed is fixed in advance to a predetermined position of the substrate 5. The sample plate 6 is fixed to the substrate 5 by the magnetic force by moving the magnetic adsorption device using the electromagnet of the substrate 5.

  Next, before measuring the adhesive force and thickness of the DUT 4, the zero point in the Z-axis direction is set by bringing the tip of the contact terminal 22 of the adhesion measuring device 23 into contact with the surface of the sample plate 6. Similarly, for the non-contact type thickness measuring device 24, the zero point in the Z-axis direction is set by irradiating the surface of the sample plate 6 with laser light.

  At the initial stage where the adhesive force / thickness measuring apparatus 1 is moved, the control monitor 13 displays an automatic setting screen G1 as shown in FIG.

  Therefore, in order to measure the adhesive force, the contact terminal 22 of the adhesive force measuring device 23 is brought into contact with the surface of the object 4 to be measured, and is pushed and pulled away. By operating the touch panel key 11, the X-axis direction numerical value (mm) and the Y-axis direction numerical value (mm) for determining the measurement position of the DUT 4, the number of times of measurement (times), the measurement interval (minutes), Z Measurement conditions such as a numerical value (mm / min) of a measurement descending speed of the direction slider 21, a numerical value (mm / min) of a measuring upward speed, and a stop time (sec) are input.

  Since the numerical value input by the touch panel key 11 of the control monitor 13 can be confirmed by the numerical value display unit 12 on the control monitor 13, if the displayed numerical value is correct, the data of the input measurement condition is stored in the microcomputer 30. Let

  When starting the measurement, by pressing the touch panel key 11 for starting the measurement, a control signal corresponding to the measurement conditions already stored from the microcomputer 30 is sent to the adhesive force / thickness measuring apparatus 1 to perform a desired measurement. Automatically perform actions according to conditions.

  Based on the measurement condition data stored in the microcomputer 30, a motor control signal corresponding to the measurement condition input from the microcomputer 30 to the motor driver 34 is supplied, and the drive signal from the motor driver 34 is the X axis. Are supplied to the stepping motor 27, the Y-axis stepping motor 28, and the Z-axis stepping motor 29. The X-direction stepping motor 27 causes the X-direction slider 14 to move along the X-axis guide rail 8, and the Y-axis stepping motor 28 causes the Y-direction slider 19 to move along the Y-axis guide rail 15. The Z-axis stepping motor 29 moves the Z-direction slider 22 along the Z-axis guide rail 20 to move the contact terminal 22 of the adhesive force measuring device 23 up and down.

  First, the contact terminal 22 is pressed against the object 4 to be measured, and the state is maintained for a predetermined time. Next, the contact terminal 22 is pulled up, and in this process, the output of the sensor built in the adhesive force measuring device 23 is output. Changes are measured. The force when the contact terminal 22 is pressed is also controlled so that the microcomputer 30 receives a stress signal from a sensor built in the adhesive force measuring device 23 and presses it with a set value. The above operation is repeated for the number of measurement points 25 (9 points).

  Specifically, the contact terminal 22 is slowly moved toward the surface of the object to be measured 4 (20 mm / min between 1 mm from the surface of the object to be measured 4) and the measured pressure value of the control monitor 13 is confirmed. However, the contact terminal 22 is pressed against the surface of the measured object 4 with a predetermined pressing force (200 g for weak adhesion (adhesion strength 1.2 kg) and 2 kg for strong adhesion (adhesion strength 2.7 kg)). And maintained for a predetermined time (3 seconds).

  When a predetermined pressing time has elapsed, the contact terminal 22 is slowly moved at a constant speed (180 mm / min between 1 mm from the surface of the object to be measured 4) in a direction away from the object to be measured 4 from the surface of the object to be measured 4. Then, the tensile force at the moment when the contact terminal 22 is peeled off from the surface of the object to be measured 4 is measured by a sensor built in the adhesive force measuring device 23. And let the tensile force at this time be adhesive force.

  As a result of automatic operation in which a desired measurement operation is performed, a stress signal acting on the contact terminal 22 measured by a sensor built in the adhesive force measuring device 23 is converted into a digital signal by the adhesive force measuring device 23 and / or the microcomputer 30. On the automatic operation screen G2 (see FIG. 5), the pressure value, the tensile force value, and the thickness value are displayed on the liquid crystal display device 31 and the control monitor 13 provided in the adhesive force measuring device 23. And the number 33 corresponding to the number of measurement points corresponding to the value of the XY coordinate position of the measurement point 25 on the display 33 of the personal computer 32 connected to the adhesive force measuring device 23. A list of numerical data is displayed. The non-contact type thickness measuring device 24 is not provided with a display device, and the numerical value of the thickness of the object 4 measured by the non-contact type thickness measuring device 24 is displayed on the control monitor 13 and non-contacted. A list of numerical data corresponding to the number of measurement points is displayed on the display 33 of the personal computer 32 connected to the expression thickness measuring device 24 in correspondence with the value of the XY coordinate position of the measurement point 25.

