JP4494337B2 - ダイヤフラム型支持体を有するデータ記録装置 - Google Patents
ダイヤフラム型支持体を有するデータ記録装置 Download PDFInfo
- Publication number
- JP4494337B2 JP4494337B2 JP2005500037A JP2005500037A JP4494337B2 JP 4494337 B2 JP4494337 B2 JP 4494337B2 JP 2005500037 A JP2005500037 A JP 2005500037A JP 2005500037 A JP2005500037 A JP 2005500037A JP 4494337 B2 JP4494337 B2 JP 4494337B2
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- Prior art keywords
- diaphragm
- array
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- storage medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000003860 storage Methods 0.000 claims description 43
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 28
- 229910052710 silicon Inorganic materials 0.000 claims description 27
- 239000010703 silicon Substances 0.000 claims description 27
- 125000006850 spacer group Chemical group 0.000 claims description 27
- 238000003491 array Methods 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 230000006870 function Effects 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- 229910003481 amorphous carbon Inorganic materials 0.000 claims description 2
- 229910052796 boron Inorganic materials 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 58
- 238000000034 method Methods 0.000 description 15
- 230000000694 effects Effects 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 9
- 238000005530 etching Methods 0.000 description 7
- 239000012782 phase change material Substances 0.000 description 4
- 238000013500 data storage Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004377 microelectronic Methods 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 238000003486 chemical etching Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000006386 memory function Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
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- 238000005520 cutting process Methods 0.000 description 1
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- 238000013461 design Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004621 scanning probe microscopy Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001931 thermography Methods 0.000 description 1
- 239000012815 thermoplastic material Substances 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
- G11B23/0014—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture record carriers not specifically of filamentary or web form
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
- G11B9/1418—Disposition or mounting of heads or record carriers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
- G11B9/1463—Record carriers for recording or reproduction involving the use of microscopic probe means
- G11B9/1472—Record carriers for recording or reproduction involving the use of microscopic probe means characterised by the form
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B17/00—Guiding record carriers not specifically of filamentary or web form, or of supports therefor
- G11B17/32—Maintaining desired spacing between record carrier and head, e.g. by fluid-dynamic spacing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B2005/0002—Special dispositions or recording techniques
- G11B2005/0005—Arrangements, methods or circuits
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Micromachines (AREA)
- Semiconductor Memories (AREA)
- Magnetic Record Carriers (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0212275A FR2845512A1 (fr) | 2002-10-03 | 2002-10-03 | Dispositif d'enregistrement de donnees comportant un support de memoire en forme de membrane |
| FR0307965A FR2845513B1 (fr) | 2002-10-03 | 2003-07-01 | Dispositif d'enregistrement de donnees comportant un support de memoire en forme de membrane |
| PCT/FR2003/002879 WO2004032132A2 (fr) | 2002-10-03 | 2003-10-01 | Dispositif d'enregistrement de données comportant un support de mémoire en forme de membrane |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006502523A JP2006502523A (ja) | 2006-01-19 |
| JP2006502523A5 JP2006502523A5 (enExample) | 2010-04-08 |
| JP4494337B2 true JP4494337B2 (ja) | 2010-06-30 |
Family
ID=32031842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005500037A Expired - Fee Related JP4494337B2 (ja) | 2002-10-03 | 2003-10-01 | ダイヤフラム型支持体を有するデータ記録装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7697402B2 (enExample) |
| EP (1) | EP1547072B1 (enExample) |
| JP (1) | JP4494337B2 (enExample) |
