JP4461761B2 - Manufacturing method of multilayer ceramic electronic component - Google Patents

Description

SUMMARY OF THE INVENTION The present invention relates to the production how the laminated ceramic electronic component, in particular, the components film such as internal conductor film provided on the multilayer ceramic electronic component, by printing using a rotary printing press, on the long sheet comprising the step of forming, in which relates to the production how the laminated ceramic electronic component.

  Regarding a method for producing a multilayer ceramic capacitor as an example of a multilayer ceramic electronic component, a long mother ceramic green sheet backed by a long carrier film is prepared, and then using a gravure printing machine as a rotary printing machine, On the mother ceramic green sheet, first, a conductive paste film to be an internal conductor film is formed, and then a step absorbing ceramic paste film for absorbing a step due to the thickness of the conductive paste film is formed. What is provided is known (for example, refer to Patent Document 1).

On the other hand, in a general gravure printing method, the misregistration of the web supplied to or discharged from the downstream unit is detected, and the path length between the upstream unit and the downstream unit is corrected. For example, Patent Document 2 proposes a register control method characterized by adjusting the rotational speed of the drive system of a downstream unit when the adjustment of the path length exceeds a predetermined range.
JP-A-8-250370 JP-A-11-28805

  In the registration control method described in Patent Document 2 described above, the registration of the web supply direction is more specifically performed by moving the compensator roll and thereby correcting the path length. However, when the web is an easily stretchable sheet such as a mother ceramic green sheet backed by a carrier film described in Patent Document 1, it is difficult to register with high accuracy. In addition, when a two-step printing process such as pre-printing and reprinting is performed, it is difficult to reproduce the elongation of the web during pre-printing when plastic deformation occurs in the web. Also in this case, it is difficult to register with high accuracy.

  In the register control method described in Patent Document 2, the rotational speed of the drive system of the downstream unit is adjusted only when the adjustable amount of the path length due to the movement of the compensator roll reaches a limit. ing. On the other hand, as described above, when the web is an easily stretchable sheet, the direction of movement of the compensator roll for adjusting the path length is always constant when registering, so immediately after the stroke end of this movement. And continuous operation becomes impossible.

  For this reason, when an easily stretchable sheet such as a mother ceramic green sheet backed by a carrier film described in Patent Document 1 is to be printed, the registration control method described in Patent Document 2 is not necessarily performed. It is not suitable.

  Therefore, an object of the present invention is to provide a method for manufacturing a multilayer ceramic electronic component that can solve the above-described problems.

  The present invention provides a mother ceramic green sheet manufacturing process for manufacturing a long mother ceramic green sheet on which at least first and second component films for a multilayer ceramic electronic component are formed, and a plurality of mother ceramic green sheets. Manufacturing a multilayer ceramic electronic component comprising: a cutting process for stacking a plurality of ceramic green sheets each having a predetermined size, and a stacking process for stacking the plurality of ceramic green sheets. First directed to the method. In order to solve the technical problem described above, such a method for manufacturing a multilayer ceramic electronic component is characterized by having the following configuration.

  The mother ceramic green sheet manufacturing step includes a first printing step, a second printing step, a deviation correction step, and a pitch correction step.

In the first printing step, the first printing roll and the first printing roll are used by using a first printing roll in which an image line portion is provided on the outer peripheral surface and a first pressing roller that is in pressure contact with the first printing roll. The mother ceramic green sheet backed by a carrier film is supplied between the pressure contact rolls of the first and second prints applied to the image area on the mother ceramic green sheet, and the first component film is formed. Forming is performed.

In the second printing step, the second printing roll and the second printing roll are used by using a second printing roll in which the image line portion is provided on the outer peripheral surface and a second pressing roll in pressure contact with the second printing roll. A mother ceramic green sheet backed by a carrier film after the first printing process is performed between the press-contacting roll and the printing paste applied to the image line portion on the mother ceramic green sheet. To form a second component film.

  The deviation correction step is performed to correct a deviation between the first and second component films in the supply direction of the mother ceramic green sheet. In this deviation correction step, the deviation measurement step for measuring the deviation between the first and second component films immediately after the second printing step, and the deviation measured in the deviation measurement step are corrected. A path length changing step for changing the path length of the mother ceramic green sheet before the second printing step.

The pitch correction step is performed to correct the printing pitch of the first printing step and the printing pitch of the second printing step in the supply direction of the mother ceramic green sheet so as to coincide with each other. In the pitch correction step, the pitch measurement step for measuring the print pitch of the first printing step immediately before the second printing step, and the print pitch measured in the pitch measurement step and the target pitch match. A peripheral speed changing step for changing the peripheral speed of the second printing roll. The above-described deviation correction process is performed after the pitch correction process is performed.

  The target pitch described above may be a preset value, but is preferably determined as follows. In other words, the shift between the first and second component films is performed immediately after the second printing step each time while the second printing step is performed a plurality of times without performing the shift correcting step and the pitch correcting step. By measuring, the step of obtaining the amount of change of the deviation per one printing step and the step of measuring the printing pitch of the first printing step immediately before the second printing step are further carried out. The target pitch is determined by considering the amount of change in the shift in the printing pitch of the first printing process obtained by the process.

  The first printing step and the second printing step may be continuously performed in one printing machine, but the mother ceramic green sheet after the first printing step is wound around the winding roll. The present invention is applied particularly advantageously when the second printing step is performed on a mother ceramic green sheet taken from a take-up roll.

  In the first printing step, a first register mark having a fixed positional relationship with the first component film is printed, and in the second printing step, a first positional relationship with the second component film is fixed. It is preferable that two register marks are printed, and the shift between the first and second component films is determined by measuring the shift between the first and second register marks in the shift measuring step described above. .

  The first register mark is printed on the front side and the rear side in the supply direction of the mother ceramic green sheet, respectively, and in the pitch measurement step, the distance between the first register mark on the front side and the rear side is measured. Thus, it is preferable that the printing pitch of the first printing process is obtained.

  In the first printing process, apart from the first register mark, the first and second pitch measurement marks whose positional relationship with the first component film is constant are the supply directions of the mother ceramic green sheet. Even if the printing pitch of the first printing process is determined by measuring the distance between the first and second pitch measurement marks in the pitch measurement process described above, Good.

  In the method for manufacturing a multilayer ceramic electronic component according to the present invention, the first and second component films printed in the first and second printing steps are aligned with each other in the method for manufacturing the multilayer ceramic electronic component. Any component film may be used as long as it is to be formed in a heated state.

  As a first example, the first component film is one of a conductive paste film and a step-absorbing ceramic paste film for absorbing a step due to the thickness of the conductive paste film. The film is one of a conductive paste film and a step-absorbing ceramic paste film.

  As a second example, the first component film is both the first conductive paste film and the first step absorbing ceramic paste film for absorbing a step due to the thickness of the first conductive paste film. And the second component film is a second conductive paste film formed on the first conductive paste film and the first step-absorbing ceramic paste film via the second mother ceramic green sheet. And a second step-absorbing ceramic paste film for absorbing a step due to the thickness of the second conductive paste film. In this case, after the first printing step and before the second printing step, the second mother ceramic green sheet is placed on the first conductive paste film and the first step absorbing ceramic paste film. The process of arrange | positioning to is further provided.

