JP4546684B2 - レーザビームの強度プロファイルを形成する方法および装置 - Google Patents

レーザビームの強度プロファイルを形成する方法および装置 Download PDF

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Publication number
JP4546684B2
JP4546684B2 JP2001510036A JP2001510036A JP4546684B2 JP 4546684 B2 JP4546684 B2 JP 4546684B2 JP 2001510036 A JP2001510036 A JP 2001510036A JP 2001510036 A JP2001510036 A JP 2001510036A JP 4546684 B2 JP4546684 B2 JP 4546684B2
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Japan
Prior art keywords
oaslm
intensity
local
laser beam
reflection
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JP2001510036A
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English (en)
Japanese (ja)
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JP2003504688A (ja
JP2003504688A5 (enExample
Inventor
ドゥルツ，ヴォルフガング
ベレスネヴ，レオニド
ヒルド，ローゼマリー
ヒルス，ベルンハルド
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ドイッチェ テレコム アーゲー
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/135—Liquid crystal cells structurally associated with a photoconducting or a ferro-electric layer, the properties of which can be optically or electrically varied
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/13306—Circuit arrangements or driving methods for the control of single liquid crystal cells
    • G02F1/13318—Circuits comprising a photodetector
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/12—Function characteristic spatial light modulator
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/18—Function characteristic adaptive optics, e.g. wavefront correction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Liquid Crystal (AREA)
  • Lasers (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
JP2001510036A 1999-07-09 2000-06-10 レーザビームの強度プロファイルを形成する方法および装置 Expired - Fee Related JP4546684B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19931989.8 1999-07-09
DE19931989A DE19931989A1 (de) 1999-07-09 1999-07-09 Verfahren und Vorrichtung zur Formung des Intensitätsprofils eines Laserstrahls
PCT/EP2000/005367 WO2001004685A1 (de) 1999-07-09 2000-06-10 Verfahren und vorrichtung zur formung des intensitätsprofils eines laserstrahls

Publications (3)

Publication Number Publication Date
JP2003504688A JP2003504688A (ja) 2003-02-04
JP2003504688A5 JP2003504688A5 (enExample) 2007-07-19
JP4546684B2 true JP4546684B2 (ja) 2010-09-15

Family

ID=7914178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001510036A Expired - Fee Related JP4546684B2 (ja) 1999-07-09 2000-06-10 レーザビームの強度プロファイルを形成する方法および装置

Country Status (6)

Country Link
US (1) US6952296B1 (enExample)
EP (1) EP1116064B1 (enExample)
JP (1) JP4546684B2 (enExample)
AT (1) ATE238571T1 (enExample)
DE (2) DE19931989A1 (enExample)
WO (1) WO2001004685A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10231969B4 (de) * 2002-07-15 2004-09-30 Siemens Ag Optisches Element zur Formung eines Lichtstrahls und Verfahren zum Bearbeiten von Objekten mittels Laserstrahlen
JP2004294756A (ja) * 2003-03-27 2004-10-21 Tdk Corp 空間光変調器及びホログラム記録再生装置
DE102004042670B4 (de) 2003-09-02 2018-07-12 CiS Forschungsinstitut für Mikrosensorik GmbH Mikrooptisches Strahler- und Empfängersystem
US7253933B1 (en) 2005-02-10 2007-08-07 Hrl Laboratories, Llc Apparatus and method for the temporal profiling of short laser pulses with thick Bragg gratings
US7088483B1 (en) 2005-02-10 2006-08-08 Hrl Laboratories, Llc Holographic spatial laser beam shaper and method
US10012544B2 (en) * 2016-11-29 2018-07-03 Cymer, Llc Homogenization of light beam for spectral feature metrology
DE102017203669B3 (de) 2017-03-07 2018-06-28 Robert Bosch Gmbh Verfahren und Vorrichtung zur Formung kohärenter Strahlung

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4632518A (en) * 1984-07-31 1986-12-30 Hughes Aircraft Company Phase insensitive optical logic gate device
US4926177A (en) * 1987-05-21 1990-05-15 Canon Kabushiki Kaisha Optical analog-digital converter provided with a nonlinear optical element and an optical feedback system for the output lights of said element
US4953937A (en) * 1988-05-17 1990-09-04 Olympus Optical Co., Ltd. Illumination optical system
JP2738724B2 (ja) * 1988-11-25 1998-04-08 松下電器産業株式会社 空間光変調素子及び神経ネットワーク回路
DE69026861T2 (de) * 1989-03-23 1996-11-14 Victor Company Of Japan Element zur Lichtumwandlung und eine Abbildungsvorrichtung
US5073010A (en) * 1990-05-11 1991-12-17 University Of Colorado Foundation, Inc. Optically addressable spatial light modulator having a distorted helix ferroelectric liquid crystal member
US5835469A (en) * 1990-05-25 1998-11-10 Hitachi, Ltd. High-density information recording/reproducing method
US5528702A (en) * 1991-05-31 1996-06-18 Seiko Instruments Inc. Optical pattern recognition apparatus with coordinate conversion function
US5610733A (en) * 1994-02-28 1997-03-11 Digital Optics Corporation Beam-homogenizer
DE19616323A1 (de) * 1996-04-24 1997-10-30 Deutsche Telekom Ag Vorrichtung zur lokalen Abschwächung der Lichtintensität
US5986807A (en) * 1997-01-13 1999-11-16 Xerox Corporation Single binary optical element beam homogenizer

Also Published As

Publication number Publication date
WO2001004685A1 (de) 2001-01-18
JP2003504688A (ja) 2003-02-04
DE19931989A1 (de) 2001-01-11
US6952296B1 (en) 2005-10-04
EP1116064A1 (de) 2001-07-18
ATE238571T1 (de) 2003-05-15
DE50001853D1 (de) 2003-05-28
EP1116064B1 (de) 2003-04-23

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