JP4430777B2 - Wastewater treatment method containing alkyl sulfoxide - Google Patents

Wastewater treatment method containing alkyl sulfoxide Download PDF

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JP4430777B2
JP4430777B2 JP2000071682A JP2000071682A JP4430777B2 JP 4430777 B2 JP4430777 B2 JP 4430777B2 JP 2000071682 A JP2000071682 A JP 2000071682A JP 2000071682 A JP2000071682 A JP 2000071682A JP 4430777 B2 JP4430777 B2 JP 4430777B2
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water
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biological
treatment step
oxidation treatment
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JP2001259687A (en
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ふで子 角田
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Organo Corp
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Organo Corp
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Description

【0001】
【発明の属する技術分野】
本発明は、ジメチルスルホキシド(DMSO)等のアルキルスルホキシドを含有する排水、例えば半導体装置や液晶装置の製造工程から排出されるアルキルスルホキシド含有排水の処理に好適な処理方法に関する。
【0002】
【従来の技術】
ジメチルスルホキシド等のアルキルスルホキシドを含有する排水の処理方法として、アルキルスルホキシドを嫌気性条件下あるいは好気性条件下で微生物の働きにより酸化分解する生物処理法が知られている。
【0003】
【発明が解決しようとする課題】
しかし、生物処理法によってアルキルスルホキシド含有排水の処理を行う場合、処理環境の変動、例えば負荷変動、被処理水のpH変動などによって生物処理が不安定になり、アルキルスルホキシドが十分に処理されず、その結果、処理水中にアルキルスルホキシドの一部が流出することがある。このようにアルキルスルホキシドが処理水中に流出し、その処理水が環境中に流出した場合、環境中でアルキルスルホキシドから硫化メチル((CH32S)やメチルメルカプタン(CH3SH)のような臭気化合物が生成されるという問題があった。
【0004】
本発明は、前述した事情に鑑みてなされたもので、生物処理法を用いてアルキルスルホキシド含有排水の処理を行う場合に、処理環境の変動などにより生物処理が不安定になっても、環境中にアルキルスルホキシドが流出して、環境中でアルキルスルホキシドから硫化メチル、メチルメルカプタン等の臭気化合物が生成することを防止することができるアルキルスルホキシド含有排水処理方法を提供することを目的とする。
【0005】
【課題を解決するための手段】
本発明は、前記目的を達成するため、下記(A)〜(D)に示すアルキルスルホキシド含有排水処理方法を提供する。
(A)アルキルスルホキシドを含有する被処理水を生物処理する生物学的酸化処理工程の後に、前記生物学的酸化処理工程の処理水に次亜塩素酸ナトリウムを添加して前記処理水を化学的に酸化処理する化学的酸化処理工程を備えたことを特徴とするアルキルスルホキシド含有排水処理方法。
(B)アルキルスルホキシドを含有する被処理水を生物処理する生物学的酸化処理工程の後に、前記生物学的酸化処理工程の処理水に過酸化水素を添加して前記処理水を化学的に酸化処理する化学的酸化処理工程を備えたことを特徴とするアルキルスルホキシド含有排水処理方法。
(C)アルキルスルホキシドを含有する被処理水を生物処理する生物学的酸化処理工程の後に、前記生物学的酸化処理工程の処理水に過酸化水素を添加するとともに、紫外線を照射して前記処理水を化学的に酸化処理する化学的酸化処理工程を備えたことを特徴とするアルキルスルホキシド含有排水処理方法。
