JP4472002B2 - Electrical connection device - Google Patents

Description

  The present invention relates to an electrical connection device suitable for use as an auxiliary device in an energization test of a semiconductor device such as an integrated circuit.

  For the inspection of the electrical characteristics of an integrated circuit (IC) sealed with a package, a mold or the like, an inspection auxiliary device composed of an electrical connection device called a socket is generally used. Each electrode of the semiconductor device which is the object to be inspected is detachably connected to an electric circuit of an inspection device such as a tester through this electrical connection device. As this electrical connection device, there are devices described in Patent Documents 1 and 2.

Japanese Patent Laid-Open No. 11-31566 JP 2003-297506 A

  The electrical connection devices described in Patent Documents 1 and 2 include a frame in which a recess for receiving an object to be inspected is formed at the center. A large number of contacts called probes are incorporated into the frame from the lower surface of the frame via a rod-like elastic body for elastically supporting the contacts. Each contactor is arranged at intervals from each other in the extending direction of each side of the bottom surface of the recess so that the tip portion projects from the slot formed on the bottom surface of the recess into the recess. A semiconductor device, which is an object to be inspected, is mounted in a recess so that its electrode comes into contact with the tip of a corresponding contact. When a pressing force toward the bottom of the recess is applied to the semiconductor device mounted in the recess, each contact supported by the elastic body is attached to the lower surface of the frame. Pressed to the corresponding conductive path. Each conductive path of this wiring board is connected to a corresponding connection terminal of a tester that is an inspection device, and each contactor is connected to each electrode of the tester by connecting the electrical circuit of the tester with each electrode of the tester. The predetermined electrical inspection can be performed.

  By the way, in the conventional assembly process of the electrical connection device, the rod-like elastic body for elastically supporting each contact is formed at the lower part of the frame and attached to the lower side prior to the mounting of the wiring board to the lower surface of the frame. It is inserted into a recess that opens. The elastic body inserted into the recess is held at a predetermined position by supporting both ends of the elastic body on both end walls of the recess. After the assembly of the elastic body to the frame, a large number of contacts formed with receiving portions for receiving the elastic body have slots corresponding to the lower surface of the frame so that each of the receiving portions fits into the elastic body. After that, it is inserted into the frame. After the assembly of these contacts, the wiring board is attached so as to close the open end of the concave portion for accommodating the elastic body on the lower surface of the frame, whereby each contact is connected to the corresponding conductive path of the wiring board. .

  However, when the contact is damaged and the contact that has been damaged is replaced with a new contact, it is necessary to remove the wiring board from the frame in order to replace the contact. It is not easy to correctly attach the removed wiring board to the lower surface of the frame again so that a large number of conductive paths formed on the wiring board are aligned with a large number of contacts.

  In addition, when the wiring board is removed from the frame, the concave portion that accommodates the elastic body to which a large number of contacts are attached is opened downward, so that both ends bend to the elastic body that is elastically supported. If this occurs, there is a risk that both ends thereof fall off from the support portion. The dropout of the elastic body from the recess means dropout of all the contacts supported by the elastic body. Therefore, in the replacement operation of the contact, it is necessary to carefully handle the elastic body so that it does not fall off from a predetermined position while the wiring board is removed from the frame.

  Furthermore, it is necessary to replace the wiring board according to the type of tester or the inspection contents by the tester, and every time the wiring board is replaced, an elastic body holding a large number of contacts is not dropped from the frame. Handling is required.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an electrical connection device in which contact replacement work is easier than in the prior art.

  Another object of the present invention is to provide an electrical connection device capable of replacing a contact without removing a wiring board.

The present invention is formed on a frame member having a recess for receiving an object to be inspected provided with a plurality of electrodes, a plurality of contacts provided corresponding to the electrodes, and a bottom of the recess of the frame member. A plurality of slots arranged in parallel to each other to receive the contacts so that the tips of the contacts can contact the corresponding electrodes; and across the slots on the bottom in the recess an elastic member disposed to hold the contacts elastically, the mounted on the frame member, seen including a cap member for sandwiching the elastic member between the frame member, coupled to the contacts corresponding The elastic member is mounted on a beam portion positioned between the slots on the bottom portion in addition to the both ends of the elastic member riding on a shallow groove formed in the bottom portion of the recess.

  Furthermore, it is possible to fix a wiring board on which a wiring portion corresponding to the contact is formed on the lower surface of the frame member.

  Further, a drop-off preventing portion that can be locked to a corresponding edge of the slot can be provided at the rear end of each contact.