  Usually, the measurement under the same condition is repeated several times to several tens of times for one object to be measured 4, and the obtained data is statistically processed and used as adhesive force data. Obtaining the average value from the measured values and multiple measured values can be easily achieved by using general spreadsheet software installed in the personal computer 32, so that the test data can be easily organized and the test report Can be created quickly.

  In the first embodiment, a mechanism is adopted in which the contact terminal 22 of the adhesive force measuring device 23 moves in the Z-axis direction when the Z-direction slider 21 moves on the Z-axis guide rail 20 by the Z-axis stepping motor 29. However, the present invention is not limited to this, and the Z-axis direction driving means using the Z-axis guide rail 20 and the Z-direction slider 22 is not adopted, and the adhesive force measuring device is applied to the Y-direction slider 19 of the XY-axis direction driving means 7. The contact terminal 22 of the adhesive force measuring device 23 may be moved in the Z-axis direction by directly fixing the head 23 and moving up and down the base 5 side.

It is the perspective view which showed the adhesive force and thickness measuring apparatus which concerns on Embodiment 1 of this invention. It is principal part sectional drawing which showed the contact state of the contact terminal and to-be-measured object of the adhesive force and thickness measuring apparatus which concerns on the same Embodiment 1, (a) shows the state which the contact terminal contacted, (b) Indicates a state in which the contact terminal is pulled up. It is a block diagram which shows the system configuration | structure of the adhesive force and thickness measuring apparatus which concerns on the same Embodiment 1. FIG. It is an example of the automatic setting screen of the control monitor which is a part of the adhesive force and thickness measuring apparatus according to the first embodiment. It is an example of the automatic operation screen of the control monitor which is a part of the adhesive force and thickness measuring apparatus which concerns on the same Embodiment 1. FIG. It is a perspective view of the conventional portable adhesive force measuring apparatus. It is principal part sectional drawing which showed the state which pulls up the contact terminal of the portable adhesive force measuring apparatus from a to-be-measured object, (a) shows the contact state which pulls up a contact terminal perpendicularly from a to-be-measured object, (b) Indicates a contact state in which the contact terminal is lifted obliquely from the object to be measured.

Explanation of symbols

1 Adhesive strength and thickness measuring device 3 Surface plate
4 DUT 5 Base
6 Sample plate 7 XY-axis direction driving means 8 X-axis guide rail 13 Control monitor 14 X-direction slider 15 Y-axis guide rail 19 Y-direction slider 20 Z-axis guide rail 21 Z-direction slider 22 Contact terminal 23 Adhesive force measuring device 24 Non-contact Type thickness measuring device 25 Measuring point 27 X-axis stepping motor 28 Y-axis stepping motor 29 Z-axis stepping motor 30 Microcomputer 32 Personal computer 33 Display 34 Motor driver

Claims (5)

XY axis direction driving means capable of moving a contact terminal to be brought into contact with the surface of the object to be measured placed on the substrate to an arbitrary position on a plane parallel to the surface of the object to be measured, and the contact terminal to be moved in the vertical direction A measuring means for measuring a pressing force and a tensile force acting on the contact terminal by the object to be measured, wherein the contact terminal is in contact with the XY axial direction driving means. An adhesive force / thickness measuring apparatus comprising a non-contact type thickness measuring apparatus that measures the thickness of the object to be measured by irradiating the surface of the object to be measured at a place to be measured. Z-axis direction drive means for raising and lowering the contact terminal in the vertical direction; and control means for supplying a control signal to the Z-axis direction drive means so that the contact terminal is raised and lowered under a preset condition. A sensor coupled to the contact terminal for detecting stress applied to the contact terminal, and a detection signal from the sensor is processed to act on the contact terminal at a plurality of measurement points for one object to be measured. 2. The adhesive force / thickness measuring device according to claim 1, further comprising data processing means for displaying a list of measured values of pressing force and tensile force and measured values of thickness on a display device. The object to be measured is adhesively fixed to a sample plate that can be adsorbed by a magnetic force or a vacuum force, and the substrate has a switching means that can generate an adsorption force on the surface or erase the adsorption force. The adhesive force / thickness measuring device according to claim 1, further comprising an adsorption fixing device having the adhesive fixing device. XY axis direction driving means capable of moving a contact terminal to be brought into contact with the surface of the object to be measured placed on the substrate to an arbitrary position on a plane parallel to the surface of the object to be measured, and the contact terminal to be moved in the vertical direction A measuring method using an adhesive force / thickness measuring device provided with a measuring means for measuring a pressing force and a tensile force acting on the contact terminal by the measured object, the contact terminal being measured It occurs in the contact terminal when a predetermined pressure is applied by pressing the contact terminal toward the object to be measured at the position where the object is brought into contact with the object and measuring the thickness of the object to be measured. A method for measuring adhesive force and thickness, comprising: a step of measuring stress; and a step of measuring stress generated in the contact terminal when the contact terminal is pulled up from the object to be measured. The XY axis direction driving means includes a non-contact type thickness measuring device that measures the thickness of the object to be measured by irradiating the laser beam, and the laser light emitted from the non-contact type thickness measuring device is used as the contact terminal. 5. The method of measuring adhesive force / thickness according to claim 4, wherein the thickness of the object to be measured is measured by irradiating the surface of the object to be measured at a place where the object contacts.

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