(D)アルキルスルホキシドを含有する被処理水を生物処理する生物学的酸化処理工程の後に、前記生物学的酸化処理工程の処理水にオゾン及び過酸化水素を添加して前記処理水を化学的に酸化処理する化学的酸化処理工程を備えたことを特徴とするアルキルスルホキシド含有排水処理方法。
【0006】
本発明では、生物学的酸化処理工程において、負荷変動、被処理水のpH変動などにより生物処理が不安定になり、生物処理水中にアルキルスルホキシドが流出しても、生物学的酸化処理工程の後段で生物処理水の化学的酸化処理を行うので、この化学的酸化処理によって生物処理水中に流出したアルキルスルホキシドを酸化分解することができる。したがって、アルキルスルホキシドが環境中に流出して、硫化メチル、メチルメルカプタン等の臭気化合物が環境中で生成されることを防止することができる。
【0007】
この場合、化学的酸化処理法は、それ単独でアルキルスルホキシドを分解しようとすると、薬剤コスト等のランニングコストが高くつく。しかし、前段の生物処理でアルキルスルホキシドの殆どを分解し、分解しきれなかった少量のアルキルスルホキシドに対して化学的酸化処理を行うのであれば、ランニングコストは安くなる。したがって、本発明によれば、生物処理と化学的酸化処理とを組合わせることにより、生物処理の不安定さを補って全体として安定した処理を行うことができるとともに、ランニングコストを抑えることが可能となる。
【0008】
なお、本発明では、生物学的酸化処理工程の処理水中に含まれるアルキルスルホキシドを化学的酸化処理工程で酸化分解するものであり、この場合、化学的酸化処理工程ではアルキルスルホキシドを炭酸ガスと水に完全分解することが望ましい。しかし、アルキルスルホキシドの分解生成物であるメタンスルホン酸等のアルキルスルホン酸は、環境中に流出しても臭気化合物を生成しないため、化学的酸化処理工程ではアルキルスルホキシドを少なくともアルキルスルホン酸にまで酸化分解することが好ましい。
【0009】
【発明の実施の形態】
以下、本発明につきさらに詳しく説明する。本発明では、まず、生物学的酸化処理工程を行う。この場合、生物学的酸化処理工程で用いる生物処理装置の構成に限定はなく、例えば、固定床式生物処理法、流動床式生物処理法、浮遊式生物処理法、スラッジブランケット式生物処理法等による装置の1つからなるもの、あるいは同種又は異種の装置の2つ以上を組み合わせたものなどを使用することができる。
【0010】
本発明では、次に、生物学的酸化処理工程の処理水を化学的に酸化処理する化学的酸化処理工程を実施する。化学的酸化処理工程における化学的酸化処理法としては、(a)被処理水に次亜塩素酸ナトリウムを添加する方法、(b)被処理水に過酸化水素を添加する方法、(c)被処理水に過酸化水素を添加するとともに、紫外線を照射する方法、又は、(d)被処理水にオゾン及び過酸化水素を添加する方法を採用する。酸化法(a)及び(b)は酸化剤を用いてアルキルスルホキシドを酸化するものである。酸化法(c)及び(d)はオゾンと紫外線との反応又はオゾンと過酸化水素との反応によって生じるヒドロキシラジカルによってアルキルスルホキシドを酸化するものである。
【0011】
なお、上記化学的酸化処理工程における具体的な酸化剤の添加量や紫外線照射量は、アルキルスルホキシドの種類や濃度によって異なるので一概には言えないが、例えば、ジメチルスルホキシド(DMSO)を20〜40mg/Lの濃度で含む排水の場合、酸化法(a)においては、被処理水ヘの次亜塩素酸ナトリウムの添加量をDMSOの5倍量(重量、以下同じ)以上とすることが好ましい。酸化法(b)においては、被処理水ヘの過酸化水素の添加量をDMSOの5倍量以上とすることが好ましい。
【0012】
酸化法(c)においては、被処理水ヘの過酸化水素の添加量をDMSOの2倍量以上、紫外線照射量を20kwh/m3以上することが好ましい。また、酸化法(c)において、過酸化水素を添加した被処理水に紫外線を照射する紫外線照射機構としては、特に限定されず、高圧紫外線ランプを備えたもの、低圧紫外線ランプを備えたもののいずれでも用いることができる。
【0013】
酸化法(d)においては、被処理水中でのオゾン消費量をDMSOの2倍量以上、被処理水ヘの過酸化水素の添加量をDMSOの2倍量以上とすることが好ましい。また、酸化法(d)では、被処理水ヘの過酸化水素の添加を行った後にオゾン添加を行ってもよく、被処理水へのオゾン添加を行った後に過酸化水素の添加を行ってもよく、被処理水にオゾン及び過酸化水素を同時に添加してもよい。
【0014】
【実施例】
(実施例)
ジメチルスルホキシド濃度300mg/Lの被処理水の生物処理を行った(生物学的酸化処理工程)。この場合、充填材(粒状担体)を詰めた浸漬濾床式生物処理槽に被処理水を通水した。槽内の被処理水のpHは7.0±0.5の範囲に制御した。処理水中のジメチルスルホキシド濃度の経時変化を図1に示す。
【0015】
