JP4517991B2 - Guide roller device and guide roller device manufacturing method - Google Patents

Description

  The present invention relates to a guide roller device used for conveying a workpiece in a vacuum and a method for manufacturing the guide roller device.

As an apparatus for processing a part or a tray carrying various parts (workpieces) to be processed while being conveyed in vacuum, there is, for example, a vapor deposition apparatus for processing the surface of a disk for a hard disk device. This vapor deposition apparatus is provided with a plurality of vacuum chambers and a vacuum transfer path connecting them, and a carriage moves in the vacuum chamber in sequence, and performs a vapor deposition process on the surface of a disk mounted on the carriage. FIG. 8 is a schematic diagram of a portion of such an apparatus.
In this vapor deposition apparatus, there is a guide roller apparatus as shown in Patent Document 1, for example, as a transport apparatus used in vacuum for transporting a carriage W on which a component P is mounted. A guide roller device A of Patent Document 1 will be described with reference to FIG. 8. A support shaft member 1 fixed to a fixed base 10 of a vapor deposition device, and a rolling bearing (not shown) externally fitted thereto. , And a guide roller member 4 fitted on the rolling bearing. A contact surface with the carriage W is formed on the outer peripheral surface of the roller portion extending (projecting) radially outward in the guide roller member 4.
A guide groove 7 having a V-shaped cross section is formed on the lower surface of the carriage W. The roller portion of the guide roller member 4 contacts the guide groove 7 to support the carriage W, and the guide roller member 4 rotates. The carriage W is conveyed.

Japanese Patent Laid-Open No. 2001-24044 (see FIG. 1)

  Since such a guide roller device is used in a chamber and a conveyance path under a vacuum environment, maintenance is difficult, and it is necessary to reduce the frequency thereof as much as possible. Therefore, conventionally, the surface of the guide roller member is subjected to a hardening process in order to improve the wear resistance due to contact with the guide groove of the carriage. After this processing, finishing (grinding) is required on the inner peripheral surface of the guide roller member for fitting with the outer peripheral surface of the rolling bearing. However, when the entire surface is subjected to the surface hardening treatment, the inner peripheral surface of the guide roller member becomes hard and finishing is difficult. The guide roller member of the conventional guide roller device can improve the wear resistance on the contact surface with the guide groove of the carriage, but the finishing process on the inner peripheral surface takes a lot of time and decreases the productivity. It has the problem of letting it go.

  Therefore, the present invention has been made in view of the above problems, and the guide roller member can be subjected to surface hardening treatment to improve wear resistance and finish even if the surface hardening treatment is performed. It is an object of the present invention to provide a guide roller device that can reduce the processing time and a manufacturing method thereof.

  The present invention relates to a guide roller device for transporting a carriage holding a workpiece in a vacuum, a support shaft member, a rolling bearing fitted on the support shaft member, and a radially outer side of the rolling bearing. A cylindrical guide roller member that is provided with a surface hardening treatment, a contact surface with the carriage is formed on the outer peripheral surface of the guide roller member, and the inner peripheral surface of the guide roller member is An uneven surface having a smooth surface portion that is smoothed by machining and a concave portion that is recessed from the smooth surface portion and that is not machined and remains as a surface-cured surface.

According to this configuration, the inner peripheral surface of the guide roller member has the machined smooth surface portion and the concave portion in which the bottom portion is not machined and the surface-cured surface remains. That is, the machined surface does not cover the entire inner peripheral surface that has been subjected to the surface hardening treatment, but is a part. Therefore, even if the guide roller member is subjected to surface hardening treatment and the inner peripheral surface is hard, the machining area is reduced, and the machining time can be shortened.
Furthermore, since the inner peripheral surface of the guide roller member has a smooth surface portion that is smoothed by machining, the fitting accuracy with the member on the inner diameter side can be ensured. And since the outer peripheral surface of the guide roller member is subjected to surface hardening treatment, the wear resistance can be improved. Further, when machining for forming the smooth surface portion, the lubricating oil is kept in the concave portion, so that the workability is improved.