  A fitting recess that allows the elastic body to be press-fitted is formed in each contact, and the elastic body and the contact can be elastically coupled by press-fitting the elastic body into the fitting recess. . Various shapes such as a rectangle, a circular arc, or a polygon can be applied to the shape of the fitting recess according to the cross-sectional shape of the elastic body as long as the coupling between the two can be maintained by the elasticity of the elastic body. it can.

  The contact receives the elastic force of the elastic body. When the contact does not receive a pressing force from the electrode of the object to be inspected, the elastic force can hold the tip of the contact protruding from the slot into the recess.

  The contact portion of the contact that contacts the wiring portion can be a curved surface.

  The recess may be a rectangular planar shape, and the cap member may be an annular member having a rectangular planar shape that fits into the recess. In addition, the surface of the annular member on which the elastic member abuts is excessively moved on the wiring portion of the abutting portion of the contactor accompanied by shear deformation of the elastic body due to a pressing force from the electrode. In order to suppress it, the step part for suppressing the shear deformation of the said elastic body can be formed.

  A guide surface for guiding the object to be inspected to an inspection position corresponding to the electrode of the object to be inspected and the tip of the contact corresponding to the electrode is formed on the upper inner edge of the cap member. Can do.

  In the electrical connection device according to the present invention, the elastic member that elastically holds the contact is disposed across the slot that receives each contact on the frame member, and in the frame member that accommodates the elastic member as in the related art. Since no opening is formed in the space to allow the elastic member to fall, even if the cap member that holds the elastic member between the frame member and the frame member is removed from the frame member, it is arranged across the slot on the frame member. The formed elastic body does not fall downward as in the prior art, and the contact held by the elastic body is also reliably held in the frame member.

  For this reason, the elastic member arranged at a predetermined position on the frame member is taken out from above the frame member together with a number of contacts held by the member, and the contact that needs to be replaced is removed from the elastic member and replaced with a new contact. Thereafter, the elastic member is disposed at a predetermined position from above the frame member, and then the cap member is attached to the frame member, whereby the contact replacement operation can be completed.

  Therefore, in this contact replacement operation, the conventional elastic member is not accidentally dropped, and the contact can be easily replaced as compared with the conventional case.

  In addition, since the contact can be replaced while the wiring board is attached to the frame member, it is not necessary to remove and install the wiring board every time the contact is replaced. It is possible to replace the contactor.

  By providing each contactor with a drop-off preventing portion that can be locked to the edge of the slot, it is possible to more reliably prevent the contact member from being accidentally dropped.

  Moreover, both can be reliably and easily couple | bonded by fitting with the fitting recessed part formed in each said contact, and the said elastic body.

  When the contact is not subjected to a pressing force from the electrode of the object to be inspected, the tip is protruded from the slot into the recess so as to be pressed toward the bottom of the recess. When pressure is applied, reliable electrical contact between the electrode of the device under test and the corresponding contact can be obtained.

  By making the contact portion of the contactor a curved surface, damage due to contact between the contact portion and the wiring portion on the wiring board can be prevented, and durability of both the contactor and the wiring portion can be improved. Can do.

  In addition, by suppressing excessive movement of the contactor on the wiring part accompanied by shear deformation of the elastic body, the wiring part due to sliding of the contactor is improved along with improvement of durability of the elastic body. It is possible to suppress the acceleration of deterioration.

  In addition, by forming a guide surface for guiding the object to be inspected at the upper inner edge of the cap member, the object to be inspected can be positioned in the recess with a predetermined correct posture, and the inspection can be performed accurately and quickly. Progress can be promoted.

It is a perspective view which decomposes | disassembles and shows the electrical connection apparatus which concerns on this invention. It is a perspective view which shows the assembly | attachment process of the probe assembly to the frame member shown in FIG. FIG. 3 is a front view illustrating a coupling state between an elastic body and a contact of the probe assembly illustrated in FIG. 2. FIG. 3 is a plan view of a frame member to which the probe assembly shown in FIG. 2 is assembled. FIG. 5 is a cross-sectional view taken along line VV shown in FIG. 4. It is a top view of the frame member with which the cap member was mounted | worn after the assembly | attachment of a probe assembly. It is sectional drawing obtained along line VII-VII shown in FIG. It is sectional drawing which expands the use condition of the electrical connection apparatus which concerns on this invention, and shows the one part. 4 is a view similar to FIG. 3 showing another embodiment according to the present invention. FIG. 6 is a view similar to FIG. 3 showing still another embodiment of the present invention. It is a perspective view of the contact which shows the further another Example which concerns on this invention.