  As can be seen from the examples of the first and second component films described above, the term “first printing step” for printing the first component film and the second component film are printed. The term “second printing step” is used to distinguish between other printing steps. Therefore, in the case of the second example, the step of printing one of the first conductive paste film and the first step-absorbing ceramic paste film is defined as a “first printing step”. While the process of printing the other is defined as the “second printing process”, the process for printing both the first conductive paste film and the first step absorbing ceramic paste film is again referred to as the “second printing process”. 1 ”, and a process for printing both the second conductive paste film and the second step-absorbing ceramic paste film may be defined again as a“ second printing process ”.

  In the step of disposing the second mother ceramic green sheet, the first mother ceramic green sheet on which the first conductive paste film and the first step-absorbing ceramic paste film are formed is preferably the first. The first and second carrier films are directed outward while the second mother ceramic green sheet is lined with the second carrier film and the second mother ceramic green sheet is lined with the second carrier film. A contact step of bringing the conductive paste film and the first step-absorbing ceramic paste film and the second mother ceramic green sheet into contact with each other; and a thermocompression bonding step that exerts a thermocompression bonding action between the first and second carrier films; Then, from the second mother ceramic green sheet, And a peeling step of peeling the Lum.

  In the thermocompression bonding process described above, the first and second carrier films obtained by carrying out the contact process are directed outward, the first conductive paste film, the first step absorbing ceramic paste film, and the second A long composite structure in a state where the mother ceramic green sheets are in contact with each other between a heated heating roll and an unheated non-heated roll that is pressed against the heating roll. The structure is in contact with the outer peripheral surface of the non-heating roll in a predetermined range, but is preferably guided so as to contact the outer peripheral surface of the heating roll only at the nip portion with the non-heating roll.

  In the method for manufacturing a multilayer ceramic electronic component according to the present invention, the first and second printing steps are preferably performed by gravure printing.

First, according to the method for manufacturing a multilayer ceramic electronic component according to the present invention, the printing pitch of the first printing step and the printing pitch of the second printing step in the supply direction of the long mother ceramic green sheet are matched. The first and second components in the supply direction of the long mother ceramic green sheet after the pitch correction step for correcting in this way is performed by changing the peripheral speed of the second printing roll Since the shift correction step for correcting the shift between the films is performed by changing the path length of the long mother ceramic green sheet before the second printing step, the first and second configurations It is possible to perform highly accurate registration, that is, alignment between element films.

Further, since a relatively large misalignment is corrected by the pitch correction process, the misalignment amount to be corrected by the misalignment correction process can be made relatively small. Therefore, in order to change the path length of the long mother ceramic green sheet in the deviation correction process, for example, when moving the compensator roll, the compensator roll does not frequently reach the stroke end during the driving operation. Factors that hinder driving can be reduced.

Also, for position shift correction at two stages such pitch correction process and deviation correction process, even if rather easy elongation mother ceramic green sheets long, can be aligned with high accuracy.

  In the method of manufacturing a multilayer ceramic electronic component according to the present invention, the first printing is performed immediately after the second printing step each time while the second printing step is performed a plurality of times without performing the deviation correction step and the pitch correction step. And measuring the deviation between the second component films, the amount of change of the deviation per second printing step is obtained, and the printing pitch of the first printing step immediately before the second printing step. When the target pitch is determined, the target pitch can be determined more accurately by taking into account the amount of deviation change in the measured or determined print pitch of the first printing step.

  When the mother ceramic green sheet after the completion of the first printing process is wound on a winding roll and the second printing process is performed on the mother ceramic green sheet drawn from the winding roll, Although it has been relatively difficult to perform alignment in the second printing process with high accuracy, according to the present invention, it is easy to perform alignment in the second printing step with high accuracy.

  In the first printing step, the first register mark having a fixed positional relationship with the first component film is printed, and in the second printing step, the first positional relationship with the second component film is fixed. If the two register marks are printed and the deviation between the first and second component films is obtained by measuring the deviation between the first and second register marks in the deviation measuring step, the deviation is obtained. Deviation measurement in the measurement process can be performed more easily.

  The first register mark is printed on the front side and the rear side in the supply direction of the mother ceramic green sheet, respectively, and in the pitch measurement step, the distance between the first register mark on the front side and the rear side is measured. Thus, if the printing pitch of the first printing process is obtained, the printing pitch can be obtained more easily, and the first register mark can be made multifunctional.

  In place of the above-described method, in the first printing step, the first and second pitch measurement marks whose positional relationship with the first component film is constant apart from the first register mark described above. Is printed on the front side and the rear side in the supply direction of the mother ceramic green sheet, respectively, and in the pitch measurement step, the distance between the first and second alignment marks is measured, whereby the print pitch of the first printing step However, the print pitch can be obtained more easily.

  In the method for manufacturing a multilayer ceramic electronic component according to the present invention, the first component film and the first step-absorbing ceramic paste film are printed in the first printing step, and the first conductive paste film and the first This is applied when the second conductive paste film and the second step absorbing ceramic paste film are formed in the second printing process via the second mother ceramic green sheet on the step absorbing ceramic paste film. When the second mother ceramic green sheet is disposed on the first conductive paste film and the first step absorbing ceramic paste film, the first conductive paste film and the first step absorbing ceramic paste are disposed. The first mother ceramic green sheet forming the film is backed by the first carrier film, and the first The first conductive paste film and the first step-absorbing ceramic with the first and second carrier films facing outward, while the mother ceramic green sheet is lined with the second carrier film A contact step of bringing the paste film and the second mother ceramic green sheet into contact with each other, a thermocompression bonding step of exerting a thermocompression action between the first and second carrier films, and then the second mother ceramic green sheet If the peeling process which peels 2 carrier films is implemented, it will be easy to arrange | position a 2nd mother ceramic green sheet as desired.

  In the above-described thermocompression bonding step, the first and second carrier films obtained by performing the contact step are directed outward, the first conductive paste film, the first step absorbing ceramic paste film, and the second While carrying out the process of supplying a long composite structure in a state where the mother ceramic green sheets of each other are in contact with each other between a heated heating roll and an unheated unheated roll pressed against the heated roll, If the scale composite structure is in contact with a predetermined range of the outer peripheral surface of the non-heating roll, but is guided so as to contact the outer peripheral surface of the heating roll only at the nip portion with the non-heating roll, the first conductive paste film And a good thermocompression bonding state can be obtained between the first step-absorbing ceramic paste film and the second mother ceramic green sheet. To, heating by the heating roll exerted a long time in the first and second carrier films may be those carrier film is advantageously prevented from being deformed undesirably.

  When gravure printing is applied in the first and second printing steps, the component film can be formed with high pattern accuracy and thin film thickness, so that the above-described high-accuracy alignment can be obtained. An effect will be exhibited more notably.

  FIG. 1 is a cross-sectional view schematically showing a multilayer ceramic capacitor 1 as an example of a multilayer ceramic electronic component manufactured by applying a manufacturing method according to an embodiment of the present invention.