  In this guide roller device, the uneven surface may be formed by machining so that a turning surface formed by turning leaves a turning surface. In this case, the crest portion of the turning face is machined to be a smooth surface portion, and the remaining trough portion is made to be a concave portion. As a result, the machining portion can be reduced and the machining time can be shortened. In addition, since the lubricating oil is maintained in the turning during machining, workability is improved.

  Alternatively, the concavo-convex surface may be formed by machining so that a surface rough formed by mechanical treatment leaves a rough surface pattern. In this case, unevenness is formed and roughened by mechanical treatment on the inner peripheral surface of the intermediate product serving as the guide roller member, and the convex portion is machined to form a smooth surface portion and a concave portion. As a result, the machining portion can be reduced and the machining time can be shortened.

Alternatively, the concavo-convex surface has an annular convex portion that is in contact with both axial end portions of the outer peripheral surface of the outer ring of the rolling bearing, and an annular shape that is not in contact with the axial central portion of the outer peripheral surface between the convex portions. The top surface of the convex portion is the smooth surface portion, and the concave groove portion is left as the surface-cured surface.
In this case, the concave groove portion is a concave portion that is not machined and remains on the surface-hardened surface. The dimensional accuracy for fitting with the outer peripheral surface of a rolling bearing can be ensured by the convex portion. Further, the machining area can be reduced by the recessed groove portion that does not contact the outer peripheral surface of the rolling bearing, and the machining time can be shortened.

  The guide roller member is preferably a member that has been subjected to TD treatment and has a hardened surface. Thereby, the abrasion resistance in a contact surface with a trolley | bogie can be improved.

  Further, the guide roller device manufacturing method of the present invention includes a support shaft member, a rolling bearing that is externally fitted to the support shaft member, and a cylindrical guide roller member that is provided on the radially outer side of the rolling bearing. In the manufacturing method of the guide roller device comprising the above, on the inner peripheral surface of the intermediate product serving as the guide roller member, a portion recessed radially outward from the surface having the finished inner diameter and the surface having the finished inner diameter In addition, after forming a portion protruding radially inward, the intermediate product is subjected to surface hardening treatment, and then the inner peripheral surface of the intermediate product is finished to the finished inner diameter by machining.

  Thereby, the wear resistance in the contact surface with respect to a trolley | bogie can be improved by performing a surface hardening process to a guide roller member. Also, when the inner peripheral surface of the intermediate product is finished to a predetermined finished inner diameter dimension by machining, the portion to be machined is only the portion protruding radially inward on the inner peripheral surface, so the amount of machining is reduced. And finishing time can be shortened. Then, by machining to the finished inner diameter dimension, it is possible to ensure the fitting accuracy with the inner diameter side member.

  According to the present invention, the surface hardening treatment is performed on the guide roller member, so that the wear resistance on the contact surface with respect to the carriage can be improved. Further, since the machining portion can be reduced on the inner peripheral surface of the guide roller member, the finishing time can be reduced even if the surface hardening treatment is performed.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a sectional view showing an embodiment of the guide roller device of the present invention. FIG. 8 is a schematic view of a part of an apparatus in which the guide roller device is used. For example, a part of a vapor deposition apparatus that performs vapor deposition on a disk for a hard disk device is shown.
In FIG. 8, this vapor deposition apparatus includes a plurality of vacuum chambers (not shown) and a vacuum transfer path (not shown) connecting them, and holds or mounts an object to be processed (workpiece). W (represented by “cart” hereinafter) is configured to move sequentially in the vacuum chamber by a transfer device. In these chambers, the surface of the disk P, which is a work mounted on the carriage W, can be subjected to vapor deposition. As a transport device used in vacuum for transporting such a carriage W, there is a guide roller device A shown in FIG.