  As shown in FIG. 1, an electrical connection device 10 according to the present invention includes a plate-like frame member 12 having a rectangular planar shape as a whole, and contacts 14 called a number of probes incorporated in the frame member. A plurality of rod-like elastic members 16 to which a plurality of contacts 14 are respectively coupled, and a cap member 20 made of a generally rectangular annular member that is detachably fixed to the frame member 12 via bolts 18. Prepare.

  The frame member 12 is made of, for example, a non-conductive material such as a synthetic resin material, and a recess 22 having a rectangular planar shape that opens upward is formed at the center. A recess is formed on the upper surface 12a of the frame member 12. A rectangular enlarged opening 24 is formed around the open edge of 22 and larger than the diameter of the recess and having a similar shape to the recess 22. Since the enlarged opening 24 has a planar shape slightly larger than the outer shape of the cap member 20 and has a depth dimension sufficient to accommodate the cap member 20, it functions as a fitting hole for receiving the cap member 20. (See FIG. 7).

  The rectangular bottom portion 22a of the recess 22 has a plurality of slots 26 extending at right angles to the corresponding sides from the vicinity of each side of the recess 22 toward the central portion of the recess 22, and each side of the bottom portion 22a extends. They are aligned and spaced apart from each other in the direction. Each slot 26 is formed so as to penetrate from the upper surface of the bottom portion 22a to the lower surface 12b of the frame member 12.

  As shown in an enlarged view in FIG. 2, the outer end of each slot 26 is spaced from the upright peripheral wall 22 b of the recess 22 so that the bottom 22 a of the recess 22 is close to the outer end of the slot 26. A step portion 28 having a width dimension W is formed. Since the step portion 28 is located at the outer end portion of each slot 26, it constitutes the end edge of each slot 26. In the row of slots 26, shallow grooves 30 having an arcuate cross-sectional shape that crosses each slot 26 are formed in the vicinity of the outer end of each slot row. In the illustrated example, four shallow grooves 30 are formed in the bottom 22 a of the recess 22 along each side of the bottom. Both ends of each shallow groove 30 traverse each slot 26 of the corresponding slot group and extend outward in the width direction of the slot beyond the slot 26 located at the outermost side of each slot group.

  The elastic member 16 is made of rubber, for example. As shown in FIG. 3, the elastic member 16 has a semicircular circular bottom surface 16 a corresponding to the arc shape of the shallow groove 30, and a flat top surface 16 b and a lower side from the top surface. Each has a pair of vertical side surfaces 16c, 16c extending to the circular bottom surface 16a.

  Each contact 14 coupled to the elastic member 16 is made of a conductive metal member as is well known in the art. As will be described later, the plurality of contacts 14 a so that a tip 14 a rising upward from the contact 14 can protrude upward from the slot 26 and the lower edge of the contact 14 is received in the slot 26, as will be described later. Are coupled to each elastic member 16 so as to have a predetermined interval in the longitudinal direction of the elastic member 16 corresponding to each slot 26.

For coupling with the elastic member 16, a circular fitting recess 32 that opens upward near the rear end of the contact 14 is formed at the upper edge of each contact 14. The fitting recess 32 is formed so as to cover an angular region exceeding the semicircular region of the arc bottom 16a of the elastic member 16. Therefore, when the fitting recess 32 is fitted to the arc bottom 16a of the elastic member 16, a fastening allowance having a dimension t is given to each of the vertical side surfaces 16c of the elastic member 16, and due to this fastening allowance t, the elastic member 16 it can be securely coupled by the elasticity of the elastic member 16 and each contact 14 that is coupled thereto with.

  On the upper edge of each contactor 14, an overhanging portion 14 b protruding from the rear end of the contactor is formed. As will be described later, this overhanging portion 14b is located above the step portion along the edge of each slot 26, that is, the step portion 28 shown in FIG. 2, when the contact 14 is incorporated into the frame member 12. Projects in the width direction.

  Further, the contact 14 has a horizontal lower edge portion 14c substantially parallel to the upper edge provided with the fitting recess 32 in the vicinity of the rear end portion, and the horizontal edge portion is inclined through a curved surface 14d having a radius of curvature R. It continues to the lower edge portion 14e. The inclined lower edge portion 14e extends with an elevation angle from the curved surface 14d toward the tip 14a.

