JP4426983B2 - Discharge tube - Google Patents

Discharge tube Download PDF

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JP4426983B2
JP4426983B2 JP2005035560A JP2005035560A JP4426983B2 JP 4426983 B2 JP4426983 B2 JP 4426983B2 JP 2005035560 A JP2005035560 A JP 2005035560A JP 2005035560 A JP2005035560 A JP 2005035560A JP 4426983 B2 JP4426983 B2 JP 4426983B2
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discharge
film
discharge tube
gas
vapor deposition
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JP2006222001A (en
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孝一 今井
陽一 松山
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Okaya Electric Industry Co Ltd
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Description

この発明は放電管に係り、特に、プロジェクターや自動車のメタルハライドランプ等の高圧放電ランプやガス調理器等の着火プラグに、点灯用又は着火用の定電圧を供給するためのスイッチングスパークギャップとして、或いは、サージ電圧を吸収するためのガスアレスタ(避雷管)として好適に使用できる放電管に関する。   The present invention relates to a discharge tube, in particular, as a switching spark gap for supplying a constant voltage for lighting or ignition to a high pressure discharge lamp such as a projector or a metal halide lamp of an automobile, or an ignition plug of a gas cooker, or The present invention relates to a discharge tube that can be suitably used as a gas arrester for absorbing surge voltage.

この種の放電管として、本出願人は、先に特開2003−7420号を提案した。この放電管60は、図4に示すように、両端が開口した絶縁材よりなる円筒状のケース部材62の両端開口部を、放電電極を兼ねた一対の蓋部材64,64で気密に封止することによって気密外囲器66を形成し、該気密外囲器66内に、所定の放電ガスを封入してなる。   As this type of discharge tube, the present applicant has previously proposed Japanese Patent Application Laid-Open No. 2003-7420. As shown in FIG. 4, the discharge tube 60 is hermetically sealed with a pair of lid members 64, 64 that also serve as discharge electrodes, at both ends of a cylindrical case member 62 made of an insulating material that opens at both ends. Thus, an airtight envelope 66 is formed, and a predetermined discharge gas is sealed in the airtight envelope 66.

上記蓋部材64は、気密外囲器66の中心に向けて大きく突き出た平面状の放電電極部68と、ケース部材62の端面に接する接合部70を備えており、両蓋部材64,64の放電電極部68,68間には、所定の放電間隙72が形成されている。
また、上記ケース部材62の内壁面74の円周方向に、微小放電間隙76を隔てて対向配置された一対のトリガ放電膜78,78が、複数組形成されている。一対のトリガ放電膜78,78の内、一方のトリガ放電膜78は、一方の放電電極部68と電気的に接続され、他方のトリガ放電膜78は、他方の放電電極部68と電気的に接続されている。
The lid member 64 includes a flat discharge electrode portion 68 that protrudes greatly toward the center of the hermetic envelope 66, and a joint portion 70 that contacts the end surface of the case member 62. A predetermined discharge gap 72 is formed between the discharge electrode portions 68 and 68.
A plurality of pairs of trigger discharge films 78 and 78 are formed in the circumferential direction of the inner wall surface 74 of the case member 62 so as to face each other with a minute discharge gap 76 therebetween. Of the pair of trigger discharge films 78, 78, one trigger discharge film 78 is electrically connected to one discharge electrode portion 68, and the other trigger discharge film 78 is electrically connected to the other discharge electrode portion 68. It is connected.

上記放電電極部68の表面には、放電開始電圧の安定に効果的なアルカリヨウ化物が含有された絶縁性の被膜80が形成されている。このアルカリヨウ化物としては、ヨウ化カリウム(KI)、ヨウ化ナトリウム(NaI)、ヨウ化セシウム(CsI)、ヨウ化ルビジウム(RbI)等のアルカリヨウ化物の単体又は混合物が該当する。
上記気密外囲器66内に封入する放電ガスとしては、例えば、アルゴン、ネオン、ヘリウム、キセノン等の希ガスあるいは窒素ガス等の不活性ガスの単体又は混合ガスが該当する。また、希ガスあるいは不活性ガスの単体又は混合ガスと、H等の負極性ガスとの混合ガスが該当する。
On the surface of the discharge electrode portion 68, an insulating film 80 containing an alkali iodide effective for stabilizing the discharge start voltage is formed. Examples of the alkali iodide include simple substances or mixtures of alkali iodides such as potassium iodide (KI), sodium iodide (NaI), cesium iodide (CsI), and rubidium iodide (RbI).
As the discharge gas sealed in the hermetic envelope 66, for example, a rare gas such as argon, neon, helium, xenon, or an inert gas such as nitrogen gas or a mixed gas is applicable. Also, a single or mixed gas of a rare gas or an inert gas, a mixed gas of negative polarity gas such as H 2 corresponds.