  In FIG. 1, a guide roller device A includes a support shaft member 1 fixed to a fixed base 10 inside a vapor deposition device, and two rows of rolling bearings 2 and 3 attached to the support shaft member 1 so as to be fitted. , And a substantially cylindrical guide roller member 4 that is externally fitted to the rolling bearings 2 and 3. And the contact surface 6a which contacts the guide groove 7 of the trolley | bogie W is formed in the outer peripheral surface of the roller part 6 extended in radial direction outward among the guide roller members 4, and the guide roller member 4 rotates. Thus, the carriage W can be supported and transported in a vacuum.

The support shaft member 1 includes a screw portion 11 from one end side (the right side in FIG. 1), a shaft portion 12 having a diameter larger than that of the screw portion 11, and an end having a diameter larger than that of the shaft portion 12. And has a flange portion 13.
Further, the guide roller device A includes an annular seat member 8 that is externally fitted to the screw portion 11 of the support shaft member 1, and the seat member 8 is outside the shaft portion 12 of the support shaft member 1. A small-diameter portion 8a having the same diameter as the diameter and a large-diameter portion 8b in contact with the end face of the inner ring 21 of the rolling bearing 2 on one side are provided.
The axial dimension of the shaft portion 12 of the support shaft member 1 is shorter than the total axial dimension of the pair of rolling bearings 2, 3, and the pair of rolling bearings 2, 3 is the shaft portion of the support shaft member 1. 12 and the small diameter portion 8a of the seat member 8 are externally fitted. And the end surface of the inner ring 23 of the rolling bearing 3 on the other side and the side surface of the flange 13 of the support shaft member 1 are in contact with each other, and the pair of rolling bearings 2 and 3 are in contact with each other side by side in the axial direction. Is provided.
Therefore, the guide roller device A can be fixed in the vapor deposition device by screwing the screw portion 11 of the support shaft member 1 into the fixed base 10 and the wall surface of the flange portion 13 of the support shaft member 1 and the fixed base 10. The rolling bearings 2 and 3 can be fixed in the axial direction by sandwiching the pair of rolling bearings 2 and 3 and the large diameter portion 8b of the seat member 8 between them. .

  The two rolling bearings 2 and 3 are the same, and have inner rings 21 and 23, outer rings 22 and 24, and rolling elements 41 and 42 that can freely roll between them. The rolling bearings 2 and 3 are single row deep groove ball bearings.

The guide roller member 4 has a cylindrical main body portion 5 on the inner diameter side and an annular roller portion 6 on the outer diameter side. The main body 5 is externally fitted to the outer peripheral surfaces of the rolling bearings 2 and 3, and the roller portion 6 has a predetermined axial width dimension B extending from the outer peripheral surface of the main body 5 and extends outward (projects). Formed).
An inner flange portion 14 is formed on the inner peripheral surface side of one end portion in the axial direction of the main body portion 5, and an end surface of the outer ring 24 of the rolling bearing 3 can be brought into contact with a side surface of the inner flange portion 14. Further, a concave circumferential groove 16 is formed on the inner circumferential surface on the other end side of the main body 5, and a retaining ring 9 is fitted into the concave circumferential groove 16. The inner peripheral surface of the main body 5 has an axial dimension longer than the total axial dimension of the pair of rolling bearings 2, 3, and the rolling bearings 2, 3 are between the retaining ring 9 and the inner flange 14. The movement in the axial direction is restricted. In other words, the rolling bearings 2 and 3 are stably held from the outer peripheral side by the main body portion 5 that is longer in the axial direction than the pair of rolling bearings 2 and 3. 3, the posture of the roller unit 6 is stabilized via the main body unit 5.

  The roller part 6 is formed integrally with the main body part 5 and extends radially outward from the outer peripheral surface of the main body part 5 near one end in the axial direction. The outer peripheral surface of the roller portion 6 is formed of a curved surface, and has a contact surface 6 a that contacts the guide groove 7 having a V-shaped cross section formed in the carriage W. The contact surface 6a is a circular arc surface that makes point contact with the left and right inclined surfaces of the guide groove 7 having a V-shaped cross section. Thus, since the roller part 6 contacts and supports the guide groove 7 at two points by the circular arc surface, the carriage W is stabilized.