  The multilayer ceramic capacitor 1 includes a multilayer body 2 as a sintered body. The multilayer body 2 includes a plurality of laminated ceramic layers 3 and internal conductor films 4 and 5 formed along a specific interface between the ceramic layers 3.

  External electrodes 6 and 7 are formed at opposite ends of the laminate 2, respectively. The internal conductor film 4 is electrically connected to one external electrode 6, and the internal conductor film 5 is electrically connected to the other external electrode 7. The internal conductor films 4 and the internal conductor films 5 are alternately arranged in the stacking direction.

  In order to manufacture the laminated body 2 with which such a multilayer ceramic capacitor 1 is provided, the steps shown in FIGS. 2 and 3 are performed.

  First, referring to FIG. 2, a long carrier film 8 made of, for example, polyethylene terephthalate is prepared, and a long first mother ceramic green sheet 9 is formed thereon. On the mother ceramic green sheet 9, a first ceramic paste film 11 for absorbing a step due to the thickness of the first conductive paste film 10 and the first conductive paste film 10 is formed.

  On the conductive paste film 10 and the step absorbing ceramic paste film 11, a long second mother ceramic green sheet 12 is formed. On the mother ceramic green sheet 12, a second conductive paste film 13 and a second step absorbing ceramic paste film 14 for absorbing a step due to the thickness of the second conductive paste film 13 are formed.

  Next, the four-layer composite structure 15 including the mother ceramic green sheets 9 and 12 on the carrier film 8 is cut into a plurality of predetermined regions. A cut line 16 for performing this cut is indicated by a one-dot chain line in FIG.

  Next, the four-layer composite structure 15 in each of the plurality of regions surrounded by the cut lines 16 is taken out as shown in FIG. In order to facilitate removal of the four-layer composite structure 15 after cutting, it is preferable that a release layer is formed on the carrier film 8. The four-layer composite structure 15 after cutting includes ceramic green sheets 9a and 12a of a predetermined size provided by a part of each of the first and second mother ceramic green sheets 9 and 12.

  Next, a stacking step is performed in which a plurality of four-layer composite structures 15 are stacked and pressure-bonded as indicated by arrows 17 in FIG. By repeating this lamination process as many times as necessary, a raw mother laminate 18 is obtained. The raw mother laminated body 18 is divided along a dividing line 19 indicated by a one-dot chain line in FIG. As a result, a plurality of raw laminate chips 20 are obtained.

  The raw laminated body chip 20 becomes the laminated body 2 after sintering shown in FIG. 1 by firing it. That is, the ceramic green sheets 9a and 12a included in the raw laminate chip 20 become the ceramic layer 3 after sintering, and the conductive paste films 10 and 13 become the internal conductor films 4 or 5 after sintering. . Further, the step-absorbing ceramic paste films 11 and 14 act so as to absorb the step due to the thickness of the conductive paste films 10 and 13, that is, the sintered inner conductor films 4 and 5. Integrated with layer 3.

  Next, external electrodes 6 and 7 are formed at each end of the sintered laminate 2 as described above, thereby completing the multilayer ceramic capacitor 1.

  In order to manufacture the laminate 2 as described above, in particular, to manufacture the four-layer composite structure 15 shown in FIG. 2, each process described below with reference to FIGS. 4 to 11 is performed. .

  FIG. 4 shows a first gravure printing machine 21 as an example of a rotary printing machine. As will be described later in detail, the first gravure printing machine 21 handles the first mother ceramic green sheet 9 that is backed by the first carrier film 8 shown in FIG. The first conductive paste film 10 and the first step absorbing ceramic paste film 11 are printed on the mother ceramic green sheet 9.

  First, generally described, in the gravure printing machine 21, the long sheet A is pulled out from the first winding roll 22, and after passing through the first printing unit 23, the first sheet is placed on the long sheet A. After forming the long sheet B in the state in which the constituent film is formed, and after passing through the second printing unit 24, the second constituent film is further formed on the long sheet B. The long sheet C is finally wound on the second winding roll 25. Such a supply direction 26 of the long sheets A to C is indicated by an arrow.

  A first drying furnace 27 is disposed downstream of the first printing unit 23 in the supply direction 26, and the first component film printed in the first printing unit 23 is dried. In addition, a second drying furnace 28 is disposed on the downstream side of the second printing unit 24, and the second component film printed in the second printing unit 24 is dried.

  A compensator roll 29 is disposed between the first printing unit 23 and the second printing unit 24 in a state where the long sheet B is wound. Guide rolls 30 and 31 are arranged on the upstream side and the downstream side of the compensator roll 29, respectively. The compensator roll 29 is configured to move up and down as indicated by a double arrow 32, while the guide rolls 30 and 31 are fixedly positioned.

  The compensator roll 29 changes the path length of the long sheet B between the first printing unit 23 and the second printing unit 24 by moving in the direction of the double-headed arrow 32, whereby the supply direction 26 to correct the misalignment between the first and second component films at 26.

  The above-described movement of the compensator roll 29 is controlled by the compensator roll control device 33. More specifically, the compensator roll control device 33 processes the image picked up by the displacement measurement camera 34 provided immediately downstream of the second printing unit 24, thereby the first and second components. The displacement between the films is measured, and the compensator roll 29 is moved so as to correct the measured displacement. The timing of the start of shooting by the deviation measurement camera 34 is given by a trigger signal from a trigger sensor 35 arranged on the upstream side of the deviation measurement camera 34.

  FIG. 5 shows the first printing unit 23 in an enlarged manner. The first printing unit 23 includes a first printing roll 36 and a first pressing roll 37 that is in pressure contact with the first printing roll 36. The long sheet A is supplied between the printing roll 36 and the pressure contact roll 37. Then, the printing roll 36 and the pressure contact roll 37 rotate in the directions of arrows 38 and 39, respectively, whereby the long sheet A is conveyed in the supply direction 26 described above.

  The first printing roll 36 is immersed in the printing paste 41 accommodated in the tank 40, whereby an image line portion 42 (a part of which is schematically shown in FIG. 5) provided on the outer peripheral surface of the printing roll 36. The printing paste 41 is applied. Excess printing paste 41 on the outer peripheral surface of the printing roll 36 is scraped off by the doctor blade 43.

  Although the detailed illustration is omitted, the second printing unit 24 has substantially the same configuration as the first printing unit 23, and includes a second printing roll 44 and a second pressure contact roll 45. ing.

  The peripheral speed of the second printing roll 44 is controlled by a printing roll control device 46 as shown in FIG. More specifically, the printing roll control device 46 processes images picked up by two pitch measurement cameras 47 and 48 provided so as to be arranged in the supply direction 26 immediately upstream of the second printing unit 24. Thus, the printing pitch of the first component film printed by the first printing unit 23 is measured, and the second printing roll 44 is adjusted so that the measured printing pitch matches the target pitch. Change the circumferential speed. The timing of the start of photographing by the pitch measurement cameras 47 and 48 is given by a trigger signal from a trigger sensor 49 arranged on the upstream side of the pitch measurement cameras 47 and 48.