  As shown in FIG. 3, when a predetermined number of contacts 14 are aligned and coupled to the elastic members 16 by fitting the respective fitting recesses 32 with the circular bottom surfaces 16a of the elastic members 16, As shown in FIG. 2, a probe assembly (14, 16) is constructed. The probe assembly (14, 16) is formed on the frame member 12 so that each contact 14 constituting the probe assembly (14, 16) can be received in each slot 26 and the elastic member 16 can receive the circular bottom 16 a in the shallow groove 30. The upper surface 12 a is dropped into the slot 26 and the shallow groove 30 in the recess 22 of the frame member 12. Thereby, the probe assembly (14, 16) is assembled to the frame member 12. The state after assembling each probe assembly (14, 16) to the frame member 12 is shown in FIGS.

  As shown in FIG. 5, the elastic members 16 coupled to the corresponding contacts 14 have both ends riding on the shallow groove 30 formed in the bottom portion 22 a of the recess 22, and the portion between both ends is the bottom portion. Since it rides on and is supported by the beam portions 22aa located between the slots 26 of 22a, the elastic member 16 does not fall below the recess 22 and is securely held in the shallow groove 30. . Therefore, in the assembly process of the probe assembly of the electrical connection device 10, the elastic member 16 and the contactor 14 held by the elastic member 16 are not unexpectedly dropped downward from the frame member 12 integrally with the elastic member 16. .

  After the assembly of each probe assembly (14, 16) to the frame member 12, as shown in FIGS. 6 and 7, for example, the frame 18 is screwed into a screw hole 18a (see FIG. 4) of the frame member 12 by means of a bolt 18. A cap member 20 made of a synthetic resin material similar to the member 12 is fixed to the enlarged opening 24 of the frame member 12. In order to position the cap member 20, a positioning pin 34 is provided at the step portion of the enlarged opening 24. By placing the cap member 20 in the enlarged opening 24 so that the positioning pin 34 is received in a pin hole 34a formed in the cap member 20, each of the inner edges of the cap pin 20 is clearly shown in FIG. The cap member 20 can be coupled to the frame member 12 in the correct posture so that the tip 14a of the contactor 14 is properly exposed.

  Further, by attaching the cap member 20 to the frame member 12, each elastic member 16 is sandwiched between the shallow groove 30 of the frame member 12 and the lower surface 20a of the cap member 20 (see FIGS. 7 and 8).

  On the upper part of the inner edge of the cap member 20, as shown in FIG. 7, an inclined surface that guides a semiconductor device 36 such as an IC having a rectangular planar shape to be inspected toward the bottom 22 a of the lower recess 22. 20b is formed by chamfering.

  After the cap member 20 is attached, the wiring board 38 is fixed to the lower surface 12b of the frame member 12 as shown in FIGS. In the illustrated example, the wiring board 38 is fixed to the frame member 12 by a bolt 40 that is screwed into a screw hole 40 a formed in the frame member 12.

  FIG. 8 shows a state in which the cap member 20 and the wiring board 38 are attached to the upper surface 12a and the lower surface 12b of the frame member 12, respectively. As is well known in the art, a plurality of wiring portions 38a each including a conductive path connected to an electric circuit of a test device such as a tester (not shown) are formed on the upper surface of the wiring board 38. The contacts 14 are aligned corresponding to the portions 38a.

  In a state where the semiconductor device 36 is not disposed at the bottom 22a of the recess 22, each contactor 14 corresponds to the horizontal lower edge portion 14c due to the elasticity of the elastic member 16, as indicated by a virtual line in FIG. It is held so as to abut on the wiring part 38a. Further, in this state, the tip end 14 a is held so as to protrude greatly upward from the surface of the bottom 22 a of the recess 22, and the overhanging portion 14 b rides on the stepped portion 28, that is, the edge 28 of the slot 26. Since the overhanging portion 14b overhangs the end edge 28, even if the elastic member 16 is deformed and the fitting between the elastic body and the fitting recess 32 of the contactor 14 is loosened, for example, the overhanging portion 14b and the end edge 28 The engagement reliably prevents the contact 14 from falling out of the corresponding slot 26. Therefore, the overhanging portion 14 b functions as a drop-off preventing portion for the contact 14.

  When the semiconductor device 36 is dropped from above the cap member 20 toward the bottom portion 22a of the recess 22 with the electrode 36a provided on the lower surface thereof facing downward, the semiconductor device 36 is guided by the inclined surface 20b of the cap member 20 due to the guiding action of the inclined surface 20b. The device 36 is surely guided to a position where each electrode 36a contacts the tip 14a of the corresponding contact 14, and when the pressing force indicated by the arrow 42 in FIG. 8 acts on the semiconductor device 36, the pressing force is applied to the contact 14. Acts as a moment force.

