JP4555900B2 - 試料の光学測定を行う方法 - Google Patents
試料の光学測定を行う方法 Download PDFInfo
- Publication number
- JP4555900B2 JP4555900B2 JP2006502763A JP2006502763A JP4555900B2 JP 4555900 B2 JP4555900 B2 JP 4555900B2 JP 2006502763 A JP2006502763 A JP 2006502763A JP 2006502763 A JP2006502763 A JP 2006502763A JP 4555900 B2 JP4555900 B2 JP 4555900B2
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- JP
- Japan
- Prior art keywords
- modulation signal
- ccd
- modulator
- signal
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 49
- 238000005259 measurement Methods 0.000 title description 51
- 230000003287 optical effect Effects 0.000 title description 10
- 238000001514 detection method Methods 0.000 claims description 27
- 238000005286 illumination Methods 0.000 claims description 11
- 238000012545 processing Methods 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000011664 signaling Effects 0.000 claims 1
- 230000001427 coherent effect Effects 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 230000005855 radiation Effects 0.000 description 9
- 230000010363 phase shift Effects 0.000 description 7
- 230000003595 spectral effect Effects 0.000 description 6
- 238000001228 spectrum Methods 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 230000010354 integration Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000000572 ellipsometry Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
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- 238000013461 design Methods 0.000 description 2
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- 238000004904 shortening Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000005374 Kerr effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NZ52393703 | 2003-02-03 | ||
| NZ52751603 | 2003-08-12 | ||
| PCT/NZ2004/000010 WO2004070365A1 (fr) | 2003-02-03 | 2004-01-29 | Procede permettant d'effecteur une mesure optique sur un echantillon |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006516731A JP2006516731A (ja) | 2006-07-06 |
| JP4555900B2 true JP4555900B2 (ja) | 2010-10-06 |
Family
ID=32852814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006502763A Expired - Lifetime JP4555900B2 (ja) | 2003-02-03 | 2004-01-29 | 試料の光学測定を行う方法 |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP1595135A4 (fr) |
| JP (1) | JP4555900B2 (fr) |
| WO (1) | WO2004070365A1 (fr) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007046943A (ja) * | 2005-08-08 | 2007-02-22 | Tokyo Univ Of Agriculture & Technology | 観測装置、観測方法、ファラデー回転角測定方法、ファラデー楕円率測定方法、カー回転角測定方法及びカー楕円率測定方法 |
| JP5396572B2 (ja) * | 2008-04-04 | 2014-01-22 | システム・インスツルメンツ株式会社 | 円二色性スペクトルの測定方法及び測定装置 |
| WO2010060454A1 (fr) * | 2008-11-03 | 2010-06-03 | Institut De Ciencies Fotoniques, Fundacio Privada | Dispositif permettant de déterminer une distribution d’anisotropie à polarisation de fluorescence en temps réel et procédure associée permettant de mesurer en temps réel une distribution de température dans un milieu fluide |
| JP2010223822A (ja) * | 2009-03-24 | 2010-10-07 | Dainippon Screen Mfg Co Ltd | 分光エリプソメータおよび偏光解析方法 |
| CN105637345B (zh) | 2013-05-23 | 2018-06-12 | 海因兹仪器公司 | 偏振性质成像系统 |
| CN115597503B (zh) * | 2022-12-12 | 2023-03-28 | 睿励科学仪器（上海）有限公司 | 基于脉冲激光的椭偏量测装置及相关的光操作方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3404396A1 (de) * | 1984-02-08 | 1985-08-14 | Dornier Gmbh, 7990 Friedrichshafen | Vorrichtung und verfahren zur aufnahme von entfernungsbildern |
| FR2664048B1 (fr) * | 1990-06-29 | 1993-08-20 | Centre Nat Rech Scient | Procede et dispositif de detection analogique multicanal. |
| US5501637A (en) * | 1993-08-10 | 1996-03-26 | Texas Instruments Incorporated | Temperature sensor and method |
| FR2737572B1 (fr) * | 1995-08-03 | 1997-10-24 | Centre Nat Rech Scient | Ellipsometre multi-detecteurs et procede de mesure ellipsometrique multi-detecteurs |
-
2004
- 2004-01-29 JP JP2006502763A patent/JP4555900B2/ja not_active Expired - Lifetime
- 2004-01-29 EP EP04706394A patent/EP1595135A4/fr not_active Withdrawn
- 2004-01-29 WO PCT/NZ2004/000010 patent/WO2004070365A1/fr active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2004070365A1 (fr) | 2004-08-19 |
| EP1595135A1 (fr) | 2005-11-16 |
| JP2006516731A (ja) | 2006-07-06 |
| EP1595135A4 (fr) | 2007-04-11 |
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