JP4478472B2 - 有機薄膜蒸着方法 - Google Patents
有機薄膜蒸着方法 Download PDFInfo
- Publication number
- JP4478472B2 JP4478472B2 JP2004026904A JP2004026904A JP4478472B2 JP 4478472 B2 JP4478472 B2 JP 4478472B2 JP 2004026904 A JP2004026904 A JP 2004026904A JP 2004026904 A JP2004026904 A JP 2004026904A JP 4478472 B2 JP4478472 B2 JP 4478472B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- mask
- glass substrate
- thin film
- back surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007736 thin film deposition technique Methods 0.000 title description 3
- 239000000758 substrate Substances 0.000 claims description 123
- 239000010409 thin film Substances 0.000 claims description 22
- 238000007740 vapor deposition Methods 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 5
- 239000000696 magnetic material Substances 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 2
- 239000011368 organic material Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 73
- 239000010408 film Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
Images
Description
2 マスク
4 押え板
5 磁石板
8 Oリング(シール部材)
9 SUSシート(金属製シート)
Claims (1)
- 基板の被蒸着面である表面を下側にして水平に配置し、所定パターン状に開孔された磁性材からなるマスクを前記基板の表面に対して位置合わせして、前記基板の表面と反対側の裏面側に設けた磁石による磁気吸引力で前記マスクを前記基板の表面に密着させた後に、前記基板の表面の下方から蒸発された有機材料を前記マスクの開孔を通して前記基板の表面に蒸着させる有機薄膜蒸着方法において、
前記基板の裏面と前記磁石との間に前記基板の裏面に接して押えるための押え板を有し、前記押え板の前記基板の裏面と接する面の外周部に弾性を有するシール部材を突出するようにして取り付け、
前記基板の表面に前記マスクを密着させるときに、前記シール部材を介して前記押え板を前記基板の裏面に圧接させて、前記押え板の前記シール部材と反対側の面に前記磁石を近接又は当接させ、
前記押え板の前記シール部材を取り付けた面に、少なくとも前記シール部材を覆うようにして金属製シートを密着させる、
ことを特徴とする有機薄膜蒸着方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004026904A JP4478472B2 (ja) | 2004-02-03 | 2004-02-03 | 有機薄膜蒸着方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004026904A JP4478472B2 (ja) | 2004-02-03 | 2004-02-03 | 有機薄膜蒸着方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005222729A JP2005222729A (ja) | 2005-08-18 |
JP4478472B2 true JP4478472B2 (ja) | 2010-06-09 |
Family
ID=34998212
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004026904A Expired - Lifetime JP4478472B2 (ja) | 2004-02-03 | 2004-02-03 | 有機薄膜蒸着方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4478472B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104183796A (zh) * | 2013-05-27 | 2014-12-03 | 三星显示有限公司 | 基底移动单元、沉积装置和制造有机发光显示装置的方法 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4549697B2 (ja) * | 2004-03-04 | 2010-09-22 | 株式会社アルバック | 成膜装置及び成膜方法 |
JP2007119895A (ja) * | 2005-10-31 | 2007-05-17 | Toshiba Matsushita Display Technology Co Ltd | 蒸着装置 |
JP2008007857A (ja) * | 2006-06-02 | 2008-01-17 | Sony Corp | アライメント装置、アライメント方法および表示装置の製造方法 |
JP5337632B2 (ja) * | 2009-02-13 | 2013-11-06 | 株式会社日立ハイテクノロジーズ | 成膜装置及び有機elデバイス製造装置 |
WO2010106958A1 (ja) * | 2009-03-18 | 2010-09-23 | 株式会社アルバック | 位置合わせ方法、蒸着方法 |
KR102280269B1 (ko) | 2014-11-05 | 2021-07-22 | 삼성디스플레이 주식회사 | 마스크 프레임 조립체 및 그 제조 방법 |
KR102025002B1 (ko) | 2015-04-17 | 2019-09-24 | 다이니폰 인사츠 가부시키가이샤 | 증착 패턴의 형성 방법, 누름판 일체형의 압입 부재, 증착 장치 및 유기 반도체 소자의 제조 방법 |
-
2004
- 2004-02-03 JP JP2004026904A patent/JP4478472B2/ja not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104183796A (zh) * | 2013-05-27 | 2014-12-03 | 三星显示有限公司 | 基底移动单元、沉积装置和制造有机发光显示装置的方法 |
CN104183796B (zh) * | 2013-05-27 | 2018-06-01 | 三星显示有限公司 | 基底移动单元、沉积装置和制造有机发光显示装置的方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2005222729A (ja) | 2005-08-18 |
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