JP4428741B2 - ガルバノミラーアクチュエータ - Google Patents

ガルバノミラーアクチュエータ Download PDF

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Publication number
JP4428741B2
JP4428741B2 JP26732698A JP26732698A JP4428741B2 JP 4428741 B2 JP4428741 B2 JP 4428741B2 JP 26732698 A JP26732698 A JP 26732698A JP 26732698 A JP26732698 A JP 26732698A JP 4428741 B2 JP4428741 B2 JP 4428741B2
Authority
JP
Japan
Prior art keywords
permanent magnet
bearing
air
mirror actuator
air bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP26732698A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000081588A5 (enExample
JP2000081588A (ja
Inventor
健志 廣瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP26732698A priority Critical patent/JP4428741B2/ja
Priority to US09/386,163 priority patent/US6249367B1/en
Publication of JP2000081588A publication Critical patent/JP2000081588A/ja
Publication of JP2000081588A5 publication Critical patent/JP2000081588A5/ja
Application granted granted Critical
Publication of JP4428741B2 publication Critical patent/JP4428741B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP26732698A 1998-09-04 1998-09-04 ガルバノミラーアクチュエータ Expired - Fee Related JP4428741B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP26732698A JP4428741B2 (ja) 1998-09-04 1998-09-04 ガルバノミラーアクチュエータ
US09/386,163 US6249367B1 (en) 1998-09-04 1999-08-31 Optical apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26732698A JP4428741B2 (ja) 1998-09-04 1998-09-04 ガルバノミラーアクチュエータ

Publications (3)

Publication Number Publication Date
JP2000081588A JP2000081588A (ja) 2000-03-21
JP2000081588A5 JP2000081588A5 (enExample) 2007-12-13
JP4428741B2 true JP4428741B2 (ja) 2010-03-10

Family

ID=17443275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26732698A Expired - Fee Related JP4428741B2 (ja) 1998-09-04 1998-09-04 ガルバノミラーアクチュエータ

Country Status (2)

Country Link
US (1) US6249367B1 (enExample)
JP (1) JP4428741B2 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29919989U1 (de) * 1999-11-15 2000-02-17 Leuze Electronic Gmbh + Co, 73277 Owen Optoelektronische Vorrichtung
JP2002075855A (ja) * 2000-06-14 2002-03-15 Canon Inc 自重補償装置およびこれを用いたステージ装置並びに露光装置およびそれを用いたデバイス製造方法
JP2002119075A (ja) * 2000-10-03 2002-04-19 Matsushita Electric Ind Co Ltd アクチュエータ装置
JP4680373B2 (ja) 2000-11-16 2011-05-11 オリンパス株式会社 ガルバノミラー
US7129601B2 (en) 2001-03-30 2006-10-31 Gsi Group Corporation Apparatus for controlled movement of an element
US7136547B2 (en) * 2001-03-30 2006-11-14 Gsi Group Corporation Method and apparatus for beam deflection
EP1543702A2 (en) * 2002-09-26 2005-06-22 Seiko Epson Corporation Drive mechanism
US8294712B2 (en) * 2003-09-19 2012-10-23 The Boeing Company Scalable method for rapidly detecting potential ground vehicle under cover using visualization of total occlusion footprint in point cloud population
US20080122424A1 (en) * 2005-01-24 2008-05-29 Yongming Zhang Integrated Sensor System Monitoring and Characterizing Lightning Events
US7342701B2 (en) * 2005-04-19 2008-03-11 Asml Holding N.V. Multiple illumination source exposure apparatus
JP4680133B2 (ja) * 2006-06-13 2011-05-11 住友重機械工業株式会社 ビームスキャナ
JP4727509B2 (ja) * 2006-06-13 2011-07-20 住友重機械工業株式会社 ビームスキャナ
JP4531022B2 (ja) * 2006-08-18 2010-08-25 住友重機械工業株式会社 ビームスキャナ
WO2008131930A1 (en) * 2007-04-25 2008-11-06 Carl Zeiss Smt Ag Mirror matrix for a microlithographic projection exposure apparatus
JP6402719B2 (ja) * 2013-11-05 2018-10-10 日本精工株式会社 力覚センサ
CN104660003B (zh) * 2015-02-02 2017-05-10 瑞声光电科技(常州)有限公司 扁平线性振动电机
CN105371763B (zh) * 2015-12-01 2017-09-19 中国科学院长春光学精密机械与物理研究所 一种大口径光学元件卧式电磁支撑装置
KR102046472B1 (ko) 2017-02-15 2019-11-19 삼성전기주식회사 손떨림 보정 반사모듈 및 이를 포함하는 카메라 모듈
JP6997370B2 (ja) * 2017-05-25 2022-01-17 ミツミ電機株式会社 カメラ用アクチュエータ、カメラモジュール、およびカメラ搭載装置
KR101892857B1 (ko) * 2017-06-12 2018-08-28 삼성전기주식회사 손떨림 보정 반사모듈 및 이를 포함하는 카메라 모듈
US11487127B2 (en) * 2019-10-23 2022-11-01 Microsoft Technology Licensing, Llc Magnetic seesaw scanner
CN110737064B (zh) * 2019-11-12 2025-06-20 无锡信乾承科技有限公司 角度调节机构
EP4075185A1 (en) * 2021-04-16 2022-10-19 Optotune AG Tiltable mirror device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4436260A (en) * 1981-12-21 1984-03-13 The United States Of America As Represented By The Secretary Of The Air Force Optical scanner for use in confined areas
DE69224645T2 (de) * 1992-11-26 1998-08-20 Oce Tech Bv Drehspiegelsystem
JPH08229759A (ja) * 1995-02-24 1996-09-10 Canon Inc 位置決め装置並びにデバイス製造装置及び方法
DE19611595B4 (de) * 1996-03-23 2004-02-05 BODENSEEWERK GERäTETECHNIK GMBH Suchkopf für zielverfolgende Flugkörper oder Geschosse

Also Published As

Publication number Publication date
JP2000081588A (ja) 2000-03-21
US6249367B1 (en) 2001-06-19

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