JP4532562B2 - マスター基板および高密度凹凸構造を製造する方法 - Google Patents
マスター基板および高密度凹凸構造を製造する方法 Download PDFInfo
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Description
Claims (13)
- 基板層と、
該基板層の上部の、第1の記録層および第2の記録層と、
前記第1の記録層と前記第2の記録層の間の界面層と、
を有する光記録用のマスター基板であって、
前記両記録層は、相変化材料を有し、該相変化材料の化学物質に関する特性は、前記記録層に光を放射することにより生じる相変化によって変化し、
さらに、当該マスター基板は、該基板にエッチング形成された少なくとも一つのピットを有し、該ピットは、前記第1の記録層、前記界面層および前記第2の記録層を貫通して延在することを特徴とするマスター基板。 - 前記第2の記録層の下側に、界面層が設置されることを特徴とする請求項1に記載のマスター基板。
- n≧2として、n組の記録層および関連する界面層のスタックが提供されることを特徴とする請求項1に記載のマスター基板。
- 前記基板の上部に、直接ヒートシンク層が設置されることを特徴とする請求項1に記載のマスター基板。
- 前記第1の記録層の上部には、保護層が設置されることを特徴とする請求項1に記載のマスター基板。
- 前記第1および前記第2の記録層の前記相変化材料は、同一であることを特徴とする請求項1に記載のマスター基板。
- 前記第1および前記第2の記録層の前記相変化材料は、異なることを特徴とする請求項1に記載のマスター基板。
- 前記第1の記録層内の前記相変化材料は、前記第2の記録層内の前記相変化材料よりも高速型であることを特徴とする請求項7に記載のマスター基板。
- 前記第1の記録層内の前記相変化材料は、前記第2の記録層内の前記相変化材料よりも低速型であることを特徴とする請求項7に記載のマスター基板。
- 前記第1の記録層内の前記相変化材料の溶融温度は、前記第2の記録層内の前記相変化材料の溶融温度よりも高いことを特徴とする請求項7に記載のマスター基板。
- 前記第1の記録層内の前記相変化材料の溶融温度は、前記第2の記録層内の前記相変化材料の溶融温度よりも低いことを特徴とする請求項7に記載のマスター基板。
- マスター基板上に高密度凹凸構造を製造する方法であって、
前記マスター基板は、基板層と、該基板層の上部の、第1の記録層および第2の記録層と、前記第1の記録層と前記第2の記録層の間の界面層と、を有し、
前記両記録層は、相変化材料を有し、
当該方法は、前記記録層に光を放射するステップを有し、これにより、前記記録層の相変化によって、前記記録層の化学物質に関する特性が変化し、
さらに、当該方法は、
前記両記録層の光放射領域をエッチングして、前記両記録層の相変化部分を除去することにより、前記第1の記録層、前記界面層および前記第2の記録層を貫通して延在するピットを形成するステップを有することを特徴とする方法。 - 請求項1乃至11のいずれかに記載のマスター基板を基に製作された凹凸構造を用いて、光データ担体を製作する方法。
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EP04105151 | 2004-10-19 | ||
PCT/IB2005/053352 WO2006043212A1 (en) | 2004-10-19 | 2005-10-12 | Master substrate and method of manufacturing a high-density relief structure |
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JP2008517415A JP2008517415A (ja) | 2008-05-22 |
JP4532562B2 true JP4532562B2 (ja) | 2010-08-25 |
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EP (1) | EP1807834B1 (ja) |
JP (1) | JP4532562B2 (ja) |
KR (1) | KR20070084262A (ja) |
CN (1) | CN101044565A (ja) |
AT (1) | ATE408879T1 (ja) |
CA (1) | CA2584101A1 (ja) |
DE (1) | DE602005009855D1 (ja) |
MX (1) | MX2007004466A (ja) |
TW (1) | TW200627447A (ja) |
WO (1) | WO2006043212A1 (ja) |
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Publication number | Priority date | Publication date | Assignee | Title |
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US4615969A (en) * | 1982-05-28 | 1986-10-07 | Energy Conversion Devices, Inc. | Method and apparatus for making a stamping master for video disk replication |
DE4005315A1 (de) * | 1989-02-22 | 1990-08-23 | Toshiba Kawasaki Kk | Optisches informationsaufzeichnungsmedium |
US5051340A (en) | 1989-06-23 | 1991-09-24 | Eastman Kodak Company | Master for optical element replication |
JPH03120638A (ja) * | 1989-10-04 | 1991-05-22 | Fujitsu Ltd | 情報記録ディスクの製造方法 |
JP2827545B2 (ja) * | 1990-03-14 | 1998-11-25 | 松下電器産業株式会社 | 光学情報の記録方法 |
JPH04134645A (ja) * | 1990-09-25 | 1992-05-08 | Matsushita Electric Ind Co Ltd | 光学情報記録部材 |
JPH05205313A (ja) * | 1992-01-27 | 1993-08-13 | Hitachi Ltd | 高耐久性光記録媒体 |
JPH0920073A (ja) * | 1995-07-05 | 1997-01-21 | Shin Etsu Chem Co Ltd | 光記録媒体 |
JPH1097738A (ja) * | 1996-09-20 | 1998-04-14 | Matsushita Electric Ind Co Ltd | 光情報記録媒体の製造方法および製造装置 |
JP2001134979A (ja) * | 1999-11-08 | 2001-05-18 | Nec Corp | 光学情報記録媒体およびその情報記録方法 |
TW583660B (en) * | 2001-01-25 | 2004-04-11 | Koninkl Philips Electronics Nv | Optical information medium and a method of manufacturing the medium |
JP2002367240A (ja) * | 2001-06-05 | 2002-12-20 | Sharp Corp | 微細パターンの形成方法 |
-
2005
- 2005-10-12 EP EP05808730A patent/EP1807834B1/en not_active Not-in-force
- 2005-10-12 JP JP2007537430A patent/JP4532562B2/ja not_active Expired - Fee Related
- 2005-10-12 WO PCT/IB2005/053352 patent/WO2006043212A1/en active IP Right Grant
- 2005-10-12 KR KR1020077011089A patent/KR20070084262A/ko not_active Application Discontinuation
- 2005-10-12 MX MX2007004466A patent/MX2007004466A/es not_active Application Discontinuation
- 2005-10-12 CN CNA200580035779XA patent/CN101044565A/zh active Pending
- 2005-10-12 DE DE602005009855T patent/DE602005009855D1/de not_active Expired - Fee Related
- 2005-10-12 AT AT05808730T patent/ATE408879T1/de not_active IP Right Cessation
- 2005-10-12 CA CA002584101A patent/CA2584101A1/en not_active Abandoned
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CA2584101A1 (en) | 2006-04-27 |
TW200627447A (en) | 2006-08-01 |
WO2006043212A1 (en) | 2006-04-27 |
KR20070084262A (ko) | 2007-08-24 |
CN101044565A (zh) | 2007-09-26 |
EP1807834A1 (en) | 2007-07-18 |
EP1807834B1 (en) | 2008-09-17 |
DE602005009855D1 (de) | 2008-10-30 |
JP2008517415A (ja) | 2008-05-22 |
MX2007004466A (es) | 2007-06-13 |
ATE408879T1 (de) | 2008-10-15 |
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