図1のように、処理開始後20日目辺りから微生物が繁殖してジメチルスルホキシドを処理可能となったが、その後でも負荷変動、被処理水のpH変動などによって生物処理が不安定になり、処理水中にジメチルスルホキシドの一部が流出することがあった。
【0016】
次に、上記生物学的酸化処理工程の処理水を、下記(a)〜(d)の方法で処理した(化学的酸化処理工程)。
(a)生物学的酸化処理工程の処理水に次亜塩素酸ナトリウムを添加する方法
(b)生物学的酸化処理工程の処理水に過酸化水素を添加する方法
(c)生物学的酸化処理工程の処理水に過酸化水素を添加するとともに、紫外線を照射する方法
(d)生物学的酸化処理工程の処理水にオゾン及び過酸化水素を添加する方法
【0017】
処理条件並びに生物学的酸化処理工程及び化学的酸化処理工程の処理水中のジメチルスルホキシド濃度を表1に示す。表1より、本発明によれば、生物学的酸化処理工程の処理水をさらに化学的酸化処理工程で処理することにより、常にアルキルスルホキシド濃度の低い良好な処理水を得られることが確認された。この場合、化学的酸化処理工程では、アルキルスルホキシドは炭酸ガスと水に完全分解されたか、少なくともアルキルスルホン酸にまで分解されたと考えられる。
【0018】
【表1】

Figure 0004430777
【0019】
【発明の効果】
以上のように、本発明によれば、生物処理法を用いてアルキルスルホキシドを含有する排水の処理を行う場合に、処理環境の変動などにより生物処理が不安定になっても、最終処理水中にアルキルスルホキシドが流出することを防止することができ、環境中でアルキルスルホキシドから硫化メチル、メチルメルカプタン等の臭気化合物が生成することを防止することができる。
【図面の簡単な説明】
【図1】実施例における生物学的酸化処理工程の処理水中のジメチルスルホキシド濃度の経時変化を示すグラフである。[0001]
BACKGROUND OF THE INVENTION
The present invention, wastewater containing alkyl sulfoxide such as di-methyl sulfoxide (DMSO), for example of a preferred processing method in a semiconductor device or an alkyl sulfoxide containing wastewater discharged from the manufacturing process of the liquid crystal device processing.
[0002]
[Prior art]
As a method for treating wastewater containing alkyl sulfoxide such as dimethyl sulfoxide, a biological treatment method is known in which alkyl sulfoxide is oxidized and decomposed by the action of microorganisms under anaerobic conditions or aerobic conditions.
[0003]
[Problems to be solved by the invention]
However, when the alkylsulfoxide-containing wastewater is treated by the biological treatment method, the biological treatment becomes unstable due to changes in the treatment environment, such as load fluctuation, pH change of the water to be treated, and the alkylsulfoxide is not sufficiently treated. As a result, part of the alkyl sulfoxide may flow out into the treated water. In this way, when alkyl sulfoxide flows into the treated water and the treated water flows into the environment, such as methyl sulfide ((CH 3 ) 2 S) or methyl mercaptan (CH 3 SH) from the alkyl sulfoxide in the environment. There was a problem that odorous compounds were produced.