  Using the first gravure printing machine 21 having the above-described configuration, first, the first mother that is backed by the two-layer composite structure 50 shown in FIG. 2, that is, the first carrier film 8 is used. The first conductive paste film 10 and the first step absorbing ceramic paste film 11 printed on the ceramic green sheet 9 are produced as follows.

  Referring to FIG. 4, a long first mother ceramic green sheet 9 backed by a long carrier film 8 is used as the long sheet A. The first printing unit 23 is used for printing the first conductive paste film 10, and therefore, the conductive paste is used as the printing paste 41. In this way, the long sheet B that has passed through the first printing unit 23 is in a state in which the first conductive paste 10 is formed on the first mother ceramic green sheet 9 backed by the carrier film 8. ing.

  As can be seen from the printed state of the conductive paste film 10, the long sheet A is supplied with the mother ceramic green sheet 9 facing the first printing roll 36 side.

  The first conductive paste film 10 described above is shown in a plan view in FIG. In FIG. 6, a first register mark 51 and a trigger mark 52 are shown on one side edge of the first mother ceramic green sheet 9. Each of the trigger marks 52 is disposed on the front side in the supply direction 26 of each of the first register marks 51. Each of the first register mark 51 and the trigger mark 52 is printed one by one, for example, every time the first printing roll 36 makes one rotation. Printed at the same time. As a result, the positional relationship between the first register mark 51 and trigger mark 52 and the first conductive paste film 10 is constant.

  As described above, the long sheet B including the first mother ceramic green sheet 9 on which the first conductive paste film 10 is formed passes through the first drying furnace 27 and the compensator roll 29, and then passes through the second sheet B. The print unit 24 is reached.

  In the second printing unit 24, a ceramic paste is used as a printing paste. As shown in FIG. 6, the first step-absorbing ceramic paste film 11 is a conductive paste film on the first mother ceramic green sheet 9. 10 is formed on a region where 10 is not formed.

  Further, as shown in FIG. 6, the second register marks 53 are provided at regular intervals on one side edge of the first mother ceramic green sheet 9 and in the vicinity of each of the first register marks 51. It is done. The second register mark 53 is printed at the same time as the first step absorbing ceramic paste film 11 in the second printing unit 24, and the positional relationship with the first step absorbing ceramic paste film 11 is the same. It is constant.

  Thus, as shown in FIG. 6, the long sheet C that has passed through the second printing unit 24 has the first conductive paste film 10 and the first step absorbing ceramic paste film 11 formed thereon. The mother ceramic green sheet 9 is included to provide the two-layer composite structure 50 shown in FIG.

  Next, such a long sheet C passes through the second drying furnace 28, and is then wound around the second winding roll 25.

  In printing by the gravure printing machine 21 as described above, determination of target pitch, pitch correction, and deviation correction are performed as follows.

  First, in order to determine the target pitch, printing is started in a state where the control of the compensator roll 29 by the compensator roll control device 33 and the control of the second printing roll 44 by the printing roll control device 46 are not performed. When the trigger mark 52 printed in the first printing unit 23 passes through the trigger sensor 35, a shooting trigger of the deviation measurement camera 34 is given, and printing is performed by the first and second printing units 23 and 24, respectively. The captured first and second register marks 51 and 53 are imaged. By processing this captured image, the misregistration at the initial stage of printing is measured.

  Such positional deviation is measured for several shots to several tens of shots, and the amount of change of the deviation per shot is obtained. This amount of change is a print pitch difference D1 between the first printing unit 23 and the second printing unit 24.

  On the other hand, when the trigger mark 52 passes through the trigger sensor 49, the shooting triggers of the pitch measurement cameras 47 and 48 are given, and the first register marks 51 on the front side and the rear side are imaged simultaneously. By processing this captured image, the printing pitch P1 in the first printing unit 23 is obtained.

  And the target pitch P2 in the 2nd printing part 24 is determined by considering the above-mentioned printing pitch difference D1 to the printing pitch P1 calculated | required in this way.

  As the target pitch P2, a value set in advance may be used instead of the above-described measurement result.

  Next, when the trigger mark 52 printed in the first printing unit 23 passes the trigger sensor 49 for pitch correction, a shooting trigger is given to the pitch measurement cameras 47 and 48. As a result, the first and second register marks 51 on the front side and the rear side are simultaneously imaged by the pitch measurement cameras 47 and 48, and the obtained images are stored and then processed, whereby the first printing unit 23 is processed. The printing pitch X is determined. Then, the printing pitch X is compared with the target pitch P2 described above, and the peripheral speed of the second printing roll 44 is changed so that they match. That is, when X <P2, the peripheral speed of the second printing roll 44 is increased, and when X> P2, the peripheral speed is decreased.

After the above-described pitch correction, when the trigger mark 52 printed in the first printing unit 23 passes the trigger sensor 35 for deviation correction, a shooting trigger is given to the deviation measurement camera 34, and the first The first and second register marks 51 and 52 printed by the second and second printing units 23 and 24, respectively, are imaged. The displacement is measured by processing the captured image in the compensator roll control device 33. Then, the position of the compensator roll 29 is adjusted so as to correct this deviation, whereby the path length of the long sheet B is changed.

  As described above, the long sheet C wound around the second winding roll 25 gives the two-layer composite structure 50 shown in FIG.

  Next, in order to obtain a three-layer composite structure 54 in a state where the second mother ceramic green sheet 12 is disposed on the two-layer composite structure 50, a process as described with reference to FIGS. Is implemented. Here, FIG. 7 is a front view showing a state in which a process for obtaining the three-layer composite structure 54 is being performed, and FIG. 8 is an enlarged cross-sectional view taken along line VIII-VIII in FIG. In FIG. 7, an arrow 26 indicates the supply direction.

  As well shown in FIG. 8, the first mother ceramic green sheet forming the two-layer composite structure 50, that is, the first conductive paste film 10 and the first step absorbing ceramic paste film 11. 9 is a state backed by the first carrier film 8. On the other hand, the second mother ceramic green sheet 12 is prepared in a state of being backed by the second carrier film 55.

  The two-layer composite structure 50 and the second mother ceramic green sheet 12 have the outer periphery of the guide roll 56 as shown in FIG. 7, with the first and second carrier films 8 and 55 facing outward, respectively. Guided along the surface. As a result, as shown by an arrow 57 in FIG. 8, the contact step of bringing the first conductive paste film 10 and the first step absorbing ceramic paste film 11 into contact with the second mother ceramic green sheet 12 is performed. Is done.

  Next, as described above, the first and second carrier films 8 and 55 are directed outward and the first conductive paste film 10 and the first step absorbing ceramic paste film 11 and the second mother ceramic, respectively. The long composite structure 58 in a state in which the green sheets 12 are in contact with each other includes a heating roll 59 heated to a temperature of, for example, about 100 ° C. and a non-heating roll 60 made of, for example, a resin that is not heated and pressed against the heating roll 59 Supplied between. As a result, a thermocompression bonding step that exerts a thermocompression bonding operation between the first and second carrier films 8 and 55 is performed. As a result of this thermocompression bonding step, a target three-layer composite structure 54 is formed between the first and second carrier films 8 and 55.

