JP2002236263A5 - - Google Patents
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- Publication number
- JP2002236263A5 JP2002236263A5 JP2001032665A JP2001032665A JP2002236263A5 JP 2002236263 A5 JP2002236263 A5 JP 2002236263A5 JP 2001032665 A JP2001032665 A JP 2001032665A JP 2001032665 A JP2001032665 A JP 2001032665A JP 2002236263 A5 JP2002236263 A5 JP 2002236263A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001032665A JP4441134B2 (ja) | 2001-02-08 | 2001-02-08 | 静電アクチュエーター及びミラーアレイ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001032665A JP4441134B2 (ja) | 2001-02-08 | 2001-02-08 | 静電アクチュエーター及びミラーアレイ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002236263A JP2002236263A (ja) | 2002-08-23 |
| JP2002236263A5 true JP2002236263A5 (enExample) | 2008-03-06 |
| JP4441134B2 JP4441134B2 (ja) | 2010-03-31 |
Family
ID=18896547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001032665A Expired - Fee Related JP4441134B2 (ja) | 2001-02-08 | 2001-02-08 | 静電アクチュエーター及びミラーアレイ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4441134B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100630029B1 (ko) * | 2002-11-06 | 2006-09-27 | 마츠시타 덴끼 산교 가부시키가이샤 | 변위 검출 기능을 구비한 마이크로 액츄에이터, 및 당해마이크로 액츄에이터를 구비한 가변형 미러 |
| CN100405122C (zh) * | 2002-11-06 | 2008-07-23 | 松下电器产业株式会社 | 带有位移检测功能的微执行器 |
| US7068409B2 (en) * | 2004-03-31 | 2006-06-27 | Lucent Technologies Inc. | Tip-tilt-piston actuator |
| US7797757B2 (en) * | 2006-08-15 | 2010-09-14 | Georgia Tech Research Corporation | Cantilevers with integrated actuators for probe microscopy |
| JP4979027B2 (ja) * | 2009-02-10 | 2012-07-18 | 日本電信電話株式会社 | Ｍｅｍｓ素子の製造方法およびｍｅｍｓ素子 |
| JP5180161B2 (ja) * | 2009-08-03 | 2013-04-10 | 日本電信電話株式会社 | マイクロメカニカル構造体およびその製造方法 |
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2001
- 2001-02-08 JP JP2001032665A patent/JP4441134B2/ja not_active Expired - Fee Related