[0004]
The present invention has been made in view of the above-described circumstances, and when treating an alkyl sulfoxide-containing wastewater using a biological treatment method, even if the biological treatment becomes unstable due to changes in the treatment environment, It is an object of the present invention to provide an alkyl sulfoxide- containing wastewater treatment method that can prevent alkyl sulfoxide from flowing out and form odorous compounds such as methyl sulfide and methyl mercaptan from alkyl sulfoxide in the environment.
[0005]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides an alkyl sulfoxide-containing wastewater treatment method shown in the following (A) to (D).
(A) After the biological oxidation treatment step for biologically treating the water to be treated containing alkyl sulfoxide, sodium hypochlorite is added to the treatment water in the biological oxidation treatment step to chemically treat the treated water. An alkyl sulfoxide-containing wastewater treatment method characterized by comprising a chemical oxidation treatment step for subjecting to an oxidation treatment.
(B) After the biological oxidation treatment step for biologically treating the water to be treated containing alkyl sulfoxide, hydrogen peroxide is added to the treatment water in the biological oxidation treatment step to chemically oxidize the treated water. An alkyl sulfoxide-containing wastewater treatment method comprising a chemical oxidation treatment step for treatment.
(C) After the biological oxidation treatment step for biologically treating the water to be treated containing alkyl sulfoxide, hydrogen peroxide is added to the treated water in the biological oxidation treatment step, and the treatment is performed by irradiating ultraviolet rays. An alkylsulfoxide-containing wastewater treatment method comprising a chemical oxidation treatment step for chemically oxidizing water.
(D) After the biological oxidation treatment step for biologically treating the water to be treated containing alkyl sulfoxide, ozone and hydrogen peroxide are added to the treatment water in the biological oxidation treatment step to chemically treat the treated water. An alkyl sulfoxide-containing wastewater treatment method characterized by comprising a chemical oxidation treatment step for subjecting to an oxidation treatment.
[0006]
In the present invention, in a biological oxidation process, load change, biological treatment due pH fluctuations of the water to be treated becomes unstable, even if outflow alkyl sulfoxide biological treatment water, biological oxidation since subsequent steps performing chemical oxidation treatment of biologically treated water, it is possible to oxidize and decompose alkylsulfoxide flowing out to the biological treatment water by the chemical oxidation process. Therefore, it is possible to alkylsulfoxide flows out into the environment, to prevent the methyl sulfide, odorous compounds such as methyl mercaptan is produced in the environment.
[0007]
In this case, a chemical oxidation treatment, trying to disassemble the alkyl sulfoxide alone, running cost of the drug costs etc. expensive. However, to decompose most of the alkyl sulfoxide preceding biological treatment, if for a small amount of alkyl sulfoxides which can not be decomposed of performing a chemical oxidation treatment, the running cost is cheaper. Therefore, according to the present invention, by combining biological treatment and chemical oxidation treatment, it is possible to compensate for instability of biological treatment as a whole and perform stable treatment as a whole, and to reduce running costs. It becomes.
[0008]
In the present invention, is intended to oxidative decomposition by a chemical oxidation step an alkyl sulfoxide contained in the treated water of a biological oxidation process, in this case, alkylsulfoxide in the chemical oxidation treatment process It is desirable to decompose completely into carbon dioxide and water. However, alkylsulfonic acids such as methanesulfonic acid degradation product of A Ruki sulfoxide, since even flow out into the environment does not produce the odorous compounds, to at least alkylsulfonic acid alkyl sulfoxides by oxidation treatment step Oxidative decomposition is preferred.
