JP4514177B2 - Ａｌを含む半導体材料からなるレンズ、それを用いた面型光素子、及びその製造方法 - Google Patents

Ａｌを含む半導体材料からなるレンズ、それを用いた面型光素子、及びその製造方法 Download PDF

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Publication number
JP4514177B2
JP4514177B2 JP2001008401A JP2001008401A JP4514177B2 JP 4514177 B2 JP4514177 B2 JP 4514177B2 JP 2001008401 A JP2001008401 A JP 2001008401A JP 2001008401 A JP2001008401 A JP 2001008401A JP 4514177 B2 JP4514177 B2 JP 4514177B2
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lens
microlens
semiconductor
semiconductor region
substrate
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JP2002214404A (ja
JP2002214404A5 (enrdf_load_stackoverflow
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和彦 福谷
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Canon Inc
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Canon Inc
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JP2001008401A 2001-01-17 2001-01-17 Ａｌを含む半導体材料からなるレンズ、それを用いた面型光素子、及びその製造方法 Expired - Fee Related JP4514177B2 (ja)

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JP2001008401A JP4514177B2 (ja) 2001-01-17 2001-01-17 Ａｌを含む半導体材料からなるレンズ、それを用いた面型光素子、及びその製造方法

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JP2001008401A JP4514177B2 (ja) 2001-01-17 2001-01-17 Ａｌを含む半導体材料からなるレンズ、それを用いた面型光素子、及びその製造方法

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JP2002214404A JP2002214404A (ja) 2002-07-31
JP2002214404A5 JP2002214404A5 (enrdf_load_stackoverflow) 2008-03-13
JP4514177B2 true JP4514177B2 (ja) 2010-07-28

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JP2001008401A Expired - Fee Related JP4514177B2 (ja) 2001-01-17 2001-01-17 Ａｌを含む半導体材料からなるレンズ、それを用いた面型光素子、及びその製造方法

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Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4507567B2 (ja) 2003-11-18 2010-07-21 セイコーエプソン株式会社 面発光レーザの製造方法
JP4207878B2 (ja) 2004-10-15 2009-01-14 セイコーエプソン株式会社 面発光レーザ、面発光レーザの製造方法、デバイス及び電子機器
WO2006123816A2 (en) * 2005-05-18 2006-11-23 Matsushita Electric Works, Ltd. Process of making an optical lens
JP4586798B2 (ja) * 2005-08-26 2010-11-24 パナソニック電工株式会社 半導体レンズの製造方法
JP4586796B2 (ja) * 2005-08-26 2010-11-24 パナソニック電工株式会社 半導体レンズの製造方法
JP4586797B2 (ja) * 2005-08-26 2010-11-24 パナソニック電工株式会社 半導体レンズの製造方法
JP5010252B2 (ja) * 2006-11-27 2012-08-29 パナソニック株式会社 半導体レンズの製造方法
KR100996669B1 (ko) 2008-12-11 2010-11-25 한국기초과학지원연구원 마이크로 렌즈 어레이를 포함하는 이미지 센서 및 그 제조방법
CN109052313B (zh) * 2018-08-16 2020-11-20 湖南文理学院 一种硅基凸面反射镜的制备方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0437802A (ja) * 1990-06-04 1992-02-07 Ricoh Co Ltd 光ガイドアレイ
JPH08102547A (ja) * 1994-09-30 1996-04-16 Casio Comput Co Ltd 光電変換装置及びその製造方法
JPH09222505A (ja) * 1996-02-16 1997-08-26 Casio Comput Co Ltd マイクロレンズを有するデバイスおよびマイクロレンズの形 成方法
JP3092700B2 (ja) * 1997-07-17 2000-09-25 日本電気株式会社 半導体装置およびその製造方法
JPH11233888A (ja) * 1998-02-09 1999-08-27 Nec Corp 光学素子、それを使用した面発光レーザ装置及び端面発光型半導体レーザ装置
US6674090B1 (en) * 1999-12-27 2004-01-06 Xerox Corporation Structure and method for planar lateral oxidation in active

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