| DE (1) | DE60326862D1 (enExample) |
| FR (1) | FR2845513B1 (enExample) |
| WO (1) | WO2004032132A2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2868411B1 (fr) * | 2004-04-01 | 2006-06-16 | Commissariat Energie Atomique | Membrane souple comportant des entailles |
| FR2869027B1 (fr) | 2004-04-15 | 2006-07-14 | Commissariat Energie Atomique | Systeme d'enregistrement comportant une couche memoire et un reseau de micro-pointes |
| FR2876831B1 (fr) | 2004-10-15 | 2007-02-02 | Commissariat Energie Atomique | Dispositif d'enregistrement de donnees comportant des nanotubes de carbone inclines et procede de fabrication |
| FR2880980B1 (fr) * | 2005-01-17 | 2007-03-16 | Commissariat Energie Atomique | Dispositif d'enregistrement de donnees comportant des micro-pointes dont l'ensemble des extremites libres forme une surface convexe et procede de fabrication |
| FR2880979B1 (fr) | 2005-01-17 | 2007-03-16 | Commissariat Energie Atomique | Dispositif d'enregistrement de donnees comportant une membrane peripherique de support et procede de fabrication |
| FR2910686B1 (fr) * | 2006-12-20 | 2009-04-03 | Commissariat Energie Atomique | Dispositif de memorisation a structure multi-niveaux |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT246809B (de) * | 1963-10-18 | 1966-05-10 | Bruno Dipl Ing Woelke | Vorrichtung zur magnetischen Aufzeichnung |
| FR1519660A (fr) * | 1967-01-04 | 1968-04-05 | Vide Soc Gen Du | Perfectionnements aux mémoires de masses à disques magnétiques |
| US3502455A (en) * | 1967-10-09 | 1970-03-24 | Bendix Corp | Method of fabricating a thin film vitreous continuous membrane product |
| US3646533A (en) * | 1969-04-08 | 1972-02-29 | Burroughs Corp | Rotary disk assembly having low-density core for information storage system |
| US4451914A (en) * | 1982-04-15 | 1984-05-29 | Burroughs Corporation | Optical storage system employing a multi-layer optical medium |
| SE463654B (sv) * | 1988-03-11 | 1991-01-07 | Nils Goeran Stemme | Membranstruktur samt saett att framstaella densamma |
| DE69031053T2 (de) * | 1989-04-25 | 1998-01-29 | Canon Kk | Informationsaufzeichnungs-/Wiedergabegerät und Informationsaufzeichnungsträger |
| US5204581A (en) * | 1990-07-12 | 1993-04-20 | Bell Communications Research, Inc. | Device including a tapered microminiature silicon structure |
| US5216631A (en) * | 1990-11-02 | 1993-06-01 | Sliwa Jr John W | Microvibratory memory device |
| JP3935976B2 (ja) * | 1995-02-08 | 2007-06-27 | ヒューレット・パッカード・カンパニー | 半導体層構造および大容量メモリ装置の記録媒体 |
| US6084849A (en) * | 1996-05-20 | 2000-07-04 | International Business Machines Corporation | Shape memory alloy recording medium, storage devices based thereon, and method for using these storage devices |
| US5835477A (en) * | 1996-07-10 | 1998-11-10 | International Business Machines Corporation | Mass-storage applications of local probe arrays |
| US7260051B1 (en) * | 1998-12-18 | 2007-08-21 | Nanochip, Inc. | Molecular memory medium and molecular memory integrated circuit |
| DE10030352A1 (de) * | 2000-06-21 | 2002-01-10 | Bosch Gmbh Robert | Mikromechanisches Bauelement, insbesondere Sensorelement, mit einer stabilisierten Membran und Verfahren zur Herstellung eines derartigen Bauelements |
| US6432740B1 (en) * | 2001-06-28 | 2002-08-13 | Hewlett-Packard Company | Fabrication of molecular electronic circuit by imprinting |
| US20040125733A1 (en) * | 2002-12-31 | 2004-07-01 | Industrial Technology Research Institute | Data storage device utilizing carbon nanotubes and method for operating |
-
2003
- 2003-07-01 FR FR0307965A patent/FR2845513B1/fr not_active Expired - Fee Related
- 2003-10-01 WO PCT/FR2003/002879 patent/WO2004032132A2/fr not_active Ceased
- 2003-10-01 US US10/528,065 patent/US7697402B2/en not_active Expired - Fee Related
- 2003-10-01 DE DE60326862T patent/DE60326862D1/de not_active Expired - Lifetime
- 2003-10-01 EP EP03778382A patent/EP1547072B1/fr not_active Expired - Lifetime
- 2003-10-01 JP JP2005500037A patent/JP4494337B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| FR2845513B1 (fr) | 2006-08-11 |
| JP2006502523A (ja) | 2006-01-19 |
| US20050269653A1 (en) | 2005-12-08 |
| US7697402B2 (en) | 2010-04-13 |
| DE60326862D1 (de) | 2009-05-07 |
| WO2004032132A2 (fr) | 2004-04-15 |
| EP1547072A2 (fr) | 2005-06-29 |
| WO2004032132A3 (fr) | 2004-05-27 |
| FR2845513A1 (fr) | 2004-04-09 |
| EP1547072B1 (fr) | 2009-03-25 |
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