  Next, out of the long composite structure 58 after the thermocompression bonding process, the first carrier film 8 and the three-layer composite structure 54 are formed on the outer peripheral surface of the guide roll 61 except for the second carrier film 55. Will be guided along. As a result, the second carrier film 55 is peeled from the second mother ceramic green sheet 12 included in the long composite structure 58.

  As well shown in FIG. 7, the guide rolls 56 and 61 are located below the nip portion 62 between the heating roll 59 and the non-heating roll 60. Therefore, the long composite structure 58 is in contact with the outer peripheral surface of the non-heating roll 60 in a predetermined range, but is guided so as to contact only the outer peripheral surface of the heating roll 59 at the nip portion 62.

  By adopting such a configuration, the first conductive paste film 10 and the first step absorbing ceramic paste film 11 and the second mother ceramic green sheet 12 in the long composite structure 58 are relatively long. Since it can be made to contact over time, a favorable thermocompression bonding state can be obtained between them. In addition to this, it is possible to prevent the heating by the heating roll 59 from being applied to the first and second carrier films 8 and 55 for a long time, so that the carrier films 8 and 55 are undesirably deformed by heat. This can be advantageously prevented.

  The three-layer composite structure 54 backed by the first carrier film 8 obtained by finishing the process shown in FIG. 7 is wound, for example, on a winding roll 63 (see FIG. 10).

  FIG. 9 shows a modification of the configuration shown in FIG. In FIG. 9, elements corresponding to those shown in FIG. 7 are denoted by the same reference numerals, and redundant description is omitted.

  The configuration shown in FIG. 9 does not include an element corresponding to the guide roll 56 and is more simplified than the configuration shown in FIG. More specifically, the two-layer composite structure 50 backed by the first carrier film 8 is supplied from below the nip portion 62 of the heated roll 59 and the non-heated roll 60, while from the upper side of the nip portion 62. Then, the second mother ceramic green sheet 12 lined with the second carrier film 55 is supplied.

  Next, in the nip portion 62, the first conductive paste film 10 and the first step included in the two-layer composite structure 50 with the first and second carrier films 8 and 55 facing outward, respectively. A contact step of bringing the absorbing ceramic paste film 11 and the second mother ceramic green sheet 12 into contact with each other and a thermocompression bonding step that exerts a thermocompression bonding action between the first and second carrier films 8 and 55 are performed. . Thereby, in the nip portion 62, the first and second carrier films 8 and 55 are directed outward, respectively, and the first conductive paste film 10, the first step absorbing ceramic paste film 11, and the second mother ceramic. The long composite structure 58 in a state where the green sheets 12 are in contact with each other is obtained.

  Next, only the second carrier film 55 is removed so that the second carrier film 55 is peeled from the second mother ceramic green sheet 12 included in the long composite structure 58 after passing through the nip portion 62. The three-layer composite structure 54 guided upward from the nip portion 62 and backed by the first carrier film 8 is guided downward from the nip portion 62.

  According to the configuration shown in FIG. 9, the two-layer composite structure 50 or the three-layer composite structure 54 backed by the first carrier film 8 is moved along the outer peripheral surface of the non-heating roll 60 for a relatively long time. I can guide you.

  When the above-described steps are finished, the three-layer composite structure 54 shown in FIG. 2 is obtained. On the three-layer composite structure 54, the second conductive paste film 13 and the second step are provided. In order to obtain the four-layer composite structure 15 in the state in which the absorbent ceramic paste film 14 is formed, a second gravure printing machine 64 as shown in FIG. 10 is used. Note that the second gravure printing machine 64 includes many elements in common with the first gravure printing machine 21 shown in FIG.

  First, in brief, in the second gravure printing machine 64, the three-layer composite structure 54 backed by the first carrier film 8 is drawn out from the first winding roll 63, and the first printing unit 65. After passing through, the second conductive paste film 13 is formed on the second mother ceramic green sheet 12 included in the three-layer structure 54, and then passes through the second printing unit 66. After that, a four-layer composite structure 15 in a state where the second step-absorbing ceramic paste film 14 is formed is obtained. Finally, the four-layer composite structure 15 is wound around the second winding roll 67 while being lined with the first carrier film 8. In FIG. 10, an arrow 26 indicates the supply direction.

  Details of the second gravure printer 64 will be described below. In the second gravure printing machine 64, for the elements corresponding to the elements included in the first gravure printing machine 21, the explanation given for the first gravure printing machine 21 is used, and the explanation here is omitted. Sometimes.

  The first and second printing sections 65 and 66 have the same configuration as described with reference to FIG. The first printing unit 65 includes a first printing roll 68 and a first pressure contact roll 69. The second printing unit 66 includes a second printing roll 70 and a second pressure contact roll 71.

  A first drying furnace 72 is disposed on the downstream side of the first printing unit 65 in the supply direction 26, and a second drying furnace 73 is disposed on the downstream side of the second printing unit 66. Yes.

  On the upstream side of the first printing unit 65 in the supply direction 26, the first compensator roll 74 is wound around the three-layer composite structure 54 backed by the carrier film 8, as indicated by a double arrow 75. It arrange | positions so that it may move to an up-down direction. Guide rolls 76 and 77 are fixedly positioned on the upstream side and the downstream side of the first compensator roll 74, respectively.

  The first compensator roll 74 changes the path length of the three-layer composite structure 54 on the upstream side of the first printing unit 65 by moving in the direction of the double-headed arrow 75, and this will be described in detail later. As will be explained, it acts to correct the deviation between the first and second conductive paste films 10 and 13 in the supply direction 26.

  The above-described movement of the first compensator roll 74 is controlled by the first compensator roll control device 78. More specifically, the first compensator roll control device 78 processes the image picked up by the first misalignment measurement camera 79 provided immediately downstream of the first printing unit 65 to thereby obtain the first compensator roll control device 78. Then, the deviation between the second conductive paste films 10 and 13 is measured, and the first compensator roll 74 is moved so as to correct the measured deviation. The timing of the start of photographing by the first deviation measuring camera 79 is given by a trigger signal from a trigger sensor 80 arranged on the upstream side of the first deviation measuring camera 79.

  Between the first printing unit 65 and the second printing unit 66, the second compensator roll 81 moves up and down as shown by a double arrow 82 with the same configuration as the first compensator roll 74. To be arranged. Guide rolls 83 and 84 are fixedly positioned on the upstream side and the downstream side of the second compensator roll 81, respectively.

  The second compensator roll 81 moves the path length of the long sheet including the three-layer composite structure 54 between the first printing unit 65 and the second printing unit 66 by moving in the direction of the double arrow 82. In order to correct the deviation between the second conductive paste film 13 and the second step absorbing ceramic paste film 14 in the supply direction 26, as will be described in detail later. Act on.

  The above-described movement of the second compensator roll 81 is controlled by the second compensator roll controller 85. More specifically, the second compensator roll control device 85 processes the image picked up by the second misalignment measuring camera 86 provided immediately downstream of the second printing unit 66, thereby obtaining the second compensator roll control device 85. The deviation between the conductive paste film 13 and the second step absorbing ceramic paste film 14 is measured, and the second compensator roll 81 is moved so as to correct the measured deviation. The timing of the start of shooting by the second deviation measuring camera 86 is given by a trigger signal from a trigger sensor 87 arranged on the upstream side of the second deviation measuring camera 86.