上記構成を備えた放電管60の放電電極部68,68間に、当該放電管60の放電開始電圧以上の電圧が印加されると、トリガ放電膜78,78間の微小放電間隙76に電界が集中し、これにより微小放電間隙76に電子が放出されてトリガ放電としての沿面コロナ放電が発生する。次いで、この沿面コロナ放電は、電子のプライミング効果によってグロー放電へと移行する。そして、このグロー放電が放電電極部68,68間の放電間隙72へと転移し、主放電としてのアーク放電に移行するのである。
特開2003−7420号
When a voltage equal to or higher than the discharge start voltage of the discharge tube 60 is applied between the discharge electrode portions 68, 68 of the discharge tube 60 having the above-described configuration, an electric field is generated in the minute discharge gap 76 between the trigger discharge films 78, 78. As a result, electrons are emitted into the minute discharge gap 76, and creeping corona discharge as a trigger discharge is generated. Next, the creeping corona discharge shifts to glow discharge due to an electron priming effect. Then, the glow discharge is transferred to the discharge gap 72 between the discharge electrode portions 68 and 68, and is transferred to arc discharge as the main discharge.
JP 2003-7420 A

ところで上記放電管60を、例えば寿命試験等において繰り返し動作させると、放電時の衝撃の受けて、放電開始電圧の安定に効果的なアルカリヨウ化物の含有された上記被膜80及び放電電極部68がスパッタされる結果、初期放電開始電圧が上昇して、初期放電遅れを生じていた。
また、上記放電電極部68は微量な不純ガスを吸着していることがあり、この場合、放電時の衝撃により上記不純ガスが放出され、放電ガス組成に悪影響を与えたり、被膜80の仕事関数を変化させることにより、初期放電開始電圧が上昇して、初期放電遅れを生じることがあった。
By the way, when the discharge tube 60 is repeatedly operated in, for example, a life test, the coating 80 and the discharge electrode portion 68 containing the alkali iodide that is effective for stabilizing the discharge start voltage under the impact of discharge are obtained. As a result of the sputtering, the initial discharge start voltage increased and an initial discharge delay occurred.
In addition, the discharge electrode portion 68 may adsorb a small amount of impure gas.In this case, the impure gas is released due to an impact during discharge, which adversely affects the discharge gas composition, or the work function of the coating 80. As a result of the change, the initial discharge start voltage increases and an initial discharge delay may occur.

この発明は、従来の上記問題に鑑みてなされたものであり、その目的とするところは、初期放電開始電圧の上昇を防止でき、初期放電遅れを生じることのない長寿命な放電管を実現することにある。   The present invention has been made in view of the above-described conventional problems, and an object of the present invention is to realize a long-life discharge tube that can prevent an increase in the initial discharge start voltage and does not cause an initial discharge delay. There is.