  Due to this moment force, the contact 14 elastically held by the elastic member 16 is slightly counterclockwise as viewed in FIG. 8 with the curved surface 14d formed on the lower edge thereof and contacting the wiring portion 38a as a fulcrum. Cause rotation. With this rotation, the contact portion (14d) of the contactor 14 with respect to the wiring portion 38a moves toward the tip 14a of the contactor 14, and the contactor 14 is generally slightly displaced to the right in the drawing. Arise. Since this slight displacement is restricted by the outer end wall 26a of the slot 26, the elastic member 16 generates a shearing force in the lateral direction in the drawing from one vertical side surface 16c thereof. However, since the lower surface 20a of the cap member 20 that receives the top surface 16b of the elastic member 16 is formed with a step portion 20c that receives the other vertical side surface 16c of the elastic member 16, excessive shear deformation of the elastic member 16 is caused. Is suppressed. Thereby, the elasticity of the elastic member 16 can ensure the proper swinging stroke of the contact 14 from the position of the phantom line shown in the figure to the position shown by the solid line in the drawing, and on the wiring portion 38a of the contact 14. Therefore, the connection between the tip 14a of the contact 14 and the electrode 36a of the semiconductor device 36 and the connection portion (14d) of the contact 14 and the wiring portion 38a of the wiring board 38 are suppressed. Each of them can be surely provided, and wear and damage of the contact portion (14d) of the contact 14 and the wiring portion 38a can be suppressed.

  Although the curved surface 14d can be omitted, it is desirable that the portion (14d) serving as the fulcrum of the contactor 14 be a curved surface in order to reliably prevent the wiring portion 38a from being damaged.

  Further, when the contactor 14 is swung, a gap is generated between the peripheral wall of the fitting recess 32 and the other vertical side surface 16c of the elastic member 16 as shown by a solid line in FIG. Even if the fitting with the child 14 is loosened, the protruding portion 14b is prevented from falling off, so that the contact 14 is reliably prevented from dropping out of the slot 26.

  By connecting the electrode 36a of the semiconductor device 36 and the wiring portion 38a of the wiring board 38 connected to the electrical circuit of the tester through the contact 14, the semiconductor device 36 undergoes a predetermined electrical test.

  When a defect such as a defect occurs in the contact 14 of the electrical connection device 10, the defective contact 14 can be replaced after the semiconductor device 36, which is an object to be inspected, is removed from the electrical connection device 10. For the replacement of the contact 14, the bolt 18 is loosened, and the cap member 20 is removed from the enlarged opening 24 of the frame member 12 together with the bolt 18.

  As a result, as shown in FIG. 4, the probe assemblies (14, 16) are exposed in the recesses 22 of the frame member 12. Among these, as shown in FIG. 2, the probe assembly (14, 16) including the defective contact 14 is pulled up above the enlarged opening 24, and the defective contact 14 is replaced with a normal one. . After the replacement of the contact 14, the probe assembly (14, 16) replaced with the normal contact 14 has the elastic member 16 fitted in a predetermined shallow groove 30, and each contact 14 has a corresponding slot 26. It arrange | positions in a predetermined location so that it may fit. Thereafter, as described above, the cap member 20 is fixed to the frame member 12 by the bolts 18, thereby completing the replacement operation of the contact 14.

  Thus, since it is not necessary to remove the wiring board 38 from the frame member 12 to replace the contact 14, alignment work between the horizontal lower edge part 14 c of each contact 14 and the corresponding wiring part 38 a of the wiring board 38 is performed. The required work of attaching the wiring board 38 is not required, and the efficiency of the work of replacing the contact 14 is significantly improved.

  Further, for example, even when the wiring board 38 is removed from the frame member 12 for replacement of the wiring board 38, the elastic member 16 is not likely to drop off from the frame member 12, so that the wiring board 38 can be replaced. This is easier than in the past.

  In order to replace the contactor 14, the wiring board 38 is removed in the same manner as in the prior art, and the contactor 14 having a defect is extracted from each slot 26. Instead, the normal contactor 14 passes through the slot 26 and passes through the frame member 12. Can be put in. However, as described above, it is possible to take out the probe assembly (14, 16) from above the frame member 12 from the frame member 12 and replace the defective contact 14 with a normal one in order to speed up the replacement work. Is desirable.