  Further, the peripheral speed of the first printing roll 68 provided in the first printing unit 65 is controlled by the first printing roll control device 88. More specifically, the first printing roll control device 88 includes two first pitch measurement cameras 89 and 90 provided so as to be arranged in the supply direction 26 immediately upstream of the first printing unit 65. By processing the captured image, the printing pitch of the first conductive paste film 10 printed by the first printing unit 23 of the first gravure printing machine 21 is measured, and the measured printing is performed. The peripheral speed of the first printing roll 68 is changed so that the pitch matches the target pitch. The timing of the start of shooting by the first pitch measurement cameras 89 and 90 is given by a trigger signal from a trigger sensor 91 arranged on the upstream side of the first pitch measurement cameras 89 and 90.

  On the other hand, the peripheral speed of the second printing roll 70 in the second printing unit 66 is controlled by the second printing roll control device 92. More specifically, the second printing roll control device 92 includes two second pitch measurement cameras 93 and 94 provided so as to be aligned in the supply direction 26 immediately upstream of the second printing unit 66. By processing the captured image, the printing pitch of the second conductive paste film 13 printed by the first printing unit 65 is measured, and the measured printing pitch matches the target pitch. The peripheral speed of the second printing roll 70 is changed. The timing of the start of photographing by the second pitch measurement cameras 93 and 94 is given by a trigger sensor 95 disposed on the upstream side of the second pitch measurement cameras 93 and 94.

  Using the second gravure printing machine 64 having the above-described configuration, the second conductive paste film 13 is formed on the second mother ceramic green sheet 12 included in the three-layer structure 54 shown in FIG. The four-layer composite structure 15 printed with the second step-absorbing ceramic paste film 14 is produced as follows.

  FIG. 11 is a plan view showing a four-layer composite structure 15 produced by using the second gravure printing machine 64.

  Referring to FIGS. 10 and 11, when the three-layer composite structure 54 passes through the first printing unit 65, the second conductive material is formed on the second mother ceramic green sheet 12 included in the three-layer composite structure 54. The conductive paste film 13 is printed. Simultaneously with this printing, a third register mark 96 is printed on one side edge of the second mother ceramic green sheet 12. For example, the third register mark 96 is printed one by one every time the first printing roll 68 makes one rotation. Therefore, the third register mark 96 has a constant cycle and the positional relationship with the second conductive paste film 13 is the same. It is constant.

  In FIG. 11, the first and second register marks 51 and 53 and the trigger mark 52 printed by the above-described first gravure printing machine 21 are indicated by broken lines. The register marks 51 and 53 and the trigger mark 52 are covered with the second mother ceramic green sheet 12, but since the thickness of the second mother ceramic green sheet 12 is thin, the second mother ceramic green sheet 12 can be seen through.

  As described above, the three-layer composite structure 54 on which the second conductive paste film 13 is formed passes through the first drying furnace 72 and the second compensator roll 81 and reaches the second printing unit 66. .

  In the second printing unit 66, the second step absorbing ceramic paste film 14 is printed on an area where the second conductive paste film 13 is not formed on the second mother ceramic green sheet 12.

  Simultaneously with the printing of the second step-absorbing ceramic paste film 14, the fourth register mark 97 is one edge of the second mother ceramic green sheet 12, and the third register mark 96 Printing is performed in the vicinity of each of the second step-absorbing ceramic paste films 14 with a certain period and a certain positional relationship.

  The four-layer composite structure 15 manufactured in this way passes through the second drying furnace 73 and is then wound around the second winding roll 67 together with the first carrier film 8.

  In the printing by the second gravure printing machine 64 as described above, determination of the target pitch, pitch correction, and deviation correction are performed as follows.

  First, in order to determine the target pitch, printing is started in a state where control by the compensator roll control devices 78 and 85 and the print roll control devices 88 and 92 is not performed.

  In the above-described state, when the trigger mark 52 printed by the first gravure printing machine 21 passes through the trigger sensor 80 in order to determine the target pitch in the first printing unit 65, the first deviation measurement is performed. Provided with the first register mark 51 and the second gravure printing machine 64 printed by the first printing unit 23 (see FIG. 4) provided in the first gravure printing machine 21. The third register mark 96 printed by the first printing unit 65 is imaged. By processing this captured image, the misregistration at the initial stage of printing is measured.

  Such positional deviation is measured for several shots to several tens of shots, and the amount of change of the deviation per shot is obtained. This amount of change is the difference D2 in the printing pitch between the first gravure printing machine 21 and the second gravure printing machine 64.

  On the other hand, when the trigger mark 52 passes the trigger sensor 91, the imaging triggers of the first pitch measurement cameras 89 and 90 are given, and the first register marks 51 on the front side and the rear side are imaged simultaneously. By processing this captured image, the printing pitch P3 in the first gravure printing machine 21 is obtained.

  And the target pitch P4 in the 1st printing part 65 in the 2nd gravure printing machine 64 is determined by considering the above-mentioned printing pitch difference D2 in the printing pitch P3 calculated | required in this way. .

  In addition, when the trigger mark 52 passes through the trigger sensor 87 to determine the target pitch in the second printing unit 66, a shooting trigger of the second misalignment measuring camera 86 is given, and the first and second shooting pitches are given. The third and fourth register marks 96 and 97 printed by the printing units 65 and 66 are imaged. By processing this captured image, the misregistration at the initial stage of printing is measured.

  Such positional deviation is measured for several shots to several tens of shots, and the amount of change of the deviation per shot is obtained. This amount of change is the difference D3 in the printing pitch between the first printing unit 65 and the second printing unit 66.

  On the other hand, when the trigger mark 52 passes the trigger sensor 95, the shooting triggers of the second pitch measurement cameras 93 and 94 are given, and the front and rear third register marks 96 are imaged simultaneously. By processing this captured image, the printing pitch P5 in the second printing unit 66 is obtained.

  And the target pitch P6 in the 2nd printing part 66 is determined by considering the above-mentioned printing pitch difference D3 to the printing pitch P5 calculated | required in this way.

  Note that, as the above-described target pitches P4 and P6, values obtained in advance may be used instead of the above-described measurement results.

  Next, when the trigger mark 52 printed in the first gravure printing machine 21 passes the trigger sensor 91 for pitch correction in the first printing unit 65, the first pitch measurement cameras 89 and 90 are used. A shooting trigger is given. As a result, the first register marks 51 on the front side and the rear side are simultaneously imaged through the second mother ceramic green sheet 12 by the first pitch measurement cameras 89 and 90, and the obtained images are stored. By being processed, the printing pitch X1 in the first gravure printing machine 21 is obtained. Then, the printing pitch X1 is compared with the target pitch P4 described above, and the peripheral speed of the first printing roll 68 is changed so that they match.