本発明者らは、放電電極の表面に形成する被膜について種々検討を試みた結果、放電電極の表面に、耐スパッタ性の高いチタン(Ti)蒸着膜と、不純ガスの放出を抑制すると共に、放電電極及びチタン蒸着膜の耐スパッタ性を向上させる酸化膜と、放電開始遅れ抑制効果を有する臭化セシウム(CsBr)を含有する被膜を形成した場合に、初期放電開始電圧の上昇を効果的に防止できることを見出し、本発明を完成するに至ったものである。
すなわち、本発明に係る放電型サージ吸収素子は、複数の放電電極を放電間隙を隔てて配置すると共に、これを放電ガスと共に気密外囲器内に封入してなる放電管において、上記放電電極の表面にチタン蒸着膜を形成すると共に、該チタン蒸着膜の表面に酸化膜を形成し、さらに、上記酸化膜の表面に臭化セシウムが含有された被膜を形成したことを特徴とする。
上記チタン蒸着膜の膜厚は1〜2μm、酸化膜の膜厚は5〜50nmと成すのが好ましい。
As a result of various investigations on the coating film formed on the surface of the discharge electrode, the present inventors suppressed the release of impure gas and a titanium (Ti) vapor deposition film with high sputtering resistance on the surface of the discharge electrode. When an oxide film that improves the sputter resistance of the discharge electrode and the titanium deposited film and a film containing cesium bromide (CsBr) having a discharge start delay suppressing effect are formed, the initial discharge start voltage is effectively increased. The present inventors have found that this can be prevented and have completed the present invention.
That is, the discharge type surge absorbing element according to the present invention is a discharge tube in which a plurality of discharge electrodes are arranged with a discharge gap and sealed together with a discharge gas in an airtight envelope. A titanium vapor deposition film is formed on the surface, an oxide film is formed on the surface of the titanium vapor deposition film, and a film containing cesium bromide is further formed on the surface of the oxide film.
The thickness of the titanium deposited film is preferably 1 to 2 μm, and the thickness of the oxide film is preferably 5 to 50 nm.

本発明に係る放電管にあっては、放電電極の表面にチタン蒸着膜を形成すると共に、該チタン蒸着膜の表面に酸化膜を形成し、さらに、上記酸化膜の表面に臭化セシウムが含有された被膜を形成したことにより、初期放電開始電圧の上昇を防止でき、初期放電遅れを生じることのない長寿命な放電管を実現することができる。   In the discharge tube according to the present invention, a titanium vapor deposition film is formed on the surface of the discharge electrode, an oxide film is formed on the surface of the titanium vapor deposition film, and further, the surface of the oxide film contains cesium bromide. By forming the coated film, it is possible to prevent a rise in the initial discharge start voltage and to realize a long-life discharge tube that does not cause an initial discharge delay.

本発明に係る放電管10は、図1及び図2に示すように、両端が開口した絶縁材としてのセラミックよりなる円筒状のケース部材12の両端開口部を、放電電極を兼ねた一対の蓋部材14,14で気密に封止することによって気密外囲器16を形成してなる。   As shown in FIGS. 1 and 2, a discharge tube 10 according to the present invention includes a pair of lids that serve as discharge electrodes at both ends of a cylindrical case member 12 made of ceramic as an insulating material having both ends open. The hermetic envelope 16 is formed by hermetically sealing with the members 14 and 14.

上記蓋部材14は、気密外囲器16の中心に向けて大きく突き出た平面状の放電電極部18と、ケース部材12の端面に接する接合部20を備えており、両蓋部材14,14の放電電極部18,18間には、所定の放電間隙22が形成されている。
放電電極部18と接合部20を備えた上記蓋部材14は、無酸素銅や、無酸素銅にジルコニウム(Zr)を含有させたジルコニウム銅で構成されている。尚、ケース部材12の端面と蓋部材14の接合部20とは、銀ろう等のシール材(図示せず)を介して気密封止されている。
The lid member 14 includes a planar discharge electrode portion 18 projecting greatly toward the center of the hermetic envelope 16, and a joint portion 20 in contact with the end surface of the case member 12. A predetermined discharge gap 22 is formed between the discharge electrode portions 18 and 18.
The lid member 14 provided with the discharge electrode portion 18 and the joint portion 20 is made of oxygen-free copper or zirconium copper containing oxygen-free copper containing zirconium (Zr). Note that the end face of the case member 12 and the joint portion 20 of the lid member 14 are hermetically sealed through a sealing material (not shown) such as silver solder.