  In the case of assembling the electrical connection device 10, after attaching the wiring board 38 to the lower surface 12 b of the frame member 12, the probe assemblies (14, 16) are arranged in the frame member 12, and then the frame member It is desirable to attach the cap member 20 to the 12 enlarged openings 24. By passing through such an assembly procedure, the position of the wiring portion 38a of the wiring board 38 can be visually confirmed through the slot 26 before the probe assembly (14, 16) is assembled to the frame member 12. Proper attachment of the substrate 38 can be easily performed.

  Instead of the elastic member 16, elastic members 116 and 216 having a rectangular cross-sectional shape and a circular cross-sectional shape as shown in FIGS. 9 and 10 can be used, respectively. In this case, the fitting recesses 132 and 232 of the contactor 14 are given shapes corresponding to the shapes of the elastic members 116 and 216, respectively, as shown in FIGS. In the example shown in FIG. 9, the tightening allowance t similar to that shown in FIG. 3 is given, and thereby the elastic coupling between the elastic member 116 and the contact 14 is ensured. Further, in the example shown in FIG. 10, a circumferential region exceeding the semicircle of the elastic member 216 is provided to the fitting portion 232, and the elastic member 216 and the contactor 14 are elastically tightened by tightening the circumferential region. Bonding is ensured.

  Although not shown, the shallow groove 30 is provided with a cross-sectional shape adapted to receive the elastic members 116 and 216 as shown in FIGS. 9 and 10.

  As the contactor 14 according to the present invention, a Kelvin contactor 14 can be used as shown in FIG. As is well known in the art, the Kelvin contactor 14 corresponds to the pair of wiring portions 138a on the wiring board 38, and a pair of conductive layers 114a and an electric insulating layer 114b disposed between the two conductive layers. The pair of tips 14a, 14a formed in each conductive layer is disposed so as to be shifted back and forth in the extending direction of the contact 14, but in the Kelvin contact 14, both the tips 14a, 14 a is used so as to be in contact with the same electrode 36 a of the semiconductor device 36.

  The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 10 Electrical connection apparatus 12 Frame member 14 Contact 16 Elastic member 20 Cap member 22 Recess 26 Slot 28 (Step part) Edge 30 Shallow groove 32 Fitting recessed part 36 Semiconductor device 38 Wiring board 38a Wiring part

Claims (8)

  A frame member having a recess for receiving an object to be inspected provided with a plurality of electrodes, a plurality of contacts provided corresponding to the electrodes, and a bottom of the recess of the frame member, and each contact A plurality of slots arranged in parallel to each other to receive the contacts so that the tips of the contacts can abut against the corresponding electrodes, and the contacts disposed across the slots on the bottom in the recess An elastic member that elastically holds a child; and a cap member that is mounted on the frame member and sandwiches the elastic body with the frame member, and is coupled to the corresponding contactor In addition to riding on a shallow groove formed at the bottom of the recess, both ends ride on a beam portion located between the slots on the bottom.   Furthermore, the wiring board is fixed to the lower surface of the frame member, and includes a wiring board formed with a wiring portion that is pressed by the contact when the tip of the contact is pressed by the electrode. The electrical connection device described in 1.   The electrical connection device according to claim 1, wherein a drop-off preventing portion that can be locked to a corresponding edge of the slot is formed at a rear end of each contact.   Each contact has a fitting recess allowing the elastic body to be press-fitted, and the elastic body and each contact are elastically coupled by press-fitting the elastic body into the fitting recess. The electrical connection device according to claim 1 or 2.   5. The contact according to claim 4, wherein when the contact member does not receive a pressing force from the electrode of the object to be inspected, the tip is protruded from the slot into the recess by the elastic force of the elastic body. The electrical connection device described.   The electrical connection device according to claim 5, wherein a contact portion of the contact that contacts the wiring portion is a curved surface.   The recess is a recess having a rectangular planar shape, the cap member is an annular member having a rectangular planar shape that fits into the recess, and the surface of the annular member on which the elastic member abuts, A step for suppressing shear deformation of the elastic body in order to suppress excessive movement of the contact portion of the contact member on the wiring portion accompanied by shear deformation of the elastic body due to a pressing force from the electrode. The electrical connection device according to claim 5, wherein the portion is formed.   A guide surface for guiding the object to be inspected to an inspection position corresponding to the electrode of the object to be inspected and the tip of the contact corresponding to the electrode is formed on the upper inner edge of the cap member. The electrical connection device according to claim 6.

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