[0009]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in more detail. In the present invention, first, a biological oxidation treatment step is performed. In this case, the configuration of the biological treatment apparatus used in the biological oxidation treatment step is not limited. For example, a fixed bed biological treatment method, a fluidized bed biological treatment method, a floating biological treatment method, a sludge blanket biological treatment method, etc. It is possible to use a device composed of one of the devices according to the above or a combination of two or more of the same or different devices.
[0010]
In the present invention, next, a chemical oxidation treatment step of chemically oxidizing the treated water in the biological oxidation treatment step is performed. The chemical oxidation treatment method in the chemical oxidation treatment step includes (a) a method of adding sodium hypochlorite to the water to be treated, (b) a method of adding hydrogen peroxide to the water to be treated, (c) with the addition of hydrogen peroxide treated water, a method of irradiating ultraviolet rays, or, to adopt a way of adding ozone and hydrogen peroxide water to be treated (d). Oxidation method (a) and (b) is to oxidize alkyl sulfoxide using an oxidizing agent. In the oxidation methods (c) and (d), alkyl sulfoxides are oxidized by hydroxy radicals generated by the reaction between ozone and ultraviolet light or the reaction between ozone and hydrogen peroxide.
[0011]
In addition, although the specific addition amount of an oxidizing agent and the amount of ultraviolet irradiation in the chemical oxidation treatment step vary depending on the type and concentration of alkyl sulfoxide , for example, 20-40 mg of dimethyl sulfoxide (DMSO) is not possible. In the case of wastewater containing at a concentration of / L, in the oxidation method (a), it is preferable that the amount of sodium hypochlorite added to the water to be treated is 5 times the amount of DMSO (weight, the same applies hereinafter) or more. In the oxidation method (b), the amount of hydrogen peroxide added to the water to be treated is preferably 5 times or more that of DMSO.
[0012]
In the oxidation method (c), it is preferable that the amount of hydrogen peroxide added to the water to be treated is at least twice that of DMSO and the amount of ultraviolet irradiation is at least 20 kwh / m 3 . In the oxidation method (c), the ultraviolet irradiation mechanism for irradiating the water to be treated to which hydrogen peroxide is added with ultraviolet rays is not particularly limited, and any of those equipped with a high pressure ultraviolet lamp and those equipped with a low pressure ultraviolet lamp. But it can also be used.
[0013]
In the oxidation method (d), it is preferable that the amount of ozone consumed in the water to be treated is at least twice that of DMSO, and the amount of hydrogen peroxide added to the water to be treated is at least twice that of DMSO. In addition, in the oxidation method (d), ozone may be added after hydrogen peroxide is added to the water to be treated, or hydrogen peroxide is added after ozone is added to the water to be treated. Alternatively, ozone and hydrogen peroxide may be added simultaneously to the water to be treated.
[0014]
【Example】
(Example)
Biological treatment of water to be treated having a dimethyl sulfoxide concentration of 300 mg / L was performed (biological oxidation treatment step). In this case, water to be treated was passed through a submerged filter bed biological treatment tank packed with a filler (granular carrier). The pH of the water to be treated in the tank was controlled in the range of 7.0 ± 0.5. The change with time of the dimethyl sulfoxide concentration in the treated water is shown in FIG.
[0015]
As shown in FIG. 1, microorganisms propagated around 20 days after the start of treatment and dimethyl sulfoxide can be treated. However, even after that, biological treatment becomes unstable due to load fluctuation, pH change of treated water, A part of dimethyl sulfoxide sometimes flowed into the treated water.
[0016]
Next, the treated water in the biological oxidation treatment step was treated by the following methods (a) to (d) (chemical oxidation treatment step).