また、上記ケース部材12の内壁面24には、その両端が、放電電極を兼ねた上記蓋部材14,14と微小放電間隙26を隔てて配置された線状のトリガ放電膜28が複数形成されている。図1及び図2においては、トリガ放電膜28を、ケース部材12の内壁面24の円周方向に、45度間隔で8本形成した場合が例示されている。
上記トリガ放電膜28は、カーボン系材料等の導電性材料で構成されている。このトリガ放電膜28は、例えば、カーボン系材料より成る芯材を擦り付けることにより形成することができる。
In addition, a plurality of linear trigger discharge films 28 are formed on the inner wall surface 24 of the case member 12 so that both ends of the case member 12 are spaced apart from the lid members 14 and 14 that also serve as discharge electrodes and a minute discharge gap 26. ing. 1 and 2 exemplify the case where eight trigger discharge films 28 are formed at intervals of 45 degrees in the circumferential direction of the inner wall surface 24 of the case member 12.
The trigger discharge film 28 is made of a conductive material such as a carbon-based material. The trigger discharge film 28 can be formed, for example, by rubbing a core material made of a carbon-based material.

上記放電電極部18の表面には、チタン(Ti)蒸着膜30が形成されると共に、該チタン蒸着膜30の表面に酸化膜31が形成され、さらに、上記酸化膜31の表面に、臭化セシウム(CsBr)が含有された被膜32が形成されている。
上記チタン蒸着膜30は耐スパッタ性が高いものである。また、チタン蒸着膜30の表面に形成された上記酸化膜31は、放電電極部18が吸着している不純ガスの放出を抑制する効果を奏すると共に、放電電極部18及びチタン蒸着膜30の耐スパッタ性を向上させる効果を発揮するものである。さらに、上記被膜32に含有される臭化セシウムは、電子放出特性に優れているため、放電開始遅れ抑制効果を有するものである。
上記チタン蒸着膜30の膜厚は、1〜2μm、酸化膜31の膜厚は、5〜50nmと成すのが、初期放電開始電圧の上昇を効果的に防止する上で好ましい。
上記臭化セシウムが含有された被膜32は、臭化セシウムの粉末を、珪酸ナトリウム溶液と純水よりなるバインダーに添加したものを、チタン蒸着膜30表面に塗布することによって形成することができる。
この場合、臭化セシウムが0.01〜70重量%、バインダーが99.99〜30重量%の配合割合で混合される。また、バインダー中の珪酸ナトリウム溶液と純水との配合割合は、珪酸ナトリウム溶液が0.01〜70重量%、純水が99.99〜30重量%の配合割合で混合される。
A titanium (Ti) vapor deposition film 30 is formed on the surface of the discharge electrode portion 18, an oxide film 31 is formed on the surface of the titanium vapor deposition film 30, and a bromide film is further formed on the surface of the oxide film 31. A film 32 containing cesium (CsBr) is formed.
The titanium vapor-deposited film 30 has high sputter resistance. In addition, the oxide film 31 formed on the surface of the titanium vapor deposition film 30 has an effect of suppressing the release of impure gas adsorbed by the discharge electrode portion 18, and the resistance to the discharge electrode portion 18 and the titanium vapor deposition film 30. The effect of improving the sputtering property is exhibited. Furthermore, since the cesium bromide contained in the coating film 32 is excellent in electron emission characteristics, it has an effect of suppressing discharge start delay.
The thickness of the titanium vapor deposition film 30 is preferably 1 to 2 μm, and the thickness of the oxide film 31 is preferably 5 to 50 nm in order to effectively prevent an increase in the initial discharge start voltage.
The coating 32 containing cesium bromide can be formed by applying a cesium bromide powder added to a binder made of a sodium silicate solution and pure water to the surface of the titanium vapor deposition film 30.
In this case, cesium bromide is mixed at a blending ratio of 0.01 to 70% by weight and binder is 99.99 to 30% by weight. The blending ratio of the sodium silicate solution and pure water in the binder is such that the sodium silicate solution is 0.01 to 70% by weight and the pure water is 99.99 to 30% by weight.

上記気密外囲器16内には、所定の放電ガスが封入されている。この放電ガスとしては、例えば、アルゴン、ネオン、ヘリウム、キセノン等の希ガスあるいは窒素ガス等の不活性ガスの単体又は混合ガスが該当する。また、希ガスあるいは不活性ガスの単体又は混合ガスと、H等の負極性ガスとの混合ガスが該当する。 A predetermined discharge gas is sealed in the hermetic envelope 16. As this discharge gas, for example, a rare gas such as argon, neon, helium, or xenon, or an inert gas such as nitrogen gas or a mixed gas is applicable. Also, a single or mixed gas of a rare gas or an inert gas, a mixed gas of negative polarity gas such as H 2 corresponds.