  On the other hand, when the trigger mark 52 passes the trigger sensor 95, a shooting trigger is given to the second pitch measurement cameras 93 and 94 for pitch correction in the second printing unit 66. As a result, the third register marks 96 on the front side and the rear side are simultaneously imaged by the second pitch measurement cameras 93 and 94, and the obtained image is stored and then processed, whereby the first A printing pitch X2 in the printing unit 65 is obtained. Then, the printing pitch X2 is compared with the target pitch P6 described above, and the peripheral speed of the second printing roll 70 is changed so that they match.

In addition, after the above-described pitch correction in the first printing unit 65 is completed, the trigger mark 52 printed in the first gravure printing machine 21 is detected by the trigger sensor 80 in order to correct the shift in the first printing unit 65. The first registration mark printed by the first printing unit 23 provided in the first gravure printing machine 21 and the second gravure printing. The third register mark 96 printed by the first printing unit 65 provided in the machine 64 is imaged. The displacement is measured by processing this captured image in the first compensator roll controller 78. And the position of the 1st compensator roll 74 is adjusted so that this shift | offset | difference may be corrected, and, thereby, the path | route length of the 3 layer composite structure 54 is changed.

On the other hand, after the above-described pitch correction in the second printing unit 66 is completed , when the trigger mark 52 passes the trigger sensor 87 for correction of deviation in the second printing unit 66, the second deviation measurement is performed. A shooting trigger is given to the camera 86, and the third and fourth register marks 96 and 97 printed by the first and second printing units 65 and 66, respectively, are imaged. The deviation is measured by processing this captured image in the second compensator roll controller 85. Then, the position of the second compensator roll 81 is adjusted so as to correct this deviation, thereby changing the path length of the three-layer composite structure 54 on which the second conductive paste film 13 is formed. .

  As described above, the four-layer composite structure 15 as shown in FIG. 2 is obtained in a state of being lined with the carrier film 8, and is wound around the second winding roll 67.

  Next, as described above, the four-layer composite structure 15 in each of the plurality of regions surrounded by the cut line 16 is taken out as shown in FIG. In addition, the position of the above-mentioned cut line 16 is shown with the broken line in each of FIG. 6 and FIG.

  Thereafter, as described above, the stacking process shown in FIG. 3 is performed, and the resulting raw mother stack 18 is further divided along the dividing line 19, so that a plurality of raw stacks are obtained. Chip 20 is obtained. By firing this raw laminate chip 20, the sintered laminate 2 shown in FIG. 1 is obtained, and external electrodes 6 and 7 are formed at each end of the laminate 2, The multilayer ceramic capacitor 1 is completed.

  While the present invention has been described with reference to the illustrated embodiment, various other modifications are possible within the scope of the present invention.

  For example, in the illustrated embodiment, the printing of the first conductive paste film 10 is performed before the printing of the first step absorbing ceramic paste film 11, and the printing of the second conductive paste film 13 is performed. Although the second step absorbing ceramic paste film 14 is printed before printing, the step absorbing ceramic paste films 11 and 14 may be printed before printing the conductive paste films 10 and 13, respectively. Good.

  Further, the number and shape of each of the illustrated conductive paste films 10 and 13 are merely examples.

  Further, in the first printing unit 23 of the first gravure printing machine 21, first and second pitches having a fixed positional relationship with the first conductive paste film 10 apart from the first register mark 51. The measurement marks are printed on the front side and the rear side in the supply direction of the first mother ceramic green sheet 9, respectively, and in the pitch measurement step, the distance between the first and second alignment marks is measured, The printing pitch in one printing unit 23 may be obtained. Also in the first printing unit 65 of the second gravure printing machine 64, the same first and second pitch measurement marks are provided on the front side and the rear side in the supply direction of the second mother ceramic green sheet 12. The printing pitch in the first printing unit 65 may be obtained by printing each and measuring the distance between the first and second alignment marks in the pitch measurement step.

  In the illustrated embodiment, the conductive paste films 10 and 13 and the step absorbing ceramic paste films 11 and 14 are formed by gravure printing, but printing using a rotary printing machine other than gravure printing is applied. Also good.

  In the illustrated embodiment, the first and second conductive paste films 10 and 13 and the first and second step absorbing ceramic paste films 11 and 14 should be formed in alignment with each other. However, the present invention may be applied to formation of component films to be formed in a state of being aligned with each other other than such a combination. For example, the present invention may be applied when the step-absorbing ceramic paste films 11 and 14 are not formed and only the first and second conductive paste films 10 and 13 are formed.

  In the illustrated embodiment, a four-layer composite structure 15 as shown in FIG. 2 is produced by gravure printing, and a third mother ceramic green sheet is further laminated on the four-layer composite structure 15. A laminated ceramic capacitor or the like may be manufactured using the manufactured one.

  7 or 9 is arranged between the second drying furnace 28 and the second winding roll 25 in the first gravure printing machine 21 shown in FIG. May be.

  In the illustrated embodiment, the four-layer composite structure 15 is produced by sequentially using the two gravure printing machines 21 and 64. However, the two gravure printing machines 21 and 64 perform printing in one in-line process. In order to make it possible, it may be integrated including the structure for the thermocompression bonding described above.

  In the illustrated embodiment, the first and second gravure printers 21 and 64 are used properly. However, the four-layer composite structure 15 is produced simply by using only the second gravure printer 64 twice. You may make it do. In this case, when the second gravure printer 64 is used for the first time, the position of the first compensator roll 74 is fixed, and the first compensator roll controller 78 and the first print roll controller 88 are operated. Don't let it happen.

  Further, in the above-described embodiment, by using the second gravure printing machine 64, a multi-layer composite structure may be manufactured.

1 is a cross-sectional view schematically showing a multilayer ceramic capacitor 1 as an example of a multilayer ceramic electronic component manufactured by applying a manufacturing method according to an embodiment of the present invention. It is sectional drawing which shows a part of 4 layer composite structure 15 produced in order to manufacture the laminated body 2 shown in FIG. FIG. 4 is a cross-sectional view showing a process for obtaining a raw mother laminate 18 by laminating the four-layer composite structure 15 shown in FIG. 2. FIG. 3 is a front view schematically showing a schematic configuration of a first gravure printing machine 21 used for manufacturing the two-layer composite structure 50 shown in FIG. 2. It is a front view which shows the structure with which the 1st printing part 23 shown in FIG. 4 is provided in detail. It is a top view which shows a part of 2 layer composite structure 50 produced with the 1st gravure printing machine 21 shown in FIG. FIG. 3 is a front view schematically showing a thermocompression bonding apparatus used for obtaining the three-layer composite structure 54 shown in FIG. 2. It is an expanded sectional view which follows the line VIII-VIII of FIG. FIG. 8 is a front view schematically showing a modification of the thermocompression bonding apparatus shown in FIG. 7. FIG. 4 is a front view schematically showing a schematic configuration of a second gravure printing machine 64 used after the first gravure printing machine 21 for producing the four-layer composite structure 15 shown in FIG. 2. It is a top view which shows a part of 4 layer composite structure 15 obtained by the 2nd gravure printing machine 64 shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Multilayer ceramic capacitor 2 Laminate 3 Ceramic layer 4,5 Inner conductor film 8 First carrier film 9 First mother ceramic green sheet 10 First conductive paste film 11 First step absorption ceramic paste film 12 First Mother ceramic green sheet 2 13 Second conductive paste film 14 Second step absorbing ceramic paste film 15 Four-layer composite structure 16 Cut line 18 Raw mother laminate 21, 64 Gravure printing machine 23, 24, 65 , 66 Printing section 26 Supply direction 29, 74, 81 Compensator roll 33, 78, 85 Compensator roll control device 34, 79, 86 Deviation measuring camera 36, 44, 68, 70 Printing roll 37, 45, 69, 71 Pressing roll 41 Print paste 42 Image area 46, 88, 92 Print Roll control device 47, 48, 89, 90, 93, 94 Pitch measurement camera 50 Two-layer composite structure 51, 53, 96, 97 Register mark 54 Three-layer composite structure 55 Second carrier film 58 Long composite structure Material 59 Heating roll 60 Non-heating roll 62 Nip part

