ATE238571T1 - Verfahren und vorrichtung zur formung des intensitätsprofils eines laserstrahls - Google Patents
Verfahren und vorrichtung zur formung des intensitätsprofils eines laserstrahlsInfo
- Publication number
- ATE238571T1 ATE238571T1 AT00942048T AT00942048T ATE238571T1 AT E238571 T1 ATE238571 T1 AT E238571T1 AT 00942048 T AT00942048 T AT 00942048T AT 00942048 T AT00942048 T AT 00942048T AT E238571 T1 ATE238571 T1 AT E238571T1
- Authority
- AT
- Austria
- Prior art keywords
- laser beam
- intensity profile
- shaping
- present
- intensity
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000007493 shaping process Methods 0.000 title 1
- 238000005286 illumination Methods 0.000 abstract 1
- 230000005577 local transmission Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/135—Liquid crystal cells structurally associated with a photoconducting or a ferro-electric layer, the properties of which can be optically or electrically varied
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/13306—Circuit arrangements or driving methods for the control of single liquid crystal cells
- G02F1/13318—Circuits comprising a photodetector
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/12—Function characteristic spatial light modulator
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/18—Function characteristic adaptive optics, e.g. wavefront correction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Laser Beam Processing (AREA)
- Liquid Crystal (AREA)
- Lasers (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19931989A DE19931989A1 (de) | 1999-07-09 | 1999-07-09 | Verfahren und Vorrichtung zur Formung des Intensitätsprofils eines Laserstrahls |
| PCT/EP2000/005367 WO2001004685A1 (de) | 1999-07-09 | 2000-06-10 | Verfahren und vorrichtung zur formung des intensitätsprofils eines laserstrahls |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE238571T1 true ATE238571T1 (de) | 2003-05-15 |
Family
ID=7914178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT00942048T ATE238571T1 (de) | 1999-07-09 | 2000-06-10 | Verfahren und vorrichtung zur formung des intensitätsprofils eines laserstrahls |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6952296B1 (enExample) |
| EP (1) | EP1116064B1 (enExample) |
| JP (1) | JP4546684B2 (enExample) |
| AT (1) | ATE238571T1 (enExample) |
| DE (2) | DE19931989A1 (enExample) |
| WO (1) | WO2001004685A1 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10231969B4 (de) * | 2002-07-15 | 2004-09-30 | Siemens Ag | Optisches Element zur Formung eines Lichtstrahls und Verfahren zum Bearbeiten von Objekten mittels Laserstrahlen |
| JP2004294756A (ja) * | 2003-03-27 | 2004-10-21 | Tdk Corp | 空間光変調器及びホログラム記録再生装置 |
| DE102004042670B4 (de) | 2003-09-02 | 2018-07-12 | CiS Forschungsinstitut für Mikrosensorik GmbH | Mikrooptisches Strahler- und Empfängersystem |
| US7253933B1 (en) | 2005-02-10 | 2007-08-07 | Hrl Laboratories, Llc | Apparatus and method for the temporal profiling of short laser pulses with thick Bragg gratings |
| US7088483B1 (en) | 2005-02-10 | 2006-08-08 | Hrl Laboratories, Llc | Holographic spatial laser beam shaper and method |
| US10012544B2 (en) * | 2016-11-29 | 2018-07-03 | Cymer, Llc | Homogenization of light beam for spectral feature metrology |
| DE102017203669B3 (de) | 2017-03-07 | 2018-06-28 | Robert Bosch Gmbh | Verfahren und Vorrichtung zur Formung kohärenter Strahlung |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4632518A (en) * | 1984-07-31 | 1986-12-30 | Hughes Aircraft Company | Phase insensitive optical logic gate device |
| US4926177A (en) * | 1987-05-21 | 1990-05-15 | Canon Kabushiki Kaisha | Optical analog-digital converter provided with a nonlinear optical element and an optical feedback system for the output lights of said element |
| US4953937A (en) * | 1988-05-17 | 1990-09-04 | Olympus Optical Co., Ltd. | Illumination optical system |
| JP2738724B2 (ja) * | 1988-11-25 | 1998-04-08 | 松下電器産業株式会社 | 空間光変調素子及び神経ネットワーク回路 |
| DE69026861T2 (de) * | 1989-03-23 | 1996-11-14 | Victor Company Of Japan | Element zur Lichtumwandlung und eine Abbildungsvorrichtung |
| US5073010A (en) * | 1990-05-11 | 1991-12-17 | University Of Colorado Foundation, Inc. | Optically addressable spatial light modulator having a distorted helix ferroelectric liquid crystal member |
| US5835469A (en) * | 1990-05-25 | 1998-11-10 | Hitachi, Ltd. | High-density information recording/reproducing method |
| US5528702A (en) * | 1991-05-31 | 1996-06-18 | Seiko Instruments Inc. | Optical pattern recognition apparatus with coordinate conversion function |
| US5610733A (en) * | 1994-02-28 | 1997-03-11 | Digital Optics Corporation | Beam-homogenizer |
| DE19616323A1 (de) * | 1996-04-24 | 1997-10-30 | Deutsche Telekom Ag | Vorrichtung zur lokalen Abschwächung der Lichtintensität |
| US5986807A (en) * | 1997-01-13 | 1999-11-16 | Xerox Corporation | Single binary optical element beam homogenizer |
-
1999
- 1999-07-09 DE DE19931989A patent/DE19931989A1/de not_active Withdrawn
-
2000
- 2000-06-10 US US09/786,837 patent/US6952296B1/en not_active Expired - Fee Related
- 2000-06-10 DE DE50001853T patent/DE50001853D1/de not_active Expired - Lifetime
- 2000-06-10 JP JP2001510036A patent/JP4546684B2/ja not_active Expired - Fee Related
- 2000-06-10 AT AT00942048T patent/ATE238571T1/de not_active IP Right Cessation
- 2000-06-10 EP EP00942048A patent/EP1116064B1/de not_active Expired - Lifetime
- 2000-06-10 WO PCT/EP2000/005367 patent/WO2001004685A1/de not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO2001004685A1 (de) | 2001-01-18 |
| JP2003504688A (ja) | 2003-02-04 |
| DE19931989A1 (de) | 2001-01-11 |
| JP4546684B2 (ja) | 2010-09-15 |
| US6952296B1 (en) | 2005-10-04 |
| EP1116064A1 (de) | 2001-07-18 |
| DE50001853D1 (de) | 2003-05-28 |
| EP1116064B1 (de) | 2003-04-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| REN | Ceased due to non-payment of the annual fee |