  The guide roller member 4 is a member that has been subjected to a curing process and whose surface has been cured. This surface hardening process is a TD process. In this TD process, a member to be the guide roller member 4 is dipped and held in a molten salt bath to form a carbide layer on the surface. The guide roller member 4 subjected to this treatment has a surface hardness of HV2000 or higher, can harden the contact surface 6a, and can improve seizure resistance. Thereby, the abrasion resistance in the contact surface 6a of the guide roller member 4 can be improved, the maintenance frequency can be reduced, and it can be made suitable as a transport device used in a vacuum environment.

2 and 3 are a sectional view of the guide roller member 4 and an enlarged sectional view of the inner peripheral surface thereof, respectively. The inner peripheral surface 4a of the main body 5 of the guide roller member 4 is an uneven surface 19, and the uneven surface 19 is smoothed by a machining process (grinding) as shown in FIG. The concave portion 17 is recessed from the smooth surface portion 18, and the bottom portion (valley portion) is not machined and remains as a surface-hardened surface. The uneven surface 19 is a contact surface with the rolling bearings 2 and 3 that are inner diameter side members.
This uneven surface 19 will be further described. In the left side view of FIG. 3, the intermediate product 34 which becomes the guide roller member 4 is first turned on its inner peripheral surface before the surface hardening treatment to form a turning surface 31. The And the said uneven surface 19 is formed by grinding so that a turning line (valley part) may be left with respect to this turning surface 31 (FIG. 3 right side figure). The inner peripheral surface indicated by a broken line C is a finished surface that has been ground, and the finished inner diameter is indicated by D. Thereby, the crest portion of the turning surface 31 of the intermediate product 34 is machined so that the machined surface becomes the smooth surface portion 18, and the remaining trough portion becomes the concave portion 17.

  According to this configuration, the smooth surface portion 18 is formed by grinding the turning surface 31 on the inner peripheral surface of the guide roller member 4, and the surface-cured surface is left as it is. For this reason, the machined portion is only the portion at the peak portion of the turning surface 31. That is, by making the concave portion 17 subjected to the surface hardening treatment a portion that is not ground, the amount of grinding can be reduced and the processing time can be shortened. For example, in FIG. 3, the height difference Δh of the unevenness due to the turning surface 31 formed on the inner peripheral surface of the intermediate product 34 is about 0.5 mm, and about 1/2 to 1/3 of the difference Δh. It is ground for the height of. Furthermore, since the turning line on the turning surface 31 has a spiral shape, the lubricating oil is maintained in the turning line during the grinding process, and the workability is improved.

  The guide roller member 4 obtained by grinding the inner peripheral surface 4a in this way is provided on the radially outer side of the rolling bearings 2 and 3, and the inner peripheral surface of the guide roller member 4 is provided on the outer peripheral surface of the rolling bearings 2 and 3. 4a is fitted, but the inner peripheral surface 4a of the guide roller member 4 has a smooth surface portion 18 which is smoothed by grinding, so that the fitting accuracy with the outer peripheral surfaces of the rolling bearings 2 and 3 is achieved. Can be secured. The outer peripheral surface of the roller portion 6 of the guide roller member 4 is a contact surface 6a that has been subjected to surface hardening treatment, so that the wear resistance can be improved.

  Next, the manufacturing method of the guide roller member 4 in the guide roller device of the present invention will be described. In FIG. A portion recessed outward in the direction and a portion protruding radially inward from the surface having the finished inner diameter dimension D are formed by turning. And after performing a surface hardening process to this, this inner peripheral surface is finished to the said finishing internal diameter dimension D by grinding. When finishing to the finished inner diameter dimension D, the portion to be ground is only the portion of the inner peripheral surface of the intermediate product 34 that protrudes radially inward from the surface that has the finished inner diameter dimension D, so the amount of grinding work is reduced. And finishing time can be shortened.