(A) Method of adding sodium hypochlorite to the treated water of the biological oxidation treatment step (b) Method of adding hydrogen peroxide to the treated water of the biological oxidation treatment step (c) Biological oxidation treatment A method of adding hydrogen peroxide to the treated water in the process and irradiating with ultraviolet rays (d) A method of adding ozone and hydrogen peroxide to the treated water in the biological oxidation treatment process
Table 1 shows the treatment conditions and the dimethyl sulfoxide concentration in the treated water of the biological oxidation treatment step and the chemical oxidation treatment step. From Table 1, it was confirmed that according to the present invention, it is possible to always obtain good treated water having a low alkyl sulfoxide concentration by further treating the treated water in the biological oxidation treatment step in the chemical oxidation treatment step. . In this case, it is considered that in the chemical oxidation treatment step, the alkyl sulfoxide was completely decomposed into carbon dioxide gas and water, or at least decomposed into alkyl sulfonic acid.
[0018]
[Table 1]
Figure 0004430777
[0019]
【The invention's effect】
As described above, according to the present invention, when performing the processing of wastewater containing alkyl sulfoxide using biological treatment method, even if the unstable biological treatment due variations in the processing environment, a final processing can be alkyl sulfoxides in water to prevent the outflow, alkyl sulfoxide or al-methyl sulfide in the environment, it is possible to prevent the generation of odorous compounds such as methyl mercaptan.
[Brief description of the drawings]
BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a graph showing the change over time in the concentration of dimethyl sulfoxide in treated water in a biological oxidation treatment step in Examples.

Claims (4)

アルキルスルホキシドを含有する被処理水を生物処理する生物学的酸化処理工程の後に前記生物学的酸化処理工程の処理水に次亜塩素酸ナトリウムを添加して前記処理水を化学的に酸化処理する化学的酸化処理工程を備えたことを特徴とするアルキルスルホキシド含有排水処理方法。The treated water containing alkyl sulfoxide after biological oxidation process of biological treatment, the treated water chemically by addition of sodium hypochlorite in the treated water of the biological oxidation process alkyl sulfoxides containing wastewater treatment method characterized by having a higher oxidation process engineering for oxidization treatment. アルキルスルホキシドを含有する被処理水を生物処理する生物学的酸化処理工程の後に、前記生物学的酸化処理工程の処理水に過酸化水素を添加して前記処理水を化学的に酸化処理する化学的酸化処理工程を備えたことを特徴とするアルキルスルホキシド含有排水処理方法。Chemistry for chemically oxidizing the treated water by adding hydrogen peroxide to the treated water in the biological oxidation treatment step after the biological oxidation treatment step for biologically treating the water to be treated containing alkyl sulfoxide An alkyl sulfoxide-containing wastewater treatment method characterized by comprising a selective oxidation treatment step. アルキルスルホキシドを含有する被処理水を生物処理する生物学的酸化処理工程の後に、前記生物学的酸化処理工程の処理水に過酸化水素を添加するとともに、紫外線を照射して前記処理水を化学的に酸化処理する化学的酸化処理工程を備えたことを特徴とするアルキルスルホキシド含有排水処理方法。After the biological oxidation treatment step for biologically treating the water to be treated containing alkyl sulfoxide, hydrogen peroxide is added to the treatment water of the biological oxidation treatment step, and ultraviolet rays are irradiated to chemically treat the treated water. An alkyl sulfoxide-containing wastewater treatment method characterized by comprising a chemical oxidation treatment step for conducting an oxidation treatment. アルキルスルホキシドを含有する被処理水を生物処理する生物学的酸化処理工程の後に、前記生物学的酸化処理工程の処理水にオゾン及び過酸化水素を添加して前記処理水を化学的に酸化処理する化学的酸化処理工程を備えたことを特徴とするアルキルスルホキシド含有排水処理方法。After the biological oxidation treatment step for biologically treating the water to be treated containing alkyl sulfoxide, ozone and hydrogen peroxide are added to the treatment water in the biological oxidation treatment step to chemically oxidize the treated water. An alkyl sulfoxide-containing wastewater treatment method comprising a chemical oxidation treatment step.
JP2000071682A 2000-03-15 2000-03-15 Wastewater treatment method containing alkyl sulfoxide Expired - Fee Related JP4430777B2 (en)

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