本発明の上記放電管10にあっては、放電電極を兼ねた上記一対の蓋部材14,14間に、当該放電管10の放電開始電圧以上の電圧が印加されると、トリガ放電膜28の両端と蓋部材14,14間の微小放電間隙26に電界が集中し、これにより微小放電間隙26に電子が放出されてトリガ放電としての沿面コロナ放電が発生する。次いで、この沿面コロナ放電は、電子のプライミング効果によってグロー放電へと移行する。そして、このグロー放電が放電電極部18,18間の放電間隙22へと転移し、主放電としてのアーク放電に移行するのである。   In the discharge tube 10 of the present invention, when a voltage equal to or higher than the discharge start voltage of the discharge tube 10 is applied between the pair of lid members 14 and 14 also serving as discharge electrodes, the trigger discharge film 28 The electric field concentrates in the minute discharge gap 26 between the both ends and the lid members 14 and 14, whereby electrons are emitted into the minute discharge gap 26 to generate creeping corona discharge as a trigger discharge. Next, this creeping corona discharge shifts to glow discharge due to an electron priming effect. Then, the glow discharge is transferred to the discharge gap 22 between the discharge electrode portions 18 and 18, and the arc discharge as the main discharge is transferred.

而して、本発明の放電管10にあっては、放電電極部18の表面に、耐スパッタ性が高いチタン蒸着膜30を形成すると共に、該チタン蒸着膜30の表面に、放電電極部18の不純ガスの放出を抑制すると共に、放電電極部18及びチタン蒸着膜30の耐スパッタ性を向上させる酸化膜31を形成し、さらに、上記酸化膜31の表面に、電子放出特性に優れ、放電開始遅れ抑制効果を有する臭化セシウムが含有された被膜32を形成したことにより、初期放電開始電圧の上昇を防止でき、初期放電遅れを生じることのない長寿命な放電管10を実現することができる。
尚、初期放電開始電圧は、放電管を繰り返し動作させた場合における初回の放電開始電圧のことをいい、この初期放電開始電圧に続く2回目以降の放電開始電圧を追随放電開始電圧という。
Thus, in the discharge tube 10 of the present invention, the titanium vapor deposition film 30 having high sputtering resistance is formed on the surface of the discharge electrode portion 18, and the discharge electrode portion 18 is formed on the surface of the titanium vapor deposition film 30. An oxide film 31 that suppresses the release of impurity gases and improves the sputtering resistance of the discharge electrode portion 18 and the titanium vapor deposition film 30 is formed. Further, the surface of the oxide film 31 has excellent electron emission characteristics and discharge. By forming the coating 32 containing cesium bromide having the effect of suppressing the start delay, it is possible to prevent the increase of the initial discharge start voltage and to realize the long-life discharge tube 10 that does not cause the initial discharge delay. it can.
The initial discharge start voltage refers to the first discharge start voltage when the discharge tube is repeatedly operated, and the second and subsequent discharge start voltages subsequent to the initial discharge start voltage are referred to as follow-up discharge start voltages.