Claims (12)

A mother ceramic green sheet manufacturing step of manufacturing a long mother ceramic green sheet on which at least first and second component films for a multilayer ceramic electronic component are formed;
Cutting the mother ceramic green sheet for each of a plurality of predetermined regions, thereby removing a plurality of ceramic green sheets of a predetermined size; and
A method of manufacturing a multilayer ceramic electronic component comprising stacking a plurality of ceramic green sheets,
The mother ceramic green sheet manufacturing process includes:
Using a first printing roll having an image line portion provided on the outer peripheral surface and a first pressing roll in pressure contact with the first printing roll, the first printing roll and the first pressing roll By supplying the mother ceramic green sheet lined with a carrier film in between, the printing paste applied to the image area is printed on the mother ceramic green sheet to form the first component film A first printing step for
Using a second printing roll having an image line portion provided on the outer peripheral surface and a second pressing roller that presses against the second printing roll, the second printing roll and the second pressing roll By supplying the mother ceramic green sheet backed by the carrier film after the first printing step is performed therebetween, the printing paste applied to the image area is placed on the mother ceramic green sheet. A second printing step for printing to form the second component film;
A shift correction step for correcting a shift between the first and second component films in the supply direction of the mother ceramic green sheet;
A pitch correction step for correcting the printing pitch of the first printing step and the printing pitch of the second printing step in the supply direction of the mother ceramic green sheet to match,
The deviation correcting step includes a deviation measuring step for measuring a deviation between the first and second component films immediately after the second printing step, and correcting the deviation measured in the deviation measuring step. A path length changing step for changing the path length of the mother ceramic green sheet before the second printing step,
The pitch correction step includes a pitch measurement step for measuring the print pitch of the first printing step immediately before the second printing step, and the print pitch and the target pitch measured in the pitch measurement step. A peripheral speed changing step for changing the peripheral speed of the second printing roll so as to match,
The deviation correction step is performed after the pitch correction step is performed.
Manufacturing method of multilayer ceramic electronic component. While not performing the deviation correction step and the pitch correction step, the second printing step is performed a plurality of times, and between the first and second component films immediately after each second printing step. Measuring the deviation of the first printing process by measuring the deviation of the deviation per one second printing process and measuring the printing pitch of the first printing process immediately before the second printing process. 2. The lamination according to claim 1, wherein the target pitch is determined by further considering the amount of change in the deviation in the printing pitch of the first printing step obtained by these steps. Manufacturing method of ceramic electronic components. The mother ceramic green sheet after finishing the first printing step is wound up on a winding roll, and the second printing step is performed on the mother ceramic green sheet drawn out from the winding roll. The manufacturing method of the multilayer ceramic electronic component of Claim 1 or 2 implemented. The method for manufacturing a multilayer ceramic electronic component according to claim 1, wherein the first printing step and the second printing step are performed continuously. In the first printing step, a first register mark having a fixed positional relationship with the first component film is printed, and in the second printing step, a positional relationship with the second component film. A second register mark having a constant value is printed, and in the deviation measuring step, the deviation between the first and second component films is measured by measuring the deviation between the first and second register marks. The manufacturing method of the multilayer ceramic electronic component in any one of Claim 1 thru | or 4 calculated | required. The first register marks are respectively printed on the front side and the rear side in the supply direction of the mother ceramic green sheet, and in the pitch measurement step, the distance between the first register marks on the front side and the rear side is measured. The manufacturing method of the multilayer ceramic electronic component according to claim 5, wherein a printing pitch of the first printing step is obtained. In the first printing step, first and second pitch measurement marks having a fixed positional relationship with the first component film are printed on the front side and the rear side in the supply direction of the mother ceramic green sheet, respectively. The printing pitch of the first printing step is obtained by measuring the distance between the first and second pitch measuring marks in the pitch measuring step. The manufacturing method of the multilayer ceramic electronic component of description. The first component film printed in the first printing step is either a conductive paste film or a step-absorbing ceramic paste film for absorbing a step due to the thickness of the conductive paste film. The second component film printed in the second printing step is any one of the conductive paste film and the step-absorbing ceramic paste film. Manufacturing method for multilayer ceramic electronic components. The first component film printed in the first printing step is a first step absorption layer for absorbing a step due to a thickness of the first conductive paste film and the first conductive paste film. The second component film which is both a ceramic paste film and is printed in the second printing step is formed on the first conductive paste film and the first step absorbing ceramic paste film. The second conductive paste film formed via the two mother ceramic green sheets and the second step absorbing ceramic paste film for absorbing a step due to the thickness of the second conductive paste film. After the first printing step and before the second printing step, the second mother ceramic green sheet is applied to the first conductive paste film and the first printing step. Further comprising, a manufacturing method of a multilayer ceramic electronic component according to any of claims 1 to 7 placing on the absorbed ceramic paste film. In the step of disposing the second mother ceramic green sheet, the first mother ceramic green sheet forming the first conductive paste film and the first step-absorbing ceramic paste film is disposed on the first mother ceramic green sheet. The first and second carrier films are directed outward while the second mother ceramic green sheet is lined with a second carrier film while being lined with a carrier film. A contact step of bringing the first conductive paste film and the first step-absorbing ceramic paste film into contact with the second mother ceramic green sheet, and a thermocompression bonding action between the first and second carrier films. Exerting thermocompression bonding, and then the second mother ceramic green paper And a separation step of separating the second carrier film from the preparative method of manufacturing a multilayer ceramic electronic component according to claim 9. In the thermocompression bonding process, the first conductive paste film and the first step absorbing ceramic paste film obtained by carrying out the contact process with the first and second carrier films facing outward respectively. Supplying a long composite structure in a state where the second mother ceramic green sheet and the second mother ceramic green sheet are in contact with each other between a heated heating roll and an unheated non-heating roll pressed against the heating roll. The long composite structure is in contact with a predetermined range of the outer peripheral surface of the non-heating roll, but is guided so as to be in contact with the outer peripheral surface of the heating roll only at a nip portion with the non-heating roll. The manufacturing method of the multilayer ceramic electronic component of Claim 10. The method for manufacturing a multilayer ceramic electronic component according to claim 1, wherein gravure printing is applied in the first and second printing steps.