JP4441134B2 - 静電アクチュエーター及びミラーアレイ - Google Patents

静電アクチュエーター及びミラーアレイ Download PDF

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Publication number
JP4441134B2
JP4441134B2 JP2001032665A JP2001032665A JP4441134B2 JP 4441134 B2 JP4441134 B2 JP 4441134B2 JP 2001032665 A JP2001032665 A JP 2001032665A JP 2001032665 A JP2001032665 A JP 2001032665A JP 4441134 B2 JP4441134 B2 JP 4441134B2
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Japan
Prior art keywords
electrode
movable beam
pair
drive
electrodes
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Expired - Fee Related
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JP2001032665A
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English (en)
Japanese (ja)
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JP2002236263A (ja
JP2002236263A5 (enExample
Inventor
通継 有馬
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Olympus Corp
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Olympus Corp
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Priority to JP2001032665A priority Critical patent/JP4441134B2/ja
Publication of JP2002236263A publication Critical patent/JP2002236263A/ja
Publication of JP2002236263A5 publication Critical patent/JP2002236263A5/ja
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Publication of JP4441134B2 publication Critical patent/JP4441134B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
JP2001032665A 2001-02-08 2001-02-08 静電アクチュエーター及びミラーアレイ Expired - Fee Related JP4441134B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001032665A JP4441134B2 (ja) 2001-02-08 2001-02-08 静電アクチュエーター及びミラーアレイ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001032665A JP4441134B2 (ja) 2001-02-08 2001-02-08 静電アクチュエーター及びミラーアレイ

Publications (3)

Publication Number Publication Date
JP2002236263A JP2002236263A (ja) 2002-08-23
JP2002236263A5 JP2002236263A5 (enExample) 2008-03-06
JP4441134B2 true JP4441134B2 (ja) 2010-03-31

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ID=18896547

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JP2001032665A Expired - Fee Related JP4441134B2 (ja) 2001-02-08 2001-02-08 静電アクチュエーター及びミラーアレイ

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JP (1) JP4441134B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100630029B1 (ko) * 2002-11-06 2006-09-27 마츠시타 덴끼 산교 가부시키가이샤 변위 검출 기능을 구비한 마이크로 액츄에이터, 및 당해마이크로 액츄에이터를 구비한 가변형 미러
CN100405122C (zh) * 2002-11-06 2008-07-23 松下电器产业株式会社 带有位移检测功能的微执行器
US7068409B2 (en) * 2004-03-31 2006-06-27 Lucent Technologies Inc. Tip-tilt-piston actuator
US7797757B2 (en) * 2006-08-15 2010-09-14 Georgia Tech Research Corporation Cantilevers with integrated actuators for probe microscopy
JP4979027B2 (ja) * 2009-02-10 2012-07-18 日本電信電話株式会社 Ｍｅｍｓ素子の製造方法およびｍｅｍｓ素子
JP5180161B2 (ja) * 2009-08-03 2013-04-10 日本電信電話株式会社 マイクロメカニカル構造体およびその製造方法

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Publication number Publication date
JP2002236263A (ja) 2002-08-23

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