4 and 5 show another embodiment of the guide roller device of the present invention, which is a sectional view of the guide roller member 4 and an enlarged sectional view of the inner peripheral surface thereof, respectively. As in the first embodiment (FIGS. 2 and 3), the inner peripheral surface 4a of the main body 5 of the guide roller member 4 is an uneven surface 19, and the bottom of the uneven surface 19 is machined. It has the recessed part 17 by which it is not made into the surface hardening process surface, and the smooth surface part 18 made smooth by machining (grinding).
This uneven surface 19 will be further described. In the left side view of FIG. 5, the intermediate product 34 which becomes the guide roller member 4 is a surface in which the inner peripheral surface is first roughened by mechanical treatment before the surface hardening treatment. Has been. As this mechanical treatment, for example, shot blasting can be cited. By performing such mechanical treatment on the inner peripheral surface of the intermediate product 34, a surface having rough irregularities is formed. And the said uneven surface 19 is formed by grinding so that a rough surface pattern may be left with respect to this surface (the figure on the right side of FIG. 5). That is, the inner peripheral surface indicated by a broken line C is a finished surface that has been ground, and the finished inner diameter is indicated by D.
Thereby, the convex part of the rough processed surface of the intermediate product 34 is machined to be the smooth surface part 18, and the remaining part is the concave part 17. According to this configuration, the amount of grinding can be reduced, and the processing time can be shortened. Further, during the grinding process, the lubricating oil is kept in the concave portion, and the workability is improved.
In addition to the shot blasting, the mechanical treatment includes knurling, and a rough surface may be formed on the inner peripheral surface of the intermediate product 34.

  6 and 7 show still another embodiment of the guide roller device of the present invention, and are a sectional view of the guide roller member 4 and an enlarged sectional view of the inner peripheral surface thereof, respectively. The inner peripheral surface 4a of the main body 5 of the guide roller member 4 is an uneven surface 19 as in the first embodiment and the second embodiment (FIGS. 2 and 4). 19 has the recessed part 17 by which the bottom part is not machined but remains the surface hardening process surface, and the smooth surface part 18 smooth | blunted by machining (grinding).

The uneven surface 19 will be further described. In FIGS. 6 and 7, the annular protrusions 36 that are in contact with both ends of the outer peripheral surfaces of the outer rings 22 and 24 of the rolling bearings 2 and 3 in the axial direction, and these protrusions An annular concave groove portion 37 that is not in contact with the outer rings 22, 24 is formed between the portions 36 and in the axially central portion of the outer peripheral surface of each outer ring 22, 24, and the top surface of the convex portion 36 is ground. And the concave groove portion 37 is a concave portion 17 that is left as a surface-cured surface. That is, the inner peripheral surface indicated by the broken line C in FIG. 7 is a finished surface that has been ground, and the finished inner diameter dimension is indicated by D.
Thereby, the grinding area can be reduced by the concave groove portion 37 that does not come into contact with the outer peripheral surfaces of the rolling bearings 2 and 3, and the processing time can be shortened. And the convex part 36 can ensure the dimensional accuracy for a fitting with the outer peripheral surface of the rolling bearings 2 and 3, and the smooth surface part 18 in the axial direction both ends of the outer rings 22 and 24 of each rolling bearing 2 and 3. Since the projected portion 36 is in contact, the posture between the guide roller member 4 and the rolling bearings 2 and 3 can be stabilized.

  In each of the embodiments described above, if the rolling bearings 2 and 3 are loosely fitted (clear fit) to the inner support shaft member 1 and the outer guide roller member 4 (main body portion 5), the rolling bearings 2 and 2 are provided. When the roller 3 is worn and needs to be replaced, it is possible to easily remove and replace only the rolling bearings 2 and 3 without replacing the guide roller member 4 and the support shaft member 1. Further, at the time of this replacement, in FIG. 1, new rolling bearings 2 and 3 are attached to the support shaft member 1 by contacting the flange portion 13 of the support shaft member 1 so as to be positioned. The guide roller member 4 is positioned and attached by bringing the inner flange portion 14 and the rolling bearing 3 into contact with each other. Therefore, the roller portion 6 of the guide roller member 4 can be reassembled with respect to the support shaft member 1 with good reproducibility, and the position of the contact surface 6a of the roller portion 6 can be conveyed even after the rolling bearings 2 and 3 are replaced. It is possible to prevent the position of the carriage W from being displaced with respect to the guide groove 7.

