JP4495722B2 - ミクロ構造の作成方法 - Google Patents

ミクロ構造の作成方法 Download PDF

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Publication number
JP4495722B2
JP4495722B2 JP2006504729A JP2006504729A JP4495722B2 JP 4495722 B2 JP4495722 B2 JP 4495722B2 JP 2006504729 A JP2006504729 A JP 2006504729A JP 2006504729 A JP2006504729 A JP 2006504729A JP 4495722 B2 JP4495722 B2 JP 4495722B2
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Prior art keywords
concavo
convex
photoresist layer
photoresist
substrate
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Expired - Fee Related
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JP2006504729A
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English (en)
Japanese (ja)
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JP2006520923A (ja
JP2006520923A5 (https=
Inventor
シリング，アンドレーアス
ロバート トンプキン，ウェイン
Original Assignee
オーファオデー キネグラム アーゲー
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Priority claimed from DE10318105A external-priority patent/DE10318105B4/de
Application filed by オーファオデー キネグラム アーゲー filed Critical オーファオデー キネグラム アーゲー
Priority claimed from PCT/EP2004/002822 external-priority patent/WO2004083911A1/de
Publication of JP2006520923A publication Critical patent/JP2006520923A/ja
Publication of JP2006520923A5 publication Critical patent/JP2006520923A5/ja
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Publication of JP4495722B2 publication Critical patent/JP4495722B2/ja
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  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP2006504729A 2003-04-22 2004-03-18 ミクロ構造の作成方法 Expired - Fee Related JP4495722B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10318105A DE10318105B4 (de) 2003-03-21 2003-04-22 Verfahren zur Herstellung von Mikrostrukturen
PCT/EP2004/002822 WO2004083911A1 (de) 2003-03-21 2004-03-18 Mikrostruktur und verfahren zur herstellung von mikrostrukturen

Publications (3)

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JP2006520923A JP2006520923A (ja) 2006-09-14
JP2006520923A5 JP2006520923A5 (https=) 2007-07-19
JP4495722B2 true JP4495722B2 (ja) 2010-07-07

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JP2006504729A Expired - Fee Related JP4495722B2 (ja) 2003-04-22 2004-03-18 ミクロ構造の作成方法

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JP (1) JP4495722B2 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5104220B2 (ja) * 2007-11-02 2012-12-19 住友電気工業株式会社 回折光学素子およびその製造方法
JP5391670B2 (ja) * 2007-12-27 2014-01-15 セイコーエプソン株式会社 微細構造体の製造方法
JP2009244529A (ja) * 2008-03-31 2009-10-22 Konica Minolta Opto Inc 遮光部及びレンズ鏡胴
JP2009294383A (ja) * 2008-06-04 2009-12-17 Toppan Printing Co Ltd 表示体及び情報印刷物
US10613258B2 (en) * 2016-09-13 2020-04-07 Ubright Optronics Corporation Optical assembly and the method to make the same

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139872A (en) * 1981-02-03 1982-08-30 Landis & Gyr Ag Method of and apparatus for preventing faking of document
JPS63181142A (ja) * 1987-01-21 1988-07-26 Toppan Printing Co Ltd 光学的記録媒体の製造方法
JP2812758B2 (ja) * 1988-04-12 1998-10-22 大日本印刷株式会社 光記録体及びその製造方法
GB9524862D0 (en) * 1995-12-06 1996-02-07 The Technology Partnership Plc Colour diffractive structure
DE19708776C1 (de) * 1997-03-04 1998-06-18 Fraunhofer Ges Forschung Entspiegelungsschicht sowie Verfahren zur Herstellung derselben
JP4334656B2 (ja) * 1999-03-15 2009-09-30 大日本印刷株式会社 変色性蒸着媒体とその製造方法
DE19915943A1 (de) * 1999-04-09 2000-10-12 Ovd Kinegram Ag Zug Dekorationsfolie

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JP2006520923A (ja) 2006-09-14

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