図3は、上記チタン蒸着膜30(膜厚は1μm)、酸化膜31(膜厚は50nm)、及び臭化セシウムが含有された被膜32を形成して成る本発明の放電管10と、比較例としてヨウ化カリウム(KI)の含有された被膜80を放電電極部68の表面に形成した従来の放電管60、さらに比較例として臭化セシウムを含有する被膜を放電電極部の表面に形成した放電管における、放電回数と初期放電開始電圧との関係を示すグラフである。これら放電管は、何れも放電開始電圧が800Vに設定されているものを用いており、この場合、初期放電開始電圧が1000Vを越えると使用に適さないものとなる。
図3のグラフに示される通り、従来の放電管60の場合(図3のグラフB)には、放電回数が約10万回程度で初期放電開始電圧が1000Vを越えて使用に適さなくなっている。また、臭化セシウムを含有する被膜を放電電極部の表面に形成した放電管の場合(図3のグラフC)は、従来の放電管60よりは初期放電開始電圧の上昇は抑制できるものの、初期放電開始電圧は徐々に上昇し、放電回数が約45万回程度で初期放電開始電圧が1000Vを越えて使用に適さなくなっている。
これに対し、本発明の放電管10の場合(図3のグラフA)には、放電回数が50万回となっても初期放電開始電圧が殆ど一定であり、従って放電遅れを生じることがなく長寿命化が実現されている。
FIG. 3 shows a comparison with the discharge tube 10 of the present invention in which the titanium vapor deposition film 30 (film thickness is 1 μm), the oxide film 31 (film thickness is 50 nm), and the coating film 32 containing cesium bromide. As an example, a conventional discharge tube 60 in which a film 80 containing potassium iodide (KI) is formed on the surface of the discharge electrode portion 68, and as a comparative example, a film containing cesium bromide is formed on the surface of the discharge electrode portion 68. It is a graph which shows the relationship between the frequency | count of discharge and the initial stage discharge start voltage in a discharge tube. Any of these discharge tubes is used in which the discharge start voltage is set to 800 V. In this case, if the initial discharge start voltage exceeds 1000 V, it becomes unsuitable for use.
As shown in the graph of FIG. 3, in the case of the conventional discharge tube 60 (graph B of FIG. 3), the number of discharges is about 100,000 times and the initial discharge start voltage exceeds 1000 V, making it unsuitable for use. . Further, in the case of a discharge tube in which a coating containing cesium bromide is formed on the surface of the discharge electrode portion (graph C in FIG. 3), the initial discharge start voltage can be suppressed more than the conventional discharge tube 60, but the initial The discharge start voltage gradually increases, the number of discharges is about 450,000 times, and the initial discharge start voltage exceeds 1000 V, making it unsuitable for use.
On the other hand, in the case of the discharge tube 10 of the present invention (graph A in FIG. 3), the initial discharge start voltage is almost constant even when the number of discharges reaches 500,000, so that no discharge delay occurs. Long life has been achieved.

本発明に係る放電管を示す概略断面図である。It is a schematic sectional drawing which shows the discharge tube which concerns on this invention. 図1のA−A概略断面図である。It is an AA schematic sectional drawing of FIG. 本発明に係る放電管と比較例の放電管における、放電回数と初期放電開始電圧との関係を示すグラフである。It is a graph which shows the relationship between the frequency | count of discharge and the initial stage discharge start voltage in the discharge tube which concerns on this invention, and the discharge tube of a comparative example. 従来の放電管を示す断面図である。It is sectional drawing which shows the conventional discharge tube.

符号の説明Explanation of symbols

10 放電管
12 ケース部材
14 蓋部材
16 気密外囲器
18 放電電極部
22 放電間隙
26 微小放電間隙
28 トリガ放電膜
30 チタン蒸着膜
31 酸化膜
32 被膜
10 discharge tube
12 Case material
14 Lid member
16 Airtight envelope
18 Discharge electrode
22 Discharge gap
26 Micro discharge gap
28 Trigger discharge membrane
30 Titanium deposited film
31 Oxide film
32 coating

Claims (2)

複数の放電電極を放電間隙を隔てて配置すると共に、これを放電ガスと共に気密外囲器内に封入してなる放電管において、上記放電電極の表面にチタン蒸着膜を形成すると共に、該チタン蒸着膜の表面に酸化膜を形成し、さらに、上記酸化膜の表面に臭化セシウムが含有された被膜を形成したことを特徴とする放電管。   In a discharge tube in which a plurality of discharge electrodes are arranged with a discharge gap and sealed together with a discharge gas in an airtight envelope, a titanium vapor deposition film is formed on the surface of the discharge electrode, and the titanium vapor deposition is performed. A discharge tube comprising an oxide film formed on a surface of the film, and a film containing cesium bromide formed on the surface of the oxide film. 上記チタン蒸着膜の膜厚が1〜2μm、酸化膜の膜厚が5〜50nmと成されていることを特徴とする請求項1に記載の放電管。



2. The discharge tube according to claim 1, wherein the titanium vapor deposition film has a thickness of 1 to 2 [mu] m and the oxide film has a thickness of 5 to 50 nm.



JP2005035560A 2005-02-14 2005-02-14 Discharge tube Active JP4426983B2 (en)

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JP4426983B2 true JP4426983B2 (en) 2010-03-03

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