  Further, the present invention is not limited to the illustrated form, and may be other forms within the scope of the present invention. In the illustrated guide roller apparatus A, the guide roller member 4 is externally fitted to the rolling bearings 2 and 3. However, although not shown, the guide roller member 4 may be fitted on the outer peripheral side of the rolling bearings 2 and 3 via other cylindrical members. In this case, the inner peripheral surface 4a of the guide roller member 4 is ground in order to ensure the fitting accuracy with the outer peripheral surface of the other cylindrical member.

It is sectional drawing which shows one Embodiment of the guide roller apparatus of this invention. It is sectional drawing which shows the guide roller member of the guide roller apparatus of FIG. It is an expanded sectional view which shows the principal part and manufacturing method of the guide roller member of FIG. It is sectional drawing of the guide roller member in other embodiment of this invention. It is an expanded sectional view which shows the principal part and manufacturing method of the guide roller member of FIG. It is sectional drawing of the guide roller member in another embodiment of this invention. It is an expanded sectional view which shows the principal part and manufacturing method of the guide roller member of FIG. It is the schematic of a part of apparatus by which the guide roller apparatus of this invention is used.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Support shaft member 2 Rolling bearing 3 Rolling bearing 4 Guide roller member 4a Inner peripheral surface 6a Contact surface 17 Concave surface 18 Smooth surface portion 19 Concavity and convexity surface 31 Turning surface 34 Intermediate product 36 Convex portion 37 Concave groove portion A Guide roller device W Cart

Claims (6)

A guide roller device for conveying a carriage holding a workpiece in a vacuum,
A spindle member;
A rolling bearing externally fitted to the spindle member;
A cylindrical guide roller member provided on the outside in the radial direction of the rolling bearing and subjected to surface hardening treatment,
A contact surface with the carriage is formed on the outer peripheral surface of the guide roller member,
The inner peripheral surface of the guide roller member has a smooth surface portion that is smoothed by machining, and a recess that is recessed from the smooth surface portion and that is not machined and remains as a surface-cured surface. A guide roller device having an uneven surface.   2. The guide roller device according to claim 1, wherein the uneven surface is formed by machining so that a turning surface formed by turning leaves a turning surface.   2. The guide roller device according to claim 1, wherein the uneven surface is formed by machining so that a surface rough formed by a mechanical process leaves a rough surface pattern. 3.   The concavo-convex surface includes an annular convex portion that is in contact with both axial end portions of the outer peripheral surface of the outer ring of the rolling bearing, and an annular concave portion that is not in contact with the axial central portion of the outer peripheral surface between the convex portions. The guide roller device according to claim 1, comprising a groove portion, wherein a top surface of the convex portion is the smooth surface portion, and the concave groove portion is left as the surface-cured surface.   The guide roller device according to any one of claims 1 to 4, wherein the guide roller member is a member that has been subjected to TD processing and has a hardened surface. A spindle member;
A rolling bearing externally fitted to the spindle member;
In a manufacturing method of a guide roller device provided with a cylindrical guide roller member provided on the outer side in the radial direction of the rolling bearing,
On the inner peripheral surface of the intermediate product serving as the guide roller member, a portion recessed radially outward from the surface having the finished inner diameter size and a portion projecting radially inward from the surface having the finished inner diameter size were formed. Thereafter, the intermediate product is subjected to surface hardening treatment, and then the inner peripheral surface of the intermediate product is finished to the finished